JP2007514183A5 - - Google Patents

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Publication number
JP2007514183A5
JP2007514183A5 JP2006538384A JP2006538384A JP2007514183A5 JP 2007514183 A5 JP2007514183 A5 JP 2007514183A5 JP 2006538384 A JP2006538384 A JP 2006538384A JP 2006538384 A JP2006538384 A JP 2006538384A JP 2007514183 A5 JP2007514183 A5 JP 2007514183A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006538384A
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JP2007514183A (ja
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Publication date
Priority claimed from US10/699,140 external-priority patent/US6862127B1/en
Application filed filed Critical
Publication of JP2007514183A publication Critical patent/JP2007514183A/ja
Publication of JP2007514183A5 publication Critical patent/JP2007514183A5/ja
Pending legal-status Critical Current

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JP2006538384A 2003-11-01 2004-10-29 高性能マイクロミラー配列素子および高性能マイクロミラー配列素子の製造方法 Pending JP2007514183A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/699,140 US6862127B1 (en) 2003-11-01 2003-11-01 High performance micromirror arrays and methods of manufacturing the same
PCT/US2004/036241 WO2005045505A1 (en) 2003-11-01 2004-10-29 High performance micromirror arrays and methods of manufacture the same

Publications (2)

Publication Number Publication Date
JP2007514183A JP2007514183A (ja) 2007-05-31
JP2007514183A5 true JP2007514183A5 (ja) 2008-01-10

Family

ID=34194946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006538384A Pending JP2007514183A (ja) 2003-11-01 2004-10-29 高性能マイクロミラー配列素子および高性能マイクロミラー配列素子の製造方法

Country Status (3)

Country Link
US (1) US6862127B1 (ja)
JP (1) JP2007514183A (ja)
WO (1) WO2005045505A1 (ja)

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US8358266B2 (en) * 2008-09-02 2013-01-22 Qualcomm Mems Technologies, Inc. Light turning device with prismatic light turning features
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