JP2008043834A - Deposit removing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a deposit removing device which prevents a rise in the concentration of mist in the upstream of the nozzle body by removing efficiently mist that is produced by compressed gas blown onto a plate member composed of e.g. a metal plate, flows into the upstream in the running direction of the plate member and contains oil, in order to prevent re-adhesion of the oil having been removed through blowing of the compressed gas by a nozzle body to the surface of the plate member. <P>SOLUTION: The deposit removing device has a nozzle body which has one or more spraying spouts is in its surface opposite to the surface of a running plate member and removes an attached material, e.g. a rolling or cleaning oil attached to the plate member by spraying compressed gas from the spraying spouts of the nozzle body. A recessed chamber which is recessed in the direction to be separated from the plate member is arranged adjacent to the nozzle body, in the surface of the plate member opposite to the nozzle body and in the running direction of the plate member. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a deposit removing device for removing deposits such as a cleaning liquid for cleaning an oil component such as rolling oil or a plate member adhering to a plate member by spraying compressed air on the plate member. In particular, the present invention relates to a deposit removing device that has succeeded in enhancing the cleaning effect by preventing mist such as cleaning oil generated by spraying the compressed air from adhering to the surface of the plate-like member again.

In general, when rolling a plate-like member such as a metal plate or a resin plate by a rolling mill, for cooling the work roll (rolling roll) or the plate-like member rolled by this work roll, or improving the rolling efficiency, etc. The rolling oil is supplied to the rolling contact portion between the work roll and the plate member. Further, when it is necessary to clean the surface of the plate-like member, the oxide film, or the like, the plate-like member is passed through a cleaning tank containing a cleaning agent.
Thus, since the rolling oil and cleaning agent adhere to the rolled plate-like member, it is necessary to remove the rolling oil and cleaning agent before winding the plate-like member with a winding device or the like. This is because when the plate member is wound with the rolling oil or the like attached, the friction coefficient of the contact surface between the wound plate members is reduced, and the plate member is slid in the width direction and wound. This is because there is a possibility that problems such as collision with the take-off device or breakage of the plate-like member itself may occur. Further, if the plate member (rolled coil) wound with insufficient removal of rolling oil is annealed in the next step, there is a problem that unevenness of annealing occurs and the quality of the product is lowered. Furthermore, if the plate-like member is stored with the cleaning agent attached, the plate-like member may be corroded by the cleaning agent.

Conventionally, many methods for removing the rolling oil and the cleaning agent have been proposed. For example, Patent Document 1 includes a nozzle body in which one or more injection ports are formed on an opposing surface facing the surface of a rolled plate-like member that travels, and a compressed gas is injected from the injection port of the nozzle body. A deposit removing device that removes deposits such as rolling oil and cleaning oil adhering to the plate-like member by supporting the nozzle body in a floating manner in a direction substantially perpendicular to the surface of the plate-like member. In addition, there has been proposed an adhering matter removing apparatus in which the nozzle body is lifted from the plate-like member and supported by the gap between the nozzle body and the plate-like member surface.
As a result, even if the plate-like member undulates or vibrates, the distance between the nozzle body and the plate-like member is kept constant, and the spraying force of the compressed gas is kept constant, so that no deposits are removed. An apparatus for removing deposits is provided.
Further, the improvement in the effect of removing impurities by the compressed gas is hindered by the flow of the compressed gas due to the collision speed caused by the compressed gas colliding with the plate member by the nozzle and the wall shear stress caused thereby. In view of the above, Patent Document 2 is known as technical data in which the compressed gas injection direction is improved and the ratio between the nozzle facing surface and the lateral width of the nozzle is adjusted.
JP 2006-68724 A Japanese Patent Application Laid-Open No. 5-200374

However, even when the nozzle is supported in a floating state as described above, or when the nozzle is supported in a fixed state, the rolling oil adhered to the surface of the plate state or washed by the compressed gas injected from the nozzle body. The oil is blown up by the above-mentioned compressed gas blowing, flows out from the space between the nozzle body and the plate-like member as fine mist, and is jetted upstream or downstream of the plate-like member running direction from the nozzle body. A phenomenon is observed.
Most of the compressed gas ejected from the nozzle body is ejected according to the inclination direction of the injection hole formed in the nozzle body. For example, when the jet nozzle is formed to be inclined toward the upstream direction of travel of the plate-like member as in the embodiment described later, the compressed air and the mist blown up by the jet port are mostly traveled by the plate-like member. It is ejected toward the direction upstream. Therefore, in this case, it is desirable to form the depression chamber on the upstream side in the traveling direction of the plate member. Thus, the depression chamber is formed at a position corresponding to the inclination direction of the injection port. However, not all compressed gas is injected in the inclination direction of the injection port, and some of the compressed gas may be injected in the opposite direction. In particular, the injection port is at an angle close to a right angle to the plate member. If formed, a large amount of compressed gas is ejected on the side opposite to the direction of inclination of the ejection port. Therefore, it is also meaningful to form the depressed chamber on both sides of the nozzle body.
In particular, since the injection port is inclined toward the upstream direction of travel of the plate-shaped member, when a large amount of mist is ejected in the upstream direction, the mist ejected on the upstream side has a wide nozzle body and Since it is dammed to the pedestal that supports it, it stays in a large amount in the upstream part of the nozzle body as the plate-like member travels, so that it becomes a thick concentration state and eventually the oil component with intermittent shading on the plate-like member surface. Cause adhesion. As described above, the adhesion of the oil component having such a high concentration reduces the friction coefficient of the contact surface between the plate members during the processing of the subsequent plate members, thereby causing the plate members to slip, This may cause problems such as breakage of the member itself, deterioration of product quality such as uneven annealing in the next process, and corrosion of the plate member by the cleaning agent.

  Therefore, the present invention has been made in view of the above circumstances, and the object of the present invention is to efficiently remove mist containing oil by compressed gas sprayed on a plate-like member such as a metal plate. There is provided a deposit removing device capable of preventing the concentration of mist from increasing on the upstream side of a nozzle body and thus preventing oil removed by jetting compressed gas from the nozzle body from adhering to the surface of a plate-like member again. There is.

