JP2007232268A - Pressure-reduced dryer and manufacturing process of coated object - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a pressure-reduced dryer which evenly dries a liquid in a coated film formed by jetting and applying droplets on a substrate in each part. <P>SOLUTION: The pressure-reduced dryer is for drying the liquid in the coated film on the substrate to be coated by holding the substrate 7 to be coated, formed with the coated film by jetting and applying droplets, in a lower part in a chamber 33, and evacuating gas of an interior from an exhaust port 34 formed in a ceiling face center of the chamber. A first dispersion plate 36 and a second dispersion plate 37 are vertically arranged in the interior of the chamber, multiple first vent holes 38 are formed on the first dispersion plate such that they are distributed on the whole face, and in the second dispersion plate, multiple vent holes 39 are distributed on the whole face, and they are formed in an arrangement pattern with deviated hole positions with respect to an arrangement pattern of the vent holes of the first dispersion plate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vacuum drying apparatus used for drying a liquid in a coating film applied to a substrate to be coated by droplet jetting, and coating formation by droplet jetting on the substrate surface by drying under reduced pressure by this vacuum drying apparatus. The present invention relates to a method for producing a coated body that obtains a coated body by drying a liquid in the coated film.

  As described in Japanese Patent Application Laid-Open No. 2004-31070 (Patent Document 1), a droplet spray coating apparatus used when manufacturing an organic EL display panel is known.

  In this droplet spray coating apparatus, a liquid in which a colorant such as a polymer light emitting material is dissolved in a solvent is sprayed as droplets from a nozzle of a droplet spray coating head, and the surface of the substrate is formed in a lattice pattern by the sprayed droplets. The organic EL display panel is manufactured by applying and then evaporating the solvent in the coating film formed on the substrate surface to leave the colorant film on the substrate.

  In the process of manufacturing such an organic EL display, a vacuum drying apparatus 100 as shown in FIG. 7 is used to evaporate the solvent from the liquid in the coating film applied on the substrate. The vacuum drying apparatus 100 includes a chamber 102 that accommodates a substrate 101 on which a coating film is formed by spray coating of droplets, and a large number so as to be uniformly distributed over the entire surface accommodated in the chamber 102 by punching. The dispersion plate 103 in which the air holes are formed, and the vacuum pump 104 for sucking the gas in the chamber 102 are provided.

  The substrate 101 to be coated housed in the chamber 102 is supported by support pins 105. The inside of the chamber 102 is partitioned into a lower space 106 and an upper space 107 by a dispersion plate 103. In the lower space 106, a substrate 101 on which a coating film is formed by spraying droplets is disposed, and a vacuum pump 104 is communicated with the upper space 107.

  The reduced-pressure drying by the reduced-pressure drying apparatus 100 is performed as follows. The substrate 101 to be coated on which the droplet spraying and coating has been completed is accommodated in the lower space 106 of the chamber 102 through an inlet / outlet (not shown), and the vacuum pump 104 is driven. By driving the vacuum pump 104, the gas in the upper space 107 is sucked out of the chamber 102. Along with this suction, the gas in the lower space 106 containing the solvent evaporated from the liquid in the coating film of the substrate to be coated flows into the upper space 107 through the vent holes of the dispersion plate 103, and the upper space 107. After flowing in, it is sucked by the vacuum pump 104 and discharged from the chamber 102.

  In FIG. 7, the arrow shown with a broken line has shown the flow direction of gas. The output of the vacuum pump 104 is set to a value at which the gas flow from the lower space 106 through the dispersion plate 103 and into the upper space 107 is performed substantially uniformly over the entire surface of the dispersion plate 103.

  However, in the above-described reduced pressure drying apparatus, the following points have not been considered. When the substrate 101 to be coated on which a coating film is formed by spray application of droplets is accommodated in the lower space 106 of the chamber 102, the gas in the lower space 106 includes the gas existing in the chamber 102 and the coating film. It becomes a mixed gas in which the solvent evaporated from the liquid inside is mixed. When the concentration of the solvent in the gas in the upper space 107 of the substrate 101 to be coated in the lower space 106 is examined, as shown in FIG. 8, the central region of the substrate 101 is high and the edge region is low.

