JP2008127544A - Method for processing electronic part and adhesive tape for processing electronic part - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for processing an electronic part with an adhesive tape for processing the electronic part, by which the adhesive tape for processing the electronic part can be peeled only by the irradiation of light such as UV rays without leaving an adhesive or the like even in the presence of oxygen, such as in the atmosphere. <P>SOLUTION: This method for processing the electronic part, having a process for adhering an adhesive tape for processing the electronic part to the electronic part, a process for processing the electronic part to which the adhesive tape for processing the electronic part is adhered, and a process for peeling the adhesive tape for processing the electronic part from the electronic part after the processing by the irradiation of light, is characterized in that the electronic part for processing the electronic part has an adhesive layer comprising an adhesive binder polymer, a photopolymerizable monomer having one or more polymerizable carbon-carbon double bonds, a photopolymerizable oligomer having one or more polymerizable carbon-carbon double bonds, and a photopolymerization initiator. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a method for processing an electronic component using an adhesive tape for processing an electronic component, and it is possible to produce an electronic component without causing adhesive residue by irradiating light such as ultraviolet rays even in the presence of oxygen in the atmosphere. The present invention relates to a method for processing an electronic component capable of peeling off the component processing adhesive tape, and an electronic component processing adhesive tape used in the method for processing the electronic component.

When manufacturing electronic components, various processes such as grinding, dicing, circuit transfer, and micro electro mechanical systems (MEMS) are performed. In such an electronic component processing method, an adhesive tape is often used. For example, in semiconductor wafer grinding, when a thick film wafer cut from a high-purity silicon single crystal or the like is ground to a predetermined thickness to form a thin film wafer, the thick film wafer is bonded to a support plate. It has been proposed to work efficiently by reinforcing. At this time, a double-sided pressure-sensitive adhesive tape is used to bond the thick film wafer and the support plate. In addition, when a ground semiconductor wafer is diced into individual IC chips, an adhesive tape called a dicing tape is used. Moreover, when processing mechanically brittle electronic parts such as MEMS, an adhesive tape such as a processing fixing tape is used.

The pressure-sensitive adhesive tape for processing an electronic component used in a method for processing an electronic component is required to be easily peeled after use while it can be firmly adhered and fixed to an adherend as long as necessary. For example, in the above-described grinding process, the adhesive tape is required to be firmly bonded during the grinding process, but peeled off from the support plate without damaging the thin film wafer obtained after the grinding process is completed. In addition, it adheres firmly to the dicing tape used when dicing a ground semiconductor wafer during the dicing process, and after the dicing process is completed, the obtained IC chip can be peeled off without being damaged. Is required. In particular, when processing a small micro IC chip that has been attracting attention in recent years, since the chip size is very small, it is required to be able to easily and quickly peel off the dicing tape after dicing. Further, when processing extremely fragile electronic components such as MEMS, it is required to peel the fragile member from the processing fixing tape without damaging or scratching at the end of the processing.

On the other hand, Patent Document 1 and the like describe a method for processing an electronic component using an adhesive tape having an adhesive layer made of a photocurable adhesive containing a (meth) acrylic resin and a radical polymerization initiator. Has been. Such a photo-curing type pressure-sensitive adhesive has high adhesiveness, but when irradiated with light such as ultraviolet rays, the (meth) acrylic resin is cross-linked, and its elasticity increases remarkably, thereby reducing the adhesive strength. Have Therefore, after processing an electronic component using the adhesive tape, the adhesive tape can be easily peeled off by irradiating the adhesive tape with light such as ultraviolet rays. However, in practice, when the adhesive tape is peeled off by irradiating with ultraviolet rays, if there are bubbles on the periphery of the adhesive tape or on the adhesive surface, adhesive residue may be generated on the periphery of the bubbles. was there. This is considered to be because the cross-linking reaction does not proceed sufficiently in the peripheral part of the pressure-sensitive adhesive tape in contact with air because the radical reaction is inhibited by oxygen. In particular, when used for MEMS processing, the parts to be processed are three-dimensional, and the ratio of the peripheral portion affected by oxygen is larger than that of the bonded area portion. Similarly, when used for processing a small micro IC chip, since the chip size is small and the ratio of the peripheral part affected by oxygen is larger than that of the bonded area part, the problem is great.

As a method for solving such problems, for example, it has been proposed to perform the peeling process of the adhesive tape in a nitrogen atmosphere. However, a large-scale apparatus is required and the operation is extremely complicated. It was.

Japanese Patent Publication No. 01-056112

The present invention is a method of processing an electronic component using an adhesive tape for processing an electronic component in view of the above-described situation, and adhesive residue or the like can be obtained by simply irradiating light such as ultraviolet rays even in the presence of oxygen such as in the atmosphere. It is an object of the present invention to provide an electronic component processing method capable of peeling the electronic component processing pressure-sensitive adhesive tape without causing a problem, and an electronic component processing pressure-sensitive adhesive tape used in the electronic component processing method.

The present invention includes a step of attaching an adhesive tape for processing an electronic component to an electronic component, a step of processing an electronic component to which the adhesive tape for processing an electronic component is applied, and the electronic component after processing by irradiating light. The electronic component processing adhesive tape has a step of peeling the electronic component processing adhesive tape, wherein the electronic component processing adhesive tape has a weight average molecular weight of 10,000 to 2,000,000 and a glass transition temperature. Adhesive binder polymer at -100 ° C to 100 ° C, photopolymerizable monomer having one or more polymerizable carbon-carbon double bonds, one or two polymerizable carbon-carbon double bonds It is a processing method of the electronic component which has an adhesive layer containing the photopolymerizable oligomer which has the above, and a photoinitiator.
The present invention is described in detail below.

As a result of intensive studies, the present inventors have found that an adhesive tape having an adhesive layer in which a photopolymerizable monomer, a photopolymerizable oligomer and a photopolymerization initiator are blended with a specific adhesive binder polymer is not irradiated with light such as ultraviolet rays. While exhibiting high adhesive strength, even in the presence of oxygen, such as in the atmosphere, by irradiating with light such as ultraviolet rays, the adhesive strength is reliably reduced, and it can be easily peeled off without leaving adhesive residue, The present invention has been completed.

