WO2016098516A1

WO2016098516A1 - Substrate housing container

Info

Publication number: WO2016098516A1
Application number: PCT/JP2015/082380
Authority: WO
Inventors: 稔冨田; 侑矢成田
Original assignee: ミライアル株式会社
Priority date: 2014-12-18
Filing date: 2015-11-18
Publication date: 2016-06-23
Also published as: TW201633430A; JP2016119327A

Abstract

The present invention provides a substrate housing container that prevents cleaning water from remaining in a communication part. The communicating part 93 includes: an opening facing wall section 931; a gas lead-out section 941 for guiding, toward a gas jetting nozzle part 91, gas G1 which comes from a ventilation passage 801 of a filter part 80 and collides with the opening facing wall section 931; a communicating part flow passage 945 formed by the opening facing wall section 931 and the gas lead-out section 941 and transferring the gas from the ventilation passage 801 of the filter part 80 toward the gas jetting nozzle part 91; and a leak suppressing wall section 935 which extends from the opening facing wall section 931 toward the filter part 80 and suppresses the gas G1, which comes from the ventilation passage 801 of the filter part 80 and collides with the opening facing wall section 931, from leaking from the communicating part flow passage 945. The extending end of the leak suppressing wall section 935 and the filter part 80 are positioned to be spaced apart from each other, and a gap 806 is formed between the leak suppressing wall section 935 and the filter part 80.

Description

Substrate storage container

The present invention relates to a substrate storage container used when storing, storing, transporting, transporting, and the like, a substrate made of a semiconductor wafer or the like.

2. Description of the Related Art Conventionally, as a substrate storage container for storing and transporting a substrate made of a semiconductor wafer, a structure including a container main body and a lid is known.

The container body has a cylindrical wall part in which an opening part of the container body is formed at one end and the other end is closed. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates. The lid can be attached to and detached from the container body opening, and the container body opening can be closed.

A front retainer is provided in a portion of the lid that faces the substrate storage space when the container main body opening is closed. The front retainer can support the edges of the plurality of substrates when the container main body opening is closed by the lid. Further, the back substrate support portion is provided on the wall portion so as to be paired with the front retainer. The back side substrate support part can support the edges of a plurality of substrates. When the container body opening is closed by the lid, the back side substrate support unit supports a plurality of substrates in cooperation with the front retainer, thereby separating adjacent substrates at a predetermined interval. A plurality of substrates are held in parallel.

Also, the container body is provided with a hydrophobic filter. Gas purge is performed with dry air (hereinafter referred to as purge gas) from which inert gas such as nitrogen or moisture has been removed (1% or less) through the filter to the substrate storage space from the outside of the container body. A cylindrical gas ejection nozzle portion is provided on the substrate storage space side of the filter. The gas ejection nozzle portion extends from the bottom wall of the container main body provided with the filter toward the upper wall facing the bottom wall, and a plurality of ejection ports are formed. The filter and the gas ejection nozzle part are connected by a communication part that allows gas to flow from the filter to the gas ejection nozzle part (see Patent Documents 1 and 2).

Japanese Patent No. 5241607 Special table 2011-514014 gazette

As described above, the communicating portion communicates with the gas from the filter to the gas ejection nozzle portion so as to be able to circulate. For this reason, in order to prevent the gas supplied to the gas ejection nozzle part from leaking, it is ideal that the communication part has a structure in which no opening is formed other than opening the filter and the gas ejection nozzle part.

However, in the substrate storage container, the cleaning water (pure water) is supplied to the cleaning machine before or after using the substrate storage container with the filter, the communication portion, and the gas ejection nozzle portion fixed to the container body. Used, washed and dried. As described above, when the communication portion has a structure in which the opening is not formed other than the opening to the filter and the gas ejection nozzle portion, the filter is hydrophobic. There is a possibility that a large amount of washing water remains in the communication part.

An object of the present invention is to provide a substrate storage container that suppresses cleaning water from remaining in a communication portion.

The present invention includes a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed, and a plurality of substrates can be accommodated by the inner surface of the wall, and the container body opening is formed in the container body opening. A container body in which a communicating substrate storage space is formed; a lid that is detachable with respect to the container body opening; and that can close the container body opening; and the outside of the substrate storage space and the container body. An air passage that can communicate with a space; a filter that is disposed in the air passage; and a filter housing that forms the air passage. The air passage is disposed on the wall and is disposed outside the container body through the filter. A filter part through which gas can pass between the space and the substrate storage space, a gas ejection nozzle part for supplying the gas flowing into the ventilation path of the filter part to the substrate storage space, and the filter part The gas jet A communication portion that allows gas to flow to the sluice portion, and the air passage has a substrate storage space side opening located in the substrate storage space and an external space side opening located in a space outside the container body And the communication portion has an opening facing wall portion disposed to face the substrate storage space side opening, and gas from the ventilation passage of the filter portion that has collided with the opening facing wall portion. A communication part flow formed by the gas outlet part leading to the gas jet nozzle part, the opening facing wall part and the gas lead part, and for circulating the gas from the vent passage of the filter part to the gas jet nozzle part A flow path and an outflow suppression wall portion extending from the opening-facing wall portion toward the filter portion, wherein gas from the ventilation passage of the filter portion that collides with the opening-facing wall portion is communicated with the communication portion. Suppresses leakage from the flow path An outflow suppression wall portion, the extended end portion of the outflow suppression wall portion and the filter portion are spaced apart from each other, and the extended end portion of the outflow suppression wall portion and the filter portion It is related with the board | substrate storage container in which the clearance gap is formed between.

Moreover, it is preferable that the extended end portion of the outflow suppression wall portion has a drain notch that is recessed toward the opening-facing wall portion.

Further, it is preferable that the drain notch is located at a portion of the outflow suppression wall portion closest to one end portion of the container main body in a direction connecting the one end portion and the other end portion of the container main body.

