JP2007301023A5 - - Google Patents

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Publication number
JP2007301023A5
JP2007301023A5 JP2006130538A JP2006130538A JP2007301023A5 JP 2007301023 A5 JP2007301023 A5 JP 2007301023A5 JP 2006130538 A JP2006130538 A JP 2006130538A JP 2006130538 A JP2006130538 A JP 2006130538A JP 2007301023 A5 JP2007301023 A5 JP 2007301023A5
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JP
Japan
Prior art keywords
substrate
vibration
ultrasonic
film
ultrasonic probe
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Application number
JP2006130538A
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English (en)
Japanese (ja)
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JP4842010B2 (ja
JP2007301023A (ja
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Priority to JP2006130538A priority Critical patent/JP4842010B2/ja
Priority claimed from JP2006130538A external-priority patent/JP4842010B2/ja
Publication of JP2007301023A publication Critical patent/JP2007301023A/ja
Publication of JP2007301023A5 publication Critical patent/JP2007301023A5/ja
Application granted granted Critical
Publication of JP4842010B2 publication Critical patent/JP4842010B2/ja
Expired - Fee Related legal-status Critical Current
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JP2006130538A 2006-05-09 2006-05-09 超音波探触子及び超音波診断装置 Expired - Fee Related JP4842010B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006130538A JP4842010B2 (ja) 2006-05-09 2006-05-09 超音波探触子及び超音波診断装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006130538A JP4842010B2 (ja) 2006-05-09 2006-05-09 超音波探触子及び超音波診断装置

Publications (3)

Publication Number Publication Date
JP2007301023A JP2007301023A (ja) 2007-11-22
JP2007301023A5 true JP2007301023A5 (enExample) 2009-06-18
JP4842010B2 JP4842010B2 (ja) 2011-12-21

Family

ID=38835498

Family Applications (1)

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JP2006130538A Expired - Fee Related JP4842010B2 (ja) 2006-05-09 2006-05-09 超音波探触子及び超音波診断装置

Country Status (1)

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JP (1) JP4842010B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009069281A1 (ja) * 2007-11-28 2009-06-04 Hitachi, Ltd. 超音波探触子、超音波撮影装置
JP5733898B2 (ja) * 2010-02-14 2015-06-10 キヤノン株式会社 静電容量型電気機械変換装置
JP5855373B2 (ja) 2011-07-11 2016-02-09 オリンパス株式会社 超音波エレメントおよび超音波内視鏡
JP2015075360A (ja) 2013-10-07 2015-04-20 三菱重工業株式会社 探触子、超音波探傷装置及び超音波探傷制御方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6659954B2 (en) * 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US20040190377A1 (en) * 2003-03-06 2004-09-30 Lewandowski Robert Stephen Method and means for isolating elements of a sensor array
WO2005032374A1 (ja) * 2003-10-02 2005-04-14 Hitachi Medical Corporation 超音波探触子、超音波撮像装置および超音波撮像方法
JP2006100717A (ja) * 2004-09-30 2006-04-13 Dainippon Screen Mfg Co Ltd 基板処理方法およびその装置
JP2007274620A (ja) * 2006-03-31 2007-10-18 Fuji Xerox Co Ltd アレイ探触子、アレイ探触子デバイス、およびアレイ探触子の製造方法

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