JP2007316014A - X-ray fluoroscopic inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray fluoroscopic inspection apparatus having a mechanism for oscillating an easily controllable X-ray detector. <P>SOLUTION: The X-ray fluoroscopic inspection apparatus 1 for irradiating an analyte with X-rays from an X-ray source and detecting transmission images of the analyte by an X-ray detector 12 has a moving mechanism 14 for linearly moving the X-ray detector 12 in such a way as to change a position to detect irradiated X-rays and oscillating the X-ray detector 12 in such a way as to orient the normal line of its detection plane toward the X-ray source. The moving mechanism 14 includes a first fixed part 16 in a positional relation to be an axis of oscillation movements with the X-ray detector 12; a second fixed part 17 positioned on a straight line connecting the X-ray source to the first fixed part; and a transfer part for moving the first fixed part by any distance in linear directions and moving the second fixed part in linear directions in parallel with the straight line along which the first fixed part is moved in such a way that the relation between the any distance and the distance by which the second fixed part is moved may be proportional to a ratio between the distance between the X-ray source and a route of movement of the first fixed part and the distance between the X-ray source and a route of movement of the second fixed part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an X-ray fluoroscopic inspection apparatus that irradiates a subject with X-rays and inspects the inside of the subject nondestructively.

  2. Description of the Related Art Conventionally, there is an X-ray fluoroscopic inspection apparatus capable of obtaining a transmission image at a high magnification and by changing a fluoroscopic angle (tilt angle) with respect to an object such as a substrate on which an electronic component is mounted (for example, a patent) Reference 1).

  In particular, in the case of a plate-like subject such as a substrate on which electronic parts are mounted, observation with changing the perspective angle in this way can be used for finding or analyzing a defective portion.

FIG. 11 shows an X-ray fluoroscopic inspection apparatus 100 described in Patent Document 1, which is an example of a conventional X-ray fluoroscopic inspection apparatus. As shown in the figure, the X-ray 200 radiated from the X-ray tube 101 passes through the subject 201 placed on the table 103 and is then detected by the X-ray detector 102, whereby the subject 201 A transparent image is obtained. At this time, the X-ray detector 102 is slid on the linear rail 104 by a motor (not shown) within the range in which the X-ray 200 is radiated, and swung so as to face the focal point F of the X-ray 200. The positioning is adjusted so as to change the perspective angle α. Thereby, the subject 201 can be seen through from an oblique direction. In this case, the swing motion of the X-ray detector 102 is adjusted such that a predetermined angle is obtained by driving the worm gear 105 with the swing motor 106.
JP 2001-1553819 A

  However, the X-ray fluoroscopic inspection apparatus 100 described in Patent Document 1 described above, when changing the fluoroscopic angle α, slides the X-ray detector 102 on the rail 104 (linear movement) by a linear movement motor, The X-ray detector 102 is swung at a rotation angle that is not proportional to the amount of rectilinear movement by a swinging motor 106 different from the linear movement motor. In this case, two motors, a linear movement motor and a swing motion motor, and two motor drive circuits are required to drive these two motors. Therefore, there is a problem that not only the apparatus configuration of the X-ray fluoroscopic inspection apparatus is large and complicated, but also the control thereof is complicated.

  In view of the above problems, an object of the present invention is to provide an X-ray fluoroscopic inspection apparatus having an X-ray detector swing mechanism that is easy to control and configure.

  In order to achieve the above object, according to the first aspect of the present invention, an object placed on a table is irradiated with X-rays from an X-ray source, and a transmission image of the object is detected by an X-ray detector. Then, in the X-ray fluoroscopic inspection apparatus that displays the transmission image on the display unit, the X-ray detector is linearly moved so as to change the position for detecting the irradiated X-ray, and the detection of the X-ray detector is performed. A moving mechanism that swings so that the normal of the surface faces the X-ray source, and the moving mechanism includes a first fixed portion that is in a positional relationship with the X-ray detector as an axis of swinging motion; , A second fixing portion positioned on a straight line connecting the X-ray source and the first fixing portion, and moving the first fixing portion by an arbitrary distance in a linear direction, and the X-ray source and the first fixing portion. And the distance between the X-ray source and the second fixed part. The second fixed portion is set in a linear direction parallel to the straight line on which the first fixed portion has moved so that the relationship between the arbitrary distance and the movement distance of the second fixed portion becomes the ratio. The gist of the present invention is to include a transport unit to be moved.

