JP4420189B2 - X-ray inspection equipment - Google Patents

X-ray inspection equipment Download PDF

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JP4420189B2
JP4420189B2 JP2003367519A JP2003367519A JP4420189B2 JP 4420189 B2 JP4420189 B2 JP 4420189B2 JP 2003367519 A JP2003367519 A JP 2003367519A JP 2003367519 A JP2003367519 A JP 2003367519A JP 4420189 B2 JP4420189 B2 JP 4420189B2
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JP2005134147A (en
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義経 片岡
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IHI Corp
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Description

本発明は、欠陥等の検出を容易にするために検査台に載置した検査対象物の向きを調整する機能を有するＸ線検査装置に関する。   The present invention relates to an X-ray inspection apparatus having a function of adjusting the direction of an inspection object placed on an inspection table in order to facilitate detection of defects and the like.

Ｘ線透過による検査装置は、医療分野、工場における製品の検査、或いは、空港における所持品のセキュリティチェック、港湾における税関による貨物の検査等、幅広い分野において活用されている。
この種の検査装置は、一般に、Ｘ線発生装置から発生したＸ線を検査対象物（対象者を含む）に向けて照射し、対象物を透過したＸ線をラインセンサを用いて検知し、透過強度の違いを画像化して検査対象物の内部を調べるように構成されている。 X-ray transmission inspection devices are used in a wide range of fields such as medical inspection, inspection of products in factories, security checks of belongings at airports, inspection of cargo by customs at ports, and the like.
This type of inspection apparatus generally irradiates X-rays generated from an X-ray generator toward an inspection object (including a subject), detects X-rays transmitted through the object using a line sensor, The difference in transmission intensity is imaged to examine the inside of the inspection object.

上記Ｘ線検査装置の例として、回路基板（検査対象物）に垂直にＸ線を照射するとともに予め定めた傾斜角度からもＸ線を切り換えて照射することにより、回路基板に装着された電子部品間の接合を短時間で検査する装置の発明がある（例えば、特許文献１参照）。
特開２００２−２９６２０４号公報 As an example of the X-ray inspection apparatus, an electronic component mounted on a circuit board by irradiating a circuit board (inspection object) with X-rays vertically and switching and irradiating X-rays from a predetermined inclination angle. There is an invention of an apparatus that inspects the bonding between the electrodes in a short time (see, for example, Patent Document 1).
JP 2002-296204 A

ところで、Ｘ線検査装置の用途として、配管の欠陥検査等、筒状の対象物の検査を行う場合がある。このような検査では、例えば、配管の径方向に入った欠陥等（外からは見えない未貫通の割れ等）を透過Ｘ線の影の濃淡（割れ等があるとその部分はＸ線が透過し易いので透過後のＸ線強度が当該部のみ強くなる）により検出することになる。
しかし、例えば、図１のように、配管１の径方向に配向した（割れの長手方向が径方向に一致した）細長い割れ２、３の検出を行う場合、長手方向がＸ線Ｂ２に垂直な方向に一致する割れ２は、ラインセンサ４上にほぼその全長に相当する巾のＸ線画像（影）２ａを形成するので、容易に検出することができる。しかし、その長手方向と、Ｘ線Ｂ３の方向とが一致している割れ３は、ラインセンサ４上に、微小な点状のＸ線画像（影）３aを形成するのみであるので、それを検出することは困難となってしまう。 By the way, as an application of the X-ray inspection apparatus, there is a case where an inspection of a cylindrical object such as a defect inspection of a pipe is performed. In such inspections, for example, defects in the radial direction of pipes (unpenetrated cracks that are not visible from the outside) can be transmitted through X-ray shadows (if there are cracks, etc., X-rays are transmitted through that part) Therefore, the X-ray intensity after transmission becomes stronger only in that part).
However, for example, when detecting elongated cracks 2 and 3 oriented in the radial direction of the pipe 1 (the longitudinal direction of the cracks coincides with the radial direction) as shown in FIG. 1, the longitudinal direction is perpendicular to the X-ray B2. Since the crack 2 that coincides with the direction forms an X-ray image (shadow) 2a having a width substantially corresponding to the entire length on the line sensor 4, it can be easily detected. However, since the crack 3 in which the longitudinal direction coincides with the direction of the X-ray B3 only forms a minute dot-like X-ray image (shadow) 3a on the line sensor 4, It will be difficult to detect.

