JP2008032680A - Inspection method of rolling device component, and inspection device for rolling device component - Google Patents

Inspection method of rolling device component, and inspection device for rolling device component Download PDF

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JP2008032680A
JP2008032680A JP2006348910A JP2006348910A JP2008032680A JP 2008032680 A JP2008032680 A JP 2008032680A JP 2006348910 A JP2006348910 A JP 2006348910A JP 2006348910 A JP2006348910 A JP 2006348910A JP 2008032680 A JP2008032680 A JP 2008032680A
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rolling device
electromagnetic induction
sensor
magnetic field
rolling
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Shinji Hirakata
伸治 平方
Sonji Ryu
尊慈 劉
Kenji Imanishi
賢治 今西
Noboru Yasuda
昇 安田
Kyosuke Tokiwa
恭輔 常盤
Takanori Miyasaka
孝範 宮坂
Kinji Yugawa
謹次 湯川
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NSK Ltd
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NSK Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture

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  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Geophysics And Detection Of Objects (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method of a rolling device component capable of accurately inspecting whether a defect exists inside the rolling device component such as a raceway ring. <P>SOLUTION: The existence of a defect is inspected using the inspection device comprising an exciting coil 2a for applying an alternating current magnetic field to the raceway ring in inspecting whether a defect exists in the surface layer section of the raceway surface of the raceway ring, an induction coil 2b for detecting variation of the magnetic flux density of the alternating current magnetic field applied from the exciting coil 2a to the raceway ring, an inductance variation detection circuit 3 for detecting the magnitude of the induced electromotive force occurring in the induction coil 2b, and a comparison determining circuit 4 for determining the existence of the defect by comparing, with a threshold, the magnitude of the induced electromotive force detected by the inductance variation detection circuit 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、転がり軸受、ボールねじ、直動案内装置等の転動装置の転動装置部品を検査する技術に関する。   The present invention relates to a technique for inspecting rolling device parts of a rolling device such as a rolling bearing, a ball screw, and a linear motion guide device.

転がり軸受の軌道輪は、一般に、転動体が負荷を受けながら転動する軌道面を有している。このため、軌道輪の軌道面表層部にクラック、非金属介在物等の欠陥が存在すると、軌道輪の転がり疲れ寿命が大幅に低下したり、あるいは軌道輪の軌道面に早期剥離が発生したりすることがあるため、軌道輪の軌道面表層部に欠陥が存在しないことを確認する必要がある。   A bearing ring of a rolling bearing generally has a raceway surface on which rolling elements roll while receiving a load. For this reason, if there are defects such as cracks and non-metallic inclusions in the raceway surface layer of the raceway, the rolling fatigue life of the raceway will be greatly reduced, or early peeling will occur on the raceway surface of the raceway. Therefore, it is necessary to confirm that there are no defects in the surface of the raceway surface of the raceway.

軌道輪の軌道面表層部に欠陥が存在するか否かを検査する方法としては、軌道輪の軌道面表層部を超音波探傷して欠陥の有無を検査する方法が知られている（例えば、特許文献１及び特許文献２参照）。
特開２００６−１１３０４４号公報 特開平１１−３３７５３０号公報 As a method for inspecting whether or not a defect exists in the raceway surface layer portion of the raceway, a method for inspecting the presence or absence of a defect by ultrasonic flaw detection on the raceway surface layer portion of the raceway is known (for example, (See Patent Document 1 and Patent Document 2).
JP 2006-113044 A JP-A-11-337530

しかしながら、上述した検査方法は、水や油などの超音波伝達媒体を軌道輪の軌道面に塗布する必要がある。このため、効率やクリーンの観点から好ましくない上、軸受を組立てた状態で欠陥の有無を検査することができないという問題があった。また、上述した検査方法は探傷範囲が狭いため、厚さの厚い部品に対しては超音波探傷を行うことができないという問題もある。   However, the inspection method described above needs to apply an ultrasonic transmission medium such as water or oil to the raceway surface of the raceway. For this reason, there is a problem that it is not preferable from the viewpoint of efficiency and cleanness, and it is impossible to inspect for defects in a state where the bearing is assembled. Further, since the inspection method described above has a narrow flaw detection range, there is also a problem that ultrasonic flaw detection cannot be performed on a thick part.

本発明は上述した点に着目してなされたものであり、その目的は、軌道輪等の転動装置部品の内部に欠陥が存在するか否かを精度よく検査することのできる転動装置部品の検査方法及び転動装置部品用検査装置を提供することにある。   The present invention has been made paying attention to the above-mentioned points, and the purpose thereof is a rolling device part capable of accurately inspecting whether or not a defect exists in the rolling device part such as a race ring. An inspection method and an inspection device for rolling device parts are provided.

上記目的を達成するために、請求項１記載の発明に係る転動装置部品の検査方法は、転動装置部品の欠陥または非金属介在物または熱処理または異材混入の有無あるいは表面硬さを検査する方法において、前記転動装置部品が旋削加工後または研削加工後または超仕上げ加工後の転動装置部品であって、前記転動装置部品に電磁誘導センサの励磁コイルから交流磁界を付与し、前記電磁誘導センサの誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定することにより、前記転動装置部品を検査して品質保証を行うことを特徴とする。   In order to achieve the above object, a rolling device part inspection method according to claim 1 inspects a rolling device part for defects, non-metallic inclusions, heat treatment, presence of foreign materials, or surface hardness. In the method, the rolling device part is a rolling device part after turning, grinding, or after superfinishing, and an alternating magnetic field is applied to the rolling device part from an excitation coil of an electromagnetic induction sensor, By measuring the amount of change of at least one of the amplitude and phase of the induced electromotive force generated in the induction coil of the electromagnetic induction sensor, the rolling device parts are inspected to assure quality.

