JP7301803B2 - Conveyor - Google Patents

Description

Embodiments of the present invention relate to transport devices.

In the manufacture of semiconductor devices, after performing a predetermined semiconductor device forming process on a semiconductor wafer, the semiconductor wafer is subjected to an annular frame (dicing frame) having an opening with a diameter larger than that of the semiconductor wafer using an adhesive member. ) in the opening. A semiconductor wafer fixed to an annular frame is singulated into individual chips by a predetermined dicing process.

Conventionally, in the dicing process, dicing has been performed using a dedicated blade dicer. Recently, however, dicing using various techniques such as plasma etching has been studied.

Japanese Patent No. 3401432

A problem to be solved by the present invention is to provide a conveying device capable of conveying various articles.

A transport apparatus according to an embodiment includes a first side wall having a first storage shelf that can store a substrate, and a second side wall that faces the first storage shelf and has a second storage shelf that can store a substrate. A third side wall having a third storage shelf capable of accommodating an annular frame capable of loading/unloading the substrate from the cassette and fixing the substrate to the opening using an adhesive member; a fourth side wall having a fourth storage shelf; 1 supporting portion, a second supporting portion provided on the plate-like member and separated from the first supporting portion by a first distance _L1 in the first direction, and the first supporting portion on the plate-like member and a third support provided between and the second support, and between the third support and the second support on the plate member, a second distance L in the first direction from the third support and a fourth supporting portion spaced apart by ₂ , where L ₂ <d<L ₁ , where d is the diameter of the substrate.

4 is a schematic top view of the substrate and the annular frame of the first embodiment; FIG. It is a schematic diagram of the conveying apparatus of 1st Embodiment. FIG. 5 is a schematic side view of another aspect of the conveying device of the first embodiment; It is a model front view of the 1st cassette of 1st Embodiment. It is a model top view which shows the positional relationship of the conveying apparatus in 1st Embodiment, and a 1st cassette. FIG. 4 is a schematic front view of a second cassette of the first embodiment; It is a model top view which shows the positional relationship of the conveying apparatus in 1st Embodiment, and a 2nd cassette. It is a schematic diagram of the conveying apparatus of 2nd Embodiment. It is a model top view which shows the positional relationship of the conveying apparatus in 2nd Embodiment, and a 1st cassette. It is a model top view which shows the positional relationship of the conveying apparatus in 2nd Embodiment, and a 2nd cassette.

Embodiments of the present invention will be described below with reference to the drawings. In addition, in the following description, the same reference numerals may be given to the same or similar members. In addition, the description of members and the like that have already been described may be omitted as appropriate.

In this specification, in order to indicate the positional relationship of components, etc., the upward direction of the drawing is described as "up", and the downward direction of the drawing is described as "down". In this specification, the concepts of "up" and "down" do not necessarily indicate the relationship with the direction of gravity.

(First embodiment)
The conveying apparatus of this embodiment has a first side wall having a first storage shelf that can store substrates, and a second side wall that faces the first storage shelf and has a second storage shelf that can store substrates. A third side wall having a third storage shelf capable of accommodating an annular frame capable of loading/unloading a substrate from one cassette and fixing the substrate to the opening using an adhesive member, and facing the third sidewall and accommodating the annular frame. a fourth side wall having a fourth storage shelf; a first support, a second support provided on the plate-like member and spaced apart from the first support by a first distance _L1 in the first direction, and a first support on the plate-like member a third supporting portion provided between the portion and the second supporting portion; and a second distance in the first direction from the third supporting portion on the plate-like member between the third supporting portion and the second supporting portion. and a fourth support portion spaced apart by L ₂ , where L ₂ <d<L ₁ where d is the diameter of the substrate.

FIG. 1 is a schematic top view of the substrate W and the annular frame F of this embodiment.

FIG. 1(a) is a schematic top view of the substrate W of this embodiment.

The substrate W is, for example, a Si (silicon) wafer, a SiC (silicon carbide) wafer, a GaAs (gallium arsenide) wafer, a GaN (gallium nitride) wafer, or the like. The substrate W may be provided with an orientation flat O indicating the crystal orientation. The diameter of the substrate W in the direction perpendicular to the orientation flat O is d ₁ , and the diameter of the substrate W in the direction parallel to the orientation flat O is d ₂ .

FIG. 1(b) is a schematic top view of the annular frame F of this embodiment.