In the conventional photocurable pressure-sensitive adhesive tape described in Patent Document 1 and the like, the initial pressure-sensitive adhesive property is exhibited by the photocurable pressure-sensitive adhesive itself, and the photocurable pressure-sensitive adhesive is crosslinked and cured by irradiation with light such as ultraviolet rays. This is considered to be a peeling mechanism that reduces the adhesive force. Therefore, it is considered that when the cross-linking curing reaction of the photocurable pressure-sensitive adhesive is inhibited by oxygen, the adhesive strength of the portion is insufficiently reduced, which may cause adhesive residue and the like.
In contrast, the peeling mechanism of the pressure-sensitive adhesive tape for processing electronic parts of the present invention is considered to be completely different from the conventional photo-curing pressure-sensitive adhesive tape. The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention exhibits initial pressure-sensitive adhesiveness by blending a photopolymerizable monomer, a photopolymerizable oligomer and a photopolymerization initiator into a pressure-sensitive adhesive binder polymer. That is, the photopolymerizable monomer and the photopolymerizable oligomer increase the adhesiveness of the adhesive layer due to its own adhesiveness, and are dispersed in the adhesive binder polymer to plasticize the adhesive binder polymer and increase the overall adhesiveness. In other words, it is considered to have a function as a “reactive plasticizer”. When such an adhesive tape for processing electronic parts of the present invention is irradiated with light such as ultraviolet rays, the photopolymerizable monomer and the photopolymerizable oligomer are crosslinked and cured, and the adhesiveness due to these is lost. In addition, the photopolymerizable monomer and photopolymerizable oligomer that worked as the “plasticizer” of the pressure-sensitive adhesive binder polymer before cross-linking and curing adversely inhibits the pressure-sensitive adhesive force of the pressure-sensitive adhesive binder polymer. By irradiating light such as ultraviolet rays by such a mechanism, it is considered that the adhesive tape for processing electronic parts becomes substantially non-adhesive as a whole. In addition, because of such a peeling mechanism, the pressure-sensitive adhesive tape for processing electronic parts of the present invention as a whole, even if the crosslinking curing reaction of the photopolymerizable monomer and photopolymerizable oligomer is partially inhibited by oxygen. It is considered that it can be easily peeled off without causing any adhesive residue without substantially affecting the lowering of the adhesive strength.

The processing method of the electronic component of this invention has the process of sticking the adhesive tape for electronic component processing to an electronic component.
The electronic component that is the target of the method of processing an electronic component according to the present invention is not particularly limited. For example, a semiconductor wafer, a metal foil as a circuit pattern material, a ceramic green sheet, an insulating circuit substrate, a thin glass substrate, a MEMS, An ultra-small wireless IC chip can be used.

The pressure-sensitive adhesive tape for processing electronic parts has a weight-average molecular weight of 10,000 to 2,000,000 and a glass transition temperature of −100 ° C. to 100 ° C., 1 polymerizable carbon-carbon double bond. Or a photopolymerizable monomer having one or more, a photopolymerizable oligomer having one or more polymerizable carbon-carbon double bonds, and a pressure-sensitive adhesive layer containing a photopolymerization initiator. . Such an adhesive tape for processing an electronic component is also one aspect of the present invention.

The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention contains a pressure-sensitive adhesive binder polymer.
The pressure-sensitive adhesive binder polymer serves as a binder for dispersing the photopolymerizable monomer, the photopolymerizable oligomer and the photopolymerization initiator. By including such a pressure-sensitive adhesive binder polymer, the pressure-sensitive adhesive tape for processing electronic parts of the present invention has high adhesiveness before irradiation with light such as ultraviolet rays, and no adhesive remains due to light irradiation such as ultraviolet rays even in the presence of oxygen. It is possible to achieve both the peelable performance.

The pressure-sensitive adhesive binder polymer has a weight average molecular weight of 10,000 and a maximum of 2,000,000. If it is less than 10,000, the cohesive force is low, and even if a photopolymerizable monomer or photopolymerizable oligomer is added, sufficient adhesive strength cannot be exhibited. If it exceeds 2 million, the moldability is low and it is difficult to form an adhesive layer. A preferable lower limit is 50,000, and a preferable upper limit is 1,800,000. A more preferable lower limit is 100,000, and a more preferable upper limit is 1,500,000.

The pressure-sensitive adhesive binder polymer has a glass transition temperature having a lower limit of −100 ° C. and an upper limit of 100 ° C. When the temperature is lower than −100 ° C., the adhesive strength of the polymer itself is increased, and the adhesive strength is not sufficiently lowered even after irradiation with light such as ultraviolet rays, which causes adhesive residue. If the temperature exceeds 100 ° C., sufficient adhesive strength cannot be exhibited even if a photopolymerizable monomer or photopolymerizable oligomer is added. A preferred lower limit is −80 ° C. and a preferred upper limit is 80 ° C. In addition, the glass transition temperature of an adhesive binder polymer can be easily adjusted by selecting the monomer which comprises a polymer.
In addition, in this specification, a glass transition temperature means the value measured by the method shown below. That is, first, a solution containing the polymer is thinly drawn on a glass plate and dried at 25 ° C. for 7 days to obtain a dry film. The obtained dry film is measured using a differential scanning calorimeter (DSC: manufactured by Rigaku Denki Co., Ltd.) under the conditions of a temperature increase rate of 20 ° C./min under a nitrogen atmosphere and a sample amount of 20 mg. .

The pressure-sensitive adhesive binder polymer is preferably low-tacky. When the adhesive binder polymer itself has high adhesiveness, even if it is irradiated with light such as ultraviolet rays to crosslink and cure the photopolymerizable monomer and photopolymerizable oligomer, the adhesive force cannot be sufficiently reduced. Sometimes. The preferable adhesiveness of the adhesive binder polymer cannot be determined more uniquely than the mixing ratio of the photopolymerizable monomer and the photopolymerizable oligomer, but when the mixing ratio of the adhesive binder polymer is large, Lower tackiness is preferred, and when the blending ratio is small, the tackiness may be relatively high.

The pressure-sensitive adhesive binder polymer is not particularly limited. For example, (meth) acrylic polymer, hydrogenated styrene / butadiene / styrene block copolymer, hydrogenated styrene / isoprene / styrene block copolymer, polar A hydrogenated styrene / butadiene / styrene block copolymer containing a group, a hydrogenated styrene / isoprene / styrene block copolymer containing a polar group, and the like are suitable. These may be used alone or in combination of two or more.

Although it does not specifically limit as said (meth) acrylic-type polymer, The copolymer of the (meth) acrylic-type monomer and (meth) acrylic acid ester-type monomer which have a functional group is suitable.
The (meth) acrylic monomer having the above functional group is not particularly limited, and examples thereof include carboxyl group-containing monomers such as acrylic acid and methacrylic acid; 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, acrylic acid 4 Hydroxyl group-containing monomers such as hydroxybutyl and 4-hydroxybutyl methacrylate; epoxy group-containing monomers such as glycidyl acrylate and glycidyl methacrylate; isocyanate group-containing monomers such as isocyanate ethyl acrylate and isocyanate ethyl methacrylate; amino acrylate Examples thereof include amino group-containing monomers such as ethyl and aminoethyl methacrylate.

The (meth) acrylic acid ester-based monomer is not particularly limited, and examples thereof include (meth) acrylic acid alkyl esters having 1 to 15 carbon atoms in the alkyl group. A monofunctional (meth) acrylic acid ester monomer may be mentioned as an example of the polymerizable monomer.

