JP2008091701A - Magnetic random access memory - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To suppress occurrence of a software error to an unselected cell during reading or writing operation. <P>SOLUTION: A magnetic random access memory includes: a magneto-resistance effect element MTJ which has a fixed layer whose magnetization direction is fixed, a recording layer whose magnetization direction can be inverted, and a nonmagnetic layer provided between the fixed layer and recording layer and changes the magnetization directions of the fixed layer and recording layer from parallel or antiparallel and vice versa according to the direction of a current flowing between the fixed layer and recording layer; a first transistor Tra which has a first gate and a first current path, whose one end is connected to the fixed layer; a second transistor Trb which has a second gate and a second current path, whose one end is connected to the recording layer; a first bit line BLa to which the other end of the first current path is connected; and a second bit line BLb to which the other end of the second current path is connected. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a spin injection magnetization reversal type magnetic random access memory (MRAM).

  Magnetic Random Access Memory (MRAM) is a device that performs memory operation by accumulating “1” or “0” information using a magnetoresistive (Magneto Resistive) effect. It is positioned as one of the universal memory device candidates that have integration, high reliability, low power consumption, and high-speed operation.

  In recent years, for magnetic random access memories, Slonczewski has proposed a writing method using a spin transfer magnetization reversal technique (Patent Document 1: US Pat. No. 5,695,864). In the spin injection magnetization reversal technique, there are spin-polarized electrons having two electron spin directions that contribute to the magnetization of the recording layer depending on the direction of the current, and this spin-polarized electron acts on the magnetization of the recording layer. Invert the magnetization.

In such spin injection magnetization reversal, the amount of current required for writing is proportional to the volume of an MTJ (Magnetic Tunnel Junction) element, and therefore the amount of current required for writing decreases as the size of the element decreases. On the other hand, the resistance to magnetization reversal due to thermal disturbance decreases as the volume of the MTJ element decreases. Therefore, in the 1T1R magnetic random access memory of the conventional example, it is considered that the possibility of soft error (such as erroneous writing) of non-selected cells increases due to charge / discharge in read and write operations due to advancement of element miniaturization. It is done.
U.S. Patent No. 5,695,864

  The present invention provides a magnetic random access memory capable of suppressing the occurrence of soft errors in unselected cells during reading and writing.

  A magnetic random access memory according to one aspect of the present invention includes a first fixed layer whose magnetization direction is fixed, a first recording layer whose magnetization direction is reversible, the first fixed layer, and the first recording layer. A first nonmagnetic layer provided between the first pinned layer and the first recording layer according to a direction of a current flowing between the first pinned layer and the first recording layer. A first magnetoresistive element in which the magnetization direction of the recording layer is in a parallel state or an antiparallel state; a first gate; and a first current path, wherein one end of the first current path is the first A second transistor having a first transistor connected to one fixed layer, a second gate, and a second current path, wherein one end of the second current path is connected to the first recording layer; Transistors, a first bit line to which the other end of the first current path is connected, and a second current path ; And a second bit line which end is connected.

  According to the present invention, it is possible to provide a magnetic random access memory capable of suppressing the occurrence of soft errors in unselected cells during reading and writing.

  Embodiments of the present invention will be described below with reference to the drawings. In the description, common parts are denoted by common reference symbols throughout the drawings.

[1] Memory Cell FIG. 1 is a schematic circuit diagram of a memory cell array of a magnetic random access memory (MRAM) according to an embodiment of the present invention. The memory cell of the magnetic random access memory according to one embodiment of the present invention will be described below.

  A memory cell of a magnetic random access memory according to an embodiment of the present invention has a 2T1R structure including two transistors (T) and one magnetoresistive element (R).

  Specifically, as shown in FIG. 1, one end of a current path of transistors Tra and Trb made of, for example, MOSFETs is connected to both ends of an MTJ (Magnetic Tunnel Junction) element MTJ. A bit line BLa is connected to the other end of the current path of the transistor Tra, and a bit line BLb is connected to the other end of the current path of the transistor Trb. Word lines WLa and WLb are connected to the gates of the transistors Tra and Trb, respectively.

[2] MTJ Element FIGS. 2A and 2B are schematic views of an MTJ element using a spin transfer magnetization switching technique according to an embodiment of the present invention. The MTJ element according to one embodiment of the present invention will be described below.

