JP4741998B2 - Cleaning device and cleaning method - Google Patents

Description

For example, the present invention can remove dust and powder adhering to various objects to be cleaned, such as parts having a relatively complicated shape to which toner is attached, which is used in an electrophotographic image forming apparatus such as a copying machine or a laser printer. The present invention relates to a cleaning apparatus and a cleaning method for removing using a solid cleaning medium without using a solvent, and in particular, to improve workability by continuously supplying an object to be cleaned.

  Office equipment manufacturers such as copiers, facsimiles, and printers disassemble, clean, and reassemble used products and various units from users to realize a resource recycling society, and reuse them as parts. Recycling activities are actively carried out. In order to reuse the parts used in these products and various units, it is necessary to remove and clean the toner, which is fine particle powder adhering to the disassembled parts and units. Reducing the cost and environmental burden required for commercialization is a major issue.

  In the case of a wet cleaning method using water or a solvent to remove dirt such as toner adhering to these parts and units, the energy consumption and environmental load of waste liquid processing including toner and drying processing after cleaning are reduced. The problem is that it is large and expensive.

  Also, in the case of dry cleaning methods using air blow, cleaning capability is not sufficient for toner with strong adhesion, and post-processing such as wiping with a manual cloth is necessary, so cleaning is a bottleneck process in product reuse and recycling It is one of. Furthermore, the blast cleaning using dry ice has a problem that the running cost is high and the environmental load is large because dry ice is consumed in large quantities.

  In order to solve these problems, the dry cleaning apparatus disclosed in Patent Document 1 removes electricity while stirring a charged cleaning object in a rotating cylinder together with an elastically deformable contact member and adheres to the cleaning object. The dust adhesion is weakened and removed. However, the contact force between the contact member and the object to be cleaned by stirring is not sufficient, and it is difficult to remove dust with strong adhesion.

  Moreover, as shown in Patent Document 2, a small piece of steel, aluminum, stainless steel spheres or wire finely cut is sprayed onto the object to be processed to separate the deposits from the object to be cleaned. As shown, a shot blasting method is also used in which a granular solid is mixed in a high-speed air stream and collides with the surface of the resin container to remove dirt from the resin container.

Furthermore, in the dry cleaning method disclosed in Patent Document 4, a particulate cleaning medium that adsorbs fine particles is introduced into a container to be cleaned, a cleaning nozzle is inserted into the opening of the container to be cleaned, and a high-speed air flow is introduced into the cleaning container. Blow out the cleaning nozzle, blow up the cleaning medium in the cleaning container, remove the fine particles adhering to the inner surface of the cleaning container with the blown particulate cleaning medium, and make the cleaning medium collide with the mesh at the tip of the cleaning nozzle Then, the fine particles adsorbed on the cleaning medium are separated and filtered to regenerate the cleaning medium, and the regenerated cleaning medium is blown again with an air flow and repeatedly cleaned.
Japanese Patent No. 3288462 Japanese Patent No. 2889547 Japanese Patent No. 3468995 JP 2005-329292 A

  In the dry cleaning apparatus disclosed in Patent Document 1, the contact force between the contact member and the object to be cleaned by stirring is not sufficient, and it is difficult to remove dust with strong adhesion.

  Moreover, since the shot blast method shown by patent document 2 and patent document 3 uses the small piece or granular solid which cut | disconnected the metal sphere and the wire material finely as a washing | cleaning medium, it only removes the stain | pollution | contamination of the washing | cleaning target object. In addition, it was not applicable when the surface of the object to be cleaned was scraped and roughened into a satin-like shape, and scratches on the object due to cleaning were not allowed.

  In addition, the dry cleaning apparatus disclosed in Patent Document 4 performs regeneration by flying the cleaning medium and sucking the cleaning medium at the same time, and is an effective means for a small volume such as cleaning in a container. However, since the flying energy of the cleaning medium is dispersed, the stagnation of the cleaning medium does not fly and stays in the cleaning tank with a large volume where the object to be cleaned is introduced and moved. It is difficult to fly and regenerate, and the cleaning ability may be reduced.

This invention improves such drawbacks, as well as washing the washing object made of a variety of materials efficiently, a cleaning device that can improve the cleaning quality and cleaning efficiency by increasing the reproduction quality of the cleaning medium The object is to provide a cleaning method .

The cleaning device of the present invention is a cleaning device that removes deposits by flying a cleaning medium and colliding with an object to be cleaned, and generates a circulating air current along the cleaning tank and the inner wall surface of the cleaning tank. A circulating airflow generating means for flying the cleaning medium; a cleaning medium accelerating means for causing the flying cleaning medium to collide with the object to be cleaned by an airflow; Cleaning medium regeneration means for discharging the cleaning medium, wherein the cleaning medium acceleration means has a plurality of acceleration nozzles, and the plurality of acceleration nozzles jet airflow alternately or simultaneously. To do.

The cleaning medium accelerating means jets an air flow at the same time by adjusting an injection angle of the plurality of acceleration nozzles.

The cleaning tank is formed of a substantially rectangular parallelepiped hollow body.

Further, the cleaning medium has an area of 1 to 1000 mm. ² And a flaky object having a thickness of 1 to 500 μm.

Further, the cleaning medium regeneration means has a closed space formed by a separation member and a hood arranged on the inner wall of the bottom of the cleaning tank, and an air flow from the circulation air flow generation means is formed on the cleaning medium stacked on the separation member. As a result of the action, the deposit is gradually lifted from the upper layer portion of the deposited cleaning medium, and is transported along the cleaning tank to fly.

Further, the present invention is characterized by comprising detection means for detecting the amount of the cleaning medium flying, and control means for controlling the cleaning operation in accordance with the amount of the cleaning medium detected by the detection means.

A holding means for holding the cleaning object; a moving means for moving the cleaning object held by the holding means; a detecting means for detecting the position of the cleaning object moved by the moving means; And control means for controlling the cleaning operation in accordance with the position of the cleaning object detected by the detection means.

The cleaning method of the present invention is a cleaning method for removing deposits by flying a cleaning medium and causing it to collide with an object to be cleaned, wherein a circulating air flow is generated along the inner wall surface of the cleaning tank. A circulation airflow generation step for flying, a cleaning medium acceleration step for causing the flying cleaning medium to collide with the object to be cleaned by an airflow, a deposit separated from the cleaning object, and a cleaning medium deteriorated by the cleaning. A cleaning medium regeneration step for discharging, wherein the cleaning medium acceleration step ejects airflow alternately or simultaneously by a plurality of acceleration nozzles.