For this reason, the drying speed of the coating film is slow in the central region of the substrate 101 to be coated where the mixed gas having a high solvent concentration exists, and is fast in the edge region of the substrate 101 to be coated where the mixed gas having a low solvent concentration is present. As a result, unevenness in the pressure distribution occurs, and turbulent flow based on the pressure difference occurs, resulting in variations in the drying speed. If the drying speed of the coating film formed on the substrate 101 to be coated varies, the shape and thickness of the colorant in the coating film remaining on the substrate 101 after the solvent is dried varies. In general, when the drying speed is fast, the remaining colorant film has a smaller outer dimension and a larger thickness, and when the drying speed is slower, the remaining colorant film has a larger outer dimension and a larger thickness. The size is reduced. If variations occur in the shape and thickness of the colorant film remaining on the substrate 101, the light emission state also varies when a voltage is applied to the colorant film, resulting in a reduction in image display quality.
JP 2004-31070 A

  The present invention has been made in view of such problems of the prior art, and is a vacuum drying method that can uniformly dry a liquid in a coating film formed by spraying droplets on a substrate to be coated. It is an object of the present invention to provide an apparatus and a method for producing a coated body using the vacuum drying apparatus.

  In the first aspect of the present invention, a substrate to be coated on which a coating film is formed by spraying droplets is accommodated in the lower part of the chamber, and the internal gas is evacuated from an exhaust port formed at the center of the top surface of the chamber. Thus, a vacuum drying apparatus for drying the liquid in the coating film formed on the substrate to be coated, the first dispersion plate and the first dispersion so as to cross the inside of the chamber A second dispersion plate is disposed closer to the substrate to be coated than the plate, and the first dispersion plate is formed with a number of first air holes so as to be distributed over the entire surface. A plurality of second ventilation holes are formed in the distribution plate in an arrangement pattern that is distributed over the entire surface and has a hole position shifted from the arrangement pattern of the first ventilation holes of the first dispersion plate. It is characterized by that.

  According to a second aspect of the present invention, in the reduced-pressure drying apparatus according to the first aspect, the first vent hole formed in the first dispersion plate is a circular hole, and the second passage formed in the second dispersion plate is provided. The pores are tapered holes that spread from the upper side to the lower side.

  According to a third aspect of the present invention, there is provided a method for producing a coated body comprising: a coating step of spraying and applying droplets onto a substrate to be coated to form a coating film; And a reduced-pressure drying step for drying the coating film formed on the substrate to be coated under reduced pressure. In the reduced-pressure drying step, the first dispersion plate and the first dispersion plate are disposed so as to cross the inside of the chamber. A second dispersion plate is disposed closer to the substrate to be coated than the dispersion plate, and the first dispersion plate has a plurality of first vent holes formed so as to be distributed over the entire surface. A plurality of second vent holes are formed in the dispersive plate in an arrangement pattern that is distributed over the entire surface and is displaced from the position of the first vent holes of the first dispersive plate. The substrate to be coated is stored in the lower part of the chamber using a vacuum drying apparatus. The liquid in the coating film formed on the substrate to be coated is dried under reduced pressure by evacuating the gas in the chamber from an exhaust port formed on the top surface of the chamber. is there.

  According to a fourth aspect of the present invention, in the method for manufacturing the coated body according to the third aspect, the first ventilation hole formed in the first dispersion plate is a circular hole, and the second diffusion plate is formed in the second dispersion plate. The vent hole is characterized by using a vacuum drying apparatus having a tapered hole extending from the upper side to the lower side.

  According to the vacuum drying apparatus of the present invention, the liquid in the coating film applied to the substrate to be coated can be uniformly dried.

