KR101761793B1 - An X-ray Apparatus Having a Structure of a Rotating or Horizontal Displacement - Google Patents

Abstract

The present invention relates to an X-ray apparatus having a rotating or plane moving structure, and more particularly, to an X-ray apparatus capable of rotating or slanting an object to be examined, Structure x-ray apparatus. An X-ray apparatus having a rotating and plane moving structure includes an X-ray tube for irradiating an X-ray to be inspected and a detector for detecting X-rays transmitted through the object to be inspected, A rotational position unit; And an inspection stage rotated by the rotation position unit, wherein the inspection stage has a structure movable along a plane.

Description

An X-ray Apparatus Having a Rotating and Planar Moving Structure [0002]

The present invention relates to an X-ray apparatus having a rotating or plane moving structure, and more particularly, to an X-ray apparatus capable of rotating or slanting an object to be examined, Structure x-ray apparatus.

X-ray inspection is applied to various industrial fields, and various types of inspection apparatuses according to product types are known in each application field. For example, x-ray inspection devices for defect inspection of printed circuit boards, defect inspection of electronic devices, defect inspection of batteries or various electronic chips are known in this field.

Japanese Patent Application Laid-Open No. 10-2003-0089293 discloses a transfer device for placing an object to be inspected on an upper surface thereof and transferring the object to a predetermined position; Light generating means provided at a lower portion of the conveying device for emitting an X-ray to an object to be inspected; Optical amplifying means provided on the opposite side of the light generating means for converting and amplifying the x-ray transmitted through the object to be inspected into visible light; An optical unit for optically illuminating the object to be inspected to generate an image; And a camera for receiving an image obtained by the optical unit amplified by the optical amplifying unit and an image obtained by the optical unit, and a visual inspection.

Japanese Patent Application Laid-Open No. 10-2014-0013675 discloses a transfer device for transferring a battery, a first x-ray tube for horizontally irradiating an x-ray on an upper end of the battery, a second x- A tube, a first and a second detector which are located on opposite sides of the first x-ray tube and the second x-ray tube with the cell interposed therebetween and continuously scan by line scanning the battery carried by the transfer device, And a judging section for judging an interval between the can and the winding gel roll from the image picked up by the two detectors.

An object to be inspected by an X-ray may have various shapes or sizes, and an X-ray needs to be inspected at various positions. In addition, it is necessary to obtain images irradiated from a plurality of directions depending on the object to be inspected. For example, in order to inspect a densely packed electronic device having a micro-size, it is necessary that an image irradiated with X-rays from different directions be obtained. In order to obtain such an image, different images need to be acquired under the same conditions. However, the prior art does not disclose an apparatus in which a plurality of images can be obtained for one inspection target by irradiating X-rays in various directions to one inspection target.

The present invention has been made to solve the problems of the prior art and has the following purpose.

Prior Art 1: Patent Publication No. 10-2003-0089293 (Mir Technology, Inc., published on November 21, 2003) Inspection device for printed circuit board integrated with x-ray and visual inspection Prior Art 2: Patent Publication No. 10-2014-0013675 (Inonomet Co., Ltd., published on February 05, 2014)

It is an object of the present invention to provide an X-ray apparatus of a rotating or planar moving structure that irradiates X-rays in various directions to one or different inspection targets to enable acquisition of an image of a site requiring inspection.

According to a preferred embodiment of the present invention, an X-ray apparatus having a rotating and plane moving structure includes an X-ray tube for irradiating an X-ray to be inspected and a detector for detecting X-rays transmitted through the object to be inspected, A rotation position unit rotatable at a predetermined angle along the circumference; And an inspection stage rotated by the rotation position unit,

The inspection stage has a structure movable along a plane.

According to another preferred embodiment of the present invention, it is rotated by a drive unit located outside the circumference of the rotational position unit.

According to another preferred embodiment of the present invention, the inspection stage comprises a movement regulating substrate coupled to the rotational position unit; And one or two directional guides arranged to extend in different directions on the movement control substrate.

According to another preferred embodiment of the present invention, the detector has a structure capable of moving along a curved ramp.

According to yet another preferred embodiment of the present invention, the apparatus further comprises a drive unit for movement of the rotary position unit, wherein the drive unit is connected by a power transmission means capable of adjusting the tension with the rotary position unit.

According to yet another preferred embodiment of the present invention, there is further provided offset means for relative position compensation with respect to the center as a result of rotation or planar movement of the inspection stage.

