JP2007309727A - 副流量計を用いたサーボ型容積流量計 - Google Patents
副流量計を用いたサーボ型容積流量計 Download PDFInfo
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- JP2007309727A JP2007309727A JP2006137475A JP2006137475A JP2007309727A JP 2007309727 A JP2007309727 A JP 2007309727A JP 2006137475 A JP2006137475 A JP 2006137475A JP 2006137475 A JP2006137475 A JP 2006137475A JP 2007309727 A JP2007309727 A JP 2007309727A
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- 239000012530 fluid Substances 0.000 claims abstract description 28
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 16
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000005259 measurement Methods 0.000 abstract description 9
- 230000004044 response Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 6
- 230000004043 responsiveness Effects 0.000 description 4
- 238000005303 weighing Methods 0.000 description 4
- 239000003638 chemical reducing agent Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
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Abstract
【解決手段】サーボ型容積流量計1は、容積流量計2と、副流量計3を含むサーボ機構4と、流量発信器5とを備える。容積流量計2は、流路12と、計量室7と、一対の第1及び第2回転子8、9とを備え、第1及び第2回転子8、9の回転から流量を計測する。サーボ型容積流量計1は、第1及び第2回転子8、9の上流と下流とに跨るバイパス管19と、サーボモータ22と、このサーボモータ22を制御するサーボ機構4とを更に備える。サーボ機構4は、熱式、超音波式、又は容積式いずれかの副流量計3を含んで構成され、副流量計3は、生成される流量信号がバイパス管19内の流れ及び流れ方向の判別用の信号となる。
【選択図】図1
Description
2 容積流量計
3 副流量計
4 サーボ機構
5 流量発信器
6 ケーシング
7 計量室
8 第1回転子
9 第2回転子
10 流入口
11 流出口
12 流路
13 第1計量室
14 第2計量室
15 第1回転子軸
16 第2回転子軸
19 バイパス管
20 制御回路
21 サーボパック
22 サーボモータ
23 減速器
24〜27 信号線
Claims (1)
- 流路と、該流路に連続する計量室と、該計量室内で回転毎に一定体積の被測定流体を流出する一対の第1及び第2回転子とを備え、該第1及び第2回転子の回転から流量を計測する容積流量計であって、前記第1及び第2回転子の上流と下流とに跨るバイパス管と、前記第1又は第2回転子の何れかを駆動するサーボモータと、該サーボモータを制御するサーボ機構とを更に備えるサーボ型容積流量計において、
前記サーボ機構は熱式、超音波式、又は容積式いずれかの副流量計を含んで構成され、該副流量計は生成される流量信号が前記バイパス管内の流れ及び流れ方向の判別用の信号となる
ことを特徴とする副流量計を用いたサーボ型容積流量計。
Priority Applications (1)
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JP2006137475A JP4291338B2 (ja) | 2006-05-17 | 2006-05-17 | 副流量計を用いたサーボ型容積流量計 |
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JP2006137475A JP4291338B2 (ja) | 2006-05-17 | 2006-05-17 | 副流量計を用いたサーボ型容積流量計 |
Publications (2)
Publication Number | Publication Date |
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JP2007309727A true JP2007309727A (ja) | 2007-11-29 |
JP4291338B2 JP4291338B2 (ja) | 2009-07-08 |
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JP2006137475A Active JP4291338B2 (ja) | 2006-05-17 | 2006-05-17 | 副流量計を用いたサーボ型容積流量計 |
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JP (1) | JP4291338B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010006474A1 (zh) * | 2008-07-17 | 2010-01-21 | 美新半导体(无锡)有限公司 | 复合式气体流量测量方法及其装置 |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819511A (ja) * | 1981-07-28 | 1983-02-04 | Oval Eng Co Ltd | サ−ボ型容積式流量計 |
JPS6333663A (ja) * | 1986-07-28 | 1988-02-13 | Yamatake Honeywell Co Ltd | 流速測定装置 |
JPS63148831U (ja) * | 1987-03-20 | 1988-09-30 | ||
JPH02124430A (ja) * | 1988-11-02 | 1990-05-11 | Ono Sokki Co Ltd | 圧力差補償形流量測定装置 |
JPH02195941A (ja) * | 1989-01-25 | 1990-08-02 | Yamatake Honeywell Co Ltd | 呼吸気流量計 |
JPH04294211A (ja) * | 1991-03-22 | 1992-10-19 | T G K:Kk | 給湯器の燃料供給装置 |
JPH0989608A (ja) * | 1995-09-26 | 1997-04-04 | Matsushita Electric Ind Co Ltd | 流量計測装置 |
JP2001133307A (ja) * | 1999-11-05 | 2001-05-18 | Matsushita Electric Ind Co Ltd | 流入・流出対称型流量計 |
JP2001336963A (ja) * | 2000-05-30 | 2001-12-07 | Oval Corp | サーボ型容積流量計 |
-
2006
- 2006-05-17 JP JP2006137475A patent/JP4291338B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819511A (ja) * | 1981-07-28 | 1983-02-04 | Oval Eng Co Ltd | サ−ボ型容積式流量計 |
JPS6333663A (ja) * | 1986-07-28 | 1988-02-13 | Yamatake Honeywell Co Ltd | 流速測定装置 |
JPS63148831U (ja) * | 1987-03-20 | 1988-09-30 | ||
JPH02124430A (ja) * | 1988-11-02 | 1990-05-11 | Ono Sokki Co Ltd | 圧力差補償形流量測定装置 |
JPH02195941A (ja) * | 1989-01-25 | 1990-08-02 | Yamatake Honeywell Co Ltd | 呼吸気流量計 |
JPH04294211A (ja) * | 1991-03-22 | 1992-10-19 | T G K:Kk | 給湯器の燃料供給装置 |
JPH0989608A (ja) * | 1995-09-26 | 1997-04-04 | Matsushita Electric Ind Co Ltd | 流量計測装置 |
JP2001133307A (ja) * | 1999-11-05 | 2001-05-18 | Matsushita Electric Ind Co Ltd | 流入・流出対称型流量計 |
JP2001336963A (ja) * | 2000-05-30 | 2001-12-07 | Oval Corp | サーボ型容積流量計 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010006474A1 (zh) * | 2008-07-17 | 2010-01-21 | 美新半导体(无锡)有限公司 | 复合式气体流量测量方法及其装置 |
US20110125424A1 (en) * | 2008-07-17 | 2011-05-26 | Memsic Semiconductor (Wuxi) Co., Ltd. | Composite gas fluid flow measuring method and its device |
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JP4291338B2 (ja) | 2009-07-08 |
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