JP2007311358A - Organic el device and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve such problems in prior organic EL elements utilizing TFT elements that the elements have a constraint to lower the opening ratio, a high driving voltage to make a luminance, an increased power consumption, and a short lifetime, and that external light reflect and reduces contrast due to reflections from inter-pixel wirings. <P>SOLUTION: A film structure of the organic EL element is constituted with lamination structure of a negative electrode 2, a light emitting layer 3, a positive hole injection layer 4, and a transparent positive electrode 5 in this order on a substrate 1. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a structure of an organic electroluminescence (hereinafter referred to as organic EL) device as a display device used in an information terminal device such as a computer, a mobile phone, and a television, and a manufacturing method thereof.

  In recent years, the portable use of information terminals is accelerating, and the development of power-saving displays that are necessary for carrying them has become active. In particular, organic EL displays are attracting attention, and their development has entered the practical stage.

  In order to realize a power saving display, it is most effective to drive the organic EL element with an active element such as a thin film transistor (TFT. For example, if an active element is used, the organic EL element is driven with a DC voltage. In a simple matrix drive that does not use an active element, a high voltage is applied during a selection period to increase luminance. For this reason, the organic EL element is subjected to a great burden, and the light emission efficiency is lowered.

  An active matrix system using a TFT or the like is effective for a power-saving organic EL display, but has a disadvantage that an aperture ratio indicating a ratio of a light emitting area to a display area as a display becomes low. When the aperture ratio decreases, the luminance per pixel must be increased in order to increase the display luminance. As a result, the drive voltage increases, resulting in an increase in power consumption, and a burden is placed on the organic EL element, resulting in a problem of shortening the lifetime. In order to solve such a problem, as shown in FIG. 2, there is an example in which the cathode is made transparent in order to emit light from the opposite side of the substrate in the configuration of the organic EL element (device) ( IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL.44, No.8, pp. 1188-1203). Specifically, the anode 5, the hole injection layer 4, the light emitting layer 3, the cathode 2, and the transparent auxiliary cathode 21 are laminated on the substrate 1 in this order, and light is emitted from the transparent auxiliary cathode 21 side. In this way, it is not necessary to emit light from the TFT substrate side, however, the light transmittance of the cathode used in the above structure is about half that of the substrate, and the display is substantially darkened. There was a problem.

  The present invention has been made in view of the above problems, and the object of the present invention is to provide an element configuration that does not lower the aperture ratio and the light transmittance even when a switching element is used, and a method for manufacturing the same. Therefore, an object is to provide an organic EL device with low power consumption and long life.

An organic EL device according to an embodiment of the present invention includes a substrate, a plurality of pixels provided on the substrate, and a partition wall made of an insulator disposed between the pixels of the plurality of pixels. In each of the plurality of pixels, a first electrode having light reflectivity, a light emitting layer, and a second electrode having light transmittance are stacked in this order on one surface of the substrate. An electrode is an active matrix type organic EL device provided in common to the plurality of pixels, and the auxiliary electrode of the second electrode is disposed on the side opposite to the front substrate of the partition and the partition in plan view. The second electrode and the auxiliary electrode are in contact with each other over a region where the partition wall and the second electrode overlap in plan view.

  An organic EL device manufacturing method according to an embodiment of the present invention includes a step of forming a first electrode on one surface of a substrate, a step of applying an insulating material to the one surface of the substrate, and the insulation. Forming a conductive material on a surface of the conductive material opposite to the substrate; patterning and etching the conductive material to form an auxiliary electrode; and the insulating material in a region not overlapping the auxiliary electrode Baking the insulating material located in a region overlapping with the auxiliary electrode after patterning etching, forming a partition, laminating at least a light emitting layer in the region partitioned by the partition, and partitioning by the partition Forming a second electrode in common on the surface of the auxiliary electrode opposite to the substrate.

According to an application example of the present invention, there is provided an organic EL device characterized in that at least a cathode, a light emitting layer, and an anode are stacked in this order on a substrate.