This invention generates a high-speed circulation air flow along the wall of the cleaning tank by means of the circulation air flow generating means to fly the flaky flexible cleaning medium accommodated in the cleaning tank, and accelerates the flying cleaning medium to the cleaning medium. The dust or powder adhering to the object to be cleaned is made to collide with the object to be cleaned by the high-speed air current jetted from the means, and the adhering material adhering to the cleaning medium that has collided with the object to be cleaned is removed by the cleaning medium regenerating means. In the cleaning device that removes by suction , the cleaning medium acceleration means can cause the cleaning medium to collide with the object to be cleaned by spraying airflow alternately or simultaneously from a plurality of acceleration nozzles, and the cleaning effect by the cleaning medium Can be increased.

  Also, by comparing the flying amount of the cleaning medium flying into the cleaning tank with a preset threshold value and outputting an alarm when the detected flying amount of the cleaning medium falls below the threshold value, It is possible to prevent the cleaning medium from decreasing and the cleaning ability from being lowered, and it is possible to stably perform a good quality cleaning.

  Furthermore, by performing the cleaning operation in synchronization with detection of the object to be cleaned in the cleaning tank, the amount of air consumed for circulation and acceleration of the cleaning medium can be reduced, and energy saving can be achieved.

  In addition, by performing a cleaning operation in synchronization with the detection of the movement position of the object to be cleaned in the cleaning tank, when cleaning multiple objects to be cleaned at the same time, cleaning is performed in areas where there are no objects to be cleaned, such as between objects to be cleaned. It is possible to avoid accelerating the medium, improve the cleaning efficiency, reduce the amount of air consumed for circulation and acceleration of the cleaning medium, and save energy.

  FIG. 1 is a diagram showing the structure of a dry cleaning apparatus according to the present invention. As shown in FIG. 2, the dry cleaning apparatus 1 removes various dusts 3 such as toner adhering to a cleaning object 2 from a cleaning medium 4 that flows by a high-speed air stream, and generates a cleaning tank 5 and a circulation air stream. Means 6, cleaning medium acceleration means 7, and cleaning medium regeneration means 8 are provided.

The cleaning medium 4 used in the dry cleaning apparatus 1 is formed of a solid such as metal, ceramics, synthetic resin, sponge, cloth, etc., solid, rod-shaped, cylindrical, fibrous or flaky, and the shape of the cleaning object 2 What is necessary is just to select according to the characteristics, such as a material, and the particle size and adhesion strength of the dust 3 adhering to the cleaning target object 2. As the flaky cleaning medium 4, an object having an area of 1 to 1000 mm ² and a thickness of about 1 to 500 μm may be used. For example, in order to remove toner powder from synthetic resin or metal components to which toner powder having an average particle diameter of 5 μm to 10 μm used for an electrophotographic image forming apparatus is attached, a resin film piece, a cloth piece, a paper piece, It is desirable to use a lamellar cleaning medium 4 such as a metal flake.

  When the flaky cleaning medium 4 is used as the cleaning medium 4, as shown in FIG. 2, the contact force concentrates on the edge of the cleaning medium 4 when it collides with the cleaning target object 2 from the end portion. Despite being small, the force necessary to remove the dust 3 can be obtained. Further, since the force is released when the contact force with respect to the object to be cleaned 2 increases, it is possible to apply an excessive force to the object to be cleaned 2 unlike a general blast shot material or an abrasive for barrel processing. There is no need to damage the object 2 to be cleaned. Further, when the flaky cleaning medium 4 collides with the object 2 to be cleaned, the viscous resistance received from the air acts greatly to become an inelastic collision, which is unlikely to rebound. Force that is parallel to the contact surface with respect to the dust 3 such as toner particles adhered to the cleaning object 2 due to the scraping action or the rubbing action due to the contact, and moving while contacting the wide area of the cleaning object 2 The dust 3 can be separated from the cleaning object 2 with a small force to increase the cleaning efficiency.

  The cleaning tank 5 is formed of a substantially rectangular parallelepiped hollow body, has an upper surface 9 to be cleaned to which the object to be cleaned 2 is charged, and has an opening at the bottom. A free lid 10 is provided, and a cleaning medium regeneration means 8 is provided at the bottom opening. As shown in FIG. 3, a circulation airflow generating means 6 is provided on a part of the inner wall surface of one side surface of the cleaning tank 5, and the circulation path of the circulation airflow is formed on both side surfaces, the bottom surface, and the inner wall surface of the upper surface. Is forming. As shown in FIG. 3 (a), the corners of the inner wall surface forming the circulation path of the circulation airflow are connected at a constant angle θ as shown in FIG. 3 (a). It is formed to circulate the airflow efficiently. By setting the constant angle θ to 120 degrees to 150 degrees, the resistance applied to the circulation airflow can be reduced and the circulation can be performed.

  As shown in FIG. 4, the circulation airflow generating means 6 includes a suction portion 62 having a suction port 61 having a large diameter, and a discharge portion having a compressed air supply port 63 provided on the outer peripheral portion on the outlet side of the suction portion 62. 64, the air flow is sucked in from the suction unit 62 by the high-speed air flow that is supplied from the compressed air supply port 63 and is generated toward the discharge port 65 of the discharge unit 64, and the amount of compressed air supplied from the compressed air supply port 63 is An amount of air several times to 10 times is discharged from the discharge port 65. By using this air flow generation means 6 for circulation, the amount of compressed air consumed can be reduced compared with the case of using a general air blow nozzle, and the cleaning medium can be circulated with less energy and the inside of the cleaning tank 5 can be circulated. Negative pressure can be easily maintained, and leakage of dust and the like to the outside of the cleaning tank 5 can be prevented. Various gases such as an inert gas such as nitrogen gas, carbon dioxide gas, and argon gas may be supplied instead of the compressed air supplied from the compressed air supply port 6c. Hereinafter, the case where compressed air is used will be described. The circulation airflow generation means 6 is disposed near the bottom of one side wall that forms the circulation path of the circulation airflow in the cleaning tank 5 with the suction port 61 up and the discharge port 65 down.