  Moreover, according to the manufacturing method of the application body of this invention, the apply | coated droplet can be dried uniformly and the application body provided with the uniform display performance over the whole surface can be manufactured.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

  (First Embodiment) The overall structure of the droplet spray coating apparatus 1 will be described. The droplet spray coating apparatus 1 includes a substrate storage unit 2, a droplet coating unit 3, a drying unit 4 corresponding to the reduced pressure drying apparatus according to the first embodiment of the present invention, an application body storage unit 5, and a transport. Part 6.

  The substrate storage unit 2 includes a gantry 8 and a storage shelf 8a that is detachably mounted on the gantry 8, and accommodates a plurality of substrates 7 that are substrates to be coated before application of droplets containing a colorant. It is accommodated in the shelf 8a.

  In the droplet application unit 3, ink that is a liquid containing a colorant is ejected as droplets (ink droplets), and the ejected ink droplets are applied to the surface of the substrate 7 in a grid pattern. As shown in FIG. 3, the droplet application unit 3 includes a gantry 9, an ink application box 10, and an ink supply box 11, and the ink application box 10 and the ink supply box 11 are fixed adjacent to each other on the gantry 9. Has been.

  Inside the ink application box 10, there are three inkjet head units 12, a unit moving mechanism 13 that integrally moves the three inkjet head units 12 in the X-axis direction, and a substrate 7 that holds the substrate 7 in the X-axis direction. A substrate moving mechanism 14 that moves in the direction and the Y-axis direction, a head maintenance unit 15, and three ink tanks 16 are accommodated.

  The unit moving mechanism 13 has a pair of support columns 17 erected on the upper surface of the gantry 9 and a guide plate 18 connected between the upper ends of the pair of support columns 17 and extending in the X-axis direction. A base plate 19 is attached to the guide plate 18 so as to be movable in the X-axis direction. The base plate 19 is provided so as to be movable in the X-axis direction by a feed mechanism (not shown) using a feed screw and a drive motor. An ink jet head unit 12 is attached to the guide plate 18.

  The substrate moving mechanism 14 includes a Y-axis direction guide plate 20, a Y-axis direction moving table 21, an X-axis direction moving table 22, and a substrate holding table 23 that is a holding unit.

  The Y-axis direction guide plate 20 is fixed to the upper surface of the gantry 9. A guide groove 20 a extending in the Y-axis direction is formed on the upper surface of the Y-axis direction guide plate 20.

  On the lower surface of the Y-axis direction moving table 21, a convex portion (not shown) that is movably engaged with the guide groove 20a is formed. The Y-axis direction moving table 21 is provided so as to be movable in the Y-axis direction along the guide groove 20a by a feed mechanism (not shown) using a feed screw and a drive motor. A guide groove 21 a extending in the X-axis direction is formed on the upper surface of the Y-axis direction moving table 21.

  On the lower surface of the X-axis direction moving table 22, a convex portion (not shown) that is movably engaged with the guide groove 21a is formed. The X-axis direction moving table 22 is provided so as to be movable in the X-axis direction along the guide groove 21a by a feed mechanism (not shown) using a feed screw and a drive motor.

  The substrate holding table 23 is fixed to the upper surface of the X-axis direction moving table 22. On the upper surface of the substrate holding table 23, the substrate 7 is placed so as to be able to be loaded and unloaded. The substrate 7 placed on the substrate holding table 23 is sucked by a suction mechanism (not shown) and fixedly held at a predetermined position. The substrate holding table 23 moves in the Y-axis direction together with the X-axis direction moving table 22, a position for applying ink droplets to the held substrate 7 (see FIG. 1), and the substrate on the substrate holding table 23. 7 can be moved to a position for loading and unloading (see FIG. 2).