The annular frame F has an opening P. A substrate W is fixed inside the opening P using an adhesive member T. As shown in FIG. The adhesive member T is used to fix each chip after being singulated by dicing.

The conveying apparatus 100 of this embodiment includes the substrate W shown in FIG. It is used for transportation of

Here, an X direction, a Y direction that perpendicularly intersects the X direction, and a Z direction that perpendicularly intersects the X and Y directions are defined. In FIG. 1A, the substrate W is illustrated on the assumption that the substrate surface of the substrate W is parallel to the XY plane and the orientation flat O is parallel to the X direction. In addition, in FIG. 1B, the annular frame F and the substrate W are illustrated on the assumption that the plane of the annular frame F is parallel to the XY plane and the orientation flat O is arranged parallel to the X direction. ing.

Note that the X direction is an example of the second direction, and the Y direction is an example of the first direction. Also, the Z direction is, for example, the vertical direction.

FIG. 2 is a schematic diagram of the conveying device 100 of this embodiment. FIG. 2A is a schematic top view of the conveying device 100 of this embodiment. FIG. 2B is a schematic side view of the conveying device 100 of this embodiment. In addition, in FIG. 2(a), the substrate W, the adhesive member T, the annular frame F, and the opening P shown in FIG. 1(b) are all shown by dotted lines.

The conveying device 100 has a plate member 40 . In FIG. 2A, the plate-like member 40 is illustrated such that the longitudinal direction of the plate-like member 40 is parallel to the Y-direction, in other words, the plate-like member 40 extends in the Y-direction.

The plate member 40 is made of, for example, a metal material such as Cu (copper), Al (aluminum), Ag (silver), or Au (gold), or a resin material such as epoxy resin.

The first support portion 42 is provided on the plate member 40 . In FIGS. 2(a) and 2(b), a first support portion 42a and a first support portion 42b as the first support portion 42 are provided apart from each other in the X direction. The first support portion 42 is used for supporting the annular frame F. As shown in FIG. The first support portion 42 is, for example, a support pin. 2A and 2B, a plurality of first support portions 42a and a plurality of first support portions 42b are illustrated as the first support portion 42. As shown in FIG. However, the form of the first support portion 42 is not particularly limited.

The second support portion 44 is provided on the plate member 40 so as to be separated from the first support portion 42 by a first distance _L1 in the Y direction. In FIGS. 2(a) and 2(b), the second support portion 44a and the second support portion 44b are spaced apart from each other in the X direction. The second support portion 44 is used to support the annular frame F. As shown in FIG. The second support portion 44 is, for example, a support pin. 2A and 2B, a plurality of second support portions 44a and 44b are illustrated as the second support portions 44. As shown in FIG. However, for example, a single planar second support portion 44 extending in the X direction may be provided, and the form of the second support portion 44 is not particularly limited.

The third support portion 46 is provided on the plate member 40 . The third support portion 46 is provided between the first support portion 42 and the second support portion 44 in the Y direction. In FIGS. 2(a) and 2(b), a third support portion 46a and a third support portion 46b as the third support portion 46 are provided apart from each other in the X direction. The third support part 46 is used for supporting the substrate W. As shown in FIG. The third support portion 46 is, for example, a support pin. 2(a) and 2(b), as the third support portion 46, a plurality of third support portions 46a and a plurality of third support portions 46b are illustrated. However, for example, a single planar third support portion 46 extending in the X direction may be provided, and the form of the third support portion 46 is not particularly limited.

The fourth support portion 48 is provided on the plate member 40 . The fourth support portion 48 is provided between the third support portion 46 and the second support portion 44 in the Y direction and separated from the third support portion 46 by a second distance _L2 in the Y direction. 2(a) and 2(b), a fourth support portion 48a and a fourth support portion 48b as the fourth support portion 48 are provided apart from each other in the X direction. The fourth support part 48 is used for supporting the substrate W. As shown in FIG. The fourth support portion 48 is, for example, a support pin. 2(a) and 2(b), as the fourth support portion 48, a plurality of fourth support portions 48a and a plurality of fourth support portions 48b are illustrated. However, for example, a single planar fourth support portion 48 extending in the X direction may be provided, and the form of the fourth support portion 48 is not particularly limited.

The conveying device 100 is used by being connected to, for example, a driving unit (not shown). The substrate W or the annular frame F supported by the conveying device 100 is transported to a semiconductor manufacturing device or the like (not shown) by moving a drive unit (not shown) or the like.

