JP2007278846A - 異物混入判別装置および異物混入判別方法 - Google Patents

異物混入判別装置および異物混入判別方法 Download PDF

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Publication number
JP2007278846A
JP2007278846A JP2006105595A JP2006105595A JP2007278846A JP 2007278846 A JP2007278846 A JP 2007278846A JP 2006105595 A JP2006105595 A JP 2006105595A JP 2006105595 A JP2006105595 A JP 2006105595A JP 2007278846 A JP2007278846 A JP 2007278846A
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Japan
Prior art keywords
wavelength
foreign matter
intensity
reflected light
contamination determination
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JP2006105595A
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Japanese (ja)
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JP2007278846A5 (enExample
Inventor
Masato Katto
正人 甲藤
Takashi Kurosawa
崇 黒澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electronics Co Ltd
Miyazaki TLO KK
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Nissin Electronics Co Ltd
Miyazaki TLO KK
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Application filed by Nissin Electronics Co Ltd, Miyazaki TLO KK filed Critical Nissin Electronics Co Ltd
Priority to JP2006105595A priority Critical patent/JP2007278846A/ja
Publication of JP2007278846A publication Critical patent/JP2007278846A/ja
Publication of JP2007278846A5 publication Critical patent/JP2007278846A5/ja
Pending legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2006105595A 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法 Pending JP2007278846A (ja)

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JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

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JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

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JP2007278846A true JP2007278846A (ja) 2007-10-25
JP2007278846A5 JP2007278846A5 (enExample) 2008-04-24

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JP2006105595A Pending JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017078601A (ja) * 2015-10-19 2017-04-27 Ｊｆｅテクノリサーチ株式会社 検査装置及び検査方法
US10309916B2 (en) 2016-04-26 2019-06-04 Panasonic Intellectual Property Management Co., Ltd. Gas-detecting apparatus including gas sensor and method of detecting hydrogen using gas sensor
JP2019174628A (ja) * 2018-03-28 2019-10-10 三井化学株式会社 検査方法、ペリクルの製造方法、および検査装置
CN110788080A (zh) * 2019-12-06 2020-02-14 浙江正泰新能源开发有限公司 一种光伏组件

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017078601A (ja) * 2015-10-19 2017-04-27 Ｊｆｅテクノリサーチ株式会社 検査装置及び検査方法
US10309916B2 (en) 2016-04-26 2019-06-04 Panasonic Intellectual Property Management Co., Ltd. Gas-detecting apparatus including gas sensor and method of detecting hydrogen using gas sensor
JP2019174628A (ja) * 2018-03-28 2019-10-10 三井化学株式会社 検査方法、ペリクルの製造方法、および検査装置
JP7061494B2 (ja) 2018-03-28 2022-04-28 三井化学株式会社 検査方法、ペリクルの製造方法、および検査装置
CN110788080A (zh) * 2019-12-06 2020-02-14 浙江正泰新能源开发有限公司 一种光伏组件

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