  The cleaning medium accelerating means 7 has a plurality of array-like acceleration nozzles 71a on the surface orthogonal to the inner wall surface forming the circulation path of the circulation airflow, and the array-like surface on the back surface facing the wall surface on which the acceleration nozzle 71a is provided. A plurality of accelerating nozzles 71b, and compressed air supplied from a compressed air source such as a compressor or a pressure tank is ejected from each accelerating nozzle 71 into the cleaning tank 5 to cause the cleaning medium 4 to collide with the object 2 to be cleaned. . As the accelerating nozzles 71a and 71b, a jet nozzle similar to the circulation airflow generation means 6 may be used.

  As shown in the perspective view of FIG. 5A and the partial cross-sectional view of FIG. 5B, the cleaning medium regeneration means 8 forms a closed space with a separating member 81 and a hood 82 arranged on the bottom inner wall of the cleaning tank 5. The formed closed space is connected to a dust collector having a negative pressure generation source by a suction pipe 11 such as a hose, and the inside of the hood 82 is made negative pressure. The separation member 81 has a large number of small holes and slits 83 through which gas and powder can pass but the cleaning medium 4 cannot pass through. For example, the separation member 81 is formed of a porous member such as a wire net, a plastic net, a mesh, a punch metal plate, a slit plate, or the like. Then, the dust separated from the object to be cleaned 2 and the cleaning medium that has collided with the object to be cleaned 2 and caused wear or chipping, or the cleaning medium whose elasticity has deteriorated due to long-term use are discharged.

  As shown in the block diagram of FIG. 6 and the piping system diagram of FIGS. 7A and 7B, the controller 12 of the dry cleaning apparatus 1 includes the pressurized gas supply device 18 to the circulating airflow generating means 6. An airflow circulation solenoid valve 14 for conducting and non-conducting the compressed air supply pipe to be supplied, an acceleration solenoid valve 15 for conducting and non-conducting the compressed air supply pipe supplied to the cleaning medium accelerating means 7, and cleaning The accelerating air flow switching control valve 16 for switching the compressed air supplied to the accelerating nozzle 71 provided on both wall surfaces of the medium accelerating means 7 in two directions and the suction pipe 11 connecting the cleaning medium regenerating means 8 and the dust collecting device 19 are connected. Regenerative solenoid valves 17 that are non-conductive are connected to each other, and the operation of each solenoid valve is controlled by a drive signal from the starting means 13.

  In this dry cleaning apparatus 1, the object to be cleaned 2 held by the work holding means 20 is put into the cleaning tank 5 by the work moving means 21, and the flaky cleaning medium 4 is circulated in the cleaning tank 5 to be cleaned. The operation of removing the dust 3 such as the toner adhering to 2 will be described with reference to the time chart of FIG.

  The cleaning object 4 held by the work holding means 20 in a state where the flaky cleaning medium 4 is put into the cleaning tank 5 and stacked on the separation member 81 of the cleaning medium regeneration means 8 is cleaned by the work moving means 21. 5 to be cleaned and positioned at an initial position, and the cleaning object charging port 9 is closed with a lid 10 to seal the cleaning tank 5. When the starter 13 is operated in this state and a cleaning start signal is input to the control device 12, the control device 12 first opens the airflow circulation electromagnetic valve 14 to circulate from the pressurized gas supply device 18 such as a compressor. For example, compressed air is supplied to the airflow generation means 6, and the circulation airflow generation means 6 generates a circulation airflow that flows along the circulation path of the inner wall surface of the cleaning tank 5. This circulating airflow flows along the separation member 81 of the cleaning medium regeneration means 8, and as shown in FIG. 9 (a), the airflow acts on the flaky cleaning medium 4 stacked on the separation member 81 from the lateral direction. As shown in FIGS. 9B and 9C, the deposit is gradually lifted from the upper layer portion of the deposited cleaning medium 4 and is transported along the longitudinal direction of the cleaning tank 5 to fly. Since the circulation airflow for causing the cleaning medium 4 to fly is directly jetted from the circulation airflow generating means 6 into the cleaning tank 5, it is possible to apply a large impact force to the accumulated cleaning medium 4, and the cleaning deposited by the circulation airflow. The medium 4 can fly reliably.

  When the flaky cleaning medium 4 deposited in this way is transported by an air stream to fly, for example, as shown in FIG. 10A, the nozzle 22 is applied to the flaky cleaning medium 4 deposited on the separation member 81. When an air flow perpendicular to the deposition direction of the cleaning medium 4 is applied, the energy of the compressed air required to lift all the cleaning media 4 deposited is required, and as shown in FIG. As the amount of 4 increases, it becomes difficult to move. Further, even though the cleaning medium 4 directly above the nozzle 22 that ejects the airflow can be moved, the fluidity of the accumulated lamellar cleaning medium 4 is poor, so as shown in FIG. Even if there is a mortar-like inclination, the cleaning medium 4 around the nozzle 22 remains as it is without collapsing, and it is difficult to fly all the accumulated cleaning medium 4. In contrast, the circulation airflow generating means 6 generates a circulation airflow that flows along the circulation path of the inner wall surface of the cleaning tank 5, and causes the airflow to act from the lateral direction of the cleaning medium 4 deposited on the separation member 81. As a result, the cleaning medium 4 deposited with a small amount of energy can be made to fly reliably, and the amount of compressed air supplied to the circulation airflow generation means 6 can be reduced. Further, when the cleaning medium 4 is transported by airflow, the cleaning medium 4 may be clogged in the duct or hose when transported using a duct or hose. However, the circulation path of the circulation airflow is formed by the wall surface of the cleaning tank 5. Therefore, there is no possibility that the cleaning medium 4 is clogged in the circulation path, and the cleaning medium 4 can fly into the cleaning tank 5.

  Further, the circulation airflow generating means 6 for generating the circulation airflow is arranged with the suction port 61 up and the discharge port 65 down in the vicinity of the bottom of one side wall forming the circulation path of the circulation airflow of the cleaning tank 5. Therefore, even at a position away from the discharge port 65, a strong air current force along the bottom surface can be applied to the cleaning medium 4 deposited on the separation member 81 at the bottom of the cleaning tank 5. The cleaning medium 4 can be carried along the wall surface of the cleaning tank 5. Further, since the cleaning medium 4 entering the suction port 61 is dispersed and the spatial density is small, the suction port 61 can be prevented from being blocked and a circulation airflow can be generated stably. That is, when the suction port 61 is directed downward and disposed near the bottom of the cleaning tank 5, the force of the suction airflow acts only on the cleaning medium 4 near the suction port 61, and a large amount is accumulated at the bottom of the cleaning tank 5. It is difficult to transport the cleaning medium 4, and when the accumulated cleaning medium 4 is sucked in a large amount by the suction port 61, the spatial density of the cleaning medium 4 in the suction port 61 becomes excessive, and the suction port 61. However, it is possible to prevent such a problem from occurring.

