JP2008172175A - 駆動システム及び駆動方法 - Google Patents

駆動システム及び駆動方法 Download PDF

Info

Publication number
JP2008172175A
JP2008172175A JP2007006416A JP2007006416A JP2008172175A JP 2008172175 A JP2008172175 A JP 2008172175A JP 2007006416 A JP2007006416 A JP 2007006416A JP 2007006416 A JP2007006416 A JP 2007006416A JP 2008172175 A JP2008172175 A JP 2008172175A
Authority
JP
Japan
Prior art keywords
optical element
driving
drive
shift
tilt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007006416A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008172175A5 (https=
Inventor
Yusuke Sugiyama
佑輔 杉山
Hirohito Ito
博仁 伊藤
Naoto Fuse
直人 布施
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007006416A priority Critical patent/JP2008172175A/ja
Publication of JP2008172175A publication Critical patent/JP2008172175A/ja
Publication of JP2008172175A5 publication Critical patent/JP2008172175A5/ja
Withdrawn legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2007006416A 2007-01-15 2007-01-15 駆動システム及び駆動方法 Withdrawn JP2008172175A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007006416A JP2008172175A (ja) 2007-01-15 2007-01-15 駆動システム及び駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007006416A JP2008172175A (ja) 2007-01-15 2007-01-15 駆動システム及び駆動方法

Publications (2)

Publication Number Publication Date
JP2008172175A true JP2008172175A (ja) 2008-07-24
JP2008172175A5 JP2008172175A5 (https=) 2010-03-04

Family

ID=39699960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007006416A Withdrawn JP2008172175A (ja) 2007-01-15 2007-01-15 駆動システム及び駆動方法

Country Status (1)

Country Link
JP (1) JP2008172175A (https=)

Similar Documents

Publication Publication Date Title
US7710626B2 (en) Optical element driving apparatus
EP1632799B1 (en) Optical element holding device, lens barrel, exposing device, and device producing method
US7443619B2 (en) Optical element holding apparatus, exposure apparatus and device manufacturing method
US7907256B2 (en) Stage apparatus, exposure apparatus, and method for manufacturing device
US20040189969A1 (en) Drive mechanism, exposure device, optical equipment, and device manufacturing method
KR101539153B1 (ko) 노광 방법 및 노광 장치, 그리고 디바이스 제조 방법
US7859643B2 (en) Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing method
JP5206132B2 (ja) 光学素子保持装置、光学系、露光装置、デバイスの製造方法
WO1999036949A1 (en) Exposure method and lithography system, exposure apparatus and method of producing the apparatus, and method of producing device
JP5125508B2 (ja) 光学要素駆動装置、投影光学系、露光装置、及びデバイスの製造方法
JP2009223034A (ja) 光学素子保持装置、光学系、露光装置、光学特性調整方法及びデバイスの製造方法
US20060215133A1 (en) Image shift optic for optical system
JP2009117556A (ja) 露光装置及びデバイス製造方法
JP2008172175A (ja) 駆動システム及び駆動方法
JP2004111653A (ja) 位置決め装置及びそれを適用した露光装置並びに半導体デバイスの製造方法
JP2004281654A (ja) 駆動機構及びそれを用いた露光装置、デバイスの製造方法
JP4298305B2 (ja) 露光装置及び半導体デバイスの製造方法
US6256085B1 (en) Exposure apparatus
JP2005236258A (ja) 光学装置およびデバイス製造方法
JP7759430B1 (ja) 露光装置、露光方法及び物品の製造方法
US20040223133A1 (en) Stage apparatus, exposure system using the same, and device manufacturing method
JP2008047622A (ja) 露光装置、デバイス製造方法及び光学素子の位置を調整する調整方法
JP2000260690A (ja) Ｘ線露光装置
JP2024039768A (ja) ステージ装置、パターン形成装置、及び物品の製造方法
JPH1145850A (ja) 投影露光装置および方法

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20091218

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100120

A761 Written withdrawal of application

Free format text: JAPANESE INTERMEDIATE CODE: A761

Effective date: 20101207