When the diameter of the opening P is L ₄ and the diameter of the annular frame is L ₅ , it is preferable that L ₄ <L ₁ <L ₅ .

It is preferable that L ₂ <d<L ₁ when the diameter of the substrate W is d. where d is _d1 or _d2 .

The height _h3 of the third support portion 46 and the height _h4 of the fourth support portion 48 are equal to or less than the height _h1 of the first support portion 42 and the height _h2 of the second support portion 44. is preferred. The height _h3 of the third support portion 46 and the height _h4 of the fourth support portion 48 are equal to the height _h1 of the first support portion 42 and the height _h2 of the second support portion 44. I don't mind.

FIG. 3 is a schematic side view of the conveying device 110 of another aspect of this embodiment. In the conveying device 110 , a first support portion 42 and a second support portion 44 are provided under the plate member 40 . Here, the first support part 42 and the second support part 44 have openings (not shown), and can support articles by suction such as vacuum suction using the openings. As shown in FIG. 3A, the substrate W is supported by a third support portion 46 and a fourth support portion 48. As shown in FIG. On the other hand, as shown in FIG. 3B, the annular frame F to which the substrate W is fixed by the adhesive member T is supported by suction such as vacuum suction using the first support portion 42 and the second support portion 44. . In this case, the adhesive member T bends in the direction opposite to the Z direction, and the substrate W may be supported at a position displaced from the annular frame F in the direction opposite to the Z direction.

FIG. 4 is a schematic front view of the first cassette 60 of this embodiment. FIG. 5 is a schematic top view showing the positional relationship between the conveying device 100 and the first cassette 60 in this embodiment.

The first cassette 60 will be described with reference to FIGS. 4 and 5. FIG.

The 1st cassette 60 is a cassette which accommodates the board|substrate W. As shown in FIG. The first cassette 60 has a first side wall 62 , a second side wall 66 , a first ceiling portion 70 and a first bottom portion 72 . The first side wall 62 has a first accommodation shelf 64 in which the substrate W can be accommodated. FIG. 4 shows a first storage shelf 64a, a first storage shelf 64b, and a first storage shelf 64c as the first storage shelf 64. As shown in FIG. The second side wall 66 is provided facing the first side wall 62 . The second side wall 66 has a second accommodation shelf 68 in which the substrate W can be accommodated. FIG. 4 illustrates a second storage shelf 68a, a second storage shelf 68b, and a second storage shelf 68c as the second storage shelf 68. As shown in FIG. The substrates W _a as the substrates W are accommodated on the first accommodation shelf 64a and the second accommodation shelf 66a so that the substrate surfaces are parallel to the XY plane. The substrate _Wb as the substrate W is accommodated on the first accommodation shelf 64b and the second accommodation shelf 66b so that the substrate surface is parallel to the XY plane. A substrate _Wc as the substrate W is accommodated on the first accommodation shelf 64c and the second accommodation shelf 66c so that the substrate surface is parallel to the XY plane.

The first ceiling portion 70 is connected to the upper ends of the first side wall 62 and the upper ends of the second side walls 66 . The first bottom portion 72 is connected to the lower end of the first side wall 62 and the lower end of the second side wall 66 .

A first opening 77 is formed between the first side end 63 a of the first side wall 62 and the third side end 67 a of the second side wall 66 . A second opening 78 is formed between the second side end 63b of the first side wall 62 and the fourth side end 67b of the second side wall 66 .

A first locking portion 74 is provided on each of the first storage shelves 64 . In FIG. 4, a first locking portion 74a, a first locking portion 74b, and a first locking portion 74c as the first locking portion 74 are illustrated. A second locking portion 76 is provided on each of the second storage shelves 68 . In FIG. 4, a second locking portion 76a, a second locking portion 76b, and a second locking portion 76c as the second locking portion 76 are illustrated.

In FIG. 5, the substrate W _c , the first storage shelf 64c, the second storage shelf 68c, the first locking portion 74c and the second locking portion 76c are illustrated. The first locking portion 74 and the second locking portion 76 prevent the substrate W from jumping out of the first cassette 60 through the second opening 78 .

For example, when unloading the substrate _Wc from the first cassette 60, as shown in FIG. 4, the plate member 40 of the transfer device 100 is inserted between the substrate _Wb and the substrate _Wc . Here, the plate-like member 40 is inserted so that the third support portion 46 and the fourth support portion 48 are arranged below the substrate _Wc , as shown in FIG.