  As shown in FIGS. 2A and 2B, the MTJ element MTJ includes a fixed layer (pinned layer) P in which the magnetization direction is fixed, a recording layer (free layer) F in which the magnetization direction can be reversed, and a fixed layer. A nonmagnetic layer N provided between the layer P and the recording layer F. Then, depending on the direction of the current I flowing between the fixed layer P and the recording layer F, the magnetization directions of the fixed layer P and the recording layer F are in a parallel state or an antiparallel state.

  In this figure, the magnetization direction of the MTJ element MTJ is oriented in the horizontal direction with respect to the film surface, but may be oriented in the direction perpendicular to the film surface.

  The MTJ element MTJ may have a single junction structure having one nonmagnetic layer N as shown, or a double junction structure having two nonmagnetic layers N. The MTJ element MTJ having a double junction structure includes a first fixed layer, a second fixed layer, a recording layer provided between the first and second fixed layers, and a first fixed layer and a recording layer. A first nonmagnetic layer, and a second nonmagnetic layer provided between the second fixed layer and the recording layer.

  The planar shape of the MTJ element MTJ can be variously changed to, for example, a rectangle, a square, an ellipse, a circle, a hexagon, a rhombus, a parallelogram, a cross shape, and a bean shape (concave shape).

[3] Spin Injection Writing In the magnetic random access memory according to one embodiment of the present invention, data writing using a spin injection technique is performed.

  When writing “1” data, a current I flows from the fixed layer P to the recording layer F of the MTJ element MTJ as shown in FIG. That is, electrons e are injected from the recording layer F side to the fixed layer P side. Thereby, the magnetizations of the fixed layer P and the recording layer F are directed in opposite directions and become antiparallel. This high resistance state Rap is defined as “1” data.

  On the other hand, when “0” data is written, a current I flows from the recording layer F to the fixed layer P of the MTJ element MTJ as shown in FIG. That is, electrons e are injected from the fixed layer P side to the recording layer F side. As a result, the magnetizations of the fixed layer P and the recording layer F are oriented in the same direction and are in a parallel state. This low resistance state Rp is defined as “0” data.

  When such spin-injection writing is performed on the selected cell in FIG. Bit line BLa is set to power supply potential Vdd, and bit lines BL other than bit line BLa are set to ground potential Vss. Then, the word lines WLa and WLb are set to the power supply potential Vdd, and the word lines WL other than the word lines WLa and WLb are set to the ground potential Vss. As a result, the transistors Tra and Trb connected to the MTJ element MTJ element of the selected cell are both turned on, and the write current I flows from the bit line BLa through the MTJ element MTJ to the bit line BLb. Then, the magnetization directions of the fixed layer and the recording layer of the MTJ element MTJ are in a parallel or antiparallel state depending on the direction in which the write current I flows.

  Here, a plurality of cells other than the selected cell are connected to the bit lines BLa and BLb to which the selected cell is connected. However, in the 2T1R type configuration as shown in FIG. 1, the cells connected to the same bit lines BLa and BLb as the selected cell are electrically disconnected because the transistors Tr at both ends of the memory cell are not selected. It becomes a state. For this reason, the non-selected cell is not affected by the charge / discharge due to the read or write operation of the selected cell.

[4] Write operation [4-1] Specific example 1
FIG. 3 is a schematic configuration diagram for realizing the specific example 1 of the write operation of the magnetic random access memory according to the embodiment of the present invention. 4 and 5 are diagrams for explaining the “1” and “0” write operations according to the first specific example of FIG. A specific example 1 of the write operation will be described below.

  As shown in FIG. 3, in the first specific example of the write operation, the driver 20 is arranged only on the first end side of the memory cell array MCA, and the sinker 30 is arranged only on the second end side of the memory cell array MCA. ing. Therefore, one end of the bit line BL is connected only to the driver 20, and the other end of the bit line BL is connected only to the sinker 30.

  With this peripheral circuit configuration, in specific example 1 of the write operation, the write current I is applied only from the first end (upper side of the paper) to the second end (lower side of the paper) of the memory cell array MCA. It comes to flow.