  According to the present invention having the above-described configuration, the first fixing unit and the second fixing unit that maintain a predetermined positional relationship with the X-ray detector by the moving mechanism are synchronized with each other on parallel straight lines and have a predetermined moving ratio. Since it is moved, the X-ray detector can be moved linearly by simple mechanism control and can be swung so that the normal of the detection surface of the X-ray detector always faces the direction of the focus F of the X-ray.

  According to a second aspect of the present invention, in the X-ray fluoroscopic inspection apparatus according to the first aspect, the conveying unit includes a first pulley and a second pulley, and the first fixing unit fixed to the first pulley and the second pulley. A gist is provided with a first belt that is bridged with a predetermined tension with a predetermined tension and that is conveyed along with the rotation of the first pulley or the second pulley.

  According to the present invention having the above configuration, since the first fixing portion is linearly moved by the first belt, a small X-ray fluoroscopic inspection apparatus can be configured.

  According to a third aspect of the present invention, in the X-ray fluoroscopic inspection apparatus according to the first or second aspect, the conveying unit includes a third pulley and a fourth pulley, and the second fixing unit is fixed. The gist of the present invention is to include a second belt that is stretched between the fourth pulley with a predetermined tension and conveyed along with the rotation of the third pulley or the fourth pulley.

  According to the present invention having the above configuration, since the second fixing portion is linearly moved by the second belt, a small X-ray fluoroscopic inspection apparatus can be configured.

  According to a fourth aspect of the present invention, in the X-ray fluoroscopic inspection apparatus according to the third aspect of the present invention, the conveying unit includes a first pulley and a second pulley, and the first fixing unit fixed to the first pulley and the second pulley. A first belt that is bridged with a predetermined tension and is conveyed along with the rotation of the first pulley or the second pulley, a third pulley and a fourth pulley, and the second pulley. A second belt having a fixed portion fixed thereto, being spanned with a predetermined tension between the third pulley and the fourth pulley, and being conveyed along with the rotation of the third pulley or the fourth pulley; A coupling mechanism for coupling the second pulley and the fourth pulley and synchronizing the rotation of the second pulley and the fourth pulley, and for rotating the second pulley and the fourth pulley 1. And when the first fixed part moves by an arbitrary distance as the second pulley rotates, the fourth pulley has a distance between the X-ray source and the first fixed part and the X-ray. Rotating at a speed at which the second fixed portion is moved so that the relationship between the arbitrary distance and the moving distance of the second fixed portion is the ratio with respect to the ratio of the distance between the source and the second fixed portion. The gist is to do.

  According to the present invention configured as described above, the first belt and the second belt are operated by being coupled by the coupling mechanism. Therefore, the control mechanism of the X-ray fluoroscopic inspection apparatus can be an easy mechanism for moving the X-ray detector linearly and swinging it by rotating only one motor.

  According to a fifth aspect of the present invention, in the X-ray fluoroscopic inspection apparatus according to any one of the second to fourth aspects, the moving mechanism is disposed in parallel with the first belt and moves along with the conveyance of the first belt. The gist is to include a linear first rail that supports the first fixing portion.

  According to this invention of the said structure, a 1st fixing | fixed part is engaged with a 1st rail, and it slides along a 1st rail. As a result, when the first fixing part is moved, the movement of the X-ray detector is not affected by the deflection of the first belt, is moved on the straight line accurately, and the X-ray detector is heavy. Can be accurate.

  According to a sixth aspect of the present invention, in the X-ray fluoroscopic examination apparatus according to any one of the third to fifth aspects, the moving mechanism is disposed in parallel with the second belt and moves along with the conveyance of the second belt. The gist is to include a linear second rail that supports the second fixing portion.

  According to this invention of the said structure, a 2nd fixing | fixed part is engaged with a 2nd rail, and is made to slide along a 2nd rail. As a result, when the second fixing part is moved, the movement of the X-ray detector is not affected by the deflection of the second belt, it is accurately moved on the straight line, and the X-ray detector is heavy. Can be accurate.

  According to the present invention, it is possible to provide an X-ray fluoroscopic inspection apparatus having an X-ray detector swing mechanism that is easy to control.

  An X-ray fluoroscopic inspection apparatus 1 according to the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic examination apparatus 1 shown in FIG. 1 detects an X-ray tube 11 that irradiates an X-ray 30 toward an object 31 placed on a table 13 and an X-ray 30 that has passed through the object 31. And an X-ray detector 12 for detecting at 12a. The transmission image detected by the X-ray detector 12 is two-dimensional resolution data, and is taken in, for example, a computer (not shown) and displayed on a display.

