JP2007331194A - Metal mask and printing method employing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal mask, which is made of a metal layer and is employed for a fabric-free printing and which develops no tendency for becoming thickening from the end part of a line pattern to its central part in the line pattern made of printing material obtained by printing and consequently the line pattern with a desired line width can be formed. <P>SOLUTION: In the printing metal mask 10 made of the metal layer provided with openings 11 each made of a through hole, line opening patterns 11A each having a line-like opening are prepared so hat, in the line opening pattern 11A, the opening width W2 at the longitudinal middle 11c is made to be narrower than the opening width W1 at each of longitudinal end parts 11a and 11b under the state that the opening width becomes gradually narrower from each of the longitudinal end parts 11a and 11b to the longitudinal middle 11c. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a metal mask and a printing method using the metal mask, and in particular, a line made of a printing material used in the field of electronics such as an image sensor, a MEMS (Micro Electro Mechanical System), and an electronic component such as a liquid crystal display material. The present invention relates to a printing matal mask capable of printing a pattern with high accuracy by sliding with a squeegee, and a printing method using such a metal mask.

A metal mask for printing that does not use wrinkles (hereinafter referred to simply as a metal mask), which is provided with an opening made of a through hole, and has a line pattern. When printing is performed by placing a printing material on the upper surface of the metal mask and sliding (squeezing) the squeegee while touching the substrate to be printed at the bottom of the squeegee, the resulting line is centered from the end of the line. There is a tendency to get thicker over the part.
In particular, this tendency is often observed in a printing material having a relatively low viscosity (viscosity of 30 to 300 [Pa · s] at a shear rate of 10 [1 / s]).
In brief, when printing is performed by sliding a squeegee using a metal mask having the linear openings 111 and 115 shown in FIG. 9A (hereinafter also referred to as squeezing), FIG. As shown, the line pattern 165 made of the printing material 160 formed by the opening pattern 115 tends to become thicker from the end of the line to the center.

On the other hand, in cream solder printing where the printing material has a high viscosity, when printing is performed using a metal mask having a line pattern, the resulting line is not uniform and is an area corresponding to the center of the line of the opening of the metal mask. It is known that cream solder concentrates and remains.
For example, in Japanese Patent Laid-Open No. 2001-212928, surface mount electronic components such as QFP (Quad Flat Package) are mounted on a circuit board by printing cream solder on lands on the circuit board in advance, and electronic components on the land. This is done by batch soldering the electronic components on the circuit board in a reflow furnace. During the cream solder printing process, all the cream solder filled in the openings by squeezing is placed on the circuit board. Since it cannot be supplied, cream solder remains at each end of the mask opening, and printing defects such as fading of the cream solder occur.
Further, the clogging of the opening occurs due to the cream solder remaining in the mask opening, and thereafter, the printing failure of the cream solder is caused on all printed circuit boards.
In order to eliminate such problems, it is known that each end of the opening of the metal mask in the longitudinal direction is formed wider than the center of the opening.
Japanese Patent Laid-Open No. 2001-212928 (Patent Document 1)

On the other hand, many methods for providing a taper in the thickness direction of the opening of the metal mask are known.
Many of them are methods for improving the ability to remove cream solder printing, and examples thereof include those described below.
Japanese Patent Laid-Open No. 5-507776 (Patent Document 2) Japanese Patent No. 3120189 (Patent Document 3) Patent No. 3010329 (Patent Document 4) JP-A-10-305670 (Patent Document 5) Japanese Patent Laid-Open No. 11-222664 (Patent Document 6) JP 2002-187374 A (Patent Document 7) JP 2002-192850 A (Patent Document 8)

