JP2007533105A - 単極双投ｍｅｍｓスイッチ - Google Patents

単極双投ｍｅｍｓスイッチ Download PDF

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Publication number
JP2007533105A
JP2007533105A JP2007508435A JP2007508435A JP2007533105A JP 2007533105 A JP2007533105 A JP 2007533105A JP 2007508435 A JP2007508435 A JP 2007508435A JP 2007508435 A JP2007508435 A JP 2007508435A JP 2007533105 A JP2007533105 A JP 2007533105A
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Japan
Prior art keywords
layer
toggle
mems switch
material layer
frit
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JP2007508435A
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Japanese (ja)
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JP2007533105A5 (https=
Inventor
ギャリー・ジョゼフ・パッシュビー
ティモシー・ジー・スレーター
グレン・ゴットリーブ
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シヴァータ・インコーポレーテッド
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Publication of JP2007533105A publication Critical patent/JP2007533105A/ja
Publication of JP2007533105A5 publication Critical patent/JP2007533105A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays

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  • Micromachines (AREA)
JP2007508435A 2004-04-12 2005-04-12 単極双投ｍｅｍｓスイッチ Pending JP2007533105A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US56119204P 2004-04-12 2004-04-12
US62993104P 2004-11-23 2004-11-23
PCT/US2005/012244 WO2005099410A2 (en) 2004-04-12 2005-04-12 Single-pole, double-throw mems switch

Publications (2)

Publication Number Publication Date
JP2007533105A true JP2007533105A (ja) 2007-11-15
JP2007533105A5 JP2007533105A5 (https=) 2008-05-29

Family

ID=35150451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007508435A Pending JP2007533105A (ja) 2004-04-12 2005-04-12 単極双投ｍｅｍｓスイッチ

Country Status (5)

Country Link
US (1) US7816999B2 (https=)
EP (1) EP1756848A4 (https=)
JP (1) JP2007533105A (https=)
KR (1) KR20060133057A (https=)
WO (1) WO2005099410A2 (https=)

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KR100661602B1 (ko) * 2005-12-09 2006-12-26 삼성전기주식회사 수직 구조 질화갈륨계 ｌｅｄ 소자의 제조방법
US20080175159A1 (en) * 2006-12-13 2008-07-24 Panduit Corp. High Performance Three-Port Switch for Managed Ethernet Systems
US9159514B2 (en) * 2013-11-18 2015-10-13 Tyco Electronics Corporation Relay connector assembly for a relay system
CN104183425B (zh) * 2014-08-29 2016-03-02 电子科技大学 一种射频mems单刀双掷开关
US9758366B2 (en) 2015-12-15 2017-09-12 International Business Machines Corporation Small wafer area MEMS switch
EP4464657B1 (de) * 2023-05-05 2025-12-10 Hahn-Schickard-Gesellschaft für angewandte Forschung e. V. Halbleiterbauteil umfassend einen mems-sensor oder mems-aktuator sowie verfahren zu dessen herstellung

Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2002334645A (ja) * 2001-04-26 2002-11-22 Samsung Electronics Co Ltd Ｍｅｍｓリレイ及びその製造方法

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KR100620341B1 (ko) * 1998-09-02 2006-09-13 엑스로스, 인크. 비틀림 굴곡 힌지에 의해 상대 회전하도록 연결된 미세가공 구조체
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US7087134B2 (en) * 2004-03-31 2006-08-08 Hewlett-Packard Development Company, L.P. System and method for direct-bonding of substrates
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Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002334645A (ja) * 2001-04-26 2002-11-22 Samsung Electronics Co Ltd Ｍｅｍｓリレイ及びその製造方法

Also Published As

Publication number Publication date
US7816999B2 (en) 2010-10-19
WO2005099410A3 (en) 2007-08-23
WO2005099410A2 (en) 2005-10-27
KR20060133057A (ko) 2006-12-22
EP1756848A4 (en) 2009-12-23
EP1756848A2 (en) 2007-02-28
US20070205087A1 (en) 2007-09-06

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