JP2008133057A - Substrate takeout device and substrate takeout method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently pick up a dustproof glass substrate stored in a case without producing impact flaws. <P>SOLUTION: This substrate takeout device for taking out a dustproof glass substrate 15 stored in a storage case 11 by sucking it comprises a suction head 18 for sucking the dustproof glass substrate 15, a head holder 13 for supporting the suction head 18 movably forward and backward in the direction approaching the dustproof glass substrate 15, and a buffer mechanism interposed between the suction head 18 and the head holder 13 and having a buffer spring 20 allowing the relative movement between the suction head 18 and the head holder 13 at a set spring pressure. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate take-out device and a substrate take-out method that take out a substrate stored in a storage case by adsorbing it to a suction head.

  When a liquid crystal panel, which is a representative electro-optical panel, is used as a light valve for a projection-type liquid crystal display device, which is a representative electro-optical device, if foreign matter such as dust adheres to the surface, it is enlarged by a projection lens. Is projected on the screen and the display quality is significantly reduced. In order to prevent this, a transparent glass substrate (hereinafter referred to as “dust-proof glass substrate”) is attached to the outer surface of the liquid crystal panel.

  By protecting the outer surface of the liquid crystal panel with a dust-proof glass substrate, it is possible to prevent dust and the like from adhering to the surface of the liquid crystal panel, and even if dust or the like adheres to the outer surface of the dust-proof glass substrate, the dust and the liquid crystal Since the gap is separated by the thickness of the glass substrate, an image such as dust is defocused and projection onto the screen is prevented.

By the way, when picking up a plurality of dust-proof glass substrates stored in the storage case one by one and supplying them to the assembly line of the liquid crystal panel, for example, Patent Document 1 (Japanese Patent Laid-Open No. 11-286325) and Patent Document 2 are used. There are many modes in which a suction head as disclosed in JP-A-7-142343 is used, and the dust-proof glass substrate stored in the storage case is suctioned and picked up by this suction head and transported to the assembly line. It has been adopted.
JP-A-11-286325 JP-A-7-209635

  By the way, in the storage case, guide grooves for storing and holding the dust-proof glass substrate are formed at regular intervals. A certain amount of clearance is secured between the guide groove and the dust-proof glass substrate housed in the guide groove in order to make it easy to pick up the dust-proof glass substrate.

  When the dust-proof glass substrate is sucked by the suction head, first, the suction head needs to be pressed against the dust-proof glass substrate and brought into contact therewith. At that time, since there is a clearance between the dust-proof glass substrate and the guide groove, for example, when the dust-proof glass substrate is accommodated in a state where the dust-proof glass substrate is biased toward the side closer to the suction pad, the suction pad is dust-proof. When pressed against the glass substrate, the dust-proof glass substrate moves to the opposite side and contacts the guide groove. When the dust-proof glass substrate comes into contact with the guide groove, there is a problem that a dent scratch is easily formed in that portion, resulting in a product defect.

  To cope with this, it is possible to change the material of the storage case, and further to form the guide groove according to the size of the dust-proof glass substrate, but since the existing storage case will be discarded, It is not preferable. Furthermore, if the size of the guide groove is narrowly formed in accordance with the size of the dust-proof glass substrate, it is difficult to take out the dust-proof glass substrate, and there is a problem that the production efficiency is lowered.

  In view of the above circumstances, the present invention can efficiently pick up a substrate stored in an existing storage case without forming a scratch on the substrate without using a new storage case. It is an object of the present invention to provide a substrate take-out device and a substrate take-out method.

  In order to achieve the above object, a first substrate take-out device according to the present invention is a substrate take-out device that sucks and takes out a substrate stored in a storage case, and a suction head for sucking the substrate and the suction head as the substrate. A head holder that is supported so as to be capable of moving forward and backward in a direction close to the head, and a buffer mechanism that is interposed between the suction head and the head holder and allows relative movement between the suction head and the head holder with a set pressure. It is characterized by providing.

  In such a configuration, since the buffer mechanism that allows the relative movement between the suction head and the head holder with the set pressure is interposed between the suction head and the head holder, the substrate stored in the storage case is in the posture. Even if there is non-uniform variation, it can be adsorbed to the adsorption head without forming a dent flaw on the substrate. Therefore, an existing storage case can be used as it is without using a new storage case, which is economical. Furthermore, since the substrate can be stored in the storage case with a relatively wide clearance, the substrate can be efficiently picked up without applying excessive force.