  Although not shown in the figure, the X-ray tube 11 is supported from the floor by a frame. The table 13 is also supported from the same floor, and is translated by the table mechanism in the three orthogonal directions xt, yt, and zt, which are the table moving directions, and is positioned. Furthermore, the entire members shown in FIG. 1 are housed in an X-ray shielding box.

  The moving mechanism 14 (conveying unit) detects the irradiated X-ray 30 in order to detect a transmission image in a direction inclined by α from the vertical with respect to the surface of the table 13 in the subject 31 placed on the table 13. The X-ray detector 12 is linearly moved to adjust the position so as to change the position, and the normal line (at the center) of the detection surface 12a of the X-ray detector 12 is focused on the focal point F (X-ray 30 irradiation). On the contrary, the X-ray detector 12 is controlled so as to oscillate so as to face the direction of the convergence point (X-ray source).

  The moving mechanism 14 controls the positioning adjustment of the X-ray detector 12 so as to control the first pin 16, the second pin 17, the first belt 18, the first pulley 19, the second pulley 20, the second belt 21, and the third belt. The pulley 22, the fourth pulley 23, and the coupling mechanism 24 are provided and supported by a floor (not shown).

  The first pulley 19 and the second pulley 20 form a pair, and the first belt 18 is stretched between the pulleys 19 and 20 with a predetermined tension. The third pulley 22 and the fourth pulley 23 are paired, and the second belt 21 is stretched between the pulleys 22 and 23 with a predetermined tension. Here, the first belt 18 and the second belt 21 are installed with the same inclination (β) with respect to the floor so as to be parallel to each other.

  As the detector movement angle β, for example, about 30 ° is conceivable. This angle β is not limited to 30 °, but is preferably about ½ of the maximum value of the fluoroscopic angle α or slightly smaller than ½, which is usually a value of 0 ° to 40 °. .

  The first belt 18 and the second belt 21 are constituted by toothed belts having teeth on the inner surface side. In addition, teeth for fitting with the teeth of the belt are formed on the circumferential surfaces of the pulleys 19, 20, 22, 24. For this reason, the pulleys 20 and 23 are configured not to slip even when the pulleys 20 and 23 are repeatedly rotated. The tooth intervals of the belts 18 and 21 are the same, and the numbers of teeth of the pulleys 19, 20, 22, and 23 are also the same.

  One end of a cylindrical first pin 16 that is a fixing portion is fixed to the first belt 18. In addition, one end of a cylindrical second pin 17 that is a fixing portion is fixed to the second belt 21. The widths of the belts 18 and 21 are such that at least one end of the pins 16 and 17 can be fixed, and the other ends of the pins 16 and 17 protrude from the fixed belts 18 and 21. In other words, the length of the pins 16 and 17 is preferably longer than the width of the belts 18 and 21.

  Here, the other end of the first pin 16 protruding from the first belt 18 is inserted into a hole 15a provided in the frame 15 for fixing the X-ray detector 12 shown in FIG. And the hole 15a are engaged. The other end of the second pin 17 protruding from the second belt 21 is inserted into a long hole portion 15b provided in the frame 15, and the second pin and the long hole portion 15b are engaged.

  The second pulley 20 and the fourth pulley 23 are driving pulleys that rotate by obtaining a driving force from a motor to convey the belts 18 and 21, respectively. Further, the first pulley 19 and the third pulley 22 are driven pulleys, and rotate as the belts 18 and 21 are conveyed. The second pulley 20 and the fourth pulley 23 rotate synchronously at different rotational speeds. The rotation control of the pulleys 20 and 23 will be described later with reference to FIG.

  When the first belt 18 and the second belt 21 are conveyed along with the rotation of the second pulley 20 and the fourth pulley 23, the positions of the pins 16 and 17 fixed to the belts 18 and 21 also move together with the belts 18 and 21. To do. As described above, since the first belt 18 and the second belt 21 are parallel to each other, the pins 16 and 17 fixed to the belts 18 and 21 respectively move on parallel straight lines.

  The frame 15 will be described with reference to FIG. The frame 15 is composed of a plate-like member to which the X-ray detector 12 is attached, and a hole portion 15a and a long hole portion 15b are provided on the back side of the attachment surface of the X-ray detector 12. The X-ray detector 12 is fixed to the frame 15 so that the normal of the detection surface 12a is in the vertical direction when the direction in which the hole 15a and the long hole 15b are in a straight line is the vertical direction of the frame 15. Yes.

