JP2012195496A - Substrate housing container and gas replacing method using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate housing container with an on-off valve for purge that can be used for any of a supply side and an exhaust side, and a gas replacing method using the substrate housing container.SOLUTION: A cylindrical ball on-off valve 40 in which a through hole 42 is formed is rotatably pivoted by a lower cylinder 10, and a holding cylinder 30 housing the ball on-off valve 40 is housed movably in an axial line direction to the lower cylinder 10. A first cam groove 34 for guiding the lower cylinder 10 in the axial line direction, and a second cam groove 35 for rotating the ball on-off valve 42 together with the movement of the lower cylinder 10 are formed on an inner wall of the holding cylinder 30. Then, the ball on-off valve 40 is rotated by the guidance of the first cam groove 34 and the second cam groove 35, and the through hole 42 is directed to a direction vertical to the axial line direction during a normal time. Thereby, the inside of the container is held airtight, and the lower cylinder 10 is moved toward the inside of the container relative to the holding cylinder 30, and the through hole 42 is directed to a direction parallel to the axial line direction, so as to communicate the inside and the outside of the container.

Description

  The present invention relates to a substrate storage container used for storing, transporting, and transporting precision substrates such as semiconductor wafers, glass wafers, and mask glasses, and a gas replacement method using the same, and more particularly, a substrate storage container The present invention relates to a rotary on-off valve provided in the above and a gas replacement method using the same.

  This type of substrate storage container includes a container main body that includes an opening and stores one or more substrates in an aligned manner, and a lid that closes the opening in a sealable manner, such as a semiconductor wafer, a glass wafer, It is used for storage of substrates such as mask glass, transportation within the process, and transportation to the outside.

  In order to prevent oxidation and deterioration of the surface of the substrate and not to promote unnecessary reactions, such a substrate storage container causes the air inside the substrate storage container to pass through an inert gas or dry air in the process of processing the substrate. It is known that air is purged and stored.

  Therefore, conventionally, in order to replace the air inside the substrate storage container, a valve body provided with a check valve for preventing the backflow of air is attached like the substrate storage container described in Patent Document 1. Has been proposed.

JP 2004-179449 A JP 2003-168728 A

  However, since the valve body provided in the substrate storage container described in Patent Document 1 is fixed in the direction in which the gas to be replaced flows, the valve body must be attached in consideration of the supply side and the exhaust side of the gas to be replaced. did not become.

  Further, the substrate storage container described in Patent Document 1 can replace the gas inside the substrate storage container through the valve body, but since the plurality of substrates are stored in a horizontal state, these substrates become like a partition, Gas stagnation occurs inside the substrate storage container. For this reason, there is a problem that the efficiency of replacing the gas is poor and the time for replacing the gas becomes long.

  Therefore, like the substrate storage container described in Patent Document 2, it is proposed that gas is ejected from a nozzle tower installed inside the substrate storage container to prevent gas stagnation and efficiently replace the gas. It was.

  However, the substrate storage container is repeatedly used after being washed every time it is used for a certain period. For this reason, when the nozzle tower is installed inside the substrate storage container as in the substrate storage container described in Patent Document 2, the cleaning water remains inside the nozzle tower, and the remaining cleaning water is dried. There is a problem that it takes a long time.

  If the inside of the substrate storage container is not sufficiently dried, even if the gas inside the substrate storage container is replaced with inert gas or dry air, the gas replacement effect cannot be sufficiently exerted due to the influence of residual moisture. Specifically, due to the influence of the remaining moisture, organic substances adhere to the substrate surface and the substrate is contaminated, the substrate surface is corroded due to oxidation or corrosion, and an excessive reaction of the substrate is promoted.

  Accordingly, the present invention has been made in view of the above problems, and a substrate storage container provided with a purge opening / closing valve that can be used on both the supply side and the exhaust side, and a gas replacement method using the same The purpose is to provide.

  A substrate storage container according to the present invention includes a container main body having an opening to store a substrate, a lid provided with a locking mechanism and fitted into the opening, and a purge opening / closing provided in the container main body or the lid And an opening / closing valve having an opening / closing valve that is rotatably supported by a cam mechanism, and the opening / closing valve prevents passage of gas inside and outside the container in accordance with the rotation position. It has a first state and a second state that allows passage of gas inside and outside the container.

  According to the substrate storage container of the present invention, the first state in which the on-off valve is rotated by the cam mechanism to prevent the passage of gas inside and outside the container, and the second state in which the passage of gas inside and outside the container is allowed By switching the gas, the gas inside the substrate storage container can be replaced. Since the rotation of the on-off valve can switch between the first state that prevents the passage of gas inside and outside the container and the second state that allows the passage of gas inside and outside the container, the gas intake side and exhaust Can be used on either side.

  In this case, the on-off valve includes a cylindrical holding cylinder that accommodates the on-off valve, and a cylindrical lower cylinder that accommodates the holding cylinder and pivotally supports the on-off valve. Then, it is preferable to rotate the on-off valve by moving the holding cylinder along the axial direction. If comprised in this way, since a cam mechanism can rotate an on-off valve only by moving a holding cylinder along an axial direction with respect to a lower cylinder, switching between a 1st state and a 2nd state Can be performed easily.

  The lower cylinder is provided with a flange portion extending radially inward and having an opening formed at the center thereof on the outer side of the substrate storage container. The inner diameter of the holding cylinder is larger than the inner diameter of the opening of the flange portion. Is preferably small. If comprised in this way, a holding cylinder can be protruded from the opening part of a lower cylinder, supporting a holding cylinder from the exterior side of a substrate storage container. Thus, by projecting the holding cylinder from the opening of the lower cylinder, the holding cylinder can be moved from the outside of the substrate storage container to the inner side of the substrate storage container along the axial direction with respect to the lower cylinder. . Thereby, the gas inside the substrate storage container can be easily replaced.

  Further, the lower cylinder includes an on-off valve shaft support portion that rotatably supports the on-off valve, and the on-off valve is provided with a shaft support projection that is supported on the on-off valve shaft support portion, and for rotating the on-off valve. A rotation projection, and a linear first cam groove that guides the on-off valve shaft support portion in the axial direction on the inner wall of the holding cylinder, and the on-off valve rotates as the holding cylinder moves relative to the lower cylinder It is preferable that a curved second cam groove that guides the rotation protrusion in a direction to be formed is formed. With this configuration, the shaft support protrusion of the on-off valve is pivotally supported by the on-off valve support portion of the lower cylinder, but the rotation protrusion of the on-off valve is guided to the second cam groove of the holding cylinder. Therefore, by moving the holding cylinder along the axial direction with respect to the lower cylinder, the on-off valve can be rotated with the on-off valve support portion of the lower cylinder as the rotation axis.

