KR102094823B1 - Pesticide spraying apparatus - Google Patents

Abstract

An ozone water supply system according to an embodiment of the present invention includes: an ozone water tank for storing ozone water; an ozone water circulation line provided to discharge the ozone water stored in the ozone water tank and then introduce the same back into the ozone water tank; and a main dissolution module disposed on the ozone water circulation line and supplying ozone gas produced by an ozone gas generator to the ozone water circulated through the ozone water circulation line to dissolve the same. According to the present invention, it is possible to efficiently dissolve ozone gas in water in an ozone water production mode.

Description

Ozone water supply system {PESTICIDE SPRAYING APPARATUS}

The present invention relates to an ozone water supply system, and more particularly, to an ozone water supply system capable of significantly improving the dissolved efficiency of ozone gas when generating ozone water, and generating and supplying ozone water having a high ozone concentration more smoothly. .

In general, ozone (ozone) has a strong oxidizing power, and has been used as an oxidizing agent for a long time. Currently, it is widely used for sterilization, deodorization, washing, and decolorization in various fields in addition to water and air purification facilities. That is, in recent years, the use of ozone is increasing in the fields of fine chemicals and electric and electronic fields.

Ozone is mainly used as a state of ozone water in which ozone gas is mixed with liquid water. The ozone water as described above is excellent in deodorization, sterilization and cleaning, and has the advantage that no residue remains after use. Therefore, recently, a technique using ozone water in a cleaning process such as a semiconductor material or a display material has been developed.

The cleaning process as described above is a process for removing contaminants from materials, and is an essential process in various industrial fields including electricity / electronics, machinery / metals, and the like. The cleaning method using ozone water is more widely used in recent years because it is safer than the cleaning method using chemicals such as sulfuric acid and hydrochloric acid and is easy to post-process after cleaning.

On the other hand, ozone gas has a problem that it is difficult to efficiently produce high-concentration ozone water due to low solubility in water. Accordingly, it is difficult to sufficiently secure and utilize the ability to purify ozone water relative to the amount of ozone gas used. Therefore, recently, various methods for increasing the dissolved concentration of ozone gas have been researched and developed.

For example, in Korean Patent Registration No. 10-0973491 (invention name: ozone bubble-containing ozone water generating device, registration date: 2010.07.27.), An apparatus for generating ozone water containing ozone bubbles is disclosed. That is, in Korean Registered Patent No. 10-0973491 (invention name: ozone bubble-containing ozone water generating device, registration date: 2010.07.27.), Ozone water is added to ozone nanobubble to generate ozone nanobubble-containing ozone water having excellent cleaning power. Can be used.

However, despite the existing efforts to develop various technologies, there is a limit to dramatically increasing the dissolved concentration of ozone gas in ozone water. Therefore, it is difficult to sufficiently secure the production efficiency and use effect of ozone water compared to the amount of ozone gas used, and thus there is a problem that the overall efficiency of the system for producing and supplying ozone water is lowered.

Korean Registered Patent No. 10-0973491 (Registration date: 2010.07.27.)

An embodiment of the present invention provides an ozone water supply system that can significantly increase the dissolved efficiency of ozone gas when generating ozone water.

In addition, an embodiment of the present invention provides an ozone water supply system capable of more smoothly producing and supplying ozone water having a high ozone concentration.

In addition, an embodiment of the present invention provides an ozone water supply system capable of increasing the dissolved efficiency of ozone gas by supplying ozone gas in a manner that generates a number of bubbles in water when ozone water is generated.

According to an embodiment of the present invention, an ozone water tank for storing ozone water, an ozone water circulation line provided to flow out of the ozone water stored in the ozone water tank to the ozone water tank again, and ozone disposed on the ozone water circulation line Provided is an ozone water supply system including a main dissolved module that supplies and dissolves ozone gas generated by a gas generator to ozone water circulating through the ozone water circulation line.

Preferably, the main dissolved module may generate a number of bubbles in ozone water passing through the ozone water circulation line using the ozone gas generated by the ozone gas generator.

Preferably, the main dissolved module, an ozone water generating injector connected to the ozone gas generator to form an internal flow path communicating with the ozone water circulation line and guide the ozone gas generated by the ozone gas generator to the internal flow path. It can contain.

The ozone water generating injector as described above may be provided as a venturi injector.

Preferably, the main dissolved module is mounted on the ozone water generating injector and transmits ozone gas generated by the ozone gas generator to the internal flow passage of the ozone water generating injector, thereby providing a plurality of bubbles to the ozone water passing through the internal flow passage. It may further include a bubble generator to generate.

Here, the ozone water generating injector may include an injector connecting portion connected to the ozone gas generator to supply the ozone gas generated by the ozone gas generator to the internal flow path. In addition, the bubble generator may be disposed inside the injector connection.

Preferably, the bubble generator is disposed inside the injector connecting portion, the bubble generator body provided in a tube shape with one end blocked, and formed at the other end of the bubble generator body so as to introduce ozone gas generated by the ozone gas generator. A gas inlet disposed in communication with a connection portion of the injector connecting portion and the ozone gas generator, and supplying the ozone gas introduced into the gas inlet to the internal flow path to generate a number of bubbles in the ozone water passing through the internal flow path So that it may include a gas outlet provided in the bubble generator body.

Here, the body of the bubble generator may be disposed so that the gas discharge unit is submerged in ozone water flowing through the internal flow path.

On the other hand, the injector connection portion, a tubular portion provided to protrude in a tubular shape to communicate with the internal flow path, and coupled to cover the end of the tubular portion, may include a stopper connected to the ozone gas generator through an ozone supply line .

The bubble generator main body may be detachably connected to the stopper portion and may be accommodated in the tubular portion so as to be spaced apart from the inner circumferential surface of the tubular portion when the stopper portion and the tubular portion are engaged.

In addition, the ozone water supply system according to an embodiment of the present invention may further include a check valve disposed on the ozone supply line to prevent backflow of ozone water from the main dissolved module toward the ozone gas generator.

The check valve may be provided detachably at a connection portion between the ozone supply line and the stopper.

In addition, the gas discharge unit may include a plurality of discharge holes for discharging ozone gas flowing into the gas inlet into the internal flow path.

Preferably, the ozone water supply system according to an embodiment of the present invention may further include an ozone water pump provided in the ozone water circulation line to pump ozone water flowing through the ozone water circulation line.

The ozone water pump may be disposed upstream of the ozone water circulation line than the main dissolved module.

