JP2008150066A - Substrate storage container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage container which prevents an inner side of a container main body from being contaminated and simplifies inspection, repairing and cleaning operations for an engagement means. <P>SOLUTION: An engagement means 6 for engaging a lid member 4 with a container main body 2 is exposed at an outer surface of the container main body 2. With this arrangement, since it is not necessary to store the engaging means 6 within the lid member 4, contaminated substances are not accumulated in the lid member 4 and there occurs no possibility that the contaminated substances enter the container main body 2. This prevents the inside portion of the container main body 2 from being contaminated. Since the engaging means 6 is exposed at the outer surface, inspection, repairing and cleaning operations of the engaging means 6 are facilitated. Since it is not necessary to store the engaging means 6 at the lid member 4, it is not necessary to arrange a space for storing the engaging means 6, and then the lid member 4 is reduced in size. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate storage container that stores precision substrates such as semiconductor wafers and mask glass, and is used for transportation, transportation, storage, and the like.

A conventional substrate storage container includes a container body that stores a precision substrate and a lid that closes an opening of the container body. The lid includes a latch mechanism for locking the lid to the container body. The opening of the container body is provided, for example, at the bottom of the substrate storage container. Further, the precision substrate is accommodated in a cassette in which grooves for arranging the precision substrates in the horizontal direction are formed. The cassette is placed on the lid and accommodated in the container body. As described above, since the cassette is placed on the lid, the lid may be bent due to the weight of the precision substrate, and a substrate storage container that can prevent the lid from being bent has been proposed (for example, , See Patent Document 1). Also, there is known a substrate storage container in which an opening is provided on the front side of the container body, and a groove for arranging the precision substrates in the horizontal direction is formed on the inner surface of the container body so that a cassette is not required (for example, Patent Document 2).
Japanese National Patent Publication No. 4-505234 JP-T-2002-514829

  However, in the conventional substrate storage container, since the latch mechanism for locking the lid body is built in the lid body, contaminants such as particles generated by sliding or rubbing between the components of the latch mechanism are contained in the lid body. There was a problem of being accumulated. Accordingly, there is a possibility that contaminants in the lid body enter the container body and contaminate the substrate storage container. Further, since the conventional lid has only a small opening for allowing the locking claw to appear and disappear, there is a problem that it is difficult to clean the inside of the lid, and further, the drying time becomes long. In addition, in order to check, repair (for example, replace parts), etc., the latch mechanism built in the lid, it was necessary to remove the plurality of screws and disassemble the lid. As a result, the lid may be replaced in order to omit inspection and repair work, which is uneconomical.

  The present invention has been made to solve these problems, and provides a substrate storage container that prevents contamination inside the container body and simplifies inspection, repair, and cleaning of the engaging means. The purpose is to do.

  A substrate storage container according to the present invention is a substrate storage container comprising: a container body having an opening and storing a substrate; a lid for closing the opening; and an engaging means for engaging the lid with the container body. The engaging means is characterized in that it is exposed on the outer surface side of the container body.

  According to such a substrate storage container, the engaging means for engaging the lid with the container main body is exposed on the outer surface of the container main body. Thereby, since the engaging means is not built in the lid body as in the past, contaminants do not accumulate in the lid body, and contamination in the container body can be prevented. Further, since the engaging means is exposed on the outer surface, the engaging means can be inspected, repaired and cleaned without disassembling the lid. In addition, since it is not necessary to incorporate the engaging means in the lid, it is not necessary to provide a space for accommodating the engaging means in the lid, and the lid can be thinned.

  Here, as a preferable configuration exhibiting the above action, specifically, the engaging means is installed on the outer surface of the side wall of the container body, and can be moved forward and backward with respect to the recess formed on the peripheral edge of the lid body. The structure provided with the latching claw latched is mentioned. Thereby, the latching claw can be inserted into the recess formed in the peripheral edge of the lid and latched, and the lid can be reliably engaged with the container body.

  The engaging means includes a biasing means for retreating the locking claw to release the locking by the locking claw, a cam member rotatably supported on the outer surface of the side wall and moving the locking claw toward the recess. Are preferably provided. Thereby, the latching claw can be retracted by the urging means to release the latched state. The locking claw can be moved toward the recess by rotating the cam member, and the locking claw can be locked in the recess formed in the lid.