  When “1” is written, as shown in FIG. 4, the transistors (transfer gate transistors) Trb1 and Tra2 connected to the bit lines BLa and BLb connected to the selected cell are turned on, and the transistors (transfer gate transistors) Tra1 and Trb2 are turned on. Turn off. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current source CCb1 to the selected cell. This write current I flows from the driver 20, the bit line BLb, the fixed layer P of the MTJ element MTJ to the recording layer F, the bit line BLa, and the sinker 30. That is, the write current I flows from the first end (upper side of the paper) to the second end (lower side of the paper) of the memory cell array MCA.

  When writing “0”, as shown in FIG. 5, the transistors Tra1 and Trb2 connected to the bit lines BLa and BLb connected to the selected cell are turned on, and the transistors Trb1 and Tra2 are turned off. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current source CCa1 to the selected cell. The write current I flows from the driver 20, the bit line BLa, and the recording layer F of the MTJ element MTJ to the fixed layer P, the bit line BLb, and the sinker 30. That is, the write current I flows from the first end (upper side of the paper) to the second end (lower side of the paper) of the memory cell array MCA.

  As described above, in the first specific example, the driver 20 and the sinker 30 of the write circuit are arranged at the opposite end of the memory cell array MCA. Accordingly, since the write current I flows from the first end (upper side of the paper) to the second end (lower side of the paper) of the memory cell array MCA, the write current I can be written regardless of which cell of the memory cell array MCA is selected. The length of the current path through which the current I flows is the same. Therefore, the resistance of the current path through which the write current I flows can be made almost equal without being affected by the position of the selected cell.

[4-2] Specific example 2
FIG. 6 is a schematic configuration diagram for realizing the specific example 2 of the write operation of the magnetic random access memory according to the embodiment of the present invention. 7 and 8 are diagrams for explaining the “1” and “0” write operations according to the second specific example of FIG. 6. A specific example 2 of the write operation will be described below.

  As shown in FIG. 6, in the specific example 2 of the write operation, the driver / sinker 40 is arranged only on one end side of the memory cell array MCA. Therefore, one end of the bit line BL is connected to the driver / sinker 40, and the other end of the bit line BL is not connected to the driver / sinker.

  With such a configuration of the peripheral circuit, in the specific example 2 of the write operation, the write current I flows only from one end (upper side of the paper) to one end (upper side of the paper) of the memory cell array MCA.

  When "1" is written, as shown in FIG. 7, transistors (transfer gate transistors) Tra1 and Trb1 connected to the bit lines BLa and BLb connected to the selected cell are turned on. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current source CCb1 to the selected cell. The write current I flows from the fixed layer P of the driver / sinker 40, the bit line BLb, and the MTJ element MTJ to the recording layer F, the bit line BLa, and the driver / sinker 40. That is, the write current I flows from one end (upper side of the paper) to one end (upper side of the paper) of the memory cell array MCA.

  When writing “0”, as shown in FIG. 8, the transistors Tra1 and Trb1 connected to the bit lines BLa and BLb connected to the selected cell are turned on. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current source CCa1 to the selected cell. The write current I flows from the driver / sinker 40, the bit line BLa, and the recording layer F of the MTJ element MTJ to the fixed layer P, the bit line BLb, and the driver / sinker 40. That is, the write current I flows from one end (upper side of the paper) to one end (upper side of the paper) of the memory cell array MCA.

  As described above, in the specific example 2, the driver / sinker 40 of the write circuit is arranged at one end of the memory cell array MCA. For this reason, peripheral circuits can be consolidated at one end of the memory cell array MCA. For example, if two memory cell arrays are arranged on the mirror surface centering on the peripheral circuit portion, circuit sharing is achieved and area efficiency is improved.

[4-3] Specific Example 3
FIG. 9 is a schematic configuration diagram for realizing the specific example 3 of the write operation of the magnetic random access memory according to the embodiment of the present invention. 10 and 11 are diagrams for explaining the “1” and “0” write operations according to the third specific example of FIG. FIG. 12 is a diagram for explaining the resistance value of the current path according to the third specific example of FIG. 9. A specific example 3 of the write operation will be described below.