Preferably, the ozone water supply system according to an embodiment of the present invention is connected to the main dissolved module and supplies carbon dioxide (CO ₂ ) to the main dissolved module to adjust the pH concentration of ozone water flowing through the ozone water circulation line. It may further include a pH regulator.

Preferably, the ozone water supply system according to an embodiment of the present invention may further include a mixing chamber disposed in the ozone water circulation line to further increase the ozone concentration by mixing ozone water generated in the main dissolved module.

The mixing chamber may be disposed downstream of the ozone water circulation line than the main dissolved module.

The ozone water supply system according to an embodiment of the present invention supplies ozone gas generated by an ozone gas generator to ozone water flowing along the ozone water circulation line to generate ozone water in the main dissolved module, and the main dissolved module uses ozone gas Therefore, since the structure generates a large number of bubbles in the ozone water, the ozone gas can be efficiently dissolved in water in the ozone water generation mode.

In addition, since the ozone water supply system according to an embodiment of the present invention is a structure that supplies ozone gas to the ozone water in the form of bubbles by the main dissolved module, the contact surface of the ozone gas and water increases, thereby significantly improving the dissolved efficiency of ozone gas. It is possible to effectively increase the production efficiency and dissolved concentration of ozone water.

In addition, since the ozone water supply system according to the embodiment of the present invention has a structure in which a bubble generator is disposed in the injector connection part of the ozone water production injector of the main dissolved module, the ozone gas supplied through the ozone supply line flows through the internal passage of the ozone water production injector It is supplied to the passing ozone water, but the ozone gas can generate a number of bubbles in the ozone water, thereby increasing the contact surface between the ozone water and the ozone gas.

In addition, since the ozone water supply system according to an embodiment of the present invention supplies ozone gas to the ozone water in the form of bubbles in the ozone water generating injector, the contact surface of the gas liquid increases when the ozone water and ozone gas are in contact with each other, so that the substance transfer of ozone water and ozone gas Efficiency can be improved, and accordingly, ozone gas can be more effectively dissolved in ozone water. Therefore, in this embodiment, since the ozone gas supplied in the form of bubbles by the bubble generator is provided to the ozone water passing through the internal flow path of the ozone water generating injector, the dissolved efficiency of the ozone gas can be improved to increase the production efficiency of the ozone water. , It can produce ozone water with high ozone concentration more smoothly.

In addition, the ozone water supply system according to an embodiment of the present invention, since a bubble generator is disposed in the injector connection part of the ozone water generating injector, the check valve is disposed on the ozone supply line connecting the injector connection part and the ozone gas generator, so ozone Since the check valve is opened only when ozone gas is supplied from the supply line to the injector connection part of the ozone water production injector, it is possible to prevent the ozone water from flowing backward from the injector connection of the ozone water production injector to the ozone supply line.

In addition, the ozone water supply system according to an embodiment of the present invention can improve the convenience of installation of the check valve because it is not necessary to install the check valve on the injector connection of the ozone water generating injector, and instead of the check valve on the injector connection of the ozone water generating injector The installation convenience of the bubble generator can also be improved by installing the bubble generator.

In addition, the ozone water supply system according to an embodiment of the present invention is a structure accommodated in the inside of the tubular portion of the injector connecting portion with the bubble generator main body of the bubble generator attached to the stopper of the injector connecting portion, so that the bubble generator is installed inside the injector connecting portion. It can be installed stably, and the bubble generator can be replaced and maintained very easily.

In addition, the ozone water supply system according to an embodiment of the present invention is a structure for adjusting the pH concentration of ozone water flowing through the ozone water circulation line by using a pH controller that supplies carbon dioxide to the main dissolved module, so that the ozone water The pH concentration can be easily adjusted to an appropriate level, and the performance of ozone water used in external devices can be stably secured.

 In addition, since the ozone water supply system according to an embodiment of the present invention mixes the ozone water generated in the main dissolved module again in the mixing chamber, the ozone water generated in the main dissolved module is mixed to mix the ozone water generated in the main dissolved module to form ozone gas contained in the ozone water Can be dissolved in ozone water again. Therefore, in this embodiment, the ozone concentration of ozone water can be further improved by the mixing chamber, and the amount of insoluble ozone gas discharged without being dissolved in ozone water can be reduced.

1 is a perspective view schematically showing an ozone water supply system according to an embodiment of the present invention.
FIG. 2 is a view schematically showing the ozone water supply system shown in FIG. 1.
FIG. 3 is a side view showing the main dissolved module shown in FIG. 2.
FIG. 4 is a view showing the internal structure of the main dissolved module shown in FIG. 3.
5 is an exploded perspective view showing a main part of the main dissolved module shown in FIG. 3.
FIG. 6 is a view showing the arrangement structure of the bubble generator shown in FIG. 5.
7 is a view showing the bubble generator shown in FIG.
8 is a view showing an operating state of the ozone water generation mode in the ozone water supply system shown in FIG.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the accompanying drawings. However, the present invention is not limited or limited by the embodiments. The same reference numerals in each drawing denote the same members.

1 is a perspective view schematically showing an ozone water supply system 10 according to an embodiment of the present invention, and FIG. 2 is a view schematically showing the ozone water supply system 10 shown in FIG. 1. FIG. 3 is a side view showing the main dissolved module 600 shown in FIG. 2, and FIG. 4 is a diagram showing the internal structure of the main dissolved module 600 shown in FIG. 3. 5 is an exploded perspective view showing a main part of the main dissolved module 600 shown in FIG. 3, FIG. 6 is a view showing the arrangement structure of the bubble generator 604 shown in FIG. 5, and FIG. 7 is shown in FIG. It is a view showing the bubble generator 604. 8 is a view showing an operating state of the ozone water generation mode in the ozone water supply system 10 shown in FIG.

1, 2 and 8, the ozone water supply system 10 according to an embodiment of the present invention is an ozone water tank 100, a water supply line 200, an ozone gas generator 300, an ozone supply line It may include a 400, the ozone water circulation line 500, the main dissolved module 600, the ozone water discharge line 700, the recycling line 800, and the recycle dissolved module 900.

The ozone water supply system 10 of this embodiment is a device for dissolving ozone gas (OZ) in water (DW) to generate ozone water (OW) and supplying it to an external device that needs it. For example, as an external device that receives ozone water (OW) by the ozone water supply system 10, an ozone water cleaning device used in a cleaning process when manufacturing a semiconductor material or a display member is typical.