  The engaging means includes a swinging member provided with a locking claw at one end and supported swingably on the outer surface of the side wall, and an elastic member that biases the swinging member to swing the swinging member. And a member. As a result, the swinging member that is swingably supported on the outer surface of the container body is urged by the elastic member, so that the swinging member swings and the locking claw formed on the swinging member is attached to the lid body. Inserted into the recess. For this reason, a latching claw can be latched to a lid.

  The container body has a flange portion that surrounds the opening and protrudes outward. The flange portion is formed with a through hole, and the engaging means protrudes outward from the lid body and is inserted into the through hole. An insertion member that is rotatably supported at the distal end portion of the insertion member, and can be changed to a first rotation position that can be inserted into the through hole and a second rotation position that can be locked to the periphery of the through hole. It is preferable to provide a stop piece. As a result, the locking piece is set at the first rotation position at which the locking piece can be inserted into the through hole, and after the insertion member is inserted into the through hole, the locking piece is rotated to bring the locking piece to the periphery of the through hole. It can change to the 2nd rotation position which can be locked, and can engage a cover body with a container main body.

  Moreover, it is preferable that an opening part is formed in the bottom part of a container main body, and the positioning part which positions a cover body is provided in the outer surface of the cover body. Accordingly, the positioning unit can accurately position the lid, so that the substrate storage container can be accurately positioned with respect to the counterpart device (for example, a processing device for processing the substrate).

  According to the present invention, it is possible to provide a substrate storage container that can prevent contamination in the container body and that simplifies inspection, repair, and cleaning of the engaging means.

  Hereinafter, a preferred embodiment of a substrate storage container according to the present invention will be described with reference to the drawings. In the description of the drawings, the same or corresponding elements are denoted by the same reference numerals, and redundant description is omitted. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment of the present invention, FIG. 2 is a bottom view of the substrate storage container shown in FIG. 1, and FIG. 3 is taken along line III-III in FIG. FIG. 4 is a cross-sectional view showing a state in which the substrate storage container is positioned in a predetermined device, FIG. 4 is a cross-sectional view showing a locking state of the locking mechanism in FIG. 1, and FIG. FIG. 6 is a cross-sectional view showing the unlocking state of the locking mechanism in FIG. 1, and FIG. 7 is the unlocking state of the locking mechanism in FIG. It is a fragmentary sectional view which shows from the side.

  The substrate storage container 1 shown in FIG. 1 accommodates one or a plurality of substrates (not shown) such as a semiconductor wafer having a diameter of 450 mm (for example, 6, 13, 25) and is used for transportation, transportation, storage, and the like. Storage container. The substrate storage container 1 includes a transparent container member (container body) 2 for storing a substrate, a door member (lid body) 4 for closing an opening 3 (see FIG. 2) provided in the container member 2, and a container member. A gasket 5 that seals between the door member 4 and the door member 4 and a locking mechanism (engaging means) 6 that locks the door member 4 to the container member 2 are provided.

  The substrate storage container 1 is formed of, for example, a thermoplastic resin or an alloy thereof, and examples of the thermoplastic resin include polycarbonate, cycloolefin polymer, polyetherimide, polyether sulfone, polyether ketone, polybutylene terephthalate, and polyether. Examples include ether ketone and liquid crystal polymer. Further, a conductive agent and various antistatic agents may be added to the thermoplastic resin. Examples of the conductive agent include carbon black, carbon fiber, carbon nanotube, metal fiber, metal oxide, and conductive polymer. Examples of the antistatic agent include anionic, cationic and nonionic antistatic agents.

  Further, an ultraviolet absorber may be added to the thermoplastic resin. Examples of the ultraviolet absorber include benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, and binder-amine-based ultraviolet absorbers. Can be mentioned. Moreover, you may add the additive for raising rigidity to a thermoplastic resin, for example, glass fiber, carbon fiber, etc. are mentioned.

  The substrate storage container 1 can be formed of ceramic or a metal material such as duralumin or titanium alloy. In this way, the substrate storage container 1 may be reduced in weight.

  Furthermore, even if a gas barrier film that does not allow oxygen and moisture to permeate is pasted on specific portions such as the inner and outer surfaces of the substrate storage container 1, the operating portion of the locking mechanism 6, and the sealing surfaces of the container member 2 and the door member 4. good. Moreover, a metal coating, a diamond-like coating, a PEEK resin coating, a fluorine resin coating may be applied to the specific portion, or a photocatalytic material such as titanium dioxide may be coated. Moreover, you may provide electroconductivity, maintaining the transparency of the container member 2 by constructing coatings, such as a conductive paint, in the said specific site | part.

