JP2008161734A - Functional water making apparatus and functional water making method using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small sized inexpensive functional water making apparatus capable of precisely controlling the amount of a functional fluid dissolved into ultrapure water to efficiently make functional water with an accurate functional fluid concentration. <P>SOLUTION: The functional water making apparatus 1 is equipped with a fluid flow rate control means 10 capable of controlling the flow rate of the functional fluid introduced into the functional water making apparatus 1 from a functional fluid introducing port 13 corresponding to the flow rate of ultrapure water introduced from an ultrapure water introducing port 11, the injection means 20 arranged on the downstream side of the fluid flow rate control means 10 and injecting the functional fluid, which flow out of the fluid flow rate control means 10 in a state that the flow rate is controlled by the fluid flow rate control means 10 and the dissolving means 30 arranged on the downstream side of the injection means 20 and dissolving the functional fluid injected in ultrapure water in ultrapure water to make the functional water. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention generates functional water by dissolving a functional fluid (for example, gas such as carbon dioxide, hydrogen, ozone, oxygen, ammonia, or liquid such as ammonia or hydrofluoric acid) in ultrapure water. The present invention relates to a device and a functional water generation method using the same. More specifically, it is possible to precisely control the amount of functional fluid dissolved in ultrapure water to generate functional water in which the concentration of the functional fluid is precisely controlled. The present invention relates to a generating device and an efficient functional water generating method using the same.

  Functional water (water with various functions added) is used in various industrial fields. For example, in the field of semiconductor manufacturing, ultrapure water is used for cleaning a substrate. However, if ultrapure water is used as it is, since the specific resistance of ultrapure water is high, static electricity is generated on the surface of the object to be cleaned. There is an inconvenience of causing dielectric breakdown in semiconductor wiring. In order to eliminate such inconvenience, carbon dioxide gas is dissolved in ultrapure water to obtain functional water having a function of reducing specific resistance, and then used for cleaning the substrate.

  As a related prior art, a method for adjusting the specific resistance of ultrapure water using a hollow fiber membrane and adopting a diffusion dissolution technique is disclosed (for example, see Patent Document 1). In addition, a flow rate sensor for measuring the flow rate in advance, a carbon dioxide gas injector for directly injecting carbon dioxide gas, and a specific resistance measuring device are sequentially arranged in the ultrapure water flow path, and the carbon dioxide gas flow rate is measured by a carbon dioxide mass flow meter. , Calculate the carbon dioxide injection amount from the flow rate fluctuation value in the ultrapure water path, the specific resistance measurement value, and the specific resistance setting value, and match the measured value of the carbon dioxide mass flow meter to this calculation value in real time And a method for obtaining ultrapure water having a predetermined specific resistance value is disclosed (for example, see Patent Document 2).

Japanese Patent Publication No. 5-21841 Japanese Examined Patent Publication No. 7-67554

  However, since the method disclosed in Patent Document 1 employs a diffusion dissolution technique, it is necessary to secure a sufficiently large membrane area of the hollow fiber membrane, and it is difficult to reduce the size of the device. was there. In the method disclosed in Patent Document 2, a flow sensor for measuring the flow rate of ultrapure water, a mass flow meter for measuring the amount of carbon dioxide gas, a specific resistance measuring instrument for measuring the specific resistance of ultrapure water, and these Since the controlling microcomputer is used, the functional water production apparatus itself must be large and expensive, and the flow rate of carbon dioxide gas is controlled according to the change in specific resistance. There was a problem that the specific resistance value fluctuated due to a time delay in the increase / decrease.

  The present invention has been made in view of such problems of the prior art, and the problem is that the amount of functional fluid dissolved in ultrapure water is precisely controlled to ensure accurate function. Another object of the present invention is to provide a functional water generating apparatus that is capable of generating functional water having a concentration of a natural fluid and that is small and inexpensive, and an efficient functional water generating method using the same.

  That is, according to this invention, the functional water production | generation apparatus and functional water production | generation method which are shown below are provided.

  [1] A functional water generator for generating functional water by dissolving a functional fluid in ultrapure water, wherein the ultrapure water inlet into which the ultrapure water is introduced, and the functional fluid are introduced. A flow rate of the functional fluid introduced into the interior from the functional fluid introduction port, corresponding to the flow rate of the ultrapure water introduced into the interior from the ultrapure water introduction port. A fluid flow rate control means capable of controlling the fluid flow rate, and the functional fluid flowing out of the fluid flow rate control means in a state where the flow rate is controlled by the fluid flow rate control means. Injecting means for injecting into pure water; Dissolving means disposed downstream of the injecting means, and dissolving the functional fluid injected into the ultrapure water into the ultrapure water to generate the functional water; Functional water generator (hereinafter referred to as “first functional water generator”) Also referred to).

  [2] The functional water generating device according to [1], wherein the fluid flow rate control unit, the injection unit, and the dissolution unit constitute an integral outer shell structure formed of a resin material.

  [3] The injection means includes a planar porous flat membrane and an O-ring disposed in a pressed state on one surface of the porous flat membrane, An injection film in which the functional fluid that has permeated from one surface side where the O-ring is disposed in a portion corresponding to the inside of the O-ring is injected into the ultrapure water on the other surface side. The surface of the injection film surface is formed so that the permeated functional fluid can be injected into the ultrapure water so as to have a predetermined injection ratio. The functional water generating device according to [1] or [2], which is controlled by adjusting the inner diameter of the ring.

  [4] The functional water generating device according to [3], wherein the porous flat membrane is made of a polytetrafluoroethylene resin, a polyvinylidene fluoride resin, a polypropylene resin, a polyethylene resin, a polysulfone resin, or a polyacrylonitrile resin. .

  [5] The dissolving means is disposed inside the fluidized part and flows into the fluidized part in which the ultrapure water into which the functional fluid is injected flows out of the injecting means, and the functional fluid is injected. The functional water generating device according to any one of [1] to [4], further comprising a baffle plate that inhibits the flow of the ultrapure water that is generated to generate a turbulent flow.

  [6] The functional water generating device according to [5], wherein the dissolving means includes a plurality of the baffle plates, and a plurality of small pieces are filled between the adjacent baffle plates. .