Further, according to an application example of the present invention , an organic EL device having a plurality of pixels on a substrate, each of the plurality of pixels is a region partitioned by a partition wall, and in the region, from the substrate side An organic EL device is provided in which one electrode, a light emitting layer, and a second electrode are laminated in this order, and light from the light emitting layer is emitted to the outside from the second electrode side.

Further, according to the application example of the present invention , there is provided a method for manufacturing an organic EL device, wherein at least a cathode, a light emitting layer, and a transparent anode are laminated on a substrate in this order.

The first feature of the application example of the present invention is that in the organic EL device, at least a cathode, a light emitting layer, and an anode are laminated in this order on a substrate.

  According to this structure, since light can be emitted to the side opposite to the substrate as viewed from the light emitting layer, an opaque material can be used for the substrate side. For example, a semiconductor substrate such as silicon or a metal substrate. For this reason, an integrated circuit can be formed on a silicon substrate and an organic EL element (device) can be formed thereon. In addition, Preferably, a positive hole transport layer and / or a positive hole injection layer are provided between a light emitting layer and a transparent anode.

  Examples of the embodiment include the following aspects.

  (1) An organic EL device having the configuration of the first feature, wherein the cathode is formed of a laminate of at least one conductive material and a metal oxide or fluoride.

  According to this configuration, the luminous efficiency of the organic EL device can be further increased.

  (2) The organic EL device having the configuration of the first feature described above, comprising a plurality of pixels, a cathode corresponding to each pixel group formed on the substrate, and comprising an insulator between the pixels. An organic EL device, wherein a pixel interval wall is formed, and an auxiliary anode made of a conductive material is formed in a pattern similar to the partition at a position corresponding to the partition made of the insulator.

  According to this configuration, it is possible to reduce the resistance of a transparent anode that is generally high in resistance using an auxiliary anode, and as a result, it is possible to realize an organic EL device that emits light uniformly over the entire surface.

  (3) An organic EL device having the configuration of the first feature, wherein the pixel includes a plurality of pixels, a cathode corresponding to each pixel is formed on the substrate, and a pixel made of an insulator between the pixels. An organic EL device in which an interval wall is formed and at least a cathode, a light emitting layer, an anode, and an auxiliary anode are stacked in this order in a pixel.

  According to this configuration, an auxiliary anode for lowering the resistance of the anode can be retrofitted, and various materials can be used for the auxiliary anode as an effect, and an effect specific to the material can be imparted. For the patterning of the auxiliary anode, a mask vapor deposition method, an ink jet method, a printing method, or the like can be used.

  (4) The organic EL device according to (2) or (3) above, wherein the auxiliary anode is a conductive material having light absorption.

  According to this configuration, when the display is viewed from the light emitting side, since the light-absorbing auxiliary anode is seen between the pixels, the external light is absorbed, the contrast is increased, and the display is easy to see.

  (5) The organic EL device according to (4), wherein the auxiliary anode is carbon or chromium.

  According to this configuration, external light can be more effectively absorbed between pixels.

  (6) An organic EL device having the configuration of the first feature, wherein an active matrix structure including a switching element is provided on a substrate and stacked, and overlaps at least a part of the switching element in a plan view. An organic EL device having a laminated structure of a cathode, a light emitting layer, and an anode. According to this configuration, the area of the opening as the pixel can be designed regardless of the circuit related to the switching element, and as a result, the aperture ratio can be dramatically improved.

  (7) The organic EL device having the first feature, wherein a semiconductor substrate on which an integrated circuit is formed is used as the substrate.

  According to this configuration, all the electronic circuits required for the device such as the electronic circuit of the portable terminal, the controller for driving the display, the driver, and the power supply circuit are formed on the semiconductor substrate on the silicon substrate, and further the organic EL device is driven. Therefore, it is possible to realize high performance and cost reduction of the apparatus at the same time.

