JP2007262548A - Method of forming functional metal coated film onto metal product provided with temperature control function - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of efficiently forming a functional metal coated film by using a small amount of raw material with respect to a desired surface of a casting product such as an injection molding die provided with a temperature control function. <P>SOLUTION: A temperature-controlled medium of a temperature controller is connected to a metal member to be treated provided with a temperature-controlled function to permit temperature control of the member to be treated, thereafter, is controlled into a first temperature range suitable for a degreasing process for a metal coated film forming surface of the member to perform degreasing, subsequently, is controlled into a second temperature range to perform a rinsing process of degreasing liquid, an acid activation process for the coated film forming surface and a rinsing process of acid activation liquid and, subsequently, is set into a third temperature range suitable for metal coated film formation to simultaneously perform coated film formation by injecting liquid agent for coated film formation. Thereafter, temperature control is performed into a fourth temperature range suitable for washing of the liquid agent to discharge the liquid agent, the washing is repeated such that the liquid agent does not remain by washing liquid such as ion exchanged water and, as the result, the functional metal coated film formation to a metal product provided with a temperature control function is performed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention can be applied to required surfaces of metal products such as injection molds, press dies, processing machine beds, furnace bodies for semiconductor manufacturing processes, barrels for extruders and the like that require precise temperature control. On the other hand, the present invention relates to a functional metal film forming method for efficiently forming a functional metal film.

Accurate temperature control (hereinafter abbreviated as “temperature control”) for precision equipment racks, supports, drive components, press molds, plastic injection molds, etc. that require high precision In many cases, a cast product equipped with a temperature control pipe for passing a temperature control medium is used. There are various methods for forming temperature control pipes in such cast products, but the most reliable method is to form the pipe material in the mold in the casting process and form it by the so-called cast-in method. To do.

In Japanese Patent Application No. 2005-260164, the present applicant discloses a martensitic cast material which is a raw material of a predetermined component, has a martensitic transformation start temperature near room temperature, and has a martensitic transformation start temperature below freezing point. In addition, there is disclosed a method for producing a cast product in which a temperature control pipe, an installation pipe for an electric heater, a temperature sensor, and the like are provided by a casting method using a cast material obtained by this technique.

On the other hand, when enhancing the durability of the surface of the cast product provided with temperature control piping, and further, when the product surface is mirror-finished, means for forming a functional metal film that can be processed at a lower cost and in a shorter time than polishing. Widely adopted. Various methods such as electroplating, electroless plating, thermal spraying, PVD / CVD, and sputtering are known as methods for forming a functional metal film, but the apparatus is expensive or requires advanced processing technology. Or products whose processing product sizes are limited are mixed, and there is nothing that can be applied in all fields. Of these, plating methods such as electroplating and electroless plating are suitable for forming metal coatings on the surface of large objects, starting from the inside of pipes and cylinders, to the surface of complex shapes. It has been adopted.

As a method for forming a metal film on the surface of a metal product, Patent Document 1 discloses that plating is appropriate only for a portion that requires plating, such as an inner peripheral surface serving as a piston sliding surface of a cylinder for an internal combustion engine that is a member to be processed. The technique applied to is disclosed. Here, electroless plating is applied to the inner surface of a cylinder having an opening such as an intake / exhaust valve at the bottom, and an electroless plating solution is introduced into the cylinder and allowed to pass at a predetermined flow rate while the inner circumference of the cylinder is being passed. It is intended to apply electroless plating to the desired part. In this case, the management of the plating temperature, which greatly affects the processing speed and finishing quality, must be performed separately for the processing temperature management.

Patent Document 2 discloses a technique for forming a uniform metal film on an inner wall surface of a hole of a workpiece having a bottomed hole by an electroless plating method. Here, a uniform metal film is formed by inserting and arranging a thin tube from the opening of the bottomed hole to the vicinity of the bottom and supplying an electroless plating solution through the thin tube at a flow rate of 2 to 200 cm / min. Is disclosed. By such a method, for example, a metal film having a high rust prevention effect can be formed on the inner wall surface of the cooling water pipe of the mold. It discloses that it is possible to prevent fluctuations in the effect, and to improve work efficiency and reduce costs. However, this technique is an electroless plating method for the inner wall surface of a hole with a bottom, and cannot be applied to a concave portion to be developed or an outer surface of an object.