  [7] A functional water generating apparatus for generating functional water by dissolving a functional fluid in ultrapure water, wherein the ultrapure water inlet into which the ultrapure water is introduced and the functional fluid are introduced. A flow rate of the functional fluid introduced into the interior from the functional fluid introduction port, corresponding to the flow rate of the ultrapure water introduced into the interior from the ultrapure water introduction port. A fluid flow rate control means capable of controlling the fluid flow rate, and the functional fluid flowing out of the fluid flow rate control means in a state where the flow rate is controlled by the fluid flow rate control means. A functional water generating device (hereinafter also referred to as “second functional water generating device”) provided with an injection / dissolution unit that injects and dissolves in pure water to generate the functional water.

  [8] The functional water generating device according to [7], wherein the fluid flow rate control unit and the injection / dissolution unit constitute an integral outer shell structure formed of a resin material.

  [9] The injection / dissolution means includes a plurality of hollow fibers made of a hollow fiber membrane, and the functional fluid permeated from one surface side of the hollow fiber is injected into the ultrapure water on the other surface side. The number of the hollow fibers is such that the membrane area of the hollow fiber membrane can be injected into the ultra pure water so that the permeated functional fluid has a predetermined injection ratio. Or the functional-water production | generation apparatus as described in said [7] or [8] controlled by adjusting length.

  [10] The functional water generating device according to any one of [1] to [9], wherein at least a portion through which the ultrapure water and the functional water flow is formed of a resin material.

  [11] The fluid flow rate control means is disposed in the ultrapure water communication path communicating with the ultrapure water introduction port, the functional fluid communication path communicating with the functional fluid introduction port, and the ultrapure water communication path. A cylindrical resistor that is movable in accordance with the flow rate of the ultrapure water, and the cylindrical resistor disposed in the functional fluid communication path in a state surrounded by the cylindrical resistor. A fluid flow rate controller that can move in conjunction with the movement of the child, and a fluid communication path adjustment means that can adjust the size of the functional fluid communication path in accordance with the movement of the fluid flow rate controller. The functional water generator according to any one of [1] to [10].

  [12] The cylindrical resistor has a cylindrical drive magnet built in concentrically, and the fluid flow controller has a built-in rod driven magnet that is magnetically coupled to the cylindrical drive magnet. The fluid communication path adjusting means includes a valve rod disposed at a tip of the fluid flow rate controller, and a valve seat and biasing means disposed in the functional fluid communication path, The urging means is configured to be pressed against the valve seat, and when the cylindrical resistor is moved by the flow of the ultrapure water, the fluid flow rate controller is moved in conjunction, The functional water generating device according to [11], wherein a size of the fluid communication path can be enlarged or reduced by moving a valve stem away from or close to the valve seat while resisting pressing from the urging means.

  [13] The cylindrical resistor is lined with at least one resin selected from the group consisting of a perfluoroalkoxy resin, a polytetrafluoroethylene resin, a fluorinated ethylenepropylene resin, a polypropylene resin, and an ethylenetetrafluoroethylene resin. The functional water generating device according to [11] or [12], wherein the parts constituting the ultrapure water communication path are made of the resin.

  [14] The functional water generator according to any one of [1] to [13], wherein the functional fluid is carbon dioxide gas or ammonia gas.

  [15] A functional water generating method for generating functional water using the functional water generating device according to any one of [1] to [14].

  [16] The functional water generating method according to [15], wherein the functional water is generated using ultrapure water at 10 to 80 ° C.

  The first and second functional water generators of the present invention can efficiently generate functional water having an accurate functional fluid concentration by precisely controlling the amount of functional fluid dissolved in ultrapure water. In addition, there is an effect that it is small and inexpensive.

  According to the method for producing functional water of the present invention, the amount of functional fluid dissolved in ultrapure water is precisely controlled, and functional water having an accurate functional fluid concentration (specific resistance is adjusted accurately) is efficiently used. Can be generated automatically.

  BEST MODE FOR CARRYING OUT THE INVENTION The best mode for carrying out the present invention will be described below, but the present invention is not limited to the following embodiment, and is based on the ordinary knowledge of those skilled in the art without departing from the gist of the present invention. It should be understood that modifications and improvements as appropriate to the following embodiments also fall within the scope of the present invention. In the following description, the term “functional water generator of the present invention” refers to both the first functional water generator and the second functional water generator.

  Drawing 1 is a mimetic diagram showing one embodiment of the 1st functional water generating device of the present invention. The functional water generator 1 of the present embodiment is disposed downstream of the fluid flow rate control means 10 and the fluid flow rate control means 10 that can control the flow rate of the functional fluid corresponding to the flow rate of ultrapure water. An injection means 20 for injecting the functional fluid flowing out from the control means 10 into the ultrapure water, and a function fluid which is disposed downstream of the injection means 20 and which is injected into the ultrapure water is dissolved in the ultrapure water. And a dissolving means 30 for generating water. In FIG. 1, reference numerals 130, 140, and 150 denote solenoid valves, reference numeral 131 denotes a regulator, and reference numeral 132 denotes a specific resistance sensor.

  The fluid flow rate control means 10 is formed with an ultrapure water inlet 11 through which ultrapure water is introduced and a functional fluid inlet 13 through which a functional fluid is introduced. Further, the flow rate of the functional fluid injected into the ultrapure water in the injection unit 20 is in a state controlled by the fluid flow rate control unit 10 located upstream thereof. Further, in the dissolving means 30, the functional fluid is dissolved in the ultrapure water by mixing and stirring the ultrapure water into which the functional fluid has been injected in the injection means 20 on the upstream side thereof, and the target functional water is obtained. Generate.