In order to achieve the above object, the present invention comprises a nozzle body in which one or more injection ports are formed on an opposing surface facing the surface of a traveling plate-like member, and a compressed gas is injected from the injection port of the nozzle body. A deposit removing device that removes deposits such as rolling oil and cleaning oil adhering to the plate-like member,
An adhering substance removing device is provided, wherein a concavity chamber is formed on the facing surface of the nozzle body, adjacent to the nozzle body, and recessed in a direction away from the plate-like body.
Due to the presence of the depression chamber, out of the mist containing the oil component blown up by the compressed fluid ejected from the nozzle body, the mist that has flowed out upstream or downstream in the traveling direction of the plate-like member or both of the mist has entered the depression chamber. Since it flows in and is removed, the inconvenience of increasing the density of mist and causing dirt on the plate-like member is avoided.

For example, when the nozzle body is positioned on the upper surface side of the plate-like member, the nozzle body floats while maintaining a substantially constant distance from the plate-like member. As a result, even when the surface of the plate-like member moves up and down due to deformation such as vibration generated in the plate-like member or warpage of the plate-like member, the nozzle body moves up and down following that up and down. , The distance from the surface of the plate member to the nozzle body is always kept substantially constant. As a result, the distance between the plate member and the nozzle body can be set to several mm or less, specifically about 0.1 mm. As a result, a separation distance of about several millimeters has been provided in the past, and a sufficient deposit removal effect could not be obtained unless a relatively high pressure compressed gas was supplied. By further narrowing, it is possible to obtain a deposit removal effect equal to or higher than that of the conventional one using a compressed gas having a pressure lower than that of the conventional one.
Further, since the injection pressure of the compressed gas injected to the plate-like member is increased by reducing the distance between the plate-like member and the nozzle body, the plate-like shape is rolled by a rolling mill whose rolling speed is increased. It is also possible to remove the deposits on the member, that is, the plate-like member conveyed at high speed.

Here, it is desirable that the injection port be formed so that the total value of the areas of the injection ports is less than about two-thirds of the area of the opposing surface of the nozzle body. This is the most preferable condition for setting the separation distance to a thickness suitable for removing deposits such as rolling oil and cleaning oil adhering to the plate-like member. It was discovered from the results of the above.
As a support mechanism of the nozzle body, the nozzle body is supported so as to be movable in a direction substantially perpendicular to the surface of the plate-like member, and the total area of the injection ports is the area of the opposing surface. The injection port is formed so as to be less than about two-thirds of the above, whereby the pressing force in the direction of the plate member by the elastic body and the gap between the plate members injected from the injection port The nozzle according to the balance between the suction pressure, which is a negative pressure generated based on the flow of air flowing through, and the push-up pressure for pushing up the nozzle body by the injection pressure of the compressed air injected from the injection port For example, there is one that floats and is supported from the plate-like member by the gap between the body and the surface of the plate-like member.
By supporting the nozzle body in a floating manner in such a position where gravity and pressure are balanced, the gap between the nozzle body and the plate-like member is kept constant, and a constant deposit removal function is always exhibited. It will be.
The nozzle body may be fixed in position relative to a machine base for running the plate-like member. Such a support mechanism is simple in structure and may reduce the cost.

Further, a plurality of the depression chambers may be formed in the traveling direction of the plate member. Because there are many depression chambers, the action of removing deposits is increased or stabilized.
The wall surface on the downstream side in the plate member traveling direction of the depression chamber is formed so as to be inclined toward the downstream side in the plate member traveling direction toward the plate member end portion side, so that the mist entering the depression chamber is formed. The flow is improved, and the action of removing deposits is increased.
If the exhaust means connected to the intake source is connected to the one or more depression chambers, the mist of the adhering material flowing into the depression chamber is discharged without accumulating in the depression chamber. Deposits can be efficiently removed without time cleaning.

In addition, the injection ports formed on the opposing surface of the nozzle body may be arranged in series or in parallel in a direction substantially orthogonal to the conveying direction of the plate member and the moving direction of the nozzle body, for example. .
Further, if a flat nozzle having a long opening in a direction substantially orthogonal to the conveying direction of the plate member and the moving direction of the nozzle body is provided on the opposing surface of the nozzle body, the width of the plate member It becomes possible to radiate compressed gas uniformly in the whole direction.
Furthermore, in order to easily separate the nozzle body from the plate-like member by jetting compressed gas, the main member constituting the nozzle body can be made of a lightweight material such as a plastic material.

  Further, the nozzle body is provided on one or both of the upper surface side and the lower surface side of the plate-like member so as to be able to remove deposits on both the upper surface side and the lower surface side of the plate-like member. It is preferable to be made.

By the way, when compressed gas is injected to the plate-like member, the gas is reflected by the plate-like member and collides with the facing surface. At this time, the deposit peeled off by the injection of the compressed gas may collide with the facing surface and adhere to the facing surface. In particular, when the deposit is viscous, such as oil or dust containing oil, the deposit is likely to adhere to the facing surface. In this case, there may be a problem that the adhering matter adheres to the facing surface, the injection port is clogged, or the enlarged adhering matter peels off and reattaches to the plate member.
Therefore, a concavity-like gas reservoir for storing the compressed gas injected from the injection port is provided on the facing surface, and a communication hole for introducing the gas in the gas reservoir to the outside of the nozzle body is provided in the nozzle body. If formed, air containing deposits such as oil stays in the gas reservoir, and the staying air can be discharged to the outside. Thereby, clogging of the injection port and reattachment of the deposit on the plate-like member can be reduced.

  With this configuration, the problem that the oil mist ejected in the upstream part or downstream part in the traveling direction of the plate member of the nozzle body, or both of them accumulates in the upstream part and contaminates the plate member is solved. The

Hereinafter, embodiments and examples of the present invention will be described with reference to the accompanying drawings so that the present invention can be understood. It should be noted that the following embodiments and examples are examples embodying the present invention, and do not limit the technical scope of the present invention.
In addition, various methods can be used as the method for supporting the nozzle body for removing the deposits in the present invention. For example, the nozzle body may be fixed in position with respect to a machine base for running the plate-like member.
Hereinafter, such a support method of the nozzle body is referred to as a fixed support method.
The nozzle body is supported so as to be movable in a direction substantially perpendicular to the surface of the plate-like member, and the total value of the areas of the injection ports is less than about 2/3 of the area of the facing surface. The injection port is formed so that the pressing force in the direction of the plate member by the elastic body and the flow of air injected from the injection port and flowing through the gap between the plate members The nozzle body and the plate-like member surface in accordance with the balance between the suction pressure, which is a negative pressure generated based on the pressure, and the push-up pressure for pushing up the nozzle body by the injection pressure of the compressed air injected from the injection port May be supported by floating from the plate-like member by the amount of the gap between the two. Hereinafter, such a support method of the nozzle body is referred to as a floating support method.
In the following embodiment, a case where the nozzle body is supported by the floating support method will be described. However, this is an example, and the present invention can be adopted by any support method.