Patent Document 3 discloses a technique for performing electroless plating on the inner surface of a long metal tube. Preheating is performed using a method in which both ends of the metal tube are energized and heated as current-carrying electrodes. A technical idea is disclosed in which a plating solution heated to a temperature higher than the plating temperature is continuously passed to form a metal coating layer on the inner surface of a long metal tube. In this method, a metal tube is regarded as a resistor, and the metal tube is preheated using Joule heat when energized. Therefore, it depends greatly on the electrical resistance of the metal tube, and therefore the material, tube diameter, thickness, length and other dimensions of the metal tube, and the contact state with other objects. It is not necessarily obtained. Moreover, it is difficult to apply to the recessed part to expand | deploy and the outer surface of a target object.
Japanese Patent Laid-Open No. 2005-120413 Japanese Patent Laid-Open No. 09-13174 JP 09-279357 A

The present invention provides a casting product having a temperature control function, such as an injection mold, a press mold, a processing machine bed, a furnace for a semiconductor manufacturing process, a barrel for an extruder, a desired amount of surface, etc. It is an object of the present invention to provide a method for forming a functional metal film that efficiently forms a functional metal film using a material.

According to the first aspect of the present invention, the outlet 2B and the inlet 2A of the temperature control medium in the temperature controller are respectively connected to the corresponding temperature control medium connecting portions of the metal member 23 having a temperature control function. In addition to adjusting the temperature, the degreasing step for the member to be processed is performed after adjusting the temperature to the first temperature range suitable for the degreasing step for the metal film forming surface of the member to be treated, and the temperature is adjusted after the degreasing step is completed. Then, after adjusting to the second temperature range, the degreasing liquid washing step is performed, then the metal film forming surface is subjected to the acid activation step, then the acid activation liquid washing step is performed, and then the metal is washed. At the same time as setting the third temperature range suitable for the film forming treatment, the metal film forming solution is injected, and after the metal film is formed, the temperature is adjusted to the fourth temperature range suitable for cleaning the metal film forming solution. While forming a metal film It is a method for forming a functional metal film on a metal product having a temperature control function, in which the agent is discharged and the cleaning is repeated so that the metal film forming liquid does not remain with a cleaning liquid such as ion exchange water.

In the invention according to claim 2, the degreasing, rinsing, and acid activity are performed on the cavity portion of the member to be processed having the temperature control function, the cavity portion of the furnace body, and the concave portion such as the cylindrical body that is closed on one side. In a method for forming a functional metal film on a metal product having a temperature control function, the metal film is formed by directly injecting each processing solution required for various steps of crystallization, water washing, metal film formation treatment and washing It is characterized by being.

According to a third aspect of the present invention, a functional metal film is formed on a planar portion, a protruding portion, and a shallow concave portion that is not deep enough to store a liquid, etc. of the member to be processed having the temperature control function. For this purpose, the liquid barrier surrounding the functional metal film forming portion is temporarily fixed, and the degreasing, water washing, acid activation, water washing, and the recess surrounded by the liquid barrier formed in this way, A method for forming a functional metal film on a metal product having a temperature control function, in which the metal film is formed by directly injecting treatment liquids required for various processes of metal film formation and cleaning. And

According to a fourth aspect of the present invention, in order to form a functional metal film on the entire surface or most of the surface of the member to be processed having the temperature control function, the entire member to be processed is accommodated with a slight margin. Each processing solution required for the steps of the degreasing, water washing, acid activation, water washing, metal film forming treatment and washing is directly poured between the container and the member to be treated. The method is characterized in that the metal film is formed by the method for forming a functional metal film on a metal product having a temperature control function.

The invention described in claim 5, wherein the metal film formation process is an electroless plating process using an electroless plating solution, NaOH in the degreasing _{step, KOH, Na 2 CO 3,} Na 3 PO 4, surfactant It is a method for forming a functional metal film on a metal product having a temperature control function in which one or more types of alkali degreasing agents selected from agents and the like are used. As the plating solution, an acidic or alkaline plating solution can be used. In addition, as the alkaline degreasing agent used in the degreasing step, sodium glycolate can be used, and its component is not limited to NaOH or the like.

