JP2007278846A5 - - Google Patents

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Publication number
JP2007278846A5
JP2007278846A5 JP2006105595A JP2006105595A JP2007278846A5 JP 2007278846 A5 JP2007278846 A5 JP 2007278846A5 JP 2006105595 A JP2006105595 A JP 2006105595A JP 2006105595 A JP2006105595 A JP 2006105595A JP 2007278846 A5 JP2007278846 A5 JP 2007278846A5
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JP
Japan
Prior art keywords
wavelength
laser beam
reflected light
intensity
foreign matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006105595A
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English (en)
Japanese (ja)
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JP2007278846A (ja
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Publication date
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Priority to JP2006105595A priority Critical patent/JP2007278846A/ja
Priority claimed from JP2006105595A external-priority patent/JP2007278846A/ja
Publication of JP2007278846A publication Critical patent/JP2007278846A/ja
Publication of JP2007278846A5 publication Critical patent/JP2007278846A5/ja
Pending legal-status Critical Current

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JP2006105595A 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法 Pending JP2007278846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Publications (2)

Publication Number Publication Date
JP2007278846A JP2007278846A (ja) 2007-10-25
JP2007278846A5 true JP2007278846A5 (enExample) 2008-04-24

Family

ID=38680438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006105595A Pending JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Country Status (1)

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JP (1) JP2007278846A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6580937B2 (ja) * 2015-10-19 2019-09-25 Ｊｆｅテクノリサーチ株式会社 検査装置及び検査方法
CN107315033B (zh) 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
JP7061494B2 (ja) * 2018-03-28 2022-04-28 三井化学株式会社 検査方法、ペリクルの製造方法、および検査装置
CN110788080A (zh) * 2019-12-06 2020-02-14 浙江正泰新能源开发有限公司 一种光伏组件
US12339238B2 (en) * 2021-02-22 2025-06-24 Panasonic Intellectual Property Management Co., Ltd. Inspection device and inspection method

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