The copolymer may further include a component derived from a monomer copolymerizable with the (meth) acrylic monomer and the (meth) acrylic acid ester monomer as necessary.
The monomer copolymerizable with the (meth) acrylic monomer and the (meth) acrylic acid ester monomer is not particularly limited, and examples thereof include vinyl acetate, styrene, acrylonitrile, N-vinylpyrrolidone, and vinyl chloride.

The (meth) acrylic polymer may have a polymerizable carbon-carbon double bond. Such a (meth) acrylic polymer having a polymerizable carbon-carbon double bond is excellent in compatibility with a photoreactive monomer and a photoreactive oligomer described later, and is photoreactive by irradiation with light such as ultraviolet rays. It can react with reactive monomers and photoreactive oligomers.

For the (meth) acrylic polymer having a polymerizable carbon-carbon double bond, for example, a (meth) acrylic polymer having a functional group in the molecule is synthesized in advance, and the functional group and It can be obtained by reacting a compound having a reactive functional group and a polymerizable carbon-carbon double bond (hereinafter referred to as a functional group-containing unsaturated compound).
As the (meth) acrylic polymer having a functional group in the molecule, as in the case of a general (meth) acrylic polymer, the carbon number of the alkyl group is usually in the range of 1 to 15 (meth). It is obtained by copolymerizing an alkyl acrylate ester as a main monomer, a monomer having a functional group, and, if necessary, another modifying monomer copolymerizable therewith by a conventional method.
As said functional group containing unsaturated compound, the thing similar to the monomer which has a functional group mentioned above according to the functional group of the (meth) acrylic-type polymer which has a functional group in the said molecule | numerator can be used. For example, when the functional group of the polymer is a carboxyl group, an epoxy group-containing monomer or an isocyanate group-containing monomer is used. When the functional group is a hydroxyl group, an isocyanate group-containing monomer is used. When the functional group is an epoxy group, a carboxyl group is used. When the containing monomer or amino group-containing monomer is an amino group, an epoxy group-containing monomer is used.

Although the ratio of the polymerizable carbon-carbon double bond in the (meth) acrylic polymer having the polymerizable carbon-carbon double bond is not particularly limited, the preferable upper limit is 3.0 meq / g. . If it exceeds 3.0 milliequivalents / g, crosslinking is excessively performed and the adhesiveness to the adherend is lowered, which is not preferable. A more preferable upper limit is 2.0 meq / g or less. The lower limit is not particularly limited, but if it is less than 0.0005 meq / g, the effect of having a substantially polymerizable carbon-carbon double bond cannot be obtained.

The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention contains a photopolymerizable monomer having one or more polymerizable carbon-carbon double bonds. The photopolymerizable monomer imparts adhesive force to the pressure-sensitive adhesive tape for processing electronic parts of the present invention. On the other hand, since it is crosslinked and cured when irradiated with light such as ultraviolet rays, it can be peeled off without any adhesive residue due to a rapid drop in adhesive strength.

Although it does not specifically limit as said photopolymerizable monomer, For example, (meth) acrylic acid, the (meth) acrylic acid ester type monomer etc. which have 1 or 2 or more of polymerizable carbon-carbon double bonds are mentioned.

Examples of the (meth) acrylic acid ester monomer having one polymerizable carbon-carbon double bond include methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, and isopropyl (meth) acrylate. , Butyl (meth) acrylate, amyl (meth) acrylate, isobutyl (meth) acrylate, t-butyl (meth) acrylate, pentyl (meth) acrylate, isoamyl (meth) acrylate, hexyl (meth) acrylate, heptyl (meth) acrylate , Octyl (meth) acrylate, isooctyl (meth) acrylate, 2-ethylhexyl (meth) acrylate, nonyl (meth) acrylate, decyl (meth) acrylate, isodecyl (meth) acrylate, undecyl (meta Acrylate, dodecyl (meth) acrylate, lauryl (meth) acrylate, octadecyl (meth) acrylate, stearyl (meth) acrylate, isostearyl (meth) acrylate, tetrahydrofurfuryl (meth) acrylate, butoxyethyl (meth) acrylate, ethoxydiethylene glycol (Meth) acrylate, benzyl (meth) acrylate, cyclohexyl (meth) acrylate, phenoxyethyl (meth) acrylate, polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, methoxyethylene glycol mono (meth) acrylate, ethoxy Ethyl (meth) acrylate, ethoxyethoxyethyl (meth) acrylate, methoxy polyethylene glycol (Meth) acrylate, methoxypolypropylene glycol (meth) acrylate, dicyclopentadienyl (meth) acrylate, dicyclopentanyl (meth) acrylate, dicyclopentenyl (meth) acrylate, tricyclodecanyl (meth) acrylate , Isobornyl (meth) acrylate, isobornyl (meth) acrylate, adamantyl (meth) acrylate, dimethylaminoethyl (meth) acrylate, diethylaminoethyl (meth) acrylate, 7-amino-3,7-dimethyloctyl (meth) acrylate, ( (Meth) acryloylmorpholine, 2- (meth) acryloyloxyethyl phthalic acid, 2- (meth) acryloyloxyethyl hexahydrophthalic acid, 2- (meth) acryloyloxypropyl phthalate Luric acid, 2- (meth) acryloyloxypropyltetrahydrophthalic acid, 2- (meth) acryloyloxypropylhexahydrophthalic acid, 2- (meth) acryloyloxyethyl succinic acid, trifluoroethyl (meth) acrylate, tetrafluoropropyl (Meth) acrylate, hexafluoropropyl (meth) acrylate, octafluoropentyl (meth) acrylate, heptadecafluorodecyl (meth) acrylate, mono [2- (meth) acryloyloxyethyl] phosphate, mono [2- (meth) [Acryloyloxyethyl] diphenyl phosphate, mono [2- (meth) acryloyloxypropyl] phosphate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 4- Dorokishibuchiru (meth) hydroxy C1-C6 alkyl acrylates such as (meth) acrylate.

Examples of commercially available (meth) acrylic acid ester monomers having one polymerizable carbon-carbon double bond include Aronics M101, M102, M110, M111, M113, M114, M117, M120, M152, and M154. M5300, M5400, M5500, M5600 (above, manufactured by Toagosei Co., Ltd.), KAYARAD TC-110S, R-128H, R629, R644 (above, manufactured by Nippon Kayaku Co., Ltd.), IPAA, AIB, SBAA, TBA, IAAA, HEXA , CHA, NOAA, IOAA, INAA, LA, TDA, MSAA, CAA, HDAA, LTA, STA, ISAA-1, ODAA, NDAA, IBXA, ADAA, TCDA, 2-MTA, DMA, Biscote # 150, # 150D, # 155, # 158, # 1 0, # 190, # 190D, # 192, # 193, # 220, # 320, # 2311HP, # 2000, # 2100, # 2150, # 2180, MTG, HEA, HPA, 4HBA (Osaka Organic Chemical Co., Ltd.) Manufactured), NK ester M-20G, M-40G, M-90G, M-230G, CB-1, SA, S, AMP-10G, AMP-20G, AMP-60G, AMP-90G, A-SA, NLA (Shin Nakamura Chemical Co., Ltd.), ACMO (Kojinsha), Light Acrylate IA-A, LA, SA, BO-A, EC-A, MTG-A, DPM-A, PO -A, P-200A, THF-A, IB-XA, HOA-MS, HOA-MPL, HOA-MPE, HOA-HH, IO-A, BZ-A, NP-EA, NP-10EA, HOB-A , FA-108, P-1A, epoxy ester M-600A, light ester HOA, light ester HOP-A, light ester HOP, light ester HOB, light ester P-1M (above, manufactured by Kyoeisha Chemical Co., Ltd.), FA-511, FA-512A, FA-513A (manufactured by Hitachi Chemical Co., Ltd.), AR-100, MR-100, MR-200, MR-60 (manufactured by Daihachi Chemical Industry Co., Ltd.), JAMP-100, JAMP-514 , JPA-514 (above, manufactured by Johoku Chemical Co., Ltd.) and the like.

