JP2008085961A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator Download PDF

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JP2008085961A
JP2008085961A JP2006266818A JP2006266818A JP2008085961A JP 2008085961 A JP2008085961 A JP 2008085961A JP 2006266818 A JP2006266818 A JP 2006266818A JP 2006266818 A JP2006266818 A JP 2006266818A JP 2008085961 A JP2008085961 A JP 2008085961A
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container body
piezoelectric
vibration element
piezoelectric vibration
integrated circuit
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Masaru Morimoto
勝 森本
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillator that can inspect a piezoelectric oscillation element easily for improving productivity and workability even after assembly, and can be thinned. <P>SOLUTION: In the piezoelectric oscillator, an element mount pad is formed on a bottom surface in the recessed space in a rectangular vessel, the piezoelectric oscillation element and an integrated circuit element for oscillation are mounted onto the element mount pad, a rectangular lid for covering the opening of the vessel is arranged at the sidewall top of the vessel, the lid is fixed to a conductor pattern for sealing provided at the sidewall top, and the piezoelectric vibration element in the vessel and the integrated circuit element for oscillation are sealed airtightly. In this case, on the sidewall top surface between the periphery-side edge of the conductor pattern for sealing and that of the sidewall top, there is an electrode terminal for monitors connected to the piezoelectric vibration element electrically. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、携帯用通信機器等の電子機器に用いられる電子部品の1つである圧電デバイスのうち、容器体に少なくとも圧電振動素子とその圧電振動素子と電気的に接続する発振回路が内蔵されている集積回路素子を搭載した圧電発振器に関するものである。    In the present invention, among piezoelectric devices that are one of electronic components used in electronic devices such as portable communication devices, a container body includes at least a piezoelectric vibration element and an oscillation circuit that is electrically connected to the piezoelectric vibration element. The present invention relates to a piezoelectric oscillator on which an integrated circuit element is mounted.

従来、携帯用通信機器等の電子機器には、電気機器或いは電子機器に搭載する電子部品の基準動作信号やクロック信号等の発生源として、電子部品の一つである圧電発振器が搭載されている。    Conventionally, an electronic device such as a portable communication device is equipped with a piezoelectric oscillator, which is one of the electronic components, as a source for generating a reference operation signal, a clock signal, or the like of an electronic device mounted on an electric device or an electronic device. .

かかる従来の圧電発振器の説明として、図5に従来の圧電発振器の一実施形態を例示する。即ち、セラミック材料等から成る容器体101に形成した凹部空間(不図示)内には、水晶、タンタル酸リチウム、ニオブ酸リチウム又は圧電セラミックスを素材とする矩形平板状の圧電振動素子(不図示)を、その一短辺側でのみ保持する形で搭載している。更に、この圧電振動素子と電気的に接続した発振回路を少なくとも内蔵した集積回路素子(不図示)とを一緒に搭載している。更に容器体100上に金属製の蓋体102を載置固着することにより圧電振動素子及び集積回路素子を搭載した凹部空間を気密封止し、圧電発振器100を構成する(例えば、特許文献1を参照。)。また、圧電発振器100は、容器体101の側面に、圧電振動素子の共振周波数値やクリスタルインピーダンス(以下CIという)値等の電気的特性を測定するために、凹部空間内に搭載された圧電振動素子と電気的に接続したモニタ用電極端子103が、少なくとも2つ設けられている。(例えば、特許文献2を参照)。    As an explanation of such a conventional piezoelectric oscillator, FIG. 5 illustrates an embodiment of a conventional piezoelectric oscillator. That is, a rectangular plate-shaped piezoelectric vibration element (not shown) made of quartz, lithium tantalate, lithium niobate or piezoelectric ceramics is formed in a recessed space (not shown) formed in the container body 101 made of a ceramic material or the like. Is mounted in such a way that it is held only on one short side. Further, an integrated circuit element (not shown) including at least an oscillation circuit electrically connected to the piezoelectric vibration element is mounted together. Furthermore, a metal lid 102 is placed and fixed on the container body 100 to hermetically seal the recessed space in which the piezoelectric vibration element and the integrated circuit element are mounted, and the piezoelectric oscillator 100 is configured (for example, Patent Document 1). reference.). In addition, the piezoelectric oscillator 100 is mounted on the side surface of the container body 101 in order to measure electrical characteristics such as a resonance frequency value and a crystal impedance (hereinafter referred to as CI) value of the piezoelectric vibration element. At least two monitor electrode terminals 103 electrically connected to the element are provided. (For example, see Patent Document 2).

