JP3532087B2 - Bellows pump bellows damage detection mechanism, substrate processing apparatus using the same, and bellows pump bellows damage detection method - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a bellows breakage detection mechanism and a bellows breakage detection method for detecting breakage of a bellows of a bellows pump that drives a bellows by air pressure to deliver a liquid, a semiconductor wafer, and a liquid crystal. The present invention relates to a substrate processing apparatus for processing one or a plurality of substrates to be processed such as a glass substrate for a display device and a glass substrate for a PDP (plasma display panel) one by one or collectively.

[0002]

2. Description of the Related Art A semiconductor wafer (hereinafter, simply referred to as a "wafer") cleaning process and a wet etching process are important processes in a manufacturing process of a VLSI (large-scale integrated circuit). In these steps, for example, the surface of the wafer held on the spin chuck and / or
Alternatively, a substrate processing apparatus in which a processing solution (chemical solution such as hydrofluoric acid or pure water) is supplied to the back surface is used.

A structure relating to the supply of the processing liquid in such a substrate processing apparatus is shown in FIG. In this substrate processing apparatus, the wafer W is processed by supplying the processing liquid from the nozzle 2 (ejection port) to the wafer W held by the spin chuck 1. The treatment liquid to be supplied to the nozzle 2 is guided from the treatment liquid tank 3 through the treatment liquid supply path 4 (treatment liquid distribution line). A bellows pump 5 is provided in the treatment liquid supply path 4 for pressure-feeding the treatment liquid. Further, in the treatment liquid supply path 4, a flow meter 6 for measuring the flow rate of the treatment liquid, a filter 7 for removing foreign matters in the treatment liquid, a flow rate adjusting valve 8 for adjusting the flow rate of the treatment liquid, and a treatment. An air valve 9 for starting / stopping the supply of the liquid is provided. A pressure sensor 10 for detecting the pressure of the processing liquid passing through the processing liquid supply path 4 is provided between the air valve 9 and the nozzle 2. By monitoring the output of the pressure sensor 10, it is possible to monitor the start / stop status of the supply of the processing liquid by the air valve 9.

In the processing liquid supply path 4, from the position between the filter 7 and the flow rate adjusting valve 8 (that is, between the bellows pump 5 and the nozzle 2), when the air valve 9 is closed, A circulation path 11 (treatment liquid circulation line) for returning the treatment liquid to the treatment liquid tank 3 is branched. An air valve 12, which is controlled to be in a closed state when the air valve 9 is in an open state and is controlled to be in an open state when the air valve 9 is in a closed state, is provided in the middle of the circulation path 11. .
A flow rate adjusting valve 13 for adjusting the flow rate of the processing liquid returned to the processing liquid tank 3 is also provided in the circulation path 11. The treatment liquid supply path 4 between the bellows pump 5 and the flow meter 6 is provided with a heat exchanger 15 as a temperature adjusting means for keeping the temperature of the treatment liquid constant. When the treatment liquid is not discharged from the nozzle 2, the treatment liquid is returned to the treatment liquid tank 3 through the circulation path 11 so that the treatment liquid can be circulated through the heat exchanger 15. The temperature of the processing liquid in the processing liquid supply path 4 from the tank 3 to the vicinity of the air valve 9 can be maintained at an optimum value.

The bellows pump 5 is used for the purpose of achieving pressure feed of the treatment liquid while stirring the treatment liquid as little as possible. The bellows pump 5 is driven by the pressure of air. The bellows of the bellows pump is made of, for example, a fluororesin and has a service life of 1 to 3 years. Therefore, bellows are typically replaced regularly before the end of their useful life. However, in some cases, the bellows may break before its useful life.

When the bellows of the bellows pump 5 is broken, drive air for driving the bellows enters the processing liquid supply passage 4, and the processing liquid flow rate becomes unstable, which may cause a problem in the processing of the wafer W. is there. Therefore, it is necessary to detect the breakage of the bellows pump 5 and immediately stop the processing of the wafer W so that the wafer W having the processing defect is not sent to the subsequent process.

Therefore, conventionally, the output of the pressure sensor 10 during the opening period of the air valve 9 is monitored, and the breakage of the bellows is detected by detecting the decrease in the hydraulic pressure. However, it is not always possible to conclude that the breakage of the bellows has occurred only by lowering the hydraulic pressure. For example, immediately after the processing liquid is discharged, due to the characteristics of the bellows pump 5,
In some cases, the hydraulic pressure may decrease. Further, if the gas dissolved in the treatment liquid foams, a pressure drop occurs. Examples of the treatment liquid that easily foams include solutions containing hydrogen peroxide such as sulfuric acid hydrogen peroxide solution, ammonia hydrogen peroxide solution, and hydrochloric acid hydrogen peroxide solution. Further, gas may accumulate in the filter 7 and cause a pressure drop. Therefore, the decrease in pressure has various causes in addition to the breakage of the bellows, and therefore there is a drawback in that the detection of the breakage of the bellows based on the output of the pressure sensor 10 lacks certainty.

In some cases, even if the bellows is damaged, the pressure drop may be very small. In such a case, since the breakage of the bellows cannot be detected, the discharge state of the processing liquid becomes unstable. The wafer processing is continued as it is. In another conventional technique, breakage of the bellows is detected by detecting bubbles in the treatment liquid with an optical sensor. However, as described above, air bubbles may occur in the treatment liquid even when the bellows is not damaged, and thus erroneous detection due to the influence of such air bubbles is unavoidable. Further, when the bellows is only slightly broken, a small amount of bubbles are generated, and therefore it may take a long time to detect the breakage of the bellows. Further, since there are various modes of generating bubbles due to breakage of the bellows, it is difficult to accurately detect the breakage of the bellows. Furthermore, when the processing liquid is at a high temperature, the heat may cause the optical sensor to fail.

In the prior art in which a double bellows pump having a structure in which a pair of bellows are alternately expanded and contracted is applied, a change in differential pressure between air chambers of two bellows is measured. That is, if one of the bellows breaks, the pressure difference changes greatly, so that the breakage of the bellows can be detected based on the change in the pressure difference. However, in this conventional technique, erroneous detection may occur when the hardness of the bellows changes due to alteration or deterioration. Further, as a matter of course, it cannot be applied to a single bellows pump configured to expand and contract one bellows.

[0010]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to solve the above-mentioned technical problems and to detect a bellows breakage detection mechanism of a bellows pump which can detect breakage of a bellows quickly and reliably and a bellows breakage detection mechanism. A method and a substrate processing apparatus provided with the bellows breakage detection mechanism as described above.

[0011]

In order to achieve the above-mentioned object, the invention according to claim 1 drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows. A bellows breakage detection mechanism for detecting breakage of the bellows of a bellows pump that delivers liquid by an air supply line that connects an air chamber of the bellows pump and an air supply source, and the air supply line. An air supply valve that is interposed and that can be opened and closed to supply air to the air chamber, and first air pressure detection means that is connected to the air supply source side of the air supply line and that detects the air pressure. And a bellows breakage detection mechanism for a bellows pump.

According to this structure, the first air pressure detecting means detects the pressure before and after the opening and closing of the air supply valve, and evaluates the magnitude of the differential pressure to confirm the air leakage from the bellows. As a result, the breakage of the bellows can be detected. As described above, since the breakage of the bellows is directly detected, it is possible to detect the bellows quickly and accurately.

Further, as compared with the conventional technique for detecting the decrease in the discharge pressure of the processing liquid, there is no influence of the pressure decrease due to the bubbles in the processing liquid or the gas pool of the filter, and there is a risk of erroneous detection. Absent. Also, the breakage of the bellows can be detected quickly. Further, as compared with the related art in which bubbles in the treatment liquid are detected by an optical sensor, there is no risk of erroneous detection due to the influence of the bubbles in the treatment liquid. Further, it is not necessary to use a detection means that can detect damage quickly and has heat resistance.

Further, compared with the prior art in which the change in the differential pressure between the air chambers of the two bellows of the double bellows pump is measured, the bellows is not damaged by the change in hardness of the bellows due to alteration or deterioration, and the bellows is damaged. No false detection will occur. It can also be applied to a single bellows type bellows pump. According to a second aspect of the present invention, when the air supply valve is closed, the primary pressure, which is a pressure on the air supply source side of the air supply valve of the air supply line, is set to the first air pressure detection means. And when the air supply valve is opened, the secondary pressure, which is the pressure on the air chamber side of the air supply line, is detected by the first air pressure detection means. The bellows breakage detection mechanism for a bellows pump according to claim 1, further comprising a control unit that controls the air supply valve and the first air pressure detection means.

According to this structure, the primary pressure on the air supply source side and the secondary pressure on the air chamber side are detected by the same pressure detecting means with respect to the air supply valve. The differential pressure can be accurately detected without being affected by the individual difference of the means. However, as in the third aspect of the present invention, a second air pressure detection unit that is connected to the air chamber side of the air supply line rather than the air supply valve and that detects the pressure of the air may be further provided.

