JP2007294909A5 - - Google Patents

Download PDF

Info

Publication number
JP2007294909A5
JP2007294909A5 JP2007073575A JP2007073575A JP2007294909A5 JP 2007294909 A5 JP2007294909 A5 JP 2007294909A5 JP 2007073575 A JP2007073575 A JP 2007073575A JP 2007073575 A JP2007073575 A JP 2007073575A JP 2007294909 A5 JP2007294909 A5 JP 2007294909A5
Authority
JP
Japan
Prior art keywords
frequency
processing apparatus
plasma processing
plasma
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007073575A
Other languages
English (en)
Japanese (ja)
Other versions
JP5107597B2 (ja
JP2007294909A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007073575A priority Critical patent/JP5107597B2/ja
Priority claimed from JP2007073575A external-priority patent/JP5107597B2/ja
Priority to US11/691,700 priority patent/US7655110B2/en
Publication of JP2007294909A publication Critical patent/JP2007294909A/ja
Publication of JP2007294909A5 publication Critical patent/JP2007294909A5/ja
Application granted granted Critical
Publication of JP5107597B2 publication Critical patent/JP5107597B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007073575A 2006-03-29 2007-03-20 プラズマ処理装置 Active JP5107597B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007073575A JP5107597B2 (ja) 2006-03-29 2007-03-20 プラズマ処理装置
US11/691,700 US7655110B2 (en) 2006-03-29 2007-03-27 Plasma processing apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006090243 2006-03-29
JP2006090243 2006-03-29
JP2007073575A JP5107597B2 (ja) 2006-03-29 2007-03-20 プラズマ処理装置

Publications (3)

Publication Number Publication Date
JP2007294909A JP2007294909A (ja) 2007-11-08
JP2007294909A5 true JP2007294909A5 (ko) 2010-04-30
JP5107597B2 JP5107597B2 (ja) 2012-12-26

Family

ID=38765162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007073575A Active JP5107597B2 (ja) 2006-03-29 2007-03-20 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JP5107597B2 (ko)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4727479B2 (ja) * 2006-03-29 2011-07-20 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ内の高周波電流量の測定方法
US20110061811A1 (en) * 2008-03-07 2011-03-17 Tokyo Electron Limited Plasma processing apparatus
JP5878382B2 (ja) * 2012-01-24 2016-03-08 株式会社アルバック シリコンエッチング方法
KR101333104B1 (ko) 2012-09-04 2013-11-26 이도형 반도체 박막 증착 장비용 히터 모니터링 시스템
JP6899693B2 (ja) 2017-04-14 2021-07-07 東京エレクトロン株式会社 プラズマ処理装置及び制御方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4590031B2 (ja) * 2000-07-26 2010-12-01 東京エレクトロン株式会社 被処理体の載置機構
JP3923323B2 (ja) * 2002-01-30 2007-05-30 アルプス電気株式会社 プラズマ処理装置及びプラズマ処理方法
JP4030766B2 (ja) * 2002-01-30 2008-01-09 アルプス電気株式会社 プラズマ処理装置
JP2004152999A (ja) * 2002-10-30 2004-05-27 Matsushita Electric Ind Co Ltd プラズマ処理方法およびプラズマ処理装置
JP4451392B2 (ja) * 2003-01-16 2010-04-14 独立行政法人科学技術振興機構 プラズマ発生装置
JP4448335B2 (ja) * 2004-01-08 2010-04-07 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
JP2005277397A (ja) * 2004-02-26 2005-10-06 Tokyo Electron Ltd プラズマ処理装置
JP4727479B2 (ja) * 2006-03-29 2011-07-20 東京エレクトロン株式会社 プラズマ処理装置及びプラズマ内の高周波電流量の測定方法

Similar Documents

Publication Publication Date Title
JP2019004027A5 (ko)
JP2014179576A5 (ja) プラズマ処理装置の制御方法、プラズマ処理方法及びプラズマ処理装置
EP4376061A3 (en) Spatial and temporal control of ion bias voltage for plasma processing
JP2007294909A5 (ko)
JP2016521641A5 (ko)
JP2011530143A5 (ko)
JP2007250755A5 (ko)
JP2008519401A5 (ko)
RU2016146694A (ru) Электрически нагреваемая система, генерирующая аэрозоль
JP2011216481A5 (ko)
JP2011066033A5 (ko)
WO2012057967A3 (en) Methods and apparatus for controlling photoresist line width roughness
MX2015013293A (es) Aparatos y método para alimentar eléctricamente un horno de arco eléctrico.
KR102545993B1 (ko) 플라즈마 처리 장치, 온도 제어 방법 및 온도 제어 프로그램
ATE535053T1 (de) Stromerfassungseinheit und motorsteuerungsvorrichtung
MY159847A (en) Method and system for measuring a characteristic of an electric motor
JP2013171840A (ja) 多周波数ｒｆパルス出力のための、周波数改善インピーダンス依存電力制御
TW201614925A (en) Bicycle power control apparatus
JP2016213358A5 (ko)
JP2016092342A5 (ko)
EP1103329A3 (en) Method of controlling the AC pulsed arc welding and welding power supply apparatus therefor
US10067003B2 (en) Method and device for determining a surface temperature of an inductively heated roller shell
US10458949B2 (en) Method for measuring a stator core of an electric machine and measuring device
JP2013520801A5 (ko)
SG10201803908SA (en) End point detection method, polishing apparatus, and polishing method