Examples of the (meth) acrylic acid ester monomer having two or more polymerizable carbon-carbon double bonds include ethylene glycol di (meth) acrylate, propylene glycol di (meth) acrylate, and 1,4-butanediol. Di (meth) acrylate, 1,6-hexanediol di (meth) acrylate, 1,9-nonanediol di (meth) acrylate, diethylene glycol di (meth) acrylate, triethylene glycol di (meth) acrylate, tetraethylene glycol di (Meth) acrylate, polyethylene glycol di (meth) acrylate, dipropylene glycol di (meth) acrylate, tripropylene glycol di (meth) acrylate, polypropylene glycol di (meth) acrylate, neopentyling Cold di (meth) acrylate, hydroxypivalate neopentyl glycol di (meth) acrylate, trimethylolpropane tri (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, ditrimethylolpropane tetra (meth) Acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, trimethylolpropane trioxyethyl (meth) acrylate, trimethylolpropane polyoxyethyl (meth) acrylate, trimethylolpropane trioxypropyl (meth) ) Acrylate, Trimethylolpropane polyoxyethyl (meth) acrylate, Tris (2-hydroxyethyl) Cyanurate di (meth) acrylate, tris (2-hydroxyethyl) isocyanurate tri (meth) acrylate, ethylene oxide-added bisphenol A di (meth) acrylate, ethylene oxide-added bisphenol F di (meth) acrylate, propylene oxide-added bisphenol A di (meth) Acrylate, propylene oxide-added bisphenol F di (meth) acrylate, tricyclodecane dimethanol di (meth) acrylate, bisphenol A diepoxy di (meth) acrylate, bisphenol F diepoxy di (meth) acrylate, bis [2- (meth) acryloyloxyethyl ] Phosphate, bis [2- (meth) acryloyloxypropyl] phosphate, tris [2- (meth) acryloyloxyethyl] ] Phosphate etc. are mentioned.

Examples of commercially available (meth) acrylic acid ester monomers having two or more polymerizable carbon-carbon double bonds include SA-1002, SA-2006, SA-2007, SA-4100, SA-5001, and SA. -6000, SA-7600, SA-8000, SA-9000 (Mitsubishi Chemical Corporation), Biscote # 195, # 195D, # 214HP, # 215, # 215D, # 230, # 230D, # 260, # 295 # 295D, # 300, # 310HP, # 310HG, # 312, # 335HP, # 335D, # 360, GPT, # 400, V # 540, # 700, GPT, Biscote 3PA (above, manufactured by Osaka Organic Chemical Industry Co., Ltd.) ), KAYARAD MANDA, R-526, NPGDA, PEG400DA, R-167, HX-220, H X-620, R-551, R-712, R-604, R-684, GPO-303, TMPTA, THE-330, TPA-320, TPA-330, PET-30, RP-1040, T-1420, DPHA, D-310, D-330, DPCA-20, DPCA-30, DPCA-60, DPCA-120 (manufactured by Nippon Kayaku Co., Ltd.), Aronix M-210, M-208, M-215, M- 220, M-225, M-233, M-240, M-245, M-260, M-270, M-305, M-309, M-310, M-315, M-320, M-350, M-360, M-400, M-408, M-450 (above, manufactured by Toagosei Co., Ltd.), SR-212, SR-213, SR-355 (above, made by Sartomer), Lipoxy SP-1507 As mentioned above, Showa High Polymer Co., Ltd.), Light Ester P-2M, P-2A (above, Kyoeisha Chemical Co., Ltd.), EB-169, EB-179, EB-3603, R-DX63182 (above, Daicel UCB) Product), Bremer PDE150, PDE200, ADE200 (manufactured by NOF Corporation) and the like.

The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention contains a photopolymerizable oligomer having one or more polymerizable carbon-carbon double bonds. The said photopolymerizable oligomer gives adhesive force to the adhesive tape for electronic component processing of this invention. On the other hand, since it is crosslinked and cured when irradiated with light such as ultraviolet rays, it can be peeled off without any adhesive residue due to a rapid drop in adhesive strength.

In the present specification, an oligomer means a low molecular polymer having a certain repeating unit, and means a polymer having a weight average molecular weight of 500 to 20,000. If the weight average molecular weight is less than 500, the adhesive strength before light irradiation may be insufficient, and if it exceeds 20,000, the adhesive force will not be sufficiently reduced after irradiation with light such as ultraviolet rays. The rest may occur. A preferred upper limit is 10,000.

Although it does not specifically limit as said photopolymerizable oligomer, For example, a polyurethane (meth) acrylate, an epoxy (meth) acrylate, polyester (meth) acrylate, polyether (meth) acrylate, silicone type acrylate etc. are mentioned. These photopolymerizable oligomers may be used alone or in combination of two or more.

As a commercial item of the said polyurethane (meth) acrylate, NK oligo UA-340P, UA-511, UA-4200, UA-512, UA-122P, U-4HA, U-6HA, U-6LPA, U- 324A, U-15HA, U-108A, U-200AX, UA-5201A, UA-4100, UA-4400 (manufactured by Shin-Nakamura Chemical Co., Ltd.), Light Tack PSA-705, PSA-805, PSA-901, PSA-903 (above, manufactured by Kyoei Co., Ltd.) Orestar RA1500, RA1574, RA1573, RA1353 (above, manufactured by Mitsui Chemicals), KAYARAD UX-2201, UX-2301, UX-3204, UX-6101, MU-2100 (or Nippon Kayaku Co., Ltd.), CN-962, CN-964, CN-965, CN 968, CN-980, CN-981, CN-983, CN-972, CN-975, CN-978 (sold by Sartomer), Ebecryl 230, 270, 8402, 8804, 8807, 9260, 8210, 210, 4827 , 6700, 220 (manufactured by Daicel UCB) and the like.