Further, as in the invention described in claim 4, when the air supply valve is closed, the primary pressure which is the pressure on the air supply source side of the air supply valve of the air supply line is set. The second air pressure is detected by the first air pressure detecting means, and when the air supply valve is opened, the secondary pressure, which is the pressure on the air chamber side of the air supply valve of the air supply line, is detected. A control unit for controlling the air supply valve, the first air pressure detecting means and the second air pressure detecting means may be further provided so as to be detected by the means.

According to a fifth aspect of the present invention, for detecting breakage of the bellows of the bellows pump which drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows and delivers the liquid. A bellows breakage detection mechanism, an air supply line that connects the air chamber of the bellows pump and an air supply source, and an air supply that is interposed in the air supply line and that can be opened and closed to supply air to the air chamber. A bellows breakage detection mechanism for a bellows pump, comprising: a valve; and a second air pressure detection means that is connected to an air chamber side of the air supply line and that detects air pressure.

According to this structure, the breakage of the bellows is detected by detecting the pressure of the portion close to the air chamber. Therefore, in addition to the effect of the invention of claim 1,
It is possible to reliably detect even a slight breakage of the bellows. According to a sixth aspect of the present invention, when the air supply valve is closed, at least 1 is set after a predetermined time has elapsed since the air supply valve was closed.
Further, a control unit for controlling the air supply valve and the second air pressure detecting means is further provided so that the pressure on the air chamber side of the air supply line is detected by the second air pressure detecting means. The bellows breakage detection mechanism of the bellows pump according to claim 5, wherein

According to this structure, in the state in which the air supply valve is closed, the pressure in the portion close to the air chamber is detected at least once after the air valve is closed, and the bellows is damaged based on the detected pressure. Detection can be performed. If the bellows is damaged, the pressure detection value is a relatively low value, and therefore it can be determined based on the pressure detection value whether or not the bellows is damaged. Moreover, according to the present invention, since the pressure is detected in a state where the air is not supplied to the air chamber, even a minute damage can be accurately detected. In addition, it is sufficient to hold the air supply valve in the closed state to detect the pressure, and it is sufficient to detect the pressure once, which also has the advantage of simplifying the control operation.

The invention according to claim 7 is characterized in that the control section includes a comparison section for comparing the pressure of the air detected by the second air pressure detection means with a predetermined reference pressure. It is a bellows breakage detection mechanism of the bellows pump described in 6. With this configuration, it is possible to detect breakage of the bellows pump by comparing the pressure detection value by the second air pressure detection means with the reference pressure. That is, if the detected pressure value is lower than the reference pressure, it can be determined that the bellows is damaged. Accordingly, the breakage of the bellows can be detected with a very simple control.

According to an eighth aspect of the present invention, the control section, when the air supply valve is closed, changes the time at least twice, and the control unit is located on the air chamber side of the air supply valve with respect to the air supply valve. 7. The bellows breakage detection mechanism for a bellows pump according to claim 6, wherein the air supply valve and the second air pressure detection means are controlled so that the pressure is detected by the second air pressure detection means. is there.

According to this structure, the pressure in the portion close to the air chamber is detected at least twice with the air supply valve closed, and the breakage of the bellows is detected based on the detected pressure. be able to. If the bellows is damaged, the difference between the pressure detection values at least twice becomes large. Therefore, it is possible to determine whether or not the bellows is damaged based on the difference between the pressure detection values. Moreover, according to the present invention, since the pressure is detected in a state where the air is not supplied to the air chamber, even a minute damage can be accurately detected. Further, since it is only necessary to detect the pressure while keeping the air supply valve closed, there is an advantage that the control operation becomes simple.

The invention according to claim 9 is characterized in that the air supply line is a drive air supply line for supplying drive air for driving the bellows to the air chamber. The bellows breakage detection mechanism of the bellows pump according to any one of 8 above. According to this structure, the air supply line can also be used as the drive air supply line, so that the structure of the piping can be simplified and the cost of the mechanism can be reduced.

The invention according to claim 10 further comprises a drive air supply line for supplying drive air for driving the bellows to the air chamber, wherein the air supply line is different from the drive air supply line. The bellows breakage detection mechanism for a bellows pump according to any one of claims 1 to 8, which is a detection air supply line that supplies detection air to the air chamber.

According to this structure, since the drive air supply line and the detection air supply line are separately provided, an appropriate supply pressure can be set in each line. For example, the driving air pressure is low pressure (3 kgf / cm ² ) and the detection pressure is higher than that (5 kgf / cm ² ) to improve the damage detection accuracy. Also, by keeping the driving air pressure low, the life of the bellows can be extended.

In the invention according to claim 11, the control section is
When the bellows of the bellows pump is expanded,
11. The bellows breakage detection mechanism for a bellows pump according to claim 1, wherein opening / closing of the air supply valve is controlled so as to supply air from the air supply line to the air chamber. According to this configuration, since the air chamber is pressurized while the bellows is extended to detect the breakage of the bellows, the breakage can be detected with the broken portion open. Therefore, the damage detection accuracy is improved as compared with the case where the damage of the bellows is detected in the contracted state of the bellows.

In this case, it is preferable that a means for holding the expanded state of the bellows is provided against the pressurization of the air chamber. That is, for example, in the case of a double bellows type bellows pump that alternately expands and contracts a pair of bellows, the exhaust passage of the air chamber of the contracting bellows is blocked, or the air in the air chamber of the contracting bellows is blocked. The pressure may be kept higher than the air pressure of the expanding bellows air chamber.

According to a twelfth aspect of the present invention, at least one end side is connected to a treatment liquid tank in which a treatment liquid for treating the substrate is stored, and a treatment liquid flow line through which the treatment liquid flows, and A bellows pump that is interposed in the processing liquid flow line and that drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver the processing liquid, and a bellows pump that is provided in association with the bellows pump. A bellows breakage detection mechanism for a bellows pump according to any one of claims 1 to 11.

According to this structure, since the breakage of the bellows can be detected accurately and quickly, the processing liquid in a good state can be supplied to the substrate, and a high-quality substrate without processing defects can be provided. . According to a thirteenth aspect of the present invention, one end side of the processing liquid supply line opposite to the processing liquid tank is an ejection port for ejecting the processing liquid to the substrate, and the ejection port to the substrate. One end side is connected between the bellows pump and the discharge port of the treatment liquid supply line and the other end side is the treatment so that the treatment liquid is circulated to the treatment liquid tank during a period in which the treatment liquid is not supplied from 13. The substrate processing apparatus according to claim 12, further comprising a processing liquid circulation line connected to the liquid tank.

In the case of a double bellows type bellows pump, when the bellows breakage detection according to the present invention is applied,
The bellows moves at least once during the damage detection, and the processing liquid is sent out at that time. At least at this time, it is possible to prevent waste of the treatment liquid by allowing the treatment liquid to flow through the treatment liquid circulation line. The invention according to claim 14 is a bellows breakage detection for detecting breakage of the bellows of a bellows pump that drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver the liquid. In this method, air having a predetermined primary pressure is supplied to the air chamber of the bellows pump, and then the secondary pressure of the air in the air chamber is detected.
A bellows breakage detection method for a bellows pump, characterized in that breakage of the bellows is detected based on a differential pressure between a secondary pressure and a secondary pressure.

According to this invention, the same effect as that of the invention of claim 1 can be obtained. The invention according to claim 15 is a bellows breakage detection for detecting breakage of the bellows of a bellows pump that drives the bellows by a pressure of air contained in an air chamber provided adjacent to the bellows to deliver a liquid. A method for detecting the breakage of a bellows based on a temporal change in the pressure of the air in the air chamber during the period when the supply of air to the air chamber of the bellows pump is stopped. This is a bellows damage detection method.

With this method, the effects described in relation to the inventions of claims 6 and 8 can be achieved. The invention according to claim 16 is a bellows breakage for detecting breakage of the bellows of a bellows pump which drives the bellows to deliver liquid by the pressure of air contained in an air chamber provided adjacent to the bellows. A method of detecting, based on the comparison between the pressure of the air in the air chamber and a predetermined reference pressure during the period when the air supply to the air chamber of the bellows pump is stopped, detecting the breakage of the bellows. This is a characteristic method for detecting bellows breakage in a bellows pump.

By this method, the same effect as that of the invention of claim 7 can be achieved.

[0034]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an illustrative view showing a basic configuration related to a bellows pump 5 to which a bellows breakage detection mechanism according to an embodiment of the present invention is applied. The bellows pump 5 is applied to the substrate processing apparatus shown in FIG. 18 described above, is interposed in the processing liquid supply passage 4, and pressure-feeds the processing liquid in the processing liquid tank 3 toward the nozzle 2. Used as a pumping means. In addition, in the following description, FIG. 18 will also be referred to.

