JP2008024996A - Diamond-like carbon laminated coating film member and method of manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To form a diamond-like carbon (DLC) coating film to suppress the deterioration of material strength and to improve endurance strength, coating film adhesion and friction/wear characteristic by improving the forming method of DLC coating film on a base material. <P>SOLUTION: The DLC laminated coating film member is formed by film-forming an intermediate layer 2 on the surface of the base material 1 comprising each alloy or the like of aluminum, magnesium or titanium and a laminated layer 3 on the surface of the intermediate layer 2. The laminated layer 3 is structured by alternately laminating the DLC coating film 4 and a metal-containing DLC coating film 5 containing a metal. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a surface treatment technique in which a diamond-like carbon DLC (Diamond Like Carbon) film is formed on the base material surface of each alloy of Al, Mg, and Ti, and in particular, fatigue strength, wear resistance, and friction coefficient decrease. The present invention relates to a DLC laminated film member having further improved tribological characteristics such as the above and a manufacturing method thereof.

  Currently, active efforts are being made to reduce the environmental burden in various fields, and in the automobile field, it is essential to tackle global environmental issues by reducing fuel consumption. In order to reduce the fuel consumption of automobiles, not only improving the combustion efficiency of the engine but also reducing the weight of components and parts and reducing the friction of sliding parts is one of the most effective means. As a means for reducing this friction, DLC with a very small coefficient of friction has been attracting attention and its application to automobile parts has been studied. However, there are many technical difficulties, and there are still very few examples that have been put to practical use in mass-produced commercial vehicles. Few. As a material for weight reduction, aluminum is attracting attention as a material excellent in recyclability and corrosion resistance as well as being lightweight. Although it is actively used by applying surface modification technology to Al alloys, there are problems such as lower strength than steel materials, poor wear resistance, and low fatigue strength. It is expected that the use will be further expanded if a solution to these problems is developed.

Since the DLC film structure includes both the SP ³ bond of diamond and the SP ² bond of graphite, it has an amorphous structure having no fixed crystal structure. Since DLC has a high hardness among various hard thin films, it is a hard film excellent in tribological characteristics having excellent wear resistance and an extremely low friction coefficient.

Thus, various techniques for forming a DLC film on the surface of a substrate have been proposed. For example, in Japanese Patent Application Laid-Open No. 2004-339564 “Sliding Member and Film Forming Method” of Patent Document 1, the DLC film is formed on a sliding member formed by forming a DLC film on the surface of a base material by sputtering. A sliding member characterized by having a surface shape in which minute concave portions having a diameter of 0.5 to 1.0 μm and a depth of 10 to 30 nm are assembled has been proposed. Further, this Patent Document 1 discloses a film forming method in which a negative bias voltage applied to a base material is set to 150 to 600 V when a DLC film is formed on the surface of the base material by sputtering using solid carbon as a target. Is disclosed.
JP 2004-339564 A

  In addition, it is related to protective films for industrial and general household machinery and sliding members, magnetic heads of card and ticket automatic readers and printers, etc., and especially coating with wear resistance and high sliding characteristics Techniques relating to membranes and members having excellent characteristics have been proposed. For example, Japanese Patent Application Laid-Open No. 2001-261318 “Diamond-like carbon hard multilayer film and member excellent in wear resistance and sliding resistance” has an amorphous structure mainly composed of carbon and has an average diameter. A DLC hard multilayer film is disclosed in which a low-hardness hard carbon layer containing graphite clusters consisting of 2 nm or more and a high-hardness hard carbon layer containing graphite clusters consisting of an average diameter of 1 nm or less are alternately laminated.

JP, 2001-261318, A As a thing used for wear-resistant parts, sliding parts, infrared optical parts, etc., for example, patent 3246513 "diamond-like carbon laminated film" of patent documents 3 has a DLC layer and tension. A DLC laminated film in which buffer layers such as SiC having stress are alternately laminated is disclosed. Japanese Patent No. 3246513

In addition, a technique used for a member for an application that requires particularly high wear and high slidability, such as a tool, a mold, an automobile part, and a home appliance part, has been proposed. For example, Japanese Patent Application Laid-Open No. 2002-322555 “Diamond-like carbon multilayer film” in Patent Document 4 discloses a multilayer film in which low-density DLC layers and high-density DLC layers are alternately stacked.
JP 2002-322555 A