  Further, the opening / closing valve is formed with a seal opening penetrating the inside and outside of the container, and the opening / closing valve is a cylindrical body in which a through hole penetrating linearly is formed. The through hole is oriented in a direction perpendicular to the axial direction of the holding cylinder, the sealing opening is closed by the peripheral wall of the on-off valve, and in the second state, the through hole is parallel to the axial direction of the holding cylinder It is preferable that the sealing opening and the through hole communicate with each other.

  If comprised in this way, since the opening part for sealing will be block | closed by the surrounding wall of an on-off valve by making an on-off valve into a 1st state, a board | substrate storage container can be hold | maintained airtightly. On the other hand, when the on-off valve is in the second state, the sealing opening and the through hole communicate with each other, so that the air inside the substrate storage container can be replaced through the through hole. At this time, since the through hole penetrates the on-off valve linearly, the purge nozzle can be inserted into the substrate storage container through the through-hole by setting the on-off valve to the second state. For this reason, the gas inside the substrate storage container is replaced by the purge nozzle inserted into the substrate storage container through the through hole, thereby preventing gas stagnation inside the substrate storage container and improving the gas replacement efficiency. The gas replacement time can be shortened. In addition, in this case, by removing the purge nozzle from the through-hole after completion of the gas replacement, it is possible to suppress the cleaning water remaining in the substrate storage container, so that the drying time of the substrate storage container can be shortened and the gas replacement effect can be achieved. It can be fully demonstrated.

  A gas replacement method according to the present invention is a gas replacement method using the above-described substrate storage container, wherein the substrate storage container is mounted on the purge port, and the on-off valve is rotated to change the gas from the first state to the second state. The gas is supplied from the purge port to the inside of the substrate storage container through the open / close valve in the second state, and the gas in the substrate storage container is exhausted.

  According to the gas replacement method of the present invention, since the above-described substrate storage container is used, the on-off valve having the same configuration is used on either the gas intake side or the exhaust side to rotate the on-off valve. It can switch from the 1st state which prevents passage of the gas inside and outside a container to the 2nd state which permits passage of the gas inside and outside a container.

  In this case, it is preferable that the holding cylinder protruding from the opening of the lower cylinder is pushed into the inside of the substrate storage container by the bar-shaped member of the purge port, and the on-off valve is rotated. Thus, when the holding cylinder protrudes from the opening of the lower cylinder, the holding cylinder protruding from the opening by the rod-like member is pushed into the inside of the substrate storage container, so that the holding cylinder is moved with respect to the lower cylinder. It can be moved to the inside of the substrate storage container along the axial direction.

  The rod-like member is formed in a pipe shape, and after the on-off valve is rotated to the second state by the rod-like member, gas is ejected from the inside of the rod-like member into the substrate storage container through the through-hole of the on-off valve. It is preferable to insert a purge nozzle to eject gas from the purge nozzle. Thus, since the rod-shaped member is formed in a pipe shape, the purge nozzle is opened and closed from the inside of the rod-shaped member that moves the holding tube along the axial direction to the inside of the substrate storage container with respect to the lower tube. It can be inserted into the substrate storage container through the through hole. Then, by replacing the gas in the substrate storage container with a purge nozzle inserted into the substrate storage container through the through hole, it is possible to prevent gas stagnation inside the substrate storage container and improve the gas replacement efficiency. This can shorten the gas replacement time. In addition, in this case, by removing the purge nozzle from the through-hole after completion of the gas replacement, it is possible to suppress the cleaning water remaining in the substrate storage container, so that the drying time of the substrate storage container can be shortened and the gas replacement effect can be achieved. It can be fully demonstrated.

  Further, the purge nozzle is formed with a nozzle hole for ejecting gas, and it is preferable that gas is ejected from the nozzle hole between adjacent substrates stored in the substrate storage container. As described above, the gas between the adjacent substrates can be replaced by ejecting the gas between the adjacent substrates from the nozzle hole of the purge nozzle inserted into the substrate storage container. Thereby, gas stagnation can be prevented and gas can be replaced efficiently.

  On the other hand, the gas may be ejected from the purge nozzle by arbitrarily adjusting the amount of insertion of the purge nozzle into the substrate storage container. As described above, by adjusting the amount of the purge nozzle inserted into the substrate storage container, gas can be ejected to a position where air accumulation is likely to occur, such as between the substrates. Can be prevented. Since the gas can be ejected only at a desired position, the purge efficiency can be improved.

  According to the present invention, a purge opening / closing valve can be used on either the supply side or the exhaust side.

It is the perspective view which looked at the substrate storage container concerning an embodiment from the lower part. It is a partially expanded view of the substrate storage container shown in FIG. It is a bottom view of the substrate storage container shown in FIG. It is the IV-IV sectional view taken on the line of FIG. It is a disassembled perspective view of an on-off valve. It is an exploded sectional view of an on-off valve. It is a bottom view of an on-off valve. It is the VIII-VIII sectional view taken on the line of FIG. It is the IX-IX sectional view taken on the line of FIG. It is sectional drawing of an upper cylinder. It is a perspective view of a lower cylinder. It is a top view of a lower cylinder. It is the XIII-XIII sectional view taken on the line of FIG. It is a perspective view of an on-off valve. It is a perspective view of a holding cylinder. It is a top view of a holding cylinder. It is the XVII-XVII sectional view taken on the line of FIG. It is the XVIII-XVIII sectional view taken on the line of FIG. It is the perspective view which looked at packing from the downward direction. It is the XX-XX line perspective view of FIG. It is the perspective view which looked at the cover body for packing from the downward direction. It is sectional drawing which showed the state which mounted the substrate storage container in the purge port. It is the partially expanded view which expanded the opening-and-closing valve periphery of the substrate storage container shown in FIG. It is sectional drawing which showed the state which pushed in the holding cylinder with the rod-shaped member. It is the partially expanded view which expanded the opening-and-closing valve periphery of the substrate storage container shown in FIG. It is sectional drawing which showed the relationship between a lower cylinder, a holding cylinder, and a rod-shaped member. It is sectional drawing which showed the relationship between a holding cylinder and an on-off valve. It is sectional drawing which showed the purge method using the tower-shaped purge nozzle in which the nozzle hole was formed in multiple places. It is sectional drawing which showed the purge method using the purge nozzle in which the nozzle hole was formed in one place.

  Hereinafter, with reference to the drawings, a preferred embodiment of a substrate storage container according to the present invention will be described in detail. In the following description, up, down, left, and right indicate up, down, left, and right of the substrate storage container. Moreover, the same code | symbol shall be attached | subjected to the same or an equivalent part in all the figures.

