JP2008053226A - 電子銃及び電子線装置 - Google Patents
電子銃及び電子線装置 Download PDFInfo
- Publication number
- JP2008053226A JP2008053226A JP2007193452A JP2007193452A JP2008053226A JP 2008053226 A JP2008053226 A JP 2008053226A JP 2007193452 A JP2007193452 A JP 2007193452A JP 2007193452 A JP2007193452 A JP 2007193452A JP 2008053226 A JP2008053226 A JP 2008053226A
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- Prior art keywords
- cathode
- electron gun
- luminance
- electrode
- dac
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- 238000010894 electron beam technology Methods 0.000 title claims abstract description 18
- 230000007423 decrease Effects 0.000 claims abstract description 15
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- 238000004088 simulation Methods 0.000 abstract description 50
- 230000000694 effects Effects 0.000 description 18
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- 230000004075 alteration Effects 0.000 description 9
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- 229910052697 platinum Inorganic materials 0.000 description 2
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- 229910052721 tungsten Inorganic materials 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910025794 LaB6 Inorganic materials 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
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- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 230000002093 peripheral effect Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007193452A JP2008053226A (ja) | 2006-07-26 | 2007-07-25 | 電子銃及び電子線装置 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006224699 | 2006-07-26 | ||
| JP2007193452A JP2008053226A (ja) | 2006-07-26 | 2007-07-25 | 電子銃及び電子線装置 |
Related Child Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008168639A Division JP2008293986A (ja) | 2006-07-26 | 2008-06-27 | 電子線装置 |
| JP2008326774A Division JP2009110971A (ja) | 2006-07-26 | 2008-12-24 | 電子線装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008053226A true JP2008053226A (ja) | 2008-03-06 |
| JP2008053226A5 JP2008053226A5 (enExample) | 2008-08-21 |
Family
ID=39237042
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007193452A Pending JP2008053226A (ja) | 2006-07-26 | 2007-07-25 | 電子銃及び電子線装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2008053226A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020505728A (ja) * | 2017-01-19 | 2020-02-20 | ケーエルエー コーポレイション | 電子源のための引出し器電極 |
-
2007
- 2007-07-25 JP JP2007193452A patent/JP2008053226A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2020505728A (ja) * | 2017-01-19 | 2020-02-20 | ケーエルエー コーポレイション | 電子源のための引出し器電極 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080627 |
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| A621 | Written request for application examination |
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| A871 | Explanation of circumstances concerning accelerated examination |
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