  As shown in FIG. 9, in the third specific example of the write operation, the driver / sinker 40-1 is arranged on the first end side of the memory cell array MCA, and the driver / sinker on the second end side of the memory cell array MCA. 40-2 is arranged. Therefore, one end of the bit line BL is connected to the driver / sinker 40-1, and the other end of the bit line BL is connected to the driver / sinker 40-2.

  With such a configuration of the peripheral circuit, in specific example 3 of the write operation, the write current I is changed from the first and second ends (up and down of the drawing) of the memory cell array MCA to the first and second ends (the drawing of the drawing). The top and bottom).

  When "1" is written, as shown in FIG. 10, four transistors (transfer gate transistors) Tra1, Tra2, Trb1, Trb2 connected to the bit lines BLa, BLb connected to the selected cell are turned on. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current sources CCb1 and CCb2 to the selected cell. The write current I flows from the fixed layer P of the drivers / sinkers 40-1 and 40-2, the bit line BLb, and the MTJ element MTJ to the recording layer F, the bit line BLa, and the drivers / sinkers 40-1 and 40-2. . That is, the write current I flows from both ends (up and down on the paper surface) of the memory cell array MCA to both ends (up and down on the paper surface).

  When writing “0”, as shown in FIG. 11, four transistors (transfer gate transistors) Tra1, Tra2, Trb1, Trb2 connected to the bit lines BLa, BLb connected to the selected cell are turned on. Further, the word line WLab is set to the power supply potential Vdd, and the transistors Tra and Trb connected to both ends of the MTJ element MTJ element of the selected cell are turned on. As a result, the write current I flows from the constant current sources CCa1 and CCa2 to the selected cell. The write current I flows from the recording layers F of the drivers / sinkers 40-1 and 40-2, the bit lines BLa, and the MTJ elements MTJ to the fixed layer P, the bit line BLb, and the drivers / sinkers 40-1 and 40-2. . That is, the write current I flows from both ends (up and down on the paper surface) of the memory cell array MCA to both ends (up and down on the paper surface).

  As described above, in the specific example 3, the driver / sinkers 40-1 and 40-2 of the write circuit are arranged at both ends of the memory cell array MCA. Here, considering the resistance of the current path through which the write current I flows, the specific example 3 is connected in parallel as shown in FIG. 12, so the resistance is, for example, 4R / 3. Therefore, according to the specific example 3, the wiring resistance can be reduced as compared with the specific example 1 (resistance = 2R) and the specific example 2 (resistance = 4R).

  In specific examples 1 to 3 described above, the word line WL is a common line for simultaneously turning on / off the switches at both ends of the memory cell. However, the word line WL is provided separately for each switch at both ends of the memory cell. Also good.

  Further, in the above-described specific example 1 to specific example 3, ON / OFF of the transistors (transfer gate transistors) Tra1, Tra2, Trb1, and Trb2 can be controlled by “1” writing and “0” writing. A simple decoder circuit is provided.

[5] Read Operation The read operation of the magnetic random access memory according to the embodiment of the present invention uses the magnetoresistive effect.

  When data is read from the selected cell shown in FIG. Bit line BLa is set to power supply potential Vdd, and bit lines BL other than bit line BLa are set to ground potential Vss. Then, the word lines WLa and WLb are set to the power supply potential Vdd, and the word lines WL other than the word lines WLa and WLb are set to the ground potential Vss. As a result, the transistors Tra and Trb connected to the MTJ element MTJ element of the selected cell are both turned on, and the read current I flows from the bit line BLa through the MTJ element MTJ to the bit line BLb. Then, based on the resistance value of the MTJ element MTJ read based on the read current I, “1” and “0” data are discriminated.

  In the read operation, the current value may be read by applying a constant voltage between the cell array terminals, or the voltage value may be read by applying a constant current.

[6] Layout and sectional structure [6-1] Specific example 1
Specific Example 1 is an example of a word line sharing type that shares a word line that controls switches at both ends of the MTJ element.

  FIG. 13 is a schematic circuit diagram of Example 1 of the magnetic random access memory according to the embodiment of the present invention. The circuit configuration of the specific example 1 will be schematically described below.