The bellows pump 5 has a pair of cylinders 61 and 62 arranged to face each other, and bellows 63 and 64 are arranged in the cylinders 61 and 62, respectively. The inner spaces of the cylinders 61 and 62 are air chambers, and the air is alternately supplied to the pair of air chambers via the solenoid valves SVA. The exhaust is performed alternately via the valve SVA. That is, when air is supplied to one of the air chambers of the cylinders 61 and 62, the air in the other air chamber is exhausted. The flanges 63a and 64a of the bellows 63 and 64 are connected by a connecting member 66 so that the expansion of one bellows and the contraction of the other bellows are synchronized.

The inner spaces of the bellows 63 and 64 are processing liquid chambers, and the processing liquid chambers communicate with the processing liquid supply passages 67 and 68 through which the processing liquid from the processing liquid tank 3 is introduced. Check valves 69 and 70 for preventing backflow to the treatment liquid tank 3 are provided in the treatment liquid supply paths 67 and 68, respectively. Further, the processing liquid chambers formed by the inner spaces of the bellows 63 and 64 are in communication with the processing liquid outflow passages 71 and 72 that guide the processing liquid toward the nozzle 2. Check valves 73 and 74, which allow only the outflow of the processing liquid to the heat exchanger 15 side, are provided in the processing liquid outflow paths 71 and 72, respectively.

The solenoid valve SVA is a 4-port / 2-position solenoid valve, which exhausts air from the air chamber in the cylinder 61 and supplies air to the air chamber in the cylinder 62 at a first position (left position: (The illustrated position) and a second position (right position) for supplying air to the air chamber in the cylinder 61 and exhausting air from the air chamber in the cylinder 62 can be set. The solenoid valve SVA is supplied with pressure-controlled air from a drive air supply line 22 from an air supply source via a pressure regulator 21.

A solenoid valve SV1 (normally open) is provided in the air flow passage between the solenoid valve SVA and the cylinder 61. Similarly, a solenoid valve SV2 (normally open) is provided in the air flow passage between the solenoid valve SVA and the cylinder 62. Solenoid valves SVA, SV1, SV2
Are controlled by a control unit CTL having a CPU and a memory associated therewith. The control unit CTL includes a solenoid valve SVA from the pressure regulator 21.
The pressure detection signal of the pressure sensor P1 (first air pressure detection means) for detecting the air pressure in the air supply line to the above is input.

In the normal operation mode in which the processing liquid is pressure-fed toward the nozzle 2, the control unit CTL opens both the solenoid valves SV1 and SV2, while the solenoid valve SVA alternates between the first position and the second position. Switch. Thereby, when the solenoid valve SVA is in the first position, air is supplied to the cylinder 62 and the air in the cylinder 61 is exhausted via the solenoid valve SVA. As a result, the bellows 64 contracts, and the processing liquid in the processing liquid chamber inside the bellows 64 becomes
It is pressure-fed toward the nozzle 2 through the processing liquid discharge path 72 and the check valve 74. At this time, the bellows 63 expands,
The processing liquid from the processing liquid tank 3 is supplied to the processing liquid chamber therein via the check valve 69 and the processing liquid supply passage 67. When the solenoid valve SVA is set to the second position, air is supplied from the solenoid valve SVA to the cylinder 61, and the air in the cylinder 62 is exhausted via the solenoid valve SVA. As a result, the bellows 63 contracts and the bellows 64 expands. Therefore, in this case, the treatment liquid from the treatment liquid tank 3 is introduced into the treatment liquid chamber inside the bellows 64, and the treatment liquid inside the treatment liquid chamber inside the bellows 63 is pressure-fed to the nozzle 2 side. . Thus, the bellows 63, 64
By alternately expanding and contracting, the treatment liquid can be supplied almost continuously.

In the bellows pump 5 having such a structure, if the bellows 63 or 64 is damaged, the air supplied through the solenoid valve SVA is used as the processing liquid discharge passage 71,
It is sent to the nozzle 2 side via 72. Therefore, the processing liquid containing bubbles may be supplied to the wafer W, which may cause a defect in the processing of the wafer W.

Therefore, the control unit CTL is, for example,
Immediately after the discharge of the processing liquid from the nozzle 2 is completed, the control operation according to the damage detection mode is performed. The operation of the control unit CTL in the damage detection mode is shown in the flowchart of FIG. In the damage detection mode, the control unit CTL
Is, for example, as shown in FIG.
In the state where the pressure is extended to the maximum, the solenoid valve SV2 on the side of the contracted bellows 64 is closed (step A1), and the pressure detection signal of the pressure sensor P1 at that time is fetched (step A).
2). The pressure detection value at this time is P1a. In this case, since the solenoid valve SVA is in the first position (the position shown in the figure), the pressure detection value P1a is equal to the air pressure generated by the pressure regulator 21 (for example, 3 kgf / cm ² ).

After that, the control unit CTL switches the solenoid valve SVA to the second position to supply air to the air chamber in the cylinder 61 (step A3). Then, the pressure detection value P1b at that time (it is preferable to pressurize for 3 to 5 seconds and detect the peak pressure during that time) is acquired from the pressure sensor P1 (step A4). At this time, since the solenoid valve SV2 is held in the closed state, the positions of the bellows 63 and 64 do not change. Therefore, if the extending bellows 63 is not damaged, the pressure detection value P1b is
It should be almost equal to the detected pressure value P1a.

Next, the control unit CTL causes the bellows 63 to contract by opening the solenoid valve SV2 and contracting the bellows 63.
4 is extended to the maximum (step A5). In this state,
The control unit CTL closes the solenoid valve SV1 corresponding to the contracted side bellows 63 (step A6). afterwards,
The control unit CTL switches the solenoid valve SVA to the first position (the position shown in the figure) and supplies air to the air chamber in the cylinder 62 (step A7). Then, the pressure detection value P1c of the pressure sensor P1 at that time (it is preferable to pressurize for 3 to 5 seconds and detect the peak pressure during that time) is taken in (step A8). At this time, since the solenoid valve SV1 is closed, the positions of the bellows 63 and 64 do not change. Therefore, if the extending bellows 63 is not damaged, the pressure detection value P1c is equal to the pressure detection value P1.
It should be approximately equal to a.

The control unit CTL then determines the differential pressure | P1a-
P1b | and the differential pressure | P1a-P1c | are obtained (step A9), and one of these differential pressures is set differential pressure Δre.
It is determined whether or not f (for example, 0.3 kgf / cm ² ) or more (step A10). If at least one of the differential pressures is equal to or higher than the set differential pressure Δref, it is determined that at least one of the bellows 63 and 64 is damaged, and abnormality processing (step A11) is performed. The process ends. In this case, the abnormal processing is
An alarm message indicating that the bellows is damaged is displayed on a display device (not shown) connected to the control unit CTL, an alarm sound is generated from a buzzer (not shown), and the operation of the substrate processing apparatus is stopped. Refers to the processing. Only one of these processes may be performed, or two or more processes may be performed in combination. Further, in this embodiment, it is possible to specify which of the bellows 63 and 64 is damaged and to display it, for example, on the above-mentioned display device or the like.

As described above, according to this embodiment, when the solenoid valve SVA as the air supply valve is in the closed state,
The detected pressure value P1a, which is the secondary pressure, and the secondary pressure in the open state of the solenoid valve SVA (that is, the cylinders 61, 62).
The damage of the bellows 63, 64 is detected based on whether or not each pressure difference between the pressure detection values P1b, P1c, which is the pressure of each air chamber), is greater than or equal to the set pressure difference Δref. Therefore, the breakage of the bellows can be detected reliably and promptly without being affected by bubbles in the treatment liquid. As a result, it is possible to prevent the processing liquid containing a large amount of air from being supplied to the wafer W, so that it is possible to prevent the processing on the wafer W from becoming defective.

Moreover, since the differential pressure between the air chambers of the pair of cylinders 61 and 62 is not utilized, there is no fear of being affected by the change in hardness of the bellows 63 and 64, and from this viewpoint as well. It can be said that accurate detection of bellows damage is possible. It should be noted that this embodiment is modified so that the pressure sensor P for detecting the pressure of the air in the air chamber inside each of the cylinders 61 and 62 is shown by the two-dot chain line in FIG.
2, P3 (second air pressure detecting means) are provided, and the pressure detection signals output by these pressure sensors P2, P3 are output to the control unit C.
You may make it input into TL. In this case, instead of the pressure detection value P1b, the pressure detection value P2 of the pressure sensor P2 under the same conditions as when the pressure detection value P1b was acquired.
a instead of the above pressure detection value P1c, the pressure sensor P under the same conditions as when the pressure detection value P1c was acquired
The pressure detection value P3a of 3 may be used. That is, the breakage of the bellows 63, 64 can be detected based on the comparison between the differential pressure | P1a-P2a | and the differential pressure | P1a-P3a | and the set differential pressure Δref.

In the above embodiment, the pressure detection value P
The pressure P1a is measured only immediately before the detection of the pressure detection value P1a (or the pressure detection value P2a).
Even immediately before the detection of c (or the pressure detection value P3a),
The pressure P1a may be measured again. By doing so, the accuracy of detecting breakage of the bellows 63, 64 can be further improved.