  As shown in FIG. 3, the ink jet head unit 12 includes ink droplet ejection coating heads 24 that are droplet ejection coating heads and ink droplets in a direction perpendicular to the upper surface of the substrate 7 located at the coating position (Z-axis direction). The Z-axis direction moving mechanism 12a that moves the spray coating head 24, the Y-axis direction moving mechanism 12b that moves the ink droplet spray coating head 24 in the Y-axis direction, and the ink droplet spray coating head 24 are directions around the Z axis. and a θ-direction rotating mechanism 12c that rotates in the θ-direction. By these mechanisms 12a to 12c, the ink droplet ejection coating head 24 is movable in the Z-axis direction, the Y-axis direction, and the θ direction.

  As shown in FIG. 4, the ink droplet ejection application head 24 includes a plurality of ink chambers 25 that are liquid chambers that store ink supplied from the ink tank 16, and a diaphragm that forms a part of the wall of each ink chamber 25. 26, a plurality of piezoelectric elements 27 provided at positions corresponding to the respective ink chambers 25 in contact with the diaphragm 26, and a nozzle plate 28 that forms a part of the wall of each ink chamber 25. The nozzle plate 28 is formed with a plurality of nozzles 29 that communicate with the ink chambers 25. In the ink droplet ejection application head 24, the piezoelectric element 27 is deformed by applying a voltage to the piezoelectric element 27, the diaphragm 26 is bent by this deformation, and the volume of the ink chamber 25 is changed by the deformation of the diaphragm 26. Along with this volume change, an ink droplet E as a droplet is ejected from the nozzle 29. Each ink tank 16 contains inks of different colors (R (red), G (green), B (blue)), and inks of different colors are supplied from the nozzles 29 of the ink droplet ejection application heads 24. Drops are jetted.

  The head maintenance unit 15 performs cleaning when the nozzles 29 of the ink droplet jet coating head 24 are clogged. The head maintenance unit 15 is arranged on the side of the Y-axis direction guide plate 20 in the moving direction of the inkjet head unit 12 in the X-axis direction.

  A control box 30 for controlling each part of the droplet spray coating apparatus 1 is provided inside the gantry 9. By control from the control box 30, the movement of the inkjet head unit 12 by the unit moving mechanism 13, the movement of the substrate 7 by the substrate moving mechanism 14, the ejection of ink droplets from the ink droplet ejection coating head 24, and the substrate 7 by the transport unit 6. The substrate 7 coated with ink droplets is dried by the drying unit 4.

  A plurality of ink supply tanks 31 are detachably attached inside the ink supply box 11. Each ink supply tank 31 contains ink of different colors (R (red), G (green), and B (blue)), and each ink supply tank 31 contains ink of the same color. The ink tank 16 is connected via a supply pipe 32. When the ink in the ink replenishing tank 31 runs out, or when the amount is less than the set amount, the ink is replaced with a new ink replenishing tank 31.

  The drying unit 4 is configured as shown in FIG. 5, and accommodates a substrate 7 to be coated on which a coating film is formed by spraying droplets in the lower portion of the chamber 33, and is formed at the center of the top surface of the chamber 33. The liquid in the coating film formed on the substrate to be coated 7 is dried by evacuating the gas in the chamber 33 from the exhaust port 34 by the vacuum pump 35. Inside the chamber 33 of the drying unit 4, a first dispersion plate 36 and a second dispersion plate 37 are installed in two upper and lower stages. A number of first vent holes 38 are formed in the upper first dispersion plate 36 so as to be distributed over the entire surface, and the lower second dispersion plate 37 is distributed over the entire surface thereof. In addition, a number of second ventilation holes 39 are formed in an arrangement pattern in which the hole positions are shifted with respect to the arrangement pattern of the first ventilation holes 38 formed in the first dispersion plate 36.

  The substrate 7 to be coated is supported by support pins 40 provided at the bottom of the chamber 33. The support pin 40 is provided at the bottom of the chamber 33 so as to be able to appear and retract, and supports the substrate 7 to be coated at the protruding position. The inside of the chamber 33 is partitioned into a lower space 41, an upper space 42, and a middle space 43 by a first dispersion plate 36 and a second dispersion plate 37 installed so as to cross the upper and lower stages. The substrate 7 is accommodated in the lower space 41, and a vacuum pump 35 is communicated with the upper space 42.