On the other hand, the ozone water supply system 10 of this embodiment can operate by appropriately combining an ozone water generation mode, an ozone water discharge mode, a water supply mode, or a recycling mode. The ozone water generation mode is a mode for generating ozone water (OW) having a desired ozone concentration, and the ozone water discharge mode is a mode for discharging ozone water (OW) stored in the ozone water tank 100 to an external device, and the water supply mode is ozone water (OW). It is a mode for supplying the water (DW) used for the generation of ozone to the ozone water tank 100, and the recycling mode is the ozone water tank (OZ ') insoluble ozone gas (OZ') discharged from the ozone water (OW) stored in the ozone water tank (100) It is a mode in which it is dissolved again by supplying water (DW) supplied to 100) again.

1, 2 and 8, the ozone water tank 100 of this embodiment is a means for storing ozone water (OW). The ozone water OW for supplying to an external device may be stored inside the ozone water tank 100 as described above.

The ozone water tank 100 may be provided with an ozone water level sensing unit 110 for measuring the storage level of the ozone water OW in real time. The ozone water level sensing unit 110 as described above may be configured with various types of water level sensing sensors 112. As an example, the water level sensor 112 of the ozone water level detector 110 may include at least one of a floating sensor, an ultrasonic sensor, or a capacitive sensor. On the other hand, in the present embodiment, although the water level sensor 112 is described as being disposed on the water level sensing line 114, both ends of which are connected to the upper and lower parts of the ozone water tank 100, but is not limited thereto, and the ozone water tank 100 It can also be installed directly on.

An ozone gas killer unit 120 may be provided at an upper portion of the ozone water tank 100 to purify the insoluble ozone gas OZ 'discharged from the ozone water OW and discharge it to the outside. The ozone gas killer 120 as described above is a device used when it is necessary to discharge the insoluble ozone gas (OZ ') stored inside the ozone water tank 100 to the outside, the insoluble ozone gas (OZ' ) Can be decomposed into oxygen or water, which is harmless to people and the environment, and then discharged to the outside.

Here, the ozone gas killer unit 120 may be disposed in the ozone gas discharge line 122 connected to the top of the ozone water tank 100. The ozone gas discharge line 122 may be provided with an ozone gas discharge valve 124 for controlling the discharge of insoluble ozone gas (OZ '). The ozone gas discharge valve 124 as described above is selectively opened only when discharge of the insoluble ozone gas (OZ ') is required, or the proper size of the insoluble ozone gas (OZ') is always discharged at a predetermined amount. It may be opened and maintained in an opening amount.

1, 2 and 8, the water supply line 200 of this embodiment is a flow path for guiding water (DW) supplied to the ozone water tank 100. The water supply line 200 as described above may be formed of a pipe or a hose. One end of the water supply line 200 may be connected to the ozone water tank 100, and the other end of the water supply line 200 may be connected to a water supply source (not shown) for supplying water at a set water pressure. In one example, the water supply source may include a water tank that stores water DW supplied to the ozone water tank 100, and a water supply pump that pumps water stored in the water tank into the water supply line 200.

It is preferable to use deionized water (DIW) called 'pure water' or 'ultra pure water' as the water DW supplied through the water supply line 200. The deionized water as described above is water in which all dissolved ions are removed.

The water supply line 200 may be provided with a water supply valve 210 for regulating the supply of water DW through the water supply line 200. That is, it is determined whether to supply water (DW) through the water supply line 200 by controlling the opening and closing of the water supply valve 210, or by adjusting the opening amount of the water supply valve 210 to adjust the water supply line 200 ) To determine the supply of water (DW).

Meanwhile, the ozone water supply system 10 according to an embodiment of the present invention further includes a heat exchanger 220 located upstream of the recycling dissolved module 900 based on the water flow direction of the water supply line 200. You can.

That is, the heat exchanger 220 is disposed on the water supply line 200, but may reduce the temperature of the water DW flowing toward the recycling dissolved module 900. Referring to FIG. 2, the water flow direction of the water supply line 200 may be set from left to right of the water supply line 200, and the heat exchanger 220 and the recycle dissolution module 900 may supply water. On the supply line 200 may be arranged spaced apart from each other along the water flow direction.

The heat exchanger 220 significantly lowers the performance of the recycled dissolved module 900 and the main dissolved module 600 by lowering the temperature of the water DW supplied to the recycled dissolved module 900 along the water supply line 200. Can be improved. That is, when the temperature of the water DW used in the recycle dissolved module 900 or the main dissolved module 600 is lowered, the dissolved amount of the ozone gas OZ dissolved in the water DW may be increased, as well as Ozone gas (OZ) can be stably maintained in a state dissolved in water (DW).

For reference, reference numerals 'CW1' and 'CW2' shown in FIGS. 2 and 6 denote cooling media provided to the heat exchanger 220.

1, 2 and 8, the ozone gas generator 300 of this embodiment is a device for generating ozone gas (OZ) for use in the production of ozone water (OW). There are various types of ozone gas generators 300 depending on the method of generating ozone gas (OZ). In this embodiment, any type of ozone gas generator 300 capable of generating ozone gas (OZ) may be used. Hereinafter, in this embodiment, it will be described that the ozone gas generator 300 receives nitrogen gas (N) and oxygen gas (O) to generate ozone gas (OZ).

On one side of the ozone gas generator 300, a nitrogen supply line 310 for receiving nitrogen gas (N) therein and an oxygen supply line 320 for receiving oxygen gas (O) from the outside may be connected. In the nitrogen supply line 310 and the oxygen supply line 320, regulators 312 and 322 for providing nitrogen gas (N) and oxygen gas (O) at a constant supply pressure may be disposed, respectively, and nitrogen gas ( N) and a mass flow controller (MFC) 314, 324 for measuring the flow rate and controlling the flow rate of the oxygen gas (O) may be disposed, respectively.

On the other side of the ozone gas generator 300, an ozone gas outlet (not shown) for discharging the ozone gas (OZ) to the outside may be provided. The ozone gas outlet may be connected to the main dissolved module 600 through the ozone supply line 400.

 1, 2 and 8, the ozone supply line 400 of this embodiment is a flow path for guiding the ozone gas (OZ) generated by the ozone gas generator 300 to the main dissolved module 600. . That is, one end of the ozone supply line 400 may be connected to the main dissolved module 600, and the other end of the ozone supply line 400 may be connected to the ozone gas outlet of the ozone gas generator 300. An ozone gas regulator 410 for providing ozone gas (OZ) at a constant supply pressure may be disposed in the ozone supply line 400 as described above.

On the other hand, unlike the present embodiment, the ozone supply line 400 is omitted, it is also possible that the ozone gas outlet of the ozone gas generator 300 is directly connected to the main dissolved module 600.