  As shown in FIG. 13, in the memory cell MC of the first specific example, one end of the current path of the transistors Tr1 and Tr2 is connected to both ends of the MTJ element MTJ1, and the other end of the current path of the transistors Tr1 and Tr2 is the bit line BL1. , BL2 respectively. Since the gates of the transistors Tr1 and Tr2 are connected to the common word line WL1, the transistors Tr1 and Tr2 can be controlled on / off simultaneously.

  The memory cell MCx adjacent to the memory cell MC in the X direction uses the word line WL1 common to the memory cell MC, but uses bit lines BL3 and BL4 different from the memory cell MC.

  The memory cell MCy adjacent to the memory cell MC in the Y direction uses a word line WL2 different from the memory cell MC, but uses bit lines BL1 and BL2 which are common to the memory cell MC.

  FIG. 14 is a schematic layout diagram of Example 1 of the memory cell array of the magnetic random access memory according to the embodiment of the present invention. FIGS. 15A and 15B are partial layout diagrams of FIG. The layout of specific example 1 will be described below.

  As shown in FIG. 14, the bit lines BL1 to BL5 and the word lines WL1 to WL3 are arranged so as to intersect each other. Here, the bit lines BL1, BL3, and BL5 are formed of first metal layers M1a, M1b, and M1c, and the bit lines BL2 and BL4 are formed of third metal layers M3b and M3c. As shown in FIG. 16A, the metal layers M1a and M3a are overlapped with different metal layers, the metal layers M1b and M3b are overlapped with different metal layers, and the metal layers M1c and M3c are Although they are overlapped with different metal layers, FIG. 14 shows them shifted for convenience.

  In memory cell MC, MTJ element MTJ1 is arranged between bit lines BL1 and BL2, and contacts C1 and C2 are arranged on both sides of MTJ element MTJ1. A word line WL1 is arranged in the vicinity of the contacts C1 and C2, and contacts C5 and C6 are arranged across the word line WL1.

  One end of the MTJ element MTJ1 is connected to the contact C1, and this contact C1 is connected to one end of the source / drain of the transistor Tr1. The other end of the source / drain of the transistor Tr1 is connected to the bit line BL1 via a contact C5. Here, as shown in FIG. 15A, the bit line BL1 is provided with a protrusion P1 protruding to the contact C5 side (MTJ element MTJ1 side), and the protrusion P1 and the contact C5 are connected. The bit line BL1 and the contact C5 are connected.

  The other end of the MTJ element MTJ1 is connected to the contact C2 through the metal layer M2a, and this contact C2 is connected to one end of the source / drain of the transistor Tr2. The other end of the source / drain of the transistor Tr2 is connected to the bit line BL2 via a contact C6. Here, as shown in FIG. 15B, the bit line BL2 is provided with a projecting portion P2 projecting to the contact C6 side (MTJ element MTJ1 side), and the projecting portion P2 and the contact C6 are connected. The bit line BL2 and the contact C6 are connected.

  Fig.16 (a) shows sectional drawing along the XVIA-XVIA line | wire of FIG. FIG. 16B is a cross-sectional view taken along line XVIB-XVIB in FIG. FIG. 16C is a cross-sectional view taken along the line XVIC-XVIC in FIG. Below, the cross-sectional structure of the specific example 1 is demonstrated.

  As shown in FIG. 16A, in the memory cell MC, the bottom surface of the MTJ element MTJ1 is connected to the transistor Tr1 via the base metal layer BASE1 and the contact C1, and the top surface of the MTJ element MTJ1 is composed of the contact C21 and the metal layer. (Second metal layer) M2a and contact C2 are connected to transistor Tr2.

  The bit line BL1 connected to the transistor Tr1 and the bit line BL2 connected to the transistor Tr2 are arranged at different wiring levels (first metal layer and third metal layer). Below the bit line BL2, the bit line BL3 of the first metal layer in the adjacent cell is arranged, and the bit lines BL2 and BL3 of the adjacent cell are arranged to overlap.

  As shown in FIG. 16B, in the memory cell MC, one end of the source / drain of the transistor Tr1 is connected to the MTJ element MTJ1 through the contact C1 and the base metal layer BASE1, and the other of the source / drain of the transistor Tr1. The end is connected to the bit line BL1 via a contact C5. The gate of the transistor Tr1 is connected to the word line WL1.