請求項２記載の発明に係る転動装置部品の検査方法は、転動装置部品の疲労進行度を検査する方法において、前記転動装置部品に電磁誘導センサの励磁コイルから交流磁界を付与し、前記電磁誘導センサの誘導コイルに電磁誘導により発生した起電力の振幅と位相のうち少なくとも一方の変化量を測定することにより、前記疲労進行度を測定することを特徴とする。   A method for inspecting a rolling device part according to the invention of claim 2 is a method of inspecting the degree of fatigue progression of the rolling device part, wherein an alternating magnetic field is applied to the rolling device part from an excitation coil of an electromagnetic induction sensor, The degree of progress of fatigue is measured by measuring a change amount of at least one of an amplitude and a phase of an electromotive force generated by electromagnetic induction in an induction coil of the electromagnetic induction sensor.

請求項３記載の発明に係る転動装置部品の検査方法は、請求項１または２記載の転動装置部品の検査方法において、前記励磁コイルと前記誘導コイルは一つの筐体内に収容され、前記交流磁界の磁力線が転動装置部品に対して９０度となるように前記転動装置部品の表面と前記電磁誘導センサの先端とが対向していることを特徴とする。
請求項４記載の発明に係る転動装置部品用検査装置は、請求項１〜３のいずれか一項記載の検査方法に用いられる検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、該電磁センサの出力を処理するデータ処理部と、該データ処理部のデータ処理値を閾値と比較して判定する判定部とを具備したことを特徴とする。 According to a third aspect of the present invention, there is provided the rolling device component inspection method according to the first or second aspect, wherein the exciting coil and the induction coil are accommodated in a single casing, The surface of the rolling device component and the tip of the electromagnetic induction sensor face each other so that the magnetic field lines of the alternating magnetic field are 90 degrees with respect to the rolling device component.
A rolling device part inspection device according to a fourth aspect of the invention is an inspection device used in the inspection method according to any one of claims 1 to 3, and applies an alternating magnetic field to the rolling device component. An electromagnetic induction sensor having an excitation coil and an induction coil for detecting a change in magnetic flux density of an alternating magnetic field applied from the excitation coil to a rolling device component; and a data processing unit for processing the output of the electromagnetic sensor; And a determination unit that determines the data processing value of the data processing unit by comparing with a threshold value.

請求項５記載の発明に係る転動装置部品用検査装置は、請求項４記載の転動装置部品用検査装置において、前記電磁センサと転動装置部品のうち少なくとも一方が回転、直動、揺動可能であることを特徴とする。
請求項６記載の発明に係る転動装置部品用検査装置は、請求項４または５記載の転動装置部品用検査装置において、複数の電磁誘導センサを有し、１つの被測定物に対し複数の電磁誘導センサで検査を行なうことを特徴とする。 According to a fifth aspect of the present invention, there is provided the rolling device component inspection apparatus according to the fourth aspect, wherein at least one of the electromagnetic sensor and the rolling device component is rotated, linearly moved, or shaken. It is possible to move.
A rolling device part inspection device according to a sixth aspect of the present invention is the rolling device component inspection device according to the fourth or fifth aspect, wherein the rolling device component inspection device has a plurality of electromagnetic induction sensors, Inspection is performed with an electromagnetic induction sensor.

請求項７記載の発明に係る転動装置部品用検査装置は、請求項４〜６のいずれか一項記載の転動装置部品用検査装置において、前記判定部の判定結果を表示する表示手段と前記データ処理部のデータ処理値を記憶する記憶手段のうち少なくとも一方を具備したことを特徴とする。   A rolling device parts inspection device according to a seventh aspect of the invention is the rolling device parts inspection device according to any one of claims 4 to 6, wherein the rolling device parts inspection device displays a determination result of the determination section. At least one of storage means for storing a data processing value of the data processing unit is provided.

本発明によれば、転動装置部品の内部を探傷するプローブとして、転動装置部品に交流磁界を付与する励磁コイルと転動装置部品に付与された交流磁界の磁束密度の変化を検出する誘導コイルとを有する電磁誘導センサを用いたことで、軌道輪等の転動装置部品の内部に欠陥が存在するか否かを精度よく検査することができる。   According to the present invention, as a probe for flaw detection inside a rolling device component, an excitation coil that applies an alternating magnetic field to the rolling device component and an induction that detects a change in magnetic flux density of the alternating magnetic field applied to the rolling device component By using an electromagnetic induction sensor having a coil, it is possible to accurately inspect whether there is a defect inside a rolling device part such as a race.

以下、本発明の実施の形態を図面に基づいて説明する。
図１は、本発明の第１の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。同図に示される転動装置部品用検査装置は被測定物（軌道輪等の転動装置部品）１に交流磁界を付与する励磁コイル２ａと、この励磁コイル２ａから被測定物１に付与された交流磁界の磁束密度の変化を検出するための誘導コイル２ｂとを備えており、これらの両コイル２ａ，２ｂは電磁誘導センサ２を構成している。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram showing a schematic configuration of a rolling device part inspection device according to a first embodiment of the present invention. The rolling device component inspection device shown in FIG. 1 is applied to an object to be measured (rolling device component such as a race ring) 1 and an excitation coil 2a for applying an alternating magnetic field to the object to be measured 1 from the excitation coil 2a. And an induction coil 2b for detecting a change in the magnetic flux density of the alternating magnetic field. These coils 2a and 2b constitute an electromagnetic induction sensor 2.

