JP5974261B2 - Diaphragm pump operation control method - Google Patents

Description

  The present invention relates to a diaphragm pump operation control method capable of detecting the idle operation and stopping the transfer of the processing liquid when the processing liquid is transferred using a diaphragm pump using compressed air as a driving force. About.

  Conventionally, as an operation control method for this type of diaphragm pump, an operation control method for appropriately managing the supply of the processing liquid to improve throughput and yield is known.

  Hereinafter, the operation control method of the diaphragm pump will be described with reference to FIGS.

  As shown in FIG. 7, a resist tank 102 that supplies a resist 103 as a processing solution to a semiconductor wafer W is connected by a resist supply conduit 104. The resist supply pipe 104 is provided with an electric pump 101 having a diaphragm 105. A detection body 107 is disposed in the pump portion 106 of the electric pump 101 or the resist supply pipe 104 and is connected to each detection body 107. A detection signal from the pressure sensor 108 is transmitted to the control means 109.

  Then, as shown in FIG. 8, the control means 109 determines that the discharge pressure of the electric pump 101 is increased or the suction pressure is decreased based on a signal from the pressure sensor 108, and the filter is clogged or the resist in the resist tank 102 is registered. It is possible to detect the liquid breakage 103.

  That is, when supplying the resist 103 from the resist tank 102, the suction pressure and the discharge pressure of the resist 103 are detected by the detection body 107 arranged in the processing liquid circulation portion such as the pump portion 105 or the resist supply pipe 104. The control means 109 is configured to control the operation of the electric pump 101 based on the signal from the pressure sensor 108 (for example, Patent Document 1 below).

Japanese Patent No. 3166056 (FIGS. 3 and 4)

  In such a conventional example, in order to detect clogging of the filter and running out of liquid in the supply tank, it is necessary to dispose detection bodies in the pump portion of the diaphragm pump or in the supply pipes on the suction side and the discharge side. By processing a part of the pump part or supply line, deformation and deterioration are likely to occur in the processed part, and if foreign matter contamination or liquid leakage occurs, it may cause damage to the piping system or production equipment There are challenges.

  In addition, when a highly viscous processing liquid is supplied, there is a problem in that the reaction of the detection body becomes dull and it becomes difficult to detect liquid breakage in the supply tank.

  Therefore, the present invention can detect the pressure fluctuation of the diaphragm pump without disposing a detecting body in the pump part or the supply pipe line to prevent foreign matter contamination and liquid leakage, and also detect the out of liquid in the supply tank. An object of the present invention is to provide an operation control method for a diaphragm pump that can be detected quickly and reliably.

In order to achieve this object, the present invention provides a liquid container having an opening on the top surface, a suction tube inserted through the opening of the liquid container, and a process sucked from the tip of the suction tube. An air-driven diaphragm pump for transferring liquid, a detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump, and a control unit for storing the fluctuation range Px of the air pressure value detected by the detection unit And a control unit for controlling the operation of the diaphragm pump, wherein when the fluctuation range Px is continuously equal to or less than the fluctuation range Ps, it is determined that the operation is idle and the operation of the diaphragm pump is stopped or a warning is displayed. It is a thing.

  Further, a liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, an air-driven diaphragm pump for transferring the processing liquid sucked from the tip of the suction pipe, A detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump, and a control unit for storing a fluctuation cycle and a fluctuation range of the air pressure value detected by the detection unit. The control unit has a fluctuation cycle Fx. When the fluctuation range Px is equal to or less than the reference fluctuation period Fs and the fluctuation width Px is continuously equal to or less than the fluctuation width Ps, the diaphragm pump is stopped or a warning is displayed, and the diaphragm pump is stopped. This is an operation control method.

  Further, the control unit is configured to stop the operation of the diaphragm pump or display a warning when the number of times Mx determined to be idling is at least the specified number of times Ms.