The fact that the DLC laminated film is effective in realizing a low friction coefficient and low wear is also apparent from “DLC film forming technology learned from examples” of Non-Patent Document 1. This discloses a laminated film in which a high hardness film and a low hardness film are alternately laminated in nano order.
Published by Nikkan Kogyo Shimbun, "DLC film formation technology learned from cases" (pages 49-50)

In addition, although a compressive residual stress is applied to the member coated with the DLC film, since the film is thin, as shown in “How to interpret the microstructure of metal material and fatigue strength” of Non-Patent Document 2, It shows that improvement cannot be expected.
Published by Nikkan Kogyo Shimbun, Ltd. “Viewpoint of microstructure change and fatigue strength of metal materials” (page 142)

  However, the DLC film member in which the above-described soft Al, Mg, Ti alloy base material is coated with a high hardness DLC film has the problem that the adhesion between the base material and the film is reduced, and the fatigue strength. Had the problem of lowering.

  Patent Document 1, Patent Document 2, Patent Document 3 or Patent Document 4 all have a base material strength that is lowered due to a high processing temperature during film formation, and accordingly, fatigue strength of the entire member. Point out the problem of falling.

  The present invention has been developed to solve such problems. That is, the object of the present invention is to form a DLC film at a relatively low temperature, thereby suppressing a decrease in the strength of the base material, and by devising a method for forming the DLC film on the base material. An object of the present invention is to provide a DLC laminated film member having not only high fatigue strength but also good film adhesion and frictional wear characteristics, and a method for producing the same.

According to the coating member of the present invention, the intermediate layer (2) is formed on the surface of the base material (1) made of each alloy of aluminum, magnesium or titanium, and the laminate (3) is formed on the surface of the intermediate layer (2). A diamond-like carbon (DLC) laminated film member formed with a film, wherein the laminated (3) has a structure in which a DLC film (4) and a metal-containing DLC film (5) containing a metal are alternately laminated. A DLC laminated film member is provided.
For example, the intermediate layer (2) comprises a metal-containing DLC film (5) containing a metal, and the metal-containing DLC film (5) has a high metal content on the substrate (1) side, It is preferable that it is the inclination structure which made the metal content rate low in the lamination | stacking (3) side.

The metal-containing DLC film (5) preferably contains 5 to 15% by weight of each metal of tungsten, molybdenum, chromium or titanium.
The intermediate layer (2) has a thickness of 0.05 to 3.00 μm and contains tungsten, molybdenum, chromium, or titanium metal having the same component as the metal-containing DLC film (5). preferable.
The DLC film (4) is an amorphous carbon film having high hardness and physical properties similar to diamond, and contains hydrogen.

The thickness of one layer of the metal-containing DLC film (5) or DLC film (4) constituting the laminate (3) is 0.01 to 0.5 μm, and the entire thickness of the laminate (3) is It is preferable to make it 1 μm or more.
Considering reduction of residual stress and ease of manufacture, the thickness of the metal-containing DLC film (5) constituting the laminate (3) and the thickness of the DLC film (4) constituting the laminate (3) are approximately It is preferable that they are equivalent. However, it may vary somewhat depending on the number of constituent metal target sources and hydrocarbon target sources.

According to the production method of the present invention, the metal containing the intermediate layer (2), the DLC film (4) and the metal on the surface of the substrate (1) by the unbalanced magnetron sputtering method (UBMS method). When forming the laminate (3) composed of the containing DLC film (5), the coating treatment temperature of the intermediate layer (2) and the DLC laminate (3) is set to an atmosphere of 100 to 200 ° C. A method for manufacturing a DLC laminated coating member is provided.
By the unbalanced magnetron sputtering method (UBMS method), an intermediate layer (2) and a laminate (3) in which the DLC film (4) and the DLC film (5) containing metal are alternately stacked are formed. It is necessary.

When forming the laminate (3) in which the intermediate layer (2) and the DLC film (4) and the DLC film (5) containing metal are alternately stacked on the substrate surface (1), a plasma CVD method is used. Can be used.
When the intermediate layer (2), the DLC film (4), and the metal-containing DLC film (5) containing metal are formed on the surface of the base material (1) by the plasma CVD method, the coating process is performed. It is necessary to set the temperature to an atmosphere of 100 to 200 ° C.

