JP2007220897A - Bellows pump and substrate processing apparatus equipped therewith - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a bellows pump and a substrate processing apparatus equipped with this which can determine the breakaway of a check valve by noticing that the flow path resistance varies. <P>SOLUTION: When check valves 21-24 of the pump body 9 fail and break away, the flow path resistance of the liquid sucked in bellows 19, 20 or expelled from the bellows 19, 20 becomes small. Consequently, the operation time on the occasion becomes short when the one pair of the bellows 19, 20 contracts. Since this can be detected by the one pair of a proximity sensor 37, a control unit 39 can determine that the check valves 21-24 failed and broke away. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention is a bellows pump that discharges liquid by expansion and contraction of a pair of bellows, and a substrate such as a semiconductor wafer or a glass substrate for a liquid crystal display device (hereinafter simply referred to as a substrate) equipped with the bellows pump by using a processing liquid. The present invention relates to a substrate processing apparatus that performs processing such as etching and coating.

Conventionally, this type of bellows pump has a pair of bellows that are connected via a pair of check valves that allow liquids to flow in opposite directions and are alternately expanded and contracted. The pump body that alternately discharges the liquid sucked into the bellows through the suction port from the discharge port, the pressure sensor that detects the pressure in the supply pipe of the compressed gas that drives the pair of bellows, and the pressure in the supply pipe is abnormal There is an abnormality determination unit that outputs an alarm output when it is determined that it is (see, for example, Patent Document 1). With such a configuration, an abnormality can be determined by detecting a pressure fluctuation that occurs when the bellows is broken.
JP-A-10-323607 (paragraph numbers “0010”, “0011”, FIG. 1)

However, the conventional example having such a configuration has the following problems.
That is, when a liquid heated to a high temperature is discharged, the check valve may be damaged and detached from the pump body, but there is a problem that this cannot be detected by a conventional apparatus. This is because even if the check valve is detached, the pressure in the supply pipe does not change unless an abnormality occurs in the bellows, so that it cannot be detected by the pressure sensor.

  In particular, when a treatment liquid containing chemicals is heated and pumped, a check valve made of a fluororesin or the like is attached by resin welding in order to improve chemical resistance. Therefore, the resin welding may be melted by heat, and the problem that the check valve is detached from the pump body is likely to occur.

  The present invention has been made in view of such circumstances, and has a bellows pump that can determine whether the check valve is detached from the pump main body, focusing on the fact that the flow path resistance fluctuates, and the bellows pump. An object of the present invention is to provide a substrate processing apparatus.

In order to achieve such an object, the present invention has the following configuration.
That is, the invention according to claim 1 is a bellows pump that supplies liquid, and is connected to a pair of check valves that allow liquid to flow in opposite directions, and a pair of bellows that are alternately expanded and contracted. A pair of bellows for alternately expanding and contracting the pair of bellows, and for alternately discharging the liquid sucked into the bellows through the suction port from the discharge port, and detecting the expansion and contraction of the pair of bellows And a judging means for judging an abnormality of the pair of check valves based on a difference in operating time between the pair of detecting means.

  [Operation / Effect] According to the invention described in claim 1, when the check valve of the pump body is broken and separated, the flow path resistance of the liquid sucked into or discharged from the bellows is reduced. Therefore, the operation time when the pair of bellows expands or contracts varies (shortens). Since this can be detected by the pair of detection means, the determination means can determine that the check valve is broken and detached.

  In the present invention, the pair of detection means are preferably proximity sensors. Since the time when the bellows is extended or contracted can be detected in a non-contact manner, a failure caused by the contact can be avoided.

  In the present invention, it is preferable that the determination means includes an output terminal that outputs an abnormality occurrence signal indicating that an abnormality is determined. By connecting a device for detecting an abnormality occurrence signal to the output terminal, it is possible to determine that an abnormality has occurred in the check valve of the bellows pump and perform some linkage operation.