The control unit includes a total number of times Nx reciprocating da diaphragm and stores the cumulative number ShigumaMx when it is determined that the idling, using the correction coefficient alpha a predetermined, arithmetic total number Ny Nx + ΣMx × α When the calculated cumulative number Ny is equal to or greater than the reference cumulative number Ns, it is determined that the diaphragm has reached the end of its life, and a warning message for stopping the diaphragm pump or replacing the diaphragm is displayed.

  By these means, the initial purpose is achieved.

As described above, the present invention includes a detection unit provided in the air discharge pipe on the exhaust side of the diaphragm pump, and a control unit that stores the fluctuation range Px of the air pressure value detected by the detection unit. When the fluctuation range Px is continuously equal to or less than the reference fluctuation range Ps, the operation of the diaphragm pump is stopped or a warning is displayed by determining that it is idling, so that the normal operation of the pneumatic drive diaphragm pump is performed. By identifying the difference between the air pressure waveform at the time and the air pressure waveform when the liquid container is emptied as a continuous appearance of a waveform with a reduced fluctuation range, the air pressure waveform is emptied more quickly and reliably than the liquid pressure change. Since the operation can be detected, similarly to the above, it is possible to obtain an effect that a liquid container having an opening on the top surface can be conveniently used without any foreign matter contamination or liquid leakage.

  In addition, a detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump, and a control unit that stores a variation period Fs and a variation range Px of the air pressure value detected by the detection unit. When the cycle Fx is less than or equal to the reference variation cycle Fs, and when the variation width Px is continuously less than or equal to the reference variation width Ps, it is determined that the operation is idle and the diaphragm pump is stopped or a warning is displayed Therefore, the difference between the air pressure waveform during normal operation of the pneumatically driven diaphragm pump and the air pressure waveform when the liquid container is emptied, the change of the fluctuation period and the continuous appearance of the waveform with reduced fluctuation width As a result, it is possible to detect the idling more reliably than the change in the pressure of the liquid and the comparison with only one change in the air pressure waveform. Door can be.

Overall configuration diagram of diaphragm pump operation control method according to first to third embodiments of the present invention Schematic sectional view of diaphragm pump showing suction of processing liquid accompanying air introduction (1) Same as above, time chart during normal operation of diaphragm pump, (2) Same as above, time chart during idle operation of diaphragm pump (1) Flow chart of fluctuation period detection in the operation control method of the diaphragm pump according to the first embodiment of the present invention, (2) Flow chart of fluctuation width detection The flowchart of the operation control method of the diaphragm pump of Embodiment 2 of this invention The flowchart of the operation control method of the diaphragm pump of Embodiment 3 of this invention Enlarged view of the main part near the pump part of the conventional diaphragm pump operation control method Same as above, time chart showing changes in detected pressure of diaphragm pump

The operation control method of the diaphragm pump of the reference example includes a liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, and a processing liquid sucked from the tip of the suction pipe. An air-driven diaphragm pump to be transferred, a detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump, and a control unit for storing a fluctuation period Fx of the air pressure value detected by the detection unit. When the fluctuation period Fx is less than or equal to the reference fluctuation period Fs, the control unit has a configuration in which it is determined that the operation is idle and the operation of the diaphragm pump is stopped or a warning is displayed. As a result, the difference between the air pressure waveform during normal operation of the pneumatically driven diaphragm pump and the air pressure waveform when the liquid container is emptied is identified as the difference in the period, compared to the change in the pressure of the liquid. Detects the air pressure fluctuation cycle immediately and can detect the idle operation quickly and surely, and does not install a pressure detection detector in the liquid suction pipe. In the case of a liquid container having an opening on the top surface such as a drum can, there is an effect that the processing liquid staying on the bottom surface of the liquid container can be sucked and used conveniently.

