JP2022049607A - Transport device - Google Patents

Abstract

To provide a transport device capable of transporting various transport articles.SOLUTION: A transport device carries a substrate into/out of a first cassette having a first side wall having a first housing shelf capable of housing the substrate and a second side wall having a second housing shelf that opposes the first housing shelf and being capable of housing the substrate, and carries an annular frame into/out of a second cassette having a third side wall having a third housing shelf capable of housing the annular frame capable of fixing the substrate to an opening section using an adhesive member and a fourth side wall having a fourth housing shelf opposed to the third side wall and capable of housing the annular frame. The transport device includes: a plate-like member extending in a first direction; a first support section provided on the plate-like member; a second support section provided on the plate-like member so as to be separated from the first support section by a first distance L1 in the first direction; a third support section provided between the first support section and the second support section on the plate-like member; and a fourth support section provided so as to be separated from the third support section by a second distance L2 in the first direction between the third support section and the second support section on the plate-like member. When a diameter of the substrate is d, L2<d<L1.SELECTED DRAWING: Figure 2

Description

Embodiments of the present invention relate to a transport device.

In the manufacture of a semiconductor device, after performing a predetermined semiconductor device forming step on the semiconductor wafer, the semiconductor wafer is subjected to an annular frame (dicing frame) having an opening having a diameter larger than the diameter of the semiconductor wafer by using an adhesive member. ) Is fixed to the opening. The semiconductor wafer fixed to the annular frame is individualized into individual chips by a predetermined dicing step.

Conventionally, in the dicing process, dicing using a dedicated blade dicer has been performed. However, recently, dicing using various methods such as plasma etching has been studied.

Japanese Patent No. 3401432

An object to be solved by the present invention is to provide a transport device capable of transporting various conveyed objects.

The transport device of the embodiment has a first side wall having a first storage shelf capable of accommodating a substrate, and a second side wall having a second accommodating shelf facing the first accommodating shelf and accommodating a substrate. A third side wall having a third storage shelf capable of accommodating an annular frame capable of loading and unloading a substrate from a cassette and fixing the substrate to an opening using an adhesive member, and an annular frame facing the third side wall can be accommodated. A transport device for carrying in and out an annular frame from a second cassette having a fourth side wall having a fourth storage shelf, a plate-shaped member extending in the first direction, and a plate-shaped member provided on the plate-shaped member. A support portion, a second support portion provided on the plate-shaped member at a distance of a _first distance L1 in the first direction from the first support portion, and a first support portion on the plate-shaped member. A third support portion provided between the and second support portions, and a second distance L in the first direction from the third support portion between the third support portion and the second support portion on the plate-shaped member. It has a fourth support portion provided at a distance of ₂ and L ₂ <d <L ₁ when the diameter of the substrate is d.

It is a schematic top view of the substrate and the annular frame of 1st Embodiment. It is a schematic diagram of the transport device of 1st Embodiment. It is a schematic side view of the transfer device of another aspect of 1st Embodiment. It is a schematic front view of the 1st cassette of 1st Embodiment. It is a schematic top view which shows the positional relationship between the transport device and the 1st cassette in 1st Embodiment. It is a schematic front view of the 2nd cassette of 1st Embodiment. It is a schematic top view which shows the positional relationship between the transfer device and the 2nd cassette in 1st Embodiment. It is a schematic diagram of the transfer device of 2nd Embodiment. It is a schematic top view which shows the positional relationship between the transport device and the 1st cassette in 2nd Embodiment. It is a schematic top view which shows the positional relationship between the transfer device and the 2nd cassette in 2nd Embodiment.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, the same or similar members may be designated by the same reference numerals. In addition, the description of the members and the like once described may be omitted as appropriate.

In the present specification, in order to show the positional relationship of parts and the like, the upper direction of the drawing is described as "upper" and the lower direction of the drawing is described as "lower". In the present specification, the concepts of "upper" and "lower" do not necessarily indicate the relationship with the direction of gravity.

(First Embodiment)
The transport device of the present embodiment has a first side wall having a first storage shelf capable of accommodating a substrate, and a second side wall having a second accommodating shelf facing the first accommodating shelf and accommodating a substrate. A third side wall having a third storage shelf capable of accommodating an annular frame capable of loading and unloading a substrate from one cassette and fixing the substrate to an opening using an adhesive member, and an annular frame facing the third side wall can be accommodated. A transport device for carrying in and out an annular frame from a second cassette having a fourth side wall having a fourth storage shelf, which is provided on a plate-shaped member extending in the first direction and a plate-shaped member. The first support portion, the second support portion provided on the plate-shaped member at a distance of the first support portion by the _first distance L1 in the first direction, and the first support on the plate-shaped member. A third support portion provided between the portions and the second support portion, and a second distance in the first direction from the third support portion between the third support portion and the second support portion on the plate-shaped member. It has a fourth support portion provided apart from each other by L ₂ , and L ₂ <d <L ₁ when the diameter of the substrate is d.

