JP2008021987A5 - - Google Patents

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JP2008021987A5
JP2008021987A5 JP2007157807A JP2007157807A JP2008021987A5 JP 2008021987 A5 JP2008021987 A5 JP 2008021987A5 JP 2007157807 A JP2007157807 A JP 2007157807A JP 2007157807 A JP2007157807 A JP 2007157807A JP 2008021987 A5 JP2008021987 A5 JP 2008021987A5
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semiconductor
substrate
layer
region
semiconductor substrate
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JP2007157807A
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JP5394617B2 (en
JP2008021987A (en
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Claims (14)

基板に電子部品が実装されてなる半導体装置であって、
前記基板が半導体基板からなり、
前記半導体基板に形成された導電型の異なる第1、第2の領域からなる半導体素子と、
前記半導体基板を貫通する第1、第2の貫通電極と、
前記半導体基板上に形成された第1、第2の配線層と、
を有し、
前記電子部品の第1の電極が、前記第1の配線層を介して前記半導体素子の第1の領域と前記半導体基板の第1の貫通電極とに接続され、
前記電子部品の第2の電極が、前記第2の配線層を介して前記半導体素子の第2の領域と前記半導体基板の第2の貫通電極とに接続されていることを特徴とする半導体装置。
A semiconductor device in which electronic components are mounted on a substrate,
The substrate comprises a semiconductor substrate ;
Said semiconductor base plate first with different formed conductive type, a semiconductor element made of the second region,
First and second through electrodes penetrating the semiconductor substrate;
First and second wiring layers formed on the semiconductor substrate;
Have
A first electrode of the electronic component is connected to the first region of the semiconductor element and the first through electrode of the semiconductor substrate via the first wiring layer ;
The second electrode of the electronic component is connected to the second region of the semiconductor element and the second through electrode of the semiconductor substrate through the second wiring layer. .
前記半導体基板は、P層と、該P層の一部に設けられたN層とからなり、
前記半導体素子の第1の領域が前記N層からなり、前記半導体素子の第2の領域が前記P層からなることを特徴とする請求項1に記載の半導体装置。
The semiconductor substrate includes a P layer and an N layer provided in a part of the P layer,
2. The semiconductor device according to claim 1, wherein a first region of the semiconductor element is formed of the N layer, and a second region of the semiconductor element is formed of the P layer .
前記半導体素子は、前記電子部品に所定以上の電圧が印加されることを防止するツェナーダイオードであることを特徴とする請求項1または2に記載の半導体装置。 The semiconductor device, the semiconductor device according to claim 1 or 2, characterized in that said electronic component is a Zener diode to prevent the voltage higher than the predetermined is applied. 前記第1、第2の配線層は、前記半導体基板の電子部品実装面側に絶縁層を介して形成され、前記絶縁層に形成された開口部を介して前記半導体素子の第1、第2の領域に接続されることを特徴とする請求項1乃至3の何れかに記載の半導体装置。 The first and second wiring layers are formed on an electronic component mounting surface side of the semiconductor substrate via an insulating layer, and the first and second wirings of the semiconductor element are formed through openings formed in the insulating layer. The semiconductor device according to claim 1, wherein the semiconductor device is connected to the region . 前記半導体基板は、シリコン基板であることを特徴とする請求項1乃至4の何れかに記載の半導体装置。   The semiconductor device according to claim 1, wherein the semiconductor substrate is a silicon substrate. 前記電子部品は、光機能素子であることを特徴とする請求項1乃至5の何れかに記載の半導体装置。   The semiconductor device according to claim 1, wherein the electronic component is an optical functional element. 前記電子部品は、光透過性を有する光透過面を有する封止構造体により前記基板上に封止されていることを特徴とする請求項1乃至6の何れかに記載の半導体装置。   The semiconductor device according to claim 1, wherein the electronic component is sealed on the substrate by a sealing structure having a light transmitting surface having light transmittance. 基板上に電子部品が実装されてなる半導体装置の製造方法であって、
前記基板を半導体基板により形成する工程と、
前記半導体基板に導電型の異なる第1、第2の領域からなる半導体素子を形成する工程と、
前記半導体基板を貫通する第1、第2の貫通電極を形成する工程と、
前記半導体基板に前記半導体素子の第1の領域と前記第1の貫通電極とを接続する第1の配線層と、前記半導体素子の第2の領域と前記第2の貫通電極とを接続する第2の配線層とを形成する工程と、
前記半導体基板上に前記電子部品を搭載する工程と、
を有し、
前記電子部品の第1の電極が、前記第1の配線層を介して前記半導体素子の第1の領域と前記半導体基板の第1の貫通電極とに接続され、
前記電子部品の第2の電極は、前記第2の配線層を介して前記半導体素子の第2の領域と前記半導体基板の第2の貫通電極とに接続されることを特徴とする半導体装置の製造方法。
A method of manufacturing a semiconductor device in which an electronic component is mounted on a substrate,
Forming the substrate with a semiconductor substrate;
Forming a semiconductor element comprising first and second regions of different conductivity types on the semiconductor substrate;
Forming first and second through electrodes penetrating the semiconductor substrate;