The operation control method for a diaphragm pump according to claim 1 of the present invention includes a liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, and a tip of the suction pipe. An air-driven diaphragm pump that transfers the sucked processing liquid, a detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump, and a control unit that stores a fluctuation range Px of the air pressure value detected by the detection unit This control unit has a configuration in which when the fluctuation range Px is continuously equal to or less than the reference fluctuation range Ps, it is determined that the operation is idle and the operation of the diaphragm pump is stopped or a warning is displayed. Thereby, by identifying the difference between the air pressure waveform during normal operation of the pneumatic drive diaphragm pump and the air pressure waveform when the liquid container is emptied as a continuous appearance of a waveform with a reduced fluctuation range, Since the idle operation can be detected quickly and reliably as compared with the change in the pressure of the liquid, similarly to the above, there is an effect that the liquid container having an opening on the top surface can be conveniently used without foreign matter mixing or liquid leakage.

  Further, a liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, an air-driven diaphragm pump for transferring the processing liquid sucked from the tip of the suction pipe, The detection unit provided in the air discharge pipe on the exhaust side of the diaphragm pump, and the control unit for storing the fluctuation cycle Fs and the fluctuation range Px of the air pressure value detected by the detection unit. When Fx is equal to or less than the reference variation period Fs and when the variation width Px is continuously equal to or less than the reference variation width Ps, it is determined that the operation is idle and the diaphragm pump is stopped or a warning is displayed. As a result, the difference between the air pressure waveform during normal operation of the pneumatically driven diaphragm pump and the air pressure waveform when the liquid container is emptied, the change of the fluctuation period and the continuous appearance of the waveform with reduced fluctuation width As a result, it is possible to detect the idling more reliably as compared with the change in the pressure of the liquid and the comparison with only one change in the air pressure waveform.

  Further, the control unit has a configuration in which operation of the diaphragm pump is stopped or a warning is displayed when the number of times Mx determined to be idling is at least the specified number of times Ms. As a result, even if the air pressure waveform is distorted due to the start of operation of the diaphragm pump or due to another cause, if the phenomenon is a temporary phenomenon, the controller can continue to operate stably without determining that it is idling. There is an effect that highly efficient operation control can be performed.

The control unit includes a total number of times Nx reciprocating da diaphragm and stores the idling accumulated times ShigumaMx, using the correction coefficient α a predetermined calculates the arithmetic total number Ny as Ny = Nx + αΣMx, this When the calculation cumulative number Ny is equal to or greater than the reference cumulative number Ns, it is determined that the life of the diaphragm is reached, and a warning display for stopping the diaphragm pump or replacing the diaphragm is displayed. As a result, when the same diaphragm pump is continuously used, not only the cumulative number N1 of reciprocating diaphragms but also the cumulative number N2 of idle operation is stored and corrected, thereby calculating the calculated cumulative number Nx. Since it is calculated as the total number of times taking into account idling, there is an effect that the replacement time of the diaphragm can be accurately grasped.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, a main body 1 of a pneumatically driven diaphragm pump suctions a processing liquid 3 stored in a liquid container 2 such as a drum can and transfers it to a fixed tank (not shown). The compressed air 11 is supplied to the main body 1 to reciprocate diaphragms 12a and 12b, which will be described later, to exhibit a pump function. A suction pipe 4 and a supply pipe 5 for transferring the treatment liquid 3 are connected to the main body 1, and an air introduction pipe 6 for introducing the compressed air 11 and an air discharge pipe 7 for discharging the introduced compressed air 11 are connected. Has been. The suction tube 4 is inserted into the liquid container 2 through the opening 2 b provided on the top surface 2 a of the liquid container 2, and the distal end portion 4 a of the suction tube 4 is disposed close to the bottom surface 2 c of the liquid container 2. Yes.

  The other end of the air introduction pipe 6 connected to the main body 1 is connected to a manufacturing apparatus (not shown) for compressed air 11, and the open / close valve for introducing or stopping the compressed air 11 in the air introduction pipe 6. 6a and a regulator 6b for adjusting to an appropriate air pressure are inserted. Further, a silencer 7a for silencing is attached to the other end of the air discharge pipe 7 connected to the exhaust side of the main body 1. Further, a pneumatic pressure sensor 8 is inserted into the air discharge pipe 7 as a pneumatic pressure detection unit of the compressed air 11 to be exhausted, and a control unit that receives the detection signal of the pneumatic sensor 8 and commands to open / close the open / close valve 6a. 9 is provided. The control unit 9 is also connected to an alarm device 10, and when the processing liquid 3 in the liquid container 2 is detected to be empty, the alarm device 10 is driven to notify the user.