また、第１の実施形態に係る転動装置部品用検査装置は誘導コイル２ｂのインダクタンス変化（誘導コイル２ｂに発生した誘導起電力の振幅変化量または位相変化量）を検出するインダクタンス変化検出回路（データ処理部）３と、このインダクタンス変化検出回路３で検出された誘導コイル２ｂのインダクタンス変化を予め設定された閾値と比較して欠陥の有無を判定する判定部としての比較判定回路４を備えており、この比較判定回路４から出力された信号は、比較判定回路４の判定結果を表示する表示装置５に供給されるとともに、比較判定回路４の判定結果を記録用紙等の記録媒体に記録する記録装置６に供給されるようになっている。   The rolling device component inspection apparatus according to the first embodiment also includes an inductance change detection circuit that detects an inductance change of the induction coil 2b (amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 2b). A data processing unit) 3 and a comparison determination circuit 4 as a determination unit for comparing the inductance change of the induction coil 2b detected by the inductance change detection circuit 3 with a preset threshold to determine the presence or absence of a defect. The signal output from the comparison determination circuit 4 is supplied to the display device 5 that displays the determination result of the comparison determination circuit 4 and records the determination result of the comparison determination circuit 4 on a recording medium such as a recording sheet. The recording device 6 is supplied.

さらに、第１の実施形態に係る転動装置部品用検査装置は記憶装置７を備えており、この記憶装置７では、比較判定回路４の判定結果とともにインダクタンス変化検出回路３で検出された誘導コイル２ｂのインダクタンス変化をも記憶している。なお、図１において符号８は電磁誘導センサ２の励磁コイル２ａに交流電流を供給する交流電源を示している。   Furthermore, the rolling device component inspection apparatus according to the first embodiment includes a storage device 7. In this storage device 7, the induction coil detected by the inductance change detection circuit 3 together with the determination result of the comparison determination circuit 4. 2b inductance change is also stored. In FIG. 1, reference numeral 8 indicates an AC power source that supplies an AC current to the exciting coil 2 a of the electromagnetic induction sensor 2.

図１に示した検査装置を用いて、例えば軌道輪の軌道面表層部にクラック等の欠陥が存在するか否かを検査する場合は、先ず、電磁誘導センサ２を軌道輪の軌道面に近づける。そして、この状態で電磁誘導センサ２の励磁コイル２ａに交流電流を供給し、励磁コイル２ａから軌道輪に交流磁界を付与すると、電磁誘導センサ２の誘導コイル２ｂに誘導起電力が発生する。このとき、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力は軌道輪に付与された交流磁界の磁束密度に応じて変化し、交流磁界の磁束密度は軌道輪の軌道面表層部に存在する欠陥の大きさに応じて変化する。   When inspecting whether there is a defect such as a crack in the raceway surface layer of the raceway, for example, the electromagnetic induction sensor 2 is first brought close to the raceway surface of the raceway using the inspection apparatus shown in FIG. . In this state, when an alternating current is supplied to the exciting coil 2a of the electromagnetic induction sensor 2 and an alternating magnetic field is applied from the exciting coil 2a to the raceway, an induced electromotive force is generated in the induction coil 2b of the electromagnetic induction sensor 2. At this time, the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2 changes according to the magnetic flux density of the alternating magnetic field applied to the raceway ring, and the magnetic flux density of the alternating magnetic field is present on the raceway surface layer portion of the raceway ring. It changes according to the size of the defect to be performed.

したがって、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力の振幅変化量または位相変化量をインダクタンス変化検出回路３で検出し、インダクタンス変化検出回路３で検出された誘導起電力の振幅変化量または位相変化量を予め設定された閾値と比較することで、クラック等の欠陥が軌道輪の軌道面表層部に存在するか否かを精度よく検査することができる。   Therefore, the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2 is detected by the inductance change detection circuit 3, and the amplitude change amount of the induced electromotive force detected by the inductance change detection circuit 3 is detected. Alternatively, by comparing the phase change amount with a preset threshold value, it is possible to accurately inspect whether or not a defect such as a crack exists in the raceway surface layer portion of the raceway.

なお、上述した第１の実施形態では、比較判定回路４の判定結果を表示する表示装置５と、比較判定回路４の判定結果を記録用紙等の記録媒体に記録する記録装置６と、インダクタンス変化検出回路３の出力を記憶する記憶装置７とを備えたものを例示したが、本発明はこれに限定されるものではない。たとえば、表示装置５、記録装置６及び記憶装置７のうちの少なくとも１つを備えた構成のものでもよい。   In the first embodiment described above, the display device 5 that displays the determination result of the comparison determination circuit 4, the recording device 6 that records the determination result of the comparison determination circuit 4 on a recording medium such as recording paper, and the inductance change. Although the example provided with the memory | storage device 7 which memorize | stores the output of the detection circuit 3 was illustrated, this invention is not limited to this. For example, a configuration including at least one of the display device 5, the recording device 6, and the storage device 7 may be used.

また、第１の実施形態ではクラック等の欠陥が転動装置部品の内部に存在するか否かを検査したが、非金属介在物の有無、熱処理の有無、異材混入の有無または表面硬さ等を検査してもよい。
次に、図２〜図４を参照して本発明の第２の実施形態について説明する。
図２は本発明の第２の実施形態に係る転動装置部品用検査装置の概略構成を示す図であり、同図に示される転動装置部品用検査装置は深溝玉軸受の内輪９が載置されるターンテーブル１０と、このターンテーブル１０の近傍に設けられた電磁誘導センサ２と、この電磁誘導センサ２をターンテーブル１０の上面に対して水平に支持する支持軸１１と、この支持軸１１を介して電磁誘導センサ２をＺ軸回り（図中矢印θＺ方向）に揺動駆動可能とするセンサ揺動機構１２と、このセンサ揺動機構１２を介して電磁誘導センサ２を図中Ｚ軸方向に昇降駆動可能とするセンサ昇降機構１３と、電磁誘導センサ２を図中Ｘ軸方向及びＹ軸方向に動かして電磁誘導センサ２を位置決めするセンサ位置決め機構１４とを備えている。 Further, in the first embodiment, whether or not a defect such as a crack exists in the rolling device part is inspected, but the presence or absence of non-metallic inclusions, the presence or absence of heat treatment, the presence or absence of foreign materials, the surface hardness, etc. May be inspected.
Next, a second embodiment of the present invention will be described with reference to FIGS.
FIG. 2 is a diagram showing a schematic configuration of a rolling device part inspection device according to a second embodiment of the present invention. In the rolling device component inspection device shown in FIG. 2, an inner ring 9 of a deep groove ball bearing is mounted. Turntable 10 placed, electromagnetic induction sensor 2 provided in the vicinity of the turntable 10, a support shaft 11 that supports the electromagnetic induction sensor 2 horizontally with respect to the upper surface of the turntable 10, and the support shaft 11 Z-axis electromagnetic induction sensor 2 through the sensor swing mechanism 12, swing drive possible (in the arrow theta Z direction in the drawing), figure electromagnetic induction sensor 2 through the sensor oscillating mechanism 12 A sensor elevating mechanism 13 that can be driven up and down in the Z-axis direction and a sensor positioning mechanism 14 that positions the electromagnetic induction sensor 2 by moving the electromagnetic induction sensor 2 in the X-axis direction and the Y-axis direction in the figure are provided.