When a predetermined time set in advance has elapsed, the control device 12 closes the airflow circulation electromagnetic valve 14 to stop the circulation airflow generated by the circulation airflow generation means 6, as shown in FIG. The accelerating electromagnetic valve 15 is opened while the workpiece moving means 21 is gradually lowered from the initial position by the work moving means 21, and the cleaning medium accelerating means 7 is opened from the pressurized gas supply device 18 via the acceleration airflow switching control valve 16. Compressed air is supplied to the cleaning medium accelerating means 7, and compressed air is ejected from one of the accelerating nozzles 71 a of the cleaning medium accelerating means 7, and the regenerative solenoid valve 17 is opened to bring the cleaning medium regenerating means 8 into conduction with the dust collector 19. Make the inside negative pressure. When the circulation airflow generated by the circulation airflow generation means 6 is stopped, the cleaning medium 4 flying by the circulation airflow falls down. The falling cleaning medium 4 collides with the object 2 to be cleaned by the compressed air ejected from the acceleration nozzle 71a, and removes dust 3 such as toner adhering to one surface of the object 2 to be cleaned.

  The dust removed from the object to be cleaned 2 or the cleaning medium 4 that has collided with the object to be cleaned 2 and adheres to the dust falls due to gravity, and the separating member of the cleaning medium regenerating means 8 sucked by the negative pressure in the hood 82 Get down on 81. The dust falling on the separation member 81 and the dust adhering to the cleaning medium 4 are sucked into the hood 82 by the negative pressure in the hood 82 and collected in the dust collecting device 19, and the cleaning medium 4 to which the dust adheres is removed. Play efficiently.

  When the compressed air is ejected from the accelerating nozzle 71a for a predetermined time, the control device 12 closes the accelerating solenoid valve 15 and the regeneration solenoid valve 17, and operates the cleaning medium acceleration means 7 and the cleaning medium regeneration means 8. Stop. When the regeneration solenoid valve 17 is closed, the negative pressure in the hood 82 is eliminated, the suction force on the hood 82 side with respect to the cleaning medium 4 accumulated on the separation member 81 disappears, and the separation member 81 is separated from the next circulation airflow. The Therefore, the mesh or the like of the separating member 81 is not covered with the cleaning medium 4 and sealed, and the cleaning medium 4 and dust can be continuously separated. Therefore, it is not necessary to replace the cleaning medium 4, and it is sufficient to add the portion of the cleaning medium 4 that has been reduced due to breakage or the like, so that the cleaning medium 4 can be used effectively and maintainability can be improved.

  After that, the air circulation electromagnetic valve 14 is opened again, the circulation air flow generation means 6 generates a circulation air flow, and the cleaning medium 4 deposited and regenerated on the separation member 81 of the cleaning medium regeneration means 8 is regenerated for a predetermined time T1. The acceleration solenoid valve 15 and the regeneration solenoid valve 17 are opened and the acceleration air flow switching control valve 16 is switched to the acceleration nozzle 71b side to remove dust from the object to be cleaned 2 and regenerate the cleaning medium 4. Processing is performed for a predetermined time. The dust removal process from the cleaning object 2 and the regeneration process of the cleaning medium 4 are set longer than the time during which the circulation airflow is generated so that a wide range of the cleaning object 2 can be cleaned. Further, since the compressed air is alternately ejected from the acceleration nozzle 71a and the acceleration nozzle 71b, the air currents ejected from the acceleration nozzle 71a and the acceleration nozzle 71b are prevented from interfering with each other, and the cleaning medium 4 reliably collides with the object 2 to be cleaned. The cleaning effect of the cleaning medium 4 can be enhanced.

The generation of the air flow for circulation, the dust removal process from the cleaning object 2 and the regeneration process of the cleaning medium 4 are repeated while gradually lowering the cleaning object 2 from the initial position, as shown in FIG. In addition, when the cleaning object 2 reaches the folding position, the workpiece moving means 21 stops the lowering of the cleaning object 2 and gradually raises the cleaning object 2. Even when the cleaning object 2 is gradually rising, the control device 12 alternately repeats the generation of the air flow for circulation, the dust removal process from the cleaning object 2 and the regeneration process of the cleaning medium 4 to perform the cleaning object. Dust 3 is removed from the entire surface of 2. Then, as shown in FIG. 11C, when the cleaning object 2 reaches the initial position that is the rising end, the control device 12 stops the cleaning operation. When the cleaning operation is stopped, the lid 10 of the cleaning tank 5 is opened, the cleaning object 2 held by the work holding means 18 is taken out from the cleaning tank 5 by the work moving means 19, replaced with a new cleaning object 2 and cleaned again. Start operation.

  In the above description, the case where the entire surface of the cleaning target object 2 is cleaned by alternately ejecting compressed air from the acceleration nozzles 71a and 71b of the cleaning medium accelerating means 7 is described. However, as shown in FIG. By adjusting the injection angles of the acceleration nozzles 71a and 71b, the compressed air may be simultaneously injected from the acceleration nozzles 71a and 71b. Moreover, when dust adheres only to one surface of the cleaning object 2, the compressed air may be jetted from either one of the acceleration nozzles 71a and 71b.

  In the above description, the case where the circulation path of the circulation airflow generated by the circulation airflow generation means 6 is formed by the flat inner surface of the cleaning tank 5 is described. However, as shown in FIG. A groove 23 formed of a plurality of square or curved surfaces along the flow direction of the circulation airflow may be provided on the wall surface 51 of the cleaning tank 5 that forms the shape. The width of the groove 23 is made smaller than the surface size of the cleaning medium 4 so that the cleaning medium 4 does not fall into the groove 23. By providing the groove 23 in this manner, a space can be formed between the wall surface 51 of the cleaning tank 5 and the cleaning medium 4 to reduce the contact resistance between the wall surface 51 and the cleaning medium 4 and the inside of the groove 23 can be reduced. By flowing the circulation airflow, the cleaning medium 4 can be efficiently transported and a large amount of the cleaning medium 4 can be transported. Further, the circulation airflow is rectified by the plurality of grooves 23 so that turbulent flow is less likely to occur, and the force of the airflow is less likely to be attenuated, so that the cleaning medium 4 can be efficiently transported and flying, thereby further improving the cleaning efficiency. be able to. The height of the groove 23 only needs to allow airflow to pass. For example, when the height is about 0.1 mm to 1 mm, the groove 23 can be easily processed.