The invention according to claim 6 is a functional metal for a metal product having a temperature control function, wherein the metal film forming treatment is an electroless plating treatment using an electroless Ni-P (nickel-phosphorus) plating solution. It is a film forming method.

In the invention according to claim 7, the first temperature range is 45 ° C to 95 ° C, the second temperature range is 5 ° C to 40 ° C, the third temperature range is 45 ° C to 98 ° C, and the fourth temperature range is It is a method for forming a functional metal film on a metal product having a temperature control function, which has a temperature range of 5 ° C to 40 ° C. Moreover, the said temperature range is not limited to these, It can implement also in the range of -100 degreeC-300 degreeC. Such a wide temperature range can be realized by using, for example, a fluorine-based inert refrigerant, water, silicon-based oil or the like as the temperature control medium.

The invention according to claim 8 is a functional metal to a metal product having a temperature control function, wherein the member to be processed is either an injection mold having a temperature control pipe or a press mold. It is a film forming method.

The invention according to claim 9 is characterized in that the member to be treated is a bed for a precision processing machine having a temperature control pipe, and the member according to claim 10 has a temperature control pipe. It is an extruder barrel with one end side temporarily closed, and the invention according to claim 11 is characterized in that the member to be processed is a furnace body for a semiconductor manufacturing process having temperature control piping. This is a method for forming a functional metal film on a metal product having a temperature control function.

The invention according to claim 12 is characterized in that the temperature control pipe of the member to be processed is formed simultaneously with casting by the cast-in pre-pipe, and the invention according to claim 13 is a temperature control pipe of the member to be processed. Is a method for forming a functional metal film on a metal product having a temperature control function, characterized by being formed by post-processing.

According to the functional metal film forming method executed by the method specified by the present invention, a metal product as a member to be processed having a temperature control pipe, for example, a mold, a furnace body, etc. A functional metal coating is formed on the inner surface of a concave portion such as a cavity for receiving a gas, and the inner wall surface of a cylindrical body such as an extruder barrel that is temporarily closed at one end by a highly efficient and economical method. be able to.

In carrying out the pretreatment liquid, cleaning liquid, and functionality on the inner wall of the cavity such as a cavity or cavity, while adjusting the temperature so that the temperature is adjusted to a temperature suitable for functional metal film formation by the temperature control pipe attached to the member to be processed. A desired metal film can be formed on the inner wall surface while directly injecting and extracting the metal film forming treatment liquid and the like. In addition, when the metal film forming treatment surface of the member to be treated is flat or convex, a liquid barrier surrounding the metal film formation target part is temporarily installed, and the required treatment liquid is injected into the inside thereof to provide the same as the inner surface of the recess. A desired metal film can be formed. Further, when a functional metal film is formed on most or the entire outer surface of the member to be processed, a container having a volume slightly larger than that of the member to be processed is used, and the member to be processed is accommodated in such a container. The treatment may be performed while injecting and extracting each treatment solution while adjusting the temperature.

As the functional metal film forming process for the member to be processed having the temperature control function according to the present invention, an electroless plating process can be advantageously applied. In this case, by using an electroless plating solution containing a component that at least partially overlaps the component of the member to be treated, post-use recycling of the workpiece can be advantageously performed. For example, in the case of a product such as a mold or a semiconductor process furnace body made of martensite cast material which can obtain martensite transformation at a low temperature by the sub-zero treatment disclosed in Japanese Patent Application No. 2005-260164 according to the present applicant's application, electroless NiP When electroless plating using a (nickel-phosphorous) plating solution is performed, a high-quality recycled metal is obtained after use by dissolving the metal film without removing it by polishing or other means. be able to.

When performing a functional metal film forming process according to the present invention, for example, an electroless plating process, in the conventional plating process, each process such as alkali immersion degreasing, acid cleaning, acid activity, electroless plating process, and hot water washing is different. It was done by bath bath. If the workpiece is a large product, for example, a large mold such as a press mold or an injection mold used in the manufacture of parts for transport machinery such as automobiles and trains, a large number of baths are required for each process. Large-scale equipment and floor space are required. Along with this, a large amount of various materials including liquid agents used in each process is required, and further, a large size is required for the process of immersing and removing the member to be treated in each bath liquid tank, movement between each bath liquid tank, etc. Crane movement is required and cycle time is increased. On the other hand, in the functional metal film forming treatment according to the present invention, the site of the treatment plant, the building, the incidental facilities, etc. can be greatly saved, the required materials and energy used are small, and the treatment time can be shortened, so that it is economical. It is excellent and can contribute to the development of industry in this field.