  (8) In the organic EL device according to (3) or (4) above, after forming the anode and / or the auxiliary anode, a protective substrate having a light-absorbing layer formed in a portion corresponding to between pixels is sealed. An organic EL device characterized by being aligned and bonded to a pixel corresponding portion of a pixel and a protective substrate through a stop resin.

  According to this configuration, since the light absorbing portion can be provided between the pixels separately from the auxiliary anode, the auxiliary anode and the light absorbing material can be optimized.

  (9) A method for manufacturing an organic EL device, wherein at least a cathode, a light emitting layer, and an anode are laminated on a substrate in this order.

  In this method, preferably, a hole transport layer and / or a hole injection layer are provided on the light emitting layer, and then an anode can be formed.

  (10) The method for producing an organic EL device according to (9), wherein the surface of the light emitting layer is subjected to a hydrophilic treatment after the light emitting layer is formed.

  According to this configuration, the water-soluble hole injection material solution can be uniformly applied.

  As a general method, an oxygen plasma irradiation method is used.

  (11) Form at least an insulating pixel spacing wall on the substrate, and then deposit a reflective cathode material on the entire surface, and simultaneously form the cathode and the auxiliary electrode by separating the cathode and the auxiliary anode on the partition by the step of the partition. Subsequently, at least a light emitting layer and an anode are laminated in this order in a region partitioned by the partition walls, and the method for manufacturing an organic EL device is characterized.

  According to this configuration, it is not necessary to pattern the auxiliary anode, and the cost can be reduced.

  (12) After the cathode is formed on the substrate, an insulating pixel spacing wall material is applied and baked on the entire surface of the substrate, and a material to be the auxiliary anode is formed on the entire surface, and then the auxiliary anode material is formed by a photolithography process. Next, the layer of the pixel spacing wall material is patterned and etched, and the partition wall layer is baked. Thereafter, at least the light emitting layer and the anode are placed in the region partitioned by the partition wall. A method of manufacturing an organic EL device, wherein the layers are stacked in order.

  According to this configuration, the pixel spacing wall and the auxiliary anode can be patterned simultaneously.

  Hereinafter, specific embodiments of the present invention will be described.

(Embodiment 1)
In this embodiment, an example is shown in which at least a cathode, a light emitting layer, a transparent anode, a hole transport layer, and / or a hole injection layer are laminated in this order on a substrate. FIG. 1 shows a cross section of the organic EL device of this embodiment.

  First, the cathode 2 is formed on the substrate 1. Next, the light emitting layer 3 is formed, and further the hole injection layer 4 is formed. Next, the anode 5 is formed, and further a sealing layer (not shown) is formed.

  When a voltage was applied between the electrodes of the organic EL device thus created, light was emitted from the sealing layer side.

  As the substrate 1 used here, in addition to a glass substrate, a metal, a semiconductor, a plastic, or the like can be used, and an opaque substrate can also be used.

  As the cathode 2 used here, aluminum, magnesium, lithium, calcium, an alloy of these metals, or a laminate of these metals (in this case, one having a low work function is disposed on the light emitting layer side) can be used.

  For the light emitting layer 3 used here, a polymer material or a low molecular material can be used.

For example, PPV, polydioctylfluorene, polyfluorene, Alq ₃ , DPVBi and the like.

  As the hole injection layer / hole transport layer 4 used here, in addition to Bytron manufactured by Bayer, general materials such as low molecular weight materials TPD, MTDATA, and copper phthalocyanine can be used.

  As the anode 5 used here, in addition to ITO, a Nesa film, IDIXO sold by Idemitsu Kosan Co., Ltd., or the like can be used. In particular, IDIXO is advantageous because sufficient conductivity can be obtained even when a film is formed at room temperature.

  A thermosetting epoxy resin is used for sealing, but an ultraviolet curable resin is also used in the same manner. It is also effective to use a protective substrate in combination.