  Drawing 1 is a perspective view which looked at a substrate storage container concerning an embodiment from the lower part. FIG. 2 is a partially enlarged view of the substrate storage container shown in FIG. FIG. 3 is a bottom view of the substrate storage container shown in FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. As shown in FIGS. 1 to 4, a substrate storage container 1 according to the embodiment stores a wafer (substrate) having a diameter of 300 mm therein, and includes a container body 2 and a lid 3. .

  The container body 2 is a front open type container having an opening on the front surface. Locking recesses into which connecting bars 7b of the locking mechanism 7 described later are inserted are formed on the upper and lower surfaces of the opening facing each other. A pair of support members 2 a for horizontally supporting the substrate is provided on a pair of inner walls facing each other of the container body 2. In the support member 2a, plate-like support portions extending from the opening portion to the back side are arranged at regular intervals in the vertical direction, and a step portion for preventing the substrate from jumping out is formed at the opening side end portion of each support portion. Has been. Further, a position regulating wall 2b for regulating the insertion limit of the substrate is formed on the inner wall on the back side of the container body 2.

  A bottom plate 4 to be placed on a processing apparatus on which the substrate storage container 1 is mounted is attached to the bottom surface of the container body 2, and the bottom plate 4 has a reverse V-shaped positioning member for positioning. 4a is attached. A robotic flange 5 for transportation is attached to the top surface portion of the container body 2.

  The lid 3 is fitted into the opening of the container body 2 and closes the opening so as to be sealable. The lid 3 includes a lid body, a pair of locking mechanisms 7 attached to the surface side of the lid body, and a surface plate attached to the surface side of the lid body so as to cover the locking mechanism 7. ing. A sealing groove is formed on the back side of the lid body, and a gasket for sealing between the container body 2 is inserted and fixed in the sealing groove. In addition, the back surface side of the lid body 3 means a side disposed on the inner side of the substrate storage container 1 when the lid body 3 is fitted into the opening of the container body 2, and the front surface side of the lid body 3 is The side on which the lid 3 is disposed on the outside of the substrate storage container 1 when the lid 3 is fitted into the opening of the container body 2.

  The container body 2 and the lid 3 configured as described above are formed using a synthetic resin such as polycarbonate, polyetheretherketone, polyetherimide, polybutylene terephthalate, polyacetal, liquid crystal polymer, cycloolefin polymer, and the like. . And, to these resins, conductivity imparting agents such as carbon powder, carbon fiber, and carbon nanotube are appropriately added.

  The locking mechanism 7 includes a rotating member 7a and a pair of connecting bars 7b that move forward and backward by the rotation of the rotating member 7a. A hole is formed. Further, the surface plate is formed with an operation hole 7c for fitting an operation key of the lid opening / closing device into the rotating member 7a, so that the locking mechanism 7 can be operated from the outside. In the locking mechanism 7 configured as described above, when the rotating member 7a is rotated forward by the operation key of the lid opening / closing device, the distal end portion of the connecting bar 7b that progresses appears from the intrusion hole, and the engagement recess of the container body 2 Locking is performed by being locked to. On the other hand, when the rotating member 7a is reversed by the operation key of the lid opening / closing device, the connecting bar 7b is retracted to enter the intrusion hole, thereby unlocking.

  The locking mechanism 7 configured as described above is formed of a synthetic resin such as polycarbonate, polyetheretherketone, polybutylene terephthalate, or polyacetal.

  The bottom portion of the container body 2 is formed with two through holes penetrating the container body 2 on the front and rear sides of the substrate to be stored, and each through hole has a through hole inside the substrate storage container 1. An on-off valve 100 for replacing gas is detachably attached. In the following description, the inner side of the substrate storage container 1 in which substrates are stored is referred to as the inner side of the substrate storage container, and the outer side of the substrate storage container 1 exposed to the outside is referred to as the outer side of the substrate storage container 1. That's it.

  FIG. 5 is an exploded perspective view of the on-off valve. FIG. 6 is an exploded sectional view of the on-off valve. FIG. 7 is a bottom view of the on-off valve. 8 is a cross-sectional view taken along line VIII-VIII in FIG. 9 is a cross-sectional view taken along line IX-IX in FIG. The inner side of the substrate storage container 1 is the upper side in FIGS. 5, 6, 8, and 9, and the outer side of the substrate storage container 1 is the lower side in FIGS. 5, 6, 8, and 9. It is.

  As shown in FIGS. 5 to 9, the opening / closing valve 100 includes a lower cylinder 10, a packing 20, a holding cylinder 30, a ball opening / closing valve 40, a packing 50, a packing lid body 60, and a coil spring 70. The O-ring 80 and the upper cylinder 90 are provided.

  The upper cylinder 90 accommodates the packing 20, the holding cylinder 30, the ball opening / closing valve 40, the packing 50, the packing lid body 60, the coil spring 70, and the O-ring 80 by screwing with the lower cylinder 10. Yes, it is arranged on the inner side of the substrate storage container 1 with respect to the lower cylinder 10.

  FIG. 10 is a cross-sectional view of the upper cylinder. As shown in FIG. 10, the upper cylinder 90 includes a cylindrical cylindrical portion 91, an outer flange portion 92 extending radially outward from the inner side end of the substrate storage container 1 in the cylindrical portion 91, and a substrate in the cylindrical portion 91. And an inner flange portion 94 extending inward in the radial direction from the inner side end portion of the storage container 1 and having an opening 93 at the center.

  On the outer peripheral surface of the cylindrical portion 91, a male threaded portion 95 made of a thread and a groove for screwing with the lower tube 10 is formed. The opening 93 formed in the inner flange portion 94 is an opening for communicating the inside and outside of the substrate storage container 1, and has an inner diameter that allows a purge nozzle to be described later to be sufficiently inserted. The opening cross section of the opening 93 is formed in a perfect circle.

  As shown in FIG. 5 to FIG. 9, the lower cylinder 10 is screwed into the upper cylinder 90 so that the packing 20, the holding cylinder 30, the ball opening / closing valve 40, the packing 50, the packing lid body 60, the coil spring 70, The O-ring 80 is accommodated inside, and is arranged on the outer side and the outer side in the radial direction of the substrate storage container 1 with respect to the upper cylinder 90.

  FIG. 11 is a perspective view of the lower cylinder. FIG. 12 is a top view of the lower cylinder. 13 is a cross-sectional view taken along line XIII-XIII in FIG. As shown in FIGS. 11 to 13, the lower cylinder 10 includes a cylindrical cylindrical portion 11, an outer flange portion 12 extending radially outward from an outer side end portion of the substrate storage container 1 in the cylindrical portion 11, and a cylindrical portion. 11, an inner flange portion 14 that extends radially inward from the outer end of the substrate storage container 1 and has an opening 13 formed in the center thereof, and a radially inner end of the inner flange portion 14 of the substrate storage container 1. And a pair of on-off valve shaft support bars 15 projecting toward the inner side.