1 to 8, the ozone water circulation line 500 of this embodiment is a flow path for flowing the ozone water stored in the ozone water tank 100 outside and then flowing into the ozone water tank 100 again. The ozone water circulation line 500 may be provided in a shape capable of continuously circulating a part of the ozone water OW stored in the ozone water tank 100.

That is, the lower end portion of the ozone water circulation line 500 may be connected to the lower portion of the ozone water tank 100, and the upper end portion of the ozone water circulation line 500 may be connected to the upper portion of the ozone water tank 100. Therefore, the ozone water OW stored in the ozone water tank 100 may be discharged to the lower end of the ozone water circulation line 500, and after flowing along the ozone water circulation line 500, through the upper end of the ozone water circulation line 500 The ozone water tank 100 may be introduced into the interior.

Here, the ozone water circulation line 500 may be provided with an ozone water pump 510 for pumping ozone water OW flowing through the ozone water circulation line 500. The ozone water pump 510 is provided in the ozone water circulation line 500, but may be disposed upstream of the ozone water circulation line 500 than the main dissolved module 600. Therefore, the ozone water OW pumped by the ozone water pump 510 may be supplied to the main dissolved module 600.

In addition, the mixing chamber 520 for mixing the ozone water OW generated in the main dissolved module 600 to further increase the ozone concentration of the ozone water OW may be disposed in the ozone water circulation line 500. The mixing chamber 520 is disposed in the ozone water circulation line 500, but may be disposed downstream of the ozone water circulation line 500 than the main dissolved module 600. Therefore, the ozone water (OW) generated in the main dissolved module 600, the ozone gas (OZ) by the mixing chamber 520 in the process of passing through the mixing chamber 520 before entering the inside of the ozone water tank 100 ), And the ozone gas (OZ) is additionally dissolved, thereby increasing the ozone concentration.

The mixing chamber 520 is a kind of static mixing device, and a mixing passage for passing a mixed fluid of gas and liquid may be formed therein. The mixing passage of the mixing chamber 520 may be provided as a structure for promoting the direction change and shearing action of the mixed fluid when the mixed fluid passes. Therefore, the mixing chamber 520 can increase the mass transfer efficiency of the mixed fluid in a relatively short time, and further mix the liquid and gas of the mixed fluid. For reference, the mass transfer efficiency means that a part is transferred from one material to another, and is also referred to as 'material transport'. For example, if there is a concentration difference in two substances, the substance moves in a direction to decrease the concentration difference. Conventional mass transfer is achieved by distillation, absorption, drying, extraction, dissolution, diffusion, and the like.

In the mixing chamber 520, the mixed fluid may generate thousands of small bubbles due to the direction change and shearing effect of the mixed fluid, and thereby the gas of the mixed fluid to the liquid in the process of passing through the mixing chamber 520 The dissolution rate may be high. As a result, the ozone water (OW) generated in the main dissolved module 600 additionally reacts with the ozone gas (OZ) that has not been dissolved in the course of passing through the mixing chamber 520 to adjust the ozone concentration of the ozone water (OW). It can be increased, and the residual amount of ozone gas (OZ) remaining without being dissolved in the ozone water OW can be greatly reduced.

1 to 8, the main dissolved module 600 of the present embodiment is ozone gas (OZ) generated by the ozone gas generator 300 to the ozone water (OW) circulating through the ozone water circulation line 500 It is a device to supply and dissolve. The main dissolved module 600 is disposed on the ozone water circulation line 500, and may be connected to the ozone supply line 400.

The main dissolved module 600 may generate a number of bubbles in the ozone water OW passing through the ozone water circulation line 500 using the ozone gas OZ generated by the ozone gas generator 300. As described above, when the main dissolved module 600 supplies ozone gas (OZ) to ozone water (OW) in the form of bubbles, the gas-liquid contact surface of ozone gas (OZ) and ozone water (OW) increases, so that ozone gas (OZ) is dissolved. Efficiency can be increased. Meanwhile, an internal flow path 600a communicating with the ozone water circulation line 500 may be formed inside the main dissolved module 600.

The main dissolved module 600 as described above dissolves ozone gas (OZ) supplied through the ozone supply line 400 to ozone water (OW) circulating through the ozone water circulation line 500 to generate ozone water (OW). can do. At this time, the main dissolved module 600 continuously supplies ozone gas (OZ) to ozone water (OW) circulated along the ozone water circulation line 500, thereby increasing the ozone concentration of ozone water (OW) stored in the ozone water tank (100). You can increase it to the desired level.

3 to 7, the main dissolved module 600 of the present embodiment, the ozone supply line (Oz) to guide the ozone gas (OZ) generated by the ozone gas generator 300 to the internal flow path (600a) ( 400) may be connected to the ozone water generating injector 602.

Here, the ozonated water injector may be provided as a venturi injector. One end of the ozone supply line 400 for supplying ozone gas (OZ) to ozone water (0W) passing through the internal flow path 600a may be connected to one side of the venturi injector as described above.

For example, the ozone water generating injector 602 may include an injector inlet 610, an injector outlet 620, a venturi portion 630, and an injector connecting portion 640.

The injector inlet 610 may be connected to the ozone water circulation line 500 such that ozone water OW flowing through the ozone water circulation line 500 is introduced. The injector inlet 610 as described above may be formed in a structure in which the cross-sectional area of the internal flow path 600a is reduced in the ozone water flow direction of the ozone water circulation line 500. At this time, an end of the injector inlet 610 may be fastened with a line connector 650 for connecting the ozone water circulation line 500 and the injector inlet 610.

The injector discharge unit 620 may be connected to the ozone water circulation line 500 located downstream of the injector inlet 610 so that the ozone water OW passing through the internal flow path 600a is discharged to the ozone water circulation line 500. . The injector discharge unit 620 as described above may be formed in a structure in which the cross-sectional area of the internal flow path 600a is expanded in the flow direction of the ozone water in the ozone water circulation line 500. At this time, an end of the injector discharge unit 620 may be fastened with a line connector 650 for connecting the ozone water circulation line 500 and the injector discharge unit 620.

The venturi part 630 may be formed between the injector discharge part 620 and the injector inlet part 610 to connect the injector discharge part 620 and the injector inlet part 610. The venturi portion 630 as described above may be provided in a tubular shape in which the cross-sectional area of the inner flow path 600a is the smallest in the ozone water generating injector 602. Therefore, in the venturi portion 630, since the flow velocity of the ozone water OW flowing along the inner flow path 600a is the fastest, the internal pressure of the venturi portion 630 may be lowered by the Venturi effect.