As a commercial item of the said epoxy (meth) acrylate, for example, Lipoxy VR-77, VR-90, VR-60, SP-1506, SP-1509, SP-1519, SP-1563 (above, Showa Polymer Co., Ltd. make) ), CN-104, CN-116, CN-118, CN-119, CN-120, CN-124 (manufactured by Sartomer), Biscote 540 (manufactured by Osaka Organic Chemical Industry), EA-1020, EA-1025, EA-1026, EA-1028 (manufactured by Shin-Nakamura Chemical Co., Ltd.), Ebecryl 600, 2958, 3700, 3701, 3708, 6040 (manufactured by Daicel UCB), polyester (meth) acrylate, Ebecryl 84, 657, 810 (manufactured by Daicel UCB), Olester RA2003, As A1050, RA1328, RA1491, RA1205 (above, Mitsui Chemicals), Aronix M-6100, 6200, 6500, 7100 (above, Toagosei Co., Ltd.), polyether (meth) acrylate, Blemmer PDE400, PDE600, PDE1000 ADE400, 30PDC-950BH, PP-500, PP-800, 55PET-800, PME-4000, PSE-1300 (manufactured by NOF Corporation), aliphatic (meth) acrylates, TEAI-1000 (Nippon Soda) ), UC-1 (manufactured by Kuraray Co., Ltd.), and silicone-based (meth) acrylates such as X-22-164A, X-22-164B, X-22-164C (manufactured by Shin-Etsu Chemical Co., Ltd.), etc. Can be mentioned.

As the pressure-sensitive adhesive binder polymer, photopolymerizable monomer, and photopolymerizable oligomer in the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention, it is preferable to select a combination that is mutually compatible. For example, when the pressure-sensitive adhesive binder polymer is a copolymer of a (meth) acrylic monomer having a functional group and a (meth) acrylic acid ester monomer, the (meth) acrylic acid ester is used as the photopolymerizable monomer. It is preferable to select polyurethane (meth) acrylate, epoxy (meth) acrylate, polyester (meth) acrylate, polyether (meth) acrylate, or silicone-based acrylate as the photopolymerizable oligomer.

In the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for electronic component processing of the present invention, the blending ratio of the pressure-sensitive adhesive binder polymer, photopolymerizable monomer and photopolymerizable oligomer is the blending of the pressure-sensitive adhesive binder polymer in a total of 100 parts by weight. The preferable lower limit of the amount is 1 part by weight, and the preferable upper limit is 95 parts by weight. If the amount is less than 1 part by weight, the adhesive strength is not sufficiently reduced after irradiation with light such as ultraviolet rays, and adhesive residue may occur at the time of peeling. If the amount exceeds 95 parts by weight, the adhesive strength before light irradiation is reduced. It may be insufficient. A more preferred lower limit is 20 parts by weight, and a still more preferred lower limit is 30 parts by weight.

In the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for electronic component processing of the present invention, the preferred lower limit of the amount of the photopolymerizable monomer in a total of 100 parts by weight of the pressure-sensitive adhesive binder polymer, photopolymerizable monomer and photopolymerizable oligomer is 1 weight. Parts, and the preferred upper limit is 70 parts by weight. If it is less than 1 part by weight, the adhesive strength before light irradiation may be insufficient, and if it exceeds 70 parts by weight, reduction of the adhesive force after irradiation with light such as ultraviolet rays may be insufficient. A more preferred lower limit is 5 parts by weight, and a more preferred upper limit is 60 parts by weight.

In the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for electronic component processing of the present invention, the preferred lower limit of the blending amount of the photopolymerizable oligomer in a total of 100 parts by weight of the pressure-sensitive adhesive binder polymer, photopolymerizable monomer and photopolymerizable oligomer is 5%. Parts, and the preferred upper limit is 60 parts by weight. If it is less than 5 parts by weight, the adhesive strength before light irradiation may be insufficient, and if it exceeds 60 parts by weight, reduction in adhesive force after irradiation with light such as ultraviolet rays may be insufficient. A more preferred lower limit is 10 parts by weight, and a more preferred upper limit is 55 parts by weight.

The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts of the present invention contains a photopolymerization initiator.
It does not specifically limit as said photoinitiator, A conventionally well-known thing can be used. Specifically, for example, 2,2-dimethoxy-1,2-diphenylethane-1-one, 2-hydroxy-2-methyl-1-phenyl-propan-1-one, 1-hydroxy-cyclohexyl phenyl ketone, oligo [2-Hydroxy-2-methyl-1- [4- (1-methylvinyl) phenyl] propanone], bis (2,4,6-trimethylbenzoyl) phenylphosphine oxide and the like are preferable. These photopolymerization initiators may be used alone, but it is preferable to use two or more kinds in combination.

Examples of commercially available photopolymerization initiators include Irgacure 184, 500, 651, 819, Darocur 1173, 4265 (manufactured by Ciba Specialty Chemicals), EsacureKK, KIP150, 75LT (manufactured by Ramberty). It is done.

As the photopolymerization initiator, for the purpose of adjusting the curing rate, the following photopolymerization initiator can be used alone or in combination with the above-described initiator or alone. Examples of such a photopolymerization initiator include 3-methylacetophenone, 2,2-dimethoxy-2-phenylacetophenone, xanthone, fluorenone, benzaldehyde, fluorene, anthraquinone, triphenylamine, carbazole, 3-methylacetophenone, benzophenone. 4-chlorobenzophenone, 4,4′-dimethoxybenzophenone, 4,4′-diaminobenzophenone, benzoin ethyl ether, benzoin propyl ether, Michler's ketone, benzyldimethyl ketal, 1- (4-isopropylphenyl) -2-hydroxy-2 -Methylpropan-1-one, 1- (4-dodecylphenyl) -2-hydroxy-2-methylpropan-1-one, 4- (2-hydroxyethoxy) phenyl- (2-hydroxy -2-propyl) ketone, 2-methyl-1- [4- (methylthio) phenyl] -2-morpholino-propan-1-one, 2,4,6-trimethylbenzoylphenyl phosphinate, 2,4,6 -Trimethylbenzoyldiphenylphosphine oxide, 2-benzyl-2-dimethylamino-1- (4-morpholinophenyl) -butan-1-one, bis (2,6-dimethoxybenzoyl) -2,4,4-trimethylpentyl Examples include phosphine oxide, methyl benzoyl formate, thioxanthone, diethyl thioxanthone, 2-isopropyl thioxanthone, and 2-chlorothioxanthone.

Examples of commercially available photopolymerization initiators include Irgacure 261, 369, 379, 907, 1700, 1800, 1850, 2959, CGI-403, Darocur 953, 1116, 1664, 2273 (above, Ciba Specialty). Chemicals), lucillin TPO, LR8728, LR8883 (above, manufactured by BASF), Evecryl P36 (manufactured by Daicel UCB), Vicure 55 (manufactured by Akzo), Kayacure CTX, DETX, BP-100, BMS, 2-EAQ (manufactured by Nippon Kayaku Co., Ltd.) and the like.