  FIG. 1 is a block diagram for explaining the outline of the air control system of the deposit removing apparatus X according to the embodiment of the present invention. FIG. 2 is a schematic diagram for explaining the nozzle body 100 of the deposit removing apparatus X. FIG. 3 is a diagram illustrating the relationship between the force F that pushes the nozzle body 100 upward and the separation distance d, FIG. 4 is a schematic diagram illustrating the relationship between the separation distance d and the deposit removal effect, and FIG. FIG. 6 is a diagram showing the pressure distribution in the vicinity of the mouth 101, FIG. 6 is a schematic diagram for explaining the nozzle body 100a of the deposit removing apparatus X1 according to the first embodiment of the present invention, and FIG. 7 is a second embodiment of the present invention. FIG. 8 is a schematic diagram for explaining the nozzle body 100b of the deposit removing apparatus X2 according to the present invention, FIG. 8 is a block diagram showing a schematic configuration of the deposit removing apparatus X3 according to the third embodiment of the present invention, and FIG. 4 illustrates the nozzle body 100c of the deposit removing device X4 according to the fourth embodiment. Schematic view that, FIG. 10 is a block diagram showing a fifth schematic configuration of a deposit removing device X5 according to the embodiment of the present invention.

First, the air control system and schematic configuration of the deposit removal apparatus X according to the embodiment of the present invention will be described with reference to the block diagram of FIG.
This deposit removal apparatus X is an apparatus that removes deposits such as liquids and debris such as rolling oil and cleaning agent adhered to a metal or non-metal plate member rolled by a rolling mill or the like. In addition, as shown in FIG. 1, the compressed air (an example of compressed gas) supplied from the air pressure source 5 is jetted onto the surface of the plate member T, and the rolling oil adhered to the surface of the plate member T. , A nozzle body 100 having one or more injection ports on the surface facing the plate-like member to remove cleaning oil and the like, and a pipe 6 connecting the nozzle body 100 and the air pressure source 5 by piping. An electromagnetic valve 2, a pressure reducing valve 3 provided in a pipe line 6 on the downstream side of the electromagnetic valve 2, an air filter 4 provided on the downstream side of the pressure reducing valve 3, and the electromagnetic valve 2. And a controller 1 that performs control to switch the path (air path) of compressed air by exciting / demagnetizing. In this embodiment, an example in which compressed air is used as the compressed gas will be described, but nitrogen gas or the like having low corrosiveness may be used. Moreover, this deposit removal apparatus X is not restricted to the plate-shaped member rolled by the said rolling mill, It can be applied also to all plate-shaped members.
The controller 1 includes a control unit such as a sequencer. For example, when detecting that a start signal is input from the outside, the controller 1 excites the solenoid valve 2 to open the valve from the closed position to the open position. Switch to. The compressed air supplied through the electromagnetic valve 2 is reduced to a predetermined pressure by the pressure reducing valve 3 and is supplied to the nozzle body 100 after water vapor and dust are removed by the air filter 4 with drain. Is done.

Next, the nozzle body 100 will be described with reference to the schematic diagram of FIG. The nozzle body 100 is disposed on the upper surface side of the plate member T as shown in FIG. The nozzle body 100 is formed of a lightweight member such as a plastic material and has a substantially rectangular shape that is long in the width direction of the plate member T. 2A is a schematic cross-sectional view showing a vertical cross section in the longitudinal direction (left-right direction in FIG. 2) of the nozzle body 100, and FIG. 2B is the nozzle body 100 as viewed from the arrow A in FIG. FIG. The arrow which does not attach | subject the code | symbol in a figure shows the flow of compressed air.
Four injection ports 101 inclined toward the traveling direction of the plate member T are formed on the opposing surface 102 of the nozzle body 100 facing the upper surface (upper surface) T1 of the plate member T. The four injection ports 101 have a direction W3 (see FIG. 2) that is substantially orthogonal to the conveying direction W2 (see FIG. 2B) of the plate member T and the moving direction W1 of the nozzle body 100 (see FIG. 2A). 2 (b)). The number of the injection ports 101 is not limited to four, and it is sufficient that at least one or more injection ports 101 are formed. Due to the inclination of the injection port 101, most of the compressed air injected from the injection port is injected toward the upstream portion of the plate member T in the traveling direction.

In order to guide the compressed air ejected from the ejection port 101 to the upstream side in the transport direction W2 of the plate-like member T on the facing surface 102 and blow off the peeled deposits upstream in the transport direction W2. A plurality of grooves 106 (five grooves in the present embodiment) parallel to the conveying direction W2 of the plate member T are formed at predetermined intervals. One end 106a on the upstream side in the conveying direction W2 of the plate-like member T of the groove 106 is formed in a divergent shape and is open to the side surface on the conveying direction W2 side.
In addition, in the groove 106 formed in parallel with the transport direction W2, there is a possibility that the peeled adhered matter will adhere to the plate-like member T again. Therefore, unlike the groove 106, as shown in FIG. 2 (c), the groove 106-1 inclined at the outer side in the width direction of the plate member T with respect to the transport direction W2 is formed on the opposing surface. It is preferable to form in 102. If such a groove 106-1 is formed, the adhered matter peeled off with the compressed air flowing through the groove 106-1 is blown off to the outside in the width direction of the plate-like member T. Can be improved.

Compressed air supplied from the air pressure source 5 (FIG. 1) and decompressed to a predetermined pressure by the pressure reducing valve 4 is supplied to the nozzle body 100 on a surface 103 opposite to the facing surface 102 of the nozzle body 100. One supply port 104 for the purpose is formed. This supply port 104 is penetrated by the communication path 105 which connects each said injection port 101 inside. Therefore, when compressed air is supplied to the supply port 104, the compressed air is injected from the injection ports 101 to the upper surface T <b> 1 of the plate-like member T through the communication path 105.
Further, a slide bar 111 is erected on the surface 103 of the nozzle body 100, and a slide guide 112 for supporting the slide bar 111 so as to be slidable in the vertical direction is appropriately provided above the slide bar 111. . The slide bar 111 and the slide guide 112 (hereinafter collectively referred to as a slide mechanism 110) are means for supporting the nozzle body 100 movably in a direction W1 substantially perpendicular to the upper surface T1 of the plate member T. It is an example. Of course, not limited to the slide mechanism 110, for example, a mechanism (see FIG. 8) that supports the nozzle body 100 while being suspended from above by an elastic member such as a helical spring with one end fixed, or the nozzle body. The nozzle body 100 is elastically supported so as to be movable in the substantially vertical direction W1 using a mechanism that supports the nozzle body 100 with an elastic member such as a leaf spring spanned from the side in the longitudinal direction of the 100. There may be.