FIG. 3 is an illustrative view showing a basic structure of a portion related to the bellows pump 5 in the second embodiment of the present invention. In FIG. 3, the same parts as those in FIG. 1 described above are designated by the same reference numerals. In the second embodiment, a 4-port / 3-position solenoid valve SVB that can take three positions is used instead of the solenoid valve SVA in the first embodiment. Also,
The valves corresponding to the solenoid valves SV1 and SV2 in the first embodiment are not interposed between the solenoid valve SVB and the cylinders 61 and 62. The solenoid valve SVB is controlled by the control unit CTL to supply air to the cylinder 62 and exhaust air from the air chamber in the cylinder 61 (the left position in FIG. 3) and the cylinders 61 and 62. A second position (closed position: the position shown in FIG. 3) that prohibits the inflow / outflow of air to / from the inner air chamber, and air is supplied to the air chamber in the cylinder 61, and A third position for exhausting air (the right position in FIG. 3) can be taken.

In the above-described first embodiment, the breakage of the bellows in the expanded state is detected, whereas in the second embodiment, the second bellows is detected.
In this embodiment, breakage of the bellows in the contracted state is detected. In the normal operation mode in which the processing liquid is pressure-fed toward the nozzle 2, the control unit CTL alternately switches the electromagnetic valve SVB between the first position (left position) and the second position (right position). As a result, the bellows 63 and 64 alternately expand and contract, and the processing liquid is sent toward the nozzle 2.

FIG. 4 shows the control section C in the bellows breakage detection mode for detecting breakage of the bellows 63, 64.
It is a flow chart for explaining a control procedure of TL. First, the control unit CTL sets the solenoid valve SVB to the second position (close position) (step B1), and measures the pressure detection value P1a of the pressure sensor P1 at this time (step B2). This pressure detection value P1a is the pressure regulator 2
Equal to 1.

Next, the control unit CTL switches the solenoid valve SVB to, for example, the first position (left position) (step B
3) Let the bellows 64 shrink. Then, in this state, the pressure detection value P1b of the pressure sensor P1 (preferably, air is supplied for 3 to 5 seconds to detect the peak pressure during that time) is taken in (step B).
4). At this time, if the bellows 64 in the contracted state is not damaged, the pressure detection value P1b is the pressure detection value P1a.
Is almost equal to.

Next, the control unit CTL switches the solenoid valve SVB to the third position (right position) (step B5) and shrinks the bellows 63. Then, the pressure detection value P1c of the pressure sensor P1 at this time is taken in (it is preferable to supply air for 3 to 5 seconds and detect the peak pressure during that time) (step B6). At this time, if the bellows 63 in the contracted state is not damaged, the pressure detection value P1c becomes substantially equal to the pressure detection value P1a.

After that, the differential pressure | P1a-P1b | and the differential pressure | P1a-P1c | are obtained (step B7), and the first
Similar to the embodiment described above, the damage detection process of the bellows 63, 64 is performed (step B8), and if the damage is detected, the abnormality process is performed (step B9). Thus, also in this embodiment, the primary pressure in the closed state of the solenoid valve SVB as the air supply valve and the secondary pressure in the opened state of the solenoid valve SVB (that is, the air chambers in the cylinders 61, 62). Since the breakage of the bellows is detected on the basis of the pressure difference with the air pressure), the same effect as in the case of the first embodiment can be obtained. However,
The detection of breakage of the bellows based on the differential pressure can be performed more accurately when the bellows is in an expanded state, and thus it can be said that the detection accuracy is higher in the first embodiment.

In this embodiment, the solenoid valve S
VB to the left position in step B3, step B5
In step B3, the position is switched to the right position, but conversely, the position may be switched to the right position in step B3 and to the left position in step B5. Also in this embodiment, the pressure sensors P2 and P3 for detecting the air pressures of the air chambers inside the cylinders 61 and 62, respectively, are provided.
The modifications described in relation to the first embodiment are possible.

FIG. 5 is an illustrative view showing a basic structure relating to a bellows breakage detection mechanism according to a third embodiment of the present invention. In FIG. 5, parts that are the same as the parts shown in FIG. 1 are given the same reference numerals. In the third embodiment, as in the case of the second embodiment, the supply / exhaust of air to the cylinders 61 and 62 is controlled via the 4-port / 3-position solenoid valve SVC. However, no valve is provided between the solenoid valve SVC and the cylinders 61 and 62. The solenoid valve SVC is controlled by the control unit CTL, and selectively selects the first position (left position), the second position (closed position), and the third position (right position) like the solenoid valve SVB in the second embodiment. You can take

On the other hand, in the third embodiment, detection air supply lines 81 and 82 each having one end connected to the air chambers inside the cylinders 61 and 62 are provided. 82 is connected to the air supply source via the regulator 80. The air pressure between the regulator 80 and the solenoid valves SV3 and SV4 is detected by the pressure sensor P1.

Solenoid valves SV3 and SV4 (normally closed) are provided in the detection air supply lines 81 and 82, respectively, and their opening and closing are controlled by a control unit CTL. The main difference between the third embodiment and the first embodiment is that in the first embodiment,
The bellows pump driving air supply / exhaust line (driving air supply line) and the bellows breakage detection air supply line (detection air supply line) are common. However, in the third embodiment, these are common. The point is that each line is provided separately.

In the normal operation mode in which the processing liquid is pressure-fed toward the nozzle 2, the control section CTL holds the solenoid valves SV3 and SV4 in the closed state, while the solenoid valve SVC is turned on.
Alternately switching between a first position (left position) and a third position (right position). As a result, the bellows 63 and 64 alternately expand and contract, and the processing liquid is sent toward the nozzle 2.

FIG. 6 is a flow chart for explaining the operation of the control unit CTL in the bellows breakage detection mode. The control unit CTL takes in the pressure detection value P1a of the pressure sensor P1 in the normal operation mode at an arbitrary time in the normal operation mode and stores it in the internal memory. The pressure detection value P1a corresponds to the primary pressure (pressure on the air supply source side) in the closed state of the solenoid valves SV3 and SV4 as air supply valves.

For example, when the bellows 63 is in the maximum expanded state as shown in FIG. 5, the control unit CTL controls the solenoid valve SVC to the second position (close position) so that the air for the cylinders 61 and 62 is released. Inflow / outflow is prohibited (step C1). Then, in that state, the control unit CTL
The extending solenoid valve SV3 on the side of the bellows 63 is opened (step C2), and the pressure detection value P1b of the pressure sensor P1 at this time is fetched (step C3). The pressure detection value P1b corresponds to the secondary pressure (pressure on the cylinder 61 side) when the solenoid valve SV3 is opened, and if the bellows 63 is not damaged, the pressure detection value P1b is almost equal to the pressure detection value P1a. Should be equal.

Next, the control unit CTL closes the solenoid valve SVC3 (step C4), switches the solenoid valve SVC to the third position (right position) (step C5), and extends the bellows 64 to the maximum extent. After that, the control unit CTL determines that the solenoid valve SV
Switch C to the second position (closed position) (step C
6) Hold the position of the bellows 64. Then, the control unit CTL further extends the solenoid valve S on the expanded bellows 64 side.
V4 is opened (step C7), and the pressure detection value P1c of the pressure sensor P1 at this time is taken in (step C8).
The pressure detection value P1c corresponds to the secondary pressure when the solenoid valve SV3 is opened, and is substantially equal to the pressure detection value P1a if the bellows 64 is not damaged.

Thereafter, the differential pressure | P1a-P1b | and the differential pressure | P1a-P1c | are obtained (step C9), and the first
The presence or absence of breakage of the bellows is determined in the same manner as in the above embodiment (step C10), and if breakage of the bellows is detected, abnormal processing (step C11) is performed. In this way, according to this embodiment, the same effect as that of the first embodiment can be obtained.

In this embodiment, the pressure detection value P1a is measured at any time in the normal operation mode, but immediately before the detection of the pressure detection values P1b and P1c (that is, immediately before the steps C2 and C7). ), The pressure P1a may be measured each time. By doing so, the accuracy of detecting breakage of the bellows 63, 64 can be further improved.

Also in this embodiment, the modifications described in connection with the first embodiment, such as the provision of the pressure sensors P2 and P3 for detecting the air pressures of the air chambers inside the cylinders 61 and 62, respectively, are possible. It is possible. FIG. 7 is an illustrative view showing a configuration relating to a bellows breakage detection mechanism according to a fourth embodiment of the present invention. In the above-described first, second and third embodiments, the pair of bellows 63, 64.
The double bellows type pump 5 configured to expand and contract alternately is used, but in the fourth embodiment, the single bellows type bellows pump 25 configured to pump liquid by expanding and contracting one bellows 63. Is used. In FIG. 7, parts that are the same as the parts shown in FIG. 1 are given the same reference numerals.

The bellows pump 25 contracts the bellows 63 by supplying air to the air chamber in the cylinder 61, thereby pumping the processing liquid toward the nozzle 2, and is provided in association with the bellows 63. The bellows 63 is extended by the reaction force of a spring (not shown), and the processing liquid from the processing liquid tank 3 is taken into the processing liquid chamber inside the bellows 63 at that time.