電磁誘導センサ２の概略構成を図３に示す。同図に示されるように、電磁誘導センサ２は、内輪等の転動装置部品に交流磁界を付与する励磁コイル２ａと、この励磁コイル２ａから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイル２ｂとからなり、励磁コイル２ａ及び誘導コイル２ｂは１つの筐体内に収容されている。また、誘導コイル２ｂは励磁コイル２ａに一部を接触させて励磁コイル２ａと同軸に巻回されている。さらに、電磁誘導センサ２の先端面２ａは内輪９の外径面に対して凸面となっており、内輪９の外径面に形成された転動体転動溝９ａの曲率半径をＲ、転動体転動溝９ａの底面と電磁誘導センサ２の先端面２ａとの間のギャップをΔとすると、電磁誘導センサ２の先端面２ａはＲ−Δの曲率半径で曲面状に形成されている。   A schematic configuration of the electromagnetic induction sensor 2 is shown in FIG. As shown in the figure, the electromagnetic induction sensor 2 includes an exciting coil 2a for applying an alternating magnetic field to rolling device parts such as an inner ring, and a magnetic flux density of an alternating magnetic field applied from the exciting coil 2a to the rolling device parts. The excitation coil 2a and the induction coil 2b are accommodated in one housing. The induction coil 2b is wound coaxially with the excitation coil 2a with a part in contact with the excitation coil 2a. Further, the front end surface 2a of the electromagnetic induction sensor 2 is convex with respect to the outer diameter surface of the inner ring 9, and the radius of curvature of the rolling element rolling groove 9a formed on the outer diameter surface of the inner ring 9 is R. When the gap between the bottom surface of the rolling groove 9a and the front end surface 2a of the electromagnetic induction sensor 2 is Δ, the front end surface 2a of the electromagnetic induction sensor 2 is formed into a curved surface with a radius of curvature of R−Δ.

このように構成される転動装置部品用検査装置を用いて内輪９の外径面に形成された転動体転動溝９ａの表層部にクラック等の欠陥があるか否かを検査する場合は、先ず、転動体転動溝９ａの溝面に電磁誘導センサ２の先端を近づける。そして、この状態で電磁誘導センサ２の励磁コイル２ａに交流電流を供給し、図４に示すような交流磁界１５を内輪９に付与すると、電磁誘導センサ２の誘導コイル２ｂに誘導起電力が発生する。このとき、誘導コイル２ｂに発生した誘導起電力の大きさは内輪９に付与された交流磁界１５の磁束密度に応じて変化し、交流磁界１５の磁束密度は転動体転動溝９ａの表層部に存在する欠陥の大きさに応じて変化する。   When inspecting whether or not there is a defect such as a crack in the surface layer portion of the rolling element rolling groove 9a formed on the outer diameter surface of the inner ring 9 by using the rolling device component inspection device configured as described above. First, the tip of the electromagnetic induction sensor 2 is brought close to the groove surface of the rolling element rolling groove 9a. In this state, when an alternating current is supplied to the exciting coil 2a of the electromagnetic induction sensor 2 and an alternating magnetic field 15 as shown in FIG. 4 is applied to the inner ring 9, an induced electromotive force is generated in the induction coil 2b of the electromagnetic induction sensor 2. To do. At this time, the magnitude of the induced electromotive force generated in the induction coil 2b changes according to the magnetic flux density of the AC magnetic field 15 applied to the inner ring 9, and the magnetic flux density of the AC magnetic field 15 is the surface layer portion of the rolling element rolling groove 9a. It varies depending on the size of the defect present in the.