  Moreover, you may form the wall surface 51 which forms the circulation path | route of the airflow for a circulation of the washing tank 5 in a concave curved surface, as shown in FIG.13 (b). By forming the wall surface 51 forming the circulation path in the concave curved surface in this way, the circulation airflow is prevented from diffusing, and a large amount of the cleaning medium 4 is efficiently conveyed, It is possible to increase the cleaning efficiency by scattering in the cleaning tank 5.

  Further, as shown in FIGS. 14A and 14B, air flow rectification that guides the cleaning medium 4 toward the cleaning medium accelerating means 7 on the upper surface or upper side surface of the cleaning tank 5 that forms the circulation path of the circulating air flow. Means 24 may be provided. By providing the airflow rectifying means 24 in the circulation path of the circulation airflow in this way, the cleaning medium 4 can be scattered in a large amount between the cleaning medium accelerating means 7 and the cleaning target object 2, and the cleaning effect can be enhanced. it can. In addition, the cleaning medium 4 whose flow direction has been changed by the airflow rectifying means 24 can directly collide with the cleaning object 2 and be cleaned. The air flow rectifying means 24 is preferably adjusted to change the angle of changing the flow of the air flow depending on the shape and position of the cleaning object 2.

  Further, as shown in FIGS. 15A and 15B, an inclined surface 52 having an opening is provided at the bottom of the cleaning tank 5 without forming the cleaning tank 5 in a substantially rectangular parallelepiped, and the cleaning medium is provided on the inclined surface 52. The regenerating unit 8 may be provided, the circulation airflow generation unit 6 may be provided at the lower end portion of the inclined surface 52, and the circulation airflow may flow along the inclined surface 52 from the circulation airflow generation unit 6. With this configuration, when the cleaning medium 4 collides with the object to be cleaned 2 and removes the dust 3 and then falls on the separation member 81 of the cleaning medium regenerating unit 8, the discharge port of the circulating airflow generating unit 6 A large amount of cleaning medium 4 can be collected with a small amount of compressed air supplied by generating a circulating air flow from the circulating air flow generating means 6 and transporting the cleaning medium 4 to the collected cleaning medium 4 easily. Can be transported and energy saving can be achieved. In addition, by using the place where the cleaning medium regeneration means 8 is installed as a place where the cleaning medium 4 is collected, it is possible to increase the regeneration time of the cleaning medium 4 and increase the regeneration efficiency of the cleaning medium 4.

  In the above description, the case where one circulation airflow generation means 6 is provided in the cleaning tank 5 has been described. However, as shown in FIG. 6a and 6b may be arranged symmetrically with the separation member 81 of the cleaning medium regenerating means 8 interposed therebetween. In FIG. 16, two circulation airflow generating means 6 a and 6 b are arranged outside the cleaning tank 5, a discharge port 65 is provided in the lower part of the cleaning tank 5, and a suction port 61 is connected to the cleaning tank 5 via the duct hose 25. Connect to the top of In this case, as shown in the block diagram of FIG. 17, the control device 12 includes the piping system of FIG. 18 together with the airflow circulation solenoid valve 14, the acceleration solenoid valve 15, the acceleration airflow switching control valve 16, and the regeneration solenoid valve 17. As shown in the figure, the operation of the circulating airflow switching control valve 26 for switching the compressed air supplied to the circulating airflow generating means 6a, 6b is also controlled. When the circulation air flow is generated in the cleaning tank 5 and the cleaning medium 4 is caused to fly, the controller 12 controls the circulation air flow switching control valve 26 to alternately generate the circulation air flow from the circulation air flow generation means 6a and 6b. As a result, the cleaning medium 5 in the cleaning tank 4 is easily accumulated and retained, so that the cleaning medium 4 in the cleaning tank 5 can be effectively used for cleaning. The frequency of collisions can be increased and cleaning can be performed efficiently. Further, by connecting the suction port 61 to the upper part of the cleaning tank 5 via the duct hose 25, an upward air flow can be generated in the cleaning tank 5, and the air suspending time of the cleaning medium 4 is increased and floated. The amount of the cleaning medium that is present can be increased, and the number of cleaning media 2 that collide with the object to be cleaned 2 can be increased by the compressed air ejected from the acceleration nozzles 71a and 71b to improve the cleaning performance. Even if the suction port 61 is connected to the cleaning tank 5 via the duct hose 25, the duct hose 25 is connected to the upper side of the cleaning tank 5 where the spatial density of the cleaning medium is small. This can prevent the duct hose 25 and the circulating airflow generation means 6a and 6b from being clogged.

  In the above description, the case where one cleaning medium regenerating means 8 is provided in the cleaning tank 5 has been described. However, a plurality of cleaning medium regenerating means 8 are provided at the bottom of the cleaning tank 5, for example, as shown in FIG. In addition to the cleaning medium regeneration means 8, cleaning medium regeneration means 8a to 8d may be provided above and below the array-like acceleration nozzles 71a and 71b of the cleaning medium acceleration means 7. In this case, as shown in the block diagram of FIG. 20, the control device 12 includes the airflow circulation solenoid valve 14, the acceleration solenoid valve 15, the acceleration airflow switching control valve 16, the regeneration electromagnetic valve 17, and the circulation airflow switching control valve 26. In addition, as shown in the piping system diagram of FIG. 21, the suction air flow switching control valve 27 for switching the suction to the cleaning medium regeneration means 8, the cleaning medium regeneration means 8 a and 8 b provided on the surface of the cleaning tank 5, and the back surface are provided. The operation of the suction airflow switching control valve 28 for switching the suction to the cleaning medium regeneration means 8c, 8d is also controlled. Then, as shown in FIG. 22, when the cleaning target 2 is cleaned by ejecting compressed air from the acceleration nozzle 71 a provided on the surface of the cleaning tank 5, the control device 12 regenerates the suction airflow switching control valve 27. In addition to being connected to the means 8, the suction air flow switching control valve 28 is connected to the cleaning medium regenerating means 8c, 8d provided on the back surface, and compressed air is ejected from the acceleration nozzle 71b provided on the back surface of the cleaning tank 5 to be cleaned. When cleaning 2, the suction air flow switching control valve 28 is connected to the cleaning medium regeneration means 8a, 8b provided on the surface. In this way, the dust 3 and the cleaning medium 4 soared by the compressed air ejected from the acceleration nozzle 71a are sucked to the cleaning medium regeneration means 8c and 8d. When the dust 3 and the cleaning medium 4 are sucked to the cleaning medium regeneration means 8c and 8d, the airflow from the acceleration nozzle 71a acts on the dust 3 and the cleaning medium 4 in addition to the suction flow of the cleaning medium regeneration means 8c and 8d. , The flow velocity in the mesh part of the separation member 81 of the cleaning medium regeneration means 8c, 8d can be dramatically increased, the ability to remove the dust 3 adhering to the cleaning medium 4 can be greatly increased, The medium 4 can be reliably reproduced. In addition, after stopping the ejection of compressed air from the acceleration nozzle 71a, the suction of the cleaning medium regeneration means 8c, 8d is stopped at a certain timing, and the cleaning medium 4 sucked by the cleaning medium regeneration means 8c, 8d is removed. The cleaning medium regeneration means 8c and 8d can be reliably separated from each other.