  Formed on the inner peripheral surface of the cylindrical portion 11 is a female threaded portion 16 comprising a thread and a groove for screwing with the male threaded portion 95 of the upper cylinder 90. The opening 13 formed in the inner flange portion 14 is an opening for communicating the inside and outside of the substrate storage container 1, and has an inner diameter that allows a purge nozzle to be described later to be sufficiently inserted. The opening cross section of the opening portion 13 is formed in a deformed circular shape in which a pair of opposed arcs are cut out in a straight line, and a pair of opposed arc portions 13a and a pair of opposed linear portions 13b are formed. Has been. For this reason, a pair of bulging portions 14a in which a pair of opposed arcuate surfaces bulge radially inward are formed at the center of the inner flange portion 14, and the inner surfaces of the pair of bulging portions 14a facing each other, While forming in the mutually parallel planar shape, the linear part 13b of the opening part 13 is formed.

  The pair of on-off valve shaft support bars 15 are erected on the pair of bulged portions 14a of the inner flange portion 14, and the axial direction of the cylindrical portion 11 from the radially inner end edge of the cylindrical portion 11 in the bulged portion 14a. Extending toward the inside of the substrate storage container 1. A protruding portion 15a that protrudes toward the other opening / closing valve shaft support bar 15 is formed at the tip of each opening / closing valve shaft support bar 15, and the pair of protruding portions 15a face each other so as to face each other. Is formed in a tapered shape that becomes thinner toward the tip.

  FIG. 14 is a perspective view of the on-off valve. As shown in FIG. 14, the ball on-off valve 40 is an on-off valve in the on-off valve 100. The ball on-off valve 40 is formed in a deformed hexahedron having a chamfered ridgeline portion, and a chamfered surface 41 formed by chamfering the ridgeline portion is formed in a spherical shape. The ball on-off valve 40 is formed in a deformed cylindrical shape through which a pair of opposed surfaces are penetrated. The through hole 42 penetrating the ball opening / closing valve 40 is an opening for communicating the inside and outside of the substrate storage container 1, and has an inner diameter that allows a purge nozzle (described later) to be sufficiently inserted.

  Four side surfaces 43 facing the direction perpendicular to the through hole 42 are formed on the peripheral wall of the ball on-off valve 40. A pair of axial projections 44 projecting vertically from the side surface 43 are formed on the pair of side surfaces 43 facing each other. The shaft support protrusion 44 is rotatably supported by the projecting portion 15a of the on-off valve shaft support bar 15, and is formed in a cylindrical shape into which the projecting portion 15a can be inserted. Then, by inserting the pair of protrusions 15a into the pair of shaft projections 44, the ball on-off valve 40 is rotatably supported with a straight line passing through the pair of protrusions 15a as a rotation axis.

  In addition, a rotation projection 45 that protrudes in the same direction as the projection direction of the shaft support projection 44 is formed in the vicinity of the one shaft support projection 44 of the ball on-off valve 40. The rotation protrusion 45 rotates the ball opening / closing valve 40. The rotation protrusion 45 may be formed on the side surface 43 where the shaft support protrusion 44 is formed, or may be formed on the chamfered surface 41 around the side surface 43 where the shaft support protrusion 44 is formed.

  As shown in FIGS. 5 to 9, the holding cylinder 30 is accommodated in the lower cylinder 10 via the packing 20 and accommodates the ball opening / closing valve 40.

  FIG. 15 is a perspective view of the holding cylinder. FIG. 16 is a top view of the holding cylinder. 17 is a cross-sectional view taken along line XVII-XVII in FIG. 18 is a cross-sectional view taken along line XVIII-XVIII in FIG. As shown in FIGS. 15 to 18, the holding cylinder 30 includes a cylindrical cylindrical portion 32, and an outer flange portion 33 that extends radially outward from the outer end of the substrate storage container 1 in the cylindrical portion 32. ing.

  A packing groove 33 a into which the packing 20 is inserted is formed at the outer end surface of the substrate storage container 1 in the outer flange portion 33 at the center portion in the radial direction of the holding cylinder 30. In addition, a spring groove 33 b in which the coil spring 70 is locked is formed at the radially outer end portion of the holding cylinder 30 on the inner side end surface of the substrate storage container 1 in the outer flange portion 33.

  A locking recess 37 for locking the packing lid 60 is formed on the outer peripheral surface of the cylindrical portion 32.

  A through hole 31 penetrating in the axial direction is formed on the inner peripheral surface of the cylindrical portion 32. The through-hole 31 is an opening for accommodating the ball opening / closing valve 40 and communicating the inside and outside of the substrate storage container 1, and the inner diameter thereof is a dimension that allows the ball opening / closing valve 40 to be rotatably accommodated. . Similar to the opening 13 of the lower cylinder 10, the opening cross section of the through hole 31 is formed in a deformed circular shape in which a pair of opposing arcs are cut out linearly, and a pair of opposing arcs 31a; A pair of opposing linear portions 31b are formed. For this reason, a pair of bulging portions 32a in which a pair of opposed circular arc surfaces bulge radially inward are formed on the inner peripheral surface of the cylindrical portion 32, and the opposed inner surfaces of the pair of bulging portions 32a Are formed in a plane parallel to each other and form a straight portion 31 b of the through hole 31. The inner diameter of the arc portion 31 a in the through hole 31 is formed to be the same as the inner diameter of the arc portion 13 a of the lower cylinder 10, but the separation distance of the straight portion 31 b in the through hole 31 is the straight portion of the lower cylinder 10. It is shorter than the separation distance of 13b. For this reason, the inner diameter of the through hole 31 in the holding cylinder 30 is smaller than the inner diameter of the opening 13 in the lower cylinder 10 as a whole.

  A pair of bulging portions 32a forming the straight portion 31b are slidably inserted into the opening / closing valve shaft support bar 15 of the lower tube 10 and the shaft support projection 44 of the ball opening / closing valve 40. A first cam groove 34 is formed. A second cam groove 35 into which the rotation projection 45 of the ball on-off valve 40 is slidably inserted is formed on the inner surface of one bulging portion 32a forming the linear portion 31b.

  The first cam groove 34 is formed in a linear shape along the axial direction of the holding cylinder 30 from the outer edge of the substrate storage container 1 toward the inner side of the substrate storage container 1. For this reason, the first cam groove 34 restricts the rotation of the holding cylinder 30 in the circumferential direction relative to the lower cylinder 10 by inserting the opening / closing valve shaft support bar 15 of the lower cylinder 10, thereby The movement of the lower cylinder 10 in the axial direction is guided.