  The hole 15 a is a circular concave shape having a diameter substantially the same as the diameter of the first pin 16, and one end of the first pin 16 protruding from the first belt 18 is inserted and engaged with the first pin 16. To do. Further, the long hole portion 15b is a rod-shaped concave shape that is long in the direction in which the hole portion 15a is provided, and one end of the second pin 17 protruding from the second belt 21 is inserted into the second pin 17. Engage. The width w of the long hole portion 15 b is substantially the same as the diameter of the second pin 17. The length l of the long hole portion 15b is longer than the diameter of the second pin, and is a length that allows the second pin 17 to move in the long diameter direction along the inner wall surface of the long hole portion 15b. . The depth of the hole portion 15a and the long hole portion 15b may be any depth as long as the pins 16 and 17 are inserted, and may penetrate the frame 15.

  When the pins 16 and 17 move, the frame 15 rotates with the movement of the second pin 17 in the long hole portion 15b about the first pin 16 (the inclination is changed). Specifically, the first pin 16 and the second pin 17 move in parallel at different movement ratios, but the amount of movement of the second pin 17 is larger than that of the first pin 16, so that the frame 15 With the pin 16 as the center (axis), the second pin 17 moves while being incremented and inclined with respect to the movement amount of the first pin 16.

  As described above, in the moving mechanism 14, the first pin 16 is used as the axis of the swing motion of the X-ray detector 12, and the straight line of the X-ray detector 12 fixed to the frame 15 by the amount of movement of the pins 16 and 17. It controls movement and swing motion.

  The operation of the frame 15 by the movement of the positions of the pins 16 and 17 in the moving mechanism 14 and the linear movement and swing control of the X-ray detector 12 will be described with reference to FIG. In the moving mechanism 14, the first pin 16 and the second pin 17 are moved at a predetermined movement ratio in synchronization with straight lines parallel to each other. At this time, the moving mechanism 14 moves the first pin 16 and the second pin so that they are always in line with the focal point F of the X-ray tube 11.

  The movement ratio of the first pin 16 and the second pin 17 is adjusted by the conveyance speed of the first belt 18 and the second belt 21, but the distance between the focal point F and the movement path Ra of the pin 16 (from the focal point F). When the distance L1 is the length of the perpendicular line down the movement path Ra and the distance L2 is the distance between the focal point F and the movement path Rb of the pin 17, the movement distance of the first pin: the movement distance of the second pin is L1. : L2 relationship. That is, the moving distance of the second pin 17 is the same as the moving distance of the first pin 16 and the ratio of the distance between the focal point F and the first pin 16 and the distance between the focal point F and the second pin 17. It is asked to become.

First, when the initial positions of the first pin 16 and the second pin 17 are point A ₀ and point B ₀ , respectively, the focal point F, the point A _0, and the point B ₀ are aligned with respect to the focal point F. Keep it together. Assuming that the positions after the first pin 16 and the second pin 17 are synchronized and moved at a movement ratio of L1: L2 are A and B, respectively, the focal point F, the point A, and the point B are always kept in a straight line. The ratio between the segment A ₀ A and the line segment B ₀ B is always L1: L2. This can be seen from the similarity between the triangle FA ₀ A and the triangle FB ₀ B.

  Thus, the vertical direction of the frame 15 inserted in the first pin 16 and the second pin 17 (the direction connecting the hole 15a and the long hole 15b) always faces the focal point F. Further, as described above, the X-ray detector 12 is fixed to the frame 15 so that the normal line of the detection surface 12a is in the vertical direction. For this reason, the moving mechanism 14 can move the X-ray detector 12 linearly and swing it so that the normal line of the detection surface 12a always faces the direction of the focal point F.

  Next, the rotation of the coupling mechanism 24 and the second pulley 20 and the fourth pulley 23 which are driving pulleys will be described with reference to FIG. In FIG. 4, the first belt 18 hung on the second pulley 20 and the second belt 21 hung on the fourth pulley 23 are omitted.

  In the coupling mechanism 24, the fifth pulley 26 and the sixth pulley 27 are paired, and the third belt 28 is stretched over so as to have a constant tension. Here, the third belt 28 is a toothed belt provided with teeth on the inner side, and teeth for fitting to the teeth of the belt are formed on the circumferential surfaces of the fifth pulley 26 and the sixth pulley 27. Yes. The fifth pulley 26 is fixed to the second pulley 20 and rotates coaxially, and the sixth pulley 27 is fixed to the fourth pulley 23 and rotates coaxially.