FIG. 1 is a schematic top view of the substrate W and the annular frame F of the present embodiment.

FIG. 1A is a schematic top view of the substrate W of the present embodiment.

The substrate W is, for example, a Si (silicon) wafer, a SiC (silicon carbide) wafer, a GaAs (gallium arsenide) wafer, a GaN (gallium nitride) wafer, or the like. The substrate W may be provided with an orientation flat O indicating the crystal orientation. The diameter of the substrate W in the direction perpendicular to the orientation flat O is d ₁ , and the diameter of the substrate W in the direction parallel to the orientation flat O is d ₂ .

FIG. 1B is a schematic top view of the annular frame F of the present embodiment.

The annular frame F has an opening P. The substrate W is fixed to the inside of the opening P by using the adhesive member T. The adhesive member T is used for fixing each chip after being separated into pieces by dicing.

In the transport device 100 of the present embodiment, the substrate W shown in FIG. 1 (a), the annular frame F shown in FIG. 1 (b), and the annular frame F in which the substrate W is fixed to the opening P by the adhesive member T It is used for transporting.

Here, the X direction, the Y direction that intersects perpendicularly to the X direction, and the Z direction that intersects perpendicularly to the X direction and the Y direction are defined. In FIG. 1A, the substrate W is illustrated assuming that the substrate surface of the substrate W is arranged parallel to the XY plane and the orientation flat O is arranged parallel to the X direction. Further, in FIG. 1B, the annular frame F and the substrate W are shown assuming that the plane of the annular frame F is parallel to the XY plane and the orientation flat O is arranged parallel to the X direction. ing.

The X direction is an example of the second direction, and the Y direction is an example of the first direction. Further, the Z direction is, for example, a vertical direction.

FIG. 2 is a schematic view of the transport device 100 of the present embodiment. FIG. 2A is a schematic top view of the transport device 100 of the present embodiment. FIG. 2B is a schematic side view of the transport device 100 of the present embodiment. In FIG. 2A, the substrate W, the adhesive member T, the annular frame F, and the opening P shown in FIG. 1B are shown by dotted lines.

The transport device 100 has a plate-shaped member 40. In FIG. 2A, the plate-shaped member 40 is shown so that the longitudinal direction of the plate-shaped member 40 is parallel to the Y direction, in other words, the plate-shaped member 40 extends in the Y direction.

The plate-shaped member 40 is made of, for example, a metal material such as Cu (copper), Al (aluminum), Ag (silver) or Au (gold), or a resin material such as an epoxy resin.

The first support portion 42 is provided on the plate-shaped member 40. In FIGS. 2A and 2B, the first support portion 42a and the first support portion 42b as the first support portion 42 are provided so as to be separated from each other in the X direction. The first support portion 42 is used to support the annular frame F. The first support portion 42 is, for example, a support pin. In addition, in FIGS. 2A and 2B, a plurality of first support portions 42a and first support portion 42b are shown as the first support portion 42. However, the form of the first support portion 42 is not particularly limited.

The second support portion 44 is provided on the plate-shaped member 40 so as to be separated from the first support portion 42 by a _first distance L1 in the Y direction. In FIGS. 2A and 2B, a second support portion 44a and a second support portion 44b are provided so as to be separated from each other in the X direction. The second support portion 44 is used to support the annular frame F. The second support portion 44 is, for example, a support pin. In addition, in FIGS. 2A and 2B, a plurality of second support portions 44a and second support portion 44b are shown as the second support portion 44. However, for example, a single planar second support portion 44 extending in the X direction may be provided, and the form of the second support portion 44 is not particularly limited.

The third support portion 46 is provided on the plate-shaped member 40. The third support portion 46 is provided between the first support portion 42 and the second support portion 44 in the Y direction. In FIGS. 2A and 2B, a third support portion 46a and a third support portion 46b as the third support portion 46 are provided so as to be separated from each other in the X direction. The third support portion 46 is used to support the substrate W. The third support portion 46 is, for example, a support pin. In addition, in FIG. 2A and FIG. 2B, a plurality of third support portions 46a and third support portion 46b are shown as the third support portion 46. However, for example, a single planar third support portion 46 extending in the X direction may be provided, and the form of the third support portion 46 is not particularly limited.