Further, a concavity that is located in the facing surface 102 of the nozzle body 100 and is upstream of the plate-like member T in the traveling direction W2 is located adjacent to the nozzle body 100 and away from the plate-like body T. A chamber 200 is formed. As shown in FIG. 7B, which shows the depression chamber 200 in a sectional side view, the depression chamber 200 includes a rear wall 200a attached to the upstream side surface in the plate member traveling direction of the nozzle body 100, and the rear wall. It is constituted by a space opened downwardly surrounded by a front wall 200b facing in parallel with 200a and left and right side walls 200c.
The left and right side walls 200c are partly (or entirely) cut away so that an exhaust chamber 202 and a depressed chamber 200, which will be described later, communicate with each other.
The depression chamber 200 is a space into which mist such as the rolling oil and cleaning oil blown up from the surface of the plate member by the compressed gas jetted from the nozzle body 100 can flow, and flows into these depression chambers 200. A part of the mist adhered to the wall surface of the depression chamber 200 is removed from the compressed fluid.
The remainder is exhausted as described later.
Of course, the wall material of the depression chamber 200 may be the same as that of the nozzle body 100, or the inner surface thereof is coated with a release material such as Teflon (registered trademark) to prevent the mist from contaminating the wall surface. It is desirable to perform processing.

Here, the operation of the nozzle body 100 when compressed air is supplied to the nozzle body 100 configured as described above will be described. When compressed air is supplied from the supply port 104, the supplied compressed air is injected from each injection port 101 through the communication path 105 (see FIG. 2A). The compressed air injected from the injection port 101 is released at a stretch and is blown substantially radially toward the upper surface T1 of the plate member T (see FIG. 2B).
The compressed air blown to the plate-like member T is blown onto the upper surface T1 of the plate-like member T, and then the force for separating the nozzle body 100 from the plate-like member T, that is, the above-mentioned The nozzle body 100 acts on the nozzle body 100 as an upward force that pushes the nozzle body 100 upward in the movement direction W1.
Thus, the nozzle body 100 floats from the plate-like member T when the push-up force acts on the nozzle body 100. When the nozzle body 100 is lifted by the lifting force, a gap d is generated between the opposing surface 102 of the nozzle body 100 and the plate member T. In the gap d, an air pressure layer is formed by the air pressure injected from the nozzle body 100, and the nozzle body 100 floats at a position separated from the plate member T by a distance d. Incidentally, in this embodiment, the nozzle member 100 is floated by a distance d ₀ from the top surface T1 of the plate-like member T, the compression pressure of the compressed air as the nozzle body 100 is suspended at that position adjustment Has been.
The nozzle body 100 is floated by the jetting pressure of the compressed air thus blown, and liquid such as rolling oil and cleaning agent adhering to the upper surface T1 of the plate-like member T, debris, dirt, etc. The deposits are peeled off. Further, since the jetted compressed air flows along the groove 106 to the upstream side in the conveying direction W2 of the plate-like member T, the separated and misted adhering matter rides on this flow and flows into the nozzle body 100. Through the gap between the plate-like member T and the upper surface T1 of the plate member T.

Mist such as the rolling oil and cleaning oil blown to the upstream side in the conveying direction W2 through the gap with the upper surface T1 of the plate-like member T is the depression chamber formed on the upstream side in the plate-like body running direction. 200. The mist that has flowed into the depression chamber 200 flows into the exhaust chamber 202 based on the negative pressure acting on the exhaust chamber 202 connected to the left and right ends of the depression chamber 200 and is connected to the exhaust chamber 202. It is sucked and removed by the pressure source. The exhaust chamber 202 connected to the negative pressure source is an example of exhaust means connected to the intake source in the present invention.
In this example, the depression chamber 200 is formed only on the upstream side since the injection port 101 is inclined in the upstream direction of the plate member T, but the inclination of the injection port 101 is in the downstream direction. If present, it may be formed downstream. Further, depending on the inclination angle of the injection port 101, it is necessary to provide both at the upstream and downstream.
As described above, the mist is sucked into and removed from the depression chamber 200 provided on the upstream side in the plate body traveling direction of the nozzle body 100. The density is not increased, and therefore, there is no problem that the rolling oil remains on the surface of the plate member.
As described above, mist such as rolling oil is removed by suction into the depression chamber 200. However, if the depression chamber 200 is only one row (stage), the mist chamber 200 cannot be removed in the depression chamber 200 as described above. Part of the mist will flow further upstream.
In order to capture such mist flowing further upstream, a plurality of depression chambers 200 are formed in the traveling direction of the plate member T as shown in FIG. It is desirable to capture the mist overflowing further upstream from the depression chamber 200 in the depression chamber 200 further upstream. By such a multi-stage depression chamber 200, the amount of mist overflowing from the depression chamber is reduced, and the mist capture rate is improved.

It is advantageous in terms of mist removal efficiency that the number of depression chambers 200 is as large as three or four. However, if the number of depression chambers 200 exceeds a certain number of stages, the efficiency converges uniformly. It's not good.
When a plurality of depression chambers are provided as described above, air including mist that has flowed in is provided on the side of the plate-like member on the downstream wall portion (rear wall 200a) in the plate-like member traveling direction of the depression chamber 200 on the upstream side. Further, it is desirable to form an inclined surface 204a that flows in the direction of the exhaust chamber as shown in FIG. The inclined surface 204a described in FIG. 2C is symmetrically inclined to the left and right with respect to the center of the depressed chamber. This is because the exhaust chambers 202 are provided on the left and right, respectively, and when the exhaust chamber 202 is provided only on one side of the depressed chamber 200 as shown in FIG. It is desirable to provide an inclined surface 204b that is inclined so as to recede toward the side where 202 is provided.
As described above, the wall surface on the downstream side of the depression chamber (the rear wall 200a) is retracted toward the depression chamber end portion (side wall 200c) on the side where the exhaust chamber 202 is located, that is, the plate member traveling direction of the depression chamber The mist accumulated in the depression chamber 200 is caused to flow along the inclined surface 204 by forming the downstream wall surface so as to be inclined toward the downstream side in the plate member traveling direction as it goes toward the end of the plate member. , By guiding to the exhaust chamber 202, the mist removal efficiency is improved.