As a metal product having a temperature control function suitable for the functional metal film forming process according to the present invention, in addition to the above-mentioned molds for injection molding and press, a required member such as a temperature control tube is cast-in, Extruder barrel for plastic melting and kneading, black body furnace with straight pipe or bent temperature control pipe, furnace body for PVD / CVD / dry etching, wet etching, plasma generator, semiconductor processing equipment furnace body, The present invention is advantageously applicable to various types of engine casting parts such as semiconductor mask manufacturing steppers, aligners, precision temperature control mechanisms for sliding surfaces of precision processing equipment, cylinder liners, engine blocks, and the like. These are merely examples, and can also be applied to metal products having temperature control pipes or lubricating oil pipes having other similar structures, and are not limited to these examples.

Next, the contents of the method for forming a functional metal film on a metal product having a temperature control function according to the present invention will be disclosed. FIG. 1 is a conceptual diagram showing an embodiment in which plating is performed by the functional metal film forming method according to the present invention. A member 1 to be processed, which is a mold, includes a temperature control pipe 2 and a cavity 3 as shown by a curve in the center of the figure is formed. A plating layer as a functional metal film is formed on the wall surface of the cavity 3. 4 is to be formed.

A temporary partition wall 5 is formed so as to prevent the processing liquid from scattering so as to surround the cavity 3. The material, attachment range, height, and the like of the temporary partition wall should be determined according to the size of the member 1 to be processed, the shape and volume of the cavity 3, the type of the processing liquid 6, and the like. Further, the treatment liquid 6 may be appropriately circulated by the treatment liquid circulation pump 7 in order to form a high-quality metal film without unevenness, and may be further agitated by the stirring device 8 as necessary.

In order to increase the efficiency of temperature control, it is convenient to maintain a constant temperature by surrounding the outer surface of the mold 1 as a member to be processed with the heat insulating material 9. Furthermore, since the surface temperature to be processed may be lower than that in the pretreatment in the temperature control during the process, it is convenient that the heat insulating material 9 is detachable.

In such a configuration, the inlet 2A and outlet 2B of the temperature control pipe 2 are heated to flow a heat medium for temperature control, such as water, hot water, steam, heat medium oil, fluorine-based inert refrigerant, and the like. Adjust the temperature of the mold, which is the member to be processed, to a temperature suitable for processing by connecting to the corresponding connection part of the controller (not shown) and adjusting the medium temperature and flow rate as appropriate. To do. The temperature control method in this case may be partially different from the type and flow direction of the temperature control medium after the processed member is completed, the flow rate, etc., but the pipe diameter, the configuration of the bent part, the connection joint part Since it cannot be said that there is no forward / reverse difference in the flow resistance, the same technique is still more convenient.

Next, an electroless plating process that is a typical metal film forming process will be disclosed with reference to the flowchart shown in FIG. In step S1, alkaline liquid immersion degreasing treatment of the surface to be processed is performed at 50 ° C. or higher for 10 minutes. Next, in step S2, water washing is performed. Next, in step S3, acid activation is performed at room temperature for several seconds to several tens of seconds. Thereafter, in step S4, the water is washed again to remove the acid. Then, in step S5, the electroless plating process which is the core of the process is performed at a temperature range of 80 to 90 ° C. for about 30 minutes to 1 hour.

After completion of the plating process, hot water washing after plating is performed in step S6, moisture is removed in the drying process of step S7, and a series of processes is completed. In the plating process for a large target to be processed which has been widely performed conventionally, the processing tanks of the respective steps are provided independently, and the liquids corresponding to the respective baths are sequentially applied while the target member is lifted and moved by a crane. The method of immersing in is carried out. On the other hand, in the plating process according to the present invention, the plating process is performed directly on the required surface of the object to be processed, which not only simplifies the equipment, but also shortens the cycle time required for the process and greatly reduces the required energy. Is done.