  According to a fourth aspect of the present invention, there is provided a substrate processing apparatus for supplying a processing liquid to a processing unit via a supply pipe and performing processing on the substrate with the processing liquid with respect to the substrate accommodated in the processing unit. It is connected via a pair of check valves that allow the flow of the processing liquid in the reverse direction, and has a pair of bellows that are alternately extended and retracted. A pair of check valves based on a difference in operating time between the pair of detection means and a pair of detection means for detecting expansion and contraction of the pair of bellows. A determination means for determining an abnormality in the supply pipe is provided in the supply pipe, and when the determination means determines that the pair of check valves is abnormal And it is characterized in that it comprises a control means for stopping the process.

  [Operation / Effect] According to the invention described in claim 4, when the check valve of the pump main body is broken or the like, the flow path resistance of the processing liquid sucked into or discharged from the bellows is reduced. Therefore, the operation time when the pair of bellows expands or contracts varies (shortens). Since this can be detected by the pair of detection means, the determination means can determine that the check valve of the bellows pump is broken and detached. Then, the control means stops the supply of the processing liquid to the processing section via the supply pipe by stopping the operation of the bellows pump upon receiving the determination that the determination means is abnormal. Stop processing. Thereby, it is possible to prevent an inappropriate process from being continuously performed on the substrate.

  In the present invention, the pair of detection means are preferably proximity sensors (Claim 5), and when the determination means determines an abnormality, an output terminal that outputs an abnormality occurrence signal indicating the abnormality (Claim 6). In addition, it is preferable that the information processing apparatus further includes an informing means for informing the occurrence of an abnormality when the abnormality occurrence signal is output when connected to the output terminal. By operating the notifying means, the operator of the substrate processing apparatus can immediately know that an abnormality has occurred in the bellows pump and the processing has been stopped.

  According to the bellows pump of the present invention, when the chuck valve of the pump body is broken and separated from the pump body, the flow path resistance of the liquid sucked into or discharged from the bellows is reduced, so that the pair of bellows is extended or The operating time when contracting varies. Since this can be detected by the pair of detection means, the determination means can determine that the check valve is broken and detached from the pump body.

  Hereinafter, examples of the present invention will be described. In Example 1, an example of a “bellows pump” will be described, and in Example 2, a “substrate processing apparatus” including the bellows pump in Example 1 will be described.

Embodiment 1 of the present invention will be described below with reference to the drawings.
FIG. 1 is an overall view illustrating a schematic configuration of a bellows pump according to a first embodiment.

  The bellows pump 1 includes a pump body 9 including a container 3, an end base member 5 that closes both ends of the container 3, and a center block 7 that bisects the internal space of the container 3. The center block 7 is formed with a suction channel 11 and a discharge channel 12 that are not in communication with each other. A suction port 13 is disposed in the suction channel 11, and a discharge port 15 is disposed in the discharge channel 12. The suction port 13 is connected to a liquid supply source 17 and the discharge port 15 is connected to a liquid supply destination.

  A pair of bellows 19 and 20 are attached to the center block 7. The bellows 19 is connected to the suction flow path 11 and the discharge flow path 12 through a pair of check valves (a suction side check valve 21 and a discharge side check valve 22). The suction-side check valve 21 permits the flow of liquid from the suction flow path 11 to the bellows 19, while restricting the flow of liquid from the bellows 19 to the suction flow path 11. The discharge-side check valve 22 permits the flow of liquid from the bellows 19 to the discharge flow path 12, while restricting the flow of liquid from the discharge flow path 12 to the bellows 19. The bellows 20 is connected to the suction flow path 11 and the discharge flow path 12 through a pair of check valves (a suction side check valve 23 and a discharge side check valve 24). The suction side check valve 23 allows the liquid to flow from the suction flow path 11 to the bellows 20, while restricting the liquid flow in the opposite direction. The discharge-side check valve 24 allows the liquid to flow from the bellows 20 to the discharge flow path 12 while restricting the flow of the liquid in the opposite direction. The pair of bellows 19, 20 are connected at one end opposite to the center block 7 by a single connecting rod 27 inserted through a through hole 25 formed in the center block 7.