  The second substrate take-out device is the first substrate take-out device, wherein the buffer mechanism is fixed to the suction head and is supported by being inserted into and supported by the head holder, and the suction head. And a buffer spring interposed between the head holder and the head holder.

  In such a configuration, the contact pressure with respect to the substrate is adjusted by the spring pressure of the buffer spring that is easily exchanged. Therefore, by simply replacing the buffer spring, the contact pressure can be easily adjusted to an optimum value. Can do.

  The third substrate take-out device is characterized in that, in the first and second substrate take-out devices, the suction head is made of metal or hard resin.

  In such a configuration, by making the suction head made of metal or hard resin, the suction mark of the suction head hardly remains on the substrate.

  A first substrate take-out method is a substrate take-out method in which a substrate stored in a storage case is picked up by a suction head and taken out, and after the suction head is made to face the storage case, the suction head is brought close to the substrate. Then, the back surface of the suction head is pressed toward the substrate through the buffer mechanism, the suction head is relatively moved by the allowable pressure of the buffer mechanism, and the substrate is opposed to the suction head. The substrate is adsorbed.

  In such a configuration, since the back surface of the suction head is pressed toward the substrate via the buffer mechanism, even if the substrate stored in the storage case has a variation in the posture, the substrate is not hit. It can be adsorbed without forming scratch marks. Therefore, an existing storage case can be used as it is without using a new storage case, which is economical. Further, since the substrate can be stored in the storage case with a relatively wide clearance, the substrate can be efficiently picked up without applying an excessive force.

  The second substrate take-out method detects the negative pressure generated in the suction head in the first substrate take-out method, and the substrate is sucked to the suction head when the negative pressure is lower than a preset threshold value. It is characterized by determining that it was.

  In such a configuration, since the negative pressure generated in the suction head is detected to determine whether or not the substrate is sucked, it is easy to automate the apparatus.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic configuration diagram of a substrate supply apparatus disposed in an electro-optical panel assembly line.

  Reference numeral 1 in FIG. 1 denotes an assembly line, and the electro-optical panel 10 such as a liquid crystal panel is transported on the transport lane 1a in a state where it is placed at regular intervals.

  A storage case 11 is arranged on one side of the transport lane 1a. Further, a transfer machine 12 is disposed between the transfer lane 1 a and the storage case 11. The transfer machine 12 has an articulated transfer arm 12a, and a head holder 13 is attached to the tip of the transfer arm 12a via a wrist portion 12b. The transfer machine 12 picks up a dust-proof glass substrate 15 as a substrate stored in the storage case 11 and transfers it in the direction of the transfer lane 1a.

  Further, the storage case 11 stores therein a plurality of rows of vertically long core cases 14 (four rows in this embodiment). As shown in FIG. 2, a core case guide 11 a is provided in the storage case 11, and an area for holding the core case 14 is defined by each of the core case guides 11 a. In addition, the core case 14 is formed on the inner surface on the long side opposite to each other with the guide portions 14a having a triangular cross section facing each other at regular intervals, and a substrate storage portion 14b is formed between the guide portions 14a. Is formed. The dust-proof glass substrate 15 is accommodated in the substrate accommodating portion 14b. The storage case 11 and the core case 14 are existing. In each drawing, the dust-proof glass substrate 15 is hatched for convenience.

  The substrate storage portion 14b is formed with a clearance slightly larger than the size of the dust-proof glass substrate 15, and therefore each dust-proof glass substrate 15 is only supported loosely in the substrate storage portion 14b. As shown in FIG. 2, the stored posture is not constant and varies.

  As shown in FIG. 3, the head holder 13 provided at the tip of the transfer arm 12a of the transfer machine 12 extends downward from the wrist portion 12b, and a guide hole 16 is formed in the lower portion thereof. A slide bush 17 on the inner periphery of the guide hole 16 is fitted.

  A slide rod 19 is inserted into and supported by the slide bush 17 so as to advance and retract. The tip of the slide rod 19 is fixed to the back surface of a support boss portion 18 a formed at the upper part of the suction head 18, and a flange 19 a is formed at the rear end of the slide rod 19. Further, a buffer spring 20 is externally mounted on the slide rod 19, and both end surfaces of the buffer spring 20 are in contact with the head holder 13 and the support boss portion 18a.