According to still another preferred embodiment of the present invention, a planar arrangement frame is formed along the circumferential portion of the rotational position unit, and the circumferential planar surface of the planar arrangement frame is formed of an interference avoiding structure.

The X-ray apparatus according to the present invention moves the test object to various positions based on a predetermined center, and obtains an X-ray image for an arbitrary portion to be inspected. The X-ray apparatus according to the present invention is rotated in various directions with respect to the same center, so that a plurality of images can be obtained and an image similar to a CT (Computed Tomography) image can be obtained therefrom. Also, the X-ray apparatus according to the present invention can obtain an image irradiated with an X-ray at an arbitrary position on a plane with respect to an object to be inspected, so that a directional image in various directions with respect to an object to be inspected can be obtained. In addition, the inspection apparatus according to the present invention increases the inspection efficiency by pre-determining compensation values at different positions along the same circumference.

1 shows an embodiment of an X-ray apparatus according to the present invention.
2 shows another embodiment of the X-ray apparatus according to the present invention.
FIG. 3 illustrates an embodiment of a rotating structure applied to the X-ray apparatus according to the present invention.
4A and 4B show an embodiment of the operation structure of the X-ray apparatus according to the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the accompanying drawings, but the present invention is not limited thereto. In the following description, components having the same reference numerals in different drawings have similar functions, so that they will not be described repeatedly unless necessary for an understanding of the invention, and the known components will be briefly described or omitted. However, It should not be understood as being excluded from the embodiment of Fig.

1 shows an embodiment of an X-ray apparatus according to the present invention.

Referring to FIG. 1, an X-ray apparatus acquires an image at various positions of an object to be examined by an X-ray tube for irradiating an X-ray and a detector for detecting an X-ray transmitted through the object, A rotation position unit (13) rotatable at a predetermined angle along the circumference; And an inspection stage (15) rotated by the rotation position unit (13), and the inspection stage (15) has a structure movable along a plane.

The x-ray device according to the present invention can detect defects in electronic devices, electronic components, various types of batteries, food, containers or similar products, but is not limited thereto. Such objects may be inspected in an enclosed or unsealed condition, or may be combined with other components or inspected in a separate form. The x-ray apparatus may include a control unit for controlling the operation, and may include a driving program for operation. In the X-ray apparatus according to the present invention, inspection of an object to be inspected may be performed in a closed inspection region and may be combined with various transfer means for transferring the inspection object to the inspection region. Although not specifically described below for known units for operation or inspection of the x-ray apparatus, it should be understood that this is for a clear understanding of the present invention. It is therefore to be understood that the x-ray device according to the present invention may include various known components, elements or software not described herein.

The X-ray tube can be set to the irradiation position by the tube positioning module 11, for example, the X-ray tube can be moved up and down along the up-and-down movement guide arranged in the tube positioning module 11. [ In addition, the tube positioning module 11 may have the function of adjusting the focus of the x-ray tube. Depending on the design, the x-ray tube may be positioned so as to be inclined, but this is not required. For example, the inclination adjustment may be performed by a method of adjusting the inclination of the inspection stage 15 with respect to the flat arrangement frame 12. [

The plane positioning frame 12 can be disposed above the tube positioning module 11 and the rotation positioning unit 13 can be disposed inside or inside the plane positioning frame 12. [ The planar arrangement frame 12 can be formed in a circular wall shape as a whole, and can be partly planar while extending along the circumference. Also, as shown in Fig. 1, the planar arrangement frame 12 forms an open area in which the start and end portions are not connected to each other by the wall, while the peripheral wall 121, And can be extended while forming a flat inclined portion 122 whose area gradually increases in shape. With this structure, it is possible to prevent a part of the device from being included in the X-ray image, thereby forming an interference avoiding structure. Such an interference avoiding structure means that a frame is formed or arranged such that a portion of the device is not included in the X-ray image at any position where the inspection stage 15 on which the inspection object is located is rotated or moved in a plane. Such an interference avoiding structure can be appropriately made according to the structure or moving region of the inspection stage 15, and the present invention is not limited to the embodiments shown.

The rotary position unit 13 may be disposed above the plane arrangement frame 12 so that the rotary position unit 13 is rotatable. For example, the rotary position unit 13 includes a drum-like rotary drum having a through- Such as a bearing, disposed in the housing. The rotary position unit 13 can be made to be rotatable at any angle with respect to the plane positioning frame 12 and can be rotated by a drive unit such as a motor, for example.

