JP2008098236A - 蓋体及び基板収納容器 - Google Patents
蓋体及び基板収納容器 Download PDFInfo
- Publication number
- JP2008098236A JP2008098236A JP2006275248A JP2006275248A JP2008098236A JP 2008098236 A JP2008098236 A JP 2008098236A JP 2006275248 A JP2006275248 A JP 2006275248A JP 2006275248 A JP2006275248 A JP 2006275248A JP 2008098236 A JP2008098236 A JP 2008098236A
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- Prior art keywords
- locking mechanism
- lid
- opening
- cover
- manual operation
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D55/00—Accessories for container closures not otherwise provided for
- B65D55/02—Locking devices; Means for discouraging or indicating unauthorised opening or removal of closure
- B65D55/14—Applications of locks, e.g. of permutation or key-controlled locks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
- B65D85/38—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for delicate optical, measuring, calculating or control apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
- H01L21/67373—Closed carriers characterised by locking systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D2585/00—Containers, packaging elements or packages specially adapted for particular articles or materials
- B65D2585/68—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form
- B65D2585/86—Containers, packaging elements or packages specially adapted for particular articles or materials for machines, engines, or vehicles in assembled or dismantled form for electrical components
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
- Closures For Containers (AREA)
- Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
Abstract
【解決手段】 基板を収納する容器本体1と、容器本体1の開口正面部2に着脱自在に嵌入される蓋体10とを備える。蓋体10を、容器本体1の開口正面部2に着脱自在に嵌入される筐体と、筐体の表面に配設され、回転プレート15の回転に基づき筐体の周壁から出没可能に突出させた係止爪を容器本体1の開口正面部2内周に係止させることにより筐体を施錠する施錠機構14と、筐体の表面に装着されて施錠機構を覆うカバープレート22と、カバープレート22に形成されて回転プレート15に部分的に対向する操作窓30とから構成し、施錠機構14の回転プレート15の操作窓30との対向部には、手動操作手段を備える。
【選択図】 図1
Description
容器本体の開口部に嵌め入れられる筐体と、この筐体に配設され、回転体の回転に基づき筐体の周壁から出没可能に突出させた係止体を容器本体の開口部内周に干渉させることにより筐体を施錠する施錠機構と、この施錠機構を覆うカバーと、このカバーに形成されて回転体に対向する操作窓とを含んでなることを特徴としている。
また、施錠機構の回転体の操作窓との対向部に、手動操作手段を備えることが好ましい。
また、回転体の指挿入孔の周囲に指係合片を形成することができる。
また、手動操作手段を、施錠機構の回転体に設けられて操作窓から露出する操作バーとすることもできる。
また、手動操作手段を、施錠機構の回転体に形成されるローレットとすることもできる。
なお、容器本体の開口部の内周縁に、施錠機構の係止体に干渉される複数の係止穴を形成することができる。
また、手動操作手段である指挿入孔に指係合片を形成すれば、施錠機構の回転体に指等の操作力を確実に伝達することが可能になる。
さらに、手動操作手段を、施錠機構の回転体に形成されるローレットとすれば、施錠機構の回転体を操作する際、簡易な構成で指等が滑るのを防ぐことが可能になる。
筐体11は、図1ないし図4に示すように、基本的には断面略皿形を呈した正面横長の長方形に形成され、中央部12が表面側(正面側)に略矩形に隆起することにより左右の両側部が相対的に凹み形成されるとともに、この凹んだ左右の両側部内には施錠機構14がそれぞれ設置されており、周壁の上下両側には、矩形の貫通口がそれぞれ穿孔される。
なお、操作窓30と指挿入孔41は、例えばSEMI規格S8(半導体製造装置の人間工学エンジニアリング)に準拠する寸法に形成されることが好ましい。
本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、カバープレート22の各操作窓30から操作バー43が突出するので、手動操作の際に指の挿入量を減少させることができるのは明らかである。また、手動操作手段40の形状や構造の多様化を図ることができる。
本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、各操作バー43Aが操作バー43よりも大きく長いので、操作性がさらに向上するのは明白である。
本実施形態においても上記実施形態と同様の作用効果が期待でき、しかも、回転プレート15に複数の操作バー43を新たに設ける必要性が全くないので、回転プレート15の構成の簡素化を図ることができる。
2 開口正面部(開口部)
10 蓋体
11 筐体
14 施錠機構
15 回転プレート(回転体)
16 操作穴
19 連結プレート
21 係止爪(係止体)
22 カバープレート(カバー)
24 操作口
30 操作窓
40 手動操作手段
41 指挿入孔
42 指係合リブ
43 操作バー
43A 操作バー
44 ローレット
Claims (7)
- 基板を収納する容器本体の開口部に着脱自在に嵌め入れられる蓋体であって、容器本体の開口部に嵌め入れられる筐体と、この筐体に配設され、回転体の回転に基づき筐体の周壁から出没可能に突出させた係止体を容器本体の開口部内周に干渉させることにより筐体を施錠する施錠機構と、この施錠機構を覆うカバーと、このカバーに形成されて回転体に対向する操作窓とを含んでなることを特徴とする蓋体。