FIG. 3 shows a typical example of equipment for performing a conventional metal film forming method, for example, a plating method, on a large metal product. The treatment tank 21 is filled with any treatment liquid 22 such as degreasing, cleaning, activation, or plating solution, and a member to be treated 23 that is a large metal product is immersed in the treatment liquid 22. The member 23 to be processed is moved from the previous process to the next process, which is sequentially adjacent, through a lifting-running-hanging operation by the overhead traveling crane 20 traveling on the rail 20R. Since the liquid temperature in the treatment tank 21 needs to be maintained at a temperature suitable for the desired reaction, either the tank internal heater 24 disposed in the liquid, the embedded temperature control pipe 25 embedded around the liquid tank, or the like. Temperature control is performed by one or a combination of both. The processing liquid 22 filled in the processing tank 21 is subjected to processing such as purification, heating, and cooling by an attached processing liquid circulation device 26, and is circulated through a supply pipe 27 and a recovery pipe 28.

In such a metal film forming apparatus for large metal products according to the conventional example, the processing tank 21, the overhead traveling crane 20, the processing liquid circulation device 26 associated with the liquid tank, etc. are the largest metal to be processed. It is necessary to determine the size, rating, etc. of each product, assuming the dimensions, shape, and weight of the product, and multiply these by the safety factor to configure the equipment.

Therefore, since the processing tank 21 for receiving the processing target of the assumed maximum dimension is juxtaposed for each processing step, an extremely large floor area and excessive equipment investment are required. The overhead traveling crane 20 is also required to determine the lifting load, traveling performance, etc., assuming the metal product to be treated with the maximum dimensions and maximum weight, which is overrated when processing small and medium-sized products. It becomes a cause of deteriorating energy efficiency. In addition, since legal inspections are required at regular intervals for crane facilities, the administrative burden is also increased. In addition, regarding the various incidental facilities including the treatment liquid circulation device 26, similar excess facilities are assumed.

On the other hand, according to the processing method according to the present invention, in the member to be processed having recesses such as the mold cavity and various furnace bodies, the processing liquids are directly injected into the inside thereof, and the temperature control is performed. A metal film can be formed on the surface of the metal product while maintaining the temperature required for the treatment liquid by so-called internal direct heating by the temperature control function of the metal product to be processed. If the surface to be processed has a flat or convex part, the liquid is poured into the liquid-proof temporary wall for processing, and after a predetermined time has elapsed, the processing liquid in the previous process is discharged, and then the processing liquid in the next process is poured. However, different processes are executed sequentially.

According to the treatment method of the present invention, it is not necessary to move between treatment tanks with a crane or the like, and man-hours and treatment time can be shortened. In this case, since the amount of the processing liquid is so small that it cannot be compared with the conventional apparatus, the pump power for injection and drainage and the energy consumption required for temperature control can be greatly reduced. Therefore, problems such as excess equipment such as the processing apparatus according to the prior art of FIG. 3 as exemplified as a typical example, excess rating, efficiency reduction, and increase in energy loss are solved at once.

The method for forming a functional metal film on a metal product according to the present invention is characterized in that when a functional metal film, for example, a metal film by electroless plating is formed on a desired surface of a metal product that originally has a temperature control function, A functional metal film is economically formed by directly injecting a treatment liquid while performing temperature control using a temperature control function of the product itself. According to such a technique, a metal mold for manufacturing a large metal member, a plastic injection mold, a furnace body for a semiconductor process, an extruder used for various transport machines such as automobiles, railway vehicles, airplanes, and ships. There are significant benefits in manufacturing barrels and other large metal components.

It is a conceptual diagram which shows the implementation state of the functional metal film formation method to the metal product which comprises the temperature control function which concerns on this invention. It is a flowchart which shows the typical process process of the electroless-plating process which is a functional metal film formation method to the metal product which comprises the temperature control function which concerns on this invention. It is a conceptual diagram which shows the implementation state of the functional metal film formation method which concerns on a prior art.