したがって、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力の大きさを予め設定された閾値と比較することで、クラック等の欠陥が転動体転動溝９ａの表層部に存在するか否かを精度よく検査することができる。
次に、本発明の第３の実施形態に係る転動装置部品用検査装置の概略構成を図５に示す。同図に示される転動装置部品用検査装置は深溝玉軸受の外輪１６が載置されるターンテーブル１０と、このターンテーブル１０の上方に設けられた電磁誘導センサ２と、この電磁誘導センサ２をターンテーブル１０の上面に対して水平に支持する支持軸１１と、この支持軸１１を介して電磁誘導センサ２をＺ軸回り（図中矢印θＺ方向）に揺動駆動可能とするセンサ揺動機構１２と、このセンサ揺動機構１２を介して電磁誘導センサ２を図中Ｚ軸方向に昇降駆動可能とするセンサ昇降機構１３と、電磁誘導センサ２を図中Ｘ軸方向及びＹ軸方向に動かして電磁誘導センサ２を位置決めするセンサ位置決め機構１４と、ターンテーブル１０を図中Ｘ軸方向に動かして検査対象物を位置決めする位置決め機構１７とを備えており、電磁誘導センサ２は、図３に示すように、外輪等の転動装置部品に交流磁界を付与する励磁コイル２ａと、この励磁コイル２ａから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイル２ｂとから構成されている。 Therefore, by comparing the magnitude of the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2 with a preset threshold value, whether or not a defect such as a crack exists in the surface layer portion of the rolling element rolling groove 9a. Can be accurately inspected.
Next, FIG. 5 shows a schematic configuration of a rolling device part inspection device according to a third embodiment of the present invention. The rolling device component inspection apparatus shown in FIG. 1 includes a turntable 10 on which an outer ring 16 of a deep groove ball bearing is placed, an electromagnetic induction sensor 2 provided above the turntable 10, and the electromagnetic induction sensor 2. the supporting shaft 11 for supporting horizontally relative to the upper surface of the turntable 10, the sensor swing to swing drivable in an electromagnetic induction sensor 2 via the supporting shaft 11 Z-axis (in the arrow theta Z-direction) A moving mechanism 12, a sensor elevating mechanism 13 that enables the electromagnetic induction sensor 2 to be driven up and down in the Z-axis direction in the figure via the sensor swing mechanism 12, and the electromagnetic induction sensor 2 in the X-axis direction and the Y-axis direction in the figure And a positioning mechanism 17 for positioning the inspection object by moving the turntable 10 in the X-axis direction in the figure. As shown in FIG. 3, an excitation coil 2a for applying an alternating magnetic field to a rolling device part such as an outer ring, and a change in the magnetic flux density of the alternating magnetic field applied to the rolling device part from the excitation coil 2a are detected. And an induction coil 2b.

なお、電磁誘導センサ２の先端面２ａは外輪１６の内径面に対して凸面となっている。また、外輪１６の内径面に形成された転動体転動溝１６ａの曲率半径をＲ、転動体転動溝１６ａの底面と電磁誘導センサ２の先端面２ａとの間のギャップをΔとすると、電磁誘導センサ２の先端面２ａはＲ−Δの曲率半径で曲面状に形成されている。さらに、電磁誘導センサ２の励磁コイル２ａと誘導コイル２ｂは一つの筐体内に収容されている。   The front end surface 2 a of the electromagnetic induction sensor 2 is convex with respect to the inner diameter surface of the outer ring 16. Further, if the radius of curvature of the rolling element rolling groove 16a formed on the inner diameter surface of the outer ring 16 is R, and the gap between the bottom surface of the rolling element rolling groove 16a and the front end surface 2a of the electromagnetic induction sensor 2 is Δ, The front end surface 2a of the electromagnetic induction sensor 2 is formed in a curved surface shape with a radius of curvature of R−Δ. Furthermore, the exciting coil 2a and the induction coil 2b of the electromagnetic induction sensor 2 are accommodated in one housing.

このように構成される転動装置部品用検査装置を用いて外輪１６の内径面に形成された転動体転動溝１６ａの表層部に欠陥が存在するか否かを検査する場合は、先ず、外輪１６をターンテーブル１０上に載置する。次に、センサ揺動機構１２、センサ昇降機構１３、センサ位置決め機構１４及び位置決め機構１７を駆動して電磁誘導センサ２の先端を転動体転動溝１６ａの底面に近づけた後、電磁誘導センサ２の励磁コイル２ａに交流電流を供給して外輪１６に交流磁界１５（図４参照）を付与すると、電磁誘導センサ２の誘導コイル２ｂに誘導起電力が発生する。このとき、誘導コイル２ｂに発生した誘導起電力の大きさは外輪１６に付与された交流磁界１５の磁束密度に応じて変化し、交流磁界１５の磁束密度は転動体転動溝１６ａの表層部に発生した欠陥の大きさに応じて変化する。   When inspecting whether or not there is a defect in the surface layer portion of the rolling element rolling groove 16a formed on the inner diameter surface of the outer ring 16 using the rolling device component inspection device configured as described above, The outer ring 16 is placed on the turntable 10. Next, after driving the sensor swing mechanism 12, the sensor elevating mechanism 13, the sensor positioning mechanism 14, and the positioning mechanism 17 to bring the tip of the electromagnetic induction sensor 2 close to the bottom surface of the rolling element rolling groove 16a, the electromagnetic induction sensor 2 When an alternating current is supplied to the exciting coil 2a and an alternating magnetic field 15 (see FIG. 4) is applied to the outer ring 16, an induced electromotive force is generated in the induction coil 2b of the electromagnetic induction sensor 2. At this time, the magnitude of the induced electromotive force generated in the induction coil 2b changes according to the magnetic flux density of the AC magnetic field 15 applied to the outer ring 16, and the magnetic flux density of the AC magnetic field 15 is the surface layer portion of the rolling element rolling groove 16a. It changes according to the size of the defect generated.