Further, the gas lead-out part of the communication part has an opening side part facing part facing the side part of the filter part housing forming the substrate housing space side opening, and the opening side part facing part and the filter part It is preferable that the side portion of the housing has a positional relationship of being spaced apart, and a gap is formed between the opening side portion facing portion and the side portion of the filter portion housing.

Further, it is preferable that the gap between the opening side portion facing portion and the side portion of the filter portion housing is opened in a direction from the other end portion of the container main body to one end portion.

Further, it is preferable that the opening facing wall portion is inclined so as to be separated from the filter portion as it approaches the gas ejection nozzle portion.

According to the present invention, it is possible to provide a substrate storage container that suppresses cleaning water from remaining in the communication portion.

It is a disassembled perspective view which shows a mode that the board | substrate W was accommodated in the substrate storage container 1 which concerns on embodiment of this invention. It is a downward perspective view which shows the container main body 2 which concerns on embodiment of this invention. It is a perspective view which shows the container main body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is sectional drawing which shows the container main body 2 of the substrate storage container 1 which concerns on embodiment of this invention. It is an upper perspective view which shows the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 which concern on embodiment of this invention. It is sectional drawing which shows the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 which concern on embodiment of this invention. It is a downward perspective view which shows the gas ejection nozzle part 91 and the communication part 93 of the substrate storage container 1 which concern on embodiment of this invention. It is an expansion perspective view which shows the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 which concern on embodiment of this invention. It is an expanded sectional view showing filter part 80, gas ejection nozzle part 91, and communication part 93 of substrate storage container 1 concerning an embodiment of the present invention.

Hereinafter, a substrate storage container 1 according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is an exploded perspective view showing a state in which a substrate W is stored in a substrate storage container 1 according to an embodiment of the present invention. FIG. 2 is a lower perspective view showing the container body 2 according to the embodiment of the present invention. FIG. 3 is a perspective view showing the container body 2 of the substrate storage container 1 according to the embodiment of the present invention. FIG. 4 is a cross-sectional view showing the container body 2 of the substrate storage container 1 according to the embodiment of the present invention. FIG. 5 is an upper perspective view showing the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 according to the embodiment of the present invention.

FIG. 6 is a cross-sectional view showing the filter portion 80, the gas ejection nozzle portion 91, and the communication portion 93 of the substrate storage container 1 according to the embodiment of the present invention. FIG. 7 is a lower perspective view showing the gas ejection nozzle portion 91 and the communication portion 93 of the substrate storage container 1 according to the embodiment of the present invention. FIG. 8 is an enlarged perspective view showing the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 according to the embodiment of the present invention. FIG. 9 is an enlarged cross-sectional view showing the filter part 80, the gas ejection nozzle part 91, and the communication part 93 of the substrate storage container 1 according to the embodiment of the present invention.

Here, for convenience of explanation, a direction from the container body 2 described later to the lid 3 (direction from the upper right to the lower left in FIG. 1) is defined as the front direction D11, and the opposite direction is defined as the rear direction D12. These are collectively defined as the front-rear direction D1. Further, a direction (upward direction in FIG. 1) from the lower wall 24 to the upper wall 23 to be described later is defined as an upward direction D21, and the opposite direction is defined as a downward direction D22. Define. Further, a direction from the second side wall 26 to be described later to the first side wall 25 (a direction from the lower right to the upper left in FIG. 1) is defined as the left direction D31, and the opposite direction is defined as the right direction D32. Is also defined as a left-right direction D3.

Further, the substrate W (see FIG. 1) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry. The substrate W in this embodiment is a silicon wafer having a diameter of 300 mm to 450 mm.

As shown in FIG. 1, the substrate storage container 1 is used as an in-process container for storing a substrate W made of a silicon wafer as described above and transporting it in a process in a factory, or by land transportation means, air transportation means, sea transportation. Used as a shipping container for transporting a substrate by transport means such as a container, a container main body 2, a lid 3, a substrate support plate-like portion 5 as a side substrate support portion, and a back side It has the board | substrate support part 6 and the front retainer (not shown) as a cover body side board | substrate support part.

The container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is formed so as to be surrounded by the wall portion 20. The substrate support plate-shaped portion 5 is disposed in a portion of the wall portion 20 that forms the substrate storage space 27. As shown in FIG. 1, a plurality of substrates W can be stored in the substrate storage space 27.

The substrate support plate-like portion 5 is provided on the wall portion 20 so as to form a pair in the substrate storage space 27. When the container body opening 21 is not closed by the lid 3, the substrate support plate-like portion 5 abuts the edges of the plurality of substrates W to separate the adjacent substrates W at a predetermined interval. The edges of the plurality of substrates W can be supported in a state where they are aligned in parallel. A back side substrate support portion 6 (see FIG. 3 and the like) is provided on the back side of the substrate support plate-like portion 5.

The back substrate support 6 is provided on the wall 20 so as to be paired with a front retainer (not shown) in the substrate storage space 27. The back side substrate support portion 6 can support the rear portions of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. It is.

The lid 3 can be attached to and detached from the opening peripheral edge 28 (FIG. 1 and the like) forming the container body opening 21 and can close the container body opening 21. The front retainer (not shown) is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3. The front retainer (not shown) is disposed inside the substrate storage space 27 so as to be paired with the back substrate support portion 6.

The front retainer (not shown) supports the front part of the edges of the plurality of substrates W by contacting the edges of the plurality of substrates W when the container body opening 21 is closed by the lid 3. Is possible. The front retainer (not shown) supports adjacent substrates by supporting the plurality of substrates W in cooperation with the back substrate support 6 when the container body opening 21 is closed by the lid 3. A plurality of substrates W are held in a state where the Ws are separated from each other at a predetermined interval and are arranged in parallel. Hereinafter, each part will be described in detail.

The substrate storage container 1 is made of a resin such as a plastic material. Unless otherwise specified, examples of the resin of the material include polycarbonate, cycloolefin polymer, polyetherimide, polyetherketone, and polybutylene. Thermoplastic resins such as terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof are used. When imparting conductivity to the resins of these molding materials, conductive substances such as carbon fibers, carbon powder, carbon nanotubes, and conductive polymers are selectively added to the resins of these molding materials. Moreover, in order to raise rigidity, glass fiber, carbon fiber, etc. may be added to resin of these molding materials.