Explanation of symbols

1 Processed parts with mold temperature control piping (mold)
2 Temperature control piping 2A Temperature control medium inlet 2B Temperature control medium outlet 3 Cavity 4 Functional metal coating (plating layer)
5 Temporary partition wall 6 Treatment liquid 7 Treatment liquid circulation pump 8 Stirrer 9 Thermal insulation material 20 Overhead crane 20R Rail 21 Treatment tank 22 Treatment liquid 23 Processed member 24 Tank internal heater 25 Embedded temperature control pipe 26 Treatment liquid circulation apparatus 27 Treatment liquid Supply piping 28 Treatment liquid recovery piping

Claims (13)

Temperature control is possible by connecting the outlet and the inlet of the temperature control medium in the temperature controller to the corresponding temperature control medium connection part of the metal processed member having a temperature control function, and then the processed member After adjusting to the first temperature range suitable for the degreasing process on the metal film forming surface, the degreasing process for the member to be treated is performed, and after the degreasing process, the temperature is adjusted to the second temperature range. Execute a degreasing water washing step, then perform an acid activation step on the metal film forming surface, then perform an acid activation water washing step, and then set to a third temperature range suitable for the metal film forming treatment At the same time, the metal film forming liquid is injected, and after the metal film is formed, the metal film forming liquid is discharged while adjusting the temperature to a fourth temperature range suitable for cleaning the metal film forming liquid. Washing ion exchange water A method for forming a functional metal film on a metal product having a temperature control function, characterized in that the cleaning is repeated so that the liquid agent for forming a metal film does not remain in the cleaning liquid. The degreasing, rinsing, acid activation, rinsing, metal film forming treatment, and the like for the cavity portion of the member to be treated having the temperature control function, the cavity portion of the furnace body, and the concave portion such as the cylindrical body closed on one side 2. The formation of a functional metal film on a metal product having a temperature control function according to claim 1, wherein the metal film is formed by directly injecting each processing solution required for cleaning steps. Method. In order to form a functional metal film on a planar portion, a projecting portion, and a shallow concave portion that is not deep enough to store liquid, the functional metal film is formed. Steps of degreasing, water washing, acid activation, water washing, metal film forming treatment and washing are performed on the recess surrounded by the liquid barrier wall formed by temporarily fixing the liquid barrier surrounding the portion. The method for forming a functional metal film on a metal product having a temperature control function according to claim 1, wherein the metal film is formed by directly injecting each processing solution required for the treatment. In order to form a functional metal film on the entire surface or most of the member to be processed having the temperature control function, the entire member to be processed is placed in a container that can be accommodated with a slight margin. Metal film formation is performed by directly injecting each treatment liquid required for the steps of degreasing, water washing, acid activation, water washing, metal film formation treatment and washing with respect to the member to be treated. The method for forming a functional metal film on a metal product having a temperature control function according to claim 1. The metal film forming treatment is an electroless plating treatment using an electroless plating solution, and the degreasing step includes one or more selected from NaOH, KOH, Na ₂ CO ₃ , Na ₃ PO ₄ , a surfactant, and the like. A method for forming a functional metal film on a metal product having a temperature control function according to any one of claims 1 to 4, wherein a seed alkali degreasing agent is used. 6. The function for a metal product having a temperature control function according to claim 5, wherein the metal film forming process is an electroless plating process using an electroless Ni-P (nickel-phosphorus) plating solution. Metal film forming method. The first temperature range is 45 ° C to 95 ° C, the second temperature range is 5 ° C to 40 ° C, the third temperature range is 45 ° C to 98 ° C, and the fourth temperature range is 5 ° C to 40 ° C. The method for forming a functional metal film on a metal product having a temperature control function according to claim 1. The temperature control function according to claim 1, wherein the member to be processed is either an injection mold having a temperature control pipe or a press mold. A method for forming a functional metal film on a metal product. The functional metal film is formed on a metal product having a temperature control function according to any one of claims 1 to 7, wherein the member to be processed is a bed for a precision processing machine including a temperature control pipe. Method. The metal member having a temperature control function according to any one of claims 1 to 7, wherein the member to be processed is an extruder barrel having a temperature control pipe and having one end side temporarily closed. Functional metal film forming method. The functional metal coating on a metal product having a temperature control function according to any one of claims 1 to 7, wherein the member to be processed is a furnace body for a semiconductor manufacturing process including a temperature control pipe. Forming method. The functional metal to a metal product having a temperature control function according to any one of claims 1 to 7, wherein the temperature control pipe of the member to be processed is formed simultaneously with casting by a cast-in pre-pipe. Film formation method. The method for forming a functional metal film on a metal product having a temperature control function according to any one of claims 1 to 7, wherein the temperature control piping of the member to be processed is formed by post-processing.

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