As described above, when the shear rate is 10 [1 / s], the low-viscosity printing material having a viscosity in the range of 30 to 300 [Pa · s] is used, and the metal layer provided with the opening made of the through hole is provided. When printing a line pattern with a metal mask for printing that does not use wrinkles, the resulting line tends to become thicker from the end to the center of the line, which is a problem. It was sought after.
In particular, in the field of electronics such as image sensors, MEMS (Micro Electro Mechanical Systems), liquid crystal display materials, etc., while further miniaturization and high quality are required, such printing is performed from the end of the line pattern to the center. There has been a demand for a method capable of forming a line pattern having a desired line width without being thickened over the portion. The present invention corresponds to this, specifically, in a line pattern made of a printing material obtained by printing with a metal mask for printing that does not use wrinkles made of a metal layer, from the end of the line pattern. An object of the present invention is to provide a metal mask capable of forming a line pattern having a desired line width without showing a tendency to become thicker toward the center.
In particular, when a low-viscosity printing material having a viscosity of 30 to 300 [Pa · s] is used at a shear rate of 10 [1 / s], the line pattern becomes thicker from the end to the center. It is an object of the present invention to provide a metal mask that does not show a tendency and can form a line pattern having a desired line width.
At the same time, the present invention intends to provide a printing method using such a metal mask.

The metal mask of the present invention is a printing metal mask made of a metal layer provided with an opening made of a through-hole, and has a line opening pattern that is a line-shaped opening, and the line opening pattern is The opening width is gradually narrowed from each end in the longitudinal direction to the center in the longitudinal direction so that the opening width at the center in the longitudinal direction is narrower than the opening width at each end in the longitudinal direction. It is characterized by that.
In the metal mask described above, each of the opening side portions in the longitudinal direction gradually moves toward the inside of the opening until the line opening pattern reaches the center in the longitudinal direction from each end portion in the longitudinal direction. It is characterized by forming a straight line.
Further, in any one of the above metal masks, a metal mask having an opening pattern in which a bridge is provided, having a structure in which a bridge connecting both sides bordered by the opening to the line opening pattern is provided, One side of the bridge is aligned with the surface of the metal mask on the side where the squeegee slides during printing, and all or part of the other side of the bridge is recessed from the back surface that is not the front side of the metal mask, Connecting the openings on both sides of the bridge, it is characterized by being arranged so as to stride across the width direction of the bridge, the depression of the shape recessed from the back surface, the depression of the bridge portion, It is processed by half-etching.
Also, any of the above metal masks, the printed material is placed on the lower surface of the metal mask, the printing material is placed on the upper surface, and the squeegee slides (squeezes) while contacting the printed material at the lower part of the squeegee. Thus, the printing material is used in a printing method in which a printing material is passed through a provided opening and a pattern made of the printing material is transferred and formed on a substrate.
Here, “a metal mask for printing made of a metal layer provided with an opening made of a through-hole” means a mask made only of a metal layer that does not use a ridge for the opening. , The side of the line-shaped opening.
Moreover, the dent of a bridge part means the dent of a bridge formation area.

A printing method using a metal mask according to the present invention is a printing method using a metal mask, and printing is performed using the metal mask according to any one of claims 1 to 6.
Then, in the printing method using the metal mask, a substrate is placed on the lower surface of the metal mask, a printing material is placed on the upper surface of the metal mask, and the squeegee is slid while being in contact with the substrate under the squeegee (squeegee). ), The printing material is filled into the opening provided in the metal mask, and the portion of the metal mask in contact with the printed material moves away from the printed material as the squeegee moves. It is characterized by being transferred.