As shown in FIG. 1 and the like, the wall portion 20 of the container body 2 includes a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of the above-described material, and in the present embodiment, are integrally formed of polycarbonate.

The first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 have a positional relationship facing the back wall 22 and have a substantially rectangular shape. Opening peripheral edge portion 28 is formed.

The opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed. The container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

As shown in FIG. 1, latch engaging recesses 231 A and 231 B that are recessed toward the outside of the substrate storage space 27 in the portions of the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge portion 28. , 241A, 241B are formed. A total of four

latch engaging recesses

231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.

As shown in FIG. 1, ribs 235 A and 235 B are integrally formed with the upper wall 23 on the outer surface of the upper wall 23. The

ribs

235A and 235B increase the rigidity of the container body 2. A top flange 236 is fixed to the central portion of the upper wall 23. The top flange 236 is a member that is a portion that is hung and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer conveyance system), a PGV (wafer substrate conveyance cart), or the like.

As shown in FIG. 2, two types of through

holes

245 and 246 are formed at the four corners of the lower wall 24. In the through

holes

245 and 246, the filter unit 80 configured as shown in FIG. 9 is arranged.

As shown in FIG. 9, the filter portion 80 includes an inner opening forming portion 81 as a filter portion housing, a first housing portion 82, a nozzle portion 83, a second housing portion 84, and a filter 85. . The inner opening forming portion 81, the first housing portion 82, the nozzle portion 83, and the second housing portion 84 are configured as separate bodies each composed of separate and independent parts. Therefore, the inner side filter part housing part comprised by the inner side opening formation part 81, the 1st housing part 82, and the 2nd housing part 84 is comprised separately from the nozzle part 83. FIG. In addition, the filter housing that includes the inner opening forming portion 81, the first housing portion 82, the nozzle portion 83, and the second housing portion 84 can ventilate the substrate storage space 27 and the space outside the container body 2. A path 801 is formed. The height of the filter unit 80 in the vertical direction D2 is 29.3 mm. The width of the filter unit 80 (the diameter of the filter unit 80) in the left-right direction D3 is 38 mm.

In the filter unit 80 configured as shown in FIG. 9 and the like, inert gas such as nitrogen or moisture as gas is removed from the space outside the container body 2 to the substrate storage space 27 through the filter 85 (1% or less). Dry air (hereinafter referred to as “purge gas”) or the like can pass therethrough, and gas can pass through the filter 85 from the substrate storage space 27 to a space outside the container body 2.

The inner opening forming portion 81 has a disk shape. A large number of through holes 803 are formed in the inner opening forming portion 81 radially from the center of the inner opening forming portion 81. A large number of through holes 803 form a ventilation path 801. The openings at the upper ends of the numerous through holes 803 are located in the substrate storage space 27 and form a substrate storage space side opening 804 that opens toward an opening facing wall portion 931 of the communication portion 93 described later. Therefore, the ventilation path 801 has a substrate storage space side opening 804.

As shown in FIG. 9, the first housing part 82 has a cylindrical part 821, an end flange part 822, and an upper end wall part 823. The cylindrical part 821 has a cylindrical shape. A male screw portion is threaded on the side surface (outer peripheral surface) of the cylindrical portion 821. A small flange portion 824 is integrally formed with the cylindrical portion 821 at a portion on the side surface of the cylindrical portion 821 and above the male screw portion. The end flange portion 822 is integrally formed with the tubular portion 821 at the upper end portion of the tubular portion 821 above the portion of the tubular portion 821 where the small flange portion 824 exists.

An O-ring 201 is disposed between the small flange portion 824 and the end flange portion 822. The O-ring 201 is disposed so as to be sandwiched between the first housing portion 82 and the portion of the lower wall 24 that forms the through hole 245. As a result, the space between the first housing portion 82 and the portion of the lower wall 24 forming the through hole 245 is sealed.

The end flange portion 822 has a protrusion 825 extending in the upward direction D21. The protrusion 825 and the recess 815 formed in the annular peripheral edge 811 of the inner opening forming portion 81 are welded by ultrasonic waves, whereby the end flange portion 822 is fixed to the annular peripheral edge 811. As a result, the first housing portion 82 is connected to the inner opening forming portion 81 in a positional relationship coaxial with the inner opening forming portion 81.

The upper end wall portion 823 is integrally formed with the cylindrical portion 821 so as to close the upper end portion of the cylindrical portion 821, and has a plate shape. A through hole 826 is formed in the upper end wall portion 823, and the purge gas G 1 can flow through the through hole 826.

As shown in FIG. 9, the nozzle portion 83 has a cylindrical portion 831 and an external protruding portion 832. The cylindrical portion 831 has a cylindrical shape. The outer diameter of the upper part of the cylindrical part 831 is slightly smaller than the inner diameter of the cylindrical part 821 of the first housing part 82. Thereby, the cylindrical portion 831 of the nozzle portion 83 is positioned coaxially with the cylindrical portion 821 of the first housing portion 82 in the space formed by the inner peripheral surface of the cylindrical portion 821 of the first housing portion 82. Arranged in a relationship.

The lower part of the outer peripheral surface of the cylindrical part 831 has an outer diameter small diameter part 833 with a small outer diameter. A lower end portion of the outer diameter small diameter portion 833 constitutes an external protruding portion 832. The external protrusion 832 has a reduced diameter annular plate 835 that protrudes inward in the radial direction of the external protrusion 832. A through hole is formed in the center of the reduced diameter annular plate portion 835, and the through hole constitutes an external space side opening 802. The external space side opening 802 is exposed to a space outside the container body 2 and is connected to a space outside the container body 2. The external space side opening 802 constitutes a ventilation path 801. Therefore, the ventilation path 801 has an external space side opening 802.