The supply / exhaust of drive air to / from the cylinder 61 is performed through a 3-port / 2-position solenoid valve SVD and a solenoid valve SV5 (normally open). A regulator 21 is provided in the drive air supply line 22 between the air supply source and the solenoid valve SVD. Further, a detection air supply line 90 is connected between the air supply source and the cylinder 61, and a pressure regulator 91 and a solenoid valve SV6 (normal valve) are sequentially connected to the detection air supply line 90 from the air supply source side. Closed) and are installed. And the pressure regulator 9
1 and the solenoid valve SV6, the air pressure in the detection air supply line is detected by the pressure sensor P1.

The solenoid valves SVD, SV5 and SV6 are all controlled by the control unit CTL.
The pressure detection signal output from the pressure sensor P1 is the control unit CTL.
Is given to. The solenoid valve SVD can take two positions, an air supply position for supplying air to the cylinder 61 and an air exhaust position (illustrated position) for exhausting air in the cylinder 61.

In the normal operation mode in which the processing liquid is pressure-fed to the nozzle 2, the control section CTL opens the solenoid valve SV5 and closes the solenoid valve SV6. In this state, the control unit CTL alternately switches the solenoid valve SVD between the air supply position and the air exhaust position. As a result, the bellows 63 expands and contracts, and the processing liquid is pressure-fed toward the nozzle 2.

In the bellows breakage detection mode for detecting the presence or absence of breakage of the bellows 63, the control unit CTL
Performs the control operation shown in the flowchart of FIG. That is, the control unit CTL closes the solenoid valve SV5 and expands the bellows 6 when the bellows 63 is maximally expanded, for example.
The position of 3 is held (step D1). Then, the pressure detection value P1a of the pressure sensor P1 at this time is fetched (step D2). Solenoid valve SV6 as air supply valve
Is a closed state. Therefore, the detected pressure value P1a
Corresponds to the primary pressure when the air supply valve is closed. However, the pressure detection value P1a may be fetched at any time when the solenoid valve SV6 is in the closed state, and for example, the pressure detection value P1a may be fetched in the normal operation mode.

Next, the control unit CTL opens the solenoid valve SV6 (step D3) and supplies air to the cylinder 61,
The pressure detection value P1b of the pressure sensor P1 at this time is taken in (step D4). However, at this time, the pressure regulator 91 generates a small pressure (pressure equal to or lower than the minimum operating pressure of the bellows) against the reaction force of the spring that extends the bellows 63, so as not to largely contract the bellows 63. Is preferred. The above pressure detection value P1b
Corresponds to the secondary pressure when the air supply valve is opened.

Thereafter, the control unit CTL determines the differential pressure | P1a-
P1b | is calculated (step D5), and based on this differential pressure and the set differential pressure Δref, a determination for damage detection of the bellows 63 is made in the same manner as in the first embodiment (step D6). The differential pressure | P1a-P1b | is the set differential pressure Δref
If the above is the case, the same abnormality processing as in the case of the first embodiment is performed (step D7). However, the reference differential pressure Δref
Is not necessarily the same value as in the first embodiment, but is a value appropriately set according to the pressures generated by the regulators 21 and 91.

As described above, according to this embodiment, the breakage of the bellows 63 of the single bellows type bellows pump 25 can be detected based on the differential pressure between the generated pressure of the supply air and the pressure in the air chamber inside the cylinder 61. Therefore, as in the case of the first embodiment, accurate and quick bellows damage detection processing is realized. In addition, for example, by providing a pressure sensor P2 that detects the pressure of the air chamber inside the cylinder 61,
The modifications described in relation to the first embodiment are also possible in this embodiment.

FIG. 9 is an illustrative view showing the structure of a bellows breakage detection mechanism according to the fifth embodiment of the present invention. 9, parts corresponding to the respective parts shown in FIG. 7 described above are denoted by the same reference numerals. In this fifth embodiment,
In the fourth embodiment, the detection air supply line 90 and the solenoid valve SV6, the pressure sensor P1 and the regulator 91 interposed therein are not provided, and the solenoid valve S is not provided.
V5 is also not provided. The pressure sensor P1 is provided in the drive air line 22 between the regulator 21 and the solenoid valve SVD.

In the bellows breakage detection mode, the control unit C
The TL first switches the solenoid valve SVD to the exhaust position, and acquires the pressure value P1a detected by the pressure sensor P1 with the supply of air to the air chamber in the cylinder 61 stopped. Then, the control unit CTL then switches the solenoid valve SVD to the air supply position, contracts the bellows 63, and takes in the detection pressure P1b of the pressure sensor P1 in a state where the bellows 63 has contracted and finished.

After that, the same processing as in the case of the fourth embodiment is performed based on the differential pressure | P1a-P1b | and the set differential pressure Δref. However, the set differential pressure Δref in this case
Is a value close to the set differential pressure Δref in the second embodiment. Of course, also in this embodiment, the bellows 6
The air pressure in the fully contracted state of 3 may be detected using a pressure sensor P2 which is provided separately from the pressure sensor P1 and detects the pressure of the air chamber in the cylinder 61.

FIG. 10 is a flow chart for explaining the operation of the bellows breakage detection mechanism according to the sixth embodiment of the present invention in the bellows breakage detection mode. In the description of this embodiment, reference is again made to FIG. 1 above. In this embodiment, the output signals of the pressure sensors P2 and P3 shown in FIG. 1 are used, and the breakage of the bellows 63, 64 is detected without using the output signal of the pressure sensor P1. That is, in this case, the pressure sensor P1 does not need to be provided.

The detection of breakage of the bellows 63, 64 is achieved by the control unit CTL performing an operation according to the flowchart of FIG. In the damage detection mode, the control unit C
TL, for example, when the solenoid valves SV1 and SV2 are in the open state and one bellows 63 is maximally extended as shown in FIG. 1, the solenoid valve SV2 on the side of the contracted bellows 64 is closed. Thus, the position of the bellows 63 is maintained (step E1), and the solenoid valve SVA is switched from the left position (the position shown in the drawing) to the right position to pressurize the air chamber of the cylinder 61 (step E2). Valve SV
1 is closed (step E3) to maintain the pressurized state in the cylinder 61. In this state, preferably step E3
Immediately after, the control unit CTL takes in the pressure detection signal of the pressure sensor P2 that detects the pressure of the air chamber of the cylinder 61 (step E4). The pressure detection value at this time is P2a (1
The second time).

After that, the control unit CTL, after a predetermined time has passed (for example, 2 to 10 seconds later, preferably 5 seconds later),
Again, the pressure detection value P2b (second time) of the pressure sensor P2 is fetched (step E5). Expanding bellows 63
If there is no damage in the pressure detection value P2a, P2b
Should be approximately equal. If the bellows 63 is damaged, a large difference will occur between the pressure detection values P2a and P2b.

Then, the control unit CTL causes the solenoid valves SV1,
SV2 is opened (step E6). At this time, since the solenoid valve SVA is in the right position, air is supplied to the air chamber of the cylinder 61 and the air in the air chamber of the cylinder 62 is exhausted. As a result, the bellows 63 contracts and the bellows 64 becomes larger. Extend. After a time sufficient for the bellows 63 to contract and the bellows 64 to expand, the control unit CTL closes the solenoid valve SV1 to hold the position of the bellows 64 (step E7), and further to the solenoid valve SVA. To the left position (step E8). As a result, the air chamber of the cylinder 62 is pressurized. After that, the solenoid valve SV
2 is closed, and the pressurized state of the air chamber of the cylinder 62 is maintained (step E9).

In this state, preferably immediately after step E3, the control unit CTL causes the pressure detection value P of the pressure sensor P3 to be detected.
3a (first time) is taken in (step E10). The control unit CTL further captures the pressure detection value P3b (second time) of the pressure sensor P3 again after a predetermined time has passed (after 2 to 10 seconds, preferably after 5 seconds) (step E1).
1). At this time, if the extending bellows 64 is not damaged, the pressure detection values P3a and P3b should be substantially equal. If the bellows 64 is damaged,
There will be a large difference between the pressure detection values P3a and P3b.

Next, the controller CTL determines the differential pressure | P2a-P.
2b | and differential pressure | P3a-P3b | are calculated (step E
12), any one of these differential pressures is set differential pressure Δre
f (for example, 0.3 kgf / cm ² to 2.5 kgf / cm ² ,
Preferably, it is determined whether it is 1.0 kgf / cm ² ) or more (step E13). When at least one of the differential pressures is equal to or higher than the set differential pressure Δref, it is determined that at least one of the bellows 63 and 64 is damaged, and an abnormal process (step) related to the first embodiment is performed. E12) is performed, and if there is no abnormality, the process ends. In addition, as in the case of the first embodiment, the bellows 6
It is also possible to identify which of the three and 64 is damaged and display it on a display device or the like, for example.