Here, the relationship between the force F acting on the nozzle body 100 (vertical axis, hereinafter referred to as acting force F) and the separation distance d (horizontal axis) between the nozzle body 100 and the upper surface T1 of the plate member T. Will be described with reference to FIGS. 3 is a diagram showing the relationship between the acting force F and the separation distance d. FIG. 5 is a diagram showing the pressure distribution in the vicinity of the injection port 101. FIG. Pressure distribution when the distance is d ₀ , (b) is the pressure distribution when the separation distance d is the distance d ₁ (> d ₀ ), and (c) is when the separation distance d is the distance d ₂ (<d ₀ ). The pressure distribution is shown. Here, the acting force F includes a push-up force that pushes up the nozzle body 100 upward in the moving direction W1 by the injection pressure of compressed air, and the nozzle body 100 as the plate-like member as described later. It is assumed that the attraction force to be attracted to T is included and the gravity of the nozzle body 100 is ignored.
As can be understood from the graph shown in FIG. 3, when the distance d is the distance d ₀ , the acting force F is zero. At this time, as shown in FIG. 5A, the integral value (ie, the pushing force) of the push-up pressure P ₁ for pushing up the nozzle body 100 by the injection pressure of compressed air and the nozzle body 100 are By maintaining a well-balanced relationship with the integrated value (ie, adsorption force) of the adsorption pressure P ₂ to be adsorbed on the plate-like member T, the nozzle body 100 is positioned at the position separated by the distance d _0. It is in a floating state. The adsorption pressure P ₂ is a negative pressure generated when compressed air flows out from the gap between the nozzle body 100 and the plate member T, and the negative pressure generates the adsorption force.

Here, the upper surface T ₁ of the plate member T is moved downward due to vibrations or the like generated during rolling or conveyance of the plate member T, and the distance d _{1 is} larger than the distance d ₀ (> d ₀ ), the resistance to block the flow of compressed air in the space of the separation distance d is reduced, the compressed air is easily escaped, and the flow velocity of the flowing air is increased. Therefore, larger is the adsorption pressure P ₂ as shown in FIG. 5 (b) better than the above pushing force the suction force, the nozzle body 100 is moved downward by the suction force, the distance d is the distance d _The distance is reduced from ₁ to the distance d ₀ . Accordingly, even when the upper surface T ₁ of the plate-like member T moves downward, the nozzle body 100 is immediately restored to the balanced state and floats at the position separated by the distance d ₀ .
On the other hand, when the distance d becomes a distance d ₀ is smaller than the distance d ₂ (<d _0), in contrast to the above, when you to obstruct the flow of compressed air in the space of the distance d resistor Becomes larger, the compressed air becomes difficult to escape, and the flow velocity of the flowing air decreases. Therefore, since the push-up force is superior to the suction force becomes smaller the suction pressure P ₂ as shown in FIG. 5 (c), the nozzle body 100 is moved upward by the push-up force, the distance d is the distance The distance is extended from d ₂ to a distance d ₀ . Accordingly, even in this case, the nozzle body 100 is immediately restored to the equilibrium state.
Thus, in the present deposit removing apparatus X, even when the upper surface T1 of the plate member T moves up and down, the nozzle body 100 moves up and down following the upper and lower sides, so that the plate member The distance d from the upper surface T1 of T to the nozzle body 100 is always maintained substantially constant. That is, even when the plate-like member T vibrates, a constant separation distance d is always maintained, so the separation distance d is set to a distance d ₀ (for example, 0.1 mm) that is as close to 0 as possible. Even if it does, the nozzle body 100 does not contact the said plate-shaped member T, Therefore, the said plate-shaped member T is not damaged.
Here, when the plate-shaped member T suddenly fluctuates up and down, the nozzle body 100 also fluctuates up and down abruptly following the up-and-down fluctuation, so the nozzle body 100 overshoots or undershoots up and down. There is a risk of it happening. Further, the overshoot and undershoot may occur periodically, and the nozzle body 100 may be hunted. Therefore, it is desirable that the nozzle body 100 be elastically supported by an elastic member such as a spring in order to prevent the above-described overshoot and hunting. Specifically, a method of interposing a helical spring in the slide bar 111, a method of using the slide bar 111 formed of a buffer member such as an oil damper, and the like can be considered.

By the way, the opening area of the injection port 101 formed on the facing surface 102 of the nozzle body 100 and the area of the facing surface 102 are important factors for floating the nozzle body 100. The reason will be described below with reference to FIG. Here, for the sake of convenience, the description will be made ignoring the weight of the nozzle body 100.
As shown in FIG. 5B, when the separation distance d is increased, as described above, the resistance to block the flow of compressed air in the space of the separation distance d is reduced, and the compressed air flowing out to the outside is reduced. The flow rate increases. Therefore, the adsorption pressure P ₂ (negative pressure) is generated on the facing surface 102 of the nozzle body 100 (particularly the peripheral portion of the injection port 101). The adsorption pressure P ₂ acts as a force for adsorbing the nozzle body 100 to the plate member T. Here, the total value of the push-up pressure P ₁ (> 0), the adsorption pressure P ₂ (<0), and the opening area of all the injection ports 101 for pushing up the nozzle body 100 by the compressed air injection pressure is S. ₁ , where S ₂ is the total area where the adsorption pressure P ₂ acts on the facing surface 102 of the nozzle body 100, the condition of (P ₁ × S ₁ ) + (P ₂ × S ₂ ) <0 is satisfied. In this case, the suction force for attracting the plate member T is superior to the push force for pushing the nozzle body 100 upward, so that the nozzle body 100 is pulled downward.
Therefore, it is considered that it is sufficient to satisfy the condition of P ₁ × S ₁ > P ₁ × S ₂ in order to float the nozzle body 100 while maintaining the distance d ₀ regardless of the distance d. It is done. Here, since the injection pressure P ₁ and the average pressure P ₂ have a correlation, in order to satisfy the above condition, the areas S ₁ and S ₂ may be regarded as fluctuation values so as to satisfy the above condition.
On the other hand, fouling of the plate-like member T to be removed by the compressed air flowing through the opposite surface 102 of the nozzle body 100, hardly deposits are removed with reduced too as compared with the area S ₁ of the area S ₂ The removal effect will be reduced.