  The suction head 18 protrudes in a direction away from the head holder 13 by the urging force of the buffer spring 20, and a flange 19 a formed at the rear end of the slide rod 19 is hooked on the back surface of the head holder 13 and is initially loaded. The position is regulated. Note that the preset allowable pressure (spring pressure) of the buffer spring 20 is relatively weak and is compressed only by lightly pushing the suction head 18 toward the head holder 13. The slide bush 17, the slide rod 19, and the buffer spring 20 constitute a battery mechanism.

  The lower portion of the suction head 18 than the support boss portion 18a has a plate thickness that is thinner than the distance between the dust-proof glass substrates 15 accommodated in the core case 14, and further faces each other as shown in FIG. 4 has a width shorter than the distance between the guide portions 14a to be formed, and as shown in FIG.

  Further, a recess 18 c is formed in the suction surface 18 b of the suction head 18, and a vacuum pump 21 is communicated with the recess 18 c through a negative pressure line 22. The suction head 18 is made of metal or hard resin, and the suction surface 18b is mirror-finished. By making the suction head 18 made of metal or hard resin, the suction mark of the suction head 18 hardly remains on the dust-proof glass substrate 15.

  The negative pressure generated in the recess 18c by the vacuum pump 21 is set to a weak pressure sufficient to attract and pick up the dust-proof glass substrate 15.

  Although not shown, a pressure sensor is provided in the middle of the negative pressure line 22, and the pressure detected by the pressure sensor is compared with the threshold value SL, and the generated negative pressure becomes equal to or lower than the threshold value SL. It is determined that the dust-proof glass substrate 15 has been adsorbed.

  Next, the operation of the present embodiment having such a configuration will be described. The core case 14 accommodated in the storage case 11 installed on one side of the assembly line 1 is replaced every time all the dust-proof glass substrates 15 accommodated therein are picked up. The vacuum pump 21 is always in an operating state.

  When picking up the dust-proof glass substrate 15 set in the core case 14, first, the transfer arm 12a of the transfer machine 12 shown in FIG. 1 is swung in the horizontal direction and suspended at the tip of the transfer arm 12a via the wrist 12b. The provided head holder 13 is placed above the dust-proof glass substrate 15 to be picked up. At the same time, the wrist portion 12b is rotated so that the suction heads 18 supported by the head holder 13 are arranged in substantially the same manner as the dust-proof glass substrate 15 as shown in FIG.

  Next, the transfer arm 12 a is operated to lower the head holder 13 in the Y (vertical) direction of FIG. 3, and the suction surface 18 b formed on the front surface of the suction head 18 is opposed to the surface of the dust-proof glass substrate 15. Let Next, the head holder 13 is slowly moved in the X (horizontal) direction of FIG. 4 to bring the suction surface 18 b of the suction head 18 close to the surface of the dust-proof glass substrate 15.

  At this time, when the dust-proof glass substrate 15 to be picked up is housed in an oblique posture as shown in FIG. 2, when the suction head 18 is brought close to the dust-proof glass substrate 15, first, the edge of the suction head 18. Comes into contact with the dust-proof glass substrate 15. When the head holder 13 is further moved in the horizontal direction, since the edge of the suction head 18 is in contact with the dust-proof glass substrate 15, the suction head 18 moves to the buffer spring with respect to the movement of the head holder 13 in the horizontal direction. Retreats against 20 biasing forces. At the same time, the dust-proof glass substrate 15 is pressed against the suction head 18, and its posture gradually moves in a direction parallel to the suction head 18 and confronts it.

  When the dust-proof glass substrate 15 is substantially parallel to the suction head 18, the dust-proof glass substrate 15 comes into surface contact with the suction surface 18 b of the suction head 18. Then, since the recessed part 18c formed in this adsorption | suction surface 18b is obstruct | occluded with the dust-proof glass substrate 15, the pressure of the recessed part 18c falls gradually as shown in FIG. This pressure is monitored by a pressure sensor facing the negative pressure line 22, and the negative pressure detected by the pressure sensor is compared with a threshold value SL. Then, when the negative pressure becomes equal to or less than the threshold value SL, it is determined that the dust-proof glass substrate 15 is attracted to the suction surface 18b of the suction head 18, and the movement of the head holder 13 in the Y (horizontal) direction is stopped.

  When the dust-proof glass substrate 15 is attracted to the suction surface 18b of the suction head 18, the contact pressure of the suction head 18 against the surface of the dust-proof glass substrate 15 is adjusted by the buffer spring 20, and the recess formed in the suction surface 18b. Since the negative pressure generated in 18c is set to a weak enough pressure to pick up the dust-proof glass substrate 15, no scratches are formed on the dust-proof glass substrate 15.