  8 and 9 are cross-sectional views schematically showing an example of the fluid flow rate control means used in the functional water generating apparatus of the present invention. An ultrapure water inlet 11 and a functional fluid inlet 13 are formed in the fluid flow rate control means 10 shown in FIG. 8, and an ultrapure water communication path 12 and a functional fluid communication path 14 communicate with each other. is doing. The ultrapure water communication path 12 is provided with a cylindrical resistor 15 that can move in accordance with the flow rate of ultrapure water. The functional fluid communication path 14 includes a cylindrical resistor 15. A fluid flow rate controller 16 that can move in conjunction with the movement is disposed in a state surrounded by the cylindrical resistor 15. Further, the fluid flow rate control means 16 is a fluid communication path adjustment means that can adjust the size of the functional fluid communication path 14 corresponding to the movement of the fluid flow rate controller 16 (in FIGS. A valve rod (needle) 16a disposed at the tip of the controller 16 and a valve seat 16b disposed in the functional fluid communication path are provided. The functional fluid communication path 14 and the ultrapure water communication path 12 communicate with each other separately (isolated from each other), and are configured so that the ultrapure water and the functional fluid that circulate are not mixed. . By having these configurations, the fluid flow rate control means 10 can increase (decrease) the flow rate of the functional fluid in response to an increase (decrease) in the flow rate of ultrapure water, and can control precisely. The functional fluid having the flow rate can be fed into the injection means 20 (see FIG. 1).

  An urging means (not shown) such as a spring is disposed on the upper part of the fluid flow controller 16 and presses the fluid flow controller 16 to the valve seat 16b. The cylindrical resistor 15 is slidable in the axial direction with respect to the cylindrical inner wall 17 a of the main body cover 17. In addition, it is preferable to comprise the main body cover 17 with a material with small component elution property to ultrapure water. Specific examples of such materials include perfluoroalkoxy resin (PFA) and polytetrafluoroethylene resin (PTFE). The fluid flow rate control means 10 is hermetically sealed by a main body cover 17 and O-rings 18 and 19 to form a space for accommodating the cylindrical resistor 15 and to form an ultrapure water communication path 12.

  The ultrapure water that has flowed from the ultrapure water inlet 11 flows between the valve rod 15a of the cylindrical resistor 15 and the valve seat 110, and when the flow rate increases, the resistance increases, as shown in FIG. 15 moves in the axial direction (upper part), and the fluid flow rate controller 16 magnetically coupled by the cylindrical drive magnet 111 also moves in the upper direction synchronously. As a result, the functional fluid flows from the functional fluid inlet 13 to the functional fluid outlet 113. 8 and 9, the cylindrical resistor 15 is brought into contact with the valve seat 110 by gravity, and the functional fluid communication path 14 is disposed in the axial direction (vertical direction). By providing biasing means such as a spring on the child 15, the installation direction of the fluid flow rate control means 16 can be arbitrarily set, for example, laterally or obliquely.

  FIG. 10 is a schematic view showing an example of a cylindrical drive magnet, where (a) is a top view and (b) is a cross-sectional view. In FIG. 10, the dimension value given to the cylindrical drive magnet 111 is an example. FIG. 11 is a schematic diagram showing an example of a cylindrical resistor, where (a) is a top view and (b) is a cross-sectional view. Further, FIG. 12 is a schematic diagram showing an example of a fluid flow rate controller. As shown in FIGS. 11 and 12, the cylindrical resistor 15 includes a cylindrical driving magnet 111 concentrically built therein, and the fluid flow rate controller 16 includes the cylindrical driving magnet 11 of the cylindrical resistor 15. And a rod-shaped driven magnet 114 that is magnetically coupled to each other. As shown in FIG. 12, the fluid flow controller 16 can be obtained by housing the rod-like driven magnet 114 in the needle-like member 115 and sealing it with a cap 116.

  The fluid communication path adjusting means includes a valve rod (needle) 16a disposed at the tip of the fluid flow rate controller 16, a valve seat 16b disposed in the functional fluid communication path 14, and an urging means (not shown). ) (See FIG. 8). The valve stem (needle) 16a is configured to be pressed (crimped) against the valve seat 16b by an urging means such as a spring. When the cylindrical resistor 15 is moved by the flow of ultrapure water, The flow rate controller 16 moves in conjunction with the valve rod (needle) 16a disposed at the tip of the fluid flow rate controller 16 while moving away from or close to the valve seat 16b against the pressing force from the urging means, The size of the functional fluid communication path 14 can be enlarged or reduced. The cylindrical resistor 15 is preferably lined. This lining is preferably made of, for example, perfluoroalkoxy resin (PFA), polytetrafluoroethylene resin (PTFE), or the like.

  As the fluid flow controller, for example, a rare earth rod-shaped driven magnet such as samarium cobalt or neodymium, and a valve rod (needle) made of ceramics such as partially stabilized zirconia or silicon carbide, or super hard metal are lined. Those integrally molded with can also be suitably used. Preferred examples of the lining include those made of polyether ether ketone resin (PEEK) and acrylonitrile / butadiene / styrene resin (ABS resin) having corrosion resistance to the functional fluid. The rod-shaped driven magnet of the fluid flow controller and the cylindrical drive magnet of the cylindrical resistor have substantially the same length in the axial direction, and are arranged at positions where the magnetic polarities S and N attract each other and are synchronized with each other. It is possible to move in the axial direction.

  The cylindrical resistor is a group consisting of perfluoroalkoxy resin (PFA), polytetrafluoroethylene resin (PTFE), fluorinated ethylene propylene resin (FEP), polypropylene resin (PP), and ethylene tetrafluoroethylene resin (ETFE). It is preferable that the lining is completely covered with at least one resin selected from the following. Moreover, it is preferable that the component which comprises an ultrapure water communicating path is comprised from the above-mentioned resin. By comprising in this way, the elution to the ultrapure water of a structural component can be prevented. Among these, perfluoroalkoxy resin (PFA) is more preferable because it has a large elution prevention effect and can be melt-molded.