  The transistor Tr5 of the cell adjacent to the memory cell MC shares the source / drain diffusion layer with the transistor Tr1 of the memory cell MC. For this reason, the transistor Tr5 is connected to the bit line BL1 using a contact C5 common to the transistor Tr1.

  As shown in FIG. 16C, in the memory cell MC, one end of the source / drain of the transistor Tr2 is connected to the MTJ element MTJ1 via the contact C2 and the metal layer M2a, and the other end of the source / drain of the transistor Tr2 Is connected to the bit line BL2 via a contact C6. The gate of the transistor Tr2 is connected to the word line WL1. Therefore, the gates of the transistors Tr1 and Tr2 are connected to the common word line WL1.

  According to the first specific example as described above, the control of the word lines WL of the switches at both ends of the MTJ element MTJ is made a common line, and the bit lines BL are hierarchically overlapped between adjacent cells. For this reason, the memory cell area can be reduced.

[6-2] Specific example 2
Specific example 2 is a circuit configuration in which the cell size is reduced in a manner different from that of specific example 1, and is a bit line sharing type example in which one bit line is shared between cells adjacent in an oblique direction.

  FIG. 17 is a schematic circuit diagram of Example 2 of the magnetic random access memory according to the embodiment of the invention. The circuit configuration of the specific example 2 will be schematically described below.

  As shown in FIG. 17, in the memory cell MC of the specific example 2, one end of the current path of the transistors Tr5 and Tr6 is connected to both ends of the MTJ element MTJ3, and the other end of the current path of the transistors Tr5 and Tr6 is the bit line BL2. , BL3, respectively. The gates of the transistors Tr5 and Tr6 are connected to different word lines WL3 and WL2, respectively.

  In the memory cell MCz adjacent to the memory cell MC in the oblique direction (Z direction), one end of the current path of the transistors Tr11 and Tr12 is connected to both ends of the MTJ element MTJ6, and the other end of the current path of the transistors Tr11 and Tr12 is the bit. The lines are connected to the lines BL1 and BL2, respectively. Therefore, adjacent memory cells MC and memory cells MCz share one bit line BL2.

  FIG. 18 is a schematic layout diagram of a specific example 2 of the memory cell array of the magnetic random access memory according to the embodiment of the invention. The layout of specific example 2 will be described below.

  As shown in FIG. 18, the bit lines BL1 to BL5 and the word lines WL1 to WL5 are arranged so as to intersect each other. Here, the bit lines BL1 to BL5 are formed of the first metal layers M1a, M1b, M1c, M1d, and M1e, and are arranged at the same wiring level.

  In memory cell MC, MTJ element MTJ3 is arranged above bit line BL3, and contacts C5 and C6 are arranged on both sides of MTJ element MTJ3. Therefore, the contact C5 is located between the bit lines BL2 and BL3, and the contact C6 is located between the bit lines BL3 and BL4.

  A word line WL3 is disposed in the vicinity of the contact C5, and a bit line contact M0f is disposed across the word line WL3. The bit line contact M0f extends from between the bit lines BL2 and BL3 to the bit line BL2, and is connected to the bit line BL2.

  A word line WL2 is disposed in the vicinity of the contact C6, and a bit line contact M0c is disposed across the word line WL2. The bit line contact M0c extends from between the bit lines BL3 and BL4 to the bit line BL3 and is connected to the bit line BL3.

  One end of the MTJ element MTJ3 is connected to the contact C5, and this contact C5 is connected to one end of the source / drain of the transistor Tr5. The other end of the source / drain of the transistor Tr5 is connected to the bit line BL2 via the bit line contact M0f.

  The other end of the MTJ element MTJ3 is connected to the contact C6 through the metal layer M2c, and this contact C6 is connected to one end of the source / drain of the transistor Tr6. The other end of the source / drain of the transistor Tr6 is connected to the bit line BL3 via the bit line contact M0c.

  FIG. 19A is a cross-sectional view taken along line XIXA-XIXA in FIG. FIG. 19B is a cross-sectional view taken along line XIXB-XIXB in FIG. FIG. 19C is a cross-sectional view taken along the line XIXC-XIXC in FIG. Below, the cross-sectional structure of the specific example 2 is demonstrated.