また、上記の他にも、同様の理由により欠陥等の形状、検査対象物における位置や配向と、Ｘ線照射を行うときのＸ線ビームの向きとの関係により該欠陥等の検出が困難になる場合がある。
上記の事情を考慮し、本発明においては、欠陥等の形状或いは検査対象物における位置や配向によらず、検査対象物の欠陥等を検出するに最適な状態でのＸ線検査の可能なＸ線検査装置の提供を目的とする。 In addition to the above, for the same reason, it is difficult to detect the defect due to the relationship between the shape of the defect, the position and orientation in the inspection object, and the direction of the X-ray beam when performing X-ray irradiation. There is a case.
In consideration of the above circumstances, in the present invention, an X-ray inspection capable of X-ray inspection in an optimum state for detecting a defect or the like of an inspection object is possible regardless of the shape of the defect or the position or orientation in the inspection object. The purpose is to provide a line inspection device.

上記目的を達成するため、請求項１の発明によっては、検査対象物が載置されるテーブルを、Ｘ線源とこのＸ線源に対峙させて設けられたラインセンサとの間に形成されるＸ線ビーム面を横切ってテーブルを移動させる移動機構を備え、前記テーブル上に載置された検査対象物を、前記Ｘ線ビーム面を横切って通過させて該検査対象物をＸ線透視検査するＸ線検査装置において、
前記テーブルを、前記Ｘ線ビーム面と交差する前記テーブルの移動方向を軸として傾斜可能に設けると共に、前記Ｘ線ビーム面とのなす角度を調整可能に設けたことを特徴とするＸ線検査装置が提供される。 In order to achieve the above object, according to the first aspect of the present invention, a table on which an inspection object is placed is formed between an X-ray source and a line sensor provided facing the X-ray source. A moving mechanism for moving the table across the X-ray beam surface is provided, and the inspection object placed on the table is passed across the X-ray beam surface to perform X-ray fluoroscopic inspection. In X-ray inspection equipment ,
An X-ray inspection apparatus characterized in that the table is provided so as to be tiltable about the moving direction of the table that intersects the X-ray beam surface, and an angle formed with the X-ray beam surface is adjustable. Is provided.

好ましくは前記テーブルを、前記Ｘ線ビーム面を横切って移動可能に設けられた検査台に傾斜機構を介して任意の角度で傾斜可能に支持することとしてもよい（請求項２）。
また、傾斜機構は、前記テーブルを支持した支持体を前記Ｘ線ビーム面に垂直な軸を中心として任意の角度で傾ける第１の機構と、この第１の機構の回動軸と直交する方向を軸として前記支持体に対して前記テーブルを傾ける第２の機構により構成するようにすればよい（請求項３）。 Preferably the table may be be tiltable support at any angle through the tilt mechanism on the examination table that is movable across the X-ray beam plane (claim 2).
The tilt mechanism includes a first mechanism for tilting the support supporting the table at an arbitrary angle about an axis perpendicular to the X- ray beam plane, and a direction orthogonal to the rotation axis of the first mechanism. it suffices to constitute a second mechanism for tilting the table relative to the support body as an axis (claim 3).

さらに前記第1の機構の回転軸を、前記テーブルよりも上側に設け、かつ前記テーブルとの間の距離を調節可能に設けても良い（請求項４）。 Furthermore, the rotating shaft of the first mechanism may be provided above the table , and the distance from the table may be adjusted ( Claim 4 ).

本発明のＸ線検査装置は、検査対象物を載置するテーブルを傾斜させる傾斜手段を備えるので、検査対象物を、Ｘ線ビーム面に対し任意の角度で傾斜させることができる。この結果、検査対象物内部の欠陥等の長手方向をＸ線ビームの方向に対し、最も検出しやすい方向、すなわち垂直に設定することができる。このため、ラインセンサ側に長さの長いＸ線画像（影）を形成できるので、欠陥等を容易に検出することができる。 Since the X- ray inspection apparatus of the present invention includes the tilting means for tilting the table on which the inspection object is placed, the inspection object can be inclined at an arbitrary angle with respect to the X-ray beam surface. As a result, the longitudinal direction of a defect or the like inside the inspection object can be set to the direction that is most easily detected, that is, perpendicular to the X-ray beam direction. For this reason, since a long X-ray image (shadow) can be formed on the line sensor side, defects and the like can be easily detected.

また、傾斜の回動軸がテーブルより上側に設置してあり、テーブルと軸との距離を調節できるので、以下の効果が期待できる。すなわち、該検査対象物の軸を中心軸として傾斜させても、検査対象物はその軸を中心として回動するのみであり、その位置は殆ど移動することがない。このため、配管等円筒状の検査対象物に径方向の欠陥等が入っている場合にも、容易に該欠陥等を検出することができる。   In addition, since the inclined rotation shaft is installed above the table and the distance between the table and the shaft can be adjusted, the following effects can be expected. That is, even if the inspection object is tilted with the axis of the inspection object as the central axis, the inspection object only rotates about the axis, and the position hardly moves. Therefore, even when a cylindrical inspection object such as a pipe has a radial defect or the like, the defect or the like can be easily detected.