したがって、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力の大きさを予め設定された閾値と比較することで、クラック等の欠陥が転動体転動溝１６ａの表層部に存在するか否かを精度よく検査することができる。
次に、本発明の第４の実施形態に係る転動装置部品用検査装置の概略構成を図６に示す。同図に示される転動装置部品用検査装置は自動調心ころ軸受の内輪９が載置されるターンテーブル１０と、このターンテーブル１０の近傍に設けられた電磁誘導センサ２と、この電磁誘導センサ２をターンテーブル１０の上面に対して水平に支持する支持軸１１と、この支持軸１１を介して電磁誘導センサ２をＺ軸回り（図中矢印θＺ方向）に揺動駆動可能とするセンサ揺動機構１２と、このセンサ揺動機構１２を介して電磁誘導センサ２を図中Ｚ軸方向に昇降駆動可能とするセンサ昇降機構１３と、電磁誘導センサ２を図中Ｘ軸方向及びＹ軸方向に動かして電磁誘導センサ２を位置決めするセンサ位置決め機構１４とを備えており、電磁誘導センサ２は、図３に示すように、内輪等の転動装置部品に交流磁界を付与する励磁コイル２ａと、この励磁コイル２ａから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイル２ｂとから構成されている。 Therefore, by comparing the magnitude of the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2 with a preset threshold value, it is determined whether or not a defect such as a crack exists in the surface layer portion of the rolling element rolling groove 16a. Can be accurately inspected.
Next, FIG. 6 shows a schematic configuration of a rolling device part inspection device according to a fourth embodiment of the present invention. The rolling device component inspection apparatus shown in FIG. 1 includes a turntable 10 on which an inner ring 9 of a self-aligning roller bearing is mounted, an electromagnetic induction sensor 2 provided in the vicinity of the turntable 10, and the electromagnetic induction. a support shaft 11 for supporting horizontally the sensor 2 with respect to the upper surface of the turntable 10, the electromagnetic induction sensor 2 via a support shaft 11 to swing drivable about the Z-axis (in the arrow theta Z-direction) A sensor swinging mechanism 12, a sensor lifting mechanism 13 that enables the electromagnetic induction sensor 2 to be lifted and lowered in the Z-axis direction in the figure via the sensor swinging mechanism 12, and the electromagnetic induction sensor 2 in the X-axis direction and Y And a sensor positioning mechanism 14 for positioning the electromagnetic induction sensor 2 by moving in the axial direction. As shown in FIG. 3, the electromagnetic induction sensor 2 is an exciting coil that applies an alternating magnetic field to rolling device parts such as an inner ring. 2a, And a induction coil 2b for detecting a change in magnetic flux density of the alternating magnetic field is applied to the rolling device parts from the exciting coil 2a of.

なお、電磁誘導センサ２の先端面２ａは内輪９の外径面に対して凸面となっている。また、内輪９の内径面に形成された転動体転動溝９ａ，９ｂの曲率半径をＲ、転動体転動溝９ａ，９ｂの底面と電磁誘導センサ２の先端面２ａとの間のギャップをΔとすると、電磁誘導センサ２の先端面２ａはＲ−Δの曲率半径で曲面状に形成されている。さらに、電磁誘導センサ２の励磁コイル２ａと誘導コイル２ｂは一つの筐体内に収容されている。   The tip surface 2 a of the electromagnetic induction sensor 2 is convex with respect to the outer diameter surface of the inner ring 9. Further, the radius of curvature of the rolling element rolling grooves 9a and 9b formed on the inner diameter surface of the inner ring 9 is R, and the gap between the bottom surface of the rolling element rolling grooves 9a and 9b and the tip surface 2a of the electromagnetic induction sensor 2 is defined. Assuming Δ, the front end surface 2a of the electromagnetic induction sensor 2 is formed into a curved surface with a radius of curvature of R−Δ. Furthermore, the exciting coil 2a and the induction coil 2b of the electromagnetic induction sensor 2 are accommodated in one housing.

このように構成される転動装置部品用検査装置を用いて内輪９の外径面に形成された転動体転動溝９ａ，９ｂの表層部に欠陥が存在するか否かを検査する場合は、先ず、内輪９をターンテーブル１０上に載置する。次に、センサ揺動機構１２、センサ昇降機構１３、センサ位置決め機構１４を駆動して電磁誘導センサ２の先端を例えば転動体転動溝９ａの底面に近づけた後、電磁誘導センサ２の励磁コイル２ａに交流電流を供給して内輪９に交流磁界１５（図４参照）を付与すると、電磁誘導センサ２の誘導コイル２ｂに誘導起電力が発生する。このとき、誘導コイル２ｂに発生した誘導起電力の大きさは内輪９に付与された交流磁界１５の磁束密度に応じて変化し、交流磁界１５の磁束密度は転動体転動溝９ａの表層部に発生した欠陥の大きさに応じて変化する。   When inspecting whether or not there is a defect in the surface layer portion of the rolling element rolling grooves 9a and 9b formed on the outer diameter surface of the inner ring 9 by using the rolling device component inspection device configured as described above. First, the inner ring 9 is placed on the turntable 10. Next, after driving the sensor swing mechanism 12, the sensor elevating mechanism 13, and the sensor positioning mechanism 14 to bring the tip of the electromagnetic induction sensor 2 close to the bottom surface of the rolling element rolling groove 9a, for example, the excitation coil of the electromagnetic induction sensor 2 is used. When an alternating current is supplied to 2a and an alternating magnetic field 15 (see FIG. 4) is applied to the inner ring 9, an induced electromotive force is generated in the induction coil 2b of the electromagnetic induction sensor 2. At this time, the magnitude of the induced electromotive force generated in the induction coil 2b changes according to the magnetic flux density of the AC magnetic field 15 applied to the inner ring 9, and the magnetic flux density of the AC magnetic field 15 is the surface layer portion of the rolling element rolling groove 9a. It changes according to the size of the defect generated.

