JP2008076489A5 - - Google Patents

Download PDF

Info

Publication number
JP2008076489A5
JP2008076489A5 JP2006252552A JP2006252552A JP2008076489A5 JP 2008076489 A5 JP2008076489 A5 JP 2008076489A5 JP 2006252552 A JP2006252552 A JP 2006252552A JP 2006252552 A JP2006252552 A JP 2006252552A JP 2008076489 A5 JP2008076489 A5 JP 2008076489A5
Authority
JP
Japan
Prior art keywords
optical system
light sources
illumination optical
light
collimating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006252552A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008076489A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006252552A priority Critical patent/JP2008076489A/ja
Priority claimed from JP2006252552A external-priority patent/JP2008076489A/ja
Publication of JP2008076489A publication Critical patent/JP2008076489A/ja
Publication of JP2008076489A5 publication Critical patent/JP2008076489A5/ja
Pending legal-status Critical Current

Links

JP2006252552A 2006-09-19 2006-09-19 照明光学系及びこの照明光学系を有する光学装置 Pending JP2008076489A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006252552A JP2008076489A (ja) 2006-09-19 2006-09-19 照明光学系及びこの照明光学系を有する光学装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006252552A JP2008076489A (ja) 2006-09-19 2006-09-19 照明光学系及びこの照明光学系を有する光学装置

Publications (2)

Publication Number Publication Date
JP2008076489A JP2008076489A (ja) 2008-04-03
JP2008076489A5 true JP2008076489A5 (enrdf_load_stackoverflow) 2009-04-09

Family

ID=39348664

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006252552A Pending JP2008076489A (ja) 2006-09-19 2006-09-19 照明光学系及びこの照明光学系を有する光学装置

Country Status (1)

Country Link
JP (1) JP2008076489A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9386286B2 (en) * 2010-06-07 2016-07-05 Texas Instruments Incorporated Sparse source array for display pixel array illumination with rotated far field plane
CN114083798B (zh) * 2021-10-29 2024-06-04 深圳市纵维立方科技有限公司 光源组件及打印机
CN115857252A (zh) * 2022-08-31 2023-03-28 东莞市美光达光学科技有限公司 一种高效、高均匀度的辅助照明系统的配光结构

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2801974B2 (ja) * 1991-05-14 1998-09-21 ローム株式会社 顕微鏡
JPH06300988A (ja) * 1993-04-14 1994-10-28 Canon Inc コリメーターレンズ
JPH08125229A (ja) * 1994-10-21 1996-05-17 Toyoda Gosei Co Ltd 集合型ランプ
JP2002318364A (ja) * 2001-04-20 2002-10-31 Ricoh Co Ltd 照明装置
JP5066781B2 (ja) * 2004-06-18 2012-11-07 株式会社日立製作所 映像表示装置
JP2006208682A (ja) * 2005-01-27 2006-08-10 Olympus Corp 照明光学装置及び光学装置

Similar Documents

Publication Publication Date Title
JP2008529037A5 (enrdf_load_stackoverflow)
RU2013115918A (ru) Устройство для местного освещения
JP2012203391A5 (enrdf_load_stackoverflow)
WO2007131161A3 (en) Symmetrical objective having four lens groups for microlithography
JP2018503132A5 (enrdf_load_stackoverflow)
CN102866500A (zh) 照明光学系统和图像显示设备
US10859235B2 (en) Warning devices with oscillating light patterns
RU2011141449A (ru) Проецирующая изображение светоизлучающая система
TW200942983A (en) Facet mirror for use in a projection exposure apparatus for microlithography
PL1847762T3 (pl) Kompaktowy przyrząd oświetlający, w szczególności do zastosowania w lampie dentystycznej
ATE481600T1 (de) Led-anzeigevorrichtung
DE602006001580D1 (de) Laseranzeigevorrichtung
RU2017135133A (ru) Устройство для формирования оптического пучка и использующий его источник точечного света
JP2020537763A5 (enrdf_load_stackoverflow)
JP2015223462A5 (enrdf_load_stackoverflow)
JP2011107723A5 (enrdf_load_stackoverflow)
JP2017111341A (ja) 照明装置
WO2009025261A1 (ja) マルチビーム走査装置
JP2018097131A5 (enrdf_load_stackoverflow)
JP2009128689A5 (enrdf_load_stackoverflow)
JP2013073080A5 (enrdf_load_stackoverflow)
JP2018017816A5 (enrdf_load_stackoverflow)
JP2008076489A5 (enrdf_load_stackoverflow)
JP2013073081A5 (enrdf_load_stackoverflow)
TW201830146A (zh) 用於光微影曝光系統的光源佈置及光微影曝光系統