上述したような形態の圧電発振器については以下のような先行技術文献が開示されている。
特開2004−15441号公報 特開2004−215799号公報 特開2001−119244号公報 特開2002−280835号公報
The following prior art documents are disclosed about the piezoelectric oscillator of the above-mentioned form.
JP 2004-15441 A JP 2004-215799 A JP 2001-119244 A JP 2002-280835 A

尚、出願人は、前記した先行技術文献情報で特定される先行技術文献以外には、本発明に関連する先行技術文献を本件出願時までに発見するに到らなかった。    In addition, the applicant did not come to discover prior art documents related to the present invention by the time of the filing of the application other than the prior art documents specified by the prior art document information described above.

上述した従来の圧電発振器においては、通常、圧電発振器の組み立てが完了した後、圧電振動素子のCI特性をインピーダンスアナライザ等の電気特性測定器で測定することにより、圧電発振器としての電気的特性検査を行い、圧電発振器として良否を判定している。そのため、容器体の側面にはモニタ用電極端子が被着形成されていたが、圧電発振器の薄型化に伴い、容器体の側面に形成されているモニタ用電極端子の表面積を縮小する必要があった。しかしながら、表面積が縮小されたことにより、電気特性測定器の測定コンタクトピンをモニタ用端子電極に接触させることが困難になってきた。よって接触不良による検査の作業性や効率が著しく低下してしまうといった課題があった。    In the conventional piezoelectric oscillator described above, after the assembly of the piezoelectric oscillator is completed, the CI characteristic of the piezoelectric vibration element is measured by an electrical characteristic measuring instrument such as an impedance analyzer, thereby performing an electrical characteristic inspection as the piezoelectric oscillator. The quality of the piezoelectric oscillator is determined. For this reason, the monitor electrode terminals are deposited on the side surfaces of the container body. However, as the piezoelectric oscillator is made thinner, it is necessary to reduce the surface area of the monitor electrode terminals formed on the side surfaces of the container body. It was. However, since the surface area is reduced, it has become difficult to bring the measurement contact pin of the electrical property measuring instrument into contact with the monitor terminal electrode. Therefore, there has been a problem that the workability and efficiency of the inspection due to poor contact are significantly reduced.

又、圧電発振器の外側面に、測定が可能な大きさのモニタ用電極端子を設ける必要があるため、このモニタ用電極端子が圧電発振器の薄型化の妨げとなる虞がある。    In addition, since it is necessary to provide a monitor electrode terminal having a size capable of measurement on the outer surface of the piezoelectric oscillator, the monitor electrode terminal may hinder the thinning of the piezoelectric oscillator.

本発明は上記課題に鑑み案出されたもので、その目的は、組み立て後であっても、圧電振動素子の検査を容易に行うことができることにより生産性や作業性を向上させることができ、且つ薄型化に対応可能な圧電発振器を提供することにある。    The present invention has been devised in view of the above problems, and its purpose is to improve the productivity and workability by being able to easily inspect the piezoelectric vibration element even after assembly. Another object of the present invention is to provide a piezoelectric oscillator that can be made thinner.

本発明は上述した課題を解決するために成されたものであり、主面形状が概略矩形状で直方体の容器体には、この容器体の一方の主面に開口部を有する凹部空間が形成されており、この凹部空間内底面に素子搭載パッドが形成され、この素子搭載パッドには圧電振動素子並びに集積回路素子が搭載されており、凹部空間を囲繞する容器体の側壁頂部には、容器体の開口部を覆う矩形状の蓋体が配置されており、この蓋体と側壁頂部に設けた封止用導体パターンとを固着し、容器体内の圧電振動素子並びに集積回路素子を気密封止して成る圧電発振器において、
封止用導体パターンの外周側端部と、側壁頂部の外周側端部との間の側壁頂部表面に、圧電振動素子と電気的に接続したモニタ用電極端子が設けられていることを特徴とする圧電発振器である。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and a rectangular parallelepiped container body having a substantially rectangular main surface is formed with a recessed space having an opening on one main surface of the container body. An element mounting pad is formed on the inner bottom surface of the recess space, and a piezoelectric vibration element and an integrated circuit element are mounted on the element mounting pad, and a container on the top of the side wall of the container body surrounding the recess space A rectangular lid that covers the opening of the body is disposed, and the lid and the sealing conductor pattern provided on the top of the side wall are fixed to hermetically seal the piezoelectric vibration element and the integrated circuit element in the container. In the piezoelectric oscillator formed by
A monitor electrode terminal electrically connected to the piezoelectric vibration element is provided on the surface of the side wall top portion between the outer peripheral side end portion of the sealing conductor pattern and the outer peripheral side end portion of the side wall top portion. This is a piezoelectric oscillator.