以下、本発明のＸ線検査装置にかかる一実施形態を、図面を参照しながら説明する。
図２に示すように、Ｘ線検査装置１０は、Ｘ線発生装置１１、ラインセンサ１２、検査台２０及び走行機構６０等を備えて構成される。
図２において、Ｘ線は、Ｘ線発生装置１１により図中上から下に向かって扇状に照射され、扇状照射面Ｓ（Ｘ線ビーム面）を形成する。また、Ｘ線発生装置１１に対峙して、Ｘ線発生装置１１の下方にラインセンサ１２が設置されている。 Hereinafter, an embodiment of the X-ray inspection apparatus of the present invention will be described with reference to the drawings.
As shown in FIG. 2, the X-ray inspection apparatus 10 includes an X-ray generation apparatus 11, a line sensor 12, an inspection table 20, a traveling mechanism 60, and the like.
In FIG. 2, X-rays are irradiated in a fan shape from the top to the bottom in the figure by the X-ray generator 11 to form a fan-shaped irradiation surface S (X-ray beam surface). In addition, a line sensor 12 is installed below the X-ray generator 11 so as to face the X-ray generator 11.

このような扇形照射面Ｓ（Ｘ線ビーム面）を横切るように設けられた走行機構６０は、扇状照射面Ｓに対して垂直（水平方向）に、互いに平行に設置された２条のリニアガイド６１ａ、６１ｂと、該リニアガイド６１ａ、６１ｂ上にそれらを跨ぐように載置される台車６２とを備えて構成される。
台車６２は、リニアガイド６１ａ、６１ｂに沿って（図２中の矢印Ｘ１、Ｘ２方向）、図示しない車輪とその駆動機構によりリニアガイド６１ａ、６１ｂ上をそれぞれ走行できる２つの走行部６４ａ、６４ｂと、これらの走行部６４ａ、６４ｂ間に張架された2本の横木（リニアガイド）６３ａ、６３ｂとを備える。平行に設けられた横木６３ａ、６３ｂは、検査台２０を移動自在に支持するリニアガイドとして機能する。 The traveling mechanism 60 provided so as to cross the fan-shaped irradiation surface S (X-ray beam surface) has two linear guides installed in parallel to each other perpendicularly (horizontal direction) to the fan-shaped irradiation surface S. 61a, 61b, and a carriage 62 placed on the linear guides 61a, 61b so as to straddle them.
The carriage 62 has two traveling portions 64a and 64b that can travel on the linear guides 61a and 61b along the linear guides 61a and 61b (in the directions of arrows X1 and X2 in FIG. 2) by a wheel (not shown) and its drive mechanism, respectively. , And two rungs (linear guides) 63a and 63b stretched between the travel portions 64a and 64b. The crosspieces 63a and 63b provided in parallel function as a linear guide that supports the inspection table 20 in a movable manner.

すなわち、検査台２０は、横木６３ａ、６３ｂに挟みこまれるように台車６２上に設置され、図示しない車輪とその駆動機構により、横木６３ａ、６３ｂに沿って（図２中の矢印Ｙ１、Ｙ２参照）走行可能に設けられている。
また、詳細は後述するが、検査台２０は、配管Ｐ等の検査対象物を載置するテーブル４０を備え、テーブル４０を、扇状照射面Ｓに対して垂直な方向の中心軸２４を中心として任意の角度で傾斜させる（図２の矢印Ｖ方向）機構（第１の機構）と、扇状照射面Ｓとなす角度を調整可能に傾斜させる（図２の矢印Ｈ方向）機構（第２の機構）とを備える。 That is, the inspection table 20 is installed on the carriage 62 so as to be sandwiched between the crosspieces 63a and 63b, and along the crosspieces 63a and 63b (see arrows Y1 and Y2 in FIG. 2) by a wheel (not shown) and its driving mechanism. ) It is provided so that it can run.
Although the details will be described later, the inspection table 20 includes a table 40 on which an inspection object such as a pipe P is placed, and the table 40 is centered on a central axis 24 in a direction perpendicular to the fan-shaped irradiation surface S. A mechanism (first mechanism) that tilts at an arbitrary angle (first mechanism) and a mechanism (second mechanism) that tilts the angle formed with the fan-shaped irradiation surface S so as to be adjustable (second mechanism). ).