  The center block 7, the suction side check valve 21, the discharge side check valve 22, the suction side check valve 23, and the discharge side check valve 24 are made of, for example, a fluororesin having excellent chemical resistance. The side check valve 22, the suction side check valve 23, and the discharge side check valve 24 are bonded to the center block 7 by resin welding.

  The end base member 5 is formed with an inlet / outlet port 29 respectively. One end of an intake / exhaust pipe 31 is connected to each intake / exhaust port 29, and the other end is connected to a port of a 5-port electromagnetic valve 33. Compressed air is supplied to the supply port of the electromagnetic valve 33, and the compressed air is supplied only to one of the intake / exhaust pipes 31 in accordance with a given switching signal. Each intake / exhaust pipe 31 is provided with an air release valve 35. The air release valve 35 performs an operation of opening the inside of the intake / exhaust pipe 31 to the atmospheric pressure in accordance with a given open signal.

  A proximity sensor 37 is embedded in each end base member 5. These proximity sensors 37 detect the end portion when each of the pair of bellows 19 and 20 is extended without contact. Each proximity sensor 37 outputs a detection signal only when the ends of the bellows 19 and 20 are detected. These proximity sensors 37 correspond to a pair of detection means in the present invention.

  The electromagnetic valve 33, the two atmospheric release valves 35, and the two proximity sensors 37 described above are controlled by a control unit 39 corresponding to a determination unit in the present invention. The control unit 39 gives a switching signal to the electromagnetic valve 33 at a predetermined timing, and alternately sends compressed air to the intake and exhaust pipes 31. In addition, an open signal is given to the atmosphere release valve 35 at the timing opposite to the alternating compressed air feeding, and both intake and exhaust pipes 31 are alternately opened to the atmosphere. Thereby, the pressure in both spaces of the container 3 partitioned by the center block 7 is adjusted, and the bellows 19 (A side) and the bellows 20 (B side) are alternately expanded and contracted.

  The control unit 39 includes a first timer 41 and a second timer 43 that measure time under the control of the control unit 39. The first timer 41 measures the time from when the A-side proximity sensor 37 is turned on to when the B-side proximity sensor 37 is turned on. That is, the AB operation time is measured from the state in which the bellows 19 is extended and the bellows 20 is contracted to the opposite state. The second timer 43 measures the time from when the B-side proximity sensor 37 is turned on to when the A-side proximity sensor 37 is turned on. That is, the BA operation time is measured from the state in which the bellows 20 is extended and the bellows 19 is contracted to the opposite state.

  The control unit 39 compares the AB operation time and the BA operation time, and determines that the operation time difference is abnormal when the difference exceeds a certain time. Then, an abnormality occurrence signal is output to the output terminal 45. The output terminal 45 is connected to notifying means such as a buzzer or a lamp.

  Here, experiments conducted by the inventors will be described with reference to Tables 1 and 2. In this experiment, in order to simulate a breakage state, one proximity sensor 37 is turned on while the suction side check valve 21 or the discharge side check valve 22 is intentionally removed and the bellows pump 1 is driven as usual. Until the other proximity sensor 37 was turned on.

"AB operation time"
When the bellows 19 contracts from the extended state and the bellows 20 extends from the contracted state, the liquid in the bellows 19 flows out to the discharge flow path 12 only through the discharge-side check valve 22 in a normal state. To do. However, in the state where the suction side check valve 21 is removed, the liquid also flows out to the suction channel 11 when the bellows 19 contracts. At this time, since the flow path resistance is remarkably smaller than that at the normal time, the AB operation time is extremely shorter than that at the normal time (680 msec → 350 msec). However, in the state where the discharge side check valve 22 is removed, the operation time does not change much (680 msec → 650 msec) because the flow path resistance is not greatly different.