又、少なくとも2つモニタ用電極端子が、容器体の対向する2辺の側壁頂部に、凹部空間を挟んで対角となる形態で形成されていることを特徴とする前記記載の圧電発振器でもある。    In the piezoelectric oscillator as described above, at least two monitor electrode terminals may be formed diagonally on the tops of the opposite side walls of the container body with the recessed space interposed therebetween. .

本発明の圧電発振器によれば、容器体の側壁頂部に設けた封止用導体パターンの外周側端部と、側壁頂部の外周側端部との間の側壁頂部表面に、圧電振動素子の電気的特性を測定するためのモニタ用電極端子が設けられていることにより、圧電振動素子の電気的特性の測定に際し、電気特性測定器のコンタクトピンとの接触を確実に行える大きさのモニタ用電極端子を形成することが可能となり、検査の作業性及び検査効率、生産性を向上させることが可能となる。又、容器体の側壁外側面にモニタ用電極端子を形成する必要がないので、容器体側壁外側面にモニタ用電極端子を形成するスペースが必要が無く圧電発振器をより薄型化することが可能となる。    According to the piezoelectric oscillator of the present invention, the electricity of the piezoelectric vibration element is formed on the surface of the side wall top between the outer peripheral end of the sealing conductor pattern provided on the top of the side wall of the container body and the outer peripheral end of the side wall top. Monitor electrode terminal for measuring the electrical characteristics, so that when measuring the electrical characteristics of the piezoelectric vibration element, the monitor electrode terminal is of a size that can reliably contact the contact pins of the electrical property measuring instrument This makes it possible to improve inspection workability, inspection efficiency, and productivity. Moreover, since it is not necessary to form the monitor electrode terminal on the outer side surface of the container body, there is no need for a space for forming the monitor electrode terminal on the outer side surface of the container body, and the piezoelectric oscillator can be made thinner. Become.

また、圧電振動素子及び集積回路素子を容器体の凹部空間内に搭載する際には、それぞれの素子が素子搭載パッド上の所定の位置に高精度に配置されなくてはならない。本発明における圧電発振器の一形態では、モニタ用電極端子が封止用電極パターンの外周側端部と外壁頂部の外周側端部との間の外壁頂部表面に、凹部空間開口部を挟んで対角となる形態で設けられており、更に、このモニタ用電極端子は凹部空間内の圧電振動素子及び集積回路素子の搭載位置に比較的近く、且つ圧電振動素子及び集積回路素子を搭載する際に、圧電振動素子及び集積回路素子により隠されない位置に形成されているため、このモニタ用電極端子を圧電振動素子及び集積回路素子の搭載位置決め用の基準マークとして用いることにより、圧電振動素子及び発振用集積回路素子の搭載精度を向上させることが可能となる。    Further, when the piezoelectric vibration element and the integrated circuit element are mounted in the recessed space of the container body, the respective elements must be arranged with high accuracy at predetermined positions on the element mounting pad. In one embodiment of the piezoelectric oscillator according to the present invention, the monitor electrode terminal is opposed to the outer wall top surface between the outer peripheral end of the sealing electrode pattern and the outer peripheral end of the outer wall with the recess space opening interposed therebetween. Further, the monitor electrode terminal is relatively close to the mounting position of the piezoelectric vibration element and the integrated circuit element in the recessed space, and when the piezoelectric vibration element and the integrated circuit element are mounted. Since the monitor electrode terminal is used as a reference mark for mounting positioning of the piezoelectric vibration element and the integrated circuit element, the piezoelectric vibration element and the oscillation circuit are oscillated. It becomes possible to improve the mounting accuracy of the integrated circuit element.

因って、本発明により、圧電振動素子及び集積回路素子の搭載作業や、内部に搭載した圧電振動素子の特性検査を容易簡便に行うことができることにより、生産性や作業性を向上させることができ、且つ薄型化に対応可能な圧電発振器を提供することにある。    Therefore, according to the present invention, the mounting work of the piezoelectric vibration element and the integrated circuit element and the characteristic inspection of the piezoelectric vibration element mounted inside can be easily and easily performed, thereby improving the productivity and workability. An object of the present invention is to provide a piezoelectric oscillator that can be made thin and can be made thin.

