JP2008006437A5 - - Google Patents

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Publication number
JP2008006437A5
JP2008006437A5 JP2007166103A JP2007166103A JP2008006437A5 JP 2008006437 A5 JP2008006437 A5 JP 2008006437A5 JP 2007166103 A JP2007166103 A JP 2007166103A JP 2007166103 A JP2007166103 A JP 2007166103A JP 2008006437 A5 JP2008006437 A5 JP 2008006437A5
Authority
JP
Japan
Prior art keywords
door member
chamber
sealing surface
ball
lever arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007166103A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008006437A (ja
JP5519099B2 (ja
Filing date
Publication date
Application filed filed Critical
Publication of JP2008006437A publication Critical patent/JP2008006437A/ja
Publication of JP2008006437A5 publication Critical patent/JP2008006437A5/ja
Application granted granted Critical
Publication of JP5519099B2 publication Critical patent/JP5519099B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007166103A 2006-06-28 2007-06-25 ボール継手を有するバルブドア Active JP5519099B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US80606606P 2006-06-28 2006-06-28
US60/806,066 2006-06-28

Publications (3)

Publication Number Publication Date
JP2008006437A JP2008006437A (ja) 2008-01-17
JP2008006437A5 true JP2008006437A5 (zh) 2010-08-12
JP5519099B2 JP5519099B2 (ja) 2014-06-11

Family

ID=39035470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007166103A Active JP5519099B2 (ja) 2006-06-28 2007-06-25 ボール継手を有するバルブドア

Country Status (4)

Country Link
JP (1) JP5519099B2 (zh)
KR (2) KR100929718B1 (zh)
CN (1) CN101101066B (zh)
TW (1) TWI360614B (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101007711B1 (ko) * 2008-05-19 2011-01-13 주식회사 에스에프에이 플라즈마 처리장치
JP5490435B2 (ja) * 2009-03-31 2014-05-14 東京エレクトロン株式会社 ゲートバルブ装置
KR101105671B1 (ko) 2010-03-12 2012-01-18 (주)동광 방폭 도어용 로커 핀의 가이드구조
TWM476362U (en) * 2012-09-07 2014-04-11 Applied Materials Inc Load lock chamber with slit valve doors
KR101327251B1 (ko) * 2012-11-15 2013-11-13 주식회사 선익시스템 회전형 챔버도어
USD755153S1 (en) * 2014-06-20 2016-05-03 Zuna Designz, Llc Cell phone case with resilient suspension hook
WO2019067948A1 (en) * 2017-09-29 2019-04-04 Applied Materials, Inc. VACUUM CHAMBER INSULATION DEVICE OF CLOSURE MECHANISM AND SUBSYSTEM
CN108531871A (zh) * 2018-07-09 2018-09-14 山东三齐能源有限公司 一种连续镀膜溅镀系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LU74745A1 (zh) * 1976-04-12 1976-11-11
DE3047295A1 (de) * 1980-12-16 1982-07-29 Basf Ag, 6700 Ludwigshafen Verfahren zur kontinuierlichen herstellung alterungsbestaendiger aes-polymerisate
US5259881A (en) * 1991-05-17 1993-11-09 Materials Research Corporation Wafer processing cluster tool batch preheating and degassing apparatus
US4785962A (en) * 1987-04-20 1988-11-22 Applied Materials, Inc. Vacuum chamber slit valve
KR930009811A (ko) * 1991-11-08 1993-06-21 원본미기재 볼조인트(ball joint) 조립체와 만드는 방법
US7575220B2 (en) * 2004-06-14 2009-08-18 Applied Materials, Inc. Curved slit valve door
CN2709730Y (zh) * 2004-06-16 2005-07-13 锦州电炉有限责任公司 高真空转阀
US8061920B2 (en) 2006-11-29 2011-11-22 Wimberley, Inc. Pivoting ball mount having four equally spaced contact points

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