The fourth support portion 48 is provided on the plate-shaped member 40. The fourth support portion 48 is provided between the third support portion 46 and the second support portion 44 in the Y direction, apart from the third support portion 46 by a _second distance L2 in the Y direction. In FIGS. 2A and 2B, a fourth support portion 48a and a fourth support portion 48b as the fourth support portion 48 are provided so as to be separated from each other in the X direction. The fourth support portion 48 is used to support the substrate W. The fourth support portion 48 is, for example, a support pin. In addition, in FIG. 2A and FIG. 2B, a plurality of fourth support portions 48a and fourth support portion 48b are shown as the fourth support portion 48. However, for example, a single planar fourth support portion 48 extending in the X direction may be provided, and the form of the fourth support portion 48 is not particularly limited.

The transport device 100 is used by being connected to, for example, a drive unit (not shown). The substrate W or the annular frame F supported by the transport device 100 is transported to a semiconductor manufacturing device or the like (not shown) by moving a drive unit or the like (not shown).

When the diameter of the opening P is L ₄ and the diameter of the annular frame is L ₅ , it is preferable that L ₄ <L ₁ <L ₅ .

When the diameter of the substrate W is d, it is preferable that L ₂ <d <L ₁ . Here, d is d ₁ or d ₂ .

The height h ₃ of the third support portion 46 and the height h ₄ of the fourth support portion 48 are equal to or less than the height h ₁ of the first support portion 42 and the height h ₂ of the second support portion 44. Is preferable. The height h ₃ of the third support portion 46 and the height h ₄ of the fourth support portion 48 are equal to the height h ₁ of the first support portion 42 and the height h ₂ of the second support portion 44. It doesn't matter.

FIG. 3 is a schematic side view of the transport device 110 of another aspect of the present embodiment. In the transport device 110, a first support portion 42 and a second support portion 44 are provided under the plate-shaped member 40. Here, the first support portion 42 and the second support portion 44 have an opening (not shown), and the article can be supported by suction such as vacuum suction using the opening. As shown in FIG. 3A, the substrate W is supported by the third support portion 46 and the fourth support portion 48. On the other hand, as shown in FIG. 3B, the annular frame F to which the substrate W is fixed by the adhesive member T is supported by suction such as vacuum suction using the first support portion 42 and the second support portion 44. .. In this case, the adhesive member T may be bent in the opposite direction in the Z direction, and the substrate W may be supported at a position deviated from the annular frame F in the opposite direction in the Z direction.

FIG. 4 is a schematic front view of the first cassette 60 of the present embodiment. FIG. 5 is a schematic top view showing the positional relationship between the transport device 100 and the first cassette 60 in the present embodiment.

The first cassette 60 will be described with reference to FIGS. 4 and 5.

The first cassette 60 is a cassette that houses the substrate W. The first cassette 60 has a first side wall 62, a second side wall 66, a first ceiling portion 70, and a first bottom portion 72. The first side wall 62 has a first storage shelf 64 that can accommodate the substrate W. FIG. 4 shows a first storage shelf 64a, a first storage shelf 64b, and a first storage shelf 64c as the first storage shelf 64. The second side wall 66 is provided so as to face the first side wall 62. The second side wall 66 has a second storage shelf 68 that can accommodate the substrate W. FIG. 4 shows a second storage shelf 68a, a second storage shelf 68b, and a second storage shelf 68c as the second storage shelf 68. The substrate Wa as the substrate W is accommodated on the first accommodating shelf _64a and the second accommodating shelf 66a so that the substrate surface is parallel to the XY plane. The substrate W _b as the substrate W is accommodated on the first accommodating shelf 64b and the second accommodating shelf 66b so that the substrate surface is parallel to the XY plane. The substrate W _c as the substrate W is accommodated on the first accommodating shelf 64c and the second accommodating shelf 66c so that the substrate surface is parallel to the XY plane.

The first ceiling portion 70 is connected to the upper end of the first side wall 62 and the upper end of the second side wall 66. The first bottom portion 72 is connected to the lower end of the first side wall 62 and the lower end of the second side wall 66.

A first opening 77 is formed between the first side end 63a of the first side wall 62 and the third side end 67a of the second side wall 66. Further, a second opening 78 is formed between the second side end 63b of the first side wall 62 and the fourth side end 67b of the second side wall 66.

The first locking portion 74 is provided on each of the first storage shelves 64. In FIG. 4, the first locking portion 74a, the first locking portion 74b, and the first locking portion 74c as the first locking portion 74 are shown. The second locking portion 76 is provided on each of the second storage shelves 68. In FIG. 4, the second locking portion 76a, the second locking portion 76b, and the second locking portion 76c as the second locking portion 76 are shown.