As a compounding quantity of the said photoinitiator, a preferable minimum is 0.01 weight part and a preferable upper limit is 20 weight part with respect to a total of 100 weight part of the said adhesive binder polymer, a photopolymerizable monomer, and a photopolymerizable oligomer. It is. If it is less than 0.01 part by weight, the photopolymerizable monomer and the photopolymerizable oligomer may not be sufficiently cured, and if it exceeds 20 parts by weight, the curability will no longer be affected and the electronic components will be contaminated. Cause. A more preferred lower limit is 0.05 parts by weight, and a more preferred upper limit is 15 parts by weight.

The pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape for processing electronic parts according to the present invention may contain other resin components, ultraviolet absorbers, light stabilizers, anti-aging agents, antifoaming agents, leveling agents, antistatic agents, interfaces as necessary. You may contain additives, such as an activator, a storage stabilizer, a thermal polymerization inhibitor, a plasticizer, a wettability improving agent, an adhesion imparting agent, a tackifier (tackifier), and a curing agent.

Examples of the other resin component include epoxy resin, polyamide, polyamideimide, polyurethane, polybutadiene, chloroprene, polyether, polyester, pentadiene derivative, SBS (styrene / butadiene / styrene block copolymer), and SIS (styrene / isoprene). / Styrene block copolymer), petroleum resin, xylene resin, ketone resin, fluorine-based oligomer, silicone-based oligomer, polysulfide-based oligomer, and the like.

Examples of the ultraviolet absorber include benzotriazole type and triazine type ultraviolet absorbers, and commercially available products include TINUVIN P, 234, 320, 326, 327, 328, 213, 400 (above, Ciba Specialty Chemicals), Sumisorb 110, 130, 140, 220, 250, 300, 320, 340, 350, 400 (above, manufactured by Sumitomo Chemical Co., Ltd.) and the like.

Examples of the anti-aging agent include a phenol-based anti-aging agent, an allylamine-based anti-aging agent, a ketone amine-based anti-aging agent and the like, and commercially available products thereof include Antigen W, S, P, 3C, 6C, RD-G, FR, AW (above, manufactured by Sumitomo Chemical Co., Ltd.) and the like.

Examples of the antifoaming agent include Si such as Floren AC-202, AC-300, AC-303, AC-326F, AC-900, AC-1190, and AC-2000 (manufactured by Kyoeisha Chemical Co., Ltd.). Organic copolymer containing no atoms or F atoms; Florene AC-901, AC-950, AC-1140, AO-3, AO-4OH (manufactured by Kyoeisha Chemical Co., Ltd.), FS1265, SH200, SH5500, SC5540, SC5570 , F-1, SD5590 (above, manufactured by Toray Dow Corning Silicone Co., Ltd.) and the like; Megafac F-142D, F-144D, F-178K, F-179, F-815 (above, Fluorine atom-containing antifoaming agents such as Dainippon Ink and Chemicals).

Examples of the leveling agent include polyflow no. 7, no. 38, no. 50E, S, 75, No. 75, no. 77, no. 90, no. 95, no. 300, no. 460, ATF, KL-245 (manufactured by Kyoeisha Chemical Co., Ltd.) and the like.

Examples of the adhesion-imparting agent include thiol compounds having an alkoxysilyl group, phosphate ester compounds, and the like. These compounds are particularly effective in imparting adhesion to the metal surface.
Examples of the thiol compound having an alkoxysilyl group include mercaptoalkyl-mono, di- or tri-methoxysilane such as γ-mercaptopropyltrimethoxysilane, γ-mercaptopropylmethylmonomethoxysilane, and γ-mercaptopropylmethyldimethoxysilane. Examples of these commercially available products include SH6062, AY43-062 (manufactured by Toray Dow Corning Silicone), Sila Ace S810 (manufactured by Chisso), KBM803 (manufactured by Shin-Etsu Chemical Co., Ltd.), and the like.
Examples of the phosphoric acid ester compound include mono [2- (meth) acryloyloxyethyl] phosphate, mono [2- (meth) acryloyloxyethyl] diphenyl phosphate, mono [2- (meth) acryloyloxypropyl] phosphate, Bis [2- (meth) acryloyloxyethyl] phosphate, bis [2- (meth) acryloyloxypropyl] phosphate, tris [2- (meth) acryloyloxyethyl] phosphate and the like, and these commercially available products include Light ester P-1M, P-2M, light acrylate P-1A, P-2A (above, Kyoeisha Chemical Co., Ltd.), KAYAMER PM-2, PM-21 (above, Nippon Kayaku Co., Ltd.) etc. are mentioned.

Examples of the tackifier (tackifier) include alicyclic saturated hydrocarbon resins and rosin ester resins, and commercially available products include Alcon P-70, P-90, P-100, M- 90, M-100, M-135, SP-10, KR-1840, KR-1842, Superesters A-75, A-115 (above, manufactured by Arakawa Chemical Industries, Ltd.).

As said hardening | curing agent, the compound etc. which have an isocyanate group are mentioned, for example, Coronate (made by Nippon Polyurethane Industry Co., Ltd.) is mentioned as a commercial item.

The thickness of the pressure-sensitive adhesive layer in the pressure-sensitive adhesive tape for processing electronic parts of the present invention may be selected depending on the irradiation amount of ultraviolet rays and the adhesive strength, but the preferred lower limit is 1 μm, the preferred upper limit is 1000 μm, and the more preferred lower limit is A more preferable upper limit is 5 μm, and a more preferable lower limit is 10 μm, and a more preferable upper limit is 100 μm.

The pressure-sensitive adhesive tape for processing electronic parts of the present invention may be a single-sided pressure-sensitive adhesive tape in which a pressure-sensitive adhesive layer is formed only on one surface of a substrate, and is a double-sided pressure-sensitive adhesive tape in which a pressure-sensitive adhesive layer is formed on both sides. Also good.
Although it does not specifically limit as said base material, It is preferable that it is what permeate | transmits or passes light, For example, transparent, such as an acryl, an olefin, a polycarbonate, vinyl chloride, ABS, a polyethylene terephthalate (PET), nylon, urethane, a polyimide And a sheet made of a simple resin, a sheet having a network structure, a sheet having holes, and the like.

The method for producing the pressure-sensitive adhesive tape for processing electronic parts of the present invention is not particularly limited. For example, the above-mentioned pressure-sensitive adhesive binder polymer, photopolymerizable monomer, photopolymerizable oligomer, photopolymerization initiator, and addition to be added as necessary A solution obtained by dissolving a predetermined amount of an agent in an appropriate solvent is applied onto a release substrate so as to have a predetermined thickness using a doctor knife, a spin coater, etc., and then a coating film is formed. Examples include a method of transferring the film to a substrate and volatilizing the solvent.