  The substrate storage container 1 is a box-type substrate storage container in which an opening 3 used for loading and unloading of a substrate is formed at the bottom of the container member 2. The shape of the opening 3 is, for example, a rectangle. A reinforcing rim portion 7 is formed at the bottom of the container member 2 so as to surround the opening 3 and project outward.

  The door member 4 has a rectangular shape corresponding to the opening 3 and is detachably attached to the inside of the rim portion 7 of the container member 2. A groove 8 having a shape corresponding to the gasket 5 is formed in the door member 4, and the gasket 5 is attached to the groove 8. A rib 9 is formed on the inner surface 4 a of the door member 4 so as to protrude upward on the inner side of the groove portion 8. The rib 9 is arranged along the inner surface of the side wall 17 of the container member 2 that forms the opening 3 as shown in FIGS. 3 and 4 in a state in which the door member 4 is mounted on the container member 2. When this air enters, it becomes a baffle plate and prevents particles from entering the container member 2 easily. Further, the surface of the rib 9 and the inner surface of the side wall 17 of the container member 2 around the rib 9 are formed with a rough surface, or a minute uneven surface is formed, and particles are captured here. Alternatively, a porous sheet or a sintered member may be arranged in a frame shape on the wall 17 that forms the opening 3 to prevent particles from entering.

  Further, as shown in FIGS. 1 and 3, a plurality of rod-like substrate support members 10 (four in this embodiment) are installed on the inner surface 4 a of the door member 4 to support the substrate. The substrate support member 10 extends in the vertical direction, and a plurality of grooves 10a for supporting the substrate in the horizontal direction are formed on the side surface in the vertical direction. The plurality of substrate support members 10 are arranged at predetermined positions, and the substrate can be taken in and out from one direction. These substrate support members 10 are formed by a member different from the door member 4, and are fixed to a predetermined position on the inner surface 4a of the door member 4 by screwing, friction engagement, ultrasonic welding, thermal welding, or the like. Yes.

  As shown in FIGS. 2 and 3, a positioning portion 12 is formed on the outer surface 4 b of the door member 4 for positioning with respect to a predetermined device (for example, a processing device for processing a substrate) 11. Yes. The positioning part 12 is installed in three places, and is arrange | positioned at Y shape (refer FIG. 2). The positioning portion 12 has a V-shaped groove (concave portion) 12a as shown in FIG.

  Moreover, it is preferable that the positioning part 12 is arrange | positioned at the recessed part formed in the outer surface 4b of the door member 4, and is formed so that it may not protrude outside from this recessed part. By doing so, the possibility of the positioning unit 12 hitting another object during transportation and being damaged is reduced, and even when the substrate storage container 1 is placed on a place other than the predetermined apparatus 11, Since the horizontality can be maintained and the substrate storage container 1 is packed in a bag made of polyethylene (PE), aluminum or the like, the positioning portion 12 does not protrude from the maximum outer shape of the substrate storage container 1. There is no risk of breaking.

  A flat surface 4d having a frame shape (see FIG. 2) is formed around the recess formed on the outer surface 4b of the door member 4, and this flat surface 4d constitutes a sealing surface for a predetermined device 11. This prevents particles adhering to the outer surface of the door member 4 from moving into a cleaner environment in the predetermined device 11 when the door member 4 is opened and closed.

  On the other hand, the predetermined device 11 is provided with a convex portion 13 having a spherical shape at a position corresponding to the V-shaped groove 12a. The substrate storage container 1 can be positioned by aligning the positioning portion 12 of the door member 4 with the convex portion 13 of the predetermined device 11. In the predetermined apparatus 11, guide members 14 each having a guide surface 14a, which is an inclined surface for guiding the substrate storage container 1, are disposed opposite to each other.

  By providing such a guide member 14, when the substrate storage container 1 transported from the ceiling is mounted on the predetermined apparatus 11 at a high speed from a high place, or when the operator manually mounts the substrate storage container 1 to the predetermined apparatus 11. When mounting, it is possible to prevent misalignment that causes the positioning portion 12 to become not engaged, and to mount the positioning unit 12 with high accuracy.

  Note that an inclined surface parallel to the guide surface 14 a may be formed at a position corresponding to the guide surface 14 a of the guide member 14 in the corner portion 7 a (see FIG. 3) of the rim portion 7 of the substrate storage container 1. By forming such an inclined surface in the substrate storage container 1, the frictional resistance between the substrate storage container 1 and the guide member 14 is reduced, and the positional accuracy is improved smoothly, so that the substrate storage container 1 is attached to the predetermined device 11. While being able to mount, the inclination of the substrate storage container 1 at the time of mounting the substrate storage container 1 in the predetermined apparatus 11 can be prevented.