- 施錠機構の回転体の操作窓との対向部に、手動操作手段を備える請求項1記載の蓋体。
- 手動操作手段を、施錠機構の回転体に設けられる指挿入孔とした請求項2記載の蓋体。
- 回転体の指挿入孔の周囲に指係合片を形成した請求項3記載の蓋体。
- 手動操作手段を、施錠機構の回転体に設けられて操作窓から露出する操作バーとした請求項2記載の蓋体。
- 手動操作手段を、施錠機構の回転体に形成されるローレットとした請求項2記載の蓋体。
- 基板を収納する容器本体の開口部に請求項1ないし6いずれかに記載の蓋体を着脱自在に嵌め入れることを特徴とする基板収納容器。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006275248A JP4841383B2 (ja) | 2006-10-06 | 2006-10-06 | 蓋体及び基板収納容器 |
US12/444,545 US8091710B2 (en) | 2006-10-06 | 2007-09-28 | Door structure and substrate storage container |
KR1020097005092A KR101413936B1 (ko) | 2006-10-06 | 2007-09-28 | 도어 구조 및 기판 저장 용기 |
CN2007800375250A CN101523589B (zh) | 2006-10-06 | 2007-09-28 | 盖体以及基板收纳容器 |
EP07828756.2A EP2068357B1 (en) | 2006-10-06 | 2007-09-28 | Cover body and substrate receiving container |
PCT/JP2007/069015 WO2008044495A1 (fr) | 2006-10-06 | 2007-09-28 | Corps de couvercle et récipient recevant des substrats |
TW096137285A TW200834786A (en) | 2006-10-06 | 2007-10-04 | Cover body and substrate receiving container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006275248A JP4841383B2 (ja) | 2006-10-06 | 2006-10-06 | 蓋体及び基板収納容器 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008098236A true JP2008098236A (ja) | 2008-04-24 |
JP4841383B2 JP4841383B2 (ja) | 2011-12-21 |
Family
ID=39282705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006275248A Active JP4841383B2 (ja) | 2006-10-06 | 2006-10-06 | 蓋体及び基板収納容器 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8091710B2 (ja) |
EP (1) | EP2068357B1 (ja) |
JP (1) | JP4841383B2 (ja) |
KR (1) | KR101413936B1 (ja) |
CN (1) | CN101523589B (ja) |
TW (1) | TW200834786A (ja) |
WO (1) | WO2008044495A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013005740A1 (ja) * | 2011-07-06 | 2013-01-10 | ミライアル株式会社 | 基板収納容器 |
JP2017130548A (ja) * | 2016-01-20 | 2017-07-27 | 信越ポリマー株式会社 | 基板収納容器 |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5286142B2 (ja) * | 2009-04-10 | 2013-09-11 | 株式会社ディスコ | 加工装置 |
US9767474B1 (en) | 2010-03-23 | 2017-09-19 | Amazon Technologies, Inc. | Transaction tracking and incentives |
CN102237289B (zh) * | 2010-05-07 | 2013-07-24 | 家登精密工业股份有限公司 | 一种具有椭圆门闩结构的前开式圆片盒 |
CN102263046A (zh) * | 2010-05-26 | 2011-11-30 | 家登精密工业股份有限公司 | 一种具有椭圆门闩结构的前开式圆片盒 |
TWM410441U (en) * | 2011-02-23 | 2011-08-21 | Hon Hai Prec Ind Co Ltd | Fixing structure of removable electronic device |
US9965768B1 (en) | 2011-05-19 | 2018-05-08 | Amazon Technologies, Inc. | Location-based mobile advertising |
KR200465979Y1 (ko) * | 2011-06-08 | 2013-03-20 | 삼성중공업 주식회사 | 도어 |
CN103035559B (zh) * | 2011-09-29 | 2015-04-22 | 中芯国际集成电路制造(北京)有限公司 | 弹性固定轮及包含其的晶圆适配器 |
TWM425502U (en) * | 2011-10-31 | 2012-03-21 | Hon Hai Prec Ind Co Ltd | Removable electronic device |
EP2863423B1 (en) * | 2012-06-14 | 2019-09-11 | Murata Machinery, Ltd. | Lid opening/closing device |
JP6030758B2 (ja) * | 2013-05-29 | 2016-11-24 | ミライアル株式会社 | 基板収納容器 |
US8857619B1 (en) * | 2013-09-30 | 2014-10-14 | Taiwan Semiconductor Manufacturing Co., Ltd | Mechanisms for wafer pod and pod door |
US9184077B2 (en) | 2013-09-30 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd | Wafer pod and wafer positioning mechanism thereof |
CN109997217B (zh) * | 2016-12-16 | 2023-10-31 | 恩特格里斯公司 | 配备具有两个凸轮轮廓的闩锁机构的衬底容器 |
TWI746045B (zh) * | 2020-07-07 | 2021-11-11 | 家登精密工業股份有限公司 | 基板載具鎖扣結構 |
Citations (1)