以下、本発明を実施形態に関する詳細な説明を、各図を参照して行う。
図1は本発明の一実施形態に係る圧電発振器を例に示した分解斜視図である。図2は、図1に記載の圧電発振器を組み立てた後の形態を示した概略断面図である。尚、各図では、同じ符号は同じ部品を示し、又説明を明りょうにするため構造体の一部を図示していない。更に図示した寸法も一部誇張して示している。
これらの図において、圧電発振器は、内部に搭載する圧電振動素子の素材として圧電材の1つである水晶を用いたものを示しており、主面形状が矩形の容器体10の内部に形成された凹部空間11内に、その圧電振動素子20と、圧電振動素子20と電気的に接続する発振回路や周波数調整用回路が内蔵された集積回路素子30を収容し、蓋体50によって凹部空間11を気密封止した構造である。
Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is an exploded perspective view illustrating a piezoelectric oscillator according to an embodiment of the present invention as an example. FIG. 2 is a schematic cross-sectional view showing a form after the piezoelectric oscillator shown in FIG. 1 is assembled. In each figure, the same reference numerals indicate the same parts, and a part of the structure is not shown for clarity. In addition, some of the illustrated dimensions are exaggerated.
In these drawings, the piezoelectric oscillator shows a material using a crystal, which is one of piezoelectric materials, as a material of a piezoelectric vibration element mounted therein, and is formed inside a container body 10 having a rectangular main surface shape. In the recessed space 11, the piezoelectric vibration element 20 and an integrated circuit element 30 incorporating an oscillation circuit and a frequency adjusting circuit electrically connected to the piezoelectric vibration element 20 are housed. Is a hermetically sealed structure.

容器体10は、例えば、アルミナセラミックス、ガラス−セラミック等のセラミック材料から成る絶縁層を複数層積層することよって形成されており、容器体10の上主面には、中央域に矩形状に開口する凹部空間11が、凹部空間11の開口部を囲繞する容器体10の側壁の開口側頂部表面上の全周には、環状の封止用導体パターン12が形成され、容器体10の一辺における封止用導体パターン12の外周側端部と側壁頂部端部との間の側壁頂部表面には、圧電振動素子20のCIや共振周波数等の電気的特性を測定するためのモニタ用電極端子16が設けられている。本発明では、容器体10を構成する複数の絶縁層のうち、従来容器体の側壁外側面にモニタ用電極端子を形成していた絶縁層を省いた形態で形成できるので、容器体10の薄型化が可能となる。    The container body 10 is formed, for example, by laminating a plurality of insulating layers made of a ceramic material such as alumina ceramics or glass-ceramic, and the container body 10 has a rectangular opening in the central region on the upper main surface. An annular sealing conductor pattern 12 is formed on the entire circumference of the opening-side top surface of the side wall of the container body 10 in which the recessed space 11 that surrounds the opening of the recessed space 11. A monitoring electrode terminal 16 for measuring electrical characteristics such as CI and resonance frequency of the piezoelectric vibration element 20 is provided on the side wall top surface between the outer peripheral side end of the sealing conductor pattern 12 and the side wall top end. Is provided. In the present invention, among the plurality of insulating layers constituting the container body 10, the container body 10 can be formed in a form in which the insulating layer in which the monitor electrode terminal is formed on the outer side surface of the side wall of the conventional container body is omitted. Can be realized.

又、容器体10の外部実装側主面(下主面)には、電源電圧端子、出力端子及びグランド端子を含む複数個の外部接続用電極端子13が設けられている。容器体10は、その上主面側に開口する凹部空間11の内部に圧電材の1つである水晶を素材とする圧電振動素子20並びに集積回路素子30を搭載するためのものであり、容器体10の凹部空間11内には、集積回路素子を搭載する為の集積回路素子搭載パッド14、及び圧電振動素子20の表裏両主面に形成された励振用電極21と、各個電気的に接続される圧電振動素子搭載パッド15が被着形成されている。    A plurality of external connection electrode terminals 13 including a power supply voltage terminal, an output terminal, and a ground terminal are provided on the external mounting side main surface (lower main surface) of the container body 10. The container body 10 is for mounting the piezoelectric vibration element 20 and the integrated circuit element 30 made of quartz, which is one of the piezoelectric materials, in the recessed space 11 opened on the upper main surface side. In the recessed space 11 of the body 10, an integrated circuit element mounting pad 14 for mounting an integrated circuit element and excitation electrodes 21 formed on both front and back main surfaces of the piezoelectric vibration element 20 are electrically connected to each other. The piezoelectric vibration element mounting pad 15 to be applied is deposited.