  Here, a plurality of locking recesses 16 are formed on a pair of opposing side walls (peripheries) 4c of the door member 4 (in this embodiment, two places, two places in total). As shown in FIG. 4, the locking recess 16 locks a locking claw (locking projection) 15 described later of the locking mechanism 6.

  A plurality of locking mechanisms 6 are installed on a pair of opposing side walls 17 of the container member 2 (two in this embodiment, a total of four). That is, the locking mechanism 6 is exposed on the outer surface side of the container member 2. The locking mechanism 6 includes a support pin 18 that is fixed to the side wall 17 and protrudes outward, a rotating cam member 19 that is rotatably supported by the support pin 18, and a locking member 20 having a locking claw 15. And a spring (biasing means) 21 for urging the locking member 20 outward.

  In addition, the rim portion 7 of the container member 2 has a cutout portion 7a into which a part of the rotating cam member 19 is inserted, and an accommodation space 7b that communicates with the cutout portion 7a and accommodates the locking member 20 and the spring 21. Is formed. The cutout portion 7a is formed in the vertical direction from the upper surface of the rim portion 7, and the accommodation space 7b is formed in the horizontal direction in the drawing from the lower portion of the cutout portion 7a toward the inner surface side of the rim portion 7. At a position facing the locking recess 16, an opening 7 c for allowing the locking claw 15 to appear and disappear is provided.

  As shown in FIGS. 5 and 7, the rotating cam member 19 has a disk shape, and a through hole 19 a through which the support pin 18 is inserted is formed at the center thereof. A pair of operation holes 19b through which operation pins (not shown) used when rotating the rotating cam member 19 are inserted are formed on both sides of the through hole 19a.

  Further, on the back surface 19c of the rotating cam member 19 (a surface facing the side wall 17 of the container member 2), a protruding portion (cam surface, see FIG. 4) 19d that presses the locking member 20 toward the locking recess 16 is provided. Is provided. The projecting portion 19 d is disposed in the vicinity of the outer periphery of the rotating cam member 19. When the rotating cam member 19 rotates and the protruding portion 19d moves to a position corresponding to the locking member 20 (first stop position), the protruding portion 19d contacts the locking member 20, and the locking member 20 is engaged. Slide toward the stop recess 16 side.

  The locking mechanism 6 includes stop position defining means 22 that defines the stop position of the rotating cam member 19 as a first stop position and a second stop position. The first stop position is a position where the projecting portion 19d is disposed at the place (lowermost part) corresponding to the locking member 20, and the second stop position is rotated 90 degrees clockwise from the first stop position. (See FIG. 7). The stop position defining means 22 includes a position defining portion 22a that protrudes from the back surface 19c of the rotating cam member 19, and position defining pins (cylindrical protrusions) 22b and 22c that protrude from the side wall 17 of the container member 2 toward the rotating cam member 19. (In FIG. 4 and FIG. 6, the stop position defining means 22 is not shown for the sake of simplicity.) As shown in FIGS. 5 and 7, the position defining pins 22 b and 22 c are arranged on concentric circles, and the position defining portion 22 a moves between the position defining pins 22 b and 22 c as the rotating cam member 19 rotates. When the position defining portion 22a contacts the position defining pin 22b, the rotating cam member 19 is stopped at the first stop position, and when the position defining portion 22a contacts the position defining pin 22c, the rotating cam member 19 is moved to the second stop position. Stopped at the stop position.

  As shown in FIGS. 4 and 6, a locking claw 15 is formed at the front end (the left side in the figure) of the locking member 20, and a collar portion 20 a that contacts the spring 21 is formed at the rear end of the locking member 20. Is formed. The spring 21 is inserted outside the locking member 20, one end abuts on the peripheral edge of the opening 7 c of the rim portion 7, and the other end abuts on the collar portion 20 a of the locking member 20. . The spring 21 urges the locking member 20 outward (in the direction opposite to the locking recess 16). The locking member 20 can be moved forward and backward with respect to the locking recess 16 according to the rotation of the rotary cam member 19, and is locked to the locking recess 16.

  Next, regarding the operation of the substrate storage container 1 configured as described above, the locked (locked) state of the locking mechanism 6 and the unlocked (unlocked) state of the locking mechanism 6 will be described with reference to the drawings. To do.