  The second cam groove 35 is formed in a curved shape that is curved along the axial direction of the holding cylinder 30. The second cam groove 35 has a shape that guides the rotation protrusion 45 so that the ball on-off valve 40 rotates by 90 ° or about 90 ° by movement along the axial direction of the holding cylinder 30 with respect to the lower cylinder 10. Yes. That is, the second cam groove 35 is formed so that the through hole 42 of the ball on / off valve 40 is in the axial direction of the holding cylinder 30 when the holding cylinder 30 moves to the outside of the substrate storage container 1 with respect to the ball on / off valve 40. When the holding cylinder 30 moves toward the inside of the substrate storage container 1 with respect to the ball opening / closing valve 40, the through-hole 42 of the ball opening / closing valve 40 is in the axial direction of the holding cylinder 30. The shape is oriented in a parallel direction.

  A packing groove 36 into which the packing 50 is fitted from the inner side of the substrate storage container 1 is formed at the inner side end of the substrate storage container 1 in the cylindrical portion 32. The packing groove 36 is formed by expanding the diameter of the through hole 31, and the opening cross section is formed in a perfect circle.

  FIG. 19 is a perspective view of the packing as viewed from below. 20 is a perspective view taken along line XX-XX in FIG. As shown in FIGS. 19 and 20, the packing 50 is a member for sealing with the ball opening / closing valve 40, and is formed in a disc shape with an opening 51 formed in the center.

  The opening 51 is an opening for communicating the inside and outside of the substrate storage container 1, and the inner diameter thereof is slightly larger than the inner diameter of the through hole 42 in the ball opening / closing valve 40. The opening 51 is formed with a seal surface 51 a that is in close contact with the chamfered surface 41 of the ball on-off valve 40. The sealing surface 51 a is formed in the same spherical shape as the chamfered surface 41 in order to enhance the adhesion with the chamfered surface 41, and has an inner diameter from the inner side of the substrate storage container 1 toward the outer side of the substrate storage container 1. Is getting bigger. The opening 51 is formed with a notch 51b on the inner side of the substrate storage container 1 on the seal surface 51a and a notch 51c on the outer side of the substrate storage container 1 on the seal surface 51a. Thereby, since the seal surface 51a is formed so as to protrude from the opening 51, the adhesion with the chamfered surface 41 is enhanced.

  The thickness of the packing 50 is the same as the depth of the packing groove 36 in the holding cylinder 30 or slightly larger than the depth of the packing groove 36.

  FIG. 21 is a perspective view of the packing lid viewed from below. As shown in FIG. 21, the packing lid 60 is a member that covers the inner end face of the substrate storage container 1 in the holding cylinder 30 and fixes the packing 50 to the packing groove 36, and has an opening at the center. 61 is formed in a disc shape.

  The opening 61 is an opening for communicating the inside and outside of the substrate storage container 1, and the inner diameter thereof is substantially the same as the inner diameter of the opening 51 of the packing 50.

  A pair of first claw portions 62 and a pair of second claw portions 63 that protrude toward the outside of the substrate storage container 1 are formed at the radially outer end of the packing lid 60. The first claw portions 62 and the second claw portions 63 are alternately arranged, and contact the outer peripheral surface of the holding cylinder 30 to position the packing lid body 60 with respect to the holding cylinder 30. .

  A locking projection 63 a that protrudes toward the inside in the radial direction of the packing lid 60 and is locked to the locking recess 37 of the cylindrical portion 32 is formed at the tip of the second claw portion 63. The length of the second claw portion 63 is such that the packing lid 60 abuts against the inner side end surface of the substrate storage container 1 in the holding cylinder 30 when the locking projection 63 a is locked to the locking recess 37. It has become. For this reason, the packing 50 is fixed in a state of being inserted into the packing groove 33 a of the holding cylinder 30 by locking the locking projection 63 a with the locking recess 37.

  Then, when the outer flange portion 33 of the holding cylinder 30 is in contact with the inner flange portion 14 of the lower cylinder 10, the lower cylinder is arranged such that the chamfered surface 41 of the ball on-off valve 40 is in close contact with the seal surface 51 a of the packing 50. The length of the ten on-off valve shaft support bars 15 is set.

  The on-off valve 100 configured in this way is assembled as shown below.

  The ball opening / closing valve 40 is pivotally supported by the lower cylinder 10 by inserting the protrusion 15 a of the opening / closing valve pivot bar 15 into the pivot support protrusion 44. The holding cylinder 30 is accommodated in the opening 13 of the lower cylinder 10, and the opening / closing valve shaft support bar 15 and the shaft support protrusion 44 are inserted into the first cam groove 34 and the ball opening / closing valve 40 is rotated. A protrusion 45 is inserted into the second cam groove 35. Between the holding cylinder 30 and the lower cylinder 10, a packing 50 fitted in the packing groove 33 a of the holding cylinder 30 is inserted.

  A packing 50 is fitted in the packing groove 33 a of the holding cylinder 30, and a packing lid 60 is placed on the inner side end surface of the substrate storage container 1 of the holding cylinder 30, and the locking projection 63 a is formed. Locked in the locking recess 37.

  The upper cylinder 90 is screwed into the lower cylinder 10 with the coil spring 70 in a compressed state fitted between the spring groove 33b of the holding cylinder 30 and the inner flange portion 94 of the upper cylinder 90. The holding cylinder 30 is urged toward the outside of the substrate storage container 1, that is, toward the inner flange portion 14 of the lower cylinder 10. Further, a sealing O-ring 80 is interposed between the distal end surface of the cylindrical portion 11 in the lower cylinder 10 and the outer flange portion 92 of the upper cylinder 90.

  Next, a purge method for replacing the gas inside the substrate storage container 1 will be described.

  FIG. 22 is a cross-sectional view showing a state where the substrate storage container is mounted on the purge port. FIG. 23 is a partially enlarged view in which the periphery of the opening / closing valve of the substrate storage container shown in FIG. 22 is enlarged. FIG. 24 is a cross-sectional view showing a state in which the holding cylinder is pushed in with a rod-shaped member. FIG. 25 is a partially enlarged view in which the periphery of the opening / closing valve of the substrate storage container shown in FIG. 24 is enlarged.

  Here, before explaining the purge method of the substrate storage container 1, the normal state of the substrate storage container 1 will be described.

  In the normal state of the substrate storage container 1, since no external force is applied to the opening / closing valve 100, the holding cylinder 30 is fitted to the inner flange of the lower cylinder 10 by the coil spring 70 fitted between the lower cylinder 10 and the upper cylinder 90. It is in a state of being pressed against the portion 14.