In FIG. 5, the substrate _Wc , the first storage shelf 64c, the second storage shelf 68c, the first locking portion 74c, and the second locking portion 76c are shown. The first locking portion 74 and the second locking portion 76 prevent the substrate W from jumping out of the first cassette 60 from the second opening 78.

For example, when the substrate W _c is carried out from the first cassette 60, the plate-shaped member 40 of the transport device 100 is inserted between the substrate W _b and the substrate W _c as shown in FIG. Here, the plate-shaped member 40 is inserted so that the third support portion 46 and the fourth support portion 48 are arranged under the substrate _Wc , as shown in FIG.

At this time, for example, the portion of the plate-shaped member 40 having the second support portion 44 protrudes from the second opening 78 to the outside of the first cassette 60. For example, when the length of the first side wall 62 or the second side wall 66 in the Y direction is L ₃ , L ₃ <L ₁ . When the length of the first side wall 62 or the second side wall 66 in the Y direction is sufficiently long and L ₃ > L ₁ , the plate-shaped member 40 is from the second opening 78 to the first cassette 60. It may not stick out of the outside.

Next, when the plate-shaped member 40 is moved in the Z direction, the substrate _Wc is supported by the third support portion 46 and the fourth support portion 48. Next, when the plate-shaped member 40 is moved in the direction opposite to the Y direction, the substrate _Wc is carried out from the first cassette 60. By performing the above steps in reverse, the substrate W _c is carried into the first cassette 60. As a result, the substrate W can be carried in and out of the first cassette 60 by using the transport device 100.

In FIGS. 4 and 5, as described above, the first cassette 60 accommodates three substrates W, but the number of substrates W accommodated in the first cassette 60 is particularly limited. is not it.

FIG. 6 is a schematic front view of the second cassette 80 of the present embodiment. FIG. 7 is a schematic top view showing the positional relationship between the transport device 100 and the second cassette 80 in the present embodiment.

The second cassette 80 will be described with reference to FIGS. 6 and 7.

The second cassette 80 is a cassette that houses the annular frame F or the annular frame F to which the substrate W is fixed by using the adhesive member T inside the opening P.

The second cassette 80 has a third side wall 82, a fourth side wall 86, a second ceiling portion 90, and a second bottom portion 92. The third side wall 82 has a third storage shelf 84 that can accommodate the annular frame F. FIG. 6 shows a third storage shelf 84a, a third storage shelf 84b, and a third storage shelf 84c as the third storage shelf 84. The fourth side wall 86 is provided so as to face the third side wall 82. The fourth side wall 86 has a fourth storage shelf 88 that can accommodate the annular frame F. FIG. 6 shows a fourth storage shelf 88a, a fourth storage shelf 88b, and a fourth storage shelf 88c as the fourth storage shelf 88. The annular frame Fa as the annular frame F is housed on the third storage shelf _84a and the fourth storage shelf 86a so that the substrate surface is parallel to the XY plane. The annular frame F _b as the annular frame F is housed on the third storage shelf 84b and the fourth storage shelf 86b so that the substrate surface is parallel to the XY plane. The annular frame F _c as the annular frame F is housed on the third storage shelf 84c and the fourth storage shelf 86c so that the substrate surface is parallel to the XY plane.

The second ceiling portion 90 is connected to the upper end of the third side wall 82 and the upper end of the fourth side wall 86. The second bottom portion 92 is connected to the lower end of the third side wall 82 and the lower end of the fourth side wall 86.

A third opening 97 is formed between the fifth side end 83a of the third side wall 82 and the seventh side end 87a of the fourth side wall 86. Further, a fourth opening 98 is formed between the sixth side end 83b of the third side wall 82 and the eighth side end 87b of the fourth side wall 86.

The third locking portion 94 is provided on each of the third storage shelves 84. In FIG. 6, the third locking portion 94a, the third locking portion 94b, and the third locking portion 94c as the third locking portion 94 are shown. The fourth locking portion 96 is provided on each of the fourth storage shelves 88. In FIG. 6, the fourth locking portion 96a, the fourth locking portion 96b, and the fourth locking portion 96c as the fourth locking portion 96 are shown.

In FIG. 7, an annular frame F _c , a substrate W _c fixed to the annular frame F _c , a third storage shelf 84c, a fourth storage shelf 88c, a third locking portion 94c, and a fourth locking portion 96c are illustrated. ing. The third locking portion 94 and the fourth locking portion 96 prevent the annular frame F from jumping out of the second cassette 80 from the fourth opening 98.

