JP2008101468A - Scroll fluid machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a scroll fluid machine capable of turning an inlet around by 90° by simple operation of only rotating by 90°. <P>SOLUTION: A fluid chamber is defined in a machine main body by a fixed scroll and a turning scroll, and a suction adaptor (the inlet) 90 communicating with the fluid chamber is arranged on one surface of the machine main body 10. The scroll fluid machine 1 creates a vacuum or high pressure state by changing a volume of the fluid chamber by moving the scroll perform eccentrically with respect to the fixed scroll. The machine main body 10 is supported by a casing 80, which covers a surface facing at least a surface with the suction adaptor 90 arranged thereon, and a surface continuing at a right angle to the above surface except for the surface with the suction adaptor 90 of the machine main body 10 arranged thereon. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a scroll type fluid machine that creates a vacuum or high-pressure state by changing the volume of a fluid chamber defined by both scrolls by eccentrically moving a turning scroll with respect to a fixed scroll.

  As a device for creating a vacuum or high-pressure state, a scroll type fluid machine including a fixed scroll and a turning scroll arranged so as to mesh with each other is known. This scroll type fluid machine is provided with a suction adapter as an intake port and an exhaust adapter as an exhaust port. When a desired container is to be evacuated, the container is connected to the suction adapter. When it is desired to increase the pressure inside the container, the container is connected to the exhaust adapter. Thus, the scroll type fluid machine may be used for the purpose of creating a vacuum state, so it is sometimes called a scroll type vacuum pump, and is used in fields such as physics and chemistry analyzers, electron microscopes, and semiconductor manufacturing equipment. Yes.

  Specifically, the scroll type fluid machine includes a fixed scroll that forms an outer frame, a turning scroll that is turnably supported by the machine body, a crankshaft for eccentrically rotating the turning scroll, It comprises a crank pin that rotates while restricting rotational movement, and an electric motor as a drive source connected to the crank shaft by a coupling. Here, the fixed scroll includes a spiral fixed scroll plate, and the orbiting scroll includes a spiral orbiting scroll plate facing substantially along the entire surface of the fixed scroll plate of the fixed scroll.

  Thus, the rotational force generated by the electric motor is transmitted to the crankshaft through the coupling, and the rotating scroll restrained by the crankpin is eccentrically moved by rotating the crankshaft. Here, a part of the fixed scroll and a part of the orbiting scroll are close to each other so as to form a minimal gap, and by this proximity, a fluid chamber substantially sealed by the fixed scroll and the orbiting scroll is defined. Note that portions of the fixed scroll and the orbiting scroll that are close to each other constitute a surface that defines a fluid chamber when the orbiting scroll is eccentrically moving.

  As described above, the orbiting scroll eccentrically moves, so that the fluid flows from the suction adapter into the fluid chamber that has been temporarily released from the substantially sealed state, and the fluid chamber is again substantially sealed, so that the volume in the fluid chamber is reduced. Thus, the fluid in the fluid chamber is compressed, and the compressed fluid is discharged from the exhaust adapter to the outside of the fluid machine.

  The scroll type fluid machine configured as described above is supported by a casing provided in the pump unit or the electric motor unit, and the casing is provided on a surface opposite to the surface provided with the intake port. In addition, it is provided on either the surface provided with the air inlet or the surface forming 90 degrees (see, for example, Patent Document 1).

By the way, when the scroll type fluid machine is incorporated in, for example, a vacuum device, the direction of the intake port varies depending on the vacuum device, such as sideways or upward. Therefore, when it is necessary to change the installation angle of the intake port with respect to the installation surface of the scroll type fluid machine, that is, when it is necessary to change the angle of the casing supporting the scroll type fluid machine, the pump unit Is removed from the electric motor and the method of changing the coupling angle between the electric motor and the pump unit is adopted, or when the installation space is sufficient, the piping is connected to the intake port to change the direction of the intake port.
JP-A-11-190284

  However, when a scroll type fluid machine is installed, if it is necessary to change the angle between the installation surface of the housing and the inlet surface due to a change in installation conditions in a narrow installation space, the pump in the narrow space already installed If there is no work space, the entire scroll type fluid machine is taken out of the installation location and the pump part is rotated in another wide space. It takes time.