As shown in FIG. 9, the second housing part 84 has a cylindrical part 841 and an end inward projecting part 842. The cylindrical portion 841 has a cylindrical shape. The inner diameter of the cylindrical portion 841 is larger than the outer diameter of the cylindrical portion 821 of the first housing portion 82. The first housing part 82 is arranged in a coaxial relationship with the cylindrical part 841 of the second housing part 84 in a space formed by the inner peripheral surface of the cylindrical part 841 of the second housing part 84. .

A female screw portion is threaded on the inner peripheral surface of the cylindrical portion 841. The male screw portion of the cylindrical portion 821 of the first housing portion 82 is screwed into the female screw portion. As a result, the second housing part 84 is fixed to the first housing part 82. The end inward projecting portion 842 is integrally formed with the lower end portion of the tubular portion 841. The end inward projecting portion 842 projects from the lower end portion of the tubular portion 841 inward in the radial direction of the tubular portion 841, and has an annular plate shape along the inner peripheral surface of the tubular portion 841. Yes.

A portion of the nozzle portion 83 and a portion around the outer space side opening 802, that is, the outer protruding portion 832 and the reduced-diameter annular plate portion 835 are end inward protruding portions 842 constituting the lower end portion of the filter outer housing portion. The air passage 801 protrudes in a downward direction D22 which is a direction in which the air passage 801 opens at the external space side opening 802 from the lower end portion of the air. That is, the external projecting portion 832 and the reduced diameter annular plate portion 835 of the nozzle portion 83 project downward in the filter unit 80. In other words, the outer protruding portion 832 and the reduced diameter annular plate portion 835 are members other than the nozzle portion 83 constituting the filter portion housing, and are the inner opening forming portion 81, the first housing portion 82, and the second housing portion. It projects downward from any part of 84.

For the nozzle part 83, polycarbonate with a small outgas generation amount was used. In addition to polycarbonate, resins such as cycloolefin polymer, polyetherimide, and polyetheretherketone can be used. In addition, an elastic member can be used for the nozzle portion 83. As the elastic member, for example, a resin such as polybutylene terephthalate or polyethylene, an elastomer such as polyethylene elastomer or polyolefin elastomer, or a rubber material such as silicon rubber or fluorine rubber can be used. The outer projecting portion 832 of the nozzle portion 83 and the lower end surface of the reduced-diameter annular plate portion 835 are roughened by being textured.

As shown in FIG. 9, an O-ring 847 is disposed between the second housing portion 84 and the nozzle portion 83. The O-ring 847 includes an upper surface of the end inward projecting portion 842 of the second housing portion 84, and a step portion formed at a connection position between the upper portion of the tubular portion 831 of the nozzle portion 83 and the outer diameter small diameter portion 833. It is arranged so as to be sandwiched between them. Thus, the portion of the cylindrical portion 831 immediately above the outer diameter small diameter portion 833 is sealed and supported with the second housing portion 84 via the O-ring 847.

In the filter part 80, an air passage 801 is formed by the inner opening forming part 81, the first housing part 82, the nozzle part 83, and the second housing part 84 constituting the filter part housing. More specifically, the air passage 801 continues from the substrate storage space side opening 804 of the through hole 803 of the inner opening forming portion 81 to the outer space side opening 802 of the nozzle portion 83.

The filter 85 is made of a hydrophobic material and has a disk shape. The peripheral portion of the filter 85 is fixed to the upper end surface of the cylindrical portion 821 of the first housing portion 82 by heat welding. Thus, the filter 85 is disposed in the ventilation path 801. The filter 85 prevents particles and the like from passing through the through hole 803 of the inner opening forming portion 81. The filter 85 is made of a hydrophobic material, and a small amount of cleaning water (pure water) is inhibited from flowing by the filter 85.

Also, the substrate storage container 1 includes two gas ejection nozzle portions 91 and two communication portions 93. The two gas ejection nozzle portions 91 have the same shape, and the two communication portions 93 have the same shape. For this reason, only one gas ejection nozzle part 91 and the communication part 93 are demonstrated, and description about the other gas ejection nozzle part 91 and the communication part 93 is abbreviate | omitted.

The gas ejection nozzle unit 91 supplies a purge gas or the like as a gas flowing into the air passage 801 of the filter unit 80 to the substrate storage space 27. Specifically, as shown in FIGS. 5 to 7, the gas ejection nozzle portion 91 has a substantially cylindrical nozzle body 911 that is closed at the upper end and opened at the lower end. The inner diameter of the nozzle body 911 is about 14 mm.

The nozzle body 911 is formed with a through-hole 912 that communicates the inside and the outside of the gas ejection nozzle 91. The number of through-holes 912 is the same as the number of substrates W that can be stored in the substrate storage container 1 in the vertical direction D2 from the position near the upper end of the gas ejection nozzle 91 to the position near the lower end. Is formed. In the circumferential direction of the gas ejection nozzle portion 91, two through-holes 912 have an arc shape corresponding to approximately a quarter of a circle, and two through-holes 912 are formed over a range of approximately a half circumference. ing. Accordingly, two sets of 25 through-holes 912 formed along the vertical direction D1 are formed in one gas ejection nozzle portion 91 along the circumferential direction of the gas ejection nozzle portion 91. Fifty through holes 912 are formed. Of the 25 through holes 912 formed along the vertical direction D2, all but the uppermost through hole 912 are 25 substrates W stored in the substrate storage space 27 in the vertical direction D2. Located between. The uppermost through hole 912 is located between the substrate W accommodated in the uppermost position and the upper wall 23 in the vertical direction D2. A through hole 912 is not formed between the substrate W stored at the bottom and the lower wall 24, but in this period, a purge gas flowing out from

gaps

806 and 807 and a drain notch 936 described later. Gas purge is performed by G1.