  As shown in FIG. 1, the injection means 20, which is one of the components of the functional water generating apparatus 1 of the present embodiment, has a planar porous flat membrane 21, and is disposed adjacent to the porous flat membrane 21. A perforated plate 22 is provided. FIG. 2 is a cross-sectional view schematically showing an example of the injection means used in the first functional water generator of the present invention. As shown in FIG. 2, the injection means 20 includes a porous flat membrane 21 and an O-ring 23 a disposed in a pressed state on one surface of the porous flat membrane 22. The porous plate 22 is juxtaposed with the porous flat membrane 21, and by itself holds the porous flat membrane 21 having poor self-supporting shape and supports its shape. Examples of the material constituting the porous flat membrane 21 include hydrophobic resins such as polytetrafluoroethylene resin, polyvinylidene fluoride resin, polypropylene resin, polyethylene resin, polysulfone resin, or polyacrylonitrile resin. . The average pore diameter of the porous flat membrane 21 is usually about 0.08 to 0.5 μm, preferably about 0.1 to 0.2 μm. Moreover, as a material which comprises the perforated panel 22, said hydrophobic resin can be mentioned. The average pore diameter of the porous plate 22 is usually about 5 to 10 μm. By allowing the functional fluid 24 to pass through the porous flat membrane 21 and the porous plate 22, fine impurities and the like in the line through which the functional fluid flows can be removed. In FIG. 2, reference numeral 133 denotes a lid, reference numeral 134 denotes an injection means body, and reference numerals 135 and 23a denote O-rings.

  When the operation of the apparatus is stopped and the supply of the functional fluid is stopped, even if the porous flat membrane 21 is made of a hydrophobic resin, water vapor derived from ultrapure water causes the porous flat membrane 21 to pass through. Can penetrate. For this reason, the water vapor permeated to the side to which the functional fluid is supplied through the porous flat membrane 21 may be condensed on the side to which the functional fluid is supplied to become liquid (water). When the operation of the apparatus is resumed in such a case, there is a case where the condensed water blocks the porous flat membrane 21 and the functional fluid becomes difficult to permeate. In order to prevent such an inconvenience, an electromagnetic valve 140 that can be operated by receiving a signal or the like is provided in conjunction with the stop of the operation of the apparatus, the electromagnetic valve 130 is closed to stop the supply of the functional fluid, and the electromagnetic valve It is preferable to open 140 so that dry air is introduced because generation of water on the surface of the porous flat membrane 21 can be prevented. It is preferable that the introduced dry air be discharged to the outside by the action of the electromagnetic valve 150 that can be operated in conjunction with the shutdown of the apparatus.

  In the portion of the porous flat membrane 21 corresponding to the inside of the O-ring 23a, the functional fluid permeated from one surface side where the O-ring 23a is disposed becomes ultrapure water on the other surface side. An implanted film surface 25 to be implanted is formed. The membrane area of the injection membrane surface 25 is controlled by adjusting the inner diameter of the O-ring 23a so that the permeated functional fluid can be injected into ultrapure water so as to have a predetermined injection ratio. ing. That is, if the size of the O-ring 23a is selected according to the concentration of the functional fluid contained in the functional water to be generated, the functional water having a desired concentration can be easily generated. For example, when producing a high concentration of functional water, a relatively large diameter O-ring 23a as shown in FIG. 2 is used. On the other hand, when producing low concentration functional water, a relatively large diameter O-ring 23b as shown in FIG. 3 is used. In addition, the density | concentration of the functional water obtained can be adjusted also by changing a differential pressure | voltage.

  By injecting the functional fluid 24 through the porous flat membrane 21 and then injecting it into the ultrapure water, that is, by disposing a porous membrane at the interface between the functional fluid and the ultrapure water, When this is injected into ultrapure water, an appropriate resistance is generated. Thereby, even if the water pressure of ultrapure water fluctuates, the pressure does not become higher than the pressure at which the functional fluid flows, so that the functional fluid can be supplied to the ultrapure water in a stable state. .

  As shown in FIG. 1, the dissolving means 30 that is one of the components of the functional water generating apparatus 1 of the present embodiment includes a fluidized part 31 in which ultrapure water into which a functional fluid has been injected flows, and a fluidized part 31. Are provided with a plurality of baffle plates 32 that inhibit the flow of ultrapure water into which a functional fluid has been injected and generate turbulence, and a large number of small pieces are disposed between adjacent baffle plates. The shaped molded body is filled. An outflow port 33 through which the functional water flows out to the outside of the functional water generating device 1 is formed at the most downstream side of the fluidizing section 31.

  Generally, simply injecting a functional fluid such as carbon dioxide gas into ultrapure water does not immediately dissolve the injected functional fluid but tends to be contained in the ultrapure water in the form of bubbles. However, by disposing the dissolving means 30 downstream of the injection means 20, the functional fluid can be efficiently dissolved in ultrapure water, and homogeneous functional water can be generated.

  FIG. 4 is a perspective view schematically showing an example of the dissolving means used in the first functional water generator of the present invention. As shown in FIG. 4, in the cylindrical flow part 31 constituting the dissolving means 30, an inflow port 34 into which ultrapure water into which the functional fluid is injected flows into the inside, and the generated functional water to the outside. And an outflow port 33 is formed. In addition, a plurality of baffle plates 32 in which holes 35 are formed are disposed inside the flow portion 31. In addition, as shown in FIG. 5, between the adjacent baffle plates 32, a large number of small pieces (pipe pieces 36) made of a resin such as polytetrafluoroethylene, polypropylene, and nylon are randomly filled. Is preferred. As a result, as shown in FIG. 6, since a more appropriate turbulent flow is generated inside the flow part 31 constituting the dissolving means 30, the functional fluid is more effectively dissolved in ultrapure water. It becomes possible.

  In addition, when arrange | positioning the flow part 31 of the melt | dissolution means 30 horizontally, as shown in FIGS. 4-6, the inflow port 34 becomes the lower side of the perpendicular direction, and the outflow port 33 becomes the upper side of the vertical direction. It is preferable to dispose the fluidized part 31 in the liquid because it is possible to prevent the occurrence of liquid pool.

  The first functional water generator of the present invention obtains functional water in which impurities derived from metals or the like are not mixed, at least at locations where ultrapure water and functional water flow are formed of a resin material. Is preferable because it becomes possible. Examples of the “location where the ultrapure water flows” include various components constituting the fluid flow rate control means 10 and the injection means 20 (see FIG. 1). Examples of the “location where functional water flows” include various parts constituting the dissolving means 30. Examples of the resin material include polypropylene resin, polytetrafluoroethylene resin, perfluoroalkoxy resin, and the like.

