JP2008023698A5 - - Google Patents

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Publication number
JP2008023698A5
JP2008023698A5 JP2007081987A JP2007081987A JP2008023698A5 JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5 JP 2007081987 A JP2007081987 A JP 2007081987A JP 2007081987 A JP2007081987 A JP 2007081987A JP 2008023698 A5 JP2008023698 A5 JP 2008023698A5
Authority
JP
Japan
Prior art keywords
base
gantry
stage apparatus
guide
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007081987A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008023698A (ja
JP4328364B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007081987A priority Critical patent/JP4328364B2/ja
Priority claimed from JP2007081987A external-priority patent/JP4328364B2/ja
Publication of JP2008023698A publication Critical patent/JP2008023698A/ja
Priority to TW097106465A priority patent/TW200844020A/zh
Publication of JP2008023698A5 publication Critical patent/JP2008023698A5/ja
Priority to KR1020080027701A priority patent/KR20080087724A/ko
Priority to CNA2008100872777A priority patent/CN101274407A/zh
Application granted granted Critical
Publication of JP4328364B2 publication Critical patent/JP4328364B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007081987A 2007-03-27 2007-03-27 ステージ装置 Expired - Fee Related JP4328364B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2007081987A JP4328364B2 (ja) 2007-03-27 2007-03-27 ステージ装置
TW097106465A TW200844020A (en) 2007-03-27 2008-02-25 Stage device
KR1020080027701A KR20080087724A (ko) 2007-03-27 2008-03-26 스테이지장치
CNA2008100872777A CN101274407A (zh) 2007-03-27 2008-03-26 载物台装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007081987A JP4328364B2 (ja) 2007-03-27 2007-03-27 ステージ装置

Publications (3)

Publication Number Publication Date
JP2008023698A JP2008023698A (ja) 2008-02-07
JP2008023698A5 true JP2008023698A5 (enrdf_load_html_response) 2008-03-21
JP4328364B2 JP4328364B2 (ja) 2009-09-09

Family

ID=39114853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007081987A Expired - Fee Related JP4328364B2 (ja) 2007-03-27 2007-03-27 ステージ装置

Country Status (4)

Country Link
JP (1) JP4328364B2 (enrdf_load_html_response)
KR (1) KR20080087724A (enrdf_load_html_response)
CN (1) CN101274407A (enrdf_load_html_response)
TW (1) TW200844020A (enrdf_load_html_response)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4964853B2 (ja) * 2008-09-24 2012-07-04 住友重機械工業株式会社 ステージ装置
JP5550255B2 (ja) * 2009-04-28 2014-07-16 株式会社日立製作所 ペースト塗布装置及び塗布方法
JP5380225B2 (ja) * 2009-09-24 2014-01-08 株式会社日立ハイテクノロジーズ ガラス基板の検査装置
JP6025516B2 (ja) * 2012-11-15 2016-11-16 三菱重工業株式会社 取付加工機および加工方法
JP2014195805A (ja) * 2014-05-19 2014-10-16 芝浦メカトロニクス株式会社 ペースト塗布装置
CN111715943A (zh) * 2019-03-22 2020-09-29 江苏中朕智能工程有限公司 一种停车场道闸管理系统闸杆裁剪用切割机

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