  According to the configuration of this embodiment, light can be emitted to the side opposite to the substrate as viewed from the light emitting layer, and thus an opaque material can be used for the substrate side. For example, a semiconductor substrate such as silicon or a metal substrate. For this reason, an integrated circuit can be formed on a silicon substrate and an organic EL element (device) can be formed thereon.

(Embodiment 2)
In the present embodiment, a specific example is shown in which the cathode is formed of a laminate of at least one conductive material and a metal oxide or fluoride. In the method of Embodiment 1, after forming aluminum as a cathode, patterning was performed through a photolithography process and oxygen plasma treatment was performed. As a result, an oxide layer of 20 angstroms was formed on the surface. Using the substrate with a cathode, the remaining steps of Embodiment 1 were performed to produce an organic EL device. As a result, the luminous efficiency was twice that of Example 1 (0.2 lm / W).

  When lithium fluoride was deposited to a thickness of 20 angstroms instead of applying oxygen plasma to the cathode surface, the luminous efficiency was 0.5 lm / W.

  The light emitting layer 3 used here is a polyfluorene-based material, and was formed by spin coating. The hole injection layer 4 was used by spin-coating Bytron manufactured by Bayer. IDIXO was used for the anode 5. These materials and film forming conditions are not limited thereto.

(Embodiment 3)
In the present embodiment, the cathode group 2 corresponding to the light emitting pixel group is formed on the substrate 1 in the structure shown in FIG. 3, and the pixel interval wall 6 made of an insulator is formed between the light emitting pixel groups. In this example, the auxiliary anode 7 made of a conductive material is formed on the pixel interval wall 6 in the same pattern as the pixel interval wall 6.

  A specific example is shown below. First, after patterning the cathode 2, the pixel spacing walls 6 were formed and patterned with polyimide, and then tantalum was formed to 1000 angstroms and patterned by photolithography in the same pattern as the pixel spacing walls 6. Next, 20 angstroms of lithium fluoride is formed on the entire surface, and then three types of polyfluorene-based materials that emit red, green, and blue as the light emitting layer 3 are dissolved in isodulene. A patterning film was formed on each pixel. Next, Byron manufactured by Bayer as a hole injection layer 4 was patterned on each pixel by an inkjet method. Next, IDIXO manufactured by Idemitsu Kosan Co., Ltd. was sputtered as the anode 5. Furthermore, it was sealed with an epoxy-based sealing material 8 and a protective substrate 9. When a voltage was independently supplied to each pixel of the organic EL device thus created, red and blue green, a uniform color image could be observed corresponding to the voltage application.

  As a reference, when an element without the auxiliary anode 7 was created, only the pixels in the vicinity of the anode lead emitted light.

  As the cathode, the light emitting material, the hole injection material, the anode, the auxiliary anode, and the sealing material used here, the materials shown in Embodiment Mode 1 can be used. As a film formation method, an ink jet method, a mask vapor deposition method, a printing method, or the like can also be used.

  In the same structure of the present embodiment, a layer of Pt, Ir, Ni, Pd, Au or a laminated structure of ITO and Al is provided as a layer at the position of the cathode 2 to form an opaque layer, and at the position of the anode 5. , Gold, calcium, aluminum layer, laminated structure thereof, Mg and silver co-deposited layer, etc. are provided with a predetermined thickness to form a transparent layer, and in this structure, the layer at the position of the cathode 2 serves as the anode, and the position of the anode 5 This layer can be driven as a cathode, and light can be emitted from the light emitting layer to the upper layer through the protective substrate. In this case, the auxiliary anode 7 is a cathode auxiliary layer.

(Embodiment 4)
In the present embodiment, a cathode group corresponding to the light emitting pixel group is formed on the substrate, and a pixel interval wall made of an insulator is formed between the light emitting pixel groups. In the pixel, at least the cathode, the light emitting layer, An example in which a transparent anode and an auxiliary anode are laminated in this order is shown.

  FIG. 4 shows a cross-sectional structure of the organic EL device of this embodiment.