  The application body storage unit 5 includes a gantry 44 and a storage shelf 45 that is detachably mounted on the gantry 44, and an organic EL display panel (not shown) that is an application body that has been dried in the drying unit 4 is conveyed. It is transported by the unit 6 and stored in the storage shelf 45.

  The transport unit 6 includes an elevating shaft 46 that can move in the vertical direction, links 47 and 48 that are connected to the upper end of the elevating shaft 46 and can be rotated in a horizontal plane (XY plane), and the distal end portion of the link 48. And an arm 49 attached to. By moving the lifting shaft 46 up and down and rotating the links 47 and 48, the transport unit 6 takes out the substrate 7 from the storage shelf 8 a of the substrate storage unit 2 and places it on the substrate holding table 23 of the droplet application unit 3. After the substrate 7 that has been placed on the substrate holding table 23 and applied with the ink droplets held on the substrate holding table 23 is lowered from the substrate holding table 23 and accommodated in the chamber 33, and the drying process is performed. The organic EL display panel (applied body) is taken out from the chamber 33 and stored in the storage shelf 45.

  In the droplet spray coating apparatus 1 having such a configuration, the substrate 7 accommodated in the accommodation shelf 8a of the substrate accommodation unit 2 is taken out by the transport unit 6, and the taken-out substrate 7 is, as shown in FIG. The substrate 7 is placed on a substrate holding table 23 located at a position where the substrate 7 can be loaded and unloaded.

  The substrate holding table 23 holding the placed substrate 7 is moved to a position where ink droplet ejection coating is performed as shown in FIG. 1, and the substrate 7 is moved by the ink droplets ejected from the nozzles 29 of the ink droplet ejection coating head 24. Is applied.

  When the application of ink droplets to the substrate 7 is completed and the substrate 7 is to be applied, the substrate holding table 23 moves again to the position shown in FIG. After the substrate holding table 23 has moved to the position shown in FIG. 2, the coated substrate 7 held on the substrate holding table 23 is lowered from the substrate holding table 23 by the transport unit 6, and the chamber 33 of the drying unit 4. Conveyed in. The substrate 7 to which the ink droplets transported into the chamber 33 are applied is dried under reduced pressure in the chamber 33, and an organic EL display panel as an application body is manufactured.

  The organic EL display panel manufactured by drying under reduced pressure in the chamber 33 is taken out from the chamber 33 by the transport unit 6 and stored in the storage shelf 47 of the application body storage unit 5.

  The substrate 7 accommodated in the accommodation shelf 8a of the substrate accommodation unit 2 is taken out by the transport unit 6 on the substrate holding table 23 after the substrate 7 to which the ink droplet application has been completed is lowered, and the substrate is taken out. 7 is placed on the substrate holding table 23, and application of ink droplets to the substrate 7 and drying in the drying unit 4 are repeated.

  When the substrate 7 to be coated is transported into the chamber 33, the arm 49 that holds the substrate 7 to be coated enters the chamber 33 from the inlet / outlet (not shown) of the chamber 33 together with the substrate 7 to be coated. After the arm 49 enters the chamber 33 together with the substrate 7 to be coated, the support pins 40 rise to lift the substrate 7 to be coated, and the substrate 7 is separated from the arm 49 to support the substrate 7 to be coated. After the substrate to be coated 7 is separated from the arm 49, the arm 49 moves out of the chamber 33, the inlet / outlet of the chamber 33 is closed, the inside of the chamber 33 is airtight, and the substrate 7 in the drying unit 4 The reduced-pressure drying process of the coating film formed in (1) is started.