  6 and 7, the rotary cam member 19 is stopped at the second stop position, and the locking mechanism 6 is in the unlocked state. With the rotating cam member 19 stopped at the second stop position, a pair of operation pins (not shown) are inserted into the pair of operation holes 19b of the rotating cam member 19, and the rotating cam member 19 is Rotate counterclockwise. When the position defining portion 22a moves and the position defining portion 22a comes into contact with the position defining pin 22b, the rotation of the rotating cam member 19 is stopped. As shown in FIGS. The locking mechanism 6 is in the locked state.

  At this time, the protrusion 19 d of the rotating cam member 19 presses the locking member 20. Thereby, the locking member 20 moves toward the locking recess 16 against the urging force of the spring 21. The locking claw 15 is inserted into the locking recess 16 and locked, and the door member 4 is securely locked to the container member 2.

  4 and 5, the pair of operation pins inserted into the pair of operation holes 19b of the rotation cam member 19 are operated to rotate the rotation cam member 19 clockwise in FIG. When the position defining portion 22a moves and the position defining portion 22a comes into contact with the position defining pin 22c, the rotation of the rotating cam member 19 is stopped. As shown in FIGS. The locking mechanism 6 is in the unlocked state.

  At this time, the protruding portion 19d of the rotating cam member 19 is in a state where the locking member 20 is not pressed. Thereby, the locking member 20 is biased by the spring 21 and moves in the direction opposite to the locking recess 16. The locking claw 15 is retracted from the locking recess 16, and the door member 4 is ready to be removed from the container member 2.

  As described above, according to the substrate storage container 1 according to the first embodiment, the locking mechanism 6 that locks the door member 4 to the container member 2 is installed on the outer surface of the side wall 17 of the container member 2. For this reason, the locking mechanism 6 is exposed on the outer surface side of the container member 2. Thereby, since the locking mechanism 6 is not built in the door member 4 as before, the contaminants do not accumulate in the door member 4 and the contamination in the container member 2 can be prevented. Further, since the locking mechanism 6 is exposed on the outer surface, the locking mechanism 6 can be inspected, repaired, and cleaned without disassembling the door member 4. As a result, various operations such as inspection, repair, and cleaning can be simplified. A detachable protective cover (not shown) having an opening that allows the operation pin to be inserted into the through hole 19a of the rotating cam member 19 may be provided on the side of the locking mechanism 6. Examples of the protective cover include sheet molded products and plastic molded products. Moreover, since it is not necessary to incorporate an engagement means in the door member 4, the door member 4 is made thin.

  Moreover, since the positioning part 12 is provided in the bottom face (outer surface) 4b of the door member 4, the board | substrate storage container 1 can be arrange | positioned accurately by positioning the door member 4. FIG.

  In the substrate storage container 1 of the first embodiment, the urging means for retracting the locking claw 15 is the spring 21, but other urging means such as a leaf spring may be used. When the urging means is made of a metal material, a resin layer or other coating layer can be provided on the surface.

  Next, a substrate storage container according to a second embodiment of the present invention will be described with reference to FIGS. 8 is an exploded perspective view showing a substrate storage container according to the second embodiment of the present invention, FIG. 9 is a sectional view showing a locking state of the locking mechanism in FIG. 8, and FIG. It is sectional drawing which shows the unlocking state of a locking mechanism. The difference between the substrate storage container 31 of the second embodiment and the substrate storage container 1 of the first embodiment is that the positions of the openings 3 and 33 for loading and unloading the substrates are different, and the structures of the locking mechanisms 6 and 36 are different. Is a point.

  The substrate storage container 31 is a front open type substrate storage container having a container member 32 having an opening 33 formed on the front side. The substrate storage container 31 includes a container member 32, a door member 34 that closes the opening 33 of the container member 32, a gasket 5 that seals between the container member 32 and the door member 34, and the door member 34 is locked to the container member 32. A locking mechanism 36 is provided.

  On the inner surfaces of the container member 32 and the door member 34, a substrate support portion (not shown) for supporting a plurality of substrates in the horizontal direction is provided. A reinforcing rim portion 37 is formed on the front surface of the container member 32 so as to surround the opening 33 and project outward. Further, a groove portion 8 to which the gasket 5 is attached is formed on the inner surface 34 a of the door member 34, and the gasket 5 is attached to the groove portion 8.

  Here, a pair of side walls (peripheries) 34 c facing each other of the door member 34 is formed with a locking recess 16 in which a locking claw (locking projection) 35 described later of the locking mechanism 36 is locked. .