For example, when the annular frame F _c is carried out from the second cassette 80, the plate-shaped member 40 of the transport device 100 is inserted between the annular frame F _b and the annular frame F _c , as shown in FIG. .. Here, in the plate-shaped member 40, as shown in FIG. 7, the first support portion 42 and the second support portion 44 are arranged under the annular frame Fc, and the third support portion 46 and the third support portion 46 and the second support portion 44 are arranged. 4 The support portion 48 is inserted so as to be arranged under the substrate W _c . At this time, a part of the plate-shaped member 40 may protrude from the fourth opening 98. Further, the fourth opening 98 may not be provided.

Then, when the plate-shaped member 40 is moved in the Z direction, the annular frame F _c is supported by the first support portion 42 and the second support portion 44, and the substrate W _c is supported by the third support portion 46 and the fourth support portion 48. Be supported. Here, for example, the adhesive member T bends in the direction opposite to the Z direction. Therefore, the heights of the third support portion 46 and the fourth support portion 48 are equal to or less than the heights of the first support portion 42 and the second support portion 44, but the substrate W is formed by the third support portion 46 and the fourth support portion 48. _c can be supported. Next, when the plate-shaped member 40 is moved in the opposite direction in the Y direction, the annular frame F _c to which the substrate W _c is fixed is carried out from the second cassette 80. By performing the above steps in reverse, the annular frame F _c to which the substrate W _c is fixed is carried into the second cassette 80. Thereby, the annular frame Fc can be carried in and out of the second cassette 80 by using the transport device 100.

In FIGS. 6 and 7, as described above, the second cassette 80 accommodates three annular frames F, but the number of annular frames accommodated in the second cassette 80 is particularly limited. It's not a thing. Further, the method of loading and unloading the annular frame Fc to and from the second cassette 80 using the transport device 100 is not limited to the above method.

Next, the operation and effect of the transport device of the present embodiment will be described.

Plasma dicing, which has recently been considered for use in the dicing process, includes isotropic etching using F (fluorine) radicals, formation of a protective film containing CF ₄ (carbon tetrafluoride) radicals, and F-based ions. It is performed by repeating the anisotropic etching using. Until now, dicing has been performed by a dedicated blade dicer. Therefore, a device for transporting the semiconductor wafer used in the semiconductor device forming step and a device for transporting the annular frame F used in the dicing step are separately provided. However, each of the above steps included in plasma dicing is a step that has been conventionally performed in semiconductor device formation. Therefore, when plasma dicing is used, a transport device capable of transporting the semiconductor wafer and transporting the annular frame F to which the semiconductor wafer is fixed is useful.

According to the transport device 100 of the present embodiment, the fourth support portion 48 is provided so as to be separated from the third support portion 46 by a _second distance L2. And L ₂ <d. Here, d is d ₁ or d ₂ (FIG. 1). Therefore, the substrate W can be stably supported by the third support portion 46 and the fourth support portion 48. Further, the first support portion 42 is provided so as to be separated from the second support portion 44 by a _first distance L1. Therefore, the annular frame F can be stably supported by the first support portion 42 and the second support portion 44. As described above, the substrate W, the annular frame F, and the annular frame F in which the substrate W is fixed to the opening P by the adhesive member T can be conveyed by using the transport device 100. In other words, it is not necessary to separately prepare the transfer device for the substrate W and the transfer device for the annular frame F. In this way, according to the present embodiment, it is possible to provide a transport device capable of transporting various transported objects.

When the length of the first side wall 62 or the second side wall 66 in the direction parallel to the board surface of the housed board W is L ₃ , it is preferable that L ₃ <L ₁ . Since the size of the first cassette 60 only needs to be able to accommodate the substrate W smaller than the annular frame F, it is often smaller than the size of the second cassette 80 that can accommodate the annular frame F. However, if the components of the transport device 100 are arranged small so as to fit inside the first cassette 60, the annular frame F cannot be supported well because the annular frame F is larger than the substrate W. Therefore, L ₃ <L ₁ is set so that the annular frame F can be supported more stably.

Further, when the diameter of the opening P is L ₄ and the diameter of the annular frame F is L ₅ , it is preferable that L ₄ <L ₁ <L ₅ . This is to stably support the annular frame F.

The height of the third support portion 46 and the fourth support portion 48 is preferably equal to or less than the height of the first support portion 42 and the second support portion 44. It is assumed that the heights of the third support portion 46 and the fourth support portion 48 are lower than the heights of the first support portion 42 and the second support portion 44 when the annular frame F and the substrate W are conveyed. Since it is possible to prevent the 3 support portion 46 and the 4th support portion 48 from touching the substrate W, it is possible to prevent unnecessary contamination of the substrate W due to contact between the 3 support portion 46 and the 4th support portion 48. Because it can be done. When the third support portion 46 and the fourth support portion 48 may touch the substrate W, the heights of the third support portion 46 and the fourth support portion 48 are set to the first support portion 42 and the second support portion 42. It may be equal to the height of the support portion 44.