As described above, according to this embodiment, the air chambers of the cylinders 61 and 62 are closed while one of the bellows 63 and 64 is held in the expanded state, and the air chamber of the expanded bellows is closed. The pressure is detected twice at different times. When the difference between the two pressure detection values is large, it is determined that the expanded bellows is damaged. In this way, since the change in the pressure of the air chamber is used, even a slight breakage of the bellows can be accurately performed compared to the configuration that detects the pressure on the air supply source side rather than the air supply valve of the air supply line. Can be detected. Also, since the pressure is detected while the air supply to the air chamber is stopped, this also
Even a slight break in the bellows can be reliably detected.

The above-described operation is performed by the bellows 63, 64.
Although it is designed to detect damage in the extended state,
The pressure of the air chamber on the side of the contracted bellows is detected at least twice with a time interval, and the difference between the detected pressure values of these two times is compared with the reference differential pressure Δref, so that the contracted bellows is damaged. It is also possible to do. Further, since the bellows 63 and 64 are contracted while the other is contracted while the other is contracted, the breakage of the bellows 63 and 64 can be detected in the expanded state and the contracted state. The detection can also be performed in parallel.

In this case, as shown in FIG. 11, the control unit CTL closes the solenoid valve SV2 to hold the position of the bellows 63 from the state of FIG. 1 (step E'1), and the solenoid valve SV is closed.
A is switched from the left position to the right position to pressurize the air chamber of the cylinder 61 (step E′2), and then the solenoid valve SV
1 is closed (step E'3). In this state, preferably immediately after step E'3, the pressure sensors P2 and P3 are
Each pressure detection value P2a, P3a (first time) is fetched (step E′4), and after a predetermined time has elapsed (2 to 10).
After 2 seconds, preferably 5 seconds), the pressure detection values P2b and P3b (second time) of the pressure sensors P2 and P3 are fetched again (step E′5). In this case, if the bellows 63 is not broken, the pressure detection values P2a and P2b are substantially equal, and if the bellows 63 is broken, a large difference is generated between the pressure detection values P2a and P2b. . Similarly, if the bellows 64 is not broken, the pressure detection values P3a and P3b are substantially equal, and if the bellows 64 is broken, a large difference is generated between the pressure detection values P3a and P3b.

Subsequent steps E'6, E'7, E'8
The operation of the control unit CTL in FIG.
This is the same as the case of 2, E13 and E14. In this way, by detecting the breakage of the bellows 63 and 64 in parallel, the bellows breakage detection operation can be completed promptly. FIG. 12 is a flowchart for explaining the operation of the bellows breakage detection mechanism according to the seventh embodiment of the present invention in the bellows breakage detection mode. In the description of this embodiment, reference is again made to FIG. 3 above.

In this embodiment, the output signals of the pressure sensors P2 and P3 shown in FIG. 3 are used, and the output signals of the pressure sensor P1 are not used, and the bellows 63, 6 are used.
4 damage is detected. That is, in this case, the pressure sensor P1 does not need to be provided. Bellows 63,6
The detection of the damage of No. 4 is achieved by the control unit CTL performing an operation according to the flowchart of FIG. In the damage detection mode, the control unit CTL turns on the solenoid valve SVB as shown in FIG.
From this state, the bellows 63 is contracted and the bellows 64 is elongated by switching to the right position (step F1). Then, the solenoid valve SVB is set to the closed position (step F2). Then, in this state, preferably immediately after step F2, the pressure detection value P of the pressure sensor P2 is detected.
2a (first time) is taken in (step F3). Furthermore, after a predetermined time has elapsed (2 to 10 seconds, preferably 5 seconds), the pressure detection value P2b (2
The second time) is taken in (step F4). If the contracted bellows 63 is not broken, the two pressure detection values P2a and P2b are substantially equal to each other, and if broken, a large difference is generated between the pressure detection values P2a and P2b.

Thereafter, the control unit CTL switches the solenoid valve SVB to the left position (step F5), extends the bellows 63 and contracts the bellows 64, and then switches the solenoid valve SVB to the closed position (step S5). F
6). In this state, preferably immediately after step F6,
The pressure detection value P3a (first time) of the pressure sensor P3 is acquired (step F7), and further after a predetermined time has elapsed (2-1.
0 seconds later, preferably 5 seconds later) again, the pressure sensor P3
The pressure detection value P3b (second time) is captured (step F8). If the bellows 64 in the contracted state is not broken, the pressure detection values P3a and P3b are substantially equal, and if the bellows 64 is broken, the pressure detection values P3a and P3b are set.
There will be a large difference in 3b.

After that, the differential pressure | P2a-P2b | and the differential pressure | P3a-P3b | are obtained (step F9), and the first
Similar to the above embodiment, the damage detection process of the bellows 63, 64 is performed (step F10), and if the damage is detected, the abnormality process is performed (step F11). Thus, in this embodiment, the bellows 63, 64
Cylinder 6 with one of them held in a contracted state
The air chambers 1 and 62 are hermetically sealed, and the pressure of the air chamber of the bellows in the contracted state is detected twice at different times. When the difference between the two pressure detection values is large, it can be determined that the bellows on the contracted side is damaged. In this way, the same effect as in the case of the sixth embodiment described above can be achieved.

In this embodiment, the solenoid valve S
VB to the right position in step F1, step F5
Although the position is switched to the left position in step S1, the switch may be switched to the left position in step F1 and to the right position in step F5. FIG. 13 is a flow chart for explaining the operation of the bellows breakage detection mechanism according to the eighth embodiment of the present invention in the bellows breakage detection mode. In the description of this embodiment, reference is made again to FIG. 5 above.

In this embodiment, the output signals of the pressure sensors P2 and P3 shown in FIG. 5 are used, and the bellows 63, 6 are used without using the output signal of the pressure sensor P1.
4 damage is detected. In this case, the pressure sensor P1 does not need to be provided. The detection of breakage of the bellows 63, 64 is achieved by the control unit CTL performing an operation according to the flowchart of FIG. In the breakage detection mode, the control unit CTL holds the position of the bellows 63 which is extended with the solenoid valve SVC set to the closed position (state shown) (step G1). Then, the control unit CTL opens the solenoid valve SV3 to pressurize the air chamber of the cylinder 61 (step G2) and then closes the solenoid valve SV3 to maintain the pressurized state of the air chamber of the cylinder 61. (Step G
3). In this state, preferably immediately after step G3, the control unit CTL sets the pressure detection value P2 of the pressure sensor P2.
a (first time) is fetched (step G4), and after a predetermined time (2 to 10 seconds, preferably 5 seconds) has elapsed, the pressure detection value P2b (second time) of the pressure sensor P2 is fetched again (step G5).

Then, the control unit CTL and the solenoid valve SVC are switched to the right position to contract the bellows 63, and
The bellows 64 is extended (step G6). afterwards,
The control unit CTL switches the solenoid valve SVC to the closed position and holds the bellows 64 in the extended state (step G).
7). Then, after the solenoid valve SV4 is further opened to pressurize the air chamber of the cylinder 62 on the side of the extending bellows 64 (step G8), the solenoid valve SV4 is closed and the pressurized state is maintained (step G8). G9). In this state,
The pressure detection value P3a (first time) of the pressure sensor P3 is fetched (step G10). Furthermore, after a predetermined time has passed (2 to
After 10 seconds, preferably 5 seconds), the control unit CTL fetches the pressure detection value P3b (second time) of the pressure sensor P3 again (step G11).

After that, the differential pressure | P2a-P2b | and the differential pressure | P3a-P3a | are obtained (step G12), and it is determined whether or not the bellows is broken as in the case of the first embodiment (step G13). Further, if breakage of the bellows is detected, abnormality processing (step G14) is performed. In this way, also with this embodiment, the same effect as that of the sixth embodiment can be obtained.

Further, for example, in steps G2 and G3, the solenoid valve SV4 is opened and closed to pressurize the air chamber of the cylinder 62, and in steps G4 and G5, the pressure sensor P3 is used.
Of the output of step G8,
In G9, the solenoid valve SV3 is opened / closed to pressurize the air chamber of the cylinder 61, and the outputs of the pressure sensor P2 are taken in twice in steps G10 and G11. Can be done in.

Further, the control unit CTL operates according to the flowchart shown in FIG.
Damage detection for 3 and 64 can be done in parallel.
That is, the solenoid valve SVC is closed as shown in FIG. 5, the bellows 63 is held in the expanded state, and the bellows 64 is held in the contracted state (step G′1). next,
Open the solenoid valves SV3 and SV4 to open the cylinders 61, 6
Both air chambers of No. 2 are pressurized (step G'2), and then these solenoid valves SV3 and SV4 are closed to maintain the pressurized state of both air chambers (step G'3).

In this state, preferably immediately after step G'3, the control unit CTL takes in the pressure detection values P2a and P3a of the pressure sensors P2 and P3 (step G ').
4) Further, after a lapse of a predetermined time (after 2 to 10 seconds, preferably 5 seconds), the pressure detection values P2a and P3a of the pressure sensors P2 and P3 are fetched again (step G'5). The subsequent operations of steps G′6 to G′8 are similar to the operations of steps G12 to G14 of FIG.