  When the motor 25 rotates the second pulley 20, the fifth pulley 26 also rotates. At this time, the sixth pulley 27 on which the third belt 28 is hung together with the fifth pulley 26 also rotates. Further, as the sixth pulley 27 rotates, the fourth pulley 23 also rotates. Thus, the fourth pulley 23 also rotates in synchronization with the rotation of the second pulley 20.

  Here, if the number of teeth formed on the fifth pulley 26 is N1, and the number of teeth formed on the sixth pulley 27 is N2, the number of teeth N1 of the fifth pulley 26 and the number of teeth N2 of the sixth pulley 27 are: The relationship between the distance L1 and the distance L2 described above is formed so that the formula (1) is established.

N1: N2 = L2: L1 (1)
As a result, the rotation speed ratio between the pulley 26 and the pulley 27 becomes L1: L2 (because it is proportional to the reciprocal of the number of teeth).

  In the moving mechanism 14, the rotational speeds of the second pulley 20 and the fourth pulley 23 are changed by changing the number of teeth formed on the pulleys 26 and 27 as described above. That is, the conveyance speed of the first belt 18 is determined as the second pulley 20 rotates. On the other hand, the rotation speed of the second belt 21 is the rotation of the fourth pulley 23 coaxial with the sixth pulley 27 rotated by the third belt 28 relative to the rotation of the fifth pulley 26 coaxial with the second pulley 20. Along with this, the conveyance speed is determined. Since the rotation speed ratio can also be expressed as a movement ratio (movement amount ratio), the movement ratio of the first pin 16 and the second pin 17 fixed to the belts 18 and 21 whose rotation speed is L1: L2 is also L1. : L2.

  According to the X-ray fluoroscopic examination apparatus 1 according to the above-described best embodiment of the present invention, the frame in which the X-ray detector 12 is fixed by the moving mechanism 14 and the first pin 16 and the second pin 17 are parallel to each other. It is moved with a predetermined movement ratio in synchronization with the straight line. As a result, the X-ray detector 12 can be moved linearly by simple mechanism control and can be swung so that the normal of the detection surface 12a of the X-ray detector 12 always faces the direction of the focal point F.

  Further, since the first pin 16 and the second pin 17 are linearly moved by the same mechanism by the first belt 18 and the second belt 21, respectively, the moving mechanism 14 and the X-ray including the moving mechanism 14 are provided. The fluoroscopic inspection apparatus 1 can be reduced in size.

  Further, the connecting mechanism 24 determines the moving ratio of the first pin 16 and the second pin 17 based on the ratio of the number of teeth of the pulleys 20, 23, 26, and 27 and maintains the accuracy of the moving ratio, thereby accurately detecting the X-ray. The normal line of the detection surface 12a of the detector 12 can be directed in the direction of the focal point F.

  In addition, even when compared with an X-ray fluoroscopic inspection apparatus having a swing mechanism that turns the detection surface of the X-ray detector in the focal direction using an arm that pivots around the focal point F position, an arm is not required. The moving mechanism 14 and the X-ray fluoroscopic inspection apparatus 1 including the moving mechanism 14 can be configured in a small size.

  As described above, according to the best embodiment of the present invention, it is possible to provide an X-ray fluoroscopic inspection apparatus having an easily controlled X-ray detector swing mechanism.

  In the X-ray fluoroscopic examination apparatus 1 according to the best embodiment described above, the belts 18 and 21 are used as a configuration for moving the X-ray detector 12 via the pins 16 and 17. Alternatively, the same effect can be obtained even if a chain, a wire, or the like is used. The same effect can be obtained by using a screw and nut or a ball screw and ball nut instead of the belts 18 and 21 as a configuration for moving the X-ray detector 12 via the pins 16 and 17. Further, in the X-ray fluoroscopic inspection apparatus 1 according to the above-described best embodiment, the pins 16 and 17 are used as fixing portions for fixing the position of the X-ray detector 12 to the belts 18 and 21. In other words, the same effect can be obtained even if other members fixed to the belts 18 and 21 are used.

[Modification 1]
The moving mechanism of the X-ray fluoroscopic inspection apparatus according to the first modification of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to Modification 1 is fixed to the first support plate 40 fixed to the first pin 16 and the second pin 17 in addition to the X-ray fluoroscopic inspection apparatus 1 described in FIG. A second support plate 41; a first rail 42 for moving the first support plate 40 along the first belt 18; and a second rail 43 for moving the second support plate 41 along the second belt 21. is doing.