(Function)
The metal mask of the present invention is a line pattern made of a printing material obtained by printing with a metal mask for printing that does not use a wrinkle by using such a configuration, and from the end of the line pattern. It is possible to provide a metal mask capable of forming a line pattern having a desired line width without a tendency to become thicker toward the center.
Specifically, it has a line opening pattern that is a line-shaped opening, and the line opening pattern is such that the opening width at the center in the longitudinal direction is narrower than the opening width at each end in the longitudinal direction, This is achieved by gradually reducing the opening width from each end in the longitudinal direction to the center in the longitudinal direction.
Specifically, in the line opening pattern, each opening side portion in the longitudinal direction gradually forms a straight line toward the inside of the opening from each end portion in the longitudinal direction to the center in the longitudinal direction. By adopting the form of the invention of Item 2, this can be achieved relatively easily. And in the metal mask according to any one of claims 1 to 2, an opening pattern in which a bridge is arranged in a structure in which a bridge that connects both sides bordered by the opening to the line opening pattern is provided. According to the third aspect of the invention, the width of the opening is gradually narrowed from each end in the longitudinal direction of the line opening pattern to the center in the longitudinal direction, but a bridge is provided. Compared to the case where there is not, the amount of narrowing is reduced, and a desired line width can be stably obtained.
In addition, the degree of freedom in design can be increased by providing a bridge.
Note that one side of the bridge is aligned with the surface of the metal mask on the side where the squeegee slides during printing, and the other side of the bridge is entirely or partially recessed from the back surface of the metal mask that is not the front side. In addition, the depressions that are recessed from the back surface that connect the openings on both sides of the bridge are arranged so as to straddle the width direction of the bridge, so that the printed material can be printed even in the bridge region. Printing is possible, and printing by the openings on both sides of the bridge is not cut even in the bridge region.
Further, in the case of the form of the invention according to claim 4, wherein the depression of the bridge portion is processed by half-etching, the depression can be formed with high accuracy, and the workability of the production can be improved.
Further, the metal mask of the present invention is provided by placing the printing material on the lower surface thereof, placing the printing material on the upper surface, and sliding (squeezing) the squeegee while contacting the printing material at the lower part of the squeegee. The present invention can be applied to a known printing method in which a printing material is passed through a formed opening and a pattern made of the printing material is transferred and formed on a printing material, and is highly versatile.
When the shear rate is 10 [1 / s], it is particularly effective when the printing material is used for printing a low-viscosity printing material having a viscosity of 30 to 300 [Pa · s].

  The printing method using the metal mask according to the present invention is a line pattern made of a printing material obtained by printing with a metal mask for printing that does not use wrinkles, which is composed of a metal layer, by using such a configuration. It is possible to provide a printing method using a metal mask that does not show a tendency to become thicker from the end to the center and can form a line pattern having a desired line width.

As described above, the present invention is a line pattern obtained by printing with a metal mask for printing that does not use wrinkles, which consists of a metal layer, and it tends to become thicker from the end to the center of the line pattern. Accordingly, it is possible to provide a metal mask capable of forming a line pattern having a desired line width and a printing method using the metal mask.
In particular, when a low-viscosity printing material having a viscosity of 30 to 300 [Pa · s] is used at a shear rate of 10 [1 / s], the center portion of the printed line pattern is obtained. Thus, it is possible to obtain a uniform line width from the start point to the end point of the line pattern without causing line thickening.