In this way, the bellows 63 and 64 are
The damage detection of can be completed in a short time. Figure 15
FIG. 13 is a flow chart for explaining the operation of the bellows breakage detection mechanism according to the ninth embodiment of the present invention in the bellows breakage detection mode. In the description of this embodiment, reference is made again to FIG. 7 above.

In this embodiment, the output signal of the pressure sensor P2 shown in FIG. 7 is used, and the breakage of the bellows 63 is detected without using the output signal of the pressure sensor P1. That is, in this case, the pressure sensor P1 does not need to be provided. The detection of breakage of the bellows 63 is achieved by the control unit CTL performing an operation according to the flowchart of FIG. In the damage detection mode, the control unit C
The TL closes the solenoid valve SV5, for example, when the bellows 63 is maximally expanded (step H1). After that, the control unit CTL opens the solenoid valve SV6 to open the cylinder 6
The air chamber of No. 1 is pressurized (step H2), and then this solenoid valve SV6 is closed (step H3). Then, in this state, the control unit CTL captures the detection output P2a (first time) of the pressure sensor P2, preferably immediately after step H3 (step H4). After that, the control unit CTL fetches the detection output P2b (second time) of the pressure sensor P2 again after a lapse of a predetermined time (after 2 to 10 seconds, preferably after 5 seconds) (step H5).

Further, the control unit CTL controls the differential pressure | P2a-
P2b | is calculated (step H6), and based on this differential pressure and the set differential pressure Δref, a determination for damage detection of the bellows 63 is made in the same manner as in the first embodiment (step H7). The differential pressure | P2a-P2b | is the set differential pressure Δref
If the above is the case, the same abnormality processing as in the case of the fourth embodiment is performed (step H8).

As described above, according to this embodiment, since the breakage of the bellows 63 of the single bellows type bellows pump 25 can be detected based on the time change of the pressure inside the air chamber of the cylinder 61, it is accurate and quick. The bellows breakage detection process is realized. The solenoid valve SVD is switched to the right position, air is supplied into the air chamber of the cylinder 61, and the bellows 63 is in a contracted state.
If the operation from 1 is performed, it is possible to detect the breakage of the bellows 63 when the bellows 63 is in the contracted state.
In this case, air from the solenoid valve SVD causes the cylinder 6
Since it is possible to pressurize the air chamber of No. 1, the air supply line 90, the regulator 91, and the solenoid valve SV6.
Need not be provided.

FIG. 16 is a flow chart for explaining the operation of the bellows breakage detection mechanism according to the tenth embodiment of the present invention in the bellows breakage detection mode. In the description of this embodiment, reference is again made to FIG. 1 above. Also,
16, steps in which the same processes as those in the above-described steps shown in FIG. 10 are performed are designated by the same reference numerals as those in FIG.

Also in this embodiment, as in the case of the embodiment of FIG. 10, the output signals of the pressure sensors P2 and P3 shown in FIG. 1 are used, and the output signals of the pressure sensor P1 are not used, and the bellows 63, 64 breaks are detected. That is, in this case, the pressure sensor P1 does not need to be provided. However, in this embodiment, the output signals of the pressure sensors P2 and P3 are respectively captured only once. That is, after closing the solenoid valve SV1 in step E3, the pressure detection value P2a of the pressure sensor P2 is taken in after a predetermined time has elapsed (for example, 2 to 10 seconds later, preferably 5 seconds later) (step S3). E24). In step E9, the solenoid valve SV
After closing 2, the pressure detection value P3a of the pressure sensor P3 is taken in after a lapse of a predetermined time (for example, after 2 to 10 seconds, preferably after 5 seconds) (step E30).

After that, in step E33, the detected pressure values P2a and P3a are compared with the reference pressure Pref (corresponding to the function of the comparing portion). This reference pressure Pref
Indicates that the pressure generated by the pressure regulator 21 is 3.
For 0kgf / cm ^2, 0.5 to 2.7kgf / cm ^2, is preferably set to about 2.0 kgf / cm ^2. Bellows 6
If there is no damage in 3, 64, the pressure in the air chamber of the cylinders 61, 62 is maintained, so the pressure detection values P2a, P3
If either a is equal to or lower than the reference pressure Pref, it can be determined that the bellows 63 or 64 is damaged.

Therefore, if any of the pressure detection values P2a and P3a is less than or equal to the reference pressure Pref, the abnormality processing is performed (step E14). As described above, according to this embodiment, the pressures of the pressure sensors P2 and P3 need only be detected once, respectively.
The control operation of L can be simplified.

Similar modifications can be made to the embodiment of FIG. That is, as shown in FIG. 17, the solenoid valve S
After V1 is closed, a predetermined time elapses (for example, 2 to 10).
After 2 seconds, preferably 5 seconds), the pressure detection values P2a and P3a of the pressure sensors P2 and P3 are fetched (step E ′).
24). Then, the pressure detection values P2a and P3a are compared with the reference pressure Pref (step E'27), and if any of the pressure detection values P2a and P3a is equal to or less than the reference pressure Pref,
Abnormality processing (step E'8) may be performed.

Note that, in FIG. 17, steps in which the same processing as each step shown in FIG. 11 is performed are shown in FIG.
The same reference numerals as in the above case are attached. Similarly, regarding each of the embodiments shown in FIGS. 12, 13, 14 and 15, if the pressure detection values of the pressure sensors P2 and P3 are fetched only once, the pressure detection values are compared with the reference pressure Pref. Based on, it is possible to detect the breakage of the bellows.

That is, in the embodiment shown in FIG.
Instead of the processing of steps F3 and F4, the same processing as step E24 of FIG. 16 is performed, and steps F7, F8, F
9, instead of the process of F10, step E30 of FIG.
The same processing as E33 may be performed. Further, in the embodiment of FIG. 13, the same processing as step E24 of FIG. 16 is performed instead of the processing of steps G3 and G4, and step E30 of FIG. 16 is performed instead of the processing of steps G10, G11, G12, and G13. , E33 may be performed.

Further, in the embodiment of FIG. 14, instead of the processing of steps G'4, G'5, G'6, G'7, the same processing as steps E'24, E'27 of FIG. 17 is performed. Should be done. Further, in the embodiment of FIG. 15, instead of the processing of steps H4 and H5, the processing of FIG.
The same process as step E24 in step S24 may be omitted, and step H6 may be omitted, and instead of the process in step H7, a process of comparing the pressure detection value P2 with the reference pressure Pref may be performed. Then, the pressure detection value P2 is the reference pressure Pre.
The abnormality process (step H8) may be performed when f or less.

Although some embodiments of the invention have been described, the invention may take other embodiments. For example, in the above-described embodiment, the case where the breakage of the bellows 63 and 64 of the bellows pumps 5 and 25 that pressure-feeds the processing liquid toward the nozzle 2 is detected has been described. However, as shown in FIG. The bellows breakage detection mechanism according to each of the above-described embodiments can be applied to the bellows pump 5A for circulating the processing liquid in the tank 3. Such circulation of the treatment liquid is mainly performed for stirring the treatment liquid. The bellows breakage detection process for the bellows pump 5A for circulating the treatment liquid as described above is performed without considering the timing of discharging the treatment liquid from the nozzle 2.
It can be performed at any timing. However, in this case, the circulation path 11, the air valve 12, and the flow rate adjusting valve 13 in FIG. 18 may be omitted.

Further, in the above embodiment, the bellows pump 5 is operated all the time, and when the processing liquid is not discharged from the nozzle 22, the processing liquid is returned to the processing liquid tank 3 through the circulation path 32. However, if the temperature control of the processing liquid is not important, the circulation path 32 need not be provided. However, in this case, it is preferable to stop the bellows pump 5 at the same time when the air valve 30 is closed to stop the supply of the processing liquid.

Further, in the above embodiment, the control section CTL performs the control operation according to the damage detection mode immediately after the discharge of the processing liquid from the nozzle 2 is completed. If the discharge is not performed, the control operation according to the damage detection mode can be performed at an arbitrary timing, and for example, it may be performed every time the processing lot of the substrate is finished or the apparatus is stopped. .

In the above description of the embodiment, the pressure sensors P2 and P3 as the second air pressure detecting means detect the pressure in the air chambers of the cylinders 61 and 62. P3 is an intermediate portion of the air pipe between the solenoid valves SV1 and SV2 and the air chambers of the cylinders 61 and 62 in the configuration of FIG. 1, and in the configuration of FIG.
In the middle of the air pipe between the solenoid valve SVB and the air chambers of the cylinders 61 and 62, in the configuration of FIG. 5, the solenoid valve SV
3, SV4 and the middle part of the air pipe between the air chambers of the cylinders 61 and 62 or the solenoid valve SVC and the cylinders 61 and 62.
7 in the middle of the air pipe, and in the configuration of FIG. 7, the middle of the air pipe between the solenoid valve SV6 and the air chamber of the cylinder 61 or between the solenoid valve SV5 and the air chamber of the cylinder 61. It may be arranged in the middle of the air pipe between them, or in the middle of the air pipe between the solenoid valve SVD and the cylinder 61 in the configuration of FIG. That is, the detection of the pressure in the air chamber is also achieved by detecting the pressure in the space (air pipe, etc.) communicating with the air chamber, and the pressure at any position in the air chamber or the space communicating with the air chamber. May be detected.