なお、以上に説明したＸ線検査装置１０の全体は図示しない遮蔽体に覆われており、該遮蔽体のＸ２方向側端部には、上下に移動する遮蔽扉ＳＨ（図２には図示せず、図５参照）がある。台車６２は、遮蔽扉ＳＨを通過して遮蔽扉ＳＨの反対側までリニアガイド６１ａ、６１ｂ上を走行することができる。
次に検査台２０の構造について図３を参照して説明する。 Note that the entire X-ray inspection apparatus 10 described above is covered with a shield (not shown), and a shield door SH (not shown in FIG. 2) moves up and down at the X2 direction side end of the shield. First, see FIG. The carriage 62 can travel on the linear guides 61a and 61b through the shielding door SH to the opposite side of the shielding door SH.
Next, the structure of the inspection table 20 will be described with reference to FIG.

検査台２０は、概略的には四角形状のテーブル４０と、このテーブル４０を傾斜可能に支持した中枠３０と、更にこの中枠３０を該中枠３０の傾斜の向きと直交する方向を軸として回動自在に支持した外枠２１とにより構成される。具体的には前記テーブル４０は、検査対象物を載置する四角形状の載置面を形成したもので、その一端部両側に一対の軸ピン４１ａ、４１ｂを突設すると共に、他端部下面に円弧状のラックギヤ４２ａ、４２ｂを突設した構造を有している。そしてこのテーブル４０は、上記一対の軸ピン４１ａ、４１ｂを前記中枠３０に設けられた軸受３６ａ、３６ｂに嵌め込むと共に、前記ラックギヤ４２ａ、４２ｂを前記中枠３０に設けられたピニオンギヤ３８ａ、３８ｂにそれぞれ噛合させることで、中枠３０の内側に傾斜可能に組み付けられている。尚、上記ピニオンギヤ３８ａ、３８ｂは、中枠３０に取り付けられたモータ３７ａ、３７ｂによりそれぞれ回転駆動される。これらのモータ３７ａ、３７ｂにより前記ピニオンギヤ３８ａ、３８ｂを介してラックギヤ４２ａ、４２ｂを上下動させることで、前記テーブル４０が前記軸受３６ａ、３６ｂに軸支された軸ピン４１ａ、４１ｂを支点として中枠３０に対して傾けられる。   The inspection table 20 includes a generally rectangular table 40, a middle frame 30 that supports the table 40 so as to be tiltable, and the middle frame 30 that is perpendicular to the direction of inclination of the middle frame 30. And an outer frame 21 supported rotatably. Specifically, the table 40 is formed with a rectangular placement surface on which an inspection object is placed. A pair of shaft pins 41a and 41b are provided on both sides of one end of the table 40, and the bottom surface of the other end is provided. In this structure, arc-shaped rack gears 42a and 42b are projected. In the table 40, the pair of shaft pins 41a and 41b are fitted into bearings 36a and 36b provided in the middle frame 30, and the rack gears 42a and 42b are pinion gears 38a and 38b provided in the middle frame 30. By being respectively meshed with each other, the inner frame 30 is assembled so as to be tiltable. The pinion gears 38a and 38b are driven to rotate by motors 37a and 37b attached to the middle frame 30, respectively. The racks 42a and 42b are moved up and down by the motors 37a and 37b through the pinion gears 38a and 38b, so that the table 40 is supported by the shaft pins 41a and 41b pivotally supported by the bearings 36a and 36b. Tilt to 30.

一方、前記中枠３０の前記テーブル４０が傾斜する向きに対向する２つの辺部上面の各中央部には、該中枠３０の上方に向けて一対の高さ調整機構が設けられている。これらの高さ調整機構は、基本的には中枠３０に平行に突設された支持体３１ａ、３１ｂと、これらの支持体３１ａ、３１ｂ間に上下動自在に支持された調整体３２とからなる。特にこの調整体３２は、該調整体３２に一体に組み付けられたラックギヤ３３を、前記支持体３１ａに設けられたモータ３４により駆動されるピニオンギヤ３５に噛合させて前記支持体３１ａ、３１ｂに組み付けられている。そして調整体３２は、モータ３４の回転により上記ピニオンギヤ３５およびラックギヤ３３を介して前記支持体３１ａ、３１ｂに対して、ひいては中枠３０に対する高さが調整可能に設けられている。   On the other hand, a pair of height adjustment mechanisms are provided above the middle frame 30 at the center of each of the upper surfaces of the two sides facing the table 40 of the middle frame 30 in an inclined direction. These height adjustment mechanisms are basically composed of support bodies 31a and 31b protruding in parallel to the inner frame 30, and an adjustment body 32 supported so as to be movable up and down between the support bodies 31a and 31b. Become. In particular, the adjustment body 32 is assembled to the support bodies 31a and 31b by engaging a rack gear 33 integrally assembled with the adjustment body 32 with a pinion gear 35 driven by a motor 34 provided on the support body 31a. ing. The adjustment body 32 is provided such that the height relative to the support bodies 31 a and 31 b and, consequently, the middle frame 30 can be adjusted by the rotation of the motor 34 via the pinion gear 35 and the rack gear 33.