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1A is a schematic configuration diagram showing a usage state of the first example of the embodiment of the metal mask of the present invention, and FIG. 1B shows the opening pattern of the metal mask of the first example. FIG. 1C is a cross-sectional view taken along A1-A2 in FIG.
FIG. 2A is a view of the opening pattern of the metal mask of the second example of the embodiment of the metal mask according to the present invention as viewed from the squeegee sliding side, and FIG. 2B is B1 in FIG. -B2 is a cross-sectional view, FIG. 3 is a view of the opening pattern of the metal mask of the second example shown in FIG. 2A viewed from the side opposite to the squeegee sliding side, and FIG. FIG. 4B is a diagram showing the shape of the opening of the example metal mask, FIG. 4B is a diagram showing a line pattern made of a printing material formed by the opening shown in FIG. 4A, and FIG. FIG. 5B is a diagram showing the shape of the opening of the metal mask of the second example, and FIG. 5B is a diagram showing a line pattern made of a printing material formed by the opening shown in FIG. FIGS. 7A to 6D are process cross-sectional views of an example of the method for forming the opening of the metal mask of the first example. FIGS. FIG. 8D is a process cross-sectional view of another example of the method for forming the opening of the metal mask of the first example. FIGS. 8A1 to 8C1 and FIGS. 8A2 to 8C2 It is process sectional drawing which showed the formation process of the bridge | bridging part and opening in the metal mask of a 2nd example, respectively.
The cross sections in FIGS. 1C and 2B are schematic shapes, and are actually the cross sectional shapes shown in FIGS. 6 and 7 formed by etching in FIG. 6 or FIG. .
Moreover, the dotted line arrow in FIG. 3 has shown the flow direction and direction of printing material.
8 (a1) and FIG. 8 (a2), FIG. 8 (b1) and FIG. 8 (b2), and FIG. 8 (c1) and FIG. 8 (c2) show states in the same processing step. is there.
Hereinafter, one surface of the metal mask on the side where the squeegee slides during printing is referred to as a front surface, and the other surface of the metal mask opposite to the front surface is referred to as a back surface.
1 to 8, 10 and 10a are metal masks, 10A is a processing material (also referred to as a metal layer), 11 is an opening (also referred to as a through hole), 11A is a line opening pattern, 11a and 11b are end portions, and 11c. Is the center (also referred to as the center, center), 12 is the bridge, 12a is the bridge (also referred to as a thin portion), 12b is a recess (also referred to as a recess), 13 is a masking portion (also referred to as a thick portion), and 13S1 is Squeegee sliding side surface (also referred to as the front surface), 13S2 is a surface opposite to the squeegee sliding side (also referred to as the back surface), 20 is a support portion (also referred to as a frame portion), and 25 is a member for expansion (here, scissors) ), 31 is a squeegee, 32 is a support portion, 40 is a substrate, 50 is a printing table, 60 is a printing material, 61 and 62 are line patterns, 80 is a photoresist, 85, 86, and 86a are openings of (resist), 87, 8,88a is (resist) opening.

First, a first example of the embodiment of the metal mask of the present invention will be described with reference to FIG.
The metal mask 10 of the first example is a metal mask made of a metal layer that does not use ridges and has an opening made of a through hole, and as shown in FIG. The squeegee 31 slides (squeezing) while placing it on the printing stand 50 and placing the printing material 60 on the upper surface of the printing stand 50 so as to be in contact with the printed material at the lower part of the squeegee 31 and away from the printed material at other than the lower part of the squeegee 31. The printing metal mask is used for printing in which the printing material is passed through the provided opening, and the pattern made of the printing material is transferred and formed on the printing material.
Here, as shown in FIG. 1A, the metal mask 10 is fixed to the frame portion 20 in a state where the entire outer periphery thereof is evenly stretched via a member 25 for expansion composed of ridges.
And in particular, it has a line opening pattern 11A which is a line-shaped opening, and the line opening pattern 11A is longer in the longitudinal direction of the opening than the opening width W1 in each end 11a, 11b in the longitudinal direction of the opening 11. The opening width W2 at the center 11c of the opening 11 is narrowed so that the opening width is gradually reduced from the end portions 11a and 11b in the longitudinal direction of the opening 11 to the center 11c of the opening in the longitudinal direction. The line opening pattern 11A is such that each side of the opening in the longitudinal direction gradually extends from the end 11a, 11b in the longitudinal direction of the opening 11 to the center 11c in the longitudinal direction of the opening 11. A straight line toward the inside of the opening is formed.
When the printing mask of the first example is used, a line pattern made of the printing material 60 is printed on the substrate 40 by sliding the squeegee.
Corresponding to each opening pattern 11A shown in FIG. 4A (same as FIG. 1B), each line pattern 61 made of a printing material is printed and formed as shown in FIG. 4B.
Each line pattern 61 to be printed does not tend to become thicker from the end portion to the center portion of the line pattern, and the width W1 and the center 11c of the opening 11 at the end portions 11a and 11b shown in FIG. By appropriately selecting the width W2 of the opening 11 in FIG.