At this time, for example, the portion of the plate member 40 having the second support portion 44 protrudes from the second opening 78 to the outside of the first cassette 60 . For example, when the length of the first side wall 62 or the second side wall 66 in the Y direction is _L3 , _L3 < _L1 . If the length of the first side wall 62 or the second side wall 66 in the Y direction is sufficiently long, and L ₃ >L ₁ , the plate-like member 40 will move from the second opening 78 to the first cassette 60 . may not protrude outside the

Next, when the plate-like member 40 is moved in the Z direction, the substrate _Wc is supported by the third support portion 46 and the fourth support portion 48 . Next, when the plate member 40 is moved in the direction opposite to the Y direction, the substrate _Wc is unloaded from the first cassette 60 . The substrate _Wc is loaded into the first cassette 60 by performing the above steps in reverse. Thereby, the substrate W can be carried in and out of the first cassette 60 using the transport device 100 .

4 and 5, as described above, the first cassette 60 accommodates three substrates W, but the number of substrates W accommodated in the first cassette 60 is particularly limited. isn't it.

FIG. 6 is a schematic front view of the second cassette 80 of this embodiment. FIG. 7 is a schematic top view showing the positional relationship between the conveying device 100 and the second cassette 80 in this embodiment.

The second cassette 80 will be described with reference to FIGS. 6 and 7. FIG.

The second cassette 80 is a cassette that accommodates the annular frame F or the annular frame F to which the substrate W is fixed inside the opening P using the adhesive member T. As shown in FIG.

The second cassette 80 has a third side wall 82 , a fourth side wall 86 , a second ceiling portion 90 and a second bottom portion 92 . The third side wall 82 has a third accommodation shelf 84 in which the annular frame F can be accommodated. FIG. 6 illustrates a third storage shelf 84a, a third storage shelf 84b, and a third storage shelf 84c as the third storage shelf 84. As shown in FIG. The fourth side wall 86 is provided facing the third side wall 82 . The fourth side wall 86 has a fourth accommodation shelf 88 in which the annular frame F can be accommodated. FIG. 6 illustrates a fourth storage shelf 88a, a fourth storage shelf 88b, and a fourth storage shelf 88c as the fourth storage shelf 88. As shown in FIG. An annular frame Fa as the annular frame _F is accommodated on the third accommodation shelf 84a and the fourth accommodation shelf 86a so that the substrate surface is parallel to the XY plane. An annular frame _Fb as the annular frame F is accommodated on the third accommodation shelf 84b and the fourth accommodation shelf 86b so that the substrate surface is parallel to the XY plane. An annular frame _Fc as the annular frame F is accommodated on the third accommodation shelf 84c and the fourth accommodation shelf 86c so that the substrate surface is parallel to the XY plane.

The second ceiling portion 90 is connected to the upper ends of the third side wall 82 and the upper ends of the fourth side wall 86 . The second bottom 92 is connected to the lower ends of the third side wall 82 and the fourth side wall 86 .

A third opening 97 is formed between the fifth side end 83 a of the third side wall 82 and the seventh side end 87 a of the fourth side wall 86 . A fourth opening 98 is formed between the sixth side end 83b of the third side wall 82 and the eighth side end 87b of the fourth side wall 86 .

A third locking portion 94 is provided on each of the third storage shelves 84 . In FIG. 6, a third locking portion 94a, a third locking portion 94b, and a third locking portion 94c as the third locking portion 94 are illustrated. A fourth locking portion 96 is provided on each of the fourth storage shelves 88 . FIG. 6 shows a fourth locking portion 96a, a fourth locking portion 96b, and a fourth locking portion 96c as the fourth locking portion 96. As shown in FIG.

FIG. 7 shows the annular frame _Fc , the substrate _Wc fixed to the annular frame _Fc , the third storage shelf 84c, the fourth storage shelf 88c, the third locking portion 94c and the fourth locking portion 96c. ing. The third locking portion 94 and the fourth locking portion 96 prevent the annular frame F from jumping out of the second cassette 80 through the fourth opening 98 .