  In addition, when the direction of the intake port is changed using piping, the cost of newly required piping increases, and problems such as the need for piping design in a limited space occur.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide a scroll type fluid machine that can move the direction of an intake port by a desired angle by a simple operation of rotating a predetermined angle. There is.

  In order to achieve the above object, the invention according to claim 1 defines a fluid chamber in the machine body by a fixed scroll and a turning scroll, and an intake port connected to the fluid chamber is provided on one surface of the machine body. In the scroll type fluid machine that creates a vacuum or high pressure state by changing the volume of the fluid chamber by eccentrically moving the orbiting scroll with respect to the fixed scroll, a plurality of installation surfaces are provided. To do.

  According to a second aspect of the present invention, in the first aspect of the present invention, the surface of the machine main body other than the intake port installation surface, at least a surface facing the intake port installation surface and a surface continuous to the surface at a right angle The machine body is supported by a casing covering the machine.

  According to a third aspect of the present invention, in the second aspect of the present invention, a space for securing a predetermined amount of cooling air is formed between each surface of the casing and the fluid machine main body. .

  According to a fourth aspect of the present invention, in the second or third aspect of the present invention, a notch is formed on each surface of the casing so as to easily secure a predetermined amount of cooling air.

  According to the first aspect of the present invention, since the scroll type fluid machine is provided with a plurality of installation surfaces, the direction of the intake port can be moved by a desired angle by a simple operation of rotating a predetermined angle.

  According to the second aspect of the present invention, the machine main body is a housing that covers a surface other than the intake port installation surface of the machine main body, at least a surface that faces the intake port installation surface and a surface that is perpendicular to the surface. Since the entire scroll type fluid machine can be rotated 90 degrees, the direction of the intake port can be easily moved 90 degrees in a short time, saving a lot of labor and time and reducing costs. It is possible to solve the problem such as redesign.

  According to the third aspect of the present invention, since the space for securing a predetermined amount of cooling air is formed between each surface of the casing and the fluid machine main body, the scroll type fluid machine is pressed against the wall and installed. In addition, the required amount of cooling air can be secured.

  According to invention of Claim 4, it becomes easy to ensure required cooling air volume by the notch formed in each surface of the said housing | casing, and it can cool a scroll type fluid machine efficiently and prevents the temperature rise. it can.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  1 is a cutaway side view of a scroll type fluid machine according to the present invention, FIG. 2 is a front view of a scroll type fluid machine in which a suction adapter and an exhaust adapter are installed sideways, FIG. 3 is a perspective view thereof, and FIG. FIG. 5 is a front view of a scroll type fluid machine in which a suction adapter and an exhaust adapter are installed upward, and FIG. 5 is a perspective view of the same.

  As shown in FIG. 1, the scroll type fluid machine 1 has a machine body (compressor part) 10 constituting an outer frame, and the machine body 10 includes a suction adapter 90 and an exhaust adapter shown in FIG. 91, respectively. The suction adapter 90 and the exhaust adapter 91 communicate with the inside of the fixed scroll case 21, respectively.

  Thus, when a desired container (not shown) is to be evacuated, the container can be evacuated by connecting the container to the suction adapter 90 and operating the scroll fluid machine 1. It is configured as follows. When the scroll type fluid machine 1 is operating as a scroll type vacuum pump, air as a fluid in the container is extracted by the scroll type fluid machine 1 and discharged from the exhaust adapter 91 to the atmosphere.

  A fixed scroll 20 and a turning scroll 30 are provided inside the machine body 10, and a motor case 40 including a motor 41 is connected to the outside of the machine body 10.

  The fixed scroll 20 has the fixed scroll case 21. The fixed scroll case 21 has two substantially identical circular end surfaces 21A and 21B and a peripheral surface 21C that connects these end surfaces 21A and 21B. It is constituted by. Here, the end faces 21 </ b> A and 21 </ b> B are in a substantially parallel positional relationship, and the fixed scroll case 21 is fixed so as not to move with respect to the machine body 10.