  For this reason, the gap between the outer flange portion 33 of the holding cylinder 30 and the inner flange portion 14 of the lower cylinder 10 is sealed by the packing 20 fitted in the packing groove 33 a of the holding cylinder 30. Further, the chamfered surface 41 of the ball on-off valve 40 is in close contact with the seal surface 51a of the packing 50, and the space between the chamfered surface 41 and the seal surface 51a is sealed. Further, the ball opening / closing valve 40 has a through hole 42 directed in a direction perpendicular to the axial direction of the holding cylinder 30 by the guide of the second cam groove 35 into which the rotation protrusion 45 is inserted. The opening 51 of the packing 50 is closed by the side surface 43 of the valve 40. The lower cylinder 10 and the upper cylinder 90 are always sealed with an O-ring 80.

  As a result, the opening that opens and closes the inside and outside of the substrate storage container 1 in the opening / closing valve 100 is closed, so that the opening / closing valve 100 is closed and the substrate storage container 1 is kept sealed. Thus, the state of the on-off valve 100 that allows the passage of gas inside and outside the container is referred to as a second state.

  Next, a method for purging the substrate storage container 1 will be described.

  As shown in FIGS. 22 and 23, in order to purge the substrate storage container 1, first, the substrate storage container 1 is mounted on the cylindrical purge port 110 for purging the substrate storage container 1. That is, the inner flange portion 14 of the lower cylinder 10 is pressed against the purge port 110 so that the opening 13 of the lower cylinder 10 is disposed inside the purge port 110, and the gap between the inner flange portion 14 and the purge port 110 is Seal. Thereby, the opening 13 is blocked from the outside and communicated only to the inside of the purge port 110.

  Next, as shown in FIGS. 24 and 25, a rod-shaped member 111 for operating the holding cylinder 30 is sent out from the inside of the purge port 110 and pushed into the opening 13. The rod-shaped member 111 is formed in a pipe shape. The rod-shaped member 111 has an inner diameter that allows a purge nozzle (described later) to be sufficiently inserted. Further, the outer diameter of the rod-shaped member 111 is smaller than the inner diameter of the opening 13 and larger than the inner diameter of the through hole 31 in the holding cylinder 30. That is, as shown in FIGS. 2 and 7, the outer diameter of the rod-shaped member 111 is smaller than the separation distance of the straight portion 13 b in the opening 13 and larger than the separation distance of the straight portion 31 b in the through hole 31. ing. For this reason, when the rod-shaped member 111 is pushed into the opening 13, the tip of the rod-shaped member 111 hits the bulging portion 32 a of the holding cylinder 30 that protrudes radially inward from the opening 13.

  When the rod-like member 111 is further pushed in, only the holding cylinder 30 against which the rod-like member 111 abuts is pushed into the inside of the substrate storage container 1. Then, the holding cylinder 30 moves to the inside of the substrate storage container 1 along the axial direction with respect to the lower cylinder 10 and the ball on-off valve 40 pivotally supported by the on-off valve shaft support bar 15 of the lower cylinder 10.

  For this reason, the outer flange part 33 of the holding cylinder 30 is separated from the inner flange part 14 of the lower cylinder 10, and the seal between the inner flange part 14 and the outer flange part 33 is released. Further, the chamfered surface 41 of the ball on-off valve 40 is separated from the seal surface 51a of the packing 50, and the seal between the chamfered surface 41 and the seal surface 51a is released. The ball opening / closing valve 40 has the through hole 42 directed in a direction parallel to the axial direction of the holding cylinder 30 by the guide of the second cam groove 35 into which the rotation protrusion 45 is inserted.

  Thereby, since the linear opening which connects the inside and outside of the substrate storage container 1 in the on-off valve 100 is formed, the on-off valve 100 is opened, and the inside and outside of the substrate storage container 1 can communicate. Thus, the state of the on-off valve 100 that prevents the passage of gas inside and outside the container is referred to as a first state.

  Here, with reference to FIG.26 and FIG.27, rotation operation | movement of the ball | bowl on-off valve 40 is demonstrated. FIG. 26 is a cross-sectional view showing the relationship among the lower cylinder, the holding cylinder, and the rod-shaped member. FIG. 27 is a cross-sectional view showing the relationship between the holding cylinder and the on-off valve.

  FIG. 26A and FIG. 27A show a normal state of the substrate storage container 1 and a closed state of the on-off valve 100. As shown in FIGS. 26 (a) and 27 (a), the first cam groove 34 formed in the holding cylinder 30 is used for supporting the on-off valve shaft support bar 15 of the lower cylinder 10 and the ball on-off valve 40. A protrusion 44 is inserted, and a rotation protrusion 45 of the ball on-off valve 40 is inserted into the second cam groove 35 formed in the holding cylinder 30. In the normal state, since the holding cylinder 30 is pressed against the inner flange portion 14 of the lower cylinder 10, the ball on / off valve 40 that is rotatably supported by the protruding portion 15 a of the on-off valve shaft support bar 15 is By guiding the rotation protrusion 45 in the second cam groove 35, the through hole 42 of the ball on-off valve 40 is directed in a direction perpendicular to the axial direction of the holding cylinder 30.

  FIGS. 26B and 27B show a state in which the holding cylinder 30 is pushed halfway into the lower cylinder 10 by the rod-shaped member 111 provided in the purge port 110. FIG. As shown in FIGS. 26 (b) and 27 (b), when the holding cylinder 30 is pushed into the inner side of the substrate storage container 1 with respect to the lower cylinder 10 by the rod-shaped member 111, the on-off valve shaft support bar 15 is moved. Guided by the first cam groove 34, the holding cylinder 30 moves toward the inside of the substrate storage container 1 with respect to the lower cylinder 10. At this time, the ball on / off valve 40 moves to the outside of the substrate storage container 1 with respect to the holding cylinder 30 because the rotation protrusion 45 is rotatably supported by the protruding portion 15 a of the on-off valve shaft support bar 15. To do. For this reason, the ball on / off valve 40 that is rotatably supported by the protruding portion 15a of the on / off valve shaft support bar 15 has the rotation projection 45 guided by the second cam groove 35. The through-hole 42 rotates in a direction inclined obliquely from a direction perpendicular to the axial direction of the holding cylinder 30. At this stage, the seal of the substrate storage container 1 is released and the inside and outside of the substrate storage container 1 can communicate with each other. However, the through hole 42 of the ball opening / closing valve 40 is still in the axial direction of the holding cylinder 30. Since the parallel direction is not reached, the opening of the on-off valve 100 is not linear.