"BA operation time"
When the bellows 20 contracts from the extended state and the bellows 19 extends from the contracted state, the bellows 19 flows into the bellows 19 through the suction-side check valve 21 in a normal state. In the state where the suction side check valve 21 is removed, liquid flows directly from the suction flow path 11 into the bellows 19 when the bellows 19 extends, but the flow resistance is not much different from the normal time, so the operation time is not so long. There is no change (650 msec → 640 msec). On the other hand, in a state where the discharge side check valve 22 is removed, when the bellows 19 is extended, not only the liquid flows into the bellows 19 from the suction side check valve 21, but also the liquid stored in the discharge flow path 12 is retained. On the contrary, it is sucked into the bellows 19. Accordingly, since the flow path resistance is significantly smaller than that in the normal state, the BA operation time is extremely shorter than that in the normal state (650 msec → 330 msec).

  It has been found that the change in the operation time as described above has the same tendency even when the load connected to the discharge port 15 is changed from φ6 to φ10. In this way, the check valve detachment is detected by paying attention to the difference in operation time that occurs when the check valve is removed.

  Next, the operation will be described with reference to FIG. FIG. 2 is a flowchart showing an operation of detecting an abnormality in the bellows pump.

Step S1
The controller 39 drives the electromagnetic valve 33 and the air release valve 35 to operate the bellows pump 1 and starts to repeatedly expand and contract the pair of bellows 19 and 20 alternately. For example, when compressed air is sent to the B side, the bellows 20 contracts and the bellows 19 extends. Then, the bellows 19 is detected by the proximity sensor 37.

Steps S2 to S4
The control unit 39 activates the first timer 41 to start timing. Thereafter, the bellows 19 contracts and the bellows 20 expands and is detected by the proximity sensor 37. Then, the control unit 39 stops the timing of the first timer 41 (AB operation time), and activates the second timer 43 to start the timing.

Steps S5 and S6
When the proximity sensor 37 is turned on next time, the control unit 39 stops the timing of the second timer 43 (BA operation time).

Steps S7 and S8
Based on the difference between the AB operation time and the BA operation time, the control unit 39 determines whether an abnormality has occurred. That is, as is clear from the experimental results described above, when the difference between the AB operation time and the BA operation time is greater than a predetermined value (for example, 100 msec), it is determined to be abnormal. Then, the control unit 39 outputs an abnormality occurrence signal to the output terminal 45. If the difference is small, it is determined as normal, and the process returns to step S1 to repeatedly execute a series of processes.

  As described above, when the check valves 21 to 24 of the pump body 9 are damaged and separated, the flow path resistance of the liquid sucked into or discharged from the bellows 19 and 20 is reduced. Therefore, the operation time when the pair of bellows 19 and 20 contracts is shortened. Since this can be detected by the pair of proximity sensors 37, the control unit 39 can determine that the check valves 21 to 24 are broken and detached.

  In addition, an output terminal 45 for outputting an abnormality occurrence signal is provided, and an abnormality has occurred in the check valves 21 to 24 of the bellows pump 1 by connecting a device for detecting the abnormality occurrence signal to the output terminal. Judgment can be made to perform some linkage operation.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) The proximity sensor 37 may be provided on the center block 7 side to detect the bellows 19 and 20 when contracted.

  (2) The proximity sensor 37 may be embedded in the upper part of the container 3 to detect the bellows 19 and 20 from the side.

  (3) Since the proximity sensor 37 can detect the time when the bellows 19 and 20 contract without contact, a failure due to contact with the bellows 19 and 20 can be avoided. A limit switch or the like may be employed.

  Next, a substrate processing apparatus including the bellows pump 1 according to the first embodiment will be described as a second embodiment of the present invention with reference to the drawings. FIG. 3 is an overall view illustrating a schematic configuration of the substrate processing apparatus according to the second embodiment.

  The substrate processing apparatus includes a processing tank 51 as a processing unit, and the processing tank 51 includes an inner tank 53 and an outer tank 55 that recovers the processing liquid overflowing from the inner tank 53. The inner tank 53 is provided with a holding arm 57 capable of moving the substrate W up and down over a processing position in the inner tank 51 and a standby position above the inner tank 51. The holding arm 57 includes an arm 59 in a vertical posture and a support member 61 that is provided below the arm 59 and supports the substrate W in a standing posture.