When forming the laminate (3) in which the intermediate layer (2), the DLC film (4), and the DLC film (5) containing metal are alternately stacked on the substrate surface (1), ionization deposition is performed. The law can be used.
When the intermediate layer (2), the DLC film (4), and the metal-containing DLC film (5) containing a metal are formed on the surface of the substrate (1) by the ionized vapor deposition method,
It is necessary to set the coating processing temperature to an atmosphere of 100 to 200 ° C.

  As described above, in the DLC laminated film member of the present invention, the laminated film (3) formed on the substrate (1) comprises the DLC film (4) and the metal-containing DLC film (5) containing metal. Because of the alternately stacked structure, the laminate (3) can increase the fatigue strength of the nonferrous metal substrate (1) such as aluminum or magnesium. Moreover, this lamination (3) can reduce the friction coefficient as various members, and can reduce the amount of wear. Furthermore, the adhesion to the substrate (1) or the intermediate layer (2) can be improved by the lamination (3).

  As shown in Table 1 to be described later, the product of the present invention is rather increased without decreasing the coating film adhesion even when the coating film thickness is increased. In general, since the DLC film has a large residual stress, is super-hard, and has almost no ductility, when the coating thickness is increased, the adhesion of the film is reduced and the film is easily peeled off. For this reason, even if it is desired to increase the thickness of the DLC film, it cannot be increased, and the practical film thickness is limited to 3 μm at most. However, the DLC film according to the present invention does not decrease the adhesion force even when the film thickness is increased, but rather increases the adhesion force, so that a thick coating film is possible.

  Further, in the production method of the present invention, since the DLC film (2, 3, 4) can be formed at a relatively low temperature, it is possible to suppress a decrease in the strength of the base material and to have a high fatigue strength. In addition, a DLC laminated film member having good film adhesion and friction and wear characteristics can be produced.

  The DLC laminated film member of the present invention is a DLC laminated film member in which an intermediate layer is formed on the surface of the base material and a laminated film is formed on the surface of the intermediate layer. The laminated film is a diamond-like carbon film and a metal containing metal. This is a structure in which the contained DLC films are alternately stacked.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
1 is a cross-sectional view of a DLC laminated film member of Example 1 of the present invention. FIG. 2 is an enlarged cross-sectional view of the laminated portion.
The DLC laminated film member of the present invention is a member in which an intermediate layer 2 is formed on the surface of a substrate 1 made of an alloy such as aluminum, magnesium, or titanium, and a laminated layer 3 is formed on the surface of the intermediate layer 2. The laminate 3 has a structure in which DLC films 4 and metal-containing DLC films 5 containing metal are alternately stacked. The DLC film 4 is an amorphous carbon film having high hardness and physical properties similar to diamond, and contains hydrogen. Here, the reason why the present invention defines DLC containing hydrogen is that the DLC stack of the present invention is low-cost and an extremely smooth surface can be obtained. DLC that does not contain hydrogen can be obtained with a small friction coefficient, but by using a solid carbon source, fine surface precipitates called droplets are generated, and a smooth surface cannot be obtained. This is because it is a substance that is particularly harmful to friction, and the process of removing it is indispensable. If this is not removed, the coefficient of friction will increase, the wear will increase, and it will not function as a lubricating film at all. The metal-containing DLC film 5 of the present invention contains 5 to 15% by weight of metal such as tungsten (W), chromium (Cr) or titanium (Ti).

  The intermediate layer 2 is composed of a metal-containing diamond-like carbon film 5 containing a metal. The metal-containing DLC film 5 has a high metal content on the substrate 1 side and a low metal content on the laminate 3 side. It is an inclined structure. The intermediate layer 2 made of the metal-containing DLC film 5 has a thickness of 0.05 to 3.00 μm. The thickness of the intermediate layer 2 is determined according to the type of base material, the use of the member, and the like.

  The thickness of one layer of the metal-containing DLC film 5 or the DLC film 4 constituting the laminate 3 is 0.01 to 0.5 μm. The thickness of the laminate 3 is determined according to the type of base material, the use of the member, and the like. For example, the thickness of the metal-containing DLC film 5 constituting the laminate 3 is preferably ¼ or less of the thickness of the DLC laminate film 3).