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JPH1191865A (ja) * | 1997-07-11 | 1999-04-06 | Fluoroware Inc | ウェハー搬送モジュール |
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US1362647A (en) * | 1916-05-13 | 1920-12-21 | American Hardware Corp | Door and lock therefor |
US2565669A (en) * | 1950-03-07 | 1951-08-28 | Emma R Dawson | Room occupancy indicator |
US4490999A (en) * | 1982-09-27 | 1985-01-01 | Castle Nial K | Door lock with indicator |
US5711427A (en) | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
US6010008A (en) | 1997-07-11 | 2000-01-04 | Fluoroware, Inc. | Transport module |
JP3556480B2 (ja) * | 1998-08-17 | 2004-08-18 | 信越ポリマー株式会社 | 精密基板収納容器 |
TW433258U (en) * | 2000-06-23 | 2001-05-01 | Ind Tech Res Inst | Improved door body structure for a pod |
WO2002049079A2 (en) * | 2000-12-13 | 2002-06-20 | Entegris Cayman Ltd. | System for preventing improper insertion of foup door into foup |
US6457598B1 (en) * | 2001-03-20 | 2002-10-01 | Prosys Technology Integration, Inc. | Module cover assembly with door latch transmission mechanism for wafer transport module |
CN100374358C (zh) * | 2001-11-27 | 2008-03-12 | 诚实公司 | 通过门形成接地线路的前开口式晶片容器 |
JP4073206B2 (ja) | 2001-12-05 | 2008-04-09 | 信越ポリマー株式会社 | 収納容器の蓋体 |
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TW534165U (en) * | 2002-09-04 | 2003-05-21 | Ind Tech Res Inst | Latch locking mechanism used in doors of wafer boxes |
WO2004102655A1 (ja) * | 2003-05-15 | 2004-11-25 | Tdk Corporation | クリーンボックス開閉装置を備えるクリーン装置 |
TWI276580B (en) | 2003-12-18 | 2007-03-21 | Miraial Co Ltd | Lid unit for thin-plate supporting container |
JP4573566B2 (ja) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | 収納容器 |
US7913437B2 (en) * | 2007-12-06 | 2011-03-29 | Caroline Simmen Domenig | Room occupancy indicator |
-
2006
- 2006-10-06 JP JP2006275248A patent/JP4841383B2/ja active Active
-
2007
- 2007-09-28 WO PCT/JP2007/069015 patent/WO2008044495A1/ja active Application Filing
- 2007-09-28 KR KR1020097005092A patent/KR101413936B1/ko active IP Right Grant
- 2007-09-28 EP EP07828756.2A patent/EP2068357B1/en not_active Expired - Fee Related
- 2007-09-28 US US12/444,545 patent/US8091710B2/en active Active
- 2007-09-28 CN CN2007800375250A patent/CN101523589B/zh active Active
- 2007-10-04 TW TW096137285A patent/TW200834786A/zh unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1191865A (ja) * | 1997-07-11 | 1999-04-06 | Fluoroware Inc | ウェハー搬送モジュール |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013005740A1 (ja) * | 2011-07-06 | 2013-01-10 | ミライアル株式会社 | 基板収納容器 |
JP2013016743A (ja) * | 2011-07-06 | 2013-01-24 | Miraial Kk | 基板収納容器 |
KR101594235B1 (ko) | 2011-07-06 | 2016-02-15 | 미라이얼 가부시키가이샤 | 기판 수납 용기 |
US9387960B2 (en) | 2011-07-06 | 2016-07-12 | Miraial Co., Ltd. | Substrate storing container |
JP2017130548A (ja) * | 2016-01-20 | 2017-07-27 | 信越ポリマー株式会社 | 基板収納容器 |
Also Published As
Publication number | Publication date |
---|---|
KR101413936B1 (ko) | 2014-06-30 |
TW200834786A (en) | 2008-08-16 |
CN101523589B (zh) | 2012-05-16 |
WO2008044495A1 (fr) | 2008-04-17 |
CN101523589A (zh) | 2009-09-02 |
EP2068357A1 (en) | 2009-06-10 |
US20100032339A1 (en) | 2010-02-11 |
US8091710B2 (en) | 2012-01-10 |
EP2068357B1 (en) | 2018-07-18 |
JP4841383B2 (ja) | 2011-12-21 |
KR20090075663A (ko) | 2009-07-08 |
EP2068357A4 (en) | 2011-12-28 |
TWI371816B (ja) | 2012-09-01 |
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