The lower end portion of the gas ejection nozzle portion 91 has locked

portions

913 and 914. The locked portion 914 protrudes from the lower end portion of the gas ejection nozzle portion 91 outward in the radial direction of the gas ejection nozzle portion 91 (left direction in FIG. 9). The locked portion 913 is lowered stepwise in a downward direction D22 from the lower end portion of the gas ejection nozzle portion 91 and protrudes outward in the radial direction of the gas ejection nozzle portion 91 (right direction in FIG. 9). A through hole is formed in a portion of the locked portion 913 that protrudes radially outward (rightward in FIG. 9) of the gas ejection nozzle portion 91.

The communication unit 93 communicates from the filter unit 80 to the gas ejection nozzle unit 91 so that gas can be circulated. Specifically, the communication part 93 includes an opening facing wall part 931, a gas outlet part 941, a communication part flow path 945, and an outflow suppression wall part 935. The opening facing wall portion 931 and the gas outlet portion 941 have an oval shape in plan view. A portion near one end in the longitudinal direction of the oval shape is configured by an opening facing wall portion 931, and the opening facing wall portion 931 is disposed to face the substrate storage space side opening 804 of the filter unit 80. . A portion near the other end in the longitudinal direction of the oval shape is configured by a gas outlet portion 941, and a through-hole penetrating in the vertical direction is formed in the gas outlet portion 941. The opening of the lower end part of the gas ejection nozzle part 91 is connected to the opening of the through hole.

More specifically, a portion in the vicinity of one end portion of the opening facing wall portion 931 (portion in the vicinity of the left end portion in FIG. 9) has a horizontal plate-like portion. The portion closer to the other end than the horizontal plate-like portion (the portion closer to the right end in FIG. 9) gradually approaches the other end, that is, approaches the opening at the lower end of the gas ejection nozzle 91. Inclined to be separated from the filter unit 80. Specifically, the opening facing wall portion 931 includes a first inclined wall 9311 having a gentle inclination and a second inclined wall 9312 having a steeper inclination than the first inclined wall 9311. Thus, the opening facing wall portion 931 is positioned in order from the one end side to the other end side (in order from left to right in FIG. 9). With this configuration, the opening facing wall portion 931 guides the purge gas as the gas from the air passage 801 of the filter unit 80 that collides with the opening facing wall portion 931 to the opening at the lower end portion of the gas ejection nozzle portion 91.

From the one end part of the opening opposing wall part 931 in the direction connecting the one end part (left end part in FIG. 9) and the other end part (right end part in FIG. 9) of the opening opposing wall part 931, the first inclined wall 9311 and the second The length L1 to the connection position with the inclined wall 9312 is about 26 mm. Further, the length L2 from one end of the opening facing wall 931 to the right end in FIG. 9 of the second inclined wall 9312 in the same direction is about 34 mm. Further, the width L3 (see FIG. 8) of the opening facing wall portion 931 in the direction orthogonal to the same direction is about 32 mm. The inclination angle A1 of the first inclined wall 9311 with respect to the plane parallel to the front-rear direction D1 and the left-right direction D3 is about 4 °. The inclination angle A2 of the second inclined wall 9312 with respect to the plane parallel to the front-rear direction D1 and the left-right direction D3 is about 28 °.

The outflow suppression wall portion 935 extends from the periphery of the opening facing wall portion 931 toward the filter portion 80 and exists along the entire periphery of the opening facing wall portion 931 as shown in FIG. . As shown in FIG. 9 and the like, the extended end portion (lower end portion) of the outflow suppression wall portion 935 and the inner opening forming portion 81 of the filter portion 80 have a spaced apart positional relationship. For this reason, a gap 806 is formed between the extended end portion of the outflow suppression wall portion 935 and the inner opening forming portion 81 of the filter portion 80.

The width D1 of the gap 806 in the vertical direction D2 is preferably 0.1 mm to 0.5 mm. This is because if the width D1 is less than 0.1 mm, the cleaning water hardly passes through the gap 806 due to the surface tension of the cleaning water. In addition, if the width D1 is less than 0.1 mm, the lower part of the outflow suppression wall 935 abuts against the inner opening formation part 81 due to product variations, and the board storage container 1 cannot be assembled normally. is there. When the width D1 exceeds 0.5 mm, a large amount of purge gas, which is a gas flowing from the air passage 801 of the filter unit 80, leaks out from the gap 806, and from the through hole 912 of the gas ejection nozzle unit 91. This is because a sufficient amount of purge gas cannot be ejected. Further, the height L4 from the opening facing wall portion 931 to the extended end (lower end) at one end portion (left end portion in FIG. 9) of the outflow suppression wall portion 935 is about 1.5 mm. The outflow suppression wall portion 935 suppresses the purge gas, which is a gas from the air passage 801 of the filter unit 80 and collides with the opening facing wall portion 931, from leaking from the communication portion channel 945 through the gap 806.

The extension end portion (lower end portion) of the outflow suppression wall portion 935 has a drain notch 936 that is recessed in the direction of the opening facing wall portion 931. As shown in FIG. 7 and the like, the drain notch 936 has a rectangular shape and is recessed to reach the opening facing wall portion 931. The drainage notches 936 are positioned at both ends and the center of the arc in the arc-shaped portion at one end of the opening facing wall 931. The drain notch 936 of any one of the arc-shaped ends of one end portion of the opening facing wall portion 931 is a direction connecting the one end portion and the other end portion of the container body 2 as shown in FIG. In the front-rear direction D 1, the opening facing wall portion 931 is positioned closest to one end portion (close to the front end portion) of the container body 2.