したがって、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力の大きさを予め設定された閾値と比較することで、クラック等の欠陥が転動体転動溝９ａ，９ｂの表層部に存在するか否かを精度よく検査することができる。
次に、本発明の第５の実施形態に係る転動装置部品用検査装置の概略構成を図７に示す。同図に示される転動装置部品用検査装置は内輪が取り除かれた円筒ころ軸受１８を載置するためのターンテーブル１０と、このターンテーブル１０の上方に設けられた電磁誘導センサ２と、この電磁誘導センサ２をターンテーブル１０の上面に対して水平に支持する支持軸１１と、この支持軸１１を介して電磁誘導センサ２をＺ軸回り（図中矢印θＺ方向）に揺動駆動可能とするセンサ揺動機構１２と、このセンサ揺動機構１２を介して電磁誘導センサ２を図中Ｚ軸方向に昇降駆動可能とするセンサ昇降機構１３と、電磁誘導センサ２を図中Ｘ軸方向及びＹ軸方向に動かして電磁誘導センサ２を位置決めするセンサ位置決め機構１４と、ターンテーブル１０を図中Ｘ軸方向に動かして検査対象物を位置決めする位置決め機構１７とを備えており、電磁誘導センサ２は、図３に示すように、転動体等の軸受部品に交流磁界を付与する励磁コイル２ａと、この励磁コイル２ａから軸受部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイル２ｂとから構成されている。 Therefore, by comparing the magnitude of the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2 with a preset threshold value, defects such as cracks are present in the surface layer portions of the rolling element rolling grooves 9a and 9b. It is possible to accurately inspect whether or not.
Next, FIG. 7 shows a schematic configuration of a rolling device part inspection device according to a fifth embodiment of the present invention. The rolling device component inspection apparatus shown in the figure includes a turntable 10 for mounting a cylindrical roller bearing 18 from which an inner ring has been removed, an electromagnetic induction sensor 2 provided above the turntable 10, a support shaft 11 for supporting horizontally relative to the upper surface of the turntable 10 the electromagnetic induction sensor 2, the electromagnetic induction sensor 2 via a support shaft 11 Z-axis (in the arrow theta Z direction) to the swing drivable The sensor swinging mechanism 12, the sensor lifting mechanism 13 that enables the electromagnetic induction sensor 2 to be driven up and down in the Z-axis direction in the figure via the sensor swinging mechanism 12, and the electromagnetic induction sensor 2 in the X-axis direction in the figure And a sensor positioning mechanism 14 for positioning the electromagnetic induction sensor 2 by moving in the Y-axis direction, and a positioning mechanism 17 for positioning the inspection object by moving the turntable 10 in the X-axis direction in the figure. As shown in FIG. 3, the electromagnetic induction sensor 2 includes an exciting coil 2a that applies an alternating magnetic field to a bearing component such as a rolling element, and changes in the magnetic flux density of the alternating magnetic field that is applied from the exciting coil 2a to the bearing component. It is comprised from the induction coil 2b for detecting.

なお、図７において符号１９は円筒ころ軸受１８の保持器、２０は保持器１９に保持された転動体（ころ）を示している。
このように構成される転動装置部品用検査装置を用いて転動体２０の疲労度を測定する場合は、先ず、内輪が取り除かれた円筒ころ軸受１８をターンテーブル１０上に載置する。次に、センサ揺動機構１２、センサ昇降機構１３、センサ位置決め機構１４及び位置決め機構１７を駆動して電磁誘導センサ２の先端を転動体（ころ）２０の表面に近づける。そして、この状態で電磁誘導センサ２の励磁コイル２ａから転動体２０に交流磁界１５（図４参照）を付与すると、電磁誘導センサ２の誘導コイル２ｂに誘導起電力が発生する。このとき、誘導コイル２ｂに発生した誘導起電力の大きさは転動体２０に付与された交流磁界１５の磁束密度に応じて変化し、交流磁界１５の磁束密度は転動体２０の疲労の進行度に応じて変化する。 In FIG. 7, reference numeral 19 denotes a cage of the cylindrical roller bearing 18, and 20 denotes a rolling element (roller) held by the cage 19.
When measuring the degree of fatigue of the rolling element 20 using the rolling device component inspection apparatus configured as described above, first, the cylindrical roller bearing 18 from which the inner ring has been removed is placed on the turntable 10. Next, the sensor swing mechanism 12, the sensor lifting mechanism 13, the sensor positioning mechanism 14, and the positioning mechanism 17 are driven to bring the tip of the electromagnetic induction sensor 2 closer to the surface of the rolling element (roller) 20. When an alternating magnetic field 15 (see FIG. 4) is applied from the exciting coil 2a of the electromagnetic induction sensor 2 to the rolling element 20 in this state, an induced electromotive force is generated in the induction coil 2b of the electromagnetic induction sensor 2. At this time, the magnitude of the induced electromotive force generated in the induction coil 2b changes according to the magnetic flux density of the AC magnetic field 15 applied to the rolling element 20, and the magnetic flux density of the AC magnetic field 15 indicates the degree of fatigue of the rolling element 20. It changes according to.

したがって、電磁誘導センサ２の誘導コイル２ｂに発生した誘導起電力の大きさを検出することで、転動体２０の疲労度を精度よく測定することができる。   Therefore, the degree of fatigue of the rolling element 20 can be accurately measured by detecting the magnitude of the induced electromotive force generated in the induction coil 2b of the electromagnetic induction sensor 2.

本発明の第１の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 1st Embodiment of this invention. 本発明の第２の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 2nd Embodiment of this invention. 電磁誘導センサの概略構成を示す図である。It is a figure which shows schematic structure of an electromagnetic induction sensor. 電磁誘導センサの励磁コイルから検査対象物に付与される交流磁界を説明するための図である。It is a figure for demonstrating the alternating current magnetic field provided to a test subject from the exciting coil of an electromagnetic induction sensor. 本発明の第３の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 3rd Embodiment of this invention. 本発明の第４の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 4th Embodiment of this invention. 本発明の第５の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 5th Embodiment of this invention.