この集積回路素子搭載パッド14は、発振用集積回路素子30が電気的に接続され、容器体10内部の配線導体やビアホール導体等を介して外部接続用電極端子13のうちの電源電圧端子ならびに出力端子に電気的に接続される。又、圧電振動素子搭載パッド15は、圧電振動素子20に形成されている励振用電極21に導電性接着材40を介して電気的に接続され、容器体10の内部の配線導体やビアホール導体等を介して、集積回路素子30に電気的に接続される。更に、圧電振動素子搭載パッド15は、容器体10内部の配線導体やビアホール導体等を介してモニタ用電極端子16にも電気的に接続されている。    The integrated circuit element mounting pad 14 is electrically connected to the oscillation integrated circuit element 30, and the power supply voltage terminal and the output of the external connection electrode terminal 13 through a wiring conductor, a via-hole conductor or the like inside the container body 10. Electrically connected to the terminal. Further, the piezoelectric vibration element mounting pad 15 is electrically connected to the excitation electrode 21 formed on the piezoelectric vibration element 20 via the conductive adhesive 40, and the wiring conductor inside the container body 10, the via hole conductor, etc. And is electrically connected to the integrated circuit element 30. Furthermore, the piezoelectric vibration element mounting pad 15 is also electrically connected to the monitor electrode terminal 16 via a wiring conductor, a via-hole conductor, or the like inside the container body 10.

また、容器体10側壁の凹部空間11開口部側頂部表面に形成された封止用導体パターン12は、例えば、タングステン(W)、モリブデン(Mo)等から成る基層の表面にニッケル(Ni)層及び金(Au)層を順次、容器体10の環状に囲繞する形態で被着させることによって10μm〜25μmの厚みに形成されており、その封止用導体パターン12は、後述する蓋体50を、蓋体50に形成された封止部材51を介して、容器体10の上面に接合させるためのものであり、かかる封止用導体パターン12を上述したように、W若しくはMoから成る基層の表面にNi層及びAu層を順次被着させた構成となしておくことにより、封止用導体パターン12に対する封止部材51の濡れ性を良好とし、圧電発振器の気密信頼性及び生産性を向上させる。    Further, the sealing conductor pattern 12 formed on the top surface of the recess 10 on the side wall of the container body 10 has a nickel (Ni) layer on the surface of a base layer made of tungsten (W), molybdenum (Mo), or the like. And a gold (Au) layer are formed in a thickness of 10 μm to 25 μm by sequentially depositing the container body 10 so as to surround the annular shape of the container body 10, and the sealing conductive pattern 12 includes a lid body 50 described later. In order to join the upper surface of the container body 10 through the sealing member 51 formed on the lid 50, the sealing conductor pattern 12 is formed of a base layer made of W or Mo as described above. The structure in which the Ni layer and the Au layer are sequentially deposited on the surface improves the wettability of the sealing member 51 with respect to the sealing conductor pattern 12, and improves the hermetic reliability and productivity of the piezoelectric oscillator. Improve.

また、容器体10の内部には、一方の終端を容器体10の封止用導体パターン12に他方の終端を容器体10の外部接続用電極端子13に接続させたビア導体(図示せず)が埋設させており、容器体10の側壁部の開口側頂面に被着させた封止用導体パターン12上に、封止部材51を介して蓋体50を接合することによって、蓋体50がビア導体を介して容器体10の下面に形成されている外部接続用電極端子13のうちグランド端子と電気的に接続される。このように、金属素材からなる蓋体50を外部接続用電極端子13のグランド端子と電気的に接続させておくことにより、圧電発振器の使用の際には、蓋体50がグランド電位となるため、蓋体50の電磁シールド作用によって、圧電振動素子20並びに発振用集積回路素子30を外部からの不要な電気的作用により良好に保護することができる。このようなグランド端子を含む容器体10の実装側主面の外部接続用電極端子13は、圧電発振器をマザーボード等の外部配線基盤上に搭載する際に、外部配線基盤の配線と半田や金属バンプ等の導電性を有する接合材を介して電気的に接続するための電極端子として機能する。    In addition, a via conductor (not shown) has one end connected to the sealing conductor pattern 12 of the container body 10 and the other end connected to the external connection electrode terminal 13 of the container body 10 inside the container body 10. The lid 50 is joined to the sealing conductor pattern 12 via the sealing member 51 on the sealing conductor pattern 12 deposited on the opening-side top surface of the side wall of the container body 10. Is electrically connected to the ground terminal among the external connection electrode terminals 13 formed on the lower surface of the container body 10 via the via conductor. As described above, since the lid 50 made of a metal material is electrically connected to the ground terminal of the external connection electrode terminal 13, the lid 50 becomes a ground potential when the piezoelectric oscillator is used. In addition, the piezoelectric shield element 20 and the oscillation integrated circuit element 30 can be well protected by an unnecessary electrical action from the outside by the electromagnetic shielding action of the lid 50. The external connection electrode terminal 13 on the mounting side main surface of the container body 10 including such a ground terminal is used when the piezoelectric oscillator is mounted on an external wiring board such as a mother board, and the wiring of the external wiring board and solder or metal bumps. It functions as an electrode terminal for electrical connection through a bonding material having electrical conductivity.