A first wiring layer that connects the first region of the semiconductor element and the first through electrode on the semiconductor substrate , and a second region of the semiconductor element and the second through electrode are connected. Forming a second wiring layer ;
Mounting the electronic component on the semiconductor substrate;
I have a,
A first electrode of the electronic component is connected to the first region of the semiconductor element and the first through electrode of the semiconductor substrate via the first wiring layer;
The second electrode of the electronic component is connected to the second region of the semiconductor element and the second through electrode of the semiconductor substrate through the second wiring layer . Production method.
前記半導体基板は、P層と、該P層の一部に設けられたN層とからなり、
前記半導体素子の第1の領域が前記N層からなり、前記半導体素子の第2の領域が前記P層からなることを特徴とする請求項8に記載の半導体装置の製造方法。
The semiconductor substrate includes a P layer and an N layer provided in a part of the P layer,
9. The method of manufacturing a semiconductor device according to claim 8, wherein the first region of the semiconductor element is made of the N layer, and the second region of the semiconductor element is made of the P layer .
前記第1、第2の配線層は、前記半導体基板の電子部品実装面側に絶縁層を介して形成され、前記絶縁層に形成された開口部を介して前記半導体素子の第1、第2の領域に接続されることを特徴とする請求項8または9に記載の半導体装置の製造方法。 The first and second wiring layers are formed on an electronic component mounting surface side of the semiconductor substrate via an insulating layer, and the first and second wirings of the semiconductor element are formed through openings formed in the insulating layer. The method of manufacturing a semiconductor device according to claim 8 , wherein the semiconductor device is connected to the region of 前記電子部品を光透過性を有する光透過部材により前記基板上に封止する工程を有することを特徴とする請求項8乃至10の何れかに記載の半導体装置の製造方法。 The method of manufacturing a semiconductor device according to claim 8, further comprising a step of sealing the electronic component on the substrate with a light transmitting member having a light transmitting property. 電子部品が実装される基板であって、
前記基板が半導体基板からなり、
前記半導体基板に形成された導電型の異なる第1、第2の領域からなる半導体素子と、
前記半導体基板を貫通する第1、第2の貫通電極と、
前記半導体基板上に形成された第1、第2の配線層と、
を有し、
前記第1の配線層が前記半導体素子の第1の領域と前記半導体基板の第1の貫通電極とを接続し、
前記第2の配線層が前記半導体素子の第2の領域と前記半導体基板の第2の貫通電極とを接続していることを特徴とする基板。
A substrate on which electronic components are mounted,
The substrate comprises a semiconductor substrate ;
Said semiconductor base plate first with different formed conductive type, a semiconductor element made of the second region,
First and second through electrodes penetrating the semiconductor substrate;
First and second wiring layers formed on the semiconductor substrate;
Have
The first wiring layer connects the first region of the semiconductor element and the first through electrode of the semiconductor substrate;
The substrate, wherein the second wiring layer connects the second region of the semiconductor element and the second through electrode of the semiconductor substrate.
前記半導体基板は、P層と、該P層の一部に設けられたN層とからなり、
前記半導体素子の第1の領域が前記N層からなり、前記半導体素子の第2の領域が前記P層からなることを特徴とする請求項12に記載の基板。
The semiconductor substrate includes a P layer and an N layer provided in a part of the P layer,
The substrate according to claim 12, wherein a first region of the semiconductor element is made of the N layer, and a second region of the semiconductor element is made of the P layer .
前記第1、第2の配線層は、前記半導体基板の電子部品実装面側に絶縁層を介して形成され、前記絶縁層に形成された開口部を介して前記半導体素子の第1、第2の領域に接続されることを特徴とする請求項12または13に記載の基板。 The first and second wiring layers are formed on an electronic component mounting surface side of the semiconductor substrate via an insulating layer, and the first and second wirings of the semiconductor element are formed through openings formed in the insulating layer. The substrate according to claim 12 or 13, wherein the substrate is connected to a region of the substrate.
JP2007157807A 2006-06-16 2007-06-14 Semiconductor device, semiconductor device manufacturing method and substrate Active JP5394617B2 (en)

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JP2006168166 2006-06-16
JP2006168166 2006-06-16
JP2007157807A JP5394617B2 (en) 2006-06-16 2007-06-14 Semiconductor device, semiconductor device manufacturing method and substrate

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JP2008021987A5 true JP2008021987A5 (en) 2010-07-08
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