  In FIG. 2, a pair of bending-resistant diaphragms 12a and 12b are fixed to the partition wall in the diaphragm pump 1, and the central part is attached so as to be able to reciprocate left and right. , 12b are connected by a metal shaft 13 that can move left and right, and an air switching valve 16b, which will be described later, is switched in conjunction with the left and right movement. Liquid chambers 15a and 15b are provided outside the diaphragms 12a and 12b, and air chambers 14a and 14b are provided inside. That is, the diaphragm 12a is interposed between the liquid chamber 15a and the air chamber 14a, and the diaphragm 12b is interposed between the liquid chamber 15b and the air chamber 14b. The air chambers 14a and 14b are connected to an air switching valve 16b built in the central structure 16, and the air switching valve 16b is connected to an air inlet 16a and an air outlet 16c provided on the outer periphery of the central structure 16, respectively. Furthermore, the air inlet 16a is connected to the air inlet pipe 6 shown in FIG. 2, and the air outlet 16c is connected to the air outlet pipe 7.

  The liquid chambers 15a and 15b are connected to one discharge port 18a through check valves 19a and 19b and a discharge pipe portion 18 at the upper part, and the liquid chambers 15a and 15b are connected to check valves 20a and 20b at the lower part. And the suction pipe portion 17 is connected to one suction port 17a. The check valves 19a and 19b open when the internal pressure of the liquid chambers 15a and 15b becomes positive, and close when the negative pressure becomes negative, and the check valves 20a and 20b become positive when the internal pressure of the liquid chambers 15a and 15b increases. The liquid is closed when it is negative, and is opened when it becomes negative, so that the processing liquid 3 can be sucked into the liquid chambers 15a and 15b from the suction port 17a and discharged from the discharge port 18a. The suction port 17 a provided in the main body 1 is connected to the suction tube 4, and the discharge port 18 a is connected to the supply tube 5.

  For example, when the compressed air 11 is introduced into the air chamber 14a from the air inlet 16a via the air switching valve 16b and is filled, the diaphragm 12a is curved toward the liquid chamber 15a, and the processing liquid 3 in the liquid chamber 15a is discharged. It serves to discharge from the outlet 18a. At this time, since the diaphragm 12a is connected to the diaphragm 12b and the shaft 13, the diaphragm 12b is curved toward the air chamber 14b, and the compressed air 11 in the air chamber 14b is transferred from the air discharge port 16c to the air discharge pipe 7. And the function of sucking the processing liquid 3 into the liquid chamber 15b. Next, the air switching valve 16b is switched, compressed air is introduced into the air chamber 14b, and the processing liquid 3 in the liquid chamber 15b is discharged from the discharge port 18a. At the same time, the compressed air in the air chamber 14a is discharged, and the processing liquid 3 is sucked into the liquid chamber 15b. Thus, by supplying the compressed air 11 from the air inlet 16a, the diaphragms 12a and 12b are alternately sucked and discharged repeatedly, and the compressed air 11 is alternately supplied from the air chamber 14a and the air chamber 14b in accordance with this cycle. Discharged. The discharged air pressure is detected by an air pressure sensor 8 provided in the air discharge pipe 7.

  As shown in FIG. 3 (1), when the diaphragm pump body 1 is operating normally, the pressure detection value of the air pressure sensor 8 provided in the air discharge pipe 7 has a waveform that rises and falls regularly. The fluctuation period Fx of the waveform shows a value larger than a predetermined reference period Fs, and the fluctuation width Px of the waveform shows a value larger than the predetermined reference width Ps. However, as shown in FIG. 3 (2), when the amount of the processing liquid 3 in the liquid container 2 is reduced, the distal end 4a of the suction pipe 4 is separated from the liquid surface, so that the main body 1 of the diaphragm pump is idled. At this time, the fluctuation period Fx of the waveform shows a value smaller than a predetermined reference period Fs, or the fluctuation width Px of the waveform continuously takes a value smaller than the predetermined reference width Ps. It is shown. In addition, both the fluctuation period Fx and the fluctuation width Px often deviate from the reference value. Here, the reference period Fs and the reference width Ps can be freely set in accordance with the equipment and usage conditions.