For example, when carrying out the annular frame _Fc from the second cassette 80, the plate member 40 of the conveying device 100 is inserted between the annular frames _Fb and _Fc as shown in FIG. . Here, as shown in FIG. 7, the plate-like member 40 is arranged such that the first support portion 42 and the second support portion 44 are arranged under the annular frame Fc, and the third support portion 46 and the second support portion 46 are arranged under the annular frame Fc. 4 support 48 is inserted so that it is positioned under the substrate _Wc . At this time, a part of the plate-like member 40 may protrude from the fourth opening 98 . Also, the fourth opening 98 may not be provided.

When the plate-like member 40 is moved in the Z direction, the annular frame _Fc is supported by the first support portion 42 and the second support portion 44, and the substrate _Wc is supported by the third support portion 46 and the fourth support portion 48. Supported. Here, for example, the adhesive member T bends in the direction opposite to the Z direction. Therefore, although the heights of the third support portion 46 and the fourth support portion 48 are equal to or less than the heights of the first support portion 42 and the second support portion 44, the third support portion 46 and the fourth support portion 48 support the substrate W. _c can be supported. Next, when the plate member 40 is moved in the direction opposite to the Y direction, the annular frame _Fc to which the substrate _Wc is fixed is carried out from the second cassette 80 . By performing the above steps in reverse, the annular frame _Fc to which the substrates _Wc are fixed is carried into the second cassette 80 . As a result, the annular frame Fc can be carried in and out of the second cassette 80 using the carrier device 100 .

6 and 7, the second cassette 80 accommodates three annular frames F as described above, but the number of annular frames accommodated in the second cassette 80 is particularly limited. not a thing Further, the method of carrying the annular frame Fc into and out of the second cassette 80 using the transport device 100 is not limited to the above method.

Next, the effect of the conveying apparatus of this embodiment will be described.

Plasma dicing, which has recently been considered for use in the dicing process, includes isotropic etching using F (fluorine) radicals, formation of a protective film containing CF ₄ (carbon tetrafluoride) radicals, and is performed by repeating anisotropic etching using Conventionally, dicing was performed with a dedicated blade dicer. Therefore, a device for transporting the semiconductor wafer used in the semiconductor device forming process and a device for transporting the annular frame F used in the dicing process are provided separately. However, the above steps included in plasma dicing have been conventionally performed in semiconductor device formation. Therefore, in the case of using plasma dicing, it is useful to use a single transfer apparatus capable of transferring the semiconductor wafer and the annular frame F to which the semiconductor wafer is fixed.

According to the conveying device 100 of this embodiment, the fourth support portion 48 is provided apart from the third support portion 46 by the second distance _L2 . And L ₂ <d. where d is d ₁ or d ₂ (Fig. 1). Therefore, the substrate W can be stably supported by the third support portion 46 and the fourth support portion 48 . Also, the first support portion 42 is provided apart from the second support portion 44 by a first distance _L1 . Therefore, the annular frame F can be stably supported by the first support portion 42 and the second support portion 44 . As described above, the substrate W, the annular frame F, and the annular frame F in which the substrate W is fixed to the opening P by the adhesive member T can be transported using the transport device 100 . In other words, there is no need to separately prepare a transfer device for the substrate W and a transfer device for the annular frame F. In this manner, according to the present embodiment, it is possible to provide a conveying apparatus capable of conveying various items.

When the length of the first side wall 62 or the second side wall 66 in the direction parallel to the substrate surface of the accommodated substrate W is _L3 , it is preferable that _L3 < _L1 . The size of the first cassette 60 is sufficient as long as it can accommodate substrates W smaller than the annular frame F, so it is often smaller than the size of the second cassette 80 that can accommodate the annular frame F. However, if the constituent elements of the transfer device 100 are arranged small enough to fit inside the first cassette 60, the annular frame F is larger than the substrates W, so the annular frame F cannot be well supported. Therefore, L ₃ <L ₁ is established so that the annular frame F can be supported more stably.

Further, when the diameter of the opening P is L ₄ and the diameter of the annular frame F is L ₅ , it is preferable that L ₄ <L ₁ <L ₅ . This is for supporting the annular frame F stably.

The heights of the third support portion 46 and the fourth support portion 48 are preferably equal to or less than the heights of the first support portion 42 and the second support portion 44 . If the height of the third support portion 46 and the fourth support portion 48 is lower than the height of the first support portion 42 and the second support portion 44 when the annular frame F and the substrate W are transferred, the Since it is possible to prevent the third support portion 46 and the fourth support portion 48 from contacting the substrate W, useless contamination of the substrate W due to the contact of the third support portion 46 and the fourth support portion 48 can be prevented. Because we can. In addition, when the third support part 46 and the fourth support part 48 may touch the substrate W, the heights of the third support part 46 and the fourth support part 48 are equal to the heights of the first support part 42 and the second support part 48 . It may be equal to the height of the support portion 44 .