The injector connection part 640 may be provided to communicate with the venturi part 630 in a tube shape. The injector connection part 640 as described above may be connected to one end of the ozone supply line 400. Therefore, when the internal pressure decreases due to an increase in the flow rate of ozone water (OW) in the venturi part 630, the injector connection part 640 smoothly intakes ozone gas (OZ) through the ozone supply line 400 and then venturi part (630). Unlike the above, regardless of the internal pressure of the venturi portion 630, the ozone supply line 400 may be introduced into the injector connection portion 640 by the supply pressure of the ozone gas OZ.

For example, the injector connecting portion 640 may include a tubular portion 642 and a stopper portion 644.

Here, the tubular portion 642 may be provided to protrude in a tubular shape from the venturi portion 630, and may be connected to the internal flow path 600a of the venturi portion 630. The tubular portion 642 as described above may be formed to be elongated in the direction orthogonal to the center line of the venturi portion 630 from the outer periphery of the venturi portion 630.

Then, the stopper 644 may be coupled to the tubular portion 642 to cover the end of the tubular portion 642, and may be connected in communication with one end of the ozone supply line 400. The stopper portion 644 as described above may be detachably coupled to the tubular portion 642 by a screw fastening method.

In the outer portion of the stopper 644 as described above, an insertion connector 646 for being inserted into communication with one end of the ozone supply line 400 may be provided to protrude. Inside the insertion connector 646, the ozone gas inlet passage 646a may be elongated along the longitudinal direction. In addition, a connector fastening portion 648 may be formed on the outer portion of the stopper portion 644 in a shape surrounding the lower portion of the insertion connector 646. A line connector 650 for connecting the ozone water circulation line 500 and the injector connection part 640 may be fastened to the connector fastening part 648.

On the other hand, the main dissolved module 600 of the present embodiment may be provided with a pH controller 670 for adjusting the pH concentration of the ozone water OW flowing through the ozone water circulation line 500. The pH controller 670 may be connected to the main dissolved module 600 to supply carbon dioxide (CO ₂ ) (C) to the main dissolved module 600. That is, as the pH controller 670 supplies carbon dioxide (C) to the main dissolved module 600, the pH concentration of the ozone water OW produced in the main dissolved module 600 can be appropriately decreased to a desired level.

4 to 7, the main dissolved module 600 of the present embodiment, the ozone gas (OZ) generated by the ozone gas generator 300, the internal flow path 600a of the ozone water generating injector 602 It may further include a bubble generator 604 for generating a plurality of bubbles in the ozone water (OW) passing through the internal flow path (600a).

That is, in this embodiment, the ozone gas (OZ) can be supplied to the ozone water (OW) in the form of bubbles using the bubble generator 604, thereby increasing the gas-liquid contact surface between the ozone gas (OZ) and the ozone water (OW). This can greatly improve the dissolved efficiency of ozone gas (OZ).

Here, the bubble generator 604 may be detachably disposed inside the injector connecting portion 640 of the ozone water generating injector 602. Therefore, the ozone gas (OZ) supplied through the ozone supply line 400 flows into the inside of the injector connection part 640, and then flows into the inside of the ozone water generating injector 602 in a bubble shape by the bubble generator 604. 600a).

In addition, the bubble generator 604 may be mounted inside the tubular portion 642 of the injector connection portion 640 or may be mounted inside the stopper portion 644 of the injector connection portion 640. Hereinafter, in this embodiment, the bubble generator 604 is described as being fastened and fixed by a screw fastening method inside the stopper portion 644 of the injector connecting portion 640, but is not limited thereto, and the mounting structure of the bubble generator 604 Can be variously modified.

For example, the bubble generator 604 may include a bubble generator body 660, a gas inlet portion 662, and a gas outlet portion 664.

The bubble generator main body 660 may be disposed in a shape accommodated inside the injector connecting portion 640. The bubble generator main body 660 may be provided in a tube shape with one end blocked. Accordingly, a hollow portion 660a may be formed at a central portion of the bubble generator main body 660 along the longitudinal direction of the bubble generator main body 660. One end of the bubble generator body 660 may be formed in a clogged structure, and the other end of the bubble generator body 660 may be formed in an unblocked structure exposing the hollow portion 660a to the outside.

Here, the bubble generator main body 660 may be formed of a ceramic material having excellent acid resistance. This is because it is preferable that the bubble generator main body 660 stably withstands the strong oxidizing power of ozone gas (OZ).

In addition, the bubble generator main body 660 may be disposed to be immersed in the ozone water OW flowing along the internal flow path 600a of the ozone water generating injector 602. Preferably, the bubble generator body 660 is provided inside the injector connecting portion 640, the gas discharge portion 664 may be arranged in a structure that is submerged in ozone water (OW). Therefore, the ozone gas (OZ) is discharged directly to the ozone water (OW) in the form of bubbles in the gas discharge unit 664, so that the dissolved efficiency of the ozone gas (OZ) can be further increased.

In addition, the bubble generator main body 660 is detachably connected to the inside of the stopper portion 644, and when the stopper portion 644 and the tubular portion 642 are coupled, the tubular portion is spaced apart from the inner circumferential surface of the tubular portion 642. It can be accommodated inside the 642.

On the outer circumferential surface of the other end of the bubble generator main body 660, a first fastening part 666 in the form of a male screw may be formed, and the first fastening part 666 on the inner circumferential surface of the insertion connector 646 of the stopper part 644 A second fastening portion 649 in the form of a female screw for connecting with a screw fastening method may be formed. Therefore, the other end of the bubble generator main body 660, due to the fastening of the first fastening part 666 and the second fastening part 649, the ozone gas inlet passage of the insertion connector 646 of the stopper 644 ( 646a) may be fixed to the inside of the stopper 644.

In one example, the first fastening portion 666 may be provided in the form of a male thread along the outer circumferential surface of the other end of the bubble generator body 660, the second fastening portion 649 is inserted into the stopper 644 It may be provided in the form of a female thread along the circumference of the inner peripheral surface of the ozone gas inlet passage 646a of the connector 646. Accordingly, the other end of the bubble generator main body 660 may be fixedly supported inside the stopper 644 by a fastening engagement of the first fastening part 666 and the second fastening part 649. However, the present invention is not limited thereto, and the bubble generator main body 660 may be installed and fixed in various ways on the cap portion 644 or the tubular portion 642 of the injector connection portion 640.