According to the transport device of the present embodiment, it is possible to provide a transport device capable of transporting various transported objects.

(Second Embodiment)
The transport device of the present embodiment has a first side wall having a first storage shelf capable of accommodating a substrate, a second side wall having a second accommodating shelf facing the first accommodating shelf and accommodating a substrate, and a first accommodating device. The substrate is carried in and out from the first cassette having the first locking portion provided on the shelf and the second locking portion provided on the second storage shelf facing the first locking portion, and the adhesive member. A third side wall having a third storage shelf capable of accommodating an annular frame capable of fixing the substrate to the opening, and a fourth side wall having a fourth storage shelf facing the third side wall and accommodating the annular frame. A transport device for carrying in and out an annular frame from a second cassette having a first plate surface, a first plate-shaped member having a first plate surface, and a second plate-shaped member having a second plate surface. A length in the second direction that is provided adjacent to the first plate-shaped member in the first direction parallel to the plate surface so that the second plate surface is parallel to the first plate surface and intersects the first direction. Is a second plate-shaped member shorter than the length of the first plate-shaped member in the second direction, and a third plate-shaped member having a third plate surface, and the second plate-shaped member is the first plate in the first direction. The third plate surface is provided adjacent to the second plate-shaped member so as to be arranged between the shaped member and the third plate-shaped member so as to be parallel to the first plate surface and the second plate surface. A third plate-shaped member whose length in the second direction is shorter than the length of the second plate-shaped member in the second direction, a first support portion provided on the first plate-shaped member, and a second plate-shaped member. A second support portion provided above the first support portion and a _first distance L1 in the first direction, and a second support portion and a second support portion in the first direction on the third plate-shaped member. When a third support portion provided at a distance L ₂ is provided and the diameter of the substrate is d, L ₂ <d.

Here, the description of the content overlapping with the first embodiment is omitted.

FIG. 8 is a schematic view of the transport device 200 of the present embodiment. FIG. 8A is a schematic top view of the transport device 200 of the present embodiment. FIG. 8B is a schematic side view of the transport device 200 of the present embodiment.

The transport device 200 includes a first plate-shaped member 140, a second plate-shaped member 150, and a third plate-shaped member 160. The first plate-shaped member 140 has a first plate surface 142. The second plate-shaped member 150 has a second plate surface 152. The third plate-shaped member 160 has a third plate surface 162.

When the first plate-shaped member 140 is arranged so that the first plate surface 142 is parallel to the XY plane, the second plate-shaped member 150 is adjacent to the first plate-shaped member 140 in the Y direction. The second plate surface 152 is provided so as to be parallel to the first plate surface 142. The length L ₁₂ of the second plate-shaped member 150 in the X direction is shorter than the length L ₁₁ of the first plate-shaped member 140 in the X direction.

The third plate-shaped member 160 is adjacent to the second plate-shaped member 150 so that the second plate-shaped member 150 is arranged between the first plate-shaped member 140 and the third plate-shaped member 160 in the Y direction. It is provided. Further, the third plate-shaped member 160 is provided so that the third plate surface 162 is parallel to the first plate surface 142 and the second plate surface 152. The length L ₁₃ of the third plate-shaped member 160 in the X direction is shorter than the length L ₁₂ of the second plate-shaped member 150 in the X direction.

The first support portion 170 is provided on the first plate-shaped member 140. In FIG. 8A, the first support portion 170a and the first support portion 170b are provided so as to be separated from each other in the X direction. The first support portion 170 is used to support the annular frame F. The first support portion 170 is, for example, a support pin. In FIG. 8A, the first support portion 170a and the first support portion 170b are shown. However, for example, a single planar first support portion 170 extending in the X direction may be provided, and the form of the first support portion 170 is not particularly limited.

The second support portion 172 is provided on the second plate-shaped member 150 so as to be separated from the first support portion 170 by a _first distance L1 in the Y direction. In FIG. 8A, the second support portion 172a and the second support portion 172b are provided so as to be separated from each other in the X direction. The second support portion 172 is used to support the substrate W. The second support portion 172 is, for example, a support pin. In FIG. 8A, the second support portion 172a and the second support portion 172b are shown. However, for example, a single planar second support portion 172 extending in the X direction may be provided, and the form of the second support portion 172 is not particularly limited. When a plurality of second support portions 172a and second support portions 172b are provided, the substrate W is supported when the distance between the second support portion 172a and the second support portion 172b _in the X direction is L14. Therefore, it is preferable that L ₁₄ <d.