また、凹部空間11を囲繞する容器体10の側壁開口部側頂部表面に形成されたモニタ用電極端子16は、露出主面形状が矩形状をなすように形成されており、圧電発振器の組み立てが完了した後、凹部空間11内に搭載した圧電振動素子20のCI特性を電気特性測定器で測定する際に、電気特性測定器のコンタクトピンが簡易且つ確実に接触できる大きさで形成されている。    The monitor electrode terminal 16 formed on the side wall opening side top surface of the container body 10 surrounding the recessed space 11 is formed so that the exposed main surface has a rectangular shape, so that the piezoelectric oscillator can be assembled. After completion, when the CI characteristic of the piezoelectric vibration element 20 mounted in the recessed space 11 is measured by the electric characteristic measuring instrument, the contact pin of the electric characteristic measuring instrument is formed in a size that can be contacted easily and reliably. .

また、圧電振動素子20のインピーダンス特性の測定に使用される電気特性測定器としては、圧電振動素子20の共振周波数、クリスタルインピーダンスの他、インダクタンス、容量等の等価パラメータを測定することができるネットワークアナライザ又はインピーダンスアナライザ等が用いられ、そのコンタクトピンは、銅、銀等の合金の表面に金メッキを施した高導電性のピンと、接触時の衝撃を抑制するばね性をもったリセクタブルソケットとで構成され、これをモニタ用電極端子16に押し付けつつ接触させることで測定が行われる。    In addition, as an electrical characteristic measuring instrument used for measuring the impedance characteristics of the piezoelectric vibration element 20, a network analyzer capable of measuring equivalent parameters such as inductance and capacitance in addition to the resonance frequency and crystal impedance of the piezoelectric vibration element 20. Alternatively, an impedance analyzer or the like is used, and the contact pins are made of a highly conductive pin with a gold plating on the surface of an alloy such as copper or silver, and a re-sectorable socket with a spring property that suppresses impact during contact. The measurement is performed by contacting the electrode terminal 16 while pressing it against the monitor electrode terminal 16.

尚、上述した容器体10は、アルミナセラミックスから成る場合、所定のセラミック材料粉末に適当な有機溶剤等を添加・混合して得たセラミックグリーンシートの表面に封止用導体パターン12、外部接続用電極端子13、集積回路素子搭載パッド14、圧電振動素子搭載パッド15、モニタ用電極端子16等となる導体ペーストを、また、セラミックグリーンシートに打ち抜き等を施して予め穿設しておいた貫通孔内にビア導体となる導体ペーストを従来周知のスクリーン印刷によって塗布するとともに、これを複数枚積層してプレス成形した後、高温で焼成することにより製作される。    When the container body 10 is made of alumina ceramics, a sealing conductor pattern 12 is provided on the surface of a ceramic green sheet obtained by adding and mixing a suitable organic solvent to a predetermined ceramic material powder. A through-hole previously punched by punching the ceramic green sheet with a conductive paste to be used as the electrode terminal 13, the integrated circuit element mounting pad 14, the piezoelectric vibration element mounting pad 15, the monitor electrode terminal 16 and the like It is manufactured by applying a conductor paste to be a via conductor therein by well-known screen printing, laminating a plurality of them and press-molding them, followed by firing at a high temperature.

一方、容器体10の凹部空間内に収容される圧電振動素子20は、例えば、圧電振動素子20を構成する圧電材料の素材に水晶を用いた場合、その水晶素板は、人工水晶体から所定のカットアングルで切断し外形加工を施した、概略平板状で平面形状が四角形であり、その水晶素板の表裏両主面に一対の励振用電極21を被着・形成してなり、外部からの交番電圧が励振用電極21を介して水晶素板に印加されると、所定の振動モード及び周波数で励振を起こすようになっている。このような圧電振動素子20は、その両主面に被着されている励振用電極21と凹部空間11内底面の対応する圧電振動素子搭載パッド15とを、導電性接着材40を介して電気的且つ機械的に接続することによって凹部空間11内に搭載される。    On the other hand, when the piezoelectric vibration element 20 accommodated in the recessed space of the container body 10 uses, for example, quartz as the material of the piezoelectric material constituting the piezoelectric vibration element 20, the crystal base plate is It is cut out at a cut angle and is subjected to external shape processing. It is substantially flat and has a square planar shape, and a pair of excitation electrodes 21 are attached to and formed on the front and back main surfaces of the quartz base plate. When an alternating voltage is applied to the quartz base plate via the excitation electrode 21, excitation occurs in a predetermined vibration mode and frequency. Such a piezoelectric vibration element 20 electrically connects the excitation electrode 21 applied to both main surfaces thereof and the corresponding piezoelectric vibration element mounting pad 15 on the bottom surface of the recessed space 11 through the conductive adhesive 40. It is mounted in the recessed space 11 by connecting mechanically and mechanically.

