JP2007278846A5 - - Google Patents

Download PDF

Info

Publication number
JP2007278846A5
JP2007278846A5 JP2006105595A JP2006105595A JP2007278846A5 JP 2007278846 A5 JP2007278846 A5 JP 2007278846A5 JP 2006105595 A JP2006105595 A JP 2006105595A JP 2006105595 A JP2006105595 A JP 2006105595A JP 2007278846 A5 JP2007278846 A5 JP 2007278846A5
Authority
JP
Japan
Prior art keywords
wavelength
laser beam
reflected light
intensity
foreign matter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006105595A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007278846A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006105595A priority Critical patent/JP2007278846A/ja
Priority claimed from JP2006105595A external-priority patent/JP2007278846A/ja
Publication of JP2007278846A publication Critical patent/JP2007278846A/ja
Publication of JP2007278846A5 publication Critical patent/JP2007278846A5/ja
Pending legal-status Critical Current

Links

JP2006105595A 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法 Pending JP2007278846A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006105595A JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Publications (2)

Publication Number Publication Date
JP2007278846A JP2007278846A (ja) 2007-10-25
JP2007278846A5 true JP2007278846A5 (enExample) 2008-04-24

Family

ID=38680438

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006105595A Pending JP2007278846A (ja) 2006-04-06 2006-04-06 異物混入判別装置および異物混入判別方法

Country Status (1)

Country Link
JP (1) JP2007278846A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6580937B2 (ja) * 2015-10-19 2019-09-25 Ｊｆｅテクノリサーチ株式会社 検査装置及び検査方法
CN107315033B (zh) 2016-04-26 2021-08-06 新唐科技日本株式会社 气体检测装置以及氢检测方法
JP7061494B2 (ja) * 2018-03-28 2022-04-28 三井化学株式会社 検査方法、ペリクルの製造方法、および検査装置
CN110788080A (zh) * 2019-12-06 2020-02-14 浙江正泰新能源开发有限公司 一种光伏组件

Similar Documents

Publication Publication Date Title
WO2009049834A3 (en) Optical sensor device
SG157313A1 (en) Method of determining defects in a substrate and apparatus for exposing a substrate in a lithographic process
WO2007100615A3 (en) High-sensitivity surface detection system and method
US20110001988A1 (en) Apparatus for Measuring Thickness
JP2012145583A5 (enExample)
JP2020508568A5 (enExample)
JP2009168748A (ja) 食品検査装置
WO2018235070A1 (en) Method and system for spectral determination of egg gender and fertility
WO2006066136A3 (en) System and method for inspecting a workpiece surface by analyzing scattered light in a back quartersphere region above the workpiece
JP2007093988A5 (enExample)
JP2010169496A5 (enExample)
US20130301040A1 (en) Surface features mapping
WO2010135453A3 (en) Quantum efficiency measurement system and methods of use
JP2014518009A5 (enExample)
WO2011107302A3 (en) Imprint lithography
DE602006019094D1 (de) Vorrichtung und Verfahren zur optischen Ermittlung der Anwesenheit von Kohlendioxid
TW200739033A (en) Cross-sectional scanning method using optical image and the apparatus thereof
JP2011521232A5 (enExample)
JP2011040434A5 (ja) 表面検査装置および表面検査方法
WO2009014844A3 (en) Method and device for identifying an unknown biological substance
JP2007278846A5 (enExample)
JP2011040433A5 (ja) 表面検査装置および表面検査方法
JP2005345281A5 (enExample)
CN103185690B (zh) 农产品光谱成像检测中的均匀照射方法及装置
CN111220587B (zh) 一种基于激发荧光的便携式农残检测仪器