The third support portion 174 is provided on the third plate-shaped member 160 so as to be separated from the second support portion 172 by a _second distance L2 in the Y direction. In FIG. 8A, the third support portion 174a and the third support portion 174b are provided so as to be separated from each other in the X direction. The third support portion 174 is used to support the annular frame F or the substrate W, as will be described later. The third support portion 174 is, for example, a support pin. In FIG. 8A, the third support portion 174a and the third support portion 174b are shown. However, for example, a single planar third support portion 174 extending in the X direction may be provided, and the form of the third support portion 174 is not particularly limited.

When the diameter of the substrate is d, it is preferable that L ₂ <d.

When the diameter of the opening P is L ₄ and the diameter of the annular frame is L ₅ , it is preferable that L ₄ <L ₁ + L ₂ <L ₅ .

The first plate surface 142, the second plate surface 152, and the third plate surface 162 are arranged on the same plane, for example.

In FIG. 8A, the annular frame F and the substrate W are shown by dotted lines. When the transport device 200 is used for transporting the annular frame F in which the substrate W is fixed to the opening P by the adhesive member T, the first support portion 170 and the third support portion 174 support the annular frame F. Further, the second support portion 172 supports the substrate W.

FIG. 9 is a schematic top view showing the positional relationship between the transport device 200 and the first cassette 60 in the present embodiment. When the substrate W is carried in and out from the first cassette 60, the substrate W is supported by the second support portion 172 and the third support portion 174.

The length L ₁₃ of the third plate-shaped member 160 in the X direction is preferably shorter than the distance L _d between the first locking portion 74 and the second locking portion 76 in the X direction.

The length L ₁₂ of the second plate-shaped member 150 in the X direction is preferably shorter than the distance L _c between the first storage shelf 64 and the second storage shelf 68 in the X direction.

FIG. 10 is a schematic top view showing the positional relationship between the transport device 200 and the second cassette 80 in the present embodiment. When the substrate W is carried in and out from the second cassette 80, the substrate W is supported by the second support portion 172, and the annular frame F is supported by the first support portion 170 and the third support portion 174.

The length L ₁₁ of the first plate-shaped member 140 in the X direction is preferably _shorter than the distance La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction.

Next, the operation and effect of the transport device 200 of the present embodiment will be described.

When the substrate W is carried in and out using the transfer device 200, it is preferable that the second plate-shaped member 150 and the third plate-shaped member 160 of the transfer device 200 can be inserted into the first cassette 60. .. Therefore, the length L ₁₂ of the second plate-shaped member 150 in the X direction is preferably shorter than the distance L _c between the first storage shelf 64 and the second storage shelf 68 in the X direction. Further, the length L ₁₃ of the third plate-shaped member 160 in the X direction is preferably shorter than the distance L _d between the first locking portion 74 and the second locking portion 76 in the X direction.

Further, when the annular frame F is carried in and out using the transport device 200, the first plate-shaped member 140, the second plate-shaped member 150, and the third plate-shaped member of the transport device 200 are inside the second cassette 80. It is preferable that the member 160 can be inserted. Therefore, the length L ₁₁ of the first plate-shaped member 140 in the X direction is preferably _shorter than the distance La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction.

The diameter _L5 of the annular frame F is larger than the diameter d of the substrate W. Here, d is d ₁ or d ₂ (FIG. 1). Therefore, the distance _{Le between the third locking portion 94 and the fourth locking portion 96 in the X direction is longer than the distance L d between} the first locking portion 74 and the second locking portion 76 in the X direction. Further, the distance La between the third storage shelf 84 and the fourth storage shelf 88 in the X direction is _longer than the distance _Lc between the first storage shelf 64 and the second storage shelf 68 in the X direction. Therefore, the first plate-shaped member 140 can be inserted between the third storage shelf 84 and the fourth storage shelf 88, and the second plate-shaped member 150 is inserted between the third storage shelf 84 and the fourth storage shelf 88. It is possible.

The transport device of the present embodiment also makes it possible to provide a transport device capable of transporting various transported objects.