また高さ調整機構における上記各調整体３２の上端部には一対の軸ピン２４ａ、２４ｂが、その軸心を揃えて同軸（中心軸２４）に設けられている。これらの軸ピン２４ａ、２４ｂは、前述した外枠２１の上面に突設された支柱２２ａ、２２ｂの各上端部に設けられた軸受２３ａ、２３ｂにそれぞれ軸支されるものである。このような軸受機構を介することで前述した如くテーブル４０を支持した中枠３０が、外枠２１に対して前述したテーブル４０の傾斜方向と直交する方向に傾斜可能に設けられている。尚、中枠３０の傾斜は、例えば前記軸ピン２４ａ、２４ｂに連結された図示しないモータを回転させることによって行われる。   In addition, a pair of shaft pins 24a and 24b are provided coaxially (center shaft 24) at the upper end portion of each adjustment body 32 in the height adjustment mechanism with the axes thereof aligned. These shaft pins 24a and 24b are respectively supported by bearings 23a and 23b provided at the upper ends of the support columns 22a and 22b protruding from the upper surface of the outer frame 21 described above. As described above, the middle frame 30 that supports the table 40 through such a bearing mechanism is provided so as to be inclined with respect to the outer frame 21 in a direction orthogonal to the inclination direction of the table 40 described above. The middle frame 30 is inclined by, for example, rotating a motor (not shown) connected to the shaft pins 24a and 24b.

上述した如く構成された検査台２０においては、軸受支柱２２ａ、２２ｂ、軸受２３ａ、２３ｂ、軸ピン２４ａ、２４ｂ、一対の調整体３２、支持板３１ａ、３１ｂ等により、Ｘ線照射面に対して直角な軸を中心としてテーブル４０を傾斜させる第１の機構が構成される。また、軸ピン４１ａ、４１ｂ、軸受３６ａ、３６ｂ、ラックギヤ４２ａ、４２ｂ、モータ３７ａ、３７ｂ、ピニオンギヤ３８ａ、３８ｂ等により、Ｘ線照射面に対してテーブル４０を傾斜させる第２の機構が構成される。   In the inspection table 20 configured as described above, the bearing columns 22a and 22b, the bearings 23a and 23b, the shaft pins 24a and 24b, the pair of adjusting bodies 32, the support plates 31a and 31b, etc. A first mechanism for tilting the table 40 about a right angle axis is configured. The shaft pins 41a and 41b, bearings 36a and 36b, rack gears 42a and 42b, motors 37a and 37b, pinion gears 38a and 38b, and the like constitute a second mechanism for tilting the table 40 with respect to the X-ray irradiation surface. .

次に、Ｘ線検査装置１０の作用について説明する。
前述のように、検査台２０は、配管Ｐ等の検査対象物を載置するテーブル４０を、扇状照射面Ｓに対して垂直な方向の中心軸２４を中心として任意の角度で傾斜させる（図２の矢印Ｖ方向）機構（第１の機構）と、扇状照射面Ｓとテーブル４０のなす角度を調整可能に傾斜させる（図２の矢印Ｈ方向）機構（第２の機構）とを備える。このため、検査台２０のテーブル４０に載置した配管Ｐ等を、例えば径方向に配向した細長い欠陥等をその長手方向がＸ線照射ビーム方向に垂直となるように、傾斜させることができる。このため、Ｘ線照射を行うと、図１の割れ２と同様に、ラインセンサ１２上には、該欠陥等の長いＸ線画像（影）が生じるので、該欠陥等を容易に検出することができる。 Next, the operation of the X-ray inspection apparatus 10 will be described.
As described above, the inspection table 20 tilts the table 40 on which the inspection object such as the pipe P is placed at an arbitrary angle around the central axis 24 in the direction perpendicular to the fan-shaped irradiation surface S (see FIG. 2 (in the direction of arrow V)) (first mechanism) and a mechanism (second direction) in which the angle formed by the fan-shaped irradiation surface S and the table 40 is adjustable (in the direction of arrow H in FIG. 2). For this reason, the pipes P and the like placed on the table 40 of the inspection table 20 can be inclined such that, for example, elongated defects oriented in the radial direction are perpendicular to the X-ray irradiation beam direction. For this reason, when X-ray irradiation is performed, a long X-ray image (shadow) of the defect or the like is generated on the line sensor 12 like the crack 2 in FIG. Can do.