The movement regulating substrate 14 may be disposed above the rotational position unit 13 and the movement regulating substrate 14 may be a rectangular plate having a corresponding hole formed in the center portion thereof to approximately coincide with the transmission hole, And the movement regulating substrate 14 can have various structures in which the inspection stage 15 can be moved. A pair of one-way guides 141a and 141b extending parallel to each other while facing each other on the movement control substrate 14; A pair of two-direction guides 142a and 142b may be disposed so as to face each other in a direction perpendicular to the one-direction guides 141a and 141b. The inspection stage 15 can be movably coupled to the pair of two-way guides 142a and 142b. A pair of two-way guides 142a and 142b can be arranged to be movable along a pair of one-way guides 141a and 141b. With this structure, the inspection stage 15 is rotated at an arbitrary angle And at the same time can be arranged at an arbitrary position along the plane. Accordingly, the object to be inspected is arranged at various inspection positions, and an X-ray is irradiated to a necessary part to obtain an image of the inspection area.

The focus of the x-ray tube is set by the tube position setting module 11 and the inspection stage 15 can be rotated at a predetermined angle by the rotation position unit 13 when the inspection target is placed on the inspection stage 15. [ The two direction guides 142a and 142b are moved along the one direction guides 141a and 141b and the position of the inspection stage 15 is determined again by the two direction guides 142a and 142b by the guide driving unit 143 . When the inspection object placed on the inspection stage 15 is located in a predetermined inspection area in this way, the X-ray can be irradiated to the inspection object from the X-ray tube and can be detected by the detector. The x-ray tube and the detector can be disposed at positions facing each other, and the x-ray tube or detector can be made movable as required. The x-ray tube and the detector may be located on a straight line perpendicular to the plane of the inspection stage 15 or on a straight line extending at a non-perpendicular angle.

2 shows another embodiment of the X-ray apparatus according to the present invention.

2, a tube adjustment module including an x-ray tube 22 can be coupled to the tube positioning module 11, and the tube adjustment module can be moved up and down by the operation of a position drive unit 111 such as a motor Can be moved. The vertical guide 112 may be formed on the front surface of the tube positioning module 11 and the moving bracket 21 may be coupled to the vertical guide 112 so as to be vertically movable. An inspection module can be coupled to the moving bracket 21, the inspection module comprising a tube housing 23; An X-ray tube 22 fixed inside the tube housing 23; And a drive unit 26 such as a motor for rotation of the rotation position unit 13. [ A plane positioning frame 12 is arranged above the inspection module and a rotation positioning unit 13 can be arranged inside the plane positioning frame 12. The plane positioning frame 12 or the rotation positioning unit 13 may be in the shape of a drum or a disk having a constant thickness and the movement control substrate 14 may be disposed in the rotation positioning unit 13. [ As described above, the movement regulating substrate 14 can be provided with a directional guide so that the inspection stage 15 can be moved to any position in a plane with respect to the movement regulating substrate 14. [ The inspection position setting unit 25 for adjusting the position of the inspection stage 15 in the direction movement guide or for regulating the movement between the different direction guides can be disposed on the upper side of the movement regulating substrate 14 or other appropriate position And a setting drive unit 24 such as a motor for the operation of the inspection position setting unit 25 may be disposed below the plane positioning frame 12 or at another suitable position.

The x-ray tube 22 may be disposed below the plane placement frame 12, above the plane placement frame 12, or on the side of the examination stage 15. [ And the detector 27 may be disposed at a position facing the x-ray tube 22. The x-ray tube 22 may be fixed to a predetermined position, disposed to be movable or inclined to the inspection module. However, when the position or the irradiation angle of the X-ray tube 22 is changed, the focus must be set again, so that the X-ray tube 22 is fixed at a predetermined position, or at least the distance to the predetermined position of the inspection stage 15 is not changed It is advantageous to be disposed. It is advantageous to detect the x-rays irradiated in different directions by the movement of the detector 27, for example, to acquire an image of the inspection object which is transmitted in an oblique direction to the side of the inspection target.