Although some embodiments and examples of the present invention have been described, these embodiments and examples are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be implemented in various other embodiments, and various omissions, replacements, and changes can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

40 Plate-shaped member 42 1st support 44 2nd support 46 3rd support 48 4th support 60 1st cassette 62 1st side wall 63a 1st side end 63b 2nd side end 64 1st storage shelf 66 2nd Side wall 67a Third side end 67b Fourth side end 68 Second storage shelf 70 First ceiling 72 First bottom 74 First locking 76 Second locking 77 First opening 78 Second opening 80 Second Cassette 82 3rd side wall 83a 5th side end 83b 6th side end 84 3rd storage shelf 86 4th side wall 87a 7th side end 87b 8th side end 88 4th storage shelf 90 2nd ceiling part 92 2nd bottom part 94th 3 Locking part 96 4th locking part 97 3rd opening 98 4th opening 100 Conveying device 110 Conveying device 140 1st plate-shaped member 142 1st plate surface 150 2nd plate-shaped member 152 2nd plate surface 160th 3 Plate-shaped member 162 3rd plate surface 170 1st support part 172 2nd support part 174 3rd support part 200 Conveyor device F Circular frame O Orientation flat P Opening T Adhesive member W Substrate

Claims (8)

The substrate is taken from a first cassette having a first side wall having a first accommodating shelf capable of accommodating the substrate and a second side wall having a second accommodating shelf facing the first accommodating shelf and accommodating the substrate. Carrying in and out,
A third side wall having a third storage shelf capable of accommodating an annular frame capable of fixing the substrate to the opening using an adhesive member, and a fourth storage shelf facing the third side wall and accommodating the annular frame. The annular frame is carried in and out from the fourth side wall having and the second cassette having.
It ’s a transport device,
A plate-shaped member extending in the first direction and
The first support portion provided on the plate-shaped member and
A second support portion provided on the plate-shaped member at a distance of a _first distance L1 in the first direction from the first support portion.
A third support portion provided between the first support portion and the second support portion on the plate-shaped member, and a third support portion.
A fourth support portion provided on the plate-shaped member between the third support portion and the second support portion, separated from the third support portion by a _second distance L2 in the first direction. When,
Have,
When the diameter of the substrate is d, L ₂ <d <L ₁ .
Transport device. When the length of the first side wall or the length of the second side wall in the direction parallel to the substrate surface of the housed substrate is L ₃ , L ₃ <L ₁ .
The transport device according to claim 1. _When the diameter of the opening is L4 and the diameter of the annular frame is _L5 , _L4 < _L1 < _L5 .
The transport device according to claim 1 or 2. The heights of the third support portion and the fourth support portion are equal to or lower than the heights of the first support portion and the second support portion.
The transport device according to any one of claims 1 to 3. A first side wall having a first storage shelf capable of accommodating a substrate, a second side wall having a second accommodating shelf facing the first accommodating shelf and accommodating the substrate, and the first accommodating shelf provided. The substrate is carried in and out from the first cassette having the first locking portion and the second locking portion provided on the second storage shelf facing the first locking portion.
A third side wall having a third storage shelf capable of accommodating an annular frame capable of fixing the substrate to the opening using an adhesive member, and a fourth storage shelf facing the third side wall and accommodating the annular frame. The annular frame is carried in and out from the fourth side wall having and the second cassette having.
It ’s a transport device,
A first plate-shaped member having a first plate surface,
A second plate-shaped member having a second plate surface, the second plate surface is adjacent to the first plate-shaped member in the first direction parallel to the first plate surface, and the first plate surface is the first plate surface. A second plate-shaped member which is provided so as to be parallel to the first plate and whose length in the second direction intersecting the first direction is shorter than the length of the first plate-shaped member in the second direction.
A third plate-shaped member having a third plate surface so that the second plate-shaped member is arranged between the first plate-shaped member and the third plate-shaped member in the first direction. Adjacent to the second plate-shaped member, the third plate surface is provided so as to be parallel to the first plate surface and the second plate surface, and the length in the second direction is the second direction. A third plate-shaped member shorter than the length of the second plate-shaped member, and
A first support portion provided on the first plate-shaped member and
A second support portion provided on the second plate-shaped member at a distance of a _first distance L1 in the first direction from the first support portion.
A third support portion provided on the third plate-shaped member at a distance of a _second distance L2 in the first direction from the second support portion.
Equipped with
When the diameter of the substrate is d, L ₂ <d.
Transport device. When the diameter of the opening is L ₄ and the diameter of the annular frame is L ₅ , L ₄ <L ₁ + L ₂ <L ₅ .
The transport device according to claim 5. The length of the first plate-shaped member in the second direction is shorter than the distance between the third storage shelf and the fourth storage shelf in the second direction.
The length of the second plate-shaped member in the second direction is shorter than the distance between the first storage shelf and the second storage shelf in the second direction.
The length of the third plate-shaped member in the second direction is shorter than the distance between the first locking portion and the second locking portion in the second direction.
The transport device according to claim 5 or 6. With a plurality of the second support portions,
When the distance between the plurality of second support portions in the second direction is L ₁₄ , L ₁₄ <d.
The transport device according to any one of claims 5 to 7.

Images