Therefore, the inventor of the present application as a condition satisfying both the condition for floating the nozzle body 100 while maintaining the distance d ₀ and the condition for enhancing the removal effect.
S ₁ <2S ₂ (1)
Has been found through repeated experiments and research. Here, when the area of the facing surface 102 of the nozzle body 100 is S, this area S can be approximated as S≈S ₁ + S _2, and thus the above equation (1) can be modified as follows. Can do.
3S ₁ <2S (2)
That is, if the injection port 101 is formed such that the total area of the openings of the injection ports 101 is less than about two-thirds of the area of the facing surface 102, the pressure of the compressed air is affected. Accordingly, it is easy to balance the push-up force and the suction force, and the nozzle body 100 can be stably floated following the vibration of the plate-like member T, and a sufficient removal effect can be obtained. .

By the way, in this embodiment, the compressed air pressure supplied to the nozzle body 100 is adjusted so that the distance d ₀ is 0.1 mm which is relatively close to 0. The reason why the separation distance d is set to a value close to 0 will be described below.
As shown in FIG. 4, the area of the range in which the compressed air is blown in the direction perpendicular to the upper surface T1 of the plate member T and the compressed air collides with the plate member T (enclosed by the broken line in FIG. 4). ), And W is the flow velocity of compressed air until the compressed air collides with the plate member T (average flow velocity at the separation distance d), the larger the value of WV ² , It is thought that the force which removes the deposit | attachment on the upper surface T1 is large. Here, if the flow rate of the compressed air injected from the injection port 101 of the nozzle body 100 is Q, it can be approximated as Q≈WV.
WV ² ≈QV (3)
Can be expressed as Here, when the flow rate Q to be injected is constant, it can be easily understood from the above formula (3) that the larger the flow velocity V, the greater the force for removing deposits.
In general, when compressed air is injected from the injection port 101 of the nozzle body 100, the compressed pressure is released and the compressed air is blown radially, so that the flow velocity V decreases as the distance from the injection port 101 increases. In addition, the atmosphere present in the space of the separation distance d becomes a resistance and causes the flow velocity V to decrease. Therefore, when the flow rate Q is constant, the smaller the separation distance d is, the larger the flow velocity V becomes, so that the force for removing the deposit increases. For this reason, in this embodiment, the compressed air pressure supplied to the nozzle body 100 is set so that the distance d ₀ is a value that is relatively close to 0, 0.1 mm.

Next, the deposit removal apparatus X1 according to the first embodiment of the present invention will be described with reference to FIG.
The deposit removing device X1 in this example is different from the deposit removing device X in the above embodiment in that it faces the upper surface T1 of the plate member T instead of the nozzle body 100 as shown in FIG. The nozzle body 100a in which the groove 107 is provided on the facing surface 102 is used. Note that the same components as those of the above-described embodiment are denoted by the same reference numerals as those of the above-described embodiment, and description thereof is omitted. Here, FIG. 6A is a schematic cross-sectional view showing a vertical cross section in the longitudinal direction of the nozzle body 100a (the left-right direction in FIG. 6), and FIG. 6B is the nozzle body 100a viewed from the arrow B in FIG. FIG. Although the groove 106 (see FIG. 2) formed in the nozzle body 100 is not shown in FIG. 6, the nozzle body 100a may have the groove 106 formed therein.
As shown in FIG. 6, the groove 107 is formed to communicate with each of the four injection ports 101 in a direction orthogonal to the conveying direction W <b> 2 of the plate-like member T (see FIG. 6B). Thereby, for example, even if the number of the injection ports 101 is small, the compressed air injected from the four injection ports 101 can be evenly injected over the entire width direction of the upper surface T1 of the plate member T.

Subsequently, the deposit removing apparatus X2 according to the second embodiment of the present invention will be described with reference to FIG.
In this embodiment, a nozzle body 100 b shown in FIG. 7 is used in place of the nozzle body 100. The nozzle body 100b included in the deposit removing device X2 has a conveying direction W2 (see FIG. 7A) of the plate-like member T and a moving direction W1 of the nozzle body 100b (see FIG. 7B) on the opposite surface 102. The four injection ports 101 are arranged in series in a direction W3 substantially orthogonal to the reference), and substantially the same injection port row 101b as the injection port row 101a including the four injection ports arranged in series. Are arranged on the downstream side of the direction W2 with a predetermined interval in parallel with the direction W3. By arranging the ejection port arrays 101a and 101b in parallel as described above, even if the deposits that could not be removed by the ejection port array 101a remain on the plate member T, the transport of the plate member T is performed. Since the deposit removal process is performed by the ejection port array 101b arranged on the downstream side in the direction W2, the deposit removal effect can be further improved. In this embodiment, the nozzle body 100b in which the two injection nozzle arrays (101a, 101b) are formed as described above is illustrated, but the present invention is not limited to two.
Further, the nozzle body 100b is formed with a flat nozzle 108 having a long opening in the transport direction W2 of the plate member T and the direction W3 substantially orthogonal to the movement direction W1 of the nozzle body 100b. By forming such a planar nozzle 108, it becomes possible to uniformly inject compressed air over the entire width direction of the upper surface T1 of the plate member T.
Here, each of the injection ports 101 described above is formed to inject compressed air substantially perpendicularly to the plate member T in order to move the nozzle bodies 100, 100a and the like in the moving direction W1. . However, the compressed air jetted perpendicularly to the plate-like member T acts exclusively to peel off the deposits, but there is little action to blow off the peeled deposits upstream in the transport direction W2 of the plate-like member T. Of course, the deposit removing device X2 is formed with a groove 106 for guiding the compressed air ejected from the ejection port 101 to the upstream side in the transport direction of the plate member T. Since a part of the compressed air jetted from the jet port 101 is used, the action of blowing off the separated deposits upstream in the transport direction W2 is not so great. In addition, since a part of the jetted compressed air flows through the groove 106, the force for separating the deposits can be reduced. Therefore, in this embodiment, as shown in FIG. 7B, the flat nozzle 108 is inclined so as to inject compressed air to the upstream side of the plate member T in the conveying direction.

The nozzle body 100b has an air reservoir 109a (corresponding to an example of a gas reservoir) that retains air that is injected from the injection port 101 and flows through the space between the facing surface 102 and the plate member T. Is formed. This is for accumulating the air having the separated deposit on the facing surface 102 side in order to efficiently remove the separated deposit. Further, an air escape hole 109b (corresponding to an example of a communication hole) that guides the air reservoir 109a to the outside is provided on the surface 103 side opposite to the facing surface 102 in order to release the air in the air reservoir 109a to the outside. Is formed.
If the air reservoir 109a and the air escape hole 109b are not present, the deposits peeled off by the jet of compressed air collide with the opposing surface 102 and reattach, and the injection port 101 is clogged with the deposits or blown away. However, in this embodiment, since the air reservoir 109a and the air escape hole 109b are provided, the adhered matter that has been peeled off is likely to be reattached to the plate member T. The contained air stays in the air reservoir 109a, and the staying air is discharged so as to be pushed out through the air escape hole 109b. Therefore, the above problem is reduced.
A blower fan (corresponding to an example of an intake means) connected to the air escape hole 109b by a pipe or a flexible hose may be provided. If the blower fan is driven to suck the air in the air reservoir 190a from the air escape hole 109b, it is possible to discharge the air containing the deposits more efficiently.