  After the patterning of the cathode 2, the pixel interval wall 6 was formed by film formation and patterning using polyimide. Next, 20 Å of calcium fluoride is formed on the entire surface, and then three kinds of low molecular weight materials emitting red, green, and blue as the light emitting layer 3 are applied to the red, green, and blue pixels respectively by mask vapor deposition. Patterning was performed. Next, MTDATA was deposited on the entire surface as the hole injection layer 4 following the TPD. Next, IDIXO manufactured by Idemitsu Kosan Co., Ltd. was sputtered as the anode 5. Later, tantalum was mask-deposited to 1000 Å and patterned. Furthermore, it was sealed with an epoxy-based sealing material 8 and a protective substrate 9. When a voltage was independently supplied to each pixel of the organic EL device thus created, red and blue green, a uniform color image could be observed corresponding to the voltage application.

  As a reference example, when an element without the auxiliary anode 7 was created, only pixels near the anode lead emitted light.

  As the cathode, the light emitting material, the hole injection material, the anode, the auxiliary anode, and the sealing material used here, the materials shown in Embodiment Mode 1 can be used. In addition to the mask vapor deposition method, an ink jet method, a printing method, or the like can be used as a film forming method. For the patterning of the auxiliary anode, a mask vapor deposition method, an ink jet method, a printing method, or the like can be used.

  Similarly to the case described in the third embodiment, the layer at the portion of the cathode 2 and the layer at the portion of the anode 5 are respectively made of a specific material, thickness, etc., so that the layer at the portion of the cathode 2 is used as the anode. Also, it is possible to emit light from the light emitting layer to the outside through the protective substrate by functioning and driving the layer of the anode 5 as a cathode.

(Embodiment 5)
In the present embodiment, an example in which the auxiliary anode is a conductive material having light absorption is shown.

  In the third embodiment, chromium is used as the auxiliary electrode 7 instead of tantalum. As a result, since the reflectance of chromium was 60%, the reflectance of external light was reduced and an improvement in contrast was recognized.

  As the light-absorbing conductive material, in addition to the above-described chromium, polymer conductive materials such as Bytron and polyaniline manufactured by Bayer, carbon, and the like can also be used.

(Embodiment 6)
In the present embodiment, an example is shown in which the auxiliary anode is a light-absorbing conductive material, particularly carbon.

  In the fourth embodiment, carbon is used as the auxiliary electrode 7 instead of tantalum.

  A mask vapor deposition method was used for the film formation. As a result, the reflectance of external light from between the pixels is almost eliminated, and the contrast is dramatically increased.

  As the light-absorbing conductive material, in addition to carbon, polymer conductive materials such as Bytron and polyaniline manufactured by Bayer, chromium, and the like can be used as well.

(Embodiment 7)
In the present embodiment, an active matrix structure including a switching element is stacked on a substrate, and the cathode, the light emitting layer, and the anode are stacked so that at least a part of the active matrix structure, particularly the switching element, overlaps in plan view. An example in which a pixel structure is formed is shown. FIG. 5 shows a cross-sectional structure of the organic EL device of this embodiment.

  The structure shown in FIG. 3 is based on the structure shown in FIG. 3, and a thin film transistor (hereinafter referred to as TFT) as a switching element is added on a substrate.

  An opening parting part 11 that defines an emission region of light from the light emitting layer is provided below the pixel interval wall. As another example, in FIG. 6, an anode, a cathode, and an anode are formed on a substrate in this order, and a region of the TFT element 10 as a switching element substantially corresponds to the partition wall below the pixel interval wall 6 in a plan view. 2 shows a cross-sectional structure of an organic EL device arranged so as to overlap.

  5, a light emitting pixel structure (laminated structure of the cathode 2, the light emitting layer 3, and the anode 5) having the same configuration as in FIG. 3 (added with the opening parting part 11) is formed above the substrate on which the TFT element 10 is formed. did. Similarly, an organic EL device including a light emitting pixel structure having the structure shown in FIG. 6 was produced.