  Thereafter, the head holder 13 is raised in the Y ′ (vertical) direction, the dust-proof glass substrate 15 is picked up from the storage case 11, and then moved in the X ′ (horizontal) direction, so that the dust-proof glass substrate 15 is transferred to the transport lane. Transport in the direction of 1a.

  Thus, according to the present embodiment, the buffer spring 20 is interposed between the suction head 18 and the head holder 13, and the surface of the dust-proof glass substrate 15 of the suction head 18 due to the weak spring pressure of the buffer spring 20. Since the negative pressure generated in the recess 18c formed on the suction surface 18b is set to a relatively weak pressure, the dust-proof glass substrate 15 varies in the core case 14 in a posture that is not constant. Even if the dust-proof glass substrate 15 is housed in a state of having, the surface of the dust-proof glass substrate 15 can be adsorbed without being brought into contact with the adsorption surface 18b of the adsorption head 18 with a strong pressure. Therefore, no scratches are formed on the surface of the dust-proof glass substrate 15, and the product defect rate can be reduced.

  Further, since the dust-proof glass substrate 15 is stored in the substrate storage portion 14b formed in the core case 14 with a relatively wide clearance, the dust-proof glass substrate 15 is efficiently removed without applying excessive force. I can do it.

  Since the buffer spring can be easily replaced, the contact pressure of the suction head 18 against the surface of the dust-proof glass substrate 15 can be easily adjusted to an optimum value by replacing the buffer spring. Furthermore, the storage case 11 and the core case 14 are economical because they are used as they are.

  Furthermore, since the negative pressure of the negative pressure line 22 is detected to determine whether or not the dust-proof glass substrate 15 is attracted to the suction surface of the suction head 18, the transport machine 12 is monitored by monitoring this negative pressure. Sequence control can be easily performed, and automation becomes easy.

  The substrate picked up by the substrate take-out device according to the present invention is not limited to the dust-proof glass substrate 15 to be bonded to the electro-optical panel 10, and can be applied to any other substrate.

Schematic configuration diagram of the substrate supply device arranged in the electro-optic panel assembly line Part II enlarged view of FIG. FIG. 3 is a cross-sectional view corresponding to the III-III cross section of FIG. FIG. 3 is an enlarged view of a main part corresponding to FIG. 3 is an enlarged view of the main part corresponding to FIG. Characteristic diagram showing the state of negative pressure generated on the suction surface of the suction head

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Assembly line, 11 ... Storage case, 11a ... Core case guide, 12 ... Transfer machine, 12a ... Transfer arm, 13 ... Head holder, 14 ... Core case, 14a ... Guide part, 14b ... Substrate storage part, DESCRIPTION OF SYMBOLS 15 ... Dust-proof glass substrate, 16 ... Guide hole, 17 ... Slide bush, 18 ... Adsorption head, 18b ... Adsorption surface, 18c ... Recess, 19 ... Slide rod, 20 ... Buffer spring, 21 ... Vacuum pump

Claims (5)

In the substrate take-out device that picks up and takes out the substrate stored in the storage case,
A suction head for sucking the substrate;
A head holder that supports the suction head so as to freely advance and retract in a direction close to the substrate;
A substrate take-out apparatus comprising: a buffer mechanism that is interposed between the suction head and the head holder and allows a relative movement between the suction head and the head holder with a set pressure. The buffer mechanism includes a slide rod that is fixed to the suction head and that is inserted into and supported by the head holder so as to advance and retreat, and a buffer spring that is interposed between the suction head and the head holder. The substrate take-out apparatus according to claim 1, further comprising: 3. The substrate take-out apparatus according to claim 1, wherein the suction head is made of metal or hard resin. In the method of taking out the substrate stored in the storage case by adsorbing the substrate to the adsorption head,
After the suction head is brought into contact with the storage case, the suction head is brought into contact with the substrate, and then the back surface of the suction head is pressed toward the substrate through the buffer mechanism to allow the buffer mechanism to be allowed. A method of taking out a substrate, wherein the suction head is relatively moved by pressure, and the substrate is held against the suction head to suck the substrate. 5. The substrate take-out method according to claim 4, wherein a negative pressure generated in the suction head is detected and it is determined that the substrate is sucked by the suction head when the negative pressure is lower than a preset threshold value. .

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