The gas inlet 662 is an inlet for introducing ozone gas (OZ) generated by the ozone gas generator 300 into the hollow portion 660a of the bubble generator body 660. The gas inlet 662 as described above may be provided in communication with the ozone supply line 400 at a connection portion between the injector connection 640 and the ozone supply line 400. Hereinafter, in the present embodiment, the gas inlet 662 is described as being the inlet of the hollow portion 660a exposed at the other end of the bubble generator body 660, but is not limited thereto, and the bubble generator body 660 It may be provided in a structure in communication with the hollow portion 660a at various positions.

Here, the gas inlet 662 is an inlet of the hollow portion 660a exposed at the other end of the bubble generator body 660, and when the bubble generator 604 is mounted, the insertion connector 946 of the stopper 644 is installed. It may be disposed in communication with the ozone gas inlet passage (646a) formed in. Therefore, the ozone gas (OZ) supplied through the ozone supply line 400 is introduced into the inside of the injector connection 640 through the ozone gas inlet passage 646a of the insertion connector 646, and the ozone gas inlet passage It may flow to the hollow portion 660a of the bubble generator body 660 through the gas inlet portion 662 disposed in communication with (646a).

The gas outlet 664 supplies ozone gas (OZ) introduced into the hollow portion 660a of the bubble generator body 660 through the gas inlet 662 to the internal flow path 600a of the ozone water generating injector 602 It is an outlet to do. The ozone gas OZ discharged from the gas discharge unit 664 may generate a number of bubbles in the ozone water OW passing through the internal flow path 600a of the ozone water generating injector 602. That is, the gas discharge unit 664 may supply ozone gas (OZ) to the internal flow path 600a of the ozone water generating injector 602 in a bubble shape using the diffuser principle.

Here, the gas discharge unit 664 may be provided with a plurality of discharge holes formed to penetrate the bubble generator body 660. The gas discharge unit 664 may be formed at a portion of the bubble generator body 660 where the first fastening portion 666 is not formed. The gas discharge unit 664 is provided with a plurality of through holes in the bubble generator main body 660 to communicate the hollow portion 660a of the bubble generator main body 660 and the outer space of the bubble generator main body 660. Can be. Meanwhile, the plurality of gas discharge units 664 may be arranged to be spaced apart from each other in a predetermined pattern in the bubble generator body 660 to improve the performance of the bubble generator 604.

For example, in the present embodiment, the gas discharge parts 664 may be arranged to be spaced apart at regular intervals along the circumferential direction and the longitudinal direction to the outer periphery of the bubble generator body 660. In addition, the gas outlets 664 may be arranged to be radially spaced even at the blocked portion at one end of the bubble generator body 660.

1 to 4 and 8, the main dissolved module 600 of the present embodiment is the ozone gas generator 300 through the ozone supply line 400 at the injector connection 640 of the ozone water generating injector 602 ) May further include an external check valve 606 to prevent backflow of ozone water OW.

Here, the external check valve 606 may be disposed at one end of the ozone supply line 400. For example, the external check valve 606 may be detachably provided at a connection portion between the ozone supply line 400 and the stopper 644. Therefore, since the external check valve 606 is a structure that is separately installed outside the ozone water generating injector 602, replacement and maintenance of the external check valve 606 can be facilitated, and the inside of the ozone water generating injector 602 is possible. It is possible to smoothly secure the installation space of the bubble generator 604 as compared with that in which the check valve is installed.

Then, the external check valve 606 is a device for preventing the ozone water OW from flowing back from the ozone water generating injector 602 to the ozone supply line 400, the ozone water generating injector 602 in the ozone supply line 400 It can be opened only when ozone gas (OZ) is supplied toward it.

1 and 8, the ozone water supply system 10 according to an embodiment of the present invention, an ozone concentration meter 680 for measuring the ozone concentration of ozone water (OW) stored in the ozone water tank 100 ) May be further included.

The ozone concentration meter 680 as described above may be disposed on the concentration measurement line 690. The ozone concentration meter 680 may measure ozone water OW flowing along the ozone concentration measurement line 690 to check the ozone concentration of the ozone water OW stored in the ozone water tank 100 in real time.

In one example, the ozone water supply mode of the ozone water supply system 10 may be controlled according to the measured value of the ozone concentration meter 680. That is, whether the ozone gas generator 300, the main dissolved module 600, and the ozone water pump 510 are operated may be controlled by the measured value of the ozone concentration meter 680.

Here, the concentration measurement line 690 may be formed as a path through which a portion of the ozone water OW stored in the ozone water tank 100 flows out and then flows back into the ozone water tank 100. That is, one end of the concentration measurement line 690 may be connected to the ozone water tank 100, and the other end of the concentration measurement line 690 may be an ozone water circulation line 500, an ozone water discharge line 700, or an ozone water tank 100. It can be connected to either. Hereinafter, in this embodiment, it will be described that the other end of the concentration measurement line 690 is connected to the ozone water discharge line 700.

In addition, a concentration measurement valve 692 for opening and closing the concentration measurement line 690 may be disposed on the concentration measurement line 690. The concentration measurement valve 692 as described above can be opened only when the ozone concentration of the ozone water OW stored in the ozone water tank 100 is measured, and the ozone concentration of the ozone water OW stored in the ozone water tank 100 can be opened. If not measured, it can be closed.

Therefore, when measuring the ozone concentration of the ozone water (OW) stored in the ozone water tank 100, a part of the ozone water (OW) stored in the ozone water tank 100 flows into one end of the concentration measurement line 690 and then the concentration measurement line The ozone water OW that can flow along the 690 and flows along the concentration measurement line 690 passes through the ozone concentration meter 680 and then passes through the other end of the concentration measurement line 690 to the ozone water discharge line ( 700). At this time, the ozone concentration meter 680 may measure the ozone concentration of the ozone water (OW).

1, 2 and 8, the ozone water discharge line 700 of this embodiment is a flow path for discharging ozone water OW stored in the ozone water tank 100 to an external device. One end of the ozone water discharge line 700 may be connected to the ozone water circulation line 500, and the other end of the ozone water discharge line 700 may be connected to an external device requiring ozone water (OW).

One end of the ozone water discharge line 700 as described above may be connected to the ozone water circulation line 500 located between the ozone water pump 510 and the main dissolved module 600. Therefore, ozone water OW pumped by the ozone water pump 510 may be discharged through the ozone water discharge line 700.

Here, an ozone water discharge valve 710 may be disposed in the ozone water discharge line 700. The ozone water discharge valve 710 may open or close the ozone water discharge line 700 to control whether ozone water OW is discharged through the ozone water discharge line 700.