The number of laminations of the DLC film 4 and the metal-containing DLC film 5 of the lamination 3 is not limited to 10 layers in the illustrated example, but is determined according to the type of base material, the use of the laminated film member, the specifications, and the like. By adopting the nano-laminate structure, the residual stress generated in the laminated film is reduced, and a high-performance thick film that does not exist in conventional DLC can be coated. The present invention has a thickness of 3 μm or more, preferably 5 μm or more, and it is possible to coat a high-performance 10 μm thick film that cannot be obtained by the conventional method.
In addition, various substrates can be handled by changing the structure of the intermediate layer. By laminating the structure of the surface DLC film, the friction coefficient can be reduced and the fatigue strength can be improved.

FIG. 3 is a cross-sectional view of a base material and a DLC not containing metal.
Furthermore, as shown in FIG. 3, the metal-containing DLC film 5 can be directly formed on the substrate 1. That is, the intermediate layer 2 can be omitted.

FIG. 4 is an apparatus schematic diagram for explaining a method for producing a DLC laminated film member of Example 2.
The DLC laminated film member of Example 2 is formed by a manufacturing apparatus as shown in FIG. The vacuum chamber 11 is equipped with a square UBM sputtering evaporation source 4 and coats the base material 1 on the self-revolving work table 12 arranged at the center, that is, the work 13 from the outer periphery. A flat plate target (127 mm × 508 mm) serving as a film material is attached to the sputtering source 14, and the apparatus has a recommended processing space of Φ450 × H400 mm. A sputtering power source that supplies power for generating glow discharge is connected to the sputtering source 14, and a bias power source that applies a negative bias voltage is connected to the work table 12.

Film formation by the UBM sputtering method using the manufacturing apparatus shown in FIG. 4 is manufactured as follows.
First, the work 13 whose surface has been sufficiently cleaned is set in the vacuum chamber 11 and evacuated to a high vacuum of about 2 × 10 ⁻³ Pa or less. Thereafter, the work 13 is preheated by the heater 15 for the purpose of degassing from the work 13 and the inner surface of the vacuum chamber 11. The heating time is appropriately adjusted according to the film to be formed, the workpiece material (heat resistance imagination), the workpiece weight (heat capacity), etc., but the heating time is usually 150 to 200 ° C.

  Next, a high negative bias voltage of about −300 and −600 V is applied to the work 13, and the hot filament plasma source 16 is operated in an Ar gas atmosphere at a pressure of about 1 to 2 Pa. A bombarding step for causing the workpiece 13 to collide is performed. This process has a role of further strengthening the adhesion of a film to be formed thereafter by etching and cleaning the work surface with high energy ions and raising the work temperature. This step is usually performed for about 10 to 30 minutes.

When the bombardment process is completed, the process of coating the film is started. In the case of forming a DLC film, which will be described later, a hydrocarbon gas and a metal target for an intermediate layer are attached to the sputter source 14 as targets. After changing the Ar gas pressure to a pressure suitable for the sputtering, and introducing other process gas as necessary, while supplying a bias voltage to the work 13, power is supplied to the sputter source to cause glow discharge. Once generated, coating begins. Standard conditions at the time of coating are an Ar pressure of about 0.1 to 1 Pa, a bias voltage of −20 to −200 V, and a sputtering power of 1 to 10 kW. The film thickness is controlled by adjusting the sputtering power and coating time.
When the predetermined film thickness is reached, the power supply to the sputtering source is stopped. The coating is terminated, and the workpiece 13 is removed from the vacuum chamber 11 after cooling.

[Coating Example 1]
FIG. 5 is a graph showing the relationship between sputtering power and time when tungsten is contained. FIG. 6 is a cross-sectional view of a laminated film member having a tungsten-containing DLC gradient structure.
The coating example 1 by the manufacturing method of the DLC laminated film member using the UBM sputtering apparatus as shown in FIG. 4 mentioned above is shown.
The base material 1 was a carburized material of SCM415 having a diameter of 15 mm and a height of 10 mm, which was degreased and coated. The substrate 1 is mounted in a vacuum chamber 11 of a UBMS apparatus (unbalanced magnetron sputtering apparatus) and evacuated to a vacuum of about 5 × 10 ⁻³ Pa or less. The substrate 1 is baked with the heater 15 and the surface of the substrate 1 is etched with Ar plasma. Thereafter, DLC multilayer films having various layer structures as shown in Table 1 were formed by the UBMS method at 2.6 × 10 ⁻³ Pa.