  A plurality of locking mechanisms 36 are installed on a pair of opposing side walls 39 of the container member 32 (two in this embodiment, a total of four), and the locking mechanisms 36 are exposed on the outer surface side of the container member 32. ing. The locking mechanism 36 includes a pair of support plates 40 fixed to the side wall 39 and projecting outward and spaced apart from each other in the vertical direction. The support pins 41 are supported at both ends by the pair of support plates 40 and extend in the vertical direction. A rocking member 42 provided with a locking claw 35 at one end and pivotally supported by a support pin 41, and a leaf spring (which oscillates by urging the rocking member 42). Elastic member) 43.

  Further, the rim portion 37 of the container member 32 is formed with a notch portion 37 a corresponding to the swing member 42. The cutout portion 37 a penetrates the rim portion 37 inward and outward, and allows the locking claw 35 to appear and retract with respect to the locking recess 16.

  The swing member 42 is an elongated plate-like member, extends in the horizontal direction between the pair of support plates 40, has a through hole formed at a substantially center in the longitudinal direction, and the support pin 41 is inserted into the through hole. Yes. One end 42 a of the swing member 42 is bent toward the locking recess 16. A locking claw 35 is provided at the end of the bent locking recess 16 side. The other end portion 42 b of the swing member 42 functions as an operated portion that is pressed by an operating rod for operating the locking mechanism 36.

  The leaf spring 43 is curved in a U shape, and urges the swing member 42 to move the locking claw 35 toward the locking recess 16. One end portion 43 a of the leaf spring 43 is supported by a support portion 44 fixed to the side wall 39 of the container member 32, and the other end portion 43 b of the leaf spring 43 is supported by a support portion 45 fixed to the swing member 42. Is supported by. Grooves for inserting the end portions 43a and 43b of the leaf spring 43 are formed in the support portions 44 and 45, and the end portions 43a and 43b of the leaf spring 43 are inserted into the grooves.

  Next, regarding the operation of the substrate storage container 31 configured as described above, the locked state and the unlocked state of the locking mechanism 36 will be described with reference to the drawings.

  In FIG. 9, the door member 34 is locked to the container member 32 by the locking mechanism 36, and the inside of the container member 32 is in a sealed state. Specifically, the swinging member 42 is biased by the leaf spring 43, and the locking claw 35 is locked to the locking recess 16 of the door member 34 (locked state).

  In order to unlock the locking mechanism 36, the other end 42b of the swing member 42 is pressed from the side by the operating rod 45, and the swing member 42 is swung counterclockwise as shown in FIG. Move. The locking claw 35 moves in the direction opposite to the locking recess 16. The locking by the locking mechanism 36 is released, and the door member 34 can be removed from the container member 32.

  In FIG. 19, when the operating rod 45 that presses the other end 42 b of the swing member 42 is moved in the direction opposite to the other end 42 b, the swing member 42 is urged by the leaf spring 43. Swings clockwise. The locking claw 35 moves toward the locking recess 16 and is inserted into the locking recess 16 and locked as shown in FIG. Thereby, the door member 34 can be locked to the container member 32 by the locking mechanism 36.

  Even if comprised in this way, there exists an effect | action and effect similar to the board | substrate storage container 1 of 1st embodiment. In addition, fixed plates 40 are installed on both sides of the swing member 42 in the vertical direction, and contact with the swing member 42 from the vertical direction can be prevented, and malfunction of the swing member 42 can be prevented. .

  In the substrate storage container 31 of the second embodiment, the elastic member that biases and swings the swing member 42 is the leaf spring 43, but other elastic members such as a spring may be used.

  Next, a substrate storage container according to a third embodiment of the present invention will be described with reference to FIGS. 11 is a cross-sectional view showing the locked state of the locking mechanism of the substrate storage container according to the third embodiment of the present invention, FIG. 12 is a cross-sectional view showing the unlocked state of the locking mechanism in FIG. FIG. 12 is an enlarged view of the locking mechanism in FIG. 11. The difference between the substrate storage container 51 of the third embodiment and the substrate storage container 1 of the first embodiment is that the configuration of the locking mechanisms 6 and 56 for locking the door members 4 and 54 to the container members 2 and 52 is different. Is a point.

  The substrate storage container 51 is a bottom open type substrate storage container having a container member 52 having an opening 3 formed at the bottom. The substrate storage container 51 includes a container member 52, a door member 54 that closes the opening 3 of the container member 52, a gasket 5 that seals between the container member 52 and the door member 54, and the door member 54 is locked to the container member 52. A locking mechanism 56 is provided.