符号の説明Explanation of symbols

１ 被測定物
２ 電磁誘導センサ
２ａ 励磁コイル
２ｂ 誘導コイル
３ インダクタンス変化検出回路（データ処理部）
４ 比較判定回路（判定部）
５ 表示装置
６ 記録装置
７ 記憶装置
８ 交流電源
９ 内輪
９ａ，９ｂ 転動体転動溝
１０ ターンテーブル
１１ 支持軸
１２ センサ揺動機構
１３ センサ昇降機構
１４ センサ位置決め機構
１６ 外輪
１７ 位置決め機構
１８ 自動調心ころ軸受
１９ 保持器
２０ 転動体 DESCRIPTION OF SYMBOLS 1 Measured object 2 Electromagnetic induction sensor 2a Excitation coil 2b Induction coil 3 Inductance change detection circuit (data processing part)
4 Comparison determination circuit (determination unit)
DESCRIPTION OF SYMBOLS 5 Display apparatus 6 Recording apparatus 7 Storage apparatus 8 AC power supply 9 Inner ring | wheel 9a, 9b Rolling body rolling groove 10 Turntable 11 Support shaft 12 Sensor rocking mechanism 13 Sensor raising / lowering mechanism 14 Sensor positioning mechanism 16 Outer ring 17 Positioning mechanism 18 Automatic alignment Roller bearing 19 Cage 20 Rolling element

Claims (7)

転動装置部品の欠陥または非金属介在物または熱処理または異材混入の有無あるいは表面硬さを検査する方法において、前記転動装置部品が旋削加工後または研削加工後または超仕上げ加工後の転動装置部品であって、前記転動装置部品に電磁誘導センサの励磁コイルから交流磁界を付与し、前記電磁誘導センサの誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定することにより、前記転動装置部品を検査して品質保証を行うことを特徴とする転動装置部品の検査方法。   In a method for inspecting a rolling device part for defects, non-metallic inclusions, heat treatment or foreign material contamination, or surface hardness, the rolling device after the turning, grinding, or superfinishing process. An AC magnetic field is applied from the exciting coil of the electromagnetic induction sensor to the rolling device component, and the amount of change in at least one of the amplitude and phase of the induced electromotive force generated in the induction coil of the electromagnetic induction sensor is measured. By inspecting the rolling device parts, quality assurance is performed by inspecting the rolling device parts. 転動装置部品の疲労進行度を検査する方法において、前記転動装置部品に電磁誘導センサの励磁コイルから交流磁界を付与し、前記電磁誘導センサの誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定することにより、前記疲労進行度を測定することを特徴とする転動装置部品の検査方法。   In the method for inspecting the degree of fatigue of a rolling device part, an alternating magnetic field is applied to the rolling device part from an excitation coil of an electromagnetic induction sensor, and the amplitude and phase of the induced electromotive force generated in the induction coil of the electromagnetic induction sensor A method for inspecting a rolling device part, comprising measuring the degree of progress of fatigue by measuring at least one amount of change. 前記励磁コイルと前記誘導コイルは一つの筐体内に収容され、前記交流磁界の磁力線が転動装置部品に対して９０度となるように前記転動装置部品の表面と前記電磁誘導センサの先端とが対向していることを特徴とする請求項１または２記載の転動装置部品の検査方法。   The excitation coil and the induction coil are housed in a single housing, and the surface of the rolling device component and the tip of the electromagnetic induction sensor are arranged so that the magnetic field lines of the alternating magnetic field are 90 degrees with respect to the rolling device component. The method for inspecting a rolling device part according to claim 1, wherein the two are opposed to each other. 請求項１〜３のいずれか一項記載の検査方法に用いられる検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、該電磁センサの出力を処理するデータ処理部と、該データ処理部のデータ処理値を閾値と比較して判定する判定部とを具備したことを特徴とする転動装置部品用検査装置。   It is an inspection apparatus used for the inspection method as described in any one of Claims 1-3, Comprising: The excitation coil which provides an alternating current magnetic field to rolling device components, and the alternating current magnetic field provided to the rolling device components from this excitation coil An electromagnetic induction sensor having an induction coil for detecting a change in magnetic flux density of the magnetic sensor, a data processing unit that processes the output of the electromagnetic sensor, and a determination that compares the data processing value of the data processing unit with a threshold value And a rolling device parts inspection device. 請求項４記載の転動装置部品用検査装置において、前記電磁センサと前記転動装置部品のうち少なくとも一方が回転、直動、揺動可能であることを特徴とする転動装置部品用検査装置。   5. The rolling device part inspection device according to claim 4, wherein at least one of the electromagnetic sensor and the rolling device part is rotatable, linearly movable, and swingable. . 請求項４または５記載の転動装置部品用検査装置において、複数の電磁誘導センサを有し、１つの被測定物に対し複数の電磁誘導センサで検査を行なうことを特徴とする転動装置部品用検査装置。   6. The rolling device part inspection apparatus according to claim 4, wherein the rolling device part has a plurality of electromagnetic induction sensors and inspects one object to be measured with the plurality of electromagnetic induction sensors. Inspection equipment. 請求項４〜６のいずれか一項記載の転動装置部品用検査装置において、前記判定部の判定結果を表示する表示手段と前記データ処理部のデータ処理値を記憶する記憶手段のうち少なくとも一方を具備したことを特徴とする転動装置部品用検査装置。   7. The rolling device part inspection apparatus according to claim 4, wherein at least one of a display unit that displays a determination result of the determination unit and a storage unit that stores a data processing value of the data processing unit. An inspection device for rolling device parts, comprising:
JP2006348910A 2006-05-26 2006-12-26 Inspection method of rolling device component, and inspection device for rolling device component Pending JP2008032680A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011247664A (en) * 2010-05-25 2011-12-08 Jtekt Corp Defect detection device of working surface of workpiece
JP2020024172A (en) * 2018-08-08 2020-02-13 日本精工株式会社 Nondegradable diagnostic method for bearing or direct-acting device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011247664A (en) * 2010-05-25 2011-12-08 Jtekt Corp Defect detection device of working surface of workpiece
JP2020024172A (en) * 2018-08-08 2020-02-13 日本精工株式会社 Nondegradable diagnostic method for bearing or direct-acting device

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