The gas outlet portion 941 has an opening side portion facing portion 942. The opening side facing portion 942 faces the side portion of the inner opening forming portion 81 as a filter portion housing that forms the substrate storage space side opening 804. More specifically, as shown in FIG. 7 and the like, the opening side facing portion 942 is substantially U-shaped in a bottom view so as to extend the rear side portion of the lower end portion of the gas ejection nozzle portion 91 downward. It is comprised by the wall part which has a shape. The pair of substantially U-shaped tip portions of the opening side facing portion 942 are separated from each other toward the one end of the opening facing wall 931 (the upper left end of the opening facing wall 931 in FIG. 7). The upper portions of the pair of substantially U-shaped tip portions are integrally formed and connected to the outflow suppression wall portion 935. As shown in FIG. 9, the inner surface of the rear end portion (the right end portion in FIG. 9) of the gas outlet portion 941 is configured by a rear inclined surface 9411. An angle A3 formed by the rear inclined surface 9411 and a surface parallel to the front-rear direction D1 and the left-right direction D3 is about 120 °. Further, the distance L5 from the lower end of the rear inclined surface 9411 to the axis of the nozzle portion 83 is about 30 mm. The distance L6 from the lower end of the rear inclined surface 9411 to one end of the opening facing wall 931 is about 48 mm.

In addition, the end portion near the front direction D11 of the opening side facing portion 942 that faces the side portion of the inner opening forming portion 81 closest to the side portion and the side portion of the inner opening forming portion 81 have a spaced apart positional relationship. A gap 807 is formed between them as shown in FIG. The gap 807 is formed on both the near side and the far side shown in FIG. 8, and one of them is a direction (from the other end of the container body 2 toward one end) as shown in FIG. Opening in the forward direction D11). In a direction along a plane parallel to the front-rear direction D1 and the left-right direction D3.

The lower portion of the gas outlet portion 941 is inserted into a positioning recess that is formed adjacent to the through hole 245 of the lower wall 24 of the container body 2 and is recessed in the downward direction D22. It contacts the bottom surface 247 of the recess. By this contact, the opening facing wall portion 931 and the gas outlet portion 941 are supported by the lower wall 24, and between the extended end portion of the outflow suppression wall portion 935 and the inner opening forming portion 81 of the filter portion 80. A gap 806 is secured. In addition, the lower end portion of the gas outlet portion 941 is positioned in contact with the bottom surface 247 of the concave portion (not shown), thereby forming a pair of oval shapes configured by the opening facing wall portion 931 and the gas outlet portion 941. As shown in FIGS. 3 and 4, these are fixed to the lower wall 24 in a positional relationship having a substantially “C” shape.

A locking portion 943 and a hook portion 944 are provided at the upper end portion of the gas outlet portion 941. The engaging portion 943 extends radially outward of the nozzle body 911 so as to be separated from the gas outlet 941, extends upward 21, and further radially outward of the nozzle body 911 from the gas outlet 941. It extends so as to be separated. The locking portion 943 is inserted into the through-hole of the locked portion 913 and the locked portion 914 is hooked on the hook portion 944, so that the lower end portion of the gas ejection nozzle portion 91 is connected to the upper end portion of the gas outlet portion 941. Fixed. As a result, the opening-facing wall portion 931 and the gas outlet portion 941 form a communication portion flow path 945 through which purge gas as a gas from the air passage 801 of the filter portion 80 is circulated to the gas ejection nozzle portion 91. The communication portion flow path 945 communicates the substrate storage space side opening 804 with the internal space of the gas ejection nozzle portion 91.

As shown in FIG. 1 and the like, the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2. The lid 3 can be attached to and detached from the opening peripheral edge 28 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 28. . It is the inner surface of the lid 3 (the surface on the back side of the lid 3 shown in FIG. 1), at the position in the rearward direction D12 of the opening peripheral edge 28 when the lid 3 closes the container main body opening 21. An annular seal member 4 is attached to the surface facing the formed stepped portion surface (seal surface 281). The seal member 4 is made of various types of thermoplastic elastomers such as polyester and polyolefin that can be elastically deformed, fluorine rubber, and silicon rubber. The seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.

When the lid 3 is attached to the opening peripheral edge 28, the seal member 4 is sandwiched between the seal surface 281 and the inner surface of the lid 3 and elastically deformed, and the lid 3 seals the container main body opening 21. Shuts down in a closed state. By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.

The lid 3 is provided with a latch mechanism. The latch mechanism is provided in the vicinity of both left and right ends of the lid 3, and as shown in FIG. 1, two

upper latch portions

32A and 32B that can project in the upward direction D21 from the upper side of the lid 3, and the lid 3, two lower latch portions (not shown) that can project in the downward direction D22 from the lower side of 3. The two upper latch portions 32 A and 32 B are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.

An operation unit 33 is provided on the outer surface of the lid 3. By operating the operation portion 33 from the front side of the lid body 3, the

upper latch portions

32A and 32B and the lower latch portion (not shown) can be protruded from the upper side and the lower side of the lid body 3, It can be set as the state which does not protrude from a lower side. The

upper latch portions

32A and 32B protrude from the upper side of the lid body 3 in the upward direction D21, engage with the

latch engagement recesses

231A and 231B of the container body 2, and the lower latch portion (not shown) is the lid body. The lid 3 is fixed to the opening peripheral edge portion 28 of the container body 2 by projecting in the downward direction D22 from the lower side of the container 3 and engaging with the

latch engagement recesses

241A and 241B of the container body 2.

A recess (not shown) that is recessed outward from the substrate storage space 27 is formed inside the lid 3. A front retainer (not shown) is fixedly provided on the concave portion (not shown) and the lid 3 outside the concave portion.

The front retainer (not shown) has a front retainer substrate receiving portion (not shown). Two front retainer substrate receiving portions (not shown) are arranged in pairs so as to form a pair with a predetermined interval in the left-right direction D3. The front retainer substrate receiving portions arranged in pairs so as to form a pair in this way are provided in a state where 25 pairs are juxtaposed in the vertical direction D2. When the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the front retainer substrate receiving portion sandwiches and supports the edge of the edge of the substrate W.