  Further, the accelerated nozzles 71a and 71b and the object to be cleaned are removed when the washed-up cleaning medium 4 is ejected from the acceleration nozzles 71a and 71b without the waste of falling without being accelerated by the acceleration nozzles 71a and 71b. A large amount of the cleaning medium 4 can be supplied between 2 and the cleaning efficiency can be improved. That is, when cleaning is performed by causing the flaky cleaning medium 4 to collide with the object 2 to be cleaned, the cleaning quality is substantially proportional to the frequency at which the cleaning medium 4 collides with the object 2 to be cleaned at a predetermined speed or higher. Therefore, if the supply amount of the cleaning medium 4 is increased, the cleaning quality can be improved, the cleaning time can be shortened, and the energy consumption can be reduced.

  Further, the cleaning using the cleaning medium 4 can be performed after the rough cleaning is performed using the acceleration nozzles 71a and 71b and the cleaning medium regeneration means 8a to 8d. The operation when rough cleaning is performed in this way will be described with reference to the time chart of FIG.

  The cleaning object 4 held by the work holding means 20 in a state where the flaky cleaning medium 4 is put into the cleaning tank 5 and stacked on the separation member 81 of the cleaning medium regeneration means 8 is cleaned by the work moving means 21. 5 to be cleaned and positioned at an initial position, and the cleaning object charging port 9 is closed with a lid 10 to seal the cleaning tank 5. In this state, when the starter 13 is operated and a cleaning start signal is input to the control device 12, the control device 12 opens the acceleration electromagnetic valve 15 and switches the acceleration airflow switching control valve 16 at a constant cycle to accelerate the acceleration nozzle. Accelerated nozzles 71a, 71a, 71b alternately ejecting compressed air, and switching the pressurized air flow switching control valve 16 in synchronization with switching of the compressed air ejection from the acceleration nozzles 71a, 71b. The suction of the cleaning medium regeneration means 8a and 8b and the cleaning medium regeneration means 8c and 8d provided on the surface facing the 71b is switched. That is, when compressed air is ejected from the acceleration nozzle 71 a provided on the surface of the cleaning tank 5, suction is performed by the cleaning medium regeneration means 8 c and 8 d provided on the back surface of the cleaning tank 5. By this operation, the compressed air ejected from the accelerating nozzle 71a hits the object 2 to be cleaned, and most of the dirt and dust 3 with weak adhesive force adhering to the object 2 to be cleaned is removed, and the object 2 to be cleaned is roughly cleaned. Thereafter, a circulation airflow is generated from the circulation airflow generation means 6, and the cleaning medium 4 deposited on the separation member 81 of the cleaning medium regeneration means 8 is transported and flying, and the cleaning medium 4 flying is used. Wash. When the cleaning with the flying cleaning medium 4 is completed, the compressed air is alternately ejected from the acceleration nozzles 71a and 71b again, and the pressurized air flow is switched in synchronization with the switching of the ejection of the compressed air from the acceleration nozzles 71a and 71b. The object to be cleaned 2 is switched by switching the suction of the cleaning medium regeneration means 8a and 8b and the cleaning medium regeneration means 8c and 8d provided on the surface facing the acceleration nozzles 71a and 71b from which the compressed air is ejected by switching the control valve 16. The cleaning medium 4 adhering to static electricity is removed, the cleaning operation is terminated, the lid 10 of the cleaning tank 5 is opened, and the cleaning object 2 held by the work holding means 18 is taken out from the cleaning tank 5 by the work moving means 19. Then, the new cleaning object 2 is replaced and the cleaning operation is started again. As described above, by performing the rough cleaning or the cleaning-off operation of the cleaning medium 4, the cleaning speed and the cleaning quality can be improved.

  In the above description, the cleaning medium regenerating means 8a to 8d are provided on the front and back surfaces of the cleaning tank 5, but as shown in FIG. The inclined surfaces 52a and 52b are provided, the cleaning medium regeneration means 8 is provided on each of the inclined surfaces 52a and 52b, the circulation airflow generating means 6a and 6b are provided at the lower ends of the inclined surfaces 52a and 52b, and the circulation airflow generating means is provided. The circulation airflow may be alternately flowed along the inclined surfaces 52a and 52b from 6a and 6b. Also in this case, it is preferable to provide an air flow rectifying unit 24 for guiding the cleaning medium 4 toward the cleaning medium accelerating unit 7 on the upper surface or the upper side surface of the cleaning tank 5 forming the circulation path of the circulating air flow.