  Here, the intermediate layer 2 is a DLC containing 10% of W, and the surface DLC layer is formed by alternately laminating a DLC layer having a thickness of 0.1 μm and a W-containing DLC layer, and the surface DLC layered film has a thickness of 1 μm and 3 μm, respectively. It is finished. The outermost layer is a hard DLC layer. The state of the cross section after coating No. 2 in Table 1 is shown in FIG.

In the vacuum chamber 11 of FIG. 4, a work 13 is set on a central work table 12. In order to perform the coating of the present invention, tungsten (W) is installed in one evaporation source, and the remaining evaporation source is coated using a hydrocarbon gas such as benzene.
As shown in FIG. 5, the intermediate layer 2 in contact with the base material 1 has a W content on the base material 1 side as high as about 100% and the surface layer 3 side is reduced to about 10% as shown in FIG. Use inclined material.

  The stacking part is performed with or without the addition of sputtering power from the W evaporation source, and contains W when power is applied, and does not contain W when power is not applied. The W additional power is 0.09 kW. The DLC is coated with a predetermined power, and the processing temperature is 120 ° C.

[Coating Example 2]
The coating example 2 using a UBM sputtering device is shown. As the base material 1, an aluminum alloy A6061 (T6 treated product) having a diameter of 15 mm and a height of 10 mm was used, and a DLC multilayer laminated film as shown in Table 2 was formed in the same manner as in Coating Example 1.

  Here, the intermediate layer is a DLC containing 10% of W, and the surface DLC stack is formed by alternately stacking a DLC layer having a thickness of 0.1 μm and a W-containing DLC layer, and forming a surface DLC layered film to a thickness of 1 μm and 3 μm, respectively. Finished. The outermost layer is a hard DLC layer.

FIG. 7 is a front view and a side view showing an example of a fatigue test piece used in measuring the fatigue strength test. FIG. 8 is a graph showing the effect of DLC on the fatigue strength of an aluminum material. The vertical axis of the graph represents intensity amplitude (unit MPa), and the horizontal axis represents the number of repetitions.
Here, “Virgin”: Uncoated member “L-DLC”: Intermediate layer 2 μm + Laminate 1 μm
“Thick-DLC”: Intermediate layer 2 μm + stack 1 μm.

FIG. 9 is an explanatory view showing the mechanism of fatigue fracture, where (a) is a member not coated, and (b) is a member coated with DLC.
Fatigue fracture of the Al material starts from voids on the material surface, that is, particles (Mg—Si—O Particles), and fatigue fracture occurs from the surface of the member (state of FIG. 9A). . However, by coating DLC, this void is closed and fatigue failure occurs from inside the member (the state of FIG. 9B). For this reason, fatigue strength can be improved. Magnesium and titanium also have a similar fatigue fracture mechanism, and a DLC coating like the present invention is effective in improving fatigue strength.

FIG. 10 is a graph showing the relationship between the coefficient of friction and the sliding distance between the DLC film-less member, the DLC single-layer film member, and the DLC laminated film member of the present invention.
In this graph, a DLC film-less member, a DLC single-layer film member, a 3 μm DLC laminated film member, and a 5 μm DLC laminated film member are shown in order from the top. As shown in this graph, the DLC laminated film member of the present invention has a smaller coefficient of friction than, for example, a 3 μm DLC laminated film member than a 3 μm DLC single layer film member. A DLC laminated film member having a thickness of about 5 μm has a smaller friction coefficient.

  In the present invention, by forming the intermediate layer 2 and the DLC laminate 3 at a relatively low temperature, it is possible to suppress a reduction in the strength of the base material, and to further devise a method for forming a DLC film on the base material 1 As a result, not only the fatigue strength can be increased, but also the film adhesion and friction and wear characteristics can be improved, so that the present invention is not limited to the above-described embodiments, and various modifications are made without departing from the scope of the present invention. Of course you can.

  The diamond-like carbon laminated film member and the method for producing the same according to the present invention can be used for automobile parts and the like because they improve not only excellent friction and wear characteristics but also fatigue strength.