  About the location where a functional fluid flows, like the location where the above-mentioned ultrapure water and functional water flow, you may form with a resin material and may comprise with other materials. Examples of the “other materials” include metals such as SUS304 and SUS316.

  Conventionally, a screwed pipe or the like has been used to connect each component such as the injection means to each other. However, in some cases, the screwing becomes weak as the flow rate fluctuates, causing problems such as water leakage. . In addition, since the screwed portion is sealed with a seal tape or the like, a piece of the seal tape is a cause of problems such as mixing of particles.

  In contrast, as shown in FIG. 1, the functional water generating apparatus 1 according to an embodiment of the present invention includes an integrated fluid flow control means 10, an injection means 20, and a dissolution means 30 that are formed of a resin material. A typical outer shell structure 40 is formed. That is, the outer shell structure 40 is a seamless structure without a connection mechanism such as screwing for connecting the respective means to each other. For this reason, the screwing is weakened, and there is no problem such as water leakage, and there is no problem such as mixing of broken pieces of the sealing tape.

  As a connection structure when connecting the functional water generating apparatus of the present invention to a functional fluid or ultrapure water generation source or an external device such as a washing machine, a joint structure as shown in FIG. 13 is adopted. It is preferable to do. That is, conventional screwing or the like into the flow path 41 (ultra pure water communication path, functional fluid communication path, functional water flow path communicating with the functional water outlet, etc.) formed in the outer shell structure 40 of the functional water generator. Instead, the sleeve 43 and the union nut 44 are mounted via the O-ring 42. By securing with a bolt 45 (and washer 46) while ensuring sealing performance with the O-ring 42, a joint structure without screwing can be obtained. By using such a joint structure, it is possible to prevent the occurrence of problems such as mixing of pieces of seal tape. In FIG. 13, reference numeral 47 denotes an O-ring storage part.

  Next, the 2nd functional water production | generation apparatus of this invention is demonstrated. FIG. 7 is a schematic view showing an embodiment of the second functional water generator of the present invention. As shown in FIG. 7, the functional water generating apparatus 100 of the present embodiment has an ultrapure water inlet 11 into which ultrapure water is introduced and a functional fluid inlet 13 into which a functional fluid is introduced. A fluid flow rate control means 10 capable of controlling the flow rate of the functional fluid introduced from the functional fluid inlet port 13 in accordance with the flow rate of the ultrapure water introduced from the ultrapure water inlet port 11; The functional fluid which is disposed downstream of the fluid flow control means 10 and flows out from the fluid flow control means 10 in a state where the flow rate is controlled by the fluid flow control means 10 is injected into and dissolved in ultrapure water to generate functional water. Injection / dissolution means 5 to be provided. The fluid flow rate control means 10 is the same as the first functional water generator 1 (see FIG. 1).

  The injection / dissolution means 5 shown in FIG. 7 includes a plurality of hollow fibers 122 made of a hollow fiber membrane 121, and a functional fluid that has permeated from one side of the hollow fiber 122 (inner peripheral surface in FIG. 7). The other surface side (the outer peripheral surface side in FIG. 7) is injected into ultrapure water. In addition, you may comprise so that the functional fluid which permeate | transmitted from the outer peripheral surface side of the hollow fiber may be inject | poured into ultrapure water in the inner peripheral surface side of a hollow fiber.

  In the functional water generating apparatus 100 of the present embodiment, the membrane area of the hollow fiber membrane 121 is hollow so that the permeated functional fluid can be injected into ultrapure water so as to have a predetermined injection ratio. It is controlled by adjusting the number or length of the yarns 122. That is, if the number or size of the hollow fibers 122 is selected according to the concentration of the functional fluid contained in the functional water to be generated, the functional water having a desired concentration can be easily generated.

  By injecting the functional fluid through the hollow fiber membrane 121 and then injecting it into the ultrapure water, that is, by disposing a porous membrane at the interface between the functional fluid and the ultrapure water, the functional fluid becomes superfluous. When injected into pure water, an appropriate resistance is generated. Thereby, even if the water pressure of ultrapure water fluctuates, the pressure does not become higher than the pressure at which the functional fluid flows, so that the functional fluid can be supplied to the ultrapure water in a stable state. .

  When the operation of the apparatus is stopped and the supply of the functional fluid is stopped, water vapor derived from ultrapure water can permeate the hollow fiber membrane 121. For this reason, the water vapor | steam which permeate | transmitted the functional fluid supply side through the hollow fiber membrane 121 may condense on the side to which a functional fluid is supplied, and may become liquid (water). When the operation of the apparatus is resumed in such a case, there is a case where the agglomerated water blocks the hollow fiber membrane 121 and the functional fluid becomes difficult to permeate. In order to prevent such an inconvenience, an electromagnetic valve 140 that can be operated by receiving a signal or the like is provided in conjunction with the stop of the operation of the apparatus, the electromagnetic valve 130 is closed to stop the supply of the functional fluid, and the electromagnetic valve It is preferable to open 140 so that dry air is introduced because generation of water on the surface of the hollow fiber membrane 121 can be prevented.

  In addition, when a hollow fiber is used as a component of the injection / dissolution means, it is not always necessary to dispose the dissolution means 30 as used in the first functional water generator 1 (see FIG. 1). However, in order to obtain functional water in which the functional fluid is more homogeneously dissolved, it is also preferable to dispose the dissolving means 30 (see FIG. 1).

  Further, as shown in FIG. 7, the functional water generating apparatus 100 according to one embodiment of the present invention has an integral outer shell structure in which the fluid flow rate control means 10 and the injection / dissolution means 5 are formed of a resin material. 125 is constituted. That is, the outer shell structure 125 is a seamless structure without a connection mechanism such as screwing for connecting the respective means to each other. For this reason, the screwing is weakened, and there is no problem such as water leakage, and there is no problem such as mixing of broken pieces of the sealing tape.