The metal mask of the first example has a single metal layer formed by etching using photolithography, and the A1-A2 cross section of the opening 11 in FIG. 1B is shown in FIG. ).
Here, a stainless steel material (SUS304) having a thickness of about 0.1 mm to 0.2 mm is generally used as the metal layer, but aluminum, nickel, or the like is also used.

The metal mask of the first example can be manufactured by etching using a photolithography method, laser processing, electroforming, or the like, but is not limited thereto.
As an etching process using the photolithographic method, etching is performed only from one side of the metal layer to form an opening made of a through hole, or an opening made of a through hole to be etched from both sides of the metal layer is formed. There is a double-sided etching method.
One example of the production of the metal mask of the first example by the single-sided etching method will be briefly described based on FIG.
First, after applying an etching-resistant photoresist on both surfaces of a processing material 10A made of a single metal layer of stainless steel (SUS304), a predetermined selective exposure is performed using a predetermined mask, and development is performed. A photoresist 80 is formed in the opening 11 formation region of the mask 10 by opening only the photoresist on one side and not opening the other side. (Fig. 6 (a))
The photoresist 80 is preferably one having a predetermined resolution and good processability, but is not particularly limited.
It is formed on both sides by coating or dry film resist.
Next, the photoresist 80 is used as an etching resistant layer, the ferric chloride solution is used as an etchant, and sprayed from one side or both sides under a predetermined condition (spray pressure, etc.) to be exposed from the opening 85 of the photoresist. The portion of the processing material 10A that has been etched is etched and penetrated to form an opening 11 made of a desired through hole, and the etching is stopped. (FIGS. 6B to 6C)
Next, the photoresist 80 is removed with a predetermined stripping solution, and a cleaning process or the like is performed to obtain the metal mask of the first example. (Fig. 6 (d))
Next, an example of the production of the metal mask of the first example by the double-sided etching method will be briefly described based on FIG.
First, after applying an etching-resistant photoresist on both surfaces of a processing material 10A made of a single metal layer of stainless steel (SUS304), a predetermined selective exposure is performed using a predetermined mask, and development is performed. A photoresist 80 is formed by opening the photoresist on both sides of the opening 11 formation region of the mask 10. (Fig. 7 (a))
Next, the photoresist 80 was used as an etching resistant layer, and a ferric chloride solution was used as an etching solution, sprayed from both sides under predetermined conditions (spray pressure, etc.) to expose the photoresist openings 86 and 86a. The part of the processing material 10A is etched and penetrated to form an opening 11 made of a desired through hole, and the etching is stopped. (FIG. 7 (b) to FIG. 7 (c))
Next, the photoresist 80 is removed with a predetermined stripping solution, and a cleaning process or the like is performed to obtain the metal mask of the first example. (Fig. 7 (d))
Although the cross-sectional shape of the opening 11 formed of the through hole formed by the single-sided etching method shown in FIG. 6 and the double-sided etching method shown in FIG. 7 is slightly different, the processing material 10A has a thin thickness of about 0.1 mm to 0.2 mm. In this case, the difference between the minimum width and the maximum width of the opening can be formed small, and both methods can be applied similarly.
Here, the difference between the minimum width and the maximum width of the opening is small, but the term “opening width” means the minimum width.
In the laser processing, for example, a general-purpose laser processing apparatus using a YAG laser is used to irradiate and penetrate the opening 11 formation region formed of the through hole of the processing material 10A under a predetermined condition.
Fabrication by the electroforming method is common and is omitted here.