According to the conveying apparatus of this embodiment, it is possible to provide a conveying apparatus capable of conveying various items.

(Second embodiment)
The conveying apparatus of this embodiment includes a first side wall having a first storage shelf that can store substrates, a second side wall that faces the first storage shelf and has a second storage shelf that can store substrates, and a first storage shelf. A substrate is carried in and out from a first cassette having a first locking portion provided on the shelf and a second locking portion provided on the second storage shelf facing the first locking portion, and the adhesive member a third side wall having a third housing shelf capable of housing an annular frame capable of fixing the substrate to the opening using a a first plate-like member having a first plate surface and a second plate-like member having a second plate surface, wherein the first Adjacent to the first plate-shaped member in a first direction parallel to the plate surface, the second plate surface is provided parallel to the first plate surface, and the length of the second direction intersecting the first direction is shorter than the length of the first plate-shaped member in the second direction; and a third plate-shaped member having a third plate surface, wherein the second plate-shaped member is the first plate provided so that the third plate surface is parallel to the first plate surface and the second plate surface, adjacent to the second plate member so as to be arranged between the shaped member and the third plate member; a third plate-shaped member whose length in the second direction is shorter than the length of the second plate-shaped member in the second direction; a first support provided on the first plate-shaped member; A second supporting portion provided thereon and separated from the first supporting portion by a first distance _L1 in the first direction; and a third supporting portion spaced apart by a distance L ₂ , where L ₂ <d, where d is the diameter of the substrate.

Here, the description of the content that overlaps with the first embodiment is omitted.

FIG. 8 is a schematic diagram of the conveying device 200 of this embodiment. FIG. 8A is a schematic top view of the conveying device 200 of this embodiment. FIG. 8B is a schematic side view of the conveying device 200 of this embodiment.

The conveying device 200 includes a first plate member 140 , a second plate member 150 and a third plate member 160 . The first plate member 140 has a first plate surface 142 . The second plate member 150 has a second plate surface 152 . The third plate member 160 has a third plate surface 162 .

When the first plate member 140 is arranged so that the first plate surface 142 is parallel to the XY plane, the second plate member 150 is adjacent to the first plate member 140 in the Y direction, The second plate surface 152 is provided parallel to the first plate surface 142 . The length _L12 of the second plate member 150 in the X direction is shorter than the length _L11 of the first plate member 140 in the X direction.

The third plate-like member 160 is adjacent to the second plate-like member 150 such that the second plate-like member 150 is arranged between the first plate-like member 140 and the third plate-like member 160 in the Y direction. are provided. Also, the third plate member 160 is provided such that the third plate surface 162 is parallel to the first plate surface 142 and the second plate surface 152 . The X-direction length L ₁₃ of the third plate member 160 is shorter than the X-direction length L ₁₂ of the second plate member 150 .

The first support portion 170 is provided on the first plate member 140 . In FIG. 8A, the first support portion 170a and the first support portion 170b are provided separately from each other in the X direction. The first support portion 170 is used to support the annular frame F. As shown in FIG. The first support portion 170 is, for example, a support pin. In addition, in FIG. 8A, the first support portion 170a and the first support portion 170b are illustrated. However, for example, a single planar first support portion 170 extending in the X direction may be provided, and the form of the first support portion 170 is not particularly limited.

The second support portion 172 is provided on the second plate member 150 so as to be separated from the first support portion 170 by a first distance _L1 in the Y direction. In FIG. 8A, the second support portion 172a and the second support portion 172b are provided separated from each other in the X direction. The second support part 172 is used for supporting the substrate W. As shown in FIG. The second support portion 172 is, for example, a support pin. In addition, in FIG. 8A, the second support portion 172a and the second support portion 172b are illustrated. However, for example, a single planar second support portion 172 extending in the X direction may be provided, and the form of the second support portion 172 is not particularly limited. When a plurality of second support portions 172a and second support portions 172b are provided, the substrate W can be supported when the distance between the second support portions 172a and 172b in the X direction is _L14 . Therefore, it is preferable that L ₁₄ <d.