  A reinforcing rim portion (flange portion) 57 is formed at the bottom of the container member 52 so as to surround the opening 3 and project outward. Further, a groove portion 8 to which the gasket 5 is attached is formed on the inner surface 54 a of the door member 54, and the gasket 5 is attached to the groove portion 8.

  Here, the rim portion 57 of the container member 52 is formed with a locking hole (through hole) 58 penetrating in the vertical direction. An insertion member 59 and a locking piece 60 described later of the locking mechanism 56 are inserted into the locking hole 58.

  The locking mechanism 56 is installed at a plurality of locations on the periphery of the door member 54. The locking mechanism 56 protrudes from the door member 54 and is inserted into the locking hole 58 of the rim portion 57, and is rotatably supported at the tip of the insertion member 59 and can be locked to the periphery of the locking hole 58. The locking piece 60 is provided. The locking mechanism 56 is exposed on the outer surface side of the container member 52 in a state where the door member 54 is mounted on the container member 52.

  The insertion member 59 is an elongated rod-like member and extends in the vertical direction. The insertion member 59 is fixed to the inner surface 54 a of the door member 54. A pin 61 that rotatably supports the locking piece 60 is provided at the distal end portion 59a of the insertion member 59 (see FIG. 12). The pin 61 extends in the horizontal direction (the direction perpendicular to the paper surface in FIGS. 11 and 12), and allows the locking piece 60 to rotate in the vertical direction.

  The locking piece 60 can be changed to a first rotation position (see FIG. 11) that can be inserted into the locking hole 58 and a second rotation position (see FIG. 12) that can be locked to the periphery of the locking hole 58. It is made into the composition. As shown in FIG. 13, in the first rotation position, the first diameter D1, which is the length in the horizontal direction of the locking piece 60, is shorter than the diameter D3 of the locking hole 58 and the vertical direction of the locking piece 60. The second diameter D2, which is the length of, is longer than the locking hole 58D3.

  Thereby, the door member 54 can be attached to and detached from the container member 52 by setting the locking piece 60 to the first rotation position. The locking piece 60 is disposed at the first rotation position, the door member 54 is mounted on the container member 52, and when the locking piece 60 protrudes outward from the locking hole 58, the locking piece 60 in FIG. As shown in FIG. 12, the locking piece 60 can be locked to the periphery of the locking hole 58 by rotating it around and the door member 54 can be locked by a locking mechanism. 56 is locked to the container member 54.

  Even in this configuration, since the locking mechanism 56 is disposed outside the container member 52 and exposed to the outside in a state where the door member 54 is mounted on the container member 52, the substrate storage of the first embodiment The same operations and effects as the container 1 are exhibited.

  As mentioned above, although this invention was concretely demonstrated based on the embodiment, this invention is not limited to the said embodiment. In the above embodiment, the substrate storage container of the present invention is described as storing a semiconductor wafer. However, the substrate to be stored is not limited to a semiconductor wafer, but other precision substrates including mask glass. But you can. Further, the size of the substrate to be accommodated is not limited to 450 mm, and may be other sizes such as 300 mm. Further, the number of stored sheets is not limited to 1 to 25 and may be 26 or more.

  In the first embodiment and the third embodiment, the locking mechanisms 6 and 56 are applied to the bottom open type substrate storage container, but may be applied to the front open type substrate storage container. The locking mechanisms 6 and 56 may be applied to a top open type substrate storage container having a portion formed on the top plate of the container member. Further, the urging means for urging the locking claw of the locking mechanism may be a device that urges the locking claw using magnetic force or vacuum force. Further, the door member may be opened and closed by changing the shape by forming the locking claw from a shape memory alloy or a shape memory resin.

  In the second embodiment, the locking mechanism 36 is applied to the front open type substrate storage container. However, the locking mechanism 36 may be applied to a bottom open type or top open type substrate storage container. Good.

  Moreover, in the said embodiment, although the board | substrate storage containers 1,31,51 are set as the structure which arrange | positions and accommodates a board | substrate horizontally, the direction which accommodates a board | substrate is not limited to horizontal, It is perpendicular | vertical or another direction. A substrate may be disposed and accommodated.

  Moreover, the shape of the openings 3 and 33 may be rectangular or circular. When the openings are circular, the tightening pressure on the sealing surface is uniform, and the sealing performance is improved compared to the rectangular openings. Can be made.