Next, a second example of the embodiment of the metal mask of the present invention will be described with reference to FIG.
As shown in FIG. 2A, the metal mask 10a of the second example is the center 11c in the longitudinal direction of the opening 11 with respect to the line opening pattern 11A in the first example metal mask shown in FIG. 2 is a metal mask having an opening pattern in which a bridge is arranged, which has a structure in which bridges 12a connecting both sides bounded by the opening 11 are provided.
Then, as shown in FIG. 2B, the B12-B2 cross section of the bridge 12a has one side of the bridge 12a aligned with the surface 13S1 of the metal mask on the side where the squeegee slides during printing, and the other side of the bridge 12a. The entire side is recessed from the back surface 13S2 which is not the front surface side of the metal mask, and the depressions 11b which are recessed from the back surface 13S2 are connected across the openings 11 on both sides of the bridge 12a so as to straddle the width direction of the bridge 12a. It is what we have arranged.
Similarly to the metal mask of the first example, the metal mask 10a of the second example is a metal mask made of a metal layer that does not use a ridge and is provided with an opening made of a through hole. As in the case of the metal mask 10 of the first example shown, the substrate 40 is separated from the lower surface and placed on the printing table 50, the printing material 60 is placed on the upper surface, and the substrate is in contact with the lower portion of the squeegee 31. However, by sliding (squeezing) the squeegee 31 while separating from the printing material except at the lower part of the squeegee 31, the printing material is passed through the provided opening, and a pattern made of the printing material is transferred and formed on the printing material. It is a metal mask for printing used for printing. Of course, here as well, the metal mask 10a is uniformly stretched through the extending member 25 made of ridges as in the case of the metal mask 10 of the first example shown in FIG. It is fixed to the frame part 20 in a state.
In the second example, the width W3 (see FIG. 2B) in the width direction of the opening 11 of the recess 12c is provided to be the width of the opening 11, but this is not limitative.
The depth H1 of the recess 12b (see FIG. 2B) is the printing conditions (material to be printed, printing thickness, etc.), bridge strength, width W3, bridge length (center 11c shown in FIG. 1B). Is determined as appropriate in relation to the width W2) of the opening in FIG.
By arranging such a recess 12b on the back surface 13S2 opposite to the front surface 13S1 of the bridge 12a, the printing material can move through the recess 12b as shown in FIG. As shown in FIG. 5B, when the metal mask of the second example shown in FIG. 2A (same as FIG. 5A) is used, as shown in FIG. The line pattern 62 can be formed by printing.
FIG. 3 is a view of the opening pattern of the metal mask of the second example shown in FIG. 2A as viewed from the side opposite to the squeegee sliding side.

The metal mask 10a of the second example shown in FIG. 2 is manufactured by etching using, for example, a photolithography method.
Hereinafter, an example of the manufacturing method will be briefly described based on FIGS. 8A1 to 8C1 and 8A2 to 8C2.
As described above, FIGS. 8A1 to 8C1 and 8A2 to 8C2 are process cross-sectional views showing the steps of forming the bridge portion 12 and the opening 11, respectively. 8 (a1) and FIG. 8 (a2), FIG. 8 (b1) and FIG. 8 (b2), and FIG. 8 (c1) and FIG. 8 (c2) show states in the same processing step. It is.
First, an etching-resistant photoresist 80 is formed on both surfaces of a processing material 10A made of a single metal layer of stainless steel (SUS304), and exposure and development are performed using a predetermined exposure pattern to obtain a desired opening. 85 is formed. (Fig. 8 (a1), Fig. 8 (a2))
Also here, the photoresist 80 is preferably one having predetermined resolution and good processability, but is not particularly limited.
It is formed on both sides by coating or dry film resist.
As shown in FIG. 8 (a2), openings (corresponding to 11 in FIG. 2 (a)) are provided with photoresist openings 88 and 88a for forming openings on both sides of the processing material 10A. As shown in FIG. 8 (a1), the bridge portion (12 in FIG. 2 (a)) is formed on the recess forming side of the processing material 10A (corresponding to 12b in FIG. 2 (b)). A photoresist opening 87 for forming the depression is provided.
Next, using the photoresist 80 as an etching-resistant layer, the portion 10A of the child term material exposed from the openings 87, 88, 88a is etched to form the bridge portion 12 (FIG. 8 (b1)) and the opening (through hole), respectively. ) 11 (FIG. 8 (b2)).
Here, the ferric chloride solution is sprayed from both sides at the same time by spraying under a predetermined condition (spray pressure or the like), and etching is performed. However, a method of performing etching processing one side at a time may be used.
Next, the photoresist 80 is removed and a cleaning process or the like is performed to obtain the metal mask 10a shown in FIG. 2 in which the bridge portion 12 (FIG. 8C1) and the opening 11 (FIG. 8C2) are formed. Note that the bridge portion 12 has a shape in which only one side is etched, and in this case, a processing method in which only one side is etched and the remaining portion (corresponding to the bridge 12a) is thinned is formed by half etching. Say.
Thus, the metal mask 10a of the second example shown in FIG. 2 of this example is manufactured.