  FIG. 26C and FIG. 27C show a state in which the holding cylinder 30 is completely pushed into the lower cylinder 10 by the rod-shaped member 111 provided in the purge port 110. As shown in FIGS. 26 (c) and 27 (c), when the holding cylinder 30 is completely pushed into the inner side of the substrate storage container 1 with respect to the lower cylinder 10 by the rod-shaped member 111, the on-off valve shaft support bar The ball opening / closing valve 40 that is rotatably supported by the 15 projecting portions 15 a is guided by the rotation projection 45 in the second cam groove 35, so that the through hole 42 of the ball opening / closing valve 40 is formed in the holding cylinder 30. Rotate in a direction parallel to the axial direction. As a result, a linear opening is formed in the opening / closing valve 100.

  Then, when all the open / close valves 100 attached to the substrate storage container 1 are opened, the substrate is opened from the inside of the rod-shaped member 111 through the open / close valves 100 arranged on either the front side or the rear side of the stored substrate. A purge gas is supplied to the inside of the storage container 1, and the gas is exhausted from the inside of the substrate storage container 1 through an opening / closing valve 100 disposed at either the front or rear of the substrate to be stored. Thereby, the gas inside the substrate storage container 1 can be replaced.

  After the gas replacement, the opening and closing valve 100 returns to the closed state by pulling out the rod-shaped member 111 from the opening 13 of the lower cylinder 10, so that the substrate storage container 1 can be sealed.

  FIG. 28 is a cross-sectional view showing a purge method using a tower-like purge nozzle in which nozzle holes are formed at a plurality of locations. As shown in FIG. 28, the tower-like purge nozzle 112 is formed with a plurality of nozzle holes 113 for ejecting gas. As described above, when the opening / closing valve 100 is opened, a linear opening is formed in the opening / closing valve 100. Through this opening, the tower-like purge nozzle 112 is inserted into the substrate storage container 1 from the inside of the rod-like member 111. Insert into. Then, gas is ejected from the nozzle holes 113 of the tower-like purge nozzle 112 between the adjacent substrates stored in the substrate storage container 1. Note that the tower-shaped purge nozzle 112 has a gas between all adjacent substrates when the maximum number of substrates is stored so that gas can be ejected at once to the upper and lower surfaces of all the stored substrates. It is preferable to form nozzle holes that can eject the water. Then, after the gas replacement is completed, the purge nozzle 112 is pulled out from the through hole 42.

  FIG. 29 is a cross-sectional view showing a purge method using a purge nozzle having nozzle holes formed in one place. As shown in FIG. 29, the purge nozzle 114 is formed with only one nozzle hole 115 for ejecting gas. Then, the purge nozzle 114 is inserted into the substrate storage container 1 from the inside of the rod-shaped member 111 through the opening of the open / close valve 100 and is stored in the substrate storage container 1 from the nozzle hole 115 formed in the purge nozzle 114. A gas is ejected between adjacent substrates. At this time, the insertion amount of the purge nozzle 114 into the substrate storage container 1 is adjusted so that gas is ejected to the upper surface and the lower surface of all the substrates stored in the substrate storage container 1 and stored in the substrate storage container 1. Gas is sequentially ejected between adjacent substrates. Then, after the gas replacement is completed, the purge nozzle 112 is pulled out from the through hole 42.

  Thus, according to this embodiment, the ball on / off valve 40 is rotated to switch between the first state that prevents the passage of gas inside and outside the container and the second state that allows the passage of gas inside and outside the container. Therefore, the ball opening / closing valve 40 having the same configuration can be used on both the gas intake side and the exhaust side.

  In addition, since the ball opening / closing valve 40 can be rotated simply by moving the holding cylinder 30 relative to the lower cylinder 10 along the axial direction, switching between the first state and the second state is easily performed. be able to.

  Further, the holding cylinder 30 can be protruded from the opening 13 of the lower cylinder 10 by making the separation distance of the linear part 31 b in the holding cylinder 30 shorter than the separation distance of the linear part 13 b in the lower cylinder 10. In this way, by projecting the holding cylinder 30 from the opening 13 of the lower cylinder 10, the holding cylinder 30 is moved from the outside of the substrate storage container 1 to the inside of the substrate storage container 1 along the axial direction with respect to the lower cylinder 10. Can be moved to the side. Thereby, the gas inside the substrate storage container 1 can be easily replaced.

  Further, the shaft projection 44 of the ball on-off valve 40 is pivotally supported by the protrusion 15 a of the on-off valve shaft support bar 15 in the lower cylinder 10, but the rotation projection 45 of the ball on-off valve 40 is supported by the holding cylinder 30. Therefore, by moving the holding cylinder 30 along the axial direction with respect to the lower cylinder 10, the ball opening / closing valve 40 can be rotated about the protruding portion 15 a as a rotation axis.

  Further, since the through hole 42 of the ball on / off valve 40 passes through the ball on / off valve 40 in a straight line, the purge nozzle is stored in the substrate through the through hole 42 by rotating the ball on / off valve 40 to the second state. It can be inserted inside the container 1. For this reason, by replacing the gas inside the substrate storage container 1 with the purge nozzle inserted into the substrate storage container 1 through the through hole 42, gas stagnation inside the substrate storage container 1 is prevented, The substitution efficiency can be improved, and the gas substitution time can be shortened. In addition, in this case, by removing the purge nozzle from the through hole 42 after completion of the gas replacement, it is possible to suppress the remaining cleaning water of the substrate storage container 1, so that the drying time of the substrate storage container 1 can be shortened, The replacement effect can be sufficiently exhibited.

  Further, since the rod-shaped member 111 is formed in a pipe shape, the purge nozzle is moved from the inside of the rod-shaped member 111 that moves the holding tube 30 to the inner side of the substrate storage container 1 along the axial direction with respect to the lower tube 10. Can be inserted into the substrate storage container 1 through the through hole 42 of the ball opening / closing valve 40. Then, by replacing the gas in the substrate storage container 1 with the purge nozzle inserted into the substrate storage container 1 in this way, gas stagnation inside the substrate storage container 1 is prevented, and the gas replacement efficiency is improved. The gas replacement time can be shortened. In addition, in this case, by removing the purge nozzle from the through-hole after completion of the gas replacement, it is possible to suppress the remaining cleaning water of the substrate storage container 1, thereby shortening the drying time of the substrate storage container 1 and replacing the gas. The effect can be exhibited sufficiently.

  In addition, when the purge nozzle 112 shown in FIG. 28 is used, a gas is blown out between adjacent substrates from the nozzle hole 113 of the purge nozzle 112 inserted into the substrate storage container 1, so that the substrate is easily stagnated. This gas can also be replaced. Thereby, gas stagnation can be prevented and gas can be replaced efficiently.