The third support portion 174 is provided on the third plate member 160 so as to be separated from the second support portion 172 by a second distance _L2 in the Y direction. In FIG. 8(a), the third supporting portion 174a and the third supporting portion 174b are provided separately from each other in the X direction. The third support portion 174 is used for supporting the annular frame F or the substrate W, as will be described later. The third support portion 174 is, for example, a support pin. In addition, in FIG. 8A, the third support portion 174a and the third support portion 174b are illustrated. However, for example, a single planar third support portion 174 extending in the X direction may be provided, and the form of the third support portion 174 is not particularly limited.

It is preferable that L ₂ <d, where d is the diameter of the substrate.

When the diameter of the opening P is L ₄ and the diameter of the annular frame is L ₅ , it is preferable that L ₄ <L ₁ +L ₂ <L ₅ .

The first plate surface 142, the second plate surface 152 and the third plate surface 162 are arranged on the same plane, for example.

In FIG. 8(a), the annular frame F and the substrate W are shown together by dotted lines. When the transport device 200 is used to transport the annular frame F in which the substrate W is fixed to the opening P by the adhesive member T, the first support section 170 and the third support section 174 support the annular frame F. As shown in FIG. Also, the second support part 172 supports the substrate W. As shown in FIG.

FIG. 9 is a schematic top view showing the positional relationship between the conveying device 200 and the first cassette 60 in this embodiment. When loading/unloading the substrate W from/to the first cassette 60 , the substrate W is supported by the second support portion 172 and the third support portion 174 .

The length L13 of the third plate member ₁₆₀ in the X direction is preferably shorter than the distance _Ld between the first locking portion 74 and the second locking portion 76 in the X direction.

The length L12 of the second plate member ₁₅₀ in the X direction is preferably shorter than the distance _Lc between the first storage shelf 64 and the second storage shelf 68 in the X direction.

FIG. 10 is a schematic top view showing the positional relationship between the conveying device 200 and the second cassette 80 in this embodiment. When loading/unloading the substrates W from/to the second cassette 80 , the substrates W are supported by the second support portion 172 , and the annular frame F is supported by the first support portion 170 and the third support portion 174 .

The length _L11 of the first plate member 140 in the X direction is preferably shorter than the distance _La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction.

Next, the effect of the conveying apparatus 200 of this embodiment will be described.

When the substrate W is carried in and out using the transport device 200, it is preferable that the second plate member 150 and the third plate member 160 of the transport device 200 can be inserted into the first cassette 60. . Therefore, the length _L12 of the second plate member 150 in the X direction is preferably shorter than the distance _Lc between the first storage shelf 64 and the second storage shelf 68 in the X direction. Also, the length _L13 of the third plate member 160 in the X direction is preferably shorter than the distance _Ld between the first locking portion 74 and the second locking portion 76 in the X direction.

When the annular frame F is carried in and out using the transport device 200, the first plate-shaped member 140, the second plate-shaped member 150 and the third plate-shaped member of the transport device 200 are placed inside the second cassette 80. Preferably, member 160 is insertable. Therefore, the length _L11 of the first plate member 140 in the X direction is preferably shorter than the distance _La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction.

Note that the diameter _L5 of the annular frame F is larger than the diameter d of the substrate W. where d is d ₁ or d ₂ (Fig. 1). Therefore, the distance _Le between the third locking portion 94 and the fourth locking portion 96 in the X direction is longer than the distance _Ld between the first locking portion 74 and the second locking portion 76 in the X direction. Also, the distance _La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction is longer than the distance _Lc between the first storage shelf 64 and the second storage shelf 68 in the X direction. Therefore, the first plate member 140 can be inserted between the third storage shelf 84 and the fourth storage shelf 88, and the second plate member 150 can be inserted between the third storage shelf 84 and the fourth storage shelf 88. It is possible.

According to the conveying apparatus of this embodiment, it is also possible to provide a conveying apparatus capable of conveying various items.

While several embodiments and examples of the invention have been described, these embodiments and examples are provided by way of example and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other forms, and various omissions, replacements, and modifications can be made without departing from the scope of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are included in the scope of the invention described in the claims and equivalents thereof.

