JP2007329206A5 - - Google Patents

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Publication number
JP2007329206A5
JP2007329206A5 JP2006157844A JP2006157844A JP2007329206A5 JP 2007329206 A5 JP2007329206 A5 JP 2007329206A5 JP 2006157844 A JP2006157844 A JP 2006157844A JP 2006157844 A JP2006157844 A JP 2006157844A JP 2007329206 A5 JP2007329206 A5 JP 2007329206A5
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JP
Japan
Prior art keywords
substrate
diffusion plate
heated
opening
temperature distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006157844A
Other languages
English (en)
Japanese (ja)
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JP2007329206A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006157844A priority Critical patent/JP2007329206A/ja
Priority claimed from JP2006157844A external-priority patent/JP2007329206A/ja
Publication of JP2007329206A publication Critical patent/JP2007329206A/ja
Publication of JP2007329206A5 publication Critical patent/JP2007329206A5/ja
Pending legal-status Critical Current

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JP2006157844A 2006-06-06 2006-06-06 拡散板およびその利用 Pending JP2007329206A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006157844A JP2007329206A (ja) 2006-06-06 2006-06-06 拡散板およびその利用

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006157844A JP2007329206A (ja) 2006-06-06 2006-06-06 拡散板およびその利用

Publications (2)

Publication Number Publication Date
JP2007329206A JP2007329206A (ja) 2007-12-20
JP2007329206A5 true JP2007329206A5 (enExample) 2008-09-11

Family

ID=38929489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006157844A Pending JP2007329206A (ja) 2006-06-06 2006-06-06 拡散板およびその利用

Country Status (1)

Country Link
JP (1) JP2007329206A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5653052B2 (ja) * 2010-03-09 2015-01-14 スタンレー電気株式会社 成膜装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04238893A (ja) * 1991-01-10 1992-08-26 Nippon Soken Inc 基板ホルダ
JPH0555145A (ja) * 1991-08-27 1993-03-05 Hitachi Ltd 基板加熱装置

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