  Further, inside the fixed scroll 21, a turning scroll disk 31 constituting the turning scroll 30 is provided. The orbiting scroll disk 31 has a circular shape with a slightly smaller radius than the end faces 21A and 21B, and is spaced apart from the end faces 21A and 21B by an equal distance and arranged in a substantially parallel positional relationship with the end faces 21A and 21B. ing. Then, one surface 31A of the orbiting scroll disk 31 faces one end surface 21A, and the other surface 31B of the orbiting scroll disk 31 faces the other end surface 21B.

  Further, a through hole 30a is formed at a position eccentric from the center of the orbiting scroll disk 31, and the crankshaft 50 passes through the through hole 30a. The orbiting scroll disk 31 is supported on the crankshaft 50 via a bearing 51, and the crankshaft 50 is rotatable with respect to the orbiting scroll 30. The crankshaft 50 is supported by the machine main body 10 via a bearing 52 and is rotatable with respect to the machine main body 10. Accordingly, the orbiting scroll 30 is indirectly supported by the machine body 10.

  The crankshaft 50 is drivingly connected to a motor 41 in the motor case 40 and is rotationally driven by the motor 41. Here, in the crankshaft 50 located in the through hole 30a, the center 53a in the radial direction of the crank peak portion 53 is in a position eccentric with respect to the rotation shaft 50a of the crankshaft 50. The through hole 30 a is formed at a position eccentric from the center of the orbiting scroll disk 31. For this reason, the orbiting scroll disk 31 is configured to move eccentrically with respect to the fixed scroll case 21 as the crankshaft 50 rotates.

  Further, on the orbiting scroll disk 31, orbiting scroll plates 32A and 32B having a spiral shape are provided. More specifically, one orbiting scroll plate 32A is provided on one surface 31A of the orbiting scroll disc 31, and the other orbiting scroll plate 32B is provided on the other surface 31B of the orbiting scroll disc 31. Yes. The orbiting scroll plates 32A and 32B have a shape in which strip-like plates are rolled up in a spiral shape, and one side edge of each is fixed to the one surface 31A and the other surface 31B.

  When viewed in FIG. 1, the orbiting scroll plate 32 </ b> A has a plate shape that protrudes from one surface 31 </ b> A of the orbiting scroll disc 31 to one end surface 21 </ b> A of the fixed scroll case 21. The scroll plate 32 </ b> B has a plate shape protruding from the other surface 31 </ b> B of the orbiting scroll disk 31 to the other end surface 21 </ b> B of the fixed scroll case 21. The orbiting scroll plates 32 </ b> A and 32 </ b> B constitute an orbiting scroll 30 together with the orbiting scroll disk 31.

  On the other hand, plate-like fixed scroll plates 22A and 22B are provided on the inner peripheral surface of the fixed scroll case 21 and on the end surfaces 21A and 21B. More specifically, the fixed scroll plate 22A is provided on the end surface 21A, and the fixed scroll plate 22B is provided on the end surface 21B. The fixed scroll plates 22A and 22B have a shape in which a strip-like plate is rolled up like the orbiting scroll plates 32A and 32B, and one side edge of each is fixed to the end faces 21A and 21B. ing.

  When viewed in FIG. 1, the fixed scroll plate 22 </ b> A has a plate shape protruding from one end surface 21 </ b> A of the fixed scroll case 21 to one surface 31 </ b> A of the orbiting scroll disk 31. The scroll plate 22 </ b> B has a plate shape that protrudes from the other end surface 21 </ b> B of the fixed scroll case 21 to the other surface 31 </ b> B of the orbiting scroll disk 31. The fixed scroll plate 22A and the orbiting scroll plate 32A are in a state of being engaged with each other, and the entire surface of the fixed scroll plate 22A is disposed so as to face the substantially entire surface of the orbiting scroll plate 32A. Yes. The fixed scroll plate 22A constitutes the fixed scroll 20 together with the fixed scroll case 21. The surface of the fixed scroll plate 22A and the surface of the orbiting scroll plate 32A are configured to be close to each other at two or more locations at the same time. The same applies to the fixed scroll plate 22B and the orbiting scroll plate 32B.