  The first rail 42 is a linear member parallel to the first belt 18 and is provided in the vicinity of the first belt 18. The first rail 42 supports the first support plate 40 so as to move along the first belt 18, and the first support plate 40 moves along the first rail 42 as the first pin 16 moves. Slide.

  The second rail 43 is a linear member parallel to the second belt 21 and is provided in the vicinity of the second belt 21. The second rail 43 supports the second support plate 41 so as to move along the second belt 21, and the second support plate 41 moves along the second rail 43 along with the movement of the second pin 17. Slide. The length of the rails 42 and 43 is slightly longer than the distance that the pins 16 and 17 move together with the belts 18 and 21, and is installed below the pins 16 and 17.

  Each of the support plates 40 and 41 and the rails 42 and 43 are made of steel balls arranged at the engaging portions and reduced in friction by rolling the steel balls (for example, LM Guide (trademark) of THK Co., Ltd.). Preferably there is.

  The first rail 42 and the second rail 43 are supported from the floor by a frame (not shown). Other configurations are the same as those of the X-ray fluoroscopic inspection apparatus according to the above-described best embodiment, and thus the description thereof is omitted.

  Note that only one of the first rail 42 and the second rail 43 may be provided.

  As described above, in the X-ray fluoroscopic inspection apparatus according to Modification 1, when the pin is moved, the pin is moved along the rail. As a result, there is no influence of the deflection generated in the belt, and it is possible to accurately move on the straight line. Even when the weight of the X-ray detector 12 is large, the movement of the X-ray detector 12 can be accurately performed. There is.

[Modification 2]
The moving mechanism of the X-ray fluoroscopic inspection apparatus according to the second modification of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to the modified example 2 includes a first sliding plate 44 and a second sliding plate 45 in addition to the X-ray fluoroscopic inspection apparatus described with reference to FIG.

  The first sliding plate 44 is a linear plate provided in contact with the first belt 18 below the first belt 18. The second sliding plate 45 is a linear plate provided in contact with the second belt 21 below the second belt 21. For example, the length of the sliding plates 44 and 45 is the distance that the pins 16 and 17 move together with the belts 18 and 21, and the width of the sliding plates 44 and 45 is the width of the belts 18 and 21.

  The belts 18 and 21 move while sliding on the sliding plates 44 and 45, respectively. Thereby, when the 1st pin 16 and the 2nd pin 17 are moved, there is no influence of the deflection | deviation of the belts 18 and 21, and it can move on a straight line correctly.

  Therefore, in the X-ray fluoroscopic inspection apparatus according to the modified example 2, even when the weight of the X-ray detector 12 is large, an effect that the movement of the X-ray detector 12 can be accurately obtained can be obtained. The sliding plates 44 and 45 are supported from the floor by a frame (not shown).

  In FIG. 6, the sliding plates 44 and 45 guide the movement of the pins 16 and 17 through the belts 18 and 21, respectively, but are arranged adjacent to the belts 18 and 21 and are in direct contact with the pins 16 and 17. The pins 16 and 17 may be guided.

[Modification 3]
The moving mechanism of the X-ray fluoroscopic inspection apparatus according to the third modification of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to Modification 3 includes a third sliding plate 46 and a fourth sliding plate 47 in addition to the X-ray fluoroscopic inspection apparatus described with reference to FIG.

  The third sliding plate 46 has the same shape as the first sliding plate 44 and is disposed at a position in contact with the first pin 16 on the upper portion of the first belt 18. When the first belt 18 moves while sliding on the first sliding plate 44, the first pin 16 moves while sliding on the third sliding plate 46.

  The fourth sliding plate 47 has the same shape as the second belt 21 and is disposed at a position in contact with the second pin 17 on the upper part of the second belt 21. When the second belt 21 moves while sliding on the second sliding plate 44, the second pin 17 moves while sliding on the fourth sliding plate 47.

  Thereby, when the 1st pin 16 and the 2nd pin 17 are moved, there is no influence of the deflection | deviation of the belts 18 and 21, and it can be moved on a straight line correctly.

  Therefore, in the X-ray fluoroscopic inspection apparatus according to the modified example 3, even when the weight of the X-ray detector 12 is large, an effect that the movement of the X-ray detector 12 can be accurately obtained can be obtained. The sliding plates 46 and 47 are supported from the floor by a frame (not shown).