<Print example>
Furthermore, the example which printed and formed the line pattern which consists of printing materials using the metal mask 10 of the 1st example shown in FIG. 1 is given.
As the metal mask 10, a processing material made of stainless steel (SUS304) having a thickness of 0.2 mm is produced by the etching method (single-sided etching method) shown in FIG. 6, and the width W1 of both end portions 11 a and 11 b of the opening 11. Is 200 μm, the width W2 of the center 11c is 120 μm (see FIG. 1B), and the longitudinal length of the opening 11 is 6 mm.
Then, using the produced metal mask 10, as shown in FIG. 1A, the printed material 40 made of quartz glass is set apart on the lower surface, the printing material 60 is placed on the upper surface, and the lower part of the squeegee 31. By sliding (squeezing) the squeegee 31 while contacting the substrate, the printing material was passed through the provided opening, and a pattern made of the printing material was transferred and formed on the substrate.
As the printing material 60, an adhesive layer made of an epoxy resin or an acrylic resin having a viscosity of 50 [Pa · s] at a shear rate of 10 [1 / s] is used. Printing was performed at a temperature of 25 ° C. in accordance with the temperature of 25 ° C.
As a result, a line pattern (corresponding to 61 in FIG. 4B) made of the printing material 60 was formed with a width of 200 μm ± 20 μm over the entire length direction.
<Comparative example>
For comparison, a metal mask (corresponding to 110 in FIG. 9A) having an opening pattern (corresponding to 115 in FIG. 9A) with a total length of 6 mm and a width of 200 μm was prepared in the same manner. Used to print under the same printing conditions,
As a result, the line pattern (corresponding to 165 in FIG. 8B) made of the printing material 60 formed by printing had a line thickness of 400 μm at the center in the longitudinal direction.

The present invention is not limited to the metal mask 10 of the first example and the metal mask 10a of the first example.
For example, the form using the metal layer which laminated | stacked the metal layer of 2 or more layers is also mentioned.
The shape of the opening pattern is not limited to the above.
In addition, the metal mask 10a of the second example is manufactured by etching the metal layer from both sides. After forming the opening 11 in the metal layer by laser, the metal mask 10a is half-etched from one side to form a depression (FIG. 1). (Equivalent to 12d of (d)) may be formed.