  In the above configuration, the configuration shown in FIG. 1 and the flowchart shown in FIG. 4A will be described. And supply of the treatment liquid 3 is started via the supply pipe 5 (S101). Then, the air pressure in the air discharge pipe 7 is detected over time by the air pressure sensor 8 and the fluctuation period Fx of the waveform is compared with the reference period Fs (S102). If the fluctuation period Fx is smaller than the reference period Fs, Then, the warning display of the idling operation is performed (S103), and the operation is stopped after a while (S104).

  In this way, idle operation can be detected quickly and reliably by detecting the fluctuation cycle of air pressure in the air exhaust pipe that reacts more quickly than the change in pressure of the liquid shown in the conventional example and comparing it with the reference cycle. Is something that can be done.

  Next, a method for detecting idling from the waveform fluctuation range Px will be described with reference to the flowcharts shown in FIGS. 1 and 4B.

  First, when operating the main body 1 of the diaphragm pump, the determination number nx recorded by the control unit 9 is automatically cleared (S111), and when the processing liquid 3 starts to be transferred by the operation of the main body 1 of the diaphragm pump (S112), The air pressure in the air discharge pipe 7 is detected over time by the air pressure sensor 8, and the fluctuation width Px of the waveform is compared with the reference fluctuation width Ps. If Px <Ps, the process proceeds to the next, otherwise the process returns to S111 ( S113). Next, 1 is added to the number of determinations nx and recorded (S114). When the number of determinations nx exceeds the specified number nk (S115), an empty operation warning is displayed (S116), and the operation is stopped after a while. (S117). The specified number of times nk is set to a numerical value of 1 or more in accordance with usage conditions such as pump characteristics and treatment liquid viscosity.

  Thus, by detecting the fluctuation range of the air pressure of the air exhaust pipe and comparing it with the reference fluctuation range, it is possible to detect the idling quickly and reliably.

  If a flow that jumps to step S111 of FIG. 4 (2) as step S102 after step S102 of FIG. 4 (1) is adopted, two types of detected values of waveform fluctuation period Fx and fluctuation width Px are obtained. Therefore, it is possible to detect the idling with high accuracy.

(Embodiment 2)
In the present embodiment, the same components as those in FIG. 1 are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 5, when the diaphragm pump main body 1 is first operated, the number of times Mx that can be determined as the idle operation recorded by the control unit 9 is automatically cleared (S201). As shown in the first embodiment, the air pressure in the air discharge pipe 7 is detected by the air pressure sensor 8 and the control unit 9 determines the idle operation of the main body 1 (S203). . The control unit 9 further accumulates and records the number of times that the detected value deviates from the reference value, that is, the number of times Mx that can be determined to be idling (S203). When the number of times Mx that can be determined as idling exceeds the specified number of times Ms (S205), an idling alarm is displayed (S206), and the operation is stopped after a while (S207). The specified number of times Ms is set to a numerical value of 1 or more in accordance with usage conditions such as pump characteristics and the viscosity of the processing liquid.

  As a result, even when the air pressure waveform is distorted at the start of the operation of the main body 1 of the diaphragm pump or due to another cause, the control unit 9 can be regarded as a temporary phenomenon different from the idling operation, so that the operation can be continued. Unnecessary interruptions can be prevented and highly reliable operation control can be performed.