  Moreover, in the said embodiment, although the positioning part 12 provided in the board | substrate storage container is made into the recessed part and the other party is made into the convex part, as shown in FIG. 14, the positioning part 73 which is a convex part is formed in a board | substrate storage container. And the positioning part 72 which is a recessed part may be formed in the other party. The positioning portions 12 and 73 may be formed of the same material as or different materials from the substrate storage containers 1, 31 and 51, and may be attached to the substrate storage container by screwing or frictional engagement, or may be integrated during molding. May be. The positioning portions 12 and 73 are not limited to being provided in three locations in a Y-shape (triangular shape). The positioning portions 12 and 73 may be provided with one convex or concave hemispherical member at the bottom of the substrate storage container. The number and arrangement of 73 can be freely set.

  The container member 2, 32, 52 or the door member 4, 34, 54 is provided with a valve device (not shown) having a filter member to eliminate the pressure difference between the inside and outside of the substrate storage containers 1, 31, 51. can do. Examples of the filter member include a filter member that holds a porous body such as a molecular filtration filter, a filter such as a chemical filter or a breathing filter, and a polymer, metal, or ceramic.

It is a disassembled perspective view which shows the substrate storage container which concerns on 1st embodiment of this invention. It is a bottom view of the substrate storage container shown in FIG. It is sectional drawing which follows the III-III line in FIG. 1, and is sectional drawing which shows the state in which the substrate storage container was positioned by the predetermined | prescribed apparatus. It is sectional drawing which shows the locking state of the latching mechanism in FIG. It is a fragmentary sectional view which shows the locking state of the latching mechanism in FIG. 1 from a side. It is sectional drawing which shows the unlocking state of the latching mechanism in FIG. It is a fragmentary sectional view which shows the unlocking state of the latching mechanism in FIG. 1 from the side. It is a disassembled perspective view which shows the substrate storage container which concerns on 2nd embodiment of this invention. It is sectional drawing which shows the locking state of the latching mechanism in FIG. It is sectional drawing which shows the unlocking state of the latching mechanism in FIG. It is sectional drawing which shows the locking state of the latching mechanism of the substrate storage container which concerns on 3rd embodiment of this invention. It is sectional drawing which shows the unlocking state of the latching mechanism in FIG. It is an enlarged view of the latching mechanism in FIG. It is sectional drawing which shows the other form of a positioning part.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1,31,51 ... Board | substrate storage container, 2,32,52 ... Container member (container main body), 3,33 ... Opening part, 4,34,54 ... Door member (lid body), 4c, 34c ... Door member Side wall (periphery of lid), 6, 36, 56 ... locking mechanism (engaging means), 12, 73 ... positioning portion, 15, 35 ... locking claw, 16 ... locking recess, 17, 39 ... container member , Rotating cam member, 21 spring (biasing means), 42 swing member, 43 leaf spring (elastic member), 57 rim portion (flange portion), 58 locking hole (through hole) ), 59..., An insertion member, 59 a...

Claims (6)

In a substrate storage container comprising: a container main body having an opening for storing a substrate; a lid for closing the opening; and an engaging means for engaging the lid with the container main body.
The substrate storage container, wherein the engaging means is exposed on an outer surface side of the container body.   The engaging means is provided on the outer surface of the side wall of the container body, and includes a locking claw that can be moved forward and backward with respect to a recess formed in a peripheral edge of the lid and is locked to the recess. The substrate storage container according to claim 1. The engaging means includes
Biasing means for retreating the locking claw and releasing the locking by the locking claw;
The substrate storage container according to claim 2, further comprising a cam member that is rotatably supported on an outer surface of the side wall and moves the locking claw toward the recess. The engaging means includes
A swinging member provided with the locking claw at one end and supported swingably on the outer surface of the side wall;
The substrate storage container according to claim 2, further comprising an elastic member that urges the swing member to swing the swing member. The container body has a flange portion that surrounds the opening and protrudes outwardly,
A through hole is formed in the flange portion,
The engaging means includes
An insertion member that protrudes outward from the lid and is inserted into the through hole;
A locking piece that is rotatably supported at the distal end of the insertion member and can be changed to a first rotation position that can be inserted into the through hole and a second rotation position that can be locked to the periphery of the through hole. The substrate storage container according to claim 1, further comprising: The opening is formed at the bottom of the container body,
The substrate storage container according to claim 1, wherein a positioning portion that positions the lid is provided on an outer surface of the lid.

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