The organic EL device having the structure shown in FIG. 5 was driven to emit light to the anode 5 side, and the organic EL device having the structure shown in FIG. 6 was driven to emit light to the substrate 1 side. Compared with the structure shown in FIG. 6 (aperture ratio 30%), in the structure shown in FIG. 5, the switching element is overlapped with the pixel structure, particularly the light emitting layer in plan view, on the side opposite to the light emission side (substrate side). As a result, it was possible to improve the aperture ratio that can function as a light emitting layer (aperture ratio 70%). Conventionally, the driving voltage was 6V to obtain 100 Cd / m ² at the display luminance. However, in this embodiment, 5 V is sufficient to obtain the display luminance of 100 Cd / m ² . For this reason, the lifetime has increased 10 times.

  According to this embodiment, the area of the pixel opening can be designed regardless of the switching element such as a TFT circuit, and the aperture ratio can be dramatically improved.

  In the structure shown in FIG. 5, as in the case described in the third embodiment, the layer of the cathode 2 and the layer of the anode 5 are respectively made of a specific material, thickness, etc. It is also possible to emit light from the light-emitting layer to the outside through the protective substrate by functioning and driving with the layer at the site as the anode and the layer at the site of the anode 5 as the cathode.

  Further, in the structure shown in FIG. 6, as in the case described in the third embodiment, the cathode 2 region layer and the anode 5 region layer are each made of a specific material, thickness, etc. It is also possible to emit light from the light emitting layer to the outside through the protective substrate by functioning and driving the layer at the site of 2 as an anode and the layer at the site of the anode 5 as a cathode. In this case, the aperture ratio can be improved similarly to the structure shown in FIG.

(Embodiment 8)
This embodiment is characterized in that a semiconductor substrate on which an integrated circuit is formed is used as a substrate to be used. In this embodiment, an example is shown in which an electronic circuit for a mobile phone, a controller for driving a display, a driver, a transistor for driving an organic EL device are formed on a silicon substrate, and an organic EL device is formed on a display portion. FIG. 7 shows a conceptual diagram of a silicon substrate on which the organic EL device of this embodiment is formed.

  As shown in the figure, an organic EL display unit 12 in which organic EL elements (pixel structures) as shown in the above-described embodiment are arranged in an XY matrix on a silicon substrate 18 is provided. An X driver 14 and a Y driver 13 for matrix driving are provided, and a controller 15, an electronic circuit 16, and a power supply circuit 17 are mounted and connected to a power supply and a switch. With this fairness, all the circuits are mounted on a single silicon substrate, and the function as a mobile phone can be realized by controlling from the outside with a switch.

  In the present embodiment, an example of a mobile phone has been shown.

(Embodiment 9)
In this embodiment, after forming up to the anode or the auxiliary anode, a protective substrate in which a light-absorbing layer is formed in a portion corresponding to between the pixels is connected between the pixel on the substrate and the protective substrate via a sealing resin. An example in which alignment is performed while aligning with a pixel corresponding portion is shown. FIG. 8 shows a cross-sectional structure of the organic EL device of this embodiment.

  The sealing material 8 is applied to the substrate formed up to the anode in the third embodiment, and the light absorption layer 19 is formed so as to correspond between the pixels. The protective substrate 9 is bonded and fixed while being aligned. The organic EL device thus produced exhibits sufficient display uniformity due to the effect of the auxiliary anode, can efficiently attenuate reflection of external light, and can display with good contrast. .

(Embodiment 10)
In the present embodiment, an organic EL device in which at least a cathode, a light emitting layer, a hole transport layer, and / or a hole injection layer, and a transparent anode are laminated in this order on the substrate, particularly, manufacture of an element having the structure shown in FIG. In the method, an example is shown in which after the light emitting layer is formed, the surface of the light emitting layer is subjected to a hydrophilic treatment.

