JP2008064694A5 - - Google Patents

Download PDF

Info

Publication number
JP2008064694A5
JP2008064694A5 JP2006244980A JP2006244980A JP2008064694A5 JP 2008064694 A5 JP2008064694 A5 JP 2008064694A5 JP 2006244980 A JP2006244980 A JP 2006244980A JP 2006244980 A JP2006244980 A JP 2006244980A JP 2008064694 A5 JP2008064694 A5 JP 2008064694A5
Authority
JP
Japan
Prior art keywords
temperature
vacuum chamber
measured
control means
measuring apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006244980A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008064694A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006244980A priority Critical patent/JP2008064694A/ja
Priority claimed from JP2006244980A external-priority patent/JP2008064694A/ja
Publication of JP2008064694A publication Critical patent/JP2008064694A/ja
Publication of JP2008064694A5 publication Critical patent/JP2008064694A5/ja
Pending legal-status Critical Current

Links

JP2006244980A 2006-09-11 2006-09-11 干渉計測装置 Pending JP2008064694A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006244980A JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006244980A JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Publications (2)

Publication Number Publication Date
JP2008064694A JP2008064694A (ja) 2008-03-21
JP2008064694A5 true JP2008064694A5 (pt) 2009-11-12

Family

ID=39287526

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006244980A Pending JP2008064694A (ja) 2006-09-11 2006-09-11 干渉計測装置

Country Status (1)

Country Link
JP (1) JP2008064694A (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5489690B2 (ja) * 2009-12-15 2014-05-14 キヤノン株式会社 干渉測定装置
KR101248369B1 (ko) 2011-07-21 2013-04-01 주식회사 현대케피코 감압 시험기

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190318A (en) * 1981-05-19 1982-11-22 Toshiba Mach Co Ltd Electron beam exposure device
JPS61239624A (ja) * 1985-04-16 1986-10-24 Toshiba Mach Co Ltd ロ−デイング装置およびロ−デイング方法
JP3466707B2 (ja) * 1994-05-23 2003-11-17 キヤノン株式会社 干渉測定方法及びそれを用いた干渉測定装置
JPH10312960A (ja) * 1997-05-13 1998-11-24 Toshiba Mach Co Ltd 電子ビーム描画装置の試料恒温化装置
JPH11168056A (ja) * 1997-12-03 1999-06-22 Nikon Corp ウェハ保持装置
JPH11312640A (ja) * 1998-02-25 1999-11-09 Canon Inc 処理装置および該処理装置を用いたデバイス製造方法
JP2000088512A (ja) * 1998-09-17 2000-03-31 Nikon Corp 干渉計測装置
JP2000161230A (ja) * 1998-11-30 2000-06-13 Toshiba Ceramics Co Ltd 真空装置及び真空排気方法
JP3950698B2 (ja) * 2002-02-08 2007-08-01 キヤノン株式会社 半導体露光装置
JP2006086387A (ja) * 2004-09-17 2006-03-30 Nikon Corp 基板搬送装置、露光装置及び基板搬送方法

Similar Documents

Publication Publication Date Title
JP2017512379A5 (pt)
RU2016141110A (ru) Выпуск для подачи нагретого сжатого воздуха на кромочную ленту
WO2011094143A3 (en) Apparatus for controlling temperature uniformity of a showerhead
WO2014183868A3 (en) Device and method for controlling opening of a valve in an hvac system
GB2458892B (en) Temperature controlled mattress system
JP2015502036A5 (pt)
MX339093B (es) Aparato y procedimiento para probar un motor de turbina de gas industrial y componentes del mismo.
JP2018503965A5 (pt)
WO2012036781A3 (en) Hybrid heat exchanger apparatus and methods of operating the same
EP2511245A3 (en) Closed loop mold temperature control system and method
EP2355133A3 (en) Substrate heating apparatus, substrate heating method and substrate processing system
WO2008117624A1 (ja) ハニカム成形体の乾燥方法及び乾燥装置
JP2008187139A5 (pt)
JP2010114397A5 (pt)
JP2009076586A5 (pt)
JP2011053685A5 (pt)
JP2008064694A5 (pt)
WO2010095092A3 (en) Controlling under surface heating/cooling
HK1137899A2 (en) Energy saver device, air-conditioning or refrigeration system and method for control of an air-conditioning or refrigeration system
GB201007376D0 (en) Method of calibrating a heater system
TW200619881A (en) Method and system for thermal process control
EP2184465A4 (en) DEVICE FOR CONTROLLING THE INTAKE AIR HEATING FOR A GAS TURBINE
JP2011119644A5 (pt)
JP2013077843A5 (pt)
NZ611982A (en) Closed-loop air drying system