  The second functional water generator of the present invention obtains functional water in which impurities derived from metal or the like are not mixed, at least at locations where ultrapure water and functional water flow are formed of a resin material. Is preferable because it becomes possible. Examples of the “location through which ultrapure water flows” include the fluid flow rate control means 10 and various parts constituting the injection / dissolution means 5 (see FIG. 7). Examples of the “location where functional water flows” include various parts constituting the injection / dissolution means 5. Examples of the resin material include polypropylene resin, polytetrafluoroethylene resin, perfluoroalkoxy resin, and the like.

  Next, a case where carbon dioxide gas is used as a functional fluid is taken as an example, and functional water (carbonated water) whose specific resistance is controlled is generated using the first functional water generator 1 (see FIG. 1). The case will be described. The same applies to the second functional water generator. When the specific resistance of ultrapure water is 18 MΩ · cm, the water temperature is 23 ° C., and the flow rate is 16 L / min, the specific resistance is controlled to 0.1 MΩ · cm, 0.2 MΩ · cm, and 0.3 MΩ · cm. In order to generate each of the carbonated water, it is theoretically necessary to set the carbon dioxide gas flow rate (injection amount) to 515 mL / min, 144 mL / min, and 68 mL / min.

When a polytetrafluoroethylene resin membrane having an average pore diameter of 0.1 μm is used as the porous flat membrane 21, for example, when the differential pressure is 0.1 MPa, the carbon dioxide gas flow rate is 600 mL / cm ² · min. Then, the film area of the injection film surface 25 (see FIG. 2) may be 0.2 cm ² (diameter≈φ5 mm). When this porous flat membrane 21 is used, if a differential pressure of 0.1 MPa is applied, ultrapure water can be supplied at a flow rate of 120 mL / min, so that the specific resistance is controlled to 0.2 MΩ · cm. Carbonated water can be produced. Under such circumstances, when the ultrapure water flow rate is reduced, the cylindrical resistor 15 is lowered and the fluid flow rate controller 16 is also lowered in conjunction with a valve rod (at the tip of the fluid flow rate controller 16 ( The size of the functional fluid communication passage 14 is reduced by the proximity of the needle 16a to the valve seat 16b. Since the flow rate of carbon dioxide gas is reduced in proportion to the size of the functional fluid communication path 14 being reduced, the specific resistance of the obtained carbonated water is generally maintained at the desired 0.2 MΩ · cm. .

Similarly, when the flow rate of ultrapure water is 12 L / min, in order to generate carbonated water having a specific resistance controlled to 0.1 MΩ · cm, it is theoretically necessary to set the carbon dioxide gas flow rate to 386 mL / min. is there. For example, if the differential pressure is 0.1 MPa, the film area of the injection film surface 25 (see FIG. 2) may be 0.7 to 0.8 cm ² (diameter≈10 mm). Even if the flow rate of ultrapure water decreases under such circumstances, the flow rate of carbon dioxide gas decreases in proportion to this, so that the specific resistance of the obtained carbonated water is generally maintained at the desired 0.1 MΩ · cm. The Rukoto.

In addition, a porous flat membrane having a membrane area of 0.2 cm ² on the injection membrane surface 25 (see FIG. 2) used for producing carbonated water having a specific resistance controlled to 0.2 MΩ · cm is used as it is. Even if it is used, if the differential pressure is 0.36 MPa, it is possible to produce carbonated water whose specific resistance is controlled to 0.1 MΩ · cm. Furthermore, if it is difficult to increase the differential pressure to 0.36 MPa due to the potential of the carbon dioxide supply facility, the ultrapure water flow rate may be limited. For example, when the upper limit of the differential pressure is 0.2 MPa, the carbon dioxide gas flow rate is 240 mL / min, so the ultrapure water flow rate may be in the range of 1 to 7 L / min. For reference, Table 1 shows the relationship between the flow rate of ultrapure water and the flow rate of carbon dioxide when purifying carbonated water having a specific resistivity.

  The functional fluid used in the present invention is preferably carbon dioxide gas or ammonia gas.

  On the other hand, the functional water production | generation method of this invention is a method of producing | generating functional water using the above-mentioned functional water production | generation apparatus. By using the functional water generating apparatus having the above-described configuration, it is possible to efficiently generate functional water having an accurate functional fluid concentration (specific resistance is adjusted accurately).

  When functional water is used for cleaning or rinsing the substrate, it is known that the higher the temperature of the functional water, the higher the effect of cleaning and the like. Conventionally, the functional water is heated and used for cleaning, etc. . However, taking as an example the case where the functional fluid dissolved in the functional water is carbon dioxide, when heated, bubbles may be generated due to the difference in solubility due to temperature. If the substrate or the like is cleaned with the functional water of the upper body in which such bubbles are generated, the cleaning is insufficient at the portion where the bubbles hit, and the cleaning efficiency may be reduced. For example, the solubility of carbon dioxide in 1 mL of water is 0.828 mL at 25 ° C., whereas it is 0.367 mL at 80 ° C. For this reason, if it heats from 25 degreeC to 80 degreeC, 0.461 mL of the solubility difference will generate | occur | produce as a bubble.

  In particular, when a functional water generating apparatus according to an embodiment of the present invention formed of a resin material is used at a location where ultrapure water flows, it is about 10 to 80 ° C, preferably about 20 to 80 ° C, and more preferably 60. Functional water can be generated using ultrapure water heated to about -80 ° C. That is, according to the functional water generating method of the present invention, since the functional water generating device capable of circulating the heated ultrapure water is used, it is not necessary to reheat the obtained functional water, and bubbles are generated. Difficult functional water can be generated.

  EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example, this invention is not limited to these Examples.

(Example 1)
Ultra pure water flow rate in a cycle using a functional water generator configured as shown in FIG. 1 and using carbon dioxide as a functional fluid for about 5 minutes at 1 L / min and then for about 5 minutes at 10 L / min , And the change in the specific resistance of the carbonated water actually obtained when the functional water (carbonated water) having a specific resistance of 0.2 MΩ · cm was to be generated was measured. FIG. 14 shows the flow rate of ultrapure water (L / min) and specific resistance (MΩ · M) with respect to time (min) when functional water (carbonated water) is generated using the functional water generator of Example 1. cm) is plotted. Moreover, the main structure of the used functional water production | generation apparatus, the supply conditions of ultrapure water and a functional fluid (carbonated water), etc. are shown below.