  Next, a third embodiment of the present invention will be described with reference to the block diagram of FIG. The deposit removing device X3 according to this embodiment connects the air escape hole 109b provided in the nozzle body 100b (see the second embodiment, FIG. 7) and a blower fan 121 which is an example of an intake means. Liquid or mist-like rolling oil (an example of liquid deposits) contained in the air discharged from the air escape hole 190b is separated from the air and collected in an oil tank 130 provided outside the apparatus. And an ejector 122 that guides the separated rolling oil to the oil tank 130. The other components of the deposit removal apparatus X3 are the same as the configuration of the deposit removal apparatus X2 according to the second embodiment described above, and the description of the other components is omitted here.

Various oil separators 120 are conceivable. Here, an oil filter 120a for separating only the rolling oil from the air is disposed inside, and a drain for storing the rolling oil separated by the oil filter 120a is stored. The apparatus which has the drain layer 120b with the hole 120c is illustrated.
The ejector 122 is connected to the drain hole 120c, and is rolled from the drain layer 120b using negative pressure generated inside the ejector 122 when the compressed air supplied from the outside is recirculated by the ejector 122. Oil is sucked and guided to the oil tank 130. During the operation of the blower 121, in the oil separator 120, air flows along the flow path from the nozzle body 100 b through the oil filter 120 a to the blower 121, which is caused by the negative pressure generated by the air flow. Thus, the rolling oil of the drain layer 120b is difficult to be discharged from the drain hole 120c. However, since the deposit removing device X3 is provided with the ejector 122, even when the blower 121 is in operation, It becomes possible to forcibly discharge the rolling oil.

In the adhered matter removing apparatus X3 configured as described above, when the air discharged from the air escape hole 190b is sent to the oil separator 120, the rolling oil is separated by the oil filter 120a. The air from which the rolling oil is separated is sucked out of the oil separator 120 by the blower fan 121 and discharged to the outside. Meanwhile, the rolling oil separated by the oil filter 120a is stored in the drain layer 120b. The rolling oil accumulated in the drain layer 120 b is sucked out from the drain hole 120 c by the ejector 122 and discharged toward the oil tank 130.
When the compressed air is constantly supplied to the ejector 122, when all of the rolling oil in the drain layer 120b is discharged, not only the air is discharged from the drain hole 120c, but the separation efficiency of the rolling oil is reduced. There is a risk that the blower 121 will be heavily loaded. Therefore, it is preferable to supply compressed air to the ejector 122 intermittently, that is, every predetermined time. Alternatively, a flow switch or the like is provided in the drain layer 120b, and a compressed air switching valve or the like is operated on condition that an output signal from the flow switch indicating that a predetermined rolling oil is stored is received. The compressed air may be supplied for a predetermined time.

Thus, in this deposit removal apparatus X3, since air and rolling oil are isolate | separated and rolling oil is collect | recovered by the oil tank 130, the air containing rolling oil does not need to be discharge | released in air | atmosphere, It is possible to remove the harm to the environment. Since the discharged rolling oil is recovered, the rolling oil can be reused.
In this embodiment, an example in which the rolling oil is separated and recovered has been described. However, for example, the deposit removing apparatus X3 according to this embodiment is applied to a case where liquid deposits other than the rolling oil are separated and recovered. Is possible.
If an air filter (not shown) that separates solid deposits such as dust from the discharged air is provided in place of the oil filter, not only liquid deposits but also solid deposits can be separated and recovered. It becomes possible.

  Next, a fourth embodiment of the present invention will be described with reference to FIG. The deposit removing apparatus X4 according to this example is provided with the nozzle body 100 in the above-described embodiment not only on the upper surface T1 side of the plate member T but also on the lower surface T2 side. Here, when the nozzle body 100 is provided on the lower surface T2 side of the plate-like member T, the nozzle body 100 is disposed so as to inject compressed air in a direction opposite to that provided on the upper surface T1 side. Must. Therefore, in this case, as shown in FIG. 9, the nozzle body 100 is prevented from moving downward by its own weight, and the nozzle body 100 is moved in a direction W1 substantially perpendicular to the lower surface T2 of the plate member T. The nozzle body 100 is elastically supported by an elastic member 113 such as a helical spring. By being configured in this way, it is possible not only to remove deposits on both surfaces of the plate-like member T, but also to prevent overshooting, undershooting, or hunting of the nozzle body 100 in the vertical direction. It becomes possible to do.

In the deposit removing apparatus according to the above-described embodiment and each example, when the nozzle body 100 is disposed above the plate-like member, the pressure of the compressed air supplied from the air pressure source 5 is reduced. There is a problem in that the nozzle body 100 falls and damages the plate-like member T by being lowered for some reason. The deposit removing apparatus X5 according to the fifth embodiment of the present invention described here is configured to solve the above-described problems.
Specifically, as shown in the block diagram of FIG. 10, in addition to the pressure reducing valve 3, the air filter 4, the controller 1, and the nozzle body 100, a predetermined operating pressure value (specified pressure value) is set. The pressure switch 7 and a cylinder 140 (an example of drive means) that operates when compressed air is supplied. Unlike the configuration of the above-described embodiment and example, a three-way solenoid valve 2a that can be switched in three ways is used instead of the solenoid valve 2.

The cylinder 140 is a single-acting cylinder having an elastic member 140a such as a spring and a piston 140b therein, and applies a predetermined pressure (at least a force greater than the urging force of the elastic member 140a to the piston 140b. When the above compressed air is supplied to the air supply chamber 140d, the piston 140b operates in a direction opposite to the biasing direction of the elastic member 140a (the direction in which the elastic member 140a is compressed). It is. The cylinder 140 is attached to the support member 141 so that the piston 140b operates in the vertical direction and the piston 140b operates in the upward direction by supplying compressed air.
The piston shaft 140c extending below the piston 140b is connected to a support member 142 that supports the nozzle body 100 via the elastic member 113 (see FIG. 9). By being connected in this way, when the piston 140b is operated, the nozzle body 100 is lifted in a direction substantially perpendicular to the surface of the plate member T.