  The inner tank 53 includes an ejection pipe 63 for supplying a processing liquid to the bottom. Further, the outer tank 55 is provided with a discharge port 65 for discharging the collected processing liquid. The ejection pipe 63 and the discharge port 65 are connected in communication by a supply pipe 67. In the supply pipe 67, the bellows pump 1, the in-line heater 73, and the filter 75 are disposed in this order from the discharge port 65 side. The in-line heater 73 has a function of heating the processing liquid that circulates, and the filter 75 has a function of removing particles and the like in the processing liquid.

  A processing liquid supply source 77 is connected in communication between the discharge port 65 and the bellows pump 1. An example of the treatment liquid is phosphoric acid. The processing liquid supplied from here to the supply pipe 67 is heated to a high temperature of, for example, 160 ° C. or 170 ° C. by the in-line heater 73 and then supplied to the inner tank 53. A branch pipe 79 is connected to one part of the supply pipe 67 between the processing liquid supply source 77 and the discharge port 65. An open / close valve 81 is attached to the branch pipe 79. The on-off valve 81 is opened when the processing liquid stored in the supply pipe 67 and the outer tank 55 is discharged.

  A drainage port 83 is formed near the bottom center of the inner tank 53. A drain pipe 85 is connected to the drain port 83 in communication. The discharge pipe 85 includes an on-off valve 87 that is closed when the processing liquid is stored in the inner tank 53 and is opened when the stored processing liquid is discharged.

  The main control unit 89 controls the raising and lowering of the holding arm 57, the temperature control of the in-line heater 73, the opening and closing of the on-off valves 81 and 87, and the like. The control unit 39 controls the bellows pump 1 under the control of the main control unit 89 to control the flow rate of the processing liquid in the supply pipe 67, detect the occurrence of abnormality in the bellows pump 1, and output an abnormality occurrence signal. Or output to the output terminal 45. An alarm 91 is connected to the output terminal 45. For example, the alarm 91 notifies the operator of the apparatus that an abnormality has occurred in the bellows pump 1, and examples thereof include a buzzer and a lamp. Moreover, the main control part 89 stops the process by an apparatus, when the control part 39 detects abnormality.

  Note that the alarm 91 corresponds to the notification means in the present invention, and the main control unit 89 corresponds to the control means in the present invention.

  Next, the operation of the above-described substrate processing apparatus will be described with reference to FIG. FIG. 4 is a flowchart showing the operation of the substrate processing apparatus.

Step S10
The main control unit 89 receives an instruction to start processing from an operator of the apparatus via an instruction unit (not shown). Then, the on-off valves 81 and 87 are closed, and the holding arm 57 holding the substrate W is put on standby at the standby position.

Step S11
The main control unit 89 operates the bellows pump 1 via the control unit 39 and causes the processing liquid to flow from the processing liquid supply source 77 to the supply pipe 67. Then, the in-line heater 73 is controlled and heated to a predetermined processing temperature. The processing liquid supplied to the inner tank 53 is collected by the overflowed outer tank 55 and is returned to the supply pipe 67 and circulated again.

Steps S12 to S15
While starting to operate the bellows pump 1, the abnormality detection process described in the first embodiment is executed, and the process branches depending on the presence or absence of an abnormality occurrence signal.
That is, if there is no abnormality occurrence signal, the processing is continued, and the processing from step S12 to step S14 is repeated until the processing ends. On the other hand, when the check valve that has been welded with the resin is removed and an abnormality occurrence signal is output due to the high heat of the processing liquid or the like, the process proceeds to step S15 and an alarm is issued from the alarm 91. Stop processing. For example, the processing is stopped by supplying pure water instead of the processing liquid, opening the on-off valve 87 to rapidly discharge the processing liquid, raising the holding arm 57 to the standby position, or performing the next step S16. For example, the bellows pump 1 is stopped.

Step S16
The operation of the bellows pump 1 is stopped.