  In this way, when the cleaning medium 4 is caused to fly and the cleaning medium 4 that is flying collides with the object 2 to be cleaned, the cleaning medium 4 is damaged by the collision with the object 2 to be cleaned, and the cleaning medium regenerating means. 8 is discharged to the dust collector 19 through the mesh portion of the separating member 81, and the cleaning medium 4 in the cleaning tank 5 decreases. When the cleaning medium 4 in the cleaning tank 5 is reduced and the amount of scattered material in the cleaning tank 5 is reduced, the cleaning effect is reduced. In some cases, a plurality of objects to be cleaned 2 are held by the work holding means 20 and are put into the cleaning tank 5 for cleaning. Therefore, as shown in FIG. 25, when the cleaning medium flying amount measuring means 29 is provided in the cleaning tank 5, and the cleaning target object detecting means 30a and 30b are provided at regular intervals above and below the acceleration nozzles 71a and 71b. good. For example, as shown in FIG. 26, the cleaning medium flying amount measuring means 29 uses a photoelectric sensor 291 arranged so that the optical axis is orthogonal to the circulation direction of the cleaning medium 4, and the cleaning object detection means 30a, 30b is composed of, for example, a photoelectric sensor having a light projecting / receiving unit 301 and a reflecting plate 302. The light projecting / receiving unit 301 is attached to the front or back surface of the cleaning tank 5 via a transparent window so that the cleaning medium 4 does not interfere with the reflecting plate. Reference numeral 302 denotes an inner wall surface opposite to the light projecting / receiving unit 301, and is arranged so that the optical axis crosses the cleaning tank 5. The cleaning medium flying amount measuring means 29 and the cleaning object detection means 30a and 30b are connected to the control device 12 as shown in the block diagram of FIG. The control device 12 measures the number of times the optical axis of the photoelectric sensor 291 that is the medium flying amount measuring unit 29 is blocked, and quantifies the flying amount of the cleaning medium 4 in a certain time, and determines which of the cleaning object detecting units 30a and 30b. On the other hand, the cleaning operation is controlled when the cleaning object 2 is detected.

  The cleaning operation when the cleaning medium flying amount measuring means 29 and the cleaning object detection means 30a and 30b are provided in the cleaning tank 5 will be described with reference to the time chart of FIG.

  As shown in FIG. 25, after a plurality of objects to be cleaned 2 are held by the work holding means 18 and put into the cleaning tank 5, when a cleaning start signal is input, a circulation airflow is generated from the circulation airflow generation means 6. The cleaning medium 4 deposited on the cleaning medium regeneration means 8 is transported and scattered in the cleaning tank 5. The amount of the scattered cleaning medium 4 is detected by the photoelectric sensor 291 that is the medium flying amount measuring means 29 and input to the control device 12. The control device 12 compares the input amount of scattering of the cleaning medium 4 for a certain time with a preset threshold value, and starts the cleaning operation when the amount of scattering of the cleaning medium 4 exceeds the threshold value. If the amount of scattering of the cleaning medium 4 is less than or equal to the threshold value, a cleaning medium shortage alarm is generated and the cleaning operation is stopped. Thereafter, when the cleaning medium 4 is replenished by a certain amount or shortage from a hopper or the like and the cleaning start signal is input again and the cleaning medium 4 is scattered, the cleaning operation is started when the scattering amount of the cleaning medium 4 exceeds the threshold value. .

  Thus, since the amount of scattering of the cleaning medium 4 is detected and the cleaning medium 4 exceeding a certain amount is used for cleaning, the cleaning can be performed with good cleaning quality. Further, the amount of the cleaning medium 4 that collides with the cleaning object 2 is proportional to the amount of scattering of the cleaning medium 4. Therefore, the control device 12 can also evaluate the cleaning quality from the amount of scattering of the cleaning medium 2 every fixed time. Furthermore, by recording the change in the amount of scattering of the cleaning medium 2, the cleaning quality can be accurately quantified in the cleaning quality.

  When the cleaning operation is started, the workpiece moving means 19 moves the plurality of objects to be cleaned 2 from the workpiece holding means 18 from the top to the bottom, and the first object to be cleaned 2 is arranged on the acceleration nozzles 71a and 71b. When the cleaning object detection signal is input to the control device 12 from the cleaning object detection means 29a when the position that blocks the optical axis of the object detection means 29a is reached, the control device 12 detects the moving speed of the cleaning object 2 and the cleaning object detection. The jet of compressed air from one of the acceleration nozzles 71a and the cleaning medium regeneration means are added at a timing when a time delay for the cleaning object 2 to reach the position of the acceleration nozzles 71a, 71b is added from the distance between the means 30a and the acceleration nozzles 71a, 71b. 8 is determined, the circulation airflow is stopped at that timing, compressed air is ejected from the acceleration nozzle 71a, and the suction of the cleaning medium regeneration means 8 is determined. The start to clean the first object to be cleaned. When the cleaning object detection signal is not input from the cleaning object detection means 30a in this state, the control device 12 performs cleaning based on the moving speed of the cleaning object 2 and the distance between the cleaning object detection means 30a and the acceleration nozzles 71a and 71b. Compressed air ejection from the accelerating nozzle 71a and suction of the cleaning medium regeneration means 8 are stopped at a timing with a time delay for the object 2 to reach the positions of the accelerating nozzles 71a and 71b, and the circulation airflow generating means 6 performs circulation. Generate airflow. This control is repeated each time a cleaning object detection signal is input from the cleaning object detection means 30a, and the plurality of cleaning objects 2 are sequentially cleaned. When the cleaning object 2 reaches the turn-back position and starts to rise, the control device 12 performs the above control every time a cleaning object detection signal is input from the cleaning object detection means 30b disposed under the acceleration nozzles 71a and 71b. The compressed air is repeatedly ejected from the acceleration nozzle 71b to clean the entire surface of the plurality of objects to be cleaned 2.

  Thus, since compressed air is injected from the acceleration nozzles 71a and 71b that consume a large amount of compressed air according to the position of the cleaning object 2, the amount of compressed air used can be reduced to save energy.

  In the above description, the photoelectric sensor 291 is used as the medium flying amount measuring means 29. However, the method of integrating the impact force of the cleaning medium 4 against the cleaning target object 2 by the force sensor, and at the end of the process using the weight sensor. A method for measuring the amount of accumulation at the bottom of the cleaning tank 5 using weight measurement, a distance sensor, or the like may be used. When integrating the impact force of the cleaning medium 4, the cleaning quality can be evaluated from the integrated number of impacts.

  Further, as shown in FIG. 29, a workpiece posture changing means 31 is provided between the workpiece moving means 19 and the workpiece holding means 18 so as to rotate the workpiece holding means 18 around the longitudinal axis by a motor, an air cylinder or the like. A plurality of, for example, three sets of a plurality of array-like acceleration nozzles 71 are provided as cleaning medium accelerating means 7 on one side surface that forms the circulation airflow in the tank 5, and the injection directions of each acceleration nozzle 71 are, for example, the horizontal direction and the vertical direction May be arranged differently. Then, the cleaning object 2 held by the work holding means 18 and put into the cleaning tank 5 is moved up and down while being rotated by the work posture changing means 31 to alternately inject compressed air from a plurality of sets of acceleration nozzles 71. The object 2 to be cleaned is cleaned by switching. Thus, the entire surface of the cleaning object 2 having a complicated shape can be reliably cleaned by moving the cleaning object 2 in the vertical direction while rotating it and injecting compressed air from different directions.