In the substrate storage container 1 as described above, the gas purge with the purge gas is performed as follows. First, as shown in FIG. 6, the nozzle 83 (see FIG. 9) is connected to the gas supply port opening of the supply nozzle N of the gas supply device that supplies gas to the external space side opening 802 (see FIG. 9). The protruding portion 832 and the reduced diameter annular plate portion 835 are brought into contact with each other. Next, the purge gas G1 is supplied to the external space side opening 802 from the gas supply port opening of the supply nozzle N of the gas supply device. Accordingly, as shown in FIG. 9, the purge gas G 1 flows into the ventilation path 801, flows through the through hole 803 and the substrate storage space side opening 804, and collides with the opening facing wall portion 931. At this time, in the communication portion flow path 945, the purge gas G1 is prevented from leaking outside the communication portion flow path 945 by the outflow suppression wall portion 935, and the purge gas G1 is supplied to the first inclined wall 9311 of the opening facing wall portion 931. And it circulates along the 2nd inclined wall 9312 toward the opening side part opposing part 942. The purge gas G 1 flows into the internal space of the gas ejection nozzle portion 91 and is ejected from the through hole 912 to the substrate storage space 27.

Next, cleaning of the substrate storage container 1 with cleaning water is performed as follows. First, the substrate storage container 1 is washed with washing water by a washing machine. Specifically, the substrate storage container 1 is in a state where the filter unit 80, the communication unit 93, and the gas ejection nozzle unit 91 are fixed to the container body 2, and before or after using the substrate storage container 1. In the washing machine, washing water is used for washing. At this time, since the filter 85 has hydrophobicity, cleaning water remains in the communication portion flow path 945.

Next, the substrate storage container 1 is arranged in a positional relationship in which the back wall 22 is vertically above the container body opening 21. Then, the gap 806 is in a positional relationship that opens vertically downward. Further, one drainage notch 936 out of the three drainage notches 936 and one gap 807 out of the two gaps 807 are in a positional relationship that opens vertically downward. Therefore, the washing water remaining in the communication portion flow path 945 is discharged from the gap 806, and through the water drain notch 936 and the gap 807, as shown by arrows F1 and F2 in FIG. , The fluid is discharged out of the communication channel 945. Further, hot air is blown onto the container body 2. Thereby, the washing water is dried.

In addition, after the substrate storage container 1 is cleaned by the cleaning machine, the first side wall 25 is positioned vertically downward with respect to the second side wall 26 instead of disposing the back wall 22 vertically above the container body opening 21. Thus, the substrate storage container 1 is arranged. Then, the substrate storage container 1 is swiveled around the rotation axis arranged behind the back wall 22. At this time, the gap 806, one drain notch 936 out of the three drain notches 936, and one gap 807 out of the two gaps 807 open toward the radial direction outward of the rotating shaft. is doing. In other words, the gap 806, one drain notch 936 of the three drain notches 936, and one gap 807 of the two gaps 807 open toward the downstream side in the direction in which the centrifugal force acts. The positional relationship is Therefore, the washing water remaining in the communication portion flow path 945 is discharged from the gap 806, and through the water drain notch 936 and the gap 807, as shown by arrows F1 and F2 in FIG. , The fluid is discharged out of the communication channel 945. Further, hot air is blown onto the container body 2. Thereby, the washing water is dried.

According to the substrate storage container 1 according to this embodiment having the above-described configuration, the following effects can be obtained. As described above, the substrate storage container 1 includes the cylindrical wall portion 20 in which the container main body opening 21 is formed at one end and the other end is closed, and a plurality of substrates W are stored by the inner surface of the wall portion 20. A container main body 2 in which a substrate storage space 27 communicating with the container main body opening 21 is formed, and a lid 3 detachable from the container main body opening 21 and capable of closing the container main body opening 21. A ventilation path 801 that allows communication between the substrate storage space 27 and the space outside the container body 2, a filter 85 disposed in the ventilation path 801, and a filter unit housing that forms the ventilation path 801. Gas that has flowed through the filter 85 through which the purge gas G1 as a gas can pass between the space outside the container body 2 and the substrate storage space 27 through the filter 85, and the air passage 801 of the filter unit 80 The base Comprising a gas ejection nozzle portion 91 to be supplied to the accommodating space 27, a communicating portion 93 which communicates to allow flow of gas to the gas ejection nozzle portion 91 from the filter unit 80.

The ventilation path 801 has a substrate storage space side opening 804 located in the substrate storage space 27 and an external space side opening located in a space outside the container body 2. The communicating portion 93 includes an opening facing wall portion 931 disposed to face the substrate storage space side opening 804, and a purge gas G1 as a gas from the air passage 801 of the filter portion 80 that collides with the opening facing wall portion 931. A communication part flow formed by the gas outlet part 941 that leads to the gas ejection nozzle part 91, the opening facing wall part 931 and the gas outlet part 941, and distributes the gas from the ventilation path 801 of the filter part 80 to the gas ejection nozzle part 91. A purge gas as a gas from the ventilation path 801 of the filter unit 80, which is a flow path 945 and an outflow suppression wall unit 935 extending from the opening facing wall unit 931 toward the filter unit 80, and collides with the opening facing wall unit 931. G1 has an outflow suppression wall portion 935 that suppresses leakage from the communication portion flow path 945. The extending end portion of the outflow suppression wall portion 935 and the filter portion 80 are spaced apart from each other, and a gap 806 is formed between the extending end portion of the outflow suppression wall portion 935 and the filter portion 80. ing.

With the above configuration, the extended end portion of the outflow suppression wall portion 935 and the filter portion 80 have a positional relationship that is separated from each other, and there is a gap between the extended end portion of the outflow suppression wall portion 935 and the filter portion 80. Since 806 is formed, the cleaning water can be discharged from the communication portion channel 945 through the gap 806 after the substrate storage container 1 is cleaned with the cleaning water. For this reason, it is possible to prevent the cleaning water from staying in the communication portion 93. As a result, the time required for drying the substrate storage container 1 can be shortened.

Also, the extended end portion of the outflow suppression wall portion 935 has a drain notch 936 that is recessed in the direction of the opening facing wall portion 931. With this configuration, the cleaning water can be discharged from the communication channel 945 through the water drain notch 936 in addition to the cleaning water being discharged from the communication channel 945 through the gap 806. For this reason, it can suppress more reliably that cleaning water retains in the communicating part 93 or the outflow suppression wall part 935.