FIG. 1A is a schematic configuration diagram showing a usage state of the first example of the embodiment of the metal mask of the present invention, and FIG. 1B shows the opening pattern of the metal mask of the first example. It is the figure seen from the squeegee sliding side in (a), FIG.1 (c) is sectional drawing in A1-A2 of FIG.1 (b). FIG. 2A is a view of the opening pattern of the metal mask of the second example of the embodiment of the metal mask according to the present invention as viewed from the squeegee sliding side, and FIG. 2B is B1 in FIG. It is sectional drawing in -B2. It is the figure which looked at the opening pattern of the metal mask of the 2nd example shown to Fig.2 (a) from the opposite side to the squeegee sliding side. FIG. 4A shows the shape of the opening of the metal mask of the first example, and FIG. 4B shows a line pattern made of a printing material formed by the opening shown in FIG. FIG. FIG. 5A shows the shape of the opening of the metal mask of the second example, and FIG. 5B shows a line pattern made of a printing material formed by the opening shown in FIG. 5A. FIG. FIG. 6A to FIG. 6D are process cross-sectional views of one example of the metal mask opening forming method of the first example. FIG. 7A to FIG. 7D are process cross-sectional views of another example of the method for forming the opening of the metal mask of the first example. 8A1 to FIG. 8C1 and FIG. 8A2 to FIG. 8C2 are process cross-sectional views illustrating the steps of forming the bridge portion and the opening in the metal mask of the second example, respectively. . It is a figure for demonstrating the line weight of the line pattern printed and formed by the conventional metal mask.

Explanation of symbols

10, 10a Metal mask 10A Material for processing (also called metal layer)
11 Opening (also called through hole)
11A Line opening pattern 11a, 11b End 11c Center (also referred to as center or center)
12 Bridge part 12a Bridge (also called thin part)
12b Indentation (also called recess)
13 Masking part (also called thick part)
13S1 Squeegee sliding side (also called surface)
13S2 Side opposite to squeegee sliding side (also called back side)
20 Support part (also called frame part)
25 Expanding member (here is a cocoon)
31 Squeegee 32 Supporting section 40 Substrate 50 Printing stand 60 Printing material 61, 62 Line pattern 80 Photoresist 85, 86, 86a (resist) opening 87, 88, 88a (resist) opening 110 Metal mask 111 opening 115 Line opening Pattern (also simply called opening pattern)
140 substrate 160 printing material 165 line pattern

Claims (7)

  A metal mask for printing made of a metal layer provided with an opening made of a through-hole, and having a line opening pattern that is a line-like opening, and the line opening pattern is formed at each end in the longitudinal direction The opening width at the center in the longitudinal direction becomes narrower than the opening width, and the opening width is gradually narrowed from each end in the longitudinal direction to the center in the longitudinal direction. Metal mask to be used.   2. The metal mask according to claim 1, wherein each of the opening side portions in the longitudinal direction gradually reaches the inside of the opening until the line opening pattern reaches the center in the longitudinal direction from each end portion in the longitudinal direction. A metal mask characterized by making a straight line toward.   3. The metal mask according to claim 1, wherein the metal mask has an opening pattern in which a bridge is provided, the bridge having a bridge connecting both sides bordered by the opening with respect to the line opening pattern. A mask, wherein one side of the bridge is aligned with the surface of the metal mask on the side on which the squeegee slides during printing, and the whole or part of the other side of the bridge is not the front side of the metal mask. The metal mask is characterized in that a recess having a shape recessed from the back surface and connecting the openings on both sides of the bridge is disposed so as to straddle the width direction of the bridge.   4. The metal mask according to claim 3, wherein the depression of the bridge portion is processed by half etching.   5. The metal mask according to claim 1, wherein the printed material is placed on the lower surface of the metal mask, the printing material is placed on the upper surface, and the squeegee is in contact with the printed material at the lower part of the squeegee. A metal mask, which is used in a printing method in which a printing material is passed through an opening provided by sliding (squeezing) and a pattern made of the printing material is transferred onto a substrate.   A printing method using a metal mask, wherein printing is performed using the metal mask according to claim 1. 7. A printing method using a metal mask according to claim 6, wherein a printed material is placed on the lower surface of the metal mask, a printing material is placed on the upper surface of the metal mask, and the squeegee is slid while contacting the printed material at the lower part of the squeegee. (Squeezing) Fills the opening provided in the metal mask with the printing material, and the portion of the metal mask in contact with the printed material is separated from the printed material with the movement of the squeegee. A printing method using a metal mask, characterized by being transferred onto the top.

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