According to the present invention, the detacher 27 can be installed to be movable along the curved guide 29, and the curved guide 29 can be arranged in a circumferential or elliptical shape formed to be perpendicular to the plane formed by the inspection stage 15 And may be formed along the peripheral surface. The curved guide 29 may have a curved shape extending from the lower side of the rotational position unit 13 having, for example, a ring-shaped planar shape. The curved guide 29 may have a semicircular or semicircular approximate shape, and one end may be located above the center of the rotational position unit 13 or above the upper part of the center. The tilt setting unit 28 can be disposed in the curved guide 29 and the tilt setting unit 28 can be configured to be movable along the curved guide 29. [ The direction adjusting unit 281 may be disposed in the inclination setting unit 28 and the direction adjusting unit 281 may have a plane direction and may have a direction adjusting surface facing the center of the rotating position unit 13, The inclination of the adjustment surface can be adjusted with respect to the inclination setting unit 28. [ The detector 27 can be coupled to the direction adjusting surface so that the detection center surface of the detector 27 faces the center of the rotation position unit 13 or the inspection stage 15. [ Such an arrangement structure of the detector 27 enables an image for various directions of the inspection object to be obtained. The moving structure of the rotation position unit 13 and the arrangement of the detector 27 are combined to obtain a plurality of images of the inspection object in a plurality of different directions, ) Image can be obtained.

The detetters 27 can be made of various moving structures and the present invention is not limited to the embodiments shown.

FIG. 3 illustrates an embodiment of a rotating structure applied to the X-ray apparatus according to the present invention.

3, the rotation position unit 13 may be made rotatable relative to the fixed base board B, and the fixed base board B may be fixed to a flat arrangement frame or another fixed frame. A drive unit 26 such as a motor capable of adjusting the rotation angle of the fixed base board B can be disposed and preferably disposed outside the rotation position unit 13. [

The rotary position unit 13 comprises the rotary drum described above; An annular shaft 31 for movement of the rotary drum and a bearing unit 32 such as a bearing for supporting the rotation of the annular shaft 31. The annular shaft 31 and the drive unit 26 can be connected to one another by means of a power transmission means 33, for example a timing belt or the like. The drive unit 26 may be disposed outside the rotational position unit 13 and the power transmission means may be disposed along the circumferential surface of the outer circumferential surface of the annular shaft 31 and the rotational axis connected to the drive unit 26 have. Then, by the operation of the drive unit 26, the annular shaft 31 can be rotated, whereby the inspection stage can be rotated while the rotation position unit 13 is rotated. The inspection stage can be rotated at a predetermined angle, and the rotation angle needs to be precisely adjusted. The tension of the power transmission means 33 needs to be adjusted for this purpose. Tension adjusting means 341 and 342 of at least one rotating roller structure for adjusting the tension of the power transmission means 33 may be disposed between the drive unit 26 and the annular shaft 31, Two tension adjusting means 341 and 342 can be disposed at symmetrical positions. The tension adjusting means 341 and 342 can be disposed on the fixed base board B in a structure capable of rotating in contact with the power transmitting means 33 and being movable in the tension adjusting direction TD. For example, the tension adjustment direction (TD) may be the X-Y axis direction in the plane. The drive unit 26 can be made rotatable according to the design structure. The drive unit 26 can be made to be movable along a rotationally moving circumference RG that forms a concentric circle with the rotational position unit 13, for example. By means of the movable structure along the rotation moving circumference RG of the drive unit 26, an X-ray image in which interference does not occur in an arbitrary direction can be obtained with respect to an inspection object having various structures.

The operation structure of the X-ray apparatus having such a structure will be described below.

4A and 4B show an embodiment of the operation structure of the X-ray apparatus according to the present invention.

Referring to FIGS. 4A and 4B, an operation method of the X-ray apparatus includes a step (P41) of obtaining an image by an X-ray tube with respect to an inspection stage to compensate an error of an image according to the inspection stage; (P42) correcting the error of the image while moving the inspection stage in the X-Y axis direction; (P43) correcting an error of the image according to the rotation angle while rotating the inspection stage at a predetermined angle; A step (P44) of generating a correction table for correcting an error in accordance with the X- and Y-axis movement and the rotational movement; (P45) in which an object to be inspected is placed in a region defined by the X-Y axis and rotational movement and inspection is performed on the object to be inspected; A step (P46) in which the total indicator reading is confirmed at the inspection position; And a step (P47) in which the final image is obtained through correction according to whether the concentricity matches or not.

When the inspection object P is inspected in the inspection apparatus according to the present invention, offset means for relative position compensation with respect to the center according to the plane movement of the inspection stage 15 may be required. The offset means may be the correction table described below or may be, but not limited to, the concentricity measurement means.