Further, in the above embodiment, an example in which the present invention is applied to an apparatus for processing a wafer in a single wafer is explained, but the present invention is not limited to such a glass substrate for a liquid crystal display device. It can be widely applied to an apparatus for processing a substrate to be processed, and can also be widely applied to a batch type substrate processing apparatus for collectively processing a plurality of substrates to be processed. You can

In addition, various modifications can be made within the scope described in the claims.

[Brief description of drawings]

FIG. 1 is an illustrative view showing a basic configuration relating to a bellows pump to which a bellows breakage detection mechanism according to a first embodiment of the present invention is applied.

FIG. 2 is a flowchart for explaining the operation of the first embodiment in a bellows breakage detection mode.

FIG. 3 is an illustrative view showing a basic configuration relating to a bellows breakage detection mechanism according to a second embodiment of the present invention.

FIG. 4 is a flowchart for explaining an operation of the second embodiment in a bellows breakage detection mode.

FIG. 5 is an illustrative view showing a basic configuration relating to a bellows breakage detection mechanism according to a third embodiment of the present invention.

FIG. 6 is a flowchart for explaining the operation of the third embodiment in the bellows breakage detection mode.

FIG. 7 is an illustrative view showing a basic configuration relating to a bellows breakage detection mechanism according to a fourth embodiment of the present invention.

FIG. 8 is a flowchart for explaining the operation of the fourth embodiment in the bellows breakage detection mode.

FIG. 9 is an illustrative view showing a configuration of a bellows breakage detection mechanism according to a fifth embodiment of the present invention.

FIG. 10 is a flowchart for explaining the operation of the bellows breakage detection mechanism according to the sixth embodiment of the present invention in the bellows breakage detection mode.

FIG. 11 is a flowchart for explaining a modified example of the sixth embodiment.

FIG. 12 is a flow chart for explaining the operation of a bellows breakage detection mechanism according to a seventh embodiment of the present invention in a bellows breakage detection mode.

FIG. 13 is a flow chart for explaining the operation of the bellows breakage detection mechanism according to the eighth embodiment of the present invention in the bellows breakage detection mode.

FIG. 14 is a flowchart illustrating a modified example of the eighth embodiment.

FIG. 15 is a flowchart for explaining the operation of the bellows breakage detection mechanism according to the ninth embodiment of the present invention in the bellows breakage detection mode.

FIG. 16 is a flowchart for explaining the operation of the bellows breakage detection mechanism according to the tenth embodiment of the present invention in the bellows breakage detection mode.

FIG. 17 is a flowchart for explaining a modified example of the tenth embodiment.

FIG. 18 is a systematic diagram schematically showing the overall configuration of the substrate processing apparatus.

[Explanation of symbols]

W wafer 1 spin chuck 2 nozzles 3 treatment liquid tank 4 Processing liquid supply path 5 Bellows pump 11 Circulation path 22 Drive air supply line 63 Bellows 64 bellows SVA solenoid valve P1, P2, P3 pressure sensor CTL control unit SVB solenoid valve SVC solenoid valve 81,82 Detection air supply line 25 bellows pump SVD solenoid valve 90 Detection air supply line

Claims (16)

(57) [Claims] 1. A bellows breakage detection mechanism for detecting breakage of the bellows of a bellows pump which drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver liquid. An air supply line that connects the air chamber of the bellows pump to an air supply source, an air supply valve that is interposed in the air supply line and that can be opened and closed to supply air to the air chamber, and an air supply line. Is connected to the air supply source side of the air supply valve and is provided with a first air pressure detecting means for detecting the pressure of air. 2. When the air supply valve is closed, the primary pressure, which is the pressure on the air supply source side of the air supply line, is detected by the first air pressure detecting means. The air supply so that the secondary pressure, which is the pressure on the air chamber side of the air supply valve of the air supply line, is detected by the first air pressure detection means when the air supply valve is opened. The bellows breakage detection mechanism of the bellows pump according to claim 1, further comprising a control unit that controls the valve and the first air pressure detection means. 3. The air supply line further comprises a second air pressure detecting means connected to the air chamber side of the air supply line, the second air pressure detecting means detecting an air pressure.
Alternatively, the bellows breakage detection mechanism of the bellows pump described in 2. 4. When the air supply valve is closed, the primary pressure, which is the pressure on the air supply source side of the air supply line, is detected by the first air pressure detecting means. , The air supply so that the second air pressure detecting means detects the secondary pressure, which is the pressure on the air chamber side of the air supply valve of the air supply line when the air supply valve is opened. The bellows breakage detection mechanism for a bellows pump according to claim 3, further comprising a control unit that controls the valve, the first air pressure detection means, and the second air pressure detection means. 5. A bellows breakage detection mechanism for detecting breakage of the bellows of a bellows pump that drives the bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver liquid. An air supply line that connects the air chamber of the bellows pump to an air supply source, an air supply valve that is interposed in the air supply line and that can be opened and closed to supply air to the air chamber, and an air supply line. Is connected to the air chamber side of the air supply valve and is provided with a second air pressure detecting means for detecting the pressure of the air. 6. When the air supply valve is closed, the pressure on the air chamber side of the air supply line is at least once after a predetermined time has passed since the air supply valve was closed. The bellows breakage detection of the bellows pump according to claim 5, further comprising a control unit for controlling the air supply valve and the second air pressure detection means so that the second air pressure detection means detects. mechanism. 7. The bellows pump according to claim 6, wherein the control section includes a comparison section for comparing the pressure of the air detected by the second air pressure detection means with a predetermined reference pressure. Bellows breakage detection mechanism. 8. The control section, when the air supply valve is closed, changes the pressure at least twice at a time closer to the air chamber side than the air supply valve of the air supply line to the second air. The bellows breakage detection mechanism for the bellows pump according to claim 6, wherein the air supply valve and the second air pressure detection means are controlled so as to be detected by the pressure detection means. 9. The air supply line is a drive air supply line for supplying drive air for driving the bellows to the air chamber. Bellows pump bellows breakage detection mechanism. 10. A drive air supply line for supplying drive air for driving the bellows to the air chamber, wherein the air supply line is provided in the air chamber separately from the drive air supply line. 9. A detection air supply line for supplying detection air to the detection air supply line.
The bellows breakage detection mechanism of the bellows pump described in any one of 1. 11. The control unit controls opening / closing of the air supply valve so as to supply air from the air supply line to the air chamber when the bellows of the bellows pump is in an expanded state. Claims 1 to 1
0. A bellows breakage detection mechanism for a bellows pump according to any one of 0. 12. A processing liquid flow line in which at least one end side is connected to a processing liquid tank in which a processing liquid for processing a substrate is stored and through which the processing liquid flows, and a processing liquid flow line. A bellows pump that is installed and that drives a bellows by the pressure of air contained in an air chamber that is provided adjacent to the bellows to deliver a processing liquid; and a bellows pump provided in association with the bellows pump. And a bellows breakage detection mechanism for the bellows pump. 13. A processing liquid supply line has a discharge port at one end opposite to the processing liquid tank, which discharges the processing liquid onto a substrate. So that the processing liquid is circulated to the processing liquid tank during the period when the
13. The processing liquid circulation line, further comprising a processing liquid supply line having one end connected between a bellows pump and a discharge port of the processing liquid supply line and the other end connected to the processing liquid tank. Substrate processing equipment. 14. A bellows breakage detection method for detecting breakage of the bellows of a bellows pump that drives a bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver a liquid. Then, after the air having a predetermined primary pressure is supplied to the air chamber of the bellows pump, the secondary pressure of the air in the air chamber is detected, and based on the differential pressure between the primary pressure and the secondary pressure. The bellows breakage detection method for a bellows pump is characterized by detecting breakage of the bellows. 15. A bellows breakage detection method for detecting breakage of the bellows of a bellows pump that drives a bellows by the pressure of air contained in an air chamber provided adjacent to the bellows to deliver a liquid. The breakage of the bellows pump is characterized by detecting breakage of the bellows pump based on the temporal change of the air pressure in the air room during the period when the air supply to the bellows pump is stopped. Detection method. 16. A bellows breakage detecting method for detecting breakage of the bellows of a bellows pump for driving a bellows to deliver a liquid by the pressure of air contained in an air chamber provided adjacent to the bellows. It is characterized in that breakage of the bellows is detected based on a comparison between the pressure of the air in the air chamber and a predetermined reference pressure during the period when the air supply to the air chamber of the bellows pump is stopped. Bellows pump bellows damage detection method.