JP2007518272A - 歪みfinfetチャネルの製造方法 - Google Patents
歪みfinfetチャネルの製造方法 Download PDFInfo
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- JP2007518272A JP2007518272A JP2006549312A JP2006549312A JP2007518272A JP 2007518272 A JP2007518272 A JP 2007518272A JP 2006549312 A JP2006549312 A JP 2006549312A JP 2006549312 A JP2006549312 A JP 2006549312A JP 2007518272 A JP2007518272 A JP 2007518272A
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- 238000000034 method Methods 0.000 title claims abstract description 79
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000004065 semiconductor Substances 0.000 claims abstract description 60
- 150000001875 compounds Chemical class 0.000 claims abstract description 32
- 239000000463 material Substances 0.000 claims description 33
- 229910052710 silicon Inorganic materials 0.000 claims description 22
- 239000010703 silicon Substances 0.000 claims description 22
- 229910000577 Silicon-germanium Inorganic materials 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 13
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 11
- 230000001939 inductive effect Effects 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 5
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000009413 insulation Methods 0.000 claims description 2
- 238000000407 epitaxy Methods 0.000 claims 1
- 230000008569 process Effects 0.000 description 40
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 20
- 239000004020 conductor Substances 0.000 description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229920005591 polysilicon Polymers 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 239000002800 charge carrier Substances 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000000059 patterning Methods 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000001451 molecular beam epitaxy Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000006117 anti-reflective coating Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910017817 a-Ge Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 150000002290 germanium Chemical class 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/785—Field effect transistors with field effect produced by an insulated gate having a channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66787—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel
- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/7842—Field effect transistors with field effect produced by an insulated gate means for exerting mechanical stress on the crystal lattice of the channel region, e.g. using a flexible substrate
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Thin Film Transistor (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Abstract
Description
他の形態では、コンダクタ166はチャネル領域152の隣接する側面163だけに提供される。
Claims (10)
- フィン形のチャネル領域(152)を形成する方法であって、
絶縁層(130)上に化合物半導体層(140)を供給するステップ、
前記化合物半導体層(140)にトレンチ(142)を供給するステップ、
前記化合物半導体層(140)上および前記フィン形のチャネル領域(152)に関連づけられた前記トレンチ(142)内に歪み半導体層(144)を供給するステップ、
前記化合物半導体層(140)上から前記歪み半導体層(144)を除去し、その結果、前記歪み半導体層(144)を前記トレンチ(142)内に残すステップ、および、
前記歪み半導体層(144)を残し、かつ、前記フィン形のチャネル領域(152)を形成するために、前記化合物半導体層(140)を除去するステップ、
を含む方法。 - 前記フィン形のチャネル領域(152)の側壁に隣接して酸化物材料を供給するとともに、前記酸化物材料(160)上にゲート電極(166)を提供するステップをさらに含む、請求項1記載の方法。
- 前記フィン形のチャネル領域(152)はシリコンを含み、前記化合物半導体層(140)はシリコンゲルマニウム層である、請求項1記載の方法。
- 前記第2の除去ステップは、ソース領域(22)とドレイン領域(24)の化合物半導体層(140)部分を保護するマスク(134)を利用する、請求項1記載の方法。
- FinFETチャネル構造の形成方法であって、
シリコンおよびゲルマニウムを含む第1層(140)を基板上の絶縁層(130)に供給するステップ、
前記絶縁層(130)まで延びる前記開口部(142)を前記第1層に供給するステップ、
前記開口部(142)内に歪み材料(144)を供給するステップ、および、
前記歪み材料(144)を残すように前記第1層(140)を除去するステップ、