  As described above, when the check valves 21 to 24 of the bellows pump 1 are broken and detached, the flow resistance of the processing liquid sucked into or discharged from the bellows 19 and 20 becomes small. Therefore, the operation time when the pair of bellows 19 and 20 contracts is shortened. Since this can be detected by the proximity sensor 37, the control unit 39 can determine that the check valves 21 to 24 of the bellows pump 1 are broken and detached. The main control unit 89 stops the operation of the bellows pump 1 in response to the fact that the control unit 39 has determined that an abnormality has occurred in the bellows pump 1, thereby entering the treatment tank via the supply pipe 67. The processing is stopped by stopping the supply of the processing liquid. As a result, it is possible to prevent an inappropriate process from being continuously performed on the substrate W.

  The present invention is not limited to the above embodiment, and can be modified as follows.

  (1) The substrate processing apparatus described above includes the supply pipe 67 that circulates the processing liquid, but the present invention can also be applied to a system that does not circulate the processing liquid.

  (2) If the control unit 39 detects the occurrence of an abnormality without providing the alarm 91 that is a notification means, the operation of the apparatus may be stopped in cooperation with the main control unit 89.

1 is an overall view showing a schematic configuration of a bellows pump according to Embodiment 1. FIG. It is a flowchart which shows the operation | movement of abnormality detection in a bellows pump. 6 is an overall view showing a schematic configuration of a substrate processing apparatus according to Embodiment 2. FIG. It is a flowchart which shows operation | movement of a substrate processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Bellows pump 3 ... Container 7 ... Center block 9 ... Pump main body 11 ... Suction flow path 12 ... Discharge flow path 19,20 ... A pair of bellows 21 ... Suction side check valve 22 ... Discharge side check valve 23 ... Suction side check valve 24 ... Discharge side check valve 37 ... Proximity sensor 39 ... Control unit 41 ... First timer 43 ... Second timer 45 ... Output terminal W ... Substrate 51 ... Processing tank 53 ... Inner tank 55 ... Outer tank 57 ... Holding arm 67 ... Supply Piping 73 ... In-line heater 89 ... Main controller 91 ... Alarm

Claims (7)

In the bellows pump that supplies liquid,
It is connected via a pair of check valves that allow the flow of liquids in opposite directions, and includes a pair of bellows that are alternately extended and retracted. A pump body for discharging the liquid sucked into the discharge port;
A pair of detecting means for detecting expansion and contraction of the pair of bellows;
Determination means for determining an abnormality of the pair of check valves based on an operating time difference between the pair of detection means;
A bellows pump characterized by comprising: The bellows pump according to claim 1,
The pair of detection means is a proximity sensor, and a bellows pump. The bellows pump according to claim 1 or 2,
A bellows pump characterized in that the determination means includes an output terminal for outputting an abnormality occurrence signal indicating an abnormality when an abnormality is determined. In a substrate processing apparatus for supplying a processing liquid to a processing unit via a supply pipe and processing a substrate with the processing liquid with respect to the substrate accommodated in the processing unit,
A pair of bellows are connected via a pair of check valves that allow the flow of the processing liquid in opposite directions, and are alternately extended and retracted. The pair of bellows are alternately expanded and contracted, and the bellows A pump body that discharges the processing liquid sucked into the discharge port;
A pair of detecting means for detecting expansion and contraction of the pair of bellows;
Determination means for determining an abnormality of the pair of check valves based on an operating time difference between the pair of detection means;
The supply pipe is provided with a bellows pump provided with
A substrate processing apparatus comprising: control means for stopping processing when the determining means determines that the pair of check valves are abnormal. The substrate processing apparatus according to claim 4,
The substrate processing apparatus, wherein the pair of detection means are proximity sensors. The substrate processing apparatus according to claim 4 or 5,
The determination means comprises an output terminal for outputting an abnormality occurrence signal indicating an abnormality when an abnormality is determined. The substrate processing apparatus according to claim 6,
A substrate processing apparatus, further comprising an informing means for informing the occurrence of an abnormality when an abnormality occurrence signal is output when connected to the output terminal.

Images