It is sectional drawing of the DLC laminated film member of Example 1 of this invention. It is an expanded sectional view of a lamination part. It is sectional drawing of a base material and DLC which does not contain a metal. It is the apparatus schematic explaining the manufacturing method of the DLC laminated film member of Example 2. FIG. It is a graph which shows the relationship between sputtering electric power at the time of containing tungsten and time. It is sectional drawing of the laminated film member which has a tungsten containing DLC gradient structure. It is the front view and side view which show an example of the fatigue test piece used when measuring a fatigue strength test. It is a graph which shows the effect of DLC on the fatigue strength of an aluminum material. It is explanatory drawing which shows the mechanism of fatigue failure, (a) is a member which is not coated, (b) is a member which coated DLC. It is a graph which shows the relationship between the friction coefficient and sliding distance of a member without a DLC film, a DLC single layer film member, and a DLC laminated film member of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Base material 2 Intermediate layer 3 Lamination | stacking 4 DLC film 5 Metal containing DLC film

Claims (13)

Diamond-like carbon (DLC) in which an intermediate layer (2) is formed on the surface of a base material (1) made of an alloy of aluminum, magnesium, titanium, or the like, and a laminate (3) is formed on the surface of the intermediate layer (2) A laminated coating member,
The laminate (3) has a structure in which a DLC coating (4) and a metal-containing DLC coating (5) containing a metal are alternately stacked. The intermediate layer (2) is composed of a metal-containing DLC film (5) containing a metal, and the metal-containing DLC film (5) has a high metal content on the substrate (1) side, and the laminate ( 3) The DLC laminated film member according to claim 1, wherein the DLC laminated film member has an inclined structure with a reduced metal content on the side. The DLC laminated film member according to claim 1 or 2, wherein the metal-containing DLC film (5) contains 5 to 15 wt% of each metal of tungsten, molybdenum, chromium or titanium. The intermediate layer (2) has a thickness of 0.05 to 3.00 μm, and contains tungsten, molybdenum, chromium, or titanium metal having the same component as the metal-containing DLC film (5). The DLC laminated film member according to claim 1 or 2, wherein: 5. The DLC layer according to claim 1, wherein the DLC film (4) is an amorphous carbon film having high hardness and physical properties similar to diamond and containing hydrogen. Film member. The thickness of one layer of the metal-containing DLC film (5) or DLC film (4) constituting the laminate (3) is 0.01 to 0.5 μm, and the entire thickness of the laminate (3) is The DLC laminated film member according to claim 1, wherein the DLC laminated film member is 1 μm or more. The thickness of the metal-containing DLC film (5) constituting the laminate (3) and the thickness of the DLC film (4) constituting the laminate (3) are substantially equal. DLC laminated film member. By the unbalanced magnetron sputtering method (UBMS method), the surface of the base material (1) is composed of an intermediate layer (2), a DLC film (4), and a metal-containing DLC film (5) containing a metal. When forming the laminate (3),
A method for producing a DLC laminated coating member, characterized in that the coating temperature of the intermediate layer (2) and the DLC laminate (3) is set to an atmosphere of 100 to 200 ° C. By the unbalanced magnetron sputtering method (UBMS method), an intermediate layer (2) and a laminate (3) in which the DLC film (4) and the DLC film (5) containing metal are alternately stacked are formed. The method for producing a DLC laminated film member according to claim 8. When forming the laminate (3) in which the intermediate layer (2) and the DLC film (4) and the DLC film (5) containing metal are alternately stacked on the substrate surface (1), a plasma CVD method is used. The method for producing a DLC laminated film member according to claim 8, wherein: When the intermediate layer (2), the DLC film (4), and the metal-containing DLC film (5) containing metal are formed on the surface of the substrate (1) by the plasma CVD method,
The method for producing a DLC laminated coating member according to claim 10, wherein the coating treatment temperature is set to an atmosphere of 100 to 200 ° C. When forming the laminate (3) in which the intermediate layer (2), the DLC film (4), and the DLC film (5) containing metal are alternately stacked on the substrate surface (1), ionization deposition is performed. The method for producing a DLC laminated film member according to claim 8, wherein the method is utilized. When the intermediate layer (2), the DLC film (4), and the metal-containing DLC film (5) containing a metal are formed on the surface of the substrate (1) by the ionized vapor deposition method,
The method for producing a DLC laminated coating member according to claim 12, wherein the coating treatment temperature is set to an atmosphere of 100 to 200 ° C.

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