The solenoid valve 2 a is a three-way solenoid valve having one input port and two output ports, and the input port P ₁ is connected to the air pressure source 5 by piping. On the other hand, of the two output ports, the port P ₂ that communicates with the air pressure reduction 5 by demagnetization is connected to the air supply chamber 140d of the cylinder 140 by piping, and communicates with the air pressure reduction 5 when excited. The port P3 is connected to the pressure reducing valve 3 by piping.
The pressure switch 7 transmits a detection signal to the controller 1 when the compressed air supplied to the nozzle body 100 becomes less than a predetermined specified pressure. The specified pressure is a minimum pressure required for the nozzle body 100 to float.

In the adhered matter removing apparatus X5 configured as described above, a detection signal is sent from the pressure switch 7 to the controller 1 while the nozzle body 100 is floating (floating) by supplying compressed air. When output, the three-way solenoid valve 2a is demagnetized by the controller 1. Thus, the three-way solenoid valve 2a is activated, the output port P3 is closed, and the output port P ₂ is opened. Thereafter, compressed air is supplied to the air supply chamber 140d via the output port P _2. As described above, the controller 1 that controls the three-way electromagnetic valve 2a corresponds to the drive control means.
In the cylinder 140, when compressed air is supplied to the air supply chamber 140d, the piston 140b moves upward, and the nozzle body 100 is lifted upward as the piston 140b moves.
As described above, when the pressure of the compressed air supplied to the nozzle body 100 becomes less than the specified pressure, the nozzle body 100 is lifted by the cylinder 140, and thus the plate member T due to the drop of the nozzle body 100 is used. Damage is prevented.

In the fifth embodiment, the case where the nozzle body 100 is disposed on the upper surface side of the plate-like member T has been described. Of course, as described in the above-described fourth embodiment, the above plate-like member is used. The same can be applied to the case where the nozzle body 100 is disposed on the lower surface side of the member T. In this case, the cylinder 140 is disposed so that the nozzle body 100 is pulled down from the lower surface of the plate-like member T by the operation of the piston 140b.
In this embodiment, an example in which a single-acting cylinder 140 is used as the driving means has been described. However, for example, a double-acting cylinder may be used.

The block diagram explaining the outline of the air control system of the deposit | attachment removal apparatus X which concerns on embodiment of this invention. The schematic diagram explaining the nozzle body of the deposit | attachment removal apparatus X, and. The figure showing the relationship between the force F which acts on the nozzle body 100, and the separation distance d. The schematic diagram explaining the relationship between the separation distance d and the deposit removal effect. The figure which shows the pressure distribution of the vicinity of the injection nozzle 101. FIG. The schematic diagram explaining the nozzle body 100a of the deposit | attachment removal apparatus X1 which concerns on 1st Example of this invention. The schematic diagram explaining the nozzle body 100b of the deposit | attachment removal apparatus X2 which concerns on the 2nd Example of this invention. The block diagram which shows schematic structure of the deposit | attachment removal apparatus X3 which concerns on the 3rd Example of this invention. The schematic diagram explaining the nozzle body 100c of the deposit | attachment removal apparatus X4 which concerns on the 4th Example of this invention. The block diagram which shows schematic structure of the deposit | attachment removal apparatus X5 which concerns on the 5th Example of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Controller 2 ... Solenoid valve 3 ... Pressure reducing valve 4 ... Air filter 5 ... Air pressure source 6 ... Pipe line 7 ... Pressure switch 100 ... Nozzle body 101 ... Injection port 102 ... Opposite surface 104 ... Supply port 105 ... Communication channel 106 ... Groove 107 ... groove 108 ... flat nozzle 109a ... air reservoir 109b ... air escape hole 110 ... slide mechanism 111 ... slide bar 112 ... slide guide 113 ... elastic member 120 ... oil separator 121 ... blower 122 ... ejector 130 ... oil tank 140 ... cylinder 200 ... Depression chamber 202 ... Exhaust chamber

Claims (12)

A rolling member that includes a nozzle body having one or more injection ports formed on an opposing surface that faces the surface of a traveling plate member, and that adheres to the plate member by injecting compressed gas from the injection ports of the nozzle body. A deposit removing device that removes deposits such as oil and cleaning oil,
A deposit removing device, wherein a concavity chamber that is recessed in a direction away from the plate-like body is formed adjacent to the nozzle body on the facing surface of the nozzle body.   2. The deposit removing apparatus according to claim 1, wherein the depression chamber is a space into which mist such as the rolling oil and cleaning oil blown up from the surface of the plate member by the compressed gas injected from the nozzle body can flow. .   The nozzle body is supported so as to be movable in a direction substantially perpendicular to the surface of the plate-like member, and is based on the flow of air injected from the injection port and flowing through the gap between the plate-like members. 3. The deposit removing apparatus according to claim 1, wherein the nozzle body is supported by being lifted from the plate-like member by using an adsorption pressure which is a negative pressure generated.   The deposit removing apparatus according to claim 1 or 2, wherein the nozzle body is fixed in position relative to a machine base for running the plate-like member.   The deposit removing apparatus according to any one of claims 1 to 4, wherein a plurality of the depression chambers are formed in a traveling direction of the plate-like member.   The wall surface on the downstream side in the plate member traveling direction of the depression chamber is formed so as to be inclined toward the downstream side in the plate member traveling direction toward the plate member end side. The deposit removing apparatus according to 1.   The deposit removing apparatus according to any one of claims 1 to 6, wherein an exhaust means connected to an intake source is connected to the one or more depressed chambers.   The deposit removing apparatus according to any one of claims 1 to 7, wherein the injection ports are arranged in series or in parallel in a direction substantially orthogonal to a conveying direction of the plate-like member and a moving direction of the nozzle body.   The deposit according to any one of claims 1 to 8, wherein a flat nozzle having a long opening in a direction substantially orthogonal to a conveying direction of the plate-like member and a moving direction of the nozzle body is provided on the facing surface. Removal device.   The deposit removal apparatus according to any one of claims 1 to 9, wherein the nozzle body is provided on one or both of the upper surface side and the lower surface side of the plate-like member. The opposed surface is provided with a depression-like gas reservoir for storing the compressed gas injected from the injection port,
The deposit removing apparatus according to any one of claims 1 to 10, wherein a communication hole for guiding the gas in the gas reservoir to the outside of the nozzle body is formed in the nozzle body.   The deposit removing apparatus according to claim 11, further comprising suction means for sucking the gas in the gas reservoir from the communication hole.

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