(1) Fluid flow rate control means:
As the cylindrical resistor 15 constituting the fluid flow rate control means, a cylindrical drive magnet 111 (neodymium magnet) as shown in FIG. 11 concentrically built in a float 15b made of polypropylene was used. Further, as the fluid flow rate controller 16, a rod-like driven magnet 114 (neodymium magnet) as shown in FIG. 12 was housed in a needle-like member 115 made of SUS316 and sealed with a cap 116.

(2) Injection means:
As the porous flat membrane, a polytetrafluoroethylene hydrophobic membrane (injection membrane surface diameter: 5 mm) having an average pore size of 0.1 μm is used, and as the porous plate, polytetrafluoroethylene having an average pore size of 5 μm. A perforated plate (diameter: 5 mm, thickness: 5 mm) was used.

(3) Dissolution means:
As a melting means, as shown in FIG. 5, four baffle plates 32 each having a diameter of 30 mm and a length of 130 mm in a circular plate having a diameter of 29.5 mm and five holes having a diameter of 5 mm are provided. Further, a total of about 140 pipe pieces 36 each made by cutting a polytetrafluoroethylene tube having an inner diameter of 4 mm and an outer diameter of 6 mm into a length of 12 mm between adjacent baffle plates 32 were used. . In order to prevent the pipe piece 36 from flowing out, a perforated plate 37 having 21 holes of φ4 mm was installed in the vicinity of the outlet 33 of the melting means 30 (see FIG. 4). In addition, the baffle plate 32 was arrange | positioned in the flow part 31 so that the position of the hole part 35 of the adjacent baffle plates 32 might become an other side (refer FIG. 4).

(4) Supply conditions of ultrapure water and functional fluid (carbon dioxide):
Ultra pure water having a specific resistance of 18 MΩ · cm and a water temperature of 23 ° C. was used, and was supplied at a water pressure of 0.2 MPa using a pressure reducing valve so that the water pressure did not fluctuate even if the flow rate fluctuated. Carbon dioxide was supplied at a pressure of 0.3 MPa. The differential pressure between the water pressure and the pressure of carbon dioxide was 0.1 MPa, and carbon dioxide was injected (bubbled) into the ultrapure water by this differential pressure.

  When the ultrapure water flow rate was 10 L / min, the specific resistance of the obtained carbonated water was 0.18 MΩ · cm. The carbon dioxide flow rate when the ultrapure water flow rate was 10 mL / min was 90 NmL / min, and the carbon dioxide flow rate when the ultrapure water flow rate was 1 mL / min was 10 NmL / min. In general, the allowable range for the set specific resistance of 0.2 MΩ · cm is about 0.1 to 0.3 MΩ · cm. However, even if the ultrapure water flow rate is 10 L / min, the specific resistance is Since carbonated water of 0.18 MΩ · cm could be obtained, it can be said that it is sufficiently within the range of use.

(Example 2)
The carbonated water actually obtained in the same manner as in Example 1 except that instead of the above-mentioned (2) injection means, the injection / dissolution means 5 (see FIG. 7) having a hollow fiber having the following structure was used. When the change in specific resistance was measured, the result was the same as in Example 1.

(5) Injection / dissolution means:
As the hollow fiber, a bundle of about 300 hydrophobic hollow fibers (inner diameter: 0.2 mm, length: 200 mm) made of polypropylene having an average pore diameter of 0.1 μm is used, and ultrapure is formed outside the hollow fiber membrane. Water was circulated and carbon dioxide gas was circulated inside. Ultrapure water was supplied at a water pressure of 0.2 MPa, and carbon dioxide gas was supplied at a pressure of 0.05 MPa.

  The functional water generating apparatus and the functional water generating method using the same of the present invention include, for example, semiconductor industry, electronic / electric industry, chemical industry, etc. that require cleaning of silicon wafers, liquid crystal glass substrates, organic EL glass substrates, etc. It is suitably used in various industrial fields.

It is a mimetic diagram showing one embodiment of the 1st functional water generating device of the present invention. It is sectional drawing which shows typically an example of the injection | pouring means used for the 1st functional water production | generation apparatus of this invention. It is sectional drawing which shows typically an example of the injection | pouring means used for the 1st functional water production | generation apparatus of this invention. It is a perspective view which shows typically an example of the melt | dissolution means used for the 1st functional water production | generation apparatus of this invention. It is a perspective view which shows typically the other example of the melt | dissolution means used for the 1st functional water production | generation apparatus of this invention. It is explanatory drawing which shows typically the flow of the functional water in a melt | dissolution means. It is a schematic diagram which shows one Embodiment of the 2nd functional water production | generation apparatus of this invention. It is sectional drawing which shows typically an example of the fluid flow control means used for the functional water production | generation apparatus of this invention. It is sectional drawing which shows typically an example of the fluid flow control means used for the functional water production | generation apparatus of this invention. It is a schematic diagram which shows an example of a cylindrical drive magnet. It is a schematic diagram which shows an example of a cylindrical resistor. It is a schematic diagram which shows an example of a fluid flow control element. It is a schematic diagram which shows an example of a joint structure. Plotting ultrapure water flow rate (L / min) and specific resistance (MΩ · cm) against time (min) when functional water (carbonated water) is generated using the functional water generator of Example 1 It is a graph.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,100: Functional water production | generation apparatus, 5: Injection | pouring / dissolution means, 10: Fluid flow control means, 11: Ultrapure water inlet, 12: Ultrapure water communication path, 13: Functional fluid inlet, 14: Function 15: cylindrical resistor 15a: valve stem, 15b: float, 16: fluid flow controller, 16a: valve stem (needle), 16b: valve seat, 17: body cover, 17a: cylindrical inner wall, 18, 19: O-ring, 20: injection means, 21: porous flat membrane, 22: porous plate, 23a, 23b: O-ring, 24: functional fluid, 25: injection membrane surface, 30: dissolution means, 31: flow part, 32: baffle plate, 33: outlet, 34: inlet, 35: hole, 36: pipe piece, 37: perforated plate, 40, 125: outer shell structure, 41: flow path, 42: O-ring, 43: Sleeve, 44: Union nut, 45: Bolt, 46 Washer, 47: O-ring housing, 110: valve seat, 111: cylindrical drive magnet, 113: functional fluid outlet, 114: rod-shaped driven magnet, 115: needle-like member, 121: hollow fiber membrane, 122: hollow Thread, 130, 140, 150: Solenoid valve, 131: Regulator, 132: Resistivity sensor, 133: Lid, 134: Injection body, 135: O-ring