集積回路素子30の回路形成面には、圧電振動素子20からの発振出力を生成する発振回路等が設けられており、発振回路で生成された出力信号は外部接続用電極端子13の出力端子から外部に出力され、例えば、クロック信号等の基準信号として利用される。    The circuit forming surface of the integrated circuit element 30 is provided with an oscillation circuit or the like for generating an oscillation output from the piezoelectric vibration element 20, and an output signal generated by the oscillation circuit is output from the output terminal of the external connection electrode terminal 13. It is output to the outside and used as a reference signal such as a clock signal.

前記導電性接着材40は、シリコーン樹脂の中に導電性フィラーが含有されているものであり、導電性粉末としては、アルミニウム(Al)、モリブデン(Mo)、タングステン(W)、白金(Pt)、パラジウム(Pd)、銀(Ag)、チタン(Ti)、ニッケル(Ni)、ニッケル鉄(NiFe)、またはこれらの組み合わせを含むものが用いられている。    The conductive adhesive 40 contains a conductive filler in a silicone resin. Examples of the conductive powder include aluminum (Al), molybdenum (Mo), tungsten (W), and platinum (Pt). , Palladium (Pd), silver (Ag), titanium (Ti), nickel (Ni), nickel iron (NiFe), or combinations thereof are used.

また蓋体50は従来周知の金属加工法を採用し、42アロイ等の金属を所定形状に成形することによって製作され、前記蓋体50の上面には、ニッケル(Ni)層が形成され、更にニッケル(Ni)層の上面の封止用導体パターン12に対応する箇所に封止部材51である金錫(Au−Sn)層が形成される。金錫(Au−Sn)層の厚みは、10μm〜40μmである。例えば、成分比率が、金が80%、錫が20%のものが使用されている。また、このような封止部材51は、封止用導体パターン12の凹凸を緩和し、気密性の低下を防ぐことが可能となる。また、封止部材51が薄すぎると当該機能を充分に発揮しない。    The lid 50 is manufactured by adopting a conventionally well-known metal processing method and molding a metal such as 42 alloy into a predetermined shape, and a nickel (Ni) layer is formed on the upper surface of the lid 50. A gold tin (Au—Sn) layer, which is the sealing member 51, is formed at a position corresponding to the sealing conductor pattern 12 on the upper surface of the nickel (Ni) layer. The thickness of the gold tin (Au—Sn) layer is 10 μm to 40 μm. For example, the component ratio is 80% gold and 20% tin. Moreover, such a sealing member 51 can relieve unevenness of the sealing conductor pattern 12 and prevent a decrease in hermeticity. Further, if the sealing member 51 is too thin, the function is not sufficiently exhibited.

尚、本発明は上述の実施形態に限定されるものではなく、本発明の要旨を逸脱しない範囲において種々の変形、変更、改良等が可能である。例えば、図3及び図4に示すように、3つ形成されているモニタ用電極端子16のうちの2つモニタ用電極端子16が、容器体10の対向する2辺の側壁頂部に、凹部空間11を挟んで対角となる形態で形成されている。このような形態で形成されたモニタ用電極端子は、凹部空間内の圧電振動素子及び集積回路素子の搭載位置に比較的近く、且つ圧電振動素子及び集積回路素子を搭載する際に、圧電振動素子及び集積回路素子により隠されない位置に形成されているため、このモニタ用電極端子を圧電振動素子及び集積回路素子の搭載位置決め用の基準マークとして用いることができ、圧電振動素子20及び集積回路素子30の搭載位置精度を向上させることが可能となる。    In addition, this invention is not limited to the above-mentioned embodiment, A various deformation | transformation, change, improvement, etc. are possible in the range which does not deviate from the summary of this invention. For example, as shown in FIGS. 3 and 4, two monitor electrode terminals 16 out of the three monitor electrode terminals 16 are formed in a recessed space at the tops of the opposite side walls of the container body 10. 11 is formed in a diagonal form with 11 therebetween. The electrode terminal for monitoring formed in such a form is relatively close to the mounting position of the piezoelectric vibration element and the integrated circuit element in the recess space, and when mounting the piezoelectric vibration element and the integrated circuit element, the piezoelectric vibration element In addition, since the electrode terminal for monitoring can be used as a reference mark for positioning the piezoelectric vibration element and the integrated circuit element, the piezoelectric vibration element 20 and the integrated circuit element 30 can be used. It becomes possible to improve the mounting position accuracy.