  In the drying process in the drying unit 4, the vacuum pump 35 is driven. When the vacuum pump 35 is driven, the gas in the upper space 42 is sucked and discharged from the exhaust port 34 to the outside of the chamber 33 as shown in FIG. With this suction, the gas in the lower space 41 containing the solvent evaporated from the liquid in the coating film passes through the second vent holes 39 of the lower second dispersion plate 37 and enters the middle space 43. Next, the gas passes through the first vent hole 38 of the upper first dispersion plate 36 and flows into the upper space 42, and then flows into the upper space 42 and is then sucked by the vacuum pump 35, and is outside the chamber 33. Is discharged. The broken-line arrows shown in FIG. 5 indicate the gas flow direction by driving the vacuum pump 35. The output of the vacuum pump 35 is such that the flow of gas that passes from the lower space 41 through the first dispersion plate 36 and the second dispersion plate 37 installed in two upper and lower stages into the upper space 42 is applied to the substrate 7 to be coated. It is set to a value that is uniform on the surface.

  The arrangement pattern of the second vent holes 39 formed in the lower second dispersion plate 37 and the arrangement pattern of the first vent holes 38 formed in the upper first dispersion plate 36 are their hole positions. Are shifted from each other and do not align in the vertical direction. For this reason, in the gas flow described above, the upper first dispersion plate 36 functions as a baffle plate with respect to the gas that has passed through the second dispersion plate 37 from the lower space 41, and the gas in the middle space 43 Temporarily flows, and then flows through the first ventilation hole 38 of the first dispersion plate 36 and flows into the upper space 42. Thereby, the flow of gas becomes uniform on the surface of the substrate 7 to be coated, the drying speed of the liquid in the coating film on each part of the substrate 7 to be coated is made uniform, and it can be dried uniformly. As a result, the shape and thickness dimension of the colorant film in the organic EL display panel manufactured through the reduced-pressure drying process in the drying unit 4 are made uniform, and the light emission state varies when a voltage is applied to the colorant film. Can be prevented to improve the image display quality.

  (Second Embodiment) A droplet spray coating apparatus and a method for manufacturing a coated body according to a second embodiment of the present invention will be described. A feature of the second embodiment is that the internal structure of a vacuum drying apparatus corresponding to the drying unit 4 in the droplet spray coating apparatus 1 having the configuration shown in FIGS. 1 and 2 is as shown in FIG. .

  The vacuum drying apparatus in the present embodiment is similar to the drying unit 4 in the first embodiment shown in FIG. 5 and has a coating film formed by spraying droplets on the lower part in the chamber 33. The coating substrate 7 is accommodated, and the gas in the chamber 33 is evacuated by a vacuum pump 35 from an exhaust port 34 formed in the center of the top surface of the chamber 33, so that the inside of the chamber 33 is traversed. A first dispersion plate 36 and a second dispersion plate 37 are installed in two upper and lower stages. The upper first dispersion plate 36 has a large number of first vent holes 38 distributed over the entire surface thereof, and the lower second dispersion plate 37 is distributed over the entire surface thereof. In addition, a large number of second ventilation holes 39A are formed in an arrangement pattern in which the hole positions are shifted with respect to the arrangement pattern of the first ventilation holes 38 formed in the first dispersion plate 36. As a feature of the present embodiment, the second ventilation hole 39A formed in the second dispersion plate 37 is a tapered hole in which the lower diameter is wider than the upper diameter.

  In the second embodiment, the second vent holes 39A of the lower second dispersion plate 37 are tapered so that the lower openings of the holes are in the lower space 41 of the chamber 33. Thus, a wide range of gas can be sucked into the middle space 43, so that the gas in the lower space 41 can be uniformly sucked in each part at the edge and at the center. In combination with the function of the dispersion plate 36 as a baffle plate, it is possible to uniformly dry the coating liquid droplets on each surface of the substrate 7 to be coated more effectively than in the case of the first embodiment. As a result, the shape and thickness of the colorant film in the organic EL display panel, which is an applied body manufactured through the reduced-pressure drying process in the drying unit 4, can be made more uniform, and a voltage is applied to the colorant film. In this case, the variation in the light emission state can be prevented, and the image display quality can be further improved.