The solvent is not particularly limited. For example, aromatic solvents such as toluene and xylene; ketone solvents such as acetone, methyl ethyl ketone, methyl isobutyl ketone and 2-methyl-5-hexanone; esters such as ethyl acetate and butyl acetate Examples of the solvent include halogen solvents such as methyl chloride, dichloromethane and dichloroethane; and glycol ether solvents such as ethylene glycol ethyl ether, propylene glycol methyl ether, propylene glycol-n-propyl ether and propylene glycol methyl ether acetate. These solvents may be used alone or in combination of two or more.

In the method for processing an electronic component according to the present invention, a step of processing the electronic component to which the adhesive tape is attached is then performed.
The processing is not particularly limited, and examples thereof include processing usually applied to electronic components such as grinding processing, dicing processing, circuit transfer processing, and MEMS manufacturing.

Specifically, as the cutting process, for example, a desired thickness is applied while applying cutting water using a polishing grindstone that rotates at high speed on the surface of the electronic component to which the adhesive tape is affixed. The process etc. which grind to the thickness are mentioned. When the pressure-sensitive adhesive tape is a double-sided pressure-sensitive adhesive tape, a support plate such as a glass plate or a resin plate may be attached via the double-sided pressure-sensitive adhesive tape. By reinforcing with such a support plate, cutting can be performed without damaging the electronic component.

Specific examples of the dicing process include a process of cutting an electronic component to which the adhesive tape is attached using a dicing blade. In this case, the adhesive tape serves as a so-called dicing tape. Micro cutting of small micro chips is also included in so-called dicing processing.

Specifically, as the circuit transfer processing, for example, first, an electronic component (metal foil) to which the adhesive tape is attached is sputtered to form a circuit pattern on the adhesive tape to obtain a transfer material for circuit formation. In addition, a process of hot pressing an insulating substrate in a semi-cured state or a ceramic green sheet on the circuit pattern of the circuit forming transfer material can be used.

Specifically, the MEMS manufacturing process includes, for example, a printer head, a pressure sensor, an acceleration sensor, a gyroscope, a digital mirror device, a gas chromatograph, a micromotor, a comb-shaped actuator, an optical scanner, a cantilever, a flow path module, and an HDD. For example, it is possible to process a device in which electronic components such as a head, an optical switch, and a photographing element are integrated on a silicon substrate.

In the electronic component processing method of the present invention, the step of peeling the electronic component processing adhesive tape from the processed electronic component is then performed by irradiating light.
The pressure-sensitive adhesive tape for processing electronic parts of the present invention reliably reduces the adhesive strength by irradiating with light such as ultraviolet rays even in the presence of oxygen, and the adhesive remains without operation in a conventional nitrogen atmosphere. The adhesive tape can be surely peeled off without causing such as.

According to the present invention, a method for processing an electronic component using an adhesive tape for processing an electronic component, in which an adhesive residue or the like is generated only by irradiating light such as ultraviolet rays even in the presence of oxygen in the atmosphere or the like. The processing method of the electronic component which can peel the adhesive tape for electronic component processing without, and the adhesive tape for electronic component processing used for the processing method of this electronic component can be provided.

Hereinafter, embodiments of the present invention will be described in more detail with reference to examples. However, the present invention is not limited to these examples.

(Preparation of adhesive binder polymer)
(1) Preparation of adhesive binder polymer 1 150 parts by weight of toluene, 60 parts by weight of n-butyl acrylate, 35 parts by weight of methyl methacrylate, 5 parts by weight of 2-hydroxyethyl methacrylate, and 0.4 parts by weight of azobisisobutyronitrile. After putting into a 4-necked flask and reacting by stirring at 70 ° C. for 6 hours in a nitrogen atmosphere, the reaction was further performed at 80 ° C. for 1 hour to obtain a toluene solution of the pressure-sensitive adhesive binder polymer 1.

(2) Preparation of adhesive binder polymer 2 150 parts by weight of toluene, 90 parts by weight of n-butyl acrylate, 10 parts by weight of methyl methacrylate, 5 parts by weight of 2-hydroxyethyl methacrylate, and 0.4 parts by weight of azobisisobutyronitrile. After putting into a 4-necked flask and reacting by stirring at 70 ° C. for 6 hours in a nitrogen atmosphere, the mixture was further reacted at 80 ° C. for 1 hour to obtain a toluene solution of the adhesive binder polymer 2.

(3) Preparation of pressure-sensitive adhesive binder polymer 3 150 parts by weight of toluene, 20 parts by weight of n-butyl acrylate, 75 parts by weight of methyl methacrylate, 5 parts by weight of 2-hydroxyethyl methacrylate, and 0.4 parts by weight of azobisisobutyronitrile. After putting into a 4-necked flask and reacting by stirring at 70 ° C. for 6 hours in a nitrogen atmosphere, the reaction was further performed at 80 ° C. for 1 hour to obtain a toluene solution of the pressure-sensitive adhesive binder polymer 3.

About the obtained adhesive binder polymers 1-3, the weight average molecular weight and the glass transition temperature were measured with the following method.
The results are shown in Table 1.

(Measurement of weight average molecular weight)
By GPC method (Gel Permeation Chromatography method), column: TSK gel Multipore HXL-IV × 2 (manufactured by Tosoh Corporation), eluent: tetrahydrofuran (THF), concentration: 0.05 wt%, temperature: 40 ° C., injection The weight average molecular weight in terms of polystyrene was determined under the conditions of amount: 100 μL, flow rate: 1 mL / min.

(Measurement of glass transition temperature)
The toluene solution of the adhesive binder polymers 1 to 3 is thinly coated on a commercially available release substrate (trade name: HS-10; manufactured by Higashiyama Film Co., Ltd.) and dried at 25 ° C. for 7 days to obtain a dry film. It was. 20 mg of the obtained dried film was weighed and measured using a differential scanning calorimeter (manufactured by Rigaku Denki Co., Ltd.) at a rate of temperature increase of 20 ° C./min under a nitrogen atmosphere to determine the glass transition temperature. .

(Example 1)
50 parts by weight of the adhesive binder polymer 1, 25 parts by weight of dipentaerythritol hexaacrylate (trade name: KAYARAD DPHA; manufactured by Nippon Kayaku Co., Ltd.) as a photopolymerizable monomer, and a polyurethane tetrafunctional acrylate (molecular weight 600) as a photopolymerizable oligomer , Trade name: NK Oligo U-4HA; manufactured by Shin-Nakamura Chemical Co., Ltd.) and α-hydroxyacetophenone (trade name: Irgacure 184; manufactured by Ciba Specialty Chemicals) as a photopolymerization initiator. 2 parts by weight and 1 part by weight of 2,4,6-trimethylbenzoyldiphenylphosphine oxide (trade name: DAROCURE TPO; manufactured by Ciba Specialty Chemicals), toluene contained in the adhesive binder polymer and methyl ethyl keto added separately The mixture was mixed with an adhesive to obtain an adhesive resin composition.