  In FIG. 1, when a polyfluorene-based material is used as the light emitting layer 3, Bayer's Bytron (aqueous dispersion) generally used as the hole injection layer 4 may not be formed well due to poor wettability. is there. Therefore, when the light emitting layer 3 was formed and then oxygen plasma was irradiated to spin coat Bytron, a uniform film could be formed. The organic EL device thus produced showed uniform light emission over the entire surface.

  In the present embodiment, UV ozone treatment can also be used as a method for hydrophilizing the surface of the light emitting layer.

  Examples of the hole injection material that can be used in this embodiment include highly polar solutions such as a polyaniline salt solution.

(Embodiment 11)
In this embodiment, at least an insulating pixel interval wall is formed on the substrate, and then a reflective cathode is formed on the entire surface. At the same time, the cathode and the auxiliary anode on the partition are separated by the step of the partition, and then in the pixel. An example in which at least a light emitting layer and a transparent anode are laminated in this order is shown. FIG. 9 shows a cross-sectional structure of the organic EL device of this embodiment.

  After patterning the cathode lead-out wiring 20 and forming the pixel spacing walls 6, aluminum was deposited as the cathode 2. At this time, the cathode patterning was caused by the wall of the pixel interval wall 6 and at the same time, the auxiliary anode 7 was formed by patterning.

  If the angle of the wall of the pixel spacing wall 6 is set so as to project, the patterning becomes more reliable. However, when forming up to the anode 5 to be formed thereafter, the pixel spacing wall 6 breaks, so optimization is possible. Necessary.

Embodiment 12
In this embodiment, after the cathode is formed on the substrate, the insulating pixel spacing wall material is applied and baked on the entire surface of the substrate, and then the material that becomes the auxiliary anode is formed on the entire surface. An example in which the anode layer is patterned and etched, the pixel spacing wall layer below is patterned and etched, the pixel spacing wall layer is baked, and then at least a light emitting layer and a transparent anode are laminated in this order in the pixel. Indicates. Specifically, an element having the structure shown in FIG. 3 was produced.

  First, the cathode 2 was formed by patterning on the substrate 1. Next, a polyimide solution was applied to the entire surface of the substrate as a material for the insulating pixel interval wall 6 and pre-baked. Thereafter, tantalum serving as the auxiliary anode 7 was sputtered on the entire surface to a thickness of 1000 angstroms. Thereafter, a resist was applied and exposed. Tantalum was etched after development. Thereafter, the polyimide was etched. Next, the resist was peeled off, and polyimide was baked to complete the structure of the pixel interval wall 6 and the auxiliary anode 7.

  The pixel spacing wall material and auxiliary electrode material used in this embodiment can be used in the same manner as long as they can be patterned by a photolithography process.

  As described above in detail, according to the present invention, an aperture ratio and a light transmittance can be obtained even when an active element is used by forming a structure in which a cathode, a light emitting layer, and an anode are laminated in this order from the substrate side of the organic EL device. It has become possible to provide an element configuration and a method for manufacturing the same that do not reduce the thickness. As a result, it is possible to provide an organic EL device with low power consumption and long life. At the same time, it is possible to realize an organic EL device having a structure that prevents a decrease in contrast due to the reflection of external light without reducing the luminance.

1 is a cross-sectional view illustrating a structure of an organic EL device according to Embodiment 1. FIG. 1 is a cross-sectional view illustrating a structure of an organic EL device as a comparison with Embodiment 1. FIG. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning Embodiment 3. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning Embodiment 4. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning Embodiment 7. It is sectional drawing which shows the structure of the organic electroluminescent apparatus relevant to Embodiment 7. It is a conceptual diagram which shows the planar structure of the organic electroluminescent apparatus (display apparatus) which concerns on Embodiment 8. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning Embodiment 9. It is sectional drawing which shows the structure of the organic electroluminescent apparatus concerning Embodiment 11.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Substrate, 2 ... Cathode, 3 ... Light emitting layer, 4 ... Hole injection layer, 5 ... Anode, 6 ... Pixel spacing wall, 7 ... Auxiliary anode, 8 ... Sealing material, 9 ... Protective substrate, 10 ... TFT element , 11 ... Opening area, 12 ... Organic EL display, 13 ... Y driver, 14 ... X driver, 15 ... Controller, 16 ... Electronic circuit, 17 ... Power supply circuit, 18 ... Silicon substrate, 19 ... Light absorption layer, 20 ... cathode lead wiring, 21 ... transparent auxiliary cathode.