It is a block diagram of the dry-type cleaning apparatus of this invention. It is a schematic diagram which shows the state which removes the dust etc. which adhered to the washing | cleaning target object with the flaky washing | cleaning medium. It is sectional drawing which shows the shape of a washing tank. It is sectional drawing which shows the structure of the airflow generation means for circulation. It is a block diagram of a washing | cleaning medium reproduction | regeneration means. It is a block diagram which shows the structure of the drive control part of a dry cleaning apparatus. It is a piping system diagram of the drive part of a dry-type cleaning apparatus. It is a time chart which shows cleaning operation | movement of a dry-type cleaning apparatus. It is a schematic diagram which shows the state which conveys the cleaning medium laminated | stacked on the cleaning medium reproduction | regeneration means by the airflow for circulation. It is a schematic diagram which shows the comparative example which conveys the laminated | stacked washing | cleaning medium with the airflow for circulation. It is process drawing which shows the washing | cleaning operation | movement of the washing | cleaning target object. It is a schematic diagram which shows the state which makes a washing | cleaning medium collide with a washing | cleaning target object with the airflow which ejects from the acceleration nozzle of a washing | cleaning medium acceleration means. It is a block diagram of the inner wall face of the washing tank which forms the circulation path of the airflow for circulation. It is sectional drawing of the washing tank which provided the airflow rectification | straightening means in the circulation path | route of the airflow for circulation. It is sectional drawing of the washing tank which provided the inclined surface in the bottom part. It is a block diagram of the 2nd dry cleaning apparatus. It is a block diagram which shows the structure of the drive control part of a 2nd dry cleaning apparatus. It is a block diagram which shows the structure of the drive part of a 2nd dry cleaning apparatus. It is a block diagram of the 3rd dry-type washing | cleaning apparatus. It is a block diagram which shows the structure of the drive control part of a 3rd dry cleaning apparatus. It is a block diagram which shows the structure of the drive part of a 3rd dry cleaning apparatus. It is a schematic diagram which shows the state which makes a washing | cleaning medium collide with a washing | cleaning target object with a 3rd dry cleaning apparatus. It is a time chart of cleaning operation including rough cleaning operation and wiping off operation. It is a block diagram of the 4th dry cleaning apparatus. It is a block diagram which shows the outline | summary of the 5th dry-type washing | cleaning apparatus which has a washing | cleaning medium flying amount measurement means and a washing | cleaning target object detection means. It is a block diagram of the photoelectric sensor which comprises a cleaning medium flying amount measurement means. It is a block diagram which shows the structure of the drive control part of the dry-type washing | cleaning apparatus which has a washing | cleaning medium flying amount measurement means and a washing | cleaning target object detection means. It is a time chart which shows operation | movement of a 5th dry-type washing | cleaning apparatus. It is a block diagram of the 6th dry cleaning apparatus.

Explanation of symbols

1; dry cleaning device, 2; object to be cleaned, 3; various dusts such as toner, 4; cleaning medium,
5; Cleaning tank, 6; Circulating airflow generation means, 7; Cleaning medium acceleration means, 71; Acceleration nozzle,
8; Cleaning medium regeneration means, 81; Separating member, 82; Hood, 11; Suction tube,
12; Control device, 13; Start-up means, 14; Solenoid valve for airflow circulation, 15; Solenoid valve for acceleration,
16; Acceleration air flow switching control valve; 17; Regenerative solenoid valve; 18; Pressurized gas supply device;
19; dust collector, 20; work holding means, 21; work moving means, 23; groove,
24; Airflow rectification means; 25; Duct hose; 26; Circulating airflow switching control valve;
27, 28; suction airflow switching control valve, 29; cleaning medium flying amount measuring means,
30; Cleaning object detection means; 31; Work posture change means.

Claims (8)

A cleaning device that removes deposits by flying a cleaning medium and colliding with an object to be cleaned,
A washing tank;
A circulating airflow generating means for generating a circulating airflow along the inner wall surface of the cleaning tank and flying the cleaning medium;
Cleaning medium accelerating means for causing the flying cleaning medium to collide with the object to be cleaned by airflow;
Cleaning medium regeneration means for discharging the deposits separated from the object to be cleaned and the cleaning medium deteriorated by the cleaning;
The cleaning medium acceleration means has a plurality of acceleration nozzles,
The plurality of accelerating nozzles jet airflow alternately or simultaneously. The cleaning apparatus according to claim 1, wherein the cleaning medium acceleration unit simultaneously jets an air flow by adjusting an injection angle of the plurality of acceleration nozzles. The cleaning apparatus according to claim 1, wherein the cleaning tank is formed of a substantially rectangular parallelepiped hollow body. The cleaning medium has an area of 1 to 1000 mm. ² The cleaning apparatus according to claim 1, wherein the cleaning apparatus is a flaky object having a thickness of 1 to 500 μm. In the cleaning medium regeneration means, a closed space is formed by a separation member and a hood disposed on the bottom inner wall of the cleaning tank, and the airflow from the circulation airflow generation means acts on the cleaning medium stacked on the separation member. The cleaning apparatus according to claim 1, wherein the cleaning apparatus lifts the deposited cleaning medium from the upper layer portion while gradually breaking the deposition, transports it along the cleaning tank, and flies it. Detecting means for detecting the amount of the cleaning medium flying;
The cleaning apparatus according to claim 1, further comprising a control unit that controls a cleaning operation according to the amount of the cleaning medium detected by the detection unit. Holding means for holding the object to be cleaned;
Moving means for moving the object to be cleaned held by the holding means;
Detecting means for detecting the position of the cleaning object moved by the moving means;
The cleaning apparatus according to claim 1, further comprising a control unit that controls a cleaning operation in accordance with a position of the cleaning target detected by the detection unit. A cleaning method for removing deposits by flying a cleaning medium and colliding with an object to be cleaned,
A circulating airflow generating step for generating a circulating airflow along the inner wall surface of the cleaning tank and flying the cleaning medium;
A cleaning medium acceleration step of causing the flying cleaning medium to collide with the object to be cleaned by an air flow;
A cleaning medium regeneration step for discharging deposits separated from the object to be cleaned and cleaning medium deteriorated by cleaning;
In the cleaning medium accelerating step, an air flow is jetted alternately or simultaneously by a plurality of acceleration nozzles.

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