前述のように中心軸２４は、テーブル４０より上にあり、配管Ｐの軸と中心軸２４とが一致するように中心軸２４とテーブル４０との距離Ｌ１（図４（ａ）参照）を調節することができるので、配管Ｐの軸と中心軸２４とを一致させることができる。このため、図４（ａ）に示すように、テーブル４０を傾斜させると、配管Ｐは回転するが、その位置は殆ど移動せず、Ｘ線画像の観察に有利である。上記の調節機構がなく、中心軸を配管Ｐ等の軸に一致させることが出来ない場合にテーブル４０を傾斜させると、例えば、図４（ｂ）のように配管Ｐの位置が移動してしまい、Ｘ線画像の観察に不都合を生じるが、本Ｘ線検査装置１０においてはそのような問題はない。   As described above, the center axis 24 is above the table 40, and the distance L1 (see FIG. 4A) between the center axis 24 and the table 40 is adjusted so that the axis of the pipe P and the center axis 24 coincide with each other. Therefore, the axis of the pipe P and the central axis 24 can be matched. For this reason, as shown in FIG. 4A, when the table 40 is tilted, the pipe P rotates, but its position hardly moves, which is advantageous for observation of an X-ray image. If the table 40 is tilted when the adjusting mechanism is not provided and the central axis cannot coincide with the axis of the pipe P or the like, for example, the position of the pipe P moves as shown in FIG. Although inconvenience occurs in the observation of the X-ray image, the X-ray inspection apparatus 10 does not have such a problem.

次にＸ線検査装置１０の使用方法について図５〜図６を参照して説明する。
Ｘ線発生装置１１とは遮蔽扉ＳＨを隔てた場所で、図５に示すように台車６２に載置された検査台２０のテーブル４０に、検査対象物、例えば、配管Ｐを、その軸を水平かつリニアガイド６１a、６１ｂに平行に載置する。
いったん遮蔽扉ＳＨを開けて、台車６２をリニアガイド６１ａ、６１bに沿ってＸ１方向に走行させ、遮蔽扉ＳＨを通過させる。台車６２が遮蔽扉ＳＨを通過した後に遮蔽扉を閉め、Ｘ線発生装置１１からＸ線を発生させ、扇状照射面Ｓを形成させる。そしてテーブル４０上の配管Ｐが、扇状照射面Ｓを通過するようにする。配管Ｐを透過したＸ線は下に設置したラインセンサ１２に検知されるので、その透過Ｘ線の強弱からＸ線画像を構成させ、欠陥等の検出を行う。このとき、配管Ｐの軸が水平でない場合（図６（ａ）の場合）には、図６（ｂ）に示すように傾斜機構（第２の傾斜機構）により、テーブル４０を扇状照射面Sに対し傾斜させて配管Ｐの軸を水平面と一致させる。また、テーブル４０上の配管Ｐ等が扇状照射面Ｓの中心からずれて偏った位置にある場合には、横木６３ａ、６３ｂに沿って検査台２０を扇状照射面Ｓに平行な方向に移動させ、扇状照射面Ｓの中心にあわせる。さらに、細長いクラック等の欠陥２の長手方向が径方向にある場合には、傾斜機構（第１の機構）によりテーブル４０を扇状照射面Sに垂直な軸を中心として傾斜させ、欠陥の長手方向が、Ｘ線ビームに対し垂直になるように（すなわち、図１の割れ２と同じ配向となるように）調節する。その際、必要があれば、配管Ｐの軸と中心軸とが一致するよう調節機構によりテーブル４０と中心軸２４との距離を調節する。 Next, a method of using the X-ray inspection apparatus 10 will be described with reference to FIGS.
The X-ray generator 11 is separated from the shielding door SH, and the inspection object, for example, the pipe P is placed on the table 40 of the inspection table 20 placed on the carriage 62 as shown in FIG. It is placed parallel to the horizontal and linear guides 61a and 61b.
Once the shielding door SH is opened, the carriage 62 is caused to travel in the X1 direction along the linear guides 61a and 61b to pass the shielding door SH. After the carriage 62 passes through the shielding door SH, the shielding door is closed, X-rays are generated from the X-ray generator 11, and the fan-shaped irradiation surface S is formed. Then, the pipe P on the table 40 passes through the fan-shaped irradiation surface S. Since the X-ray transmitted through the pipe P is detected by the line sensor 12 installed below, an X-ray image is formed from the intensity of the transmitted X-ray and a defect or the like is detected. At this time, if the axis of the pipe P is not horizontal (in the case of FIG. 6A), the table 40 is moved to the fan-shaped irradiation surface S by the tilt mechanism (second tilt mechanism) as shown in FIG. 6B. The axis of the pipe P is made to coincide with the horizontal plane. In addition, when the pipe P or the like on the table 40 is deviated from the center of the fan-shaped irradiation surface S, the inspection table 20 is moved in a direction parallel to the fan-shaped irradiation surface S along the rungs 63a and 63b. Align with the center of the fan-shaped irradiation surface S. Further, when the longitudinal direction of the defect 2 such as an elongated crack is in the radial direction, the tilting mechanism (first mechanism) causes the table 40 to be tilted about the axis perpendicular to the fan-shaped irradiation surface S, and the longitudinal direction of the defect Is adjusted to be perpendicular to the X-ray beam (that is, to have the same orientation as the crack 2 in FIG. 1). At that time, if necessary, the distance between the table 40 and the central axis 24 is adjusted by an adjusting mechanism so that the axis of the pipe P and the central axis coincide with each other.