  Further, one surface 31A and the other surface 31B of the orbiting scroll disk 31 are end plate surfaces, respectively, and are always close to each other in the protruding direction of the fixed scroll plates 22A and 22B. Similarly, the inner peripheral surface of the fixed scroll case 21 and the end surfaces 21A and 21B are end plate surfaces, which are always close to each other in the protruding direction of the orbiting scroll plates 32A and 32B. Although not shown, each of the fixed scroll plates 22A and 22B and the orbiting scroll plates 32A and 32B is provided with a tip seal made of a self-lubricating resin along the tip, and each tip seal comes into contact with each end face. ing.

  Due to the contact and proximity of the parts constituting the fixed scroll 20 and the orbiting scroll 30, between the fixed scroll 20 and the orbiting scroll 30, the orbiting scroll plate 32, the fixed scroll plate 22, the orbiting scroll disk 31 and the fixed scroll case 21 are provided. A sealed fluid chamber 20a surrounded by is defined. The surface that defines the fluid chamber 20a forms a sliding surface that slides relative to each other when the orbiting scroll 30 is moving eccentrically. When the orbiting scroll plate 32 moves eccentrically, the fixed scroll plate 22 and the orbiting scroll plate 32 slide with each other, and the contact position between the fixed scroll plate 22 and the orbiting scroll plate 32 changes. The volume of the fluid chamber 20a is reduced by the change in the contact position.

  The fixed scroll 21 is provided with cooling fins 23A and 23B and fan guides 24A and 24B. Further, fans 60A and 60B are connected to both ends of the crankshaft 50. When the crankshaft 50 is rotated, the fan 60A is rotated, and between the end surface 21A of the fixed scroll case 21 and the fan guide 24A along the cooling fin 23A. The air flows from the space of the fan 60A, the air flows out of the space of the fan 60A and the fan guide 24A, and the air is discharged from a gap (not shown) of the fan cover 70. The same applies to the other end face 21B side of the fixed scroll 21.

  The motor case 40 is supported by a housing 80, and the housing 80 supports the entire scroll type fluid machine 1.

  By the way, in this Embodiment, as shown in FIGS. 2-5, the housing | casing 80 is bent and formed in the L shape, and the suction adapter 90 and the exhaust adapter 91 are side as shown in FIG.2 and FIG.3. When the scroll type fluid machine 1 is installed so as to face the surface, the casing 80 has surfaces 80A and 80B that form a right angle to each other, and a surface where the suction adapter 90 and the exhaust adapter 91 of the scroll type fluid machine 1 open. The scroll type fluid machine 1 is supported so as to cover the surface excluding the upper surface, that is, the side surface and the bottom surface facing the surface where the suction adapter 90 and the exhaust adapter 91 open. In this case, the surfaces 80A and 80B of the housing 80 are separated from the surface of the fixed scroll 20 by a predetermined distance or more so that a predetermined amount of cooling air necessary for cooling the fixed scroll 20 can be secured. A space is formed in each of the surfaces 80A and 80B, and a notch 81 is formed on each of the surfaces 80A and 80B in order to easily secure a predetermined amount of cooling air. Further, the two surfaces 80 </ b> A and 80 </ b> B of the casing 80 are continuously connected by a curved surface 82 having a curvature of 25% or less of the width of the scroll type fluid machine 1.

  Then, when the scroll type fluid machine 1 is rotated 90 degrees from the state where the scroll type fluid machine 1 is installed so that the suction adapter 90 and the exhaust adapter 91 face sideways as shown in FIGS. As shown in FIGS. 4 and 5, the scroll type fluid machine 1 is installed so that the suction adapter 90 and the exhaust adapter 91 face upward while ensuring a space capable of securing the cooling air volume necessary for cooling the fixed scroll 20. can do. In this case, since the surfaces 80A and 80B of the casing 80 that change by rotation are connected by the curved surface 82, the scroll fluid machine 1 can be smoothly rotated without giving an impact to the scroll fluid machine 1.