を含む方法。 - 前記歪み材料(144)の側壁および上部に沿ってゲート絶縁構造(160)を形成するステップをさらに含む、請求項5記載の方法。
- 前記歪み材料(144)は選択的エピタキシーによって前記第1層(140)上に供給される、請求項6記載の方法。
- フィンベースのトランジスタを含む集積回路の製造方法であって、
絶縁材料(130)を供給するステップ、
前記絶縁材料(130)上に歪み誘発層(140)を供給するステップ、
前記歪み誘発層(140)に開口部(142)を供給するステップ、
選択的エピタキシャル成長によって前記開口部(142)に歪み材料(144)を形成するステップ、
前記歪み誘発層(140)の少なくとも一部を除去し、フィン構造として前記歪み材料を残すステップ、および、
前記フィン構造(152)のためにゲート構造(166)を提供するステップ、
を含む方法。 - 前記開口部(142)の幅はおおよそ20から120nmである、請求項8記載の方法。
- 前記除去ステップは、シリコンゲルマニウムに対して選択性を持つエッチングステップである、請求項5または8記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/755,763 US7138302B2 (en) | 2004-01-12 | 2004-01-12 | Method of fabricating an integrated circuit channel region |
PCT/US2004/043106 WO2005071728A1 (en) | 2004-01-12 | 2004-12-21 | Method of fabricating a strained finfet channel |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007518272A true JP2007518272A (ja) | 2007-07-05 |
JP2007518272A5 JP2007518272A5 (ja) | 2008-02-14 |
Family
ID=34739641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006549312A Pending JP2007518272A (ja) | 2004-01-12 | 2004-12-21 | 歪みfinfetチャネルの製造方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7138302B2 (ja) |
EP (1) | EP1723668B1 (ja) |
JP (1) | JP2007518272A (ja) |
KR (1) | KR101065049B1 (ja) |
CN (1) | CN100477126C (ja) |
DE (2) | DE602004006782T2 (ja) |
TW (1) | TWI360197B (ja) |
WO (1) | WO2005071728A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012212756A (ja) * | 2011-03-31 | 2012-11-01 | Takehide Shirato | 半導体記憶装置 |
JP2013055206A (ja) * | 2011-09-03 | 2013-03-21 | Takehide Shirato | 半導体装置及びその製造方法 |
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US7074623B2 (en) * | 2002-06-07 | 2006-07-11 | Amberwave Systems Corporation | Methods of forming strained-semiconductor-on-insulator finFET device structures |
KR100618852B1 (ko) * | 2004-07-27 | 2006-09-01 | 삼성전자주식회사 | 높은 동작 전류를 갖는 반도체 소자 |
US7393733B2 (en) | 2004-12-01 | 2008-07-01 | Amberwave Systems Corporation | Methods of forming hybrid fin field-effect transistor structures |
US7271448B2 (en) * | 2005-02-14 | 2007-09-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multiple gate field effect transistor structure |
US9153645B2 (en) | 2005-05-17 | 2015-10-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
US8324660B2 (en) | 2005-05-17 | 2012-12-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Lattice-mismatched semiconductor structures with reduced dislocation defect densities and related methods for device fabrication |
WO2007112066A2 (en) | 2006-03-24 | 2007-10-04 | Amberwave Systems Corporation | Lattice-mismatched semiconductor structures and related methods for device fabrication |
US7365401B2 (en) * | 2006-03-28 | 2008-04-29 | International Business Machines Corporation | Dual-plane complementary metal oxide semiconductor |
WO2008030574A1 (en) | 2006-09-07 | 2008-03-13 | Amberwave Systems Corporation | Defect reduction using aspect ratio trapping |
WO2008039495A1 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Tri-gate field-effect transistors formed by aspect ratio trapping |
WO2008039534A2 (en) | 2006-09-27 | 2008-04-03 | Amberwave Systems Corporation | Quantum tunneling devices and circuits with lattice- mismatched semiconductor structures |
WO2008051503A2 (en) | 2006-10-19 | 2008-05-02 | Amberwave Systems Corporation | Light-emitter-based devices with lattice-mismatched semiconductor structures |
US7772048B2 (en) * | 2007-02-23 | 2010-08-10 | Freescale Semiconductor, Inc. | Forming semiconductor fins using a sacrificial fin |
US8237151B2 (en) | 2009-01-09 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Diode-based devices and methods for making the same |