このようにして、欠陥等を最も検出しやすい位置及び方向に検査対象物を位置付けてＸ線検査を行うので、容易に欠陥を検出することができる。
Ｘ線検査後には、配管Ｐ等を載置した場所まで戻り、配管Ｐ等を下ろして別の検査対象物を載置して同様の手順により検査を行う。
なお、本実施例形態においては、台車６２、検査台２０はリニアガイド（又は横木）に沿って走行することとしたが、それ以外の走行手段によってもよく、また、例えば、ベルトコンベアによって移動させることとしてもよい。 In this way, the X-ray inspection is performed by positioning the inspection object in the position and direction in which the defect or the like is most easily detected, so that the defect can be easily detected.
After the X-ray inspection, the process returns to the place where the pipe P or the like is placed, the pipe P or the like is lowered, another inspection object is placed, and the inspection is performed according to the same procedure.
In the present embodiment, the carriage 62 and the inspection table 20 travel along the linear guide (or crosspiece). However, other traveling means may be used, and they may be moved by, for example, a belt conveyor. It is good as well.

さらに、傾斜機構（第１の機構、第２の機構）及び中心軸とテーブルとの距離の調節機構についても本実施形態に限ることなく別の機構によってもよい。例えば、ねじによる手動調節によってもよい。
尚、テーブル４０上に配管（検査対象物）Ｐを載置するに際しては、ボルト等を用いてその軸心を挟み込んで該配管（検査対象物）Ｐをテーブル４０上に固定することが好ましい。このようにしてテーブル４０上に配管（検査対象物）Ｐを固定すれば、テーブル４０を傾けても配管Ｐが位置ずれすることがないのでＸ線照射面Ｓに対して配管Ｐを所望とする角度に容易に位置付けることが可能となる。この際、ばね力を利用して配管（検査対象物）Ｐの重量に応じてその高さ位置が変化する受台等を用いて、前記ボルトに配管（検査対象物）Ｐの固定位置を自動的に設定することも好適である。このような受台を用いれば、重量密度が同じで大きさの異なる幾つかの検査対象物Ｐを順次Ｘ線透視検査するような場合、その作業効率の向上を図ることが可能となる。 Furthermore, the tilting mechanism ( first mechanism, second mechanism) and the mechanism for adjusting the distance between the central axis and the table are not limited to this embodiment, and other mechanisms may be used. For example, manual adjustment with a screw may be used.
When placing the pipe (inspection object) P on the table 40, it is preferable to fix the pipe (inspection object) P on the table 40 by sandwiching its axis using bolts or the like. If the pipe (inspection object) P is fixed on the table 40 in this way, the pipe P will not be displaced even if the table 40 is tilted. Therefore, the pipe P is desired with respect to the X-ray irradiation surface S. It can be easily positioned at an angle. At this time, the fixing position of the pipe (inspection object) P is automatically fixed to the bolt by using a cradle or the like whose height position changes according to the weight of the pipe (inspection object) P using spring force. It is also preferable to set it automatically. If such a cradle is used, when several inspection objects P having the same weight density but different sizes are sequentially subjected to X-ray fluoroscopic inspection, it is possible to improve the working efficiency.

またテーブル４０上に光学センサやカメラを組み込んでおき、光学センサやカメラを介して検出される検査対象物Ｐの情報に従ってその中心位置を計算して該検査対象物Ｐの前述したボルトによる固定位置を設定するように構成することも勿論可能である。更にはこのようにして固定した検査対象物Ｐの軸心を、前述した中心軸２４に一致させるような軸合わ機構を組み込んでおくことも有用である。その他、本発明はその要旨を逸脱しない範囲で種々変形して実施することができる。   Further, an optical sensor or camera is incorporated on the table 40, the center position is calculated according to the information of the inspection object P detected via the optical sensor or camera, and the fixing position of the inspection object P by the bolt described above. Of course, it is possible to configure so as to set. Furthermore, it is also useful to incorporate an axis alignment mechanism that aligns the axis of the inspection object P thus fixed with the central axis 24 described above. In addition, the present invention can be variously modified and implemented without departing from the scope of the invention.