[Modification 4]
The moving mechanism of the X-ray fluoroscopic inspection apparatus according to the modification 4 of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to the modified example 4 does not have the rail 42 as compared with the X-ray fluoroscopic inspection apparatus described in FIG. 5, and the pins 16 are directly connected to the third rail 48 a and the fourth rail 48 b. Engaged.

  The third rail 48a and the fourth rail 48b are frame-shaped members having regions that can move by engaging the pins 16. The length of the rails 48 a and 48 b is a length that ensures a distance that the first pin 16 moves together with the first belt 18. In the example shown in FIG. 8, both end portions of the first pin 16 are thinner than the central portion so as to fit the regions of the rails 48a and 48b.

  In the fourth modification, as in the first modification described above, there is no influence of the deflection of the second belt 18, and the movement on the straight line can be performed accurately, and the movement of the X-ray detector 12 can be made accurate. it can.

  In the fourth modification, the rail 43 may be eliminated instead of the rail 42, and the pin 17 may be directly engaged with the rail similar to the rail described above with reference to FIG.

  Alternatively, both the rail 42 and the rail 43 may be eliminated, and both the pin 16 and the pin 17 may be directly joined to a rail similar to the rail described above with reference to FIG.

[Modification 5]
A moving mechanism of the X-ray fluoroscopic inspection apparatus according to the modification 5 of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to the modified example 5 does not have the second rail 43 and has the first support plate 40 and the second pin that support the first pin 16 as compared with the X-ray fluoroscopic inspection apparatus described in FIG. Both of the second support plates 41 ′ supporting 17 are engaged with the first rail 42.

  When the pins 16 and 17 move as the belts 18 and 21 move, the first pin 16 is guided by the first support plate 40 supported by the first rail 42, and the pin 17 is supported by the first rail 42. Guided by the second support plate 41 ′.

  Since the moving speeds of the first pin 16 and the second pin 17 are different, for example, as shown in FIG. 9, the second support plate 41 ′ that supports the second pin 17 has a first support plate 40 and a first rail 42. The first support plate 40 and the second support plate 41 ′ are not in contact with each other on the first rail 42 so that the first support plate 40 and the second support plate 41 ′ are not in contact with each other. Yes.

  In the fifth modified example, similarly to the first modified example described above, there is no influence of the deflection of the belts 19 and 21, and the movement on the straight line can be performed accurately, and the movement of the X-ray detector 12 can be made accurate. it can.

[Modification 6]
A moving mechanism of the X-ray fluoroscopic inspection apparatus according to the modification 6 of the best embodiment of the present invention will be described with reference to FIG. The X-ray fluoroscopic inspection apparatus according to Modification 6 is Modification 1 or Modification 5, and uses wheels 50 a and 50 b for engagement between the first rail 42 and the first support plate 40.

  FIG. 10 is a side view of the first rail 42 as viewed from the longitudinal direction with respect to the rail 42. Wheels 50a and 50b are attached to the first support plate 40 via shafts 49a and 49b, respectively. The first rail 42 is provided with V-grooves on both side surfaces, and the support plate 40 and the rail 42 are engaged with each other by sandwiching the V-groove of the first rail 42 between the wheels 50a and 50b. The support plate 40 slides along the rail 42 with little friction as the wheels roll.

  In FIG. 10, there are two wheels, but in the sixth modification, the number of wheels is not limited to two, and the same applies to one, three, four, and the like. Further, the method of engaging the first support plate 40 and the rail can be applied not only to the first rail 42 but also to other rails such as the second rail 43.