40 plate-like member 42 first support portion 44 second support portion 46 third support portion 48 fourth support portion 60 first cassette 62 first side wall 63a first side end 63b second side end 64 first storage shelf 66 second Side wall 67a Third side end 67b Fourth side end 68 Second storage shelf 70 First ceiling portion 72 First bottom portion 74 First locking portion 76 Second locking portion 77 First opening 78 Second opening 80 Second Cassette 82 Third side wall 83a Fifth side end 83b Sixth side end 84 Third storage shelf 86 Fourth side wall 87a Seventh side end 87b Eighth side end 88 Fourth storage shelf 90 Second ceiling part 92 Second bottom part 94 3 locking portion 96 4th locking portion 97 3rd opening 98 4th opening 100 conveying device 110 conveying device 140 first plate member 142 first plate surface 150 second plate member 152 second plate surface 160 3 Plate-like member 162 Third plate surface 170 First support portion 172 Second support portion 174 Third support portion 200 Transfer device F Annular frame O Orientation flat P Opening T Adhesive member W Substrate

Claims (8)

The substrates are removed from a first cassette having a first side wall having a first storage shelf capable of storing substrates, and a second side wall facing the first storage shelf and having a second storage shelf capable of storing the substrates. Carrying in and out,
A third side wall having a third storage shelf capable of accommodating an annular frame capable of fixing the substrate to the opening using an adhesive member, and a fourth storage shelf facing the third side wall and capable of accommodating the annular frame. loading and unloading the annular frame from a second cassette having a fourth side wall;
A conveying device,
a plate member extending in a first direction;
a first support provided on the plate-like member;
a second support provided on the plate-like member and separated from the first support by a first distance _L1 in the first direction;
a third support portion provided between the first support portion and the second support portion on the plate-like member;
A fourth support portion provided on the plate member between the third support portion and the second support portion and separated from the third support portion by a second distance _L2 in the first direction. and,
has
L ₂ < d < L ₁ , where d is the diameter of the substrate;
Conveyor. L ₃ < L ₁ , where L ₃ is the length of the first side wall or the length of the second side wall in the direction parallel to the substrate surface of the housed substrate;
2. The conveying apparatus of claim 1. L ₄ <L ₁ <L ₅ , where L ₄ is the diameter of the opening and L ₅ is the diameter of the annular frame.
3. The conveying device according to claim 1 or 2. The heights of the third support portion and the fourth support portion are equal to or less than the heights of the first support portion and the second support portion,
4. The conveying device according to any one of claims 1 to 3. a first side wall having a first storage shelf that can store a substrate; a second side wall that faces the first storage shelf and has a second storage shelf that can store the substrate; loading and unloading the substrate from a first cassette having a first locking portion and a second locking portion provided on the second storage shelf facing the first locking portion;
A third side wall having a third storage shelf capable of accommodating an annular frame capable of fixing the substrate to the opening using an adhesive member, and a fourth storage shelf facing the third side wall and capable of accommodating the annular frame. loading and unloading the annular frame from a second cassette having a fourth side wall;
A conveying device,
a first plate member having a first plate surface;
A second plate member having a second plate surface, wherein the second plate surface is adjacent to the first plate member in a first direction parallel to the first plate surface. a second plate-shaped member provided to be parallel to and having a length in a second direction intersecting the first direction that is shorter than the length of the first plate-shaped member in the second direction;
a third plate-shaped member having a third plate surface, wherein the second plate-shaped member is arranged between the first plate-shaped member and the third plate-shaped member in the first direction, Adjacent to the second plate member, the third plate surface is provided parallel to the first plate surface and the second plate surface, and the length in the second direction is a third plate-shaped member shorter than the length of the second plate-shaped member;
a first support provided on the first plate member;
a second support provided on the second plate-shaped member and separated from the first support by a first distance _L1 in the first direction;
a third support provided on the third plate-shaped member and separated from the second support by a second distance _L2 in the first direction;
with
L ₂ < d, where d is the diameter of the substrate;
Conveyor. L ₄ <L ₁ +L ₂ <L ₅ , where L ₄ is the diameter of the opening and L ₅ is the diameter of the annular frame.
6. The conveying device according to claim 5. the length of the first plate member in the second direction is shorter than the distance between the third storage shelf and the fourth storage shelf in the second direction;
the length of the second plate member in the second direction is shorter than the distance between the first storage shelf and the second storage shelf in the second direction;
The length of the third plate member in the second direction is shorter than the distance between the first locking portion and the second locking portion in the second direction,
7. The conveying device according to claim 5 or claim 6. comprising a plurality of the second support parts,
L ₁₄ < d, where L ₁₄ is the distance between the plurality of second support portions in the second direction;
8. The conveying device according to any one of claims 5 to 7.

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