To an applicator so that the film thickness after drying is 30 μm on a commercially available release substrate (trade name: HS-10; manufactured by Higashiyama Film Co., Ltd.) made of polyethylene terephthalate (PET). And then dried at 110 ° C. for 5 minutes to obtain an adhesive layer.
Next, a base material made of commercially available polyethylene terephthalate (trade name: Cosmo Shine 4300; manufactured by Higashiyama Film Co., Ltd.) is separately prepared as the base material for the pressure-sensitive adhesive sheet, and a release base material and a base material for the pressure-sensitive adhesive sheet are prepared. Laminate the pressure-sensitive adhesive layer formed on the surface of the release substrate, press the pressure-sensitive adhesive layer onto the pressure-sensitive adhesive sheet substrate with a 2 kg rubber roll, and transfer the pressure-sensitive adhesive layer to the pressure-sensitive adhesive sheet substrate. And the adhesive tape for electronic component processing in which the adhesive layer was formed in the single side | surface of a base material was obtained.

(Examples 2 to 8)
An adhesive tape for processing electronic parts was obtained in the same manner as in Example 1 except that an adhesive resin composition was prepared with the composition shown in Table 2. The compounds used are as follows. Trimethylolpropane triacrylate (trade name: TMPTA; manufactured by Daicel UCB), polyester hexafunctional acrylate (molecular weight 2300, trade name: CN2300; manufactured by Sartomer), polyurethane bifunctional acrylate (molecular weight 500, trade name: Ebecryl 270; (Daicel UCB).

(Comparative Examples 1-3)
An adhesive tape for processing electronic parts was obtained in the same manner as in Example 1 except that an adhesive resin composition was prepared with the composition shown in Table 3.

(Comparative Example 4)
The following compounds were dissolved in ethyl acetate and polymerized by irradiating with ultraviolet rays to obtain an acrylic copolymer having a weight average molecular weight of 700,000.
2-ethylhexyl acrylate 100 parts by weight Acrylic acid 1 part by weight 2-hydroxyethyl acrylate 5 parts by weight Photopolymerization initiator 0.2 part by weight (Irgacure 651, 50% ethyl acetate solution)
0.01 parts by weight of lauryl mercaptan 0.01 parts by weight of resin solid content of 100 parts by weight of the ethyl acetate solution containing the acrylic copolymer was added and reacted with 3.5 parts by weight of 2-isocyanatoethyl methacrylate. 30 parts by weight of urethane acrylate (10 functional) (manufactured by Shin-Nakamura Chemical Co., Ltd., NK Oligo U324A), 0.5 parts by weight of polyisocyanate, photopolymerization initiator with respect to 100 parts by weight of resin solid content of the later ethyl acetate solution (Irgacure 651) 0.1 part by weight was mixed to prepare an ethyl acetate solution of a photocurable pressure-sensitive adhesive having a (meth) acrylate group as a polymerizable reactive group.

The obtained photocurable adhesive ethyl acetate solution is dried on a commercially available release substrate made of polyethylene terephthalate (PET) (trade name: HS-10; manufactured by Higashiyama Film Co., Ltd.), and the film thickness becomes 30 μm after drying. So that it was applied with an applicator and dried at 110 ° C. for 5 minutes to obtain an adhesive layer. Next, a base material made of commercially available polyethylene terephthalate (trade name: Cosmo Shine 4300; manufactured by Higashiyama Film Co., Ltd.) is separately prepared as the base material for the pressure-sensitive adhesive sheet, and a release base material and a base material for the pressure-sensitive adhesive sheet are prepared. Laminate the pressure-sensitive adhesive layer formed on the surface of the release substrate, press the pressure-sensitive adhesive layer onto the pressure-sensitive adhesive sheet substrate with a 2 kg rubber roll, and transfer the pressure-sensitive adhesive layer to the pressure-sensitive adhesive sheet substrate. And the adhesive tape for electronic component processing in which the adhesive layer was formed in the single side | surface of a base material was obtained.

(Evaluation)
Using the adhesive tapes for electronic component processing manufactured in Examples 1 to 8 and Comparative Examples 1 to 4, the silicon wafer was diced by the following steps.

(Attaching process of silicon wafer and adhesive tape)
The release substrate that protects the adhesive layer of the adhesive tape for electronic component processing is peeled off and attached to a silicon wafer having a diameter of 20 cm and a thickness of about 750 μm and a dicing frame, and then attached to the dicing frame via the adhesive tape for electronic component processing. The obtained composition was obtained.

(Dicing process)
A silicon wafer attached to the dicing frame via an adhesive tape for processing electronic components was diced into 5 mm square chip shapes.
Although it was visually observed whether or not dicing failure occurred due to factors such as movement of the silicon wafer during dicing, any one of the adhesive tapes for processing electronic components manufactured in Examples 1 to 8 and Comparative Examples 1 to 4 was used. However, sufficient adhesive strength was exhibited and no occurrence of dicing failure was observed.

(Adhesive tape peeling process)
From the pressure-sensitive adhesive tape surface side of the chip-like body obtained by dicing in the atmosphere, irradiation with ultraviolet rays of 365 nm using an ultrahigh pressure mercury lamp was performed for 1 minute while adjusting the illuminance so that the irradiation intensity was 50 mW / cm ² . Thereafter, the chip was picked up, and the obtained chip was visually observed to see if there was any adhesive residue on the periphery of the chip.
The results are shown in Tables 2 and 3.

According to the present invention, a method for processing an electronic component using an adhesive tape for processing an electronic component, in which an adhesive residue or the like is generated only by irradiating light such as ultraviolet rays even in the presence of oxygen in the atmosphere or the like. The processing method of the electronic component which can peel the adhesive tape for electronic component processing without, and the adhesive tape for electronic component processing used for the processing method of this electronic component can be provided.

Claims (2)

A step of affixing an electronic component processing adhesive tape to an electronic component; a step of processing the electronic component having the electronic component processing adhesive tape affixed; and by irradiating light to the processed electronic component from the electronic component A method of processing an electronic component having a step of peeling the processing adhesive tape,
The pressure-sensitive adhesive tape for processing electronic parts has a weight-average molecular weight of 10,000 to 2,000,000 and a glass transition temperature of −100 ° C. to 100 ° C., 1 polymerizable carbon-carbon double bond. Or a photopolymerizable monomer having one or more, a photopolymerizable oligomer having one or more polymerizable carbon-carbon double bonds, and a pressure-sensitive adhesive layer containing a photopolymerization initiator. An electronic component processing method characterized by the above. A pressure-sensitive adhesive tape for processing electronic components, a pressure-sensitive adhesive binder polymer having a weight average molecular weight of 10,000 to 2,000,000 and a glass transition temperature of −100 ° C. to 100 ° C., polymerizable carbon -Adhesive containing a photopolymerizable monomer having one or more carbon double bonds, a photopolymerizable oligomer having one or more polymerizable carbon-carbon double bonds, and a photopolymerization initiator An adhesive tape for processing electronic parts, characterized by having an agent layer.