Claims (16)

A functional water generator for generating functional water by dissolving a functional fluid in ultrapure water,
The ultrapure water introduction port into which the ultrapure water is introduced and the functional fluid introduction port into which the functional fluid is introduced, and the flow rate of the ultrapure water introduced into the inside from the ultrapure water introduction port Correspondingly, a fluid flow rate control means capable of controlling the flow rate of the functional fluid introduced from the functional fluid introduction port,
An injection unit disposed downstream of the fluid flow rate control unit and injecting the functional fluid flowing out of the fluid flow rate control unit into the ultrapure water in a state where the flow rate is controlled by the fluid flow rate control unit;
A functional water generating apparatus comprising: a dissolving unit that is disposed downstream of the injection unit and that generates the functional water by dissolving the functional fluid injected into the ultrapure water in the ultrapure water.   The functional water generating apparatus according to claim 1, wherein the fluid flow rate control unit, the injection unit, and the dissolution unit constitute an integral outer shell structure formed of a resin material. The injection means comprises a planar porous flat membrane and an O-ring disposed in a pressed state on one surface of the porous flat membrane,
The functional fluid permeated from one side of the porous flat membrane corresponding to the inside of the O-ring is disposed on the other side of the ultrapure water. The injection film surface to be injected into is formed,
By adjusting the inner diameter of the O-ring so that the membrane area of the injection membrane surface can be injected into the ultrapure water so that the permeated functional fluid has a predetermined injection ratio. The functional water generating apparatus according to claim 1 or 2, which is controlled.   The functional water generator according to claim 3, wherein the porous flat membrane is composed of polytetrafluoroethylene resin, polyvinylidene fluoride resin, polypropylene resin, polyethylene resin, polysulfone resin, or polyacrylonitrile resin. The dissolving means comprises
A fluidizing part that flows out of the injecting means and in which the ultrapure water into which the functional fluid has been injected flows;
The baffle plate which is arranged inside the flow part, and inhibits the flow of the ultrapure water into which the functional fluid was injected, and generates a turbulent flow. Functional water generating device as described in 1. The melting means comprises a plurality of the baffle plates,
The functional water generating apparatus according to claim 5, wherein a large number of small pieces are filled between the adjacent baffle plates. A functional water generator for generating functional water by dissolving a functional fluid in ultrapure water,
The ultrapure water introduction port into which the ultrapure water is introduced and the functional fluid introduction port into which the functional fluid is introduced, and the flow rate of the ultrapure water introduced into the inside from the ultrapure water introduction port Correspondingly, a fluid flow rate control means capable of controlling the flow rate of the functional fluid introduced from the functional fluid introduction port,
The functional fluid which is disposed downstream of the fluid flow rate control unit and flows out of the fluid flow rate control unit in a state where the flow rate is controlled by the fluid flow rate control unit is injected into and dissolved in the ultrapure water. A functional water generator comprising an injection / dissolution means for generating water.   The functional water generating apparatus according to claim 7, wherein the fluid flow rate control unit and the injection / dissolution unit constitute an integral outer shell structure formed of a resin material. The injection / dissolution means comprises a plurality of hollow fibers made of a hollow fiber membrane,
The functional fluid permeated from one side of the hollow fiber is injected into the ultrapure water on the other side;
The number or length of the hollow fibers is adjusted so that the membrane area of the hollow fiber membrane can be injected into the ultrapure water so that the permeated functional fluid has a predetermined injection ratio. The functional water generating apparatus of Claim 7 or 8 controlled by this.   The functional water generating device according to any one of claims 1 to 9, wherein at least a portion through which the ultrapure water and the functional water flow is formed of a resin material. The fluid flow rate control means,
An ultrapure water communication passage communicating with the ultrapure water inlet;
A functional fluid communication path communicating with the functional fluid inlet;
A cylindrical resistor disposed in the ultrapure water communication path and movable in accordance with a flow rate of the ultrapure water;
A fluid flow rate controller disposed in the functional fluid communication path in a state surrounded by the cylindrical resistor and movable in conjunction with the movement of the cylindrical resistor;
The functional water according to claim 1, further comprising: a fluid communication path adjusting unit capable of adjusting a size of the functional fluid communication path corresponding to the movement of the fluid flow rate controller. Generator. The cylindrical resistor is a concentric built-in cylindrical drive magnet,
The fluid flow controller has a built-in rod-shaped driven magnet magnetically coupled to the cylindrical drive magnet,
The fluid communication path adjusting means includes a valve rod disposed at a tip of the fluid flow rate controller, and a valve seat and biasing means disposed in the functional fluid communication path, It is configured to be pressed against the valve seat by the biasing means,
When the cylindrical resistor moves due to the flow of the ultrapure water, the fluid flow rate controller moves in conjunction with the valve rod, and the valve stem is separated from or close to the valve seat against the pressing force from the biasing means. The functional water generating device according to claim 11, wherein the size of the fluid communication path can be enlarged or reduced. The cylindrical resistor is lined with at least one resin selected from the group consisting of perfluoroalkoxy resins, polytetrafluoroethylene resins, fluorinated ethylene propylene resins, polypropylene resins, and ethylene tetrafluoroethylene resins. Yes,
The functional water generating apparatus according to claim 11 or 12, wherein the parts constituting the ultrapure water communication path are made of the resin.   The functional water generator according to any one of claims 1 to 13, wherein the functional fluid is carbon dioxide gas or ammonia gas.   The functional water production | generation method which produces | generates functional water using the functional water production | generation apparatus as described in any one of Claims 1-14.   The functional water production | generation method of Claim 15 which produces | generates the said functional water using a 10-80 degreeC ultrapure water.

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