  As described above, according to the present embodiment, the surface other than the installation surface of the suction adapter 90 and the exhaust adapter 91 of the machine body 10 and at least the surface facing the installation surface of the suction adapter 90 and the exhaust adapter 91, Since the machine body 10 is supported by the casing 80 that covers a surface that is continuous at a right angle to the surface, the suction adapter 90 and the exhaust adapter can be easily and quickly obtained by simply rotating the scroll fluid machine 1 by 90 degrees. It is possible to move the direction of 91 by 90 degrees, and it is possible to reduce costs by omitting a great deal of labor and time, and it is possible to solve problems such as redesign.

  In addition, according to the present embodiment, since the space for securing a predetermined cooling air volume is formed between each surface 80A, 80B of the housing 80 and the machine body 10, the scroll type fluid machine 1 is placed near the wall. Even if it is pressed and installed, the required amount of cooling air can be secured.

  Furthermore, according to the present embodiment, it becomes easy to secure a required cooling air volume by the notches 81 formed on the respective surfaces 80A and 80B of the casing 80, and the scroll type fluid machine 1 is efficiently cooled to the temperature thereof. The rise can be prevented.

  By the way, the housing 80 is formed in a U-shape as shown in FIG. 6, and the three surfaces other than the surface on which the suction adapter 90 and the exhaust adapter 91 of the machine body 10 are provided are the three surfaces 80A, 80B, Even if it is covered with 80C, the same effect as described above can be obtained. Note that the housing supporting the machine body does not necessarily have to be integrated with the motor case. The housing is provided on one surface of the motor case, the housing is fixed to a rectangular parallelepiped frame, and the entire frame is rotated. The object of the present invention can also be achieved.

It is a fracture side view of the scroll type fluid machine concerning the present invention. It is a front view of the scroll type fluid machine in which the suction adapter and the exhaust adapter were installed toward the side. It is a perspective view of the scroll type fluid machine in which the suction adapter and the exhaust adapter were installed toward the side. It is a front view of the scroll type fluid machine in which the suction adapter and the exhaust adapter were installed facing upwards. It is a perspective view of the scroll type fluid machine in which the suction adapter and the exhaust adapter were installed facing upwards. It is a front view of the scroll type fluid machine concerning another form of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Scroll type fluid machine 10 Machine main body 20 Fixed scroll 20a Fluid chamber 21 Fixed scroll case 21a, 21B End surface of fixed scroll case 21c Peripheral surface of fixed scroll case 22A, 22B Fixed scroll board 23A, 23B Cooling fin 24A, 24B Fan guide 30 Orbiting scroll 30a Through hole 31 Orbiting scroll disk 31A, 31B Orbiting scroll disk surface 32A, 32B Orbiting scroll plate 40 Motor case 41 Motor 50 Crankshaft 50a Rotating shaft 51, 52 Bearing 53 Crank crest 53a Crank crest Radial center 60A, 60B Fan 70 Fan cover 80 Housing 80A to 80C Housing surface 81 Housing notch 82 Curved surface connecting housing surfaces 90 Suction area Descriptor (intake port)
91 Exhaust adapter (exhaust port)

Claims (4)

The fixed scroll and the orbiting scroll define a fluid chamber in the machine body, and an intake port connected to the fluid chamber is installed on one surface of the machine body to cause the orbiting scroll to move eccentrically with respect to the fixed scroll. In a scroll type fluid machine that changes the volume of the fluid chamber to create a vacuum or high pressure state,
A scroll type fluid machine comprising a plurality of installation surfaces.   The machine main body is supported by a housing that covers a surface other than the air intake installation surface of the machine main body, which faces at least the surface facing the air intake installation surface and a surface perpendicular to the surface. The scroll type fluid machine according to claim 1.   The scroll type fluid machine according to claim 2, wherein a space for securing a predetermined cooling air volume is formed between each surface of the casing and the fluid machine main body.   4. A scroll type fluid machine according to claim 2, wherein a notch is formed on each surface of the casing so as to facilitate securing a predetermined amount of cooling air.

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