  In addition, when the purge nozzle 114 shown in FIG. 29 is used, by adjusting the amount of insertion of the purge nozzle 114 into the substrate storage container 1, the gas is ejected to a position where air accumulation is likely to occur, such as between the substrates. Therefore, gas stagnation can be prevented at an arbitrary position. Moreover, since the gas can be ejected only at a desired position, the purge efficiency can be improved.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment. For example, in the above-described embodiment, the same opening / closing valve is used on the supply side and the exhaust side, but different opening / closing valves may be used on the supply side and the exhaust side.

  Moreover, although the said embodiment demonstrated as what rotates the ball on-off valve 40 with the cam mechanism using the 1st cam groove 34 and the 2nd cam groove 35, as long as the ball on-off valve 40 can be rotated, what kind of shape will be sufficient as it. Also, a cam mechanism having a structure may be used.

  In the above embodiment, the coil spring 70 is used as means for urging the holding cylinder 30. However, any elastic member or urging means may be used as long as the holding cylinder can be urged.

  Further, in the above-described embodiment, it has been described that a linear opening is formed in the opening / closing valve 100 in the second state. However, when a purge nozzle is not used, the opening formed in the opening / closing valve 100 is not necessarily linear. Not necessarily.

  In the purge method shown in FIGS. 28 and 29, the purge nozzle is inserted only into the supply-side opening / closing valve. However, a purge nozzle having a nozzle hole for sucking gas is also inserted into the exhaust-side opening / closing valve. May be.

DESCRIPTION OF SYMBOLS 1 ... Substrate storage container, 2 ... Container body, 2a ... Support member, 2b ... Position control wall, 3 ... Cover body, 4 ... Bottom plate, 4a ... Positioning member, 5 ... Robotic flange, 7 ... Locking mechanism, 7a ... Rotating member, 7b ... connecting bar, 7c ... operating hole, 10 ... lower cylinder, 11 ... cylindrical portion, 12 ... outer flange portion, 13 ... opening portion, 13a ... arc portion, 13b ... straight portion, 14 ... inner flange portion ( Flange), 14a ... swelling portion, 15 ... open / close valve shaft support bar (open / close valve shaft support portion), 15a ... projecting portion (open / close valve shaft support portion), 16 ... female threaded portion, 20 ... packing, 30 ... holding Cylinder, 31 ... through hole, 31a ... arc portion, 31b ... straight portion, 32 ... cylindrical portion, 32a ... bulge portion, 33 ... outer flange portion, 33a ... packing groove, 33b ... spring groove, 34 ... first Cam groove (cam mechanism), 35 ... second cam groove (cam mechanism) , 36 ... packing groove, 37 ... locking recess, 40 ... ball on-off valve (on / off valve), 41 ... chamfered surface, 42 ... through hole, 43 ... side face, 44 ... shaft projection (cam mechanism), 45 ... Rotation protrusion (cam mechanism), 50 ... packing, 51 ... opening (sealing opening), 51a ... sealing surface, 60 ... packing lid, 61 ... opening, 62 ... first claw, 63 ... first 2-claw part, 63a ... locking projection, 70 ... coil spring, 80 ... O-ring, 90 ... upper cylinder, 90 ... upper cylinder, 91 ... cylindrical part, 92 ... outer flange part, 93 ... opening, 94 ... inside Flange portion, 95 ... male screw portion, 100 ... open / close valve, 110 ... purge port, 111 ... rod-shaped member, 112 ... tower-like purge nozzle, 113 ... nozzle hole, 114 ... purge nozzle, 115 ... nozzle hole.

Claims (10)

A substrate having a container body having an opening and storing a substrate, a lid provided with a locking mechanism and fitted into the opening, and a purge opening / closing valve provided in the container body or the lid A storage container,
The on-off valve has an on-off valve that is rotatably supported by a cam mechanism,
The on-off valve is a substrate storage container having a first state that prevents passage of gas inside and outside the container and a second state that allows passage of gas inside and outside the container, depending on the rotational position. The on-off valve is
A cylindrical holding cylinder for housing the on-off valve;
A cylindrical lower cylinder that houses the holding cylinder and pivotally supports the on-off valve;
With
The substrate storage container according to claim 1, wherein the cam mechanism rotates the on-off valve by moving the holding cylinder along an axial direction with respect to the lower cylinder. The lower cylinder is provided with a flange portion on the outer side of the substrate storage container, extending inward in the radial direction and having an opening formed at the center thereof,
The substrate storage container according to claim 2, wherein an inner diameter of the holding cylinder is smaller than an inner diameter of the opening of the flange portion. The lower cylinder includes an on-off valve shaft support portion that rotatably supports the on-off valve,
The on-off valve includes a shaft projection that is pivotally supported by the on-off valve shaft support, and a rotation projection that rotates the on-off valve,
A linear first cam groove for guiding the opening / closing valve shaft support portion in the axial direction is formed on the inner wall portion of the holding cylinder, and the rotation is performed in a direction to rotate the opening / closing valve as the holding cylinder moves with respect to the lower cylinder. The substrate storage container according to claim 2, wherein a curved second cam groove for guiding the projection is formed. The opening / closing valve is formed with a seal opening penetrating inside and outside the container,
The on-off valve is a cylindrical body in which a through hole penetrating linearly is formed,
In the first state, the through hole is directed in a direction perpendicular to the axial direction of the holding cylinder, and the sealing opening is closed by a peripheral wall of the on-off valve,
The said 2nd state WHEREIN: The said through-hole is orient | assigned to the direction parallel to the axial direction of the said holding | maintenance cylinder, The said opening part for sealing and the said through-hole are connected, The any one of Claims 2-4 The substrate storage container according to one item. A gas replacement method using the substrate storage container according to claim 1,
The substrate storage container is mounted on the purge port,
Rotating the on-off valve to switch from the first state to the second state;
A gas replacement method, wherein the gas supplied from the purge port is supplied into the substrate storage container through the open / close valve in the second state, and the gas in the substrate storage container is exhausted. The substrate storage container is the substrate storage container according to any one of claims 3 to 5,
The gas replacement method according to claim 6, wherein the holding cylinder protruding from the opening of the lower cylinder is pushed into the inside of the substrate storage container by the bar-shaped member of the purge port, and the on-off valve is rotated. The rod-shaped member is formed in a pipe shape,
After rotating the on-off valve to the second state with the rod-shaped member, a purge nozzle for ejecting gas from the inside of the rod-shaped member to the inside of the substrate storage container through the through hole of the on-off valve is inserted, The gas replacement method according to claim 7, wherein gas is ejected from the purge nozzle. The purge nozzle has a nozzle hole for ejecting gas,
The gas replacement method according to claim 8, wherein gas is ejected from the nozzle hole between adjacent substrates stored in the substrate storage container. The gas replacement method according to claim 8, wherein a gas is ejected from the purge nozzle by arbitrarily adjusting an amount of insertion of the purge nozzle into the substrate storage container.

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