In addition, an ozone water flow sensor 720 may be disposed in the ozone water discharge line 700. That is, the ozone water flow sensor 720 may detect in real time the discharge amount of ozone water OW discharged to an external device along the ozone water discharge line 700.

Meanwhile, a three-way on-off valve 730 may be disposed in the ozone water discharge line 700 downstream of the ozone water discharge valve 710 and the ozone water flow sensor 720. A sub-discharge line 740 may be connected to the three-way on-off valve 730 and the ozone water tank 100.

1, 2 and 8, the recycling line 800 of the present embodiment is an insoluble ozone gas (OZ ') discharged from ozone water (OW) stored in the ozone water tank 100, the water supply line 200 It is a flow path to supply it back to the side.

One end of the recycling line 800 may be connected to the recycling dissolved module 900, and the other end of the recycling line 800 may be connected to the upper portion of the ozone water tank 100. Accordingly, when the insoluble ozone gas (OZ ') is discharged from the ozone water (OW) stored in the ozone water tank 100, the insoluble ozone gas (OZ') is the other of the recycling line 800 at the top of the ozone water tank 100. After flowing into the end, it may be supplied to the recycle dissolved module (900).

1, 2 and 8, the recycling dissolved module 900 of this embodiment is supplied through the water supply line 200 to the insoluble ozone gas (OZ ') supplied through the recycling line 800 It is a device for dissolving in water (DW). The recycling dissolved module 900 is disposed on the water supply line 200, and may be connected to the recycling line 800.

For example, the recycle dissolved module 900 is one end of the recycle line 800 to guide the insoluble ozone gas (OZ ') supplied through the recycle line 800 to water (DW) flowing along the internal flow path. It may include a recycling injector (not shown) connected to the unit. Here, the recycle injector may be provided as a venturi injector. One end of the recycling line 800 may be connected to one side of the recycle injector as described above to supply insoluble ozone gas (OZ ') to the water DW passing through the internal flow path.

The above-described recycling dissolved module 900 dissolves insoluble ozone gas (OZ ') supplied through the recycling line 800 to water (DW) flowing through the water supply line 200 to dissolve the insoluble ozone gas. (OZ ') can generate dissolved ozone water (OW').

That is, in the recycling mode of the ozone water supply system 10, the recycling line 800 and the recycling dissolved module 900 do not discard the insoluble ozone gas OZ 'discharged from the ozone water OW stored in the ozone water tank 100. Can be recycled again. When the insoluble ozone gas (OZ ') is dissolved in water (DW) supplied to the ozone water tank 100 along the water supply line 200 as described above, the efficiency of the ozone water generation mode can be improved, and the ozone water (OW ) It is possible to prevent the waste of ozone gas (OZ) used for the production.

Looking at the operation and effect of the ozone water supply system 10 according to an embodiment of the present invention configured as described above are as follows.

First, the ozone water supply system 10 operates in a water supply mode to supply water (DW) inside the ozone water tank 100. When water (DW) is supplied to the ozone water tank 100 as described above, the ozone water supply system 10 operates in an ozone water generation mode to react water (DW) stored in the ozone water tank 100 with ozone gas (OZ). Ozone water (OW) is produced at a desired ozone concentration.

At this time, the ozone water discharge mode of the ozone water supply system 10 is preferably stopped until the ozone water OW stored in the ozone water tank 100 reaches the ozone concentration required by the external device. That is, the ozone water discharge valve 710 disposed in the ozone water discharge line 700 is blocked to prevent the flow of ozone water OW into the ozone water discharge line 700.

As shown in FIG. 8, in the ozone water generation mode of the ozone water supply system 10, the main dissolved module 600 is supplied through the ozone supply line 400 after the ozone gas generator 300 generates ozone gas (OZ). Ozone gas (OZ) is supplied to the ozone water generating injector 602, and the ozone water pump 510 pumps water (DW) or ozone water (OW) stored in the ozone water tank 100 along the ozone water circulation line 500. Let it flow.

At this time, the ozone water generating injector 602 of the main dissolved module 600 is water (DW) circulated through the ozone water circulation line 500 or ozone gas (OZ) introduced through the ozone supply line 400 to the ozone water (OW). ) Is supplied, and ozone water (OW) is generated at a desired ozone concentration due to the dissolved action of ozone gas (OZ).

Specifically, the injector inlet 610 of the ozone water generating injector 602 flows water (DW) or ozone water (OW) flowing through the ozone water circulation line 500, and flows into the injector inlet 610 The water (DW) or ozone water (OW) flows along the internal flow path (600a) of the ozone water generating injector (602).

As described above, water (DW) or ozone water (OW) introduced into the internal flow path 600a of the ozone water generating injector 602 passes through the venturi part 630 from the injector inlet part 610 to the injector discharge part 620. It is discharged back to the ozone water circulation line 500.

The water (DW) or ozone water (OW) flowing from the injector inlet 610 to the venturi portion 630 increases the flow rate as the cross-sectional area of the internal flow path 600a decreases, and the internal pressure of the internal flow path 600a increases. Since it is reduced, the negative pressure acts on the inner flow path 600a of the venturi part 630 where the flow velocity of water (DW) or ozone water (OW) increases to the maximum.

As described above, when the internal pressure of the venturi portion 630 decreases, the suction pressure acts on the ozone supply line 400 through the injector connection portion 640, thereby opening the external check valve 606. Therefore, the ozone gas (OZ) generated by the ozone gas generator 300 is supplied to the ozone water production injector 602 via the external check valve 606 along the ozone supply line 400.

Therefore, the ozone gas (OZ) flowing along the ozone supply line 400 flows into the injector connection portion 640 of the ozone water generating injector 602, and after flowing into the injector connection portion 640, the bubble generator It is supplied to the internal flow path (600a) of the venturi portion 630 in the form of a bubble by (604).

That is, the ozone gas (OZ) introduced into the injector connecting portion 640 is introduced into the gas inlet 662 of the bubble generator 604 and then inside the hollow portion 660a of the bubble generator body 660. It is flowed into, and is transmitted from the hollow portion 660a of the bubble generator body 660 to the internal flow path 600a of the ozone water generating injector 602 in the form of bubbles through the gas discharge portion 664 of the bubble generator 604.

Therefore, since the ozone gas (OZ) is supplied in the form of bubbles to the water (DW) or ozone water (OW) passing through the internal flow path (600a) of the ozone water generating injector 602, the internal flow path (600a) of the ozone water generating injector (602) The water (DW) or ozone water (OW) passing through) comes into contact with the ozone gas (OZ) in the form of bubbles, and the contact surface of the gas liquid increases due to the contact with the ozone gas (OZ) in the form of bubbles. Efficiency can be increased.