1 is a conceptual diagram of an X-ray fluoroscopic inspection apparatus according to the best embodiment of the present invention. It is the figure which looked at the flame | frame of the X-ray fluoroscopic inspection apparatus which concerns on the best embodiment of this invention from the back side. It is a figure explaining operation | movement of the moving mechanism of the X-ray fluoroscopic inspection apparatus which concerns on the best embodiment of this invention. 1 is a schematic configuration diagram of a coupling mechanism and a motor of an X-ray fluoroscopic inspection apparatus according to the best embodiment of the present invention. It is a figure explaining the X-ray fluoroscope inspection apparatus which concerns on the modification 1 of the best embodiment of this invention. It is a figure explaining the X-ray fluoroscopic inspection apparatus which concerns on the modification 2 of best embodiment of this invention. It is a figure explaining the X-ray fluoroscopic inspection apparatus which concerns on the modification 3 of the best embodiment of this invention. It is a figure explaining the X-ray fluoroscope inspection apparatus which concerns on the modification 4 of the best embodiment of this invention. It is a figure explaining the X-ray fluoroscope inspection apparatus which concerns on the modification 5 of the best embodiment of this invention. It is a figure explaining the X-ray fluoroscope inspection apparatus which concerns on the modification 6 of the best embodiment of this invention. It is a schematic block diagram of the conventional X-ray fluoroscope inspection apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... X-ray fluoroscopic inspection apparatus 11 ... X-ray tube 12 ... X-ray detector 12a ... Detection surface 13 ... Table 14 ... Moving mechanism 15 ... Frame 15a ... Hole part 15b ... Long hole part 16 ... 1st pin (fixed part)
17 ... 2nd pin (fixing part)
DESCRIPTION OF SYMBOLS 18 ... 1st belt 19 ... 1st pulley 20 ... 2nd pulley 21 ... 2nd belt 22 ... 3rd pulley 23 ... 4th pulley 24 ... Connection mechanism 25 ... Motor 26 ... 5th pulley 27 ... 6th pulley 28 ... 1st 3 belts

Claims (6)

An X-ray fluoroscopic examination apparatus that irradiates a subject placed on a table with X-rays from an X-ray source, detects a transmission image of the subject with an X-ray detector, and displays the transmission image on a display unit In
The X-ray detector is moved linearly so as to change the position for detecting the irradiated X-ray, and the head is moved so that the normal of the detection surface of the X-ray detector faces the X-ray source. Has a mechanism,
The moving mechanism is
A first fixing portion in a positional relationship that serves as an axis of swing motion with respect to the X-ray detector;
A second fixing portion located on a straight line connecting the X-ray source and the first fixing portion;
The first fixed part is moved by an arbitrary distance in a linear direction, the distance between the movement path of the X-ray source and the first fixed part, and the distance between the movement path of the X-ray source and the second fixed part, The second fixed portion is moved in a linear direction parallel to the straight line moved by the first fixed portion so that the relationship between the arbitrary distance and the movement distance of the second fixed portion is equal to the ratio of A conveying section to be
An X-ray fluoroscopic inspection apparatus comprising: The X-ray fluoroscopic inspection apparatus according to claim 1, wherein the transport unit is
A first pulley and a second pulley;
The first fixing portion is fixed, and is bridged with a predetermined tension between the first pulley and the second pulley, and is conveyed along with the rotation of the first pulley or the second pulley. 1 belt,
An X-ray fluoroscopic inspection apparatus comprising: The X-ray fluoroscopic inspection apparatus according to claim 1 or 2, wherein the transport unit is
A third pulley and a fourth pulley;
The second fixing portion is fixed, and is bridged with a predetermined tension between the third pulley and the fourth pulley, and is conveyed along with the rotation of the third pulley or the fourth pulley. 2 belts,
An X-ray fluoroscopic inspection apparatus comprising: The X-ray fluoroscopic inspection apparatus according to claim 1, wherein the transport unit is
A first pulley and a second pulley;
The first fixing portion is fixed, and is bridged with a predetermined tension between the first pulley and the second pulley, and is conveyed along with the rotation of the first pulley or the second pulley. 1 belt,
A third pulley and a fourth pulley;
The second fixing portion is fixed, and is bridged with a predetermined tension between the third pulley and the fourth pulley, and is conveyed along with the rotation of the third pulley or the fourth pulley. 2 belts,
A coupling mechanism for coupling the second pulley and the fourth pulley and synchronizing the rotation of the second pulley and the fourth pulley;
One motor for rotating the second pulley and the fourth pulley,
When the first fixed part moves an arbitrary distance as the second pulley rotates, the fourth pulley moves the distance between the X-ray source and the first fixed part, the X-ray source, and the second fixed part. Rotating at a speed at which the second fixed part is moved so that the relation between the arbitrary distance and the moving distance of the second fixed part is the ratio with respect to the ratio with the distance between the parts. X-ray fluoroscopy device. The X-ray fluoroscopic inspection apparatus according to any one of claims 2 to 4, wherein the transport unit includes:
An X-ray fluoroscopic inspection apparatus comprising a linear first rail that is arranged in parallel with the first belt and supports the first fixing portion that moves along with the conveyance of the first belt. The X-ray fluoroscopic inspection apparatus according to any one of claims 3 to 5, wherein the transport unit includes:
An X-ray fluoroscopic inspection apparatus comprising a linear second rail that is arranged in parallel with the second belt and supports the second fixing portion that moves along with the conveyance of the second belt.

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