  In the first and second embodiments, the organic EL display panel is manufactured as an application body by drying the coating film on the substrate 7 to be coated formed by jetting ink droplets under reduced pressure. As an example, the droplet spray coating apparatus and the manufacturing method of the coating body can be applied to the case of manufacturing a liquid crystal display panel as the coating body.

  In addition, the height positions and intervals of the upper and lower first and second dispersion plates and the sizes of the first and second vent holes can be arbitrarily set according to the size of the chamber. It is not limited.

1 is a plan view of a droplet spray coating apparatus including a vacuum drying apparatus according to a first embodiment of the present invention. The top view of the state which moved the board | substrate holding table with which the droplet spray coating apparatus shown in FIG. The perspective view of the droplet application part with which the droplet spray coating apparatus shown in FIG. 1 is provided. FIG. 4 is a cross-sectional view of an ink jet application head provided in the droplet application unit shown in FIG. 3. Sectional drawing of the drying part in the droplet spray coating apparatus shown in FIG. 1 which is the reduced pressure drying apparatus of the 1st Embodiment of this invention. Sectional drawing of the reduced pressure drying apparatus of the 2nd Embodiment of this invention. Sectional drawing of the drying part with which the droplet spray coating apparatus of a prior art example is provided. The graph which shows the solvent density | concentration in the gas in the chamber at the time of the drying process by the drying part of a prior art example.

Explanation of symbols

DESCRIPTION OF SYMBOLS 4 ... Drying part, 7 ... Substrate to be coated, 33 ... Chamber, 34 ... Exhaust port, 35 ... Vacuum pump, 36 ... First dispersion plate, 37 ... Second dispersion plate, 38 ... First ventilation hole, 39 2nd ventilation hole, 41 ... lower side space, 42 ... upper side space, 43 ... middle part space.

Claims (4)

A substrate to be coated on which a coating film is formed by spray coating of droplets is accommodated in the lower portion of the chamber, and the gas to be coated is exhausted under reduced pressure from an exhaust port formed at the center of the top surface of the chamber. A vacuum drying apparatus for drying a liquid in a coating film formed on a substrate,
A first dispersion plate and a second dispersion plate are installed closer to the substrate to be coated than the first dispersion plate so as to cross the inside of the chamber. A number of first ventilation holes are formed so as to be distributed over the entire surface, and the second dispersion plate is distributed over the entire surface, and the arrangement pattern of the first ventilation holes of the first dispersion plate A vacuum drying apparatus characterized in that a large number of second ventilation holes are formed in an arrangement pattern in which the positions of the holes are shifted.   The first vent hole formed in the first dispersion plate is a circular hole, and the second vent hole formed in the second dispersion plate is a tapered hole that spreads from the upper side to the lower side. The reduced-pressure drying apparatus according to claim 1. A coating step of spraying droplets onto a substrate to be coated to form a coating film;
A vacuum drying step in which the substrate to be coated on which the coating film is formed is housed in a vacuum drying apparatus, and the coating film formed on the substrate to be coated is vacuum dried.
In the vacuum drying step, a first dispersion plate and a second dispersion plate are installed closer to the substrate to be coated than the first dispersion plate so as to cross the inside of the chamber, and the first dispersion plate is disposed. A large number of first vent holes are formed in the plate so as to be distributed over the entire surface thereof, and the second dispersion plate is distributed over the entire surface of the first dispersion plate and the first passage of the first dispersion plate. Using a vacuum drying apparatus in which a number of second ventilation holes are formed in an arrangement pattern in which the hole positions are shifted with respect to the arrangement pattern of the pores, the substrate to be coated is accommodated in the lower part of the chamber, and the chamber A method for producing a coated body, wherein the liquid in the coating film formed on the substrate to be coated is dried under reduced pressure by evacuating the gas in the chamber from an exhaust port formed on the top surface of the substrate. A vacuum drying apparatus in which the first ventilation hole formed in the first dispersion plate is a circular hole, and the second ventilation hole formed in the second dispersion plate is a tapered hole extending from the upper side to the lower side. The method for producing a coated body according to claim 3, wherein the method is used.

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