JP2007294190A5 - - Google Patents
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- Publication number
- JP2007294190A5 JP2007294190A5 JP2006119483A JP2006119483A JP2007294190A5 JP 2007294190 A5 JP2007294190 A5 JP 2007294190A5 JP 2006119483 A JP2006119483 A JP 2006119483A JP 2006119483 A JP2006119483 A JP 2006119483A JP 2007294190 A5 JP2007294190 A5 JP 2007294190A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixing plate
- holes
- screwed
- optical window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006119483A JP4860336B2 (ja) | 2006-04-24 | 2006-04-24 | 真空処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006119483A JP4860336B2 (ja) | 2006-04-24 | 2006-04-24 | 真空処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007294190A JP2007294190A (ja) | 2007-11-08 |
| JP2007294190A5 true JP2007294190A5 (enrdf_load_stackoverflow) | 2009-06-04 |
| JP4860336B2 JP4860336B2 (ja) | 2012-01-25 |
Family
ID=38764608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006119483A Expired - Fee Related JP4860336B2 (ja) | 2006-04-24 | 2006-04-24 | 真空処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4860336B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101235796B1 (ko) * | 2010-09-28 | 2013-02-21 | 한국표준과학연구원 | 투시창 세정 장치, 투시창 세정 방법, 및 공정 모니터링 방법 |
| CN102586753A (zh) * | 2012-03-21 | 2012-07-18 | 中微半导体设备(上海)有限公司 | Mocvd设备的清洁方法 |
| US11389840B2 (en) * | 2018-06-27 | 2022-07-19 | National Institute Of Advanced Industrial Science And Technology | Cleaning apparatus for optical window, engine, and method for cleaning optical window of engine |
| US12201037B2 (en) | 2019-11-06 | 2025-01-14 | International Business Machines Corporation | Cluster tool for production-worthy fabrication of Dolan bridge quantum Josephson junction devices |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1996025834A1 (fr) * | 1995-02-17 | 1996-08-22 | Hitachi, Ltd. | Appareil de traitement du plasma |
| JP3727518B2 (ja) * | 2000-07-24 | 2005-12-14 | 松下電器産業株式会社 | プラズマ処理装置及びプラズマクリーニング方法 |
| JP2004526293A (ja) * | 2000-09-21 | 2004-08-26 | アプライド マテリアルズ インコーポレイテッド | チャンバ内の表面上へのプロセス残留分の堆積を減少させる装置及び方法 |
| JP2003264172A (ja) * | 2002-03-07 | 2003-09-19 | New Japan Radio Co Ltd | プラズマ処理装置 |
-
2006
- 2006-04-24 JP JP2006119483A patent/JP4860336B2/ja not_active Expired - Fee Related
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