図1は、本発明における圧電発振器の一実施形態を示した分解外観斜視図である。FIG. 1 is an exploded external perspective view showing an embodiment of a piezoelectric oscillator according to the present invention. 図2は、図1に記載した圧電発振器を組み立てた後、図1記載の仮想切断線A−A′の位置で切断したものを示した概略断面図である。FIG. 2 is a schematic cross-sectional view showing the piezoelectric oscillator shown in FIG. 1 assembled and then cut at the position of the virtual cutting line AA ′ shown in FIG. 図3は、本発明における他の実施形態を例に示した分解外観斜視図である。FIG. 3 is an exploded external perspective view illustrating another embodiment of the present invention as an example. 図4は、図3に記載した圧電発振器を組み立てた後、図3記載の仮想切断線B−B′の位置で切断したものを示した概略断面図である。FIG. 4 is a schematic cross-sectional view showing the piezoelectric oscillator shown in FIG. 3 assembled and then cut at the position of the virtual cutting line BB ′ shown in FIG. 図5は、従来の圧電発振器の実施形態を示した外観斜視図である。FIG. 5 is an external perspective view showing an embodiment of a conventional piezoelectric oscillator.

符号の説明Explanation of symbols

10・・・容器体
11・・・凹部空間
12・・・封止用導体パターン
13・・・外部接続用電極端子
14・・・集積回路素子搭載パッド
15・・・圧電振動素子搭載パッド
16・・・モニタ用電極端子
20・・・水晶振動素子(圧電振動素子)
21・・・励振用電極
30・・・集積回路素子
40・・・導電性接着材
50・・・蓋体
51・・・封止部材
DESCRIPTION OF SYMBOLS 10 ... Container body 11 ... Recessed space 12 ... Conductive pattern for sealing 13 ... Electrode terminal for external connection 14 ... Integrated circuit element mounting pad 15 ... Piezoelectric vibration element mounting pad 16. ..Monitor electrode terminals 20 ... Quartz vibration element (piezoelectric vibration element)
DESCRIPTION OF SYMBOLS 21 ... Electrode for excitation 30 ... Integrated circuit element 40 ... Conductive adhesive material 50 ... Lid 51 ... Sealing member

Claims (2)

主面形状が概略矩形状で直方体の容器体には、前記容器体の一方の主面に開口部を有する凹部空間が形成されており、前記凹部空間内底面に素子搭載パッドが形成され、前記素子搭載パッドには圧電振動素子並びに集積回路素子が搭載されており、前記凹部空間を囲繞する前記容器体の側壁頂部には、前記容器体の開口部を覆う矩形状の蓋体が配置されており、前記蓋体と前記側壁頂部に設けた封止用導体パターンとを固着し、前記容器体内の圧電振動素子並びに集積回路素子を気密封止して成る圧電発振器において、
前記封止用導体パターンの外周側端部と、前記側壁頂部の外周側端部との間の前記側壁頂部表面に、前記圧電振動素子と電気的に接続したモニタ用電極端子が設けられていることを特徴とする圧電発振器。
In a rectangular parallelepiped container body having a substantially rectangular main surface shape, a concave space having an opening is formed on one main surface of the container body, and an element mounting pad is formed on the bottom surface in the concave space, A piezoelectric vibration element and an integrated circuit element are mounted on the element mounting pad, and a rectangular lid that covers the opening of the container body is disposed on the top of the side wall of the container body that surrounds the recessed space. In the piezoelectric oscillator formed by fixing the lid and the sealing conductor pattern provided on the top of the side wall and hermetically sealing the piezoelectric vibration element and the integrated circuit element in the container body,
A monitor electrode terminal electrically connected to the piezoelectric vibration element is provided on the surface of the side wall top between the outer peripheral side end of the sealing conductor pattern and the outer peripheral side end of the side wall top. A piezoelectric oscillator characterized by that.
少なくとも2つモニタ用電極端子が、容器体の対向する2辺の側壁頂部に、凹部空間を挟んで対角となる形態で形成されていることを特徴とする請求項1記載の圧電発振器。   2. The piezoelectric oscillator according to claim 1, wherein at least two electrode terminals for monitoring are formed on the tops of the two opposite side walls of the container body in a diagonal form across the recessed space.
JP2006266818A 2006-09-29 2006-09-29 Piezoelectric oscillator Pending JP2008085961A (en)

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