In the ozone water generation mode of the ozone water supply system 10, if ozone gas (OZ) in the form of bubbles is continuously dissolved in water (DW) or ozone water (OW) passing through the internal flow path (600a) of the ozone water production injector (602), , It is possible to generate ozone water (OW) in which ozone gas (OZ) is dissolved at a high concentration.

That is, the ozone water OW stored in the ozone water tank 100 circulates repeatedly along the ozone water circulation line 500 and the ozone gas OZ is continuously dissolved in the main dissolved module 600. Therefore, the ozone concentration of the ozone water OW stored in the ozone water tank 100 is gradually increased during the operation of the ozone water generation mode.

At this time, when the concentration measurement valve 692 disposed in the concentration measurement line 690 is opened, the ozone water OW stored in the ozone water tank 100 flows to the concentration measurement line 690 so that the ozone concentration meter 680 is concentrated. The ozone concentration of the ozone water OW passing through the measurement line 690 is measured in real time. For reference, the ozone water OW flowing along the concentration measurement line 690 passes through the ozone water discharge line 700, the ozone water circulation line 500, and the main dissolved module 600 in order, and the inside of the ozone water tank 100. Come back to.

The ozone water supply system 10 proceeds to the ozone water generation mode until the ozone concentration of the ozone water OW measured by the ozone concentration meter 680 reaches a desired set concentration.

If the ozone concentration of the ozone water OW reaches a desired set concentration, the ozone water discharge mode of the ozone water supply system 10 is properly operated at a required time to supply the ozone water OW to an external device. In the ozone water discharge mode of the ozone water supply system 10, the ozone water discharge valve 710 disposed in the ozone water discharge line 700 is opened to discharge the ozone water OW from the ozone water circulation line 500 to the ozone water discharge line 700. do.

Meanwhile, when the ozone water supply system 10 discharges the ozone water OW stored in the ozone water tank 100 during the ozone water discharge mode, the ozone water supply system 10 continuously generates ozone water OW through the water supply mode and the ozone water generation mode.

As described above, in the embodiment of the present invention, specific matters such as specific components and the like have been described by the limited embodiment and the drawings, but this is provided only to help the overall understanding of the present invention, and the present invention is limited to the above embodiment It will not be, and those skilled in the art to which the present invention pertains can make various modifications and variations from these descriptions. Therefore, the spirit of the present invention should not be limited to the described embodiments, and should not be determined, and all claims that are equivalent to or equivalent to the claims, as well as the claims described below, will be included in the scope of the spirit of the present invention.

10: ozone water supply system
100: ozone water tank
200: water supply line
300: ozone gas generator
400: ozone supply line
500: ozone water circulation line
510: ozone water pump
520: mixing chamber
600: main dissolved module
602: ozone water injector
604: bubble generator
606: external check valve
640: injector connection
700: ozone water discharge line
800: recycling line
900: recycling dissolved module
DW: water
OZ: ozone gas
OZ ': Insoluble ozone gas
OW: ozone water
OW ': Ozone water in which insoluble ozone gas is dissolved

Claims (14)

An ozone water tank for storing ozone water;
An ozone water circulation line provided to discharge the ozone water stored in the ozone water tank to the outside and then flow back into the ozone water tank; And
The main dissolution module is disposed on the ozone water circulation line and supplies dissolved ozone gas generated by an ozone gas generator to the ozone water circulating through the ozone water circulation line.
The main dissolved module includes: an ozone water generating injector formed with an internal flow path communicating with the ozone water circulation line and connected to the ozone gas generator to guide the ozone gas generated by the ozone gas generator to the internal flow path; And a bubble generator mounted on the ozone water generating injector and delivering ozone gas generated by the ozone gas generator to the internal flow passage of the ozone water generating injector to generate a plurality of bubbles in the ozone water passing through the internal flow passage. And
The ozone water generating injector includes an injector connecting portion connected to the ozone gas generator so as to supply the ozone gas generated by the ozone gas generator to the internal passage.
The bubble generator, the bubble generator body disposed inside the injector connection; A gas inlet provided in the bubble generator main body and disposed in communication with the injector connecting portion and the connecting portion of the ozone gas generator to introduce ozone gas generated by the ozone gas generator; And a gas discharge unit provided in the body of the bubble generator to generate a plurality of bubbles in the ozone water passing through the internal flow path by supplying the ozone gas flowing into the gas flow path to the internal flow path. system.
delete delete According to claim 1,
The ozone water generating injector is provided with a venturi injector, characterized in that the ozone water supply system.
delete delete delete According to claim 1,
The bubble generator main body is provided in a tubular shape, the ozone water supply system characterized in that the gas outlet is arranged to be submerged in the ozone water flowing through the internal flow path.
According to claim 1,
The injector connection portion, a tubular portion provided to protrude in a tubular shape to communicate with the inner flow path; And a stopper coupled to cover the end of the tubular portion and connected to the ozone gas generator via an ozone supply line.
The bubble generator main body is detachably connected to the stopper, and when coupled to the stopper and the tubular portion, the ozone water supply system, characterized in that accommodated inside the tubular portion to be spaced apart from the inner circumferential surface of the tubular portion.
The method of claim 9,
Further comprising a check valve disposed on the ozone supply line to prevent the back flow of ozone water from the main dissolved module toward the ozone gas generator,
The check valve, the ozone water supply system, characterized in that provided detachably to the connection portion of the ozone supply line and the stopper.
According to claim 1,
The gas discharge part, ozone water supply system, characterized in that it comprises a plurality of discharge holes for discharging the ozone gas flowing into the gas inlet to the internal flow path.
According to claim 1,
Further comprising; an ozone water pump provided in the ozone water circulation line to pump the ozone water flowing through the ozone water circulation line;
The ozone water pump, the ozone water supply system, characterized in that disposed in the upstream of the ozone water circulation line than the main dissolved module.
According to claim 1,
A pH controller connected to the main dissolved module and supplying carbon dioxide (CO ₂ ) to the main dissolved module to adjust the pH concentration of ozone water flowing through the ozone water circulation line;
Ozone water supply system further comprising a.
According to claim 1,
Further comprising; a mixing chamber disposed in the ozone water circulation line to further increase the ozone concentration by mixing the ozone water generated in the main dissolved module;
The mixing chamber, the ozone water supply system, characterized in that disposed in the downstream of the ozone water circulation line than the main dissolved module.

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