JP2008085317A - 結晶性半導体膜、及び半導体装置の作製方法 - Google Patents
結晶性半導体膜、及び半導体装置の作製方法 Download PDFInfo
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- JP2008085317A JP2008085317A JP2007223982A JP2007223982A JP2008085317A JP 2008085317 A JP2008085317 A JP 2008085317A JP 2007223982 A JP2007223982 A JP 2007223982A JP 2007223982 A JP2007223982 A JP 2007223982A JP 2008085317 A JP2008085317 A JP 2008085317A
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8421080B2 (en) | 2010-06-21 | 2013-04-16 | Panasonic Corporation | Thin-film transistor array device, organic EL display device, and method of manufacturing thin-film transistor array device |
| CN104966308A (zh) * | 2015-06-12 | 2015-10-07 | 深圳大学 | 一种计算激光光束光斑大小的方法 |
| JP2018185427A (ja) * | 2017-04-26 | 2018-11-22 | 株式会社日本製鋼所 | ディスプレイの製造方法、ディスプレイ及び液晶テレビ |
| WO2019003417A1 (ja) * | 2017-06-30 | 2019-01-03 | シャープ株式会社 | 可撓性表示装置及び可撓性表示装置の製造方法 |
| KR20220109169A (ko) * | 2021-01-28 | 2022-08-04 | 재단법인대구경북과학기술원 | 모놀리식 3차원 소자의 상부층 고결정화 방법 및 이를 통해 제조된 모놀리식 3차원 소자 |
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| JPH0897141A (ja) * | 1994-09-22 | 1996-04-12 | A G Technol Kk | 多結晶半導体層の形成方法、多結晶半導体ｔｆｔ、及びビームアニール装置 |
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| JP2006080511A (ja) * | 2004-09-01 | 2006-03-23 | Japan Steel Works Ltd:The | レーザ放射によってアモルファス半導体を改質するための方法及び装置 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8421080B2 (en) | 2010-06-21 | 2013-04-16 | Panasonic Corporation | Thin-film transistor array device, organic EL display device, and method of manufacturing thin-film transistor array device |
| CN104966308A (zh) * | 2015-06-12 | 2015-10-07 | 深圳大学 | 一种计算激光光束光斑大小的方法 |
| CN104966308B (zh) * | 2015-06-12 | 2017-12-01 | 深圳大学 | 一种计算激光光束光斑大小的方法 |
| JP2018185427A (ja) * | 2017-04-26 | 2018-11-22 | 株式会社日本製鋼所 | ディスプレイの製造方法、ディスプレイ及び液晶テレビ |
| WO2019003417A1 (ja) * | 2017-06-30 | 2019-01-03 | シャープ株式会社 | 可撓性表示装置及び可撓性表示装置の製造方法 |
| CN110832626A (zh) * | 2017-06-30 | 2020-02-21 | 夏普株式会社 | 可挠性显示装置以及可挠性显示装置的制造方法 |
| US10573205B2 (en) | 2017-06-30 | 2020-02-25 | Sharp Kabushiki Kaisha | Flexible display device and method for manufacturing flexible display device |
| CN110832626B (zh) * | 2017-06-30 | 2024-03-12 | 夏普株式会社 | 可挠性显示装置 |
| KR20220109169A (ko) * | 2021-01-28 | 2022-08-04 | 재단법인대구경북과학기술원 | 모놀리식 3차원 소자의 상부층 고결정화 방법 및 이를 통해 제조된 모놀리식 3차원 소자 |
| KR102470876B1 (ko) * | 2021-01-28 | 2022-11-25 | 재단법인대구경북과학기술원 | 모놀리식 3차원 소자의 상부층 고결정화 방법 및 이를 통해 제조된 모놀리식 3차원 소자 |
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