Further, the drainage notch 936 is located at the portion of the outflow suppression wall 935 closest to one end of the container main body 2 in the direction connecting the one end and the other end of the container main body 2. With this configuration, the substrate storage container 1 is placed and the substrate storage container 1 is dried such that this position is located at the lowest position in the outflow suppression wall 935, or this position is the outflow suppression wall 935. The substrate storage container 1 is disposed and rotated so that the substrate storage container 1 is dried so that the substrate storage container 1 is dried so as to be disposed on the downstream side where the centrifugal force acts most. The washing water staying in the communication channel 945 inside the wall 935 can be easily discharged to the outside of the communication channel 945.

Further, the gas outlet portion 941 of the communication portion 93 includes an opening side portion facing portion 942 that faces the side portion of the filter portion housing that forms the substrate storage space side opening 804, and the opening side portion facing portion 942 and the filter portion housing. The side portion is spaced apart from each other, and a gap 807 is formed between the opening side portion facing portion 942 and the side portion of the filter portion housing.

With the above configuration, in addition to discharging the cleaning water staying in the upper portion of the communication portion flow path 945 through the gap 806 and the drain notch 936, the communication portion flow path 945 is connected from the gap 807. The washing water staying in the lower part of the water can be discharged from the communication channel 945. For this reason, it can suppress more reliably that cleaning water retains in the upper part and lower part of the communicating part 93. FIG.

Further, a gap 807 between the opening side portion facing portion 942 and the side portion of the filter portion housing opens in a direction from the other end portion of the container body 2 to one end portion. With this configuration, the substrate storage container 1 is placed and the substrate storage container 1 is dried so that the gap 807 opens downward, and the centrifugal force acts on the gap 807. The substrate storage container 1 is placed and rotated so that the substrate storage container 1 is dried and the substrate storage container 1 is dried so that the outflow is suppressed. The washing water staying in the communication channel 945 inside the wall 935 can be easily discharged to the outside of the communication channel 945.

Further, the opening facing wall portion 931 is inclined so as to be separated from the filter portion 80 as it approaches the gas ejection nozzle portion 91. With this configuration, the flow of the purge gas can be adjusted so that the inert gas (purge gas), which is the gas from the air passage 801 of the filter unit 80, can smoothly flow to the gas ejection nozzle unit 91. For this reason, it is possible to make the purge gas difficult to leak from the gap 806, the gap 807, and the water drain notch 936.

The present invention is not limited to the embodiment described above, and can be modified within the technical scope described in the claims. For example, the shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment, and the number of substrates W that can be stored in the container main body 2. The dimensions are not limited. The configurations of the filter unit, the gas ejection nozzle unit, the communication unit, and the like are not limited to the configurations of the filter unit 80, the gas ejection nozzle unit 91, the communication unit 93, and the like in the present embodiment. For example, the filter unit 80 may have a configuration including a check valve or the like.

DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container main body 3 Lid 20 Wall part 21 Container main body opening part 27 Substrate storage space 80 Filter part 81 Inner opening formation part (filter part housing part)
82 1st housing part (filter part housing part)
83 Nozzle (filter housing)
85 Filter 801 Ventilation path 802 External space side opening 804 Storage space side

storage chamber opening

806, 807 Clearance 935 Outflow suppression wall 936 Drain notch 941 Gas outlet 942 Open side facing part 945 Communication channel W Substrate

Claims

A substrate housing that includes a cylindrical wall portion that is formed with a container body opening at one end and is closed at the other end, and can accommodate a plurality of substrates by the inner surface of the wall and communicate with the container body opening. A container body in which a space is formed;
A lid that can be attached to and detached from the container body opening, and can close the container body opening;
An air passage that allows communication between the substrate storage space and the space outside the container body, a filter disposed in the air passage, and a filter portion housing that forms the air passage, and the wall portion. A filter unit that is disposed and allows gas to pass between the space outside the container body and the substrate storage space through the filter;
A gas ejection nozzle part for supplying the gas flowing into the ventilation path of the filter part to the substrate housing space;
A communication part that allows gas to flow from the filter part to the gas ejection nozzle part, and
The air passage has a substrate storage space side opening located in the substrate storage space, and an external space side opening located in a space outside the container body,
The communication portion includes an opening facing wall portion arranged to face the substrate storage space side opening, and gas from the ventilation passage of the filter portion that collides with the opening facing wall portion, and the gas ejection nozzle portion. Formed by a gas lead-out portion that leads to the opening, the opening facing wall portion and the gas lead-out portion, and a communication portion flow path for flowing gas from the ventilation passage of the filter portion to the gas ejection nozzle portion; An outflow suppression wall portion extending from the wall portion toward the filter portion, and gas from the ventilation passage of the filter portion that collides with the opening facing wall portion leaks from the communication portion flow path. An outflow suppression wall portion for suppressing
The extended end portion of the outflow suppression wall portion and the filter portion are spaced apart from each other, and a gap is formed between the extended end portion of the outflow suppression wall portion and the filter portion. Substrate storage container.
The substrate storage container according to claim 1, wherein the extended end portion of the outflow suppression wall portion has a drain notch that is recessed toward the opening-facing wall portion.
The said drain notch is located in the part of the said outflow suppression wall part near the one end part of the said container main body in the direction which connects the one end part and other end part of the said container main body. Substrate storage container.
The gas outlet part of the communication part has an opening side part facing part facing the side part of the filter part housing that forms the substrate housing space side opening,
The opening side portion facing portion and the side portion of the filter portion housing have a spaced apart positional relationship, and a gap is formed between the opening side portion facing portion and the side portion of the filter portion housing. The substrate storage container according to any one of claims 1 to 3.
5. The substrate storage container according to claim 4, wherein a gap between the opening side facing part and the side part of the filter part housing opens in a direction from the other end of the container main body to one end.
The substrate storage container according to any one of claims 1 to 5, wherein the opening facing wall portion is inclined so as to be separated from the filter portion as it approaches the gas ejection nozzle portion.