Claims (16)

  An organic EL device in which at least a cathode, a light emitting layer, and an anode are laminated in this order on a substrate.   2. The organic EL device according to claim 1, wherein the cathode comprises a laminate of at least one type of conductive material and a metal oxide or fluoride.   A plurality of pixels are provided, a cathode corresponding to each pixel group is formed on the substrate, a pixel interval wall made of an insulator is formed between the pixels, and the cathode corresponds to a partition made of the insulator. 2. The organic EL device according to claim 1, wherein an auxiliary anode made of a conductive material is formed at a position in the same pattern as the partition wall.   A plurality of pixels, a cathode corresponding to each pixel is formed on the substrate, and a pixel interval wall made of an insulator is formed between the pixels, and at least a cathode, a light emitting layer, an anode, The organic EL device according to claim 1, wherein the auxiliary anodes are laminated in this order.   5. The organic EL device according to claim 3, wherein the auxiliary anode is a light-absorbing conductive material.   6. The organic EL device according to claim 5, wherein the auxiliary anode is carbon or chromium.   An active matrix structure including a switching element is provided and stacked on the substrate, and a stacked structure of a cathode, a light emitting layer, and an anode is formed so as to overlap at least a part of the switching element in a plan view. The organic EL device according to claim 1.   2. The organic EL device according to claim 1, wherein a semiconductor substrate on which an integrated circuit is formed is used as the substrate.   After forming up to the anode and / or the auxiliary anode, a protective substrate in which a light-absorbing layer is formed in a portion corresponding to between pixels is aligned with a pixel corresponding portion of the pixel and the protective substrate through a sealing resin. The organic EL device according to claim 3 or 4, wherein the organic EL devices are pasted together.   A method for producing an organic EL device, comprising: laminating at least a cathode, a light emitting layer, and an anode in this order on a substrate.   The method of manufacturing an organic EL device according to claim 10, wherein after the light emitting layer is formed, the surface of the light emitting layer is subjected to a hydrophilic treatment.   Forming at least an insulating pixel spacing wall on the substrate, then depositing a reflective cathode material on the entire surface, and simultaneously separating the cathode and the auxiliary anode on the barrier rib by the step of the barrier rib to form the cathode and the auxiliary electrode; A method of manufacturing an organic EL device, comprising: laminating at least a light emitting layer and an anode in this order in a region partitioned by the partition walls.   After the cathode is formed on the substrate, an insulating pixel spacing wall material is applied and baked on the entire surface of the substrate, and a material to be an auxiliary anode is formed on the entire surface, and then a layer of the auxiliary anode material is formed by a photolithography process. After patterning etching, the pixel spacing wall material layer underneath is patterned and etched, the partition wall layer is finally fired, and then at least a light emitting layer and an anode are stacked in this order in the region partitioned by the partition wall. A method for manufacturing an organic EL device.   An organic EL device having a plurality of pixels on a substrate, wherein each of the plurality of pixels is a region partitioned by a partition, and in the region, the first electrode, the light emitting layer, and the second electrode from the substrate side An organic EL device, wherein electrodes are stacked in this order, and light from the light emitting layer is emitted to the outside from the second electrode side.   15. The organic EL device according to claim 14, wherein a switching element is provided for each of the plurality of pixels.   15. The organic EL device according to claim 14, wherein at least a part of the active element is provided so as to overlap the partition in a plan view.

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