JP2007308775A5 - - Google Patents

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Publication number
JP2007308775A5
JP2007308775A5 JP2006140138A JP2006140138A JP2007308775A5 JP 2007308775 A5 JP2007308775 A5 JP 2007308775A5 JP 2006140138 A JP2006140138 A JP 2006140138A JP 2006140138 A JP2006140138 A JP 2006140138A JP 2007308775 A5 JP2007308775 A5 JP 2007308775A5
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JP
Japan
Prior art keywords
deposited film
exhaust
reaction vessel
substrate
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006140138A
Other languages
English (en)
Japanese (ja)
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JP2007308775A (ja
JP4827608B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2006140138A priority Critical patent/JP4827608B2/ja
Priority claimed from JP2006140138A external-priority patent/JP4827608B2/ja
Publication of JP2007308775A publication Critical patent/JP2007308775A/ja
Publication of JP2007308775A5 publication Critical patent/JP2007308775A5/ja
Application granted granted Critical
Publication of JP4827608B2 publication Critical patent/JP4827608B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006140138A 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法 Expired - Fee Related JP4827608B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006140138A JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006140138A JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Publications (3)

Publication Number Publication Date
JP2007308775A JP2007308775A (ja) 2007-11-29
JP2007308775A5 true JP2007308775A5 (cg-RX-API-DMAC7.html) 2009-06-25
JP4827608B2 JP4827608B2 (ja) 2011-11-30

Family

ID=38841908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006140138A Expired - Fee Related JP4827608B2 (ja) 2006-05-19 2006-05-19 堆積膜形成装置、堆積膜形成方法および電子写真感光体の製造方法

Country Status (1)

Country Link
JP (1) JP4827608B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5555077B2 (ja) * 2010-07-05 2014-07-23 キヤノン株式会社 処理容器の設置方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59170259A (ja) * 1983-03-17 1984-09-26 Minolta Camera Co Ltd 容量結合型グロ−放電分解装置
JPH0334061A (ja) * 1989-06-30 1991-02-14 Mitsubishi Electric Corp 文書編集方式
JPH09330884A (ja) * 1996-06-07 1997-12-22 Sony Corp エピタキシャル成長装置

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