(Embodiment 3)
In the present embodiment, the same components as those in the second embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  As shown in FIG. 6, when the diaphragm pump body 1 is first operated, the cumulative number Nx of diaphragms reciprocated recorded by the record holding unit (not shown) of the control unit 9 is determined to be idling. The total number of idling operations ΣMx is read into the calculation recording unit (not shown) (S301). Next, when the operation is started (S302), since the diaphragm reciprocates, the count of the cumulative number Nx is increased (S303). Further, when the air pressure sensor 8 monitors the air pressure in the air discharge pipe 7 and the control unit 9 determines that the idling operation is performed (S304), the idling operation count Mx is added to the previously read idling cumulative operation count ΣMx. Then, the latest cumulative number of idling operations ΣMx is calculated (S305), and the calculation cumulative number Ny is calculated as Ny = Nx + αΣMx. Here, α is a diaphragm correction coefficient when the main body 1 is idling (S306). When the calculated cumulative number Ny is equal to or greater than the reference cumulative number Ns (S307), a diaphragm replacement warning is displayed (S308), and the operation is immediately stopped (S309).

  Thus, when the same diaphragm pump is continuously used, not only the cumulative number of times Nx of the diaphragms 12a and 12b reciprocates but also the cumulative number of idle operations ΣMx is stored and corrected, thereby calculating the calculated cumulative number Ny. Since it is calculated as the total number of times considering idle operation, it is possible to accurately grasp the replacement time of the diaphragms 12a and 12b.

  When the diaphragms 12a and 12b are replaced, the diaphragm replacement time can be detected repeatedly by returning the accumulated value of the calculation cumulative number Ny and the idle operation cumulative number ΣMx recorded in the control unit 9 to zero. .

  The pressure on the exhaust side of the diaphragm pump that uses compressed air as a drive source can be detected to quickly and safely stop the operation during idle operation, so it is expensive as well as chemicals and high-purity liquids that dislike mixing gases. It can also be applied to the transportation of cosmetics, pharmaceuticals, and chemical raw materials.

1 Body (diaphragm pump)
DESCRIPTION OF SYMBOLS 2 Liquid container 2a Top surface 2b Opening part 2c Bottom surface 3 Processing liquid 4 Suction pipe 4a Tip part 5 Supply pipe 6 Air introduction pipe 6a Open / close valve 7 Air discharge pipe 8 Air pressure sensor (detection part)
9 Control unit 10 Alarm device

Claims (4)

A liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, an air-driven diaphragm pump for transferring the processing liquid sucked from the tip of the suction pipe, A detection unit provided in an air discharge pipe on the exhaust side of the diaphragm pump and a control unit for storing the fluctuation range Px of the air pressure value detected by the detection unit. An operation control method for a diaphragm pump, wherein when the fluctuation width is equal to or less than Ps, it is determined that the operation is idle and the operation of the diaphragm pump is stopped or a warning is displayed. A liquid container having an opening on the top surface, a suction pipe inserted through the opening of the liquid container, an air-driven diaphragm pump for transferring the processing liquid sucked from the tip of the suction pipe, It has a detection part provided in the air discharge pipe on the exhaust side of the diaphragm pump and a control part for storing the fluctuation cycle and fluctuation range of the air pressure value detected by this detection part. When the cycle Fs or less and when the fluctuation range Px is continuously equal to or less than the reference fluctuation range Ps, it is determined that the idle operation is performed, and the operation of the diaphragm pump is stopped or a warning is displayed. Control method. 3. The diaphragm pump according to claim 1, wherein when the number of times Mx determined to be idling is at least a specified number of times Ms, the control unit displays a stop or warning display of the diaphragm pump. 4. Operation control method. Wherein the control unit includes a total number of times Nx reciprocating da diaphragm and stores the idling accumulated times ShigumaMx, using the correction coefficient α a predetermined calculates the arithmetic total number Ny as Ny = Nx + αΣMx, this operation cumulative 4. The operation control method for a diaphragm pump according to claim 3, wherein when the number Ny is equal to or greater than the reference cumulative number Ns, it is determined that the life of the diaphragm is reached, and a warning message for stopping or replacing the diaphragm pump is displayed.

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