配管等の径方向に細長く配向した欠陥等のＸ線検査による検出の難易を示す概念図である。It is a conceptual diagram which shows the difficulty of a detection by the X-ray inspection of the defect etc. which were elongated in the radial direction, such as piping. 本発明の一実施形態であるＸ線検査装置１０の検査台２０、走行機構６０等を示す概略構成図である。It is a schematic block diagram which shows the test | inspection stand 20, the traveling mechanism 60, etc. of the X-ray inspection apparatus 10 which is one Embodiment of this invention. 本発明の一実施形態であるＸ線検査装置１０の検査台２０の構造を示す斜視図である。It is a perspective view which shows the structure of the inspection stand 20 of the X-ray inspection apparatus 10 which is one Embodiment of this invention. 本発明の一実施形態であるＸ線検査装置１０の回転機構によるテーブル４０及び検査対象物（配管Ｐ）の回転の様子を示す概念図である。It is a conceptual diagram which shows the mode of rotation of the table 40 by the rotation mechanism of the X-ray inspection apparatus 10 which is one Embodiment of this invention, and a test object (pipe P). 本発明の一実施形態であるＸ線検査装置１０による検査方法を示す概念図である。It is a conceptual diagram which shows the inspection method by the X-ray inspection apparatus 10 which is one Embodiment of this invention. 本発明の一実施形態であるＸ線検査装置１０の傾斜機構の作用を示す概念図である。It is a conceptual diagram which shows the effect | action of the inclination mechanism of the X-ray inspection apparatus 10 which is one Embodiment of this invention.

符号の説明Explanation of symbols

１０ Ｘ線検査装置
１１ ラインセンサ
２０ 検査台
２４ 中心軸
２４ａ、２４ｂ 軸ピン
３０ 中枠（テーブルの支持体）
４０ テーブル
４２ａ、４２ｂ ラックギヤ
６０ 走行機構
Ｓ 扇状照射面
Ｐ 配管（検査対象物） DESCRIPTION OF SYMBOLS 10 X-ray inspection apparatus 11 Line sensor 20 Inspection stand 24 Center axis 24a, 24b Axis pin 30 Middle frame (table support body)
40 Tables 42a and 42b Rack gear 60 Traveling mechanism S Fan-shaped irradiation surface P Piping (inspection object)

Claims (4)

検査対象物が載置されるテーブルを、Ｘ線源とこのＸ線源に対峙させて設けられたラインセンサとの間に形成されるＸ線ビーム面を横切って移動させる移動機構を備え、前記テーブル上に載置された検査対象物を、前記Ｘ線ビーム面を横切って通過させて該検査対象物を透視検査するＸ線検査装置において、
前記テーブルを、前記Ｘ線ビーム面と交差する前記テーブルの移動方向を軸として傾斜可能に設けると共に、前記Ｘ線ビーム面とのなす角度を調整可能に設けたことを特徴とするＸ線検査装置。 A moving mechanism for moving a table on which an inspection object is placed across an X-ray beam surface formed between an X-ray source and a line sensor provided opposite to the X-ray source ; In an X-ray inspection apparatus for passing through an inspection object placed on a table across the X-ray beam surface and performing a fluoroscopic inspection of the inspection object ,
An X-ray inspection apparatus characterized in that the table is provided so as to be tiltable about the moving direction of the table that intersects the X-ray beam surface, and an angle formed with the X-ray beam surface is adjustable. . 前記テーブルは、前記Ｘ線ビーム面を横切って移動可能に設けられた検査台に傾斜機構を介して任意の角度で傾斜可能に支持されたものである請求項１に記載のＸ線検査装置。 The table, X-rays inspection apparatus according to claim 1 in which is tiltably supported at any angle through the tilt mechanism on the examination table that is movable across the X-ray beam surface. 前記傾斜機構は、前記テーブルを支持した支持体を前記Ｘ線ビーム面に垂直な軸を中心として任意の角度で傾ける第１の機構と、この第１の機構の回動軸と直交する方向を軸として前記支持体に対して前記テーブルを傾ける第２の機構とからなる請求項２に記載のＸ線検査装置。 The tilt mechanism includes a first mechanism for tilting the support supporting the table at an arbitrary angle about an axis perpendicular to the X-ray beam plane, and a direction orthogonal to the rotation axis of the first mechanism. The X-ray inspection apparatus according to claim 2 , comprising a second mechanism that tilts the table with respect to the support as an axis. 前記第１の機構の回転軸は、前記テーブルよりも上側に設けられ、かつ前記テーブルとの間の距離を調節可能に設けられることを特徴とする請求項３に記載のＸ線検査装置。 The X-ray inspection apparatus according to claim 3 , wherein the rotation shaft of the first mechanism is provided above the table and is provided so that a distance from the table can be adjusted.
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