  As shown in FIG. 19A, in the memory cell MC, the bottom surface of the MTJ element MTJ3 is connected to the transistor Tr5 via the base metal layer BASE3 and the contact C5, and the top surface of the MTJ element MTJ3 is composed of the contact C23 and the metal layer. (Second metal layer) M2c and contact C6 are connected to transistor Tr6.

  The bit line BL2 connected to the transistor Tr5 and the bit line BL3 connected to the transistor Tr6 are arranged on the same wiring level (first metal layer).

  As shown in FIG. 19B, in the memory cell MC, one end of the source / drain of the transistor Tr5 is connected to the MTJ element MTJ3 via the contact C5 and the base metal layer BASE3. The end is connected to the bit line BL2 via the bit line contact M0f. The gate of the transistor Tr5 is connected to the word line WL3.

  The transistor Tr12 of the cell adjacent to the memory cell MC shares the source / drain diffusion layer with the transistor Tr5 of the memory cell MC. Therefore, the transistor Tr12 is connected to the bit line BL2 using the bit line contact M0f common to the transistor Tr5.

  As shown in FIG. 19C, in the memory cell MC, the MTJ element MTJ3 is disposed above the adjacent word lines WL2 and WL3. The bit line contact M0c is disposed between the adjacent word lines WL1 and WL2, and is connected to the bit line BL3 via the contact C24.

  According to the second specific example as described above, the switches at both ends of the MTJ element share the connection contact between the switch of the cell adjacent in the diagonal direction and the bit line. One bit line is shared between cells adjacent in the oblique direction. For this reason, the memory cell area can be reduced.

  In the specific example 2, the bit line is formed below the MTJ element. However, the bit line may be formed above the MTJ element.

[7] Effect According to one embodiment of the present invention, switches are provided at both ends of the MTJ element. For this reason, at the time of reading and writing, by turning off the switches at both ends of the MTJ element of the non-selected cell connected to the two activated bit lines, the non-selected cell is electrically connected from the activated bit line. Can be separated. Therefore, it is possible to reduce the probability of occurrence of a soft error due to thermal disturbance by charging and discharging during reading and writing.

  In addition, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention in the implementation stage. Furthermore, the above embodiments include inventions at various stages, and various inventions can be extracted by appropriately combining a plurality of disclosed constituent elements. For example, even if some constituent requirements are deleted from all the constituent requirements shown in the embodiment, the problem described in the column of the problem to be solved by the invention can be solved, and the effect described in the column of the effect of the invention Can be obtained as an invention.

1 is a schematic circuit diagram of a memory cell array of a magnetic random access memory according to an embodiment of the present invention. 2A and 2B are schematic views of an MTJ element using a spin transfer magnetization switching technique according to an embodiment of the present invention. The schematic block diagram for implement | achieving the specific example 1 of the write-in operation | movement of the magnetic random access memory which concerns on one Embodiment of this invention. FIG. 4 is a diagram for explaining a “1” write operation according to the specific example 1 of FIG. 3. FIG. 4 is a diagram for explaining a “0” write operation according to the first specific example of FIG. 3. The schematic block diagram for implement | achieving the specific example 2 of the write-in operation | movement of the magnetic random access memory which concerns on one Embodiment of this invention. FIG. 7 is a diagram for explaining a “1” write operation according to the second specific example of FIG. 6. The figure for demonstrating "0" write operation by the specific example 2 of FIG. The schematic block diagram for implement | achieving the specific example 3 of the write-in operation | movement of the magnetic random access memory which concerns on one Embodiment of this invention. FIG. 10 is a diagram for explaining a “1” write operation according to specific example 3 of FIG. 9. FIG. 10 is a diagram for explaining a “0” write operation according to the third specific example of FIG. 9. The figure for demonstrating the resistance value of the current pathway by the specific example 3 of FIG. 1 is a schematic circuit diagram of a specific example 1 of a magnetic random access memory according to an embodiment of the present invention. 1 is a schematic layout diagram of a specific example 1 of a memory cell array of a magnetic random access memory according to an embodiment of the present invention. FIGS. 15A and 15B are partial layout diagrams of FIG. 16A is a cross-sectional view taken along line XVIA-XVIA in FIG. 14, FIG. 16B is a cross-sectional view taken along line XVIB-XVIB in FIG. 14, and FIG. Sectional drawing along a XVIC-XVIC line. The schematic circuit diagram of the specific example 2 of the magnetic random access memory which concerns on one Embodiment of this invention. The schematic layout figure of the specific example 2 of the memory cell array of the magnetic random access memory which concerns on one Embodiment of this invention. 19A is a cross-sectional view taken along line XIXA-XIXA in FIG. 18, FIG. 19B is a cross-sectional view taken along line XIXB-XIXB in FIG. 18, and FIG. Sectional drawing along a XIXC-XIXC line.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 20 ... Driver, 30 ... Sinker, 40, 40-1, 40-2 ... Driver / sinker, MTJ ... MTJ element, P ... Fixed layer, F ... Recording layer, N ... Nonmagnetic layer, BL ... Bit line, WL ... Word line, Tr ... Transistor, MC ... Memory cell, MCA ... Memory cell array, CC ... Constant current source, C ... Contact, BASE ... Base metal layer, M0 ... Bit line contact, M1 ... First metal layer, M2 ... Second Metal layer, M3 ... third metal layer.