The inspection stage can be made in a movable structure, and a reference image can be obtained at the reference position and corrected by an offset value (P41). The inspection stage can be rotated by the rotation position unit as described above so that the inspection target P can be moved to various positions along the rotation path DR in accordance with the rotation center C of the rotation position unit . The inspection stage 15 on which the inspection object P is disposed is provided with one or two directional guides 141a, 141b, 142a (along the two directions D2 corresponding to the Y axis and one direction D1 corresponding to the X axis) , 142b. The inspection stage 15 can be moved by a predetermined distance along the one or two direction guides 141a, 141b, 142a, 142b in accordance with the operation of the first and second mobile units 41, An error may occur depending on the positional change between the X-ray tube or the detector and the inspection target P due to the rotational movement or the plane movement of the inspection target P. Also, the mechanical or geometrical error of the inspection apparatus itself needs to be compensated. Such an error can be determined by the fact that the reference image is obtained at the predetermined position and the offset value according to the error can be determined (P42, P43). A compensation table according to each position can be created as needed (P44). Thereafter, the inspection target P is moved to a predetermined inspection position, and the X-ray irradiated from the X-ray tube is detected by the detector to obtain an X-ray image (P45). When the inspection object P is moved to the inspection position, the concentricity (TIR) can be confirmed before or after the inspection (P46). If it is determined that the rotation centers coincide with each other (YES), a correction value according to the correction table is applied to generate a final x-ray image (P47). On the other hand, if it is determined that the rotation centers do not coincide with each other (NO), the concentricity error can be determined (P48). Then, an offset according to the concentricity error is applied (P49) and a final image can be obtained (P47). Then, whether or not the inspection object P is defective can be determined based on the final image.

The inspection apparatus according to the present invention can have various operating structures and the present invention is not limited to the embodiments shown.

The X-ray apparatus according to the present invention moves the test object to various positions based on a predetermined center, and obtains an X-ray image for an arbitrary portion to be inspected. The X-ray apparatus according to the present invention is rotated in various directions with respect to the same center, so that a plurality of images can be obtained and an image similar to a CT (Computed Tomography) image can be obtained therefrom. Also, the X-ray apparatus according to the present invention can obtain an image irradiated with an X-ray at an arbitrary position on a plane with respect to an object to be inspected, so that a directional image in various directions with respect to an object to be inspected can be obtained. In addition, the inspection apparatus according to the present invention improves the inspection efficiency by pre-determining compensation values at different positions along the same circumference.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention . The invention is not limited by these variations and modifications, but is limited only by the claims appended hereto.

11: tube position setting module 12: plane positioning frame
13: rotation position unit 14: movement control substrate
15: Inspection stage 21: Moving bracket
22: x-ray tube 23: tube housing
24: setting drive unit 25: inspection position setting unit
26: drive unit 27: detector
28: Slope setting unit 29: Curved guide
31: annular shaft 32: support unit
33: power transmission means 41, 42: 1, 2 mobile unit
111: Position drive unit 112: Vertical guide
121: circumferential wall 122: flat inclined portion
141a, 141b: one-way guide 142a, 142b: two-way guide
143: Guide driving unit 281: Direction adjusting unit
341, 342: tension adjusting means B: fixed base board
C: rotation center D1, D2: 1, 2 direction
DR: rotation path P: subject to inspection
RG: Rotating movement circumference TD: Direction of tension adjustment

Claims (7)

An X-ray apparatus comprising an X-ray tube for irradiating an X-ray as an object to be inspected and a detector for detecting X-rays transmitted through the object to be inspected,
A rotation position unit (13) rotatable at a predetermined angle along the circumference with respect to the center; And
And an inspection stage (15) rotated by the rotation position unit (13)
The inspection stage (15) has a structure movable along a plane,
The detector has a structure capable of moving along a curved ramp, the X-ray tube being fixed at a predetermined position, detecting X-rays irradiated in different directions by moving the detector, Wherein the image of the object to be inspected is transmitted through the X-ray detector. The X-ray apparatus according to claim 1, wherein the rotary unit (13) is rotated by a drive unit (26) located outside the circumference. The apparatus according to claim 1, wherein the inspection stage (15) comprises a movement regulating substrate (14) coupled to the rotational position unit (13); And is moved in a plane by one or two directional guides (141a, 141b, 142a, 142b) arranged to extend in mutually different directions on the movement regulating substrate (14). delete The drive unit (26) according to claim 1, further comprising a drive unit (26) for movement of the rotation position unit (13), wherein the drive unit (26) comprises a rotation position unit (13) and a power transmission means Wherein the X-ray detector is connected to the X-ray detector. 2. The x-ray apparatus according to claim 1, further comprising offset means for relative position compensation with respect to the center as a result of rotation or planar movement of the inspection stage (15). The rotary device according to claim 1, further comprising a planar arrangement frame (12) formed along a circumferential portion of the rotary position unit (13), wherein a circumferential surface of the planar arrangement frame (12) Or a planar moving structure.

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