US8304805B2 (en) | 2009-01-09 | 2012-11-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor diodes fabricated by aspect ratio trapping with coalesced films |
US7825328B2 (en) | 2007-04-09 | 2010-11-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Nitride-based multi-junction solar cell modules and methods for making the same |
US9508890B2 (en) | 2007-04-09 | 2016-11-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photovoltaics on silicon |
US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
CN101884117B (zh) | 2007-09-07 | 2013-10-02 | 台湾积体电路制造股份有限公司 | 多结太阳能电池 |
US8183667B2 (en) | 2008-06-03 | 2012-05-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Epitaxial growth of crystalline material |
US8274097B2 (en) | 2008-07-01 | 2012-09-25 | Taiwan Semiconductor Manufacturing Company, Ltd. | Reduction of edge effects from aspect ratio trapping |
US8981427B2 (en) | 2008-07-15 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Polishing of small composite semiconductor materials |
US7872303B2 (en) * | 2008-08-14 | 2011-01-18 | International Business Machines Corporation | FinFET with longitudinal stress in a channel |
US20100072515A1 (en) | 2008-09-19 | 2010-03-25 | Amberwave Systems Corporation | Fabrication and structures of crystalline material |
US8034697B2 (en) | 2008-09-19 | 2011-10-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Formation of devices by epitaxial layer overgrowth |
US8253211B2 (en) | 2008-09-24 | 2012-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor sensor structures with reduced dislocation defect densities |
WO2010114956A1 (en) | 2009-04-02 | 2010-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Devices formed from a non-polar plane of a crystalline material and method of making the same |
FR3029011B1 (fr) * | 2014-11-25 | 2018-04-13 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede ameliore de mise en contrainte d'une zone de canal de transistor |
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2004
- 2004-01-12 US US10/755,763 patent/US7138302B2/en not_active Expired - Lifetime
- 2004-12-21 DE DE602004006782T patent/DE602004006782T2/de active Active
- 2004-12-21 CN CNB2004800403064A patent/CN100477126C/zh not_active Expired - Fee Related
- 2004-12-21 EP EP04815218A patent/EP1723668B1/en not_active Expired - Fee Related
- 2004-12-21 JP JP2006549312A patent/JP2007518272A/ja active Pending
- 2004-12-21 DE DE112004002641T patent/DE112004002641B4/de active Active
- 2004-12-21 WO PCT/US2004/043106 patent/WO2005071728A1/en active IP Right Grant
- 2004-12-21 KR KR1020067013878A patent/KR101065049B1/ko not_active IP Right Cessation
-
2005
- 2005-01-07 TW TW094100446A patent/TWI360197B/zh not_active IP Right Cessation
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JP2012212756A (ja) * | 2011-03-31 | 2012-11-01 | Takehide Shirato | 半導体記憶装置 |
JP2013055206A (ja) * | 2011-09-03 | 2013-03-21 | Takehide Shirato | 半導体装置及びその製造方法 |
Also Published As
Publication number | Publication date |
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KR101065049B1 (ko) | 2011-09-19 |
TW200529367A (en) | 2005-09-01 |
DE112004002641B4 (de) | 2009-01-02 |
DE602004006782D1 (de) | 2007-07-12 |
EP1723668B1 (en) | 2007-05-30 |
WO2005071728A1 (en) | 2005-08-04 |
DE602004006782T2 (de) | 2008-01-24 |
DE112004002641T5 (de) | 2006-12-14 |
TWI360197B (en) | 2012-03-11 |
KR20060130098A (ko) | 2006-12-18 |
CN1902744A (zh) | 2007-01-24 |
EP1723668A1 (en) | 2006-11-22 |
CN100477126C (zh) | 2009-04-08 |
US7138302B2 (en) | 2006-11-21 |
US20050153486A1 (en) | 2005-07-14 |
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