Claims (5)

A first pinned layer whose magnetization direction is fixed, a first recording layer whose magnetization direction is reversible, a first nonmagnetic layer provided between the first pinned layer and the first recording layer, And the magnetization directions of the first fixed layer and the first recording layer are parallel or anti-parallel depending on the direction of the current flowing between the first fixed layer and the first recording layer. A first magnetoresistive element in a state;
A first transistor having a first gate and a first current path, one end of the first current path being connected to the first fixed layer;
A second transistor having a second gate and a second current path, one end of the second current path being connected to the first recording layer;
A first bit line to which the other end of the first current path is connected;
A magnetic random access memory comprising: a second bit line to which the other end of the second current path is connected. The first and second gates are connected to a common word line;
The magnetic random access memory according to claim 1, wherein the first and second bit lines are arranged at different wiring layer levels. The first and second gates are connected to a common word line;
The first magnetoresistive element is disposed between the first and second bit lines;
The first bit line has a first protrusion that protrudes toward the first magnetoresistive element,
The second bit line has a second projecting portion projecting to the first magnetoresistive element side,
The other end of the first current path is connected to the first protrusion through a first contact;
2. The magnetic random access memory according to claim 1, wherein the other end of the second current path is connected to the second projecting portion via a second contact. A second pinned layer whose magnetization direction is fixed, a second recording layer whose magnetization direction is reversible, a second nonmagnetic layer provided between the second pinned layer and the second recording layer, And the magnetization directions of the second fixed layer and the second recording layer are parallel or anti-parallel depending on the direction of the current flowing between the second fixed layer and the second recording layer. A second magnetoresistive element that is in a state;
A third transistor having a third gate and a third current path, one end of the third current path being connected to the second fixed layer;
A fourth transistor having a fourth gate and a fourth current path, one end of the fourth current path being connected to the second recording layer;
A third bit line to which the other end of the third current path is connected;
A fourth bit line to which the other end of the fourth current path is connected;
The first and second gates are connected to a common word line;
The third and fourth gates are connected to the word line;
The magnetic random access memory according to claim 1, wherein the third bit line overlaps with the second bit line at a different wiring layer level. A second pinned layer whose magnetization direction is fixed, a second recording layer whose magnetization direction is reversible, a second nonmagnetic layer provided between the second pinned layer and the second recording layer, And the magnetization directions of the second fixed layer and the second recording layer are parallel or anti-parallel depending on the direction of the current flowing between the second fixed layer and the second recording layer. A second magnetoresistive element that is in a state;
A third transistor having a third gate and a third current path, one end of the third current path being connected to the second fixed layer;
A fourth transistor having a fourth gate and a fourth current path, one end of the fourth current path being connected to the second recording layer;
A first word line connected to the first gate;
A second word line connected to the second gate and adjacent to the first word line;
A third word line connected to the third gate and adjacent to the second word line;
A fourth word line connected to the fourth gate and adjacent to the third word line;
A third bit line to which the other end of the third current path is connected;
Further comprising
The magnetic random access memory according to claim 1, wherein the other ends of the first and fourth current paths are connected to the first bit line through a common contact.

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