TWI723046B - How to check the gas supply system - Google Patents

Abstract

The subject of the present invention is to inspect a gas supply system for a substrate processing apparatus.

In one embodiment, the flow rate of the gas supplied into the processing container of the substrate processing apparatus is controlled by the first flow controller in accordance with the set flow rate. In addition, the gas from the first flow controller is also supplied to the second flow controller. When the output flow rate of the first flow controller becomes a constant state, the first measurement pressure value of the first pressure gauge of the second flow controller and the second measurement pressure value of the second pressure gauge are obtained. The absolute value of the difference between the first measured pressure value and the reference pressure value and the absolute value of the difference between the second measured pressure value and the reference pressure value are calculated, and the average of the absolute values of these differences is calculated. The absolute value and average value of the difference are compared with the first to third thresholds respectively.

Description

How to check the gas supply system

The embodiment of the present invention relates to a method of an inspection gas supply system for supplying gas in a processing container of a substrate processing apparatus.

A substrate processing apparatus, such as a plasma processing apparatus, processes a substrate by supplying gas in its processing container from a gas supply system. The substrate processing apparatus sometimes performs multiple processing in sequence. Therefore, the gas supply system sometimes controls the flow rate of more than one gas among a plurality of gases, and supplies more than one gas whose flow rate is controlled into the processing container.

Specifically, the gas supply system includes a plurality of first pipes, a plurality of first valves, a plurality of flow controllers, a plurality of second pipes, a plurality of second valves, a third pipe, and a third valve. The plural first pipes are respectively connected to plural gas sources. The plural first valves are respectively provided in the plural first pipes. The plural flow controllers are respectively arranged downstream of the plural first pipes. The plural second pipes are respectively arranged downstream of the plural flow controllers. The plural second valves are respectively provided in the plural second pipes. The third pipe is connected to the plural second pipes. The third valve is provided in the third pipe. Downstream of the third valve, the third piping system is connected to the processing container.

As the plural flow controllers, the types described in the following Patent Documents 1 to 3, that is, pressure-controlled flow controllers can be used. This type of flow controller has an orifice, a control valve, a first pressure gauge, and a second pressure gauge. The control valve is arranged on the upstream side of the orifice. The first pressure gauge is configured to measure the pressure inside the pipe between the control valve and the orifice. The second pressure gauge is configured to measure the pressure inside the pipe downstream of the orifice. This type of flow controller controls the control valve in response to the set flow. When the measured pressure value of the first pressure gauge is about twice or more than the measured pressure value of the second pressure gauge, the method to reduce the difference between the output flow rate obtained from the measured pressure value of the first pressure gauge and the set flow rate To control the control valve. In addition, when the measured pressure value of the first pressure gauge is approximately 2 times smaller than the measured pressure value of the second pressure gauge, it should be reduced The control valve is controlled by the difference between the output flow rate and the set flow rate obtained from the difference between the measured pressure value of the first pressure gauge and the measured pressure value of the second pressure gauge.

Prior art literature

Patent Document 1 Japanese Patent No. 3291161 Specification

Patent Document 2 Japanese Patent No. 4102564 Specification

Patent Document 3 Japanese Patent No. 4866682 Specification

On the other hand, the state of the gas supply system changes with the elapse of the operating time of the substrate processing apparatus. If the state of the gas supply system changes from the previous state, even if the gas is supplied to the processing container of the substrate processing apparatus according to the same recipe, the flow rate of the gas supplied to the processing container during substrate processing will be the same as that used to process other substrates. In the past, the gas flow rate supplied into the processing container became a different flow rate. As a result, the state of the substrate processed before and the state of the substrate processed later may be different. Therefore, the gas supply system must be checked.

In one aspect, a method for inspecting a gas supply system (used to supply gas into a processing container of a substrate processing apparatus) is provided. The gas supply system includes plural first pipes, plural first valves, plural flow controllers, plural second pipes, plural second valves, third pipes, and third valves. The plural first pipes are respectively connected to plural gas sources. The plural first valves are respectively provided in the plural first pipes. The plurality of flow controllers are respectively provided downstream of the plurality of first pipes, and are respectively connected to the plurality of first pipes. The plurality of second pipes are respectively arranged downstream of the plurality of flow controllers, and are respectively connected to the plurality of flow controllers. The plural second valves are respectively provided in the plural second pipes. The third pipe is provided downstream of the plurality of second pipes, and is connected to the plurality of second pipes. The third valve is provided in the third pipe. The third pipe is connected to the processing container downstream of the aforementioned third valve. The plurality of flow controllers respectively have: an orifice; a fourth pipe, which extends upstream of the orifice and is connected to the first pipe; a fifth pipe, which extends downstream of the orifice and is connected to the second pipe; and a control valve, which is arranged at the first pipe. 4 piping; the first pressure gauge is used between the control valve and the orifice to measure the internal pressure of the fourth pipe; and the second pressure gauge is used to measure the internal pressure of the fifth pipe.

One aspect of the method includes the following processes: (i) Controlling the flow of gas supplied into the processing vessel via a first flow controller among the plurality of flow controllers, wherein the gas flow corresponds to the first flow controller Controlled at the set flow rate (hereinafter referred to as "flow control process"); (ii) During the execution of the flow control process, open one or more of the second valves among the plurality of second valves. The one or more second valves are the second valves in the plurality of flow controllers that do not control more than one of the gas flow rates. Set downstream of the flow controller; (iii) Calculate more than one absolute value of the first difference and more than one absolute value of the second difference, where the one or more absolute values of the first difference are individually determined in the first flow control During the constant period in which the output flow of the device becomes a constant state, between the first constant pressure value measured by the first pressure gauge of one or more second flow controllers and the first reference constant pressure value The absolute value of the difference, one or more second absolute values of the difference are the second constant pressure value and the second reference constant measured by the second pressure gauge of the one or more second flow controllers during the constant period. The absolute value of the difference between the normal pressure values, the first reference constant pressure value and the second reference constant pressure value are respectively determined earlier than the execution period, and control the supply to the processing container in accordance with the set flow rate. When the output flow of the first flow controller of the gas flow becomes the constant state, the measured pressure values respectively measured by the first pressure gauge and the second pressure gauge of the one or more second flow controllers; (iv) Calculate the average value of one or more first difference absolute values and one or more second difference absolute values; (v) determine whether one or more first difference absolute values are individually greater than the first threshold and one or more second absolute values Whether the absolute value of the difference is individually larger than the second threshold value and whether the average value is larger than the third threshold value.

In the above method, the gas output from the first flow controller at a flow rate corresponding to the set flow rate during the execution period is supplied to the fourth pipe and the fifth pipe of one or more second flow controllers in addition to being supplied to the processing container. Therefore, more than one first constant pressure value and more than one second constant pressure value reflect the output flow rate of the first flow controller in the constant state. In addition, the first reference constant pressure value is a period earlier than the execution period (hereinafter referred to as the "reference period") corresponding to the same set flow rate and the output flow rate of the first flow controller outputting gas becomes a constant state. The first constant pressure value obtained. In addition, the second reference constant pressure value is the second constant pressure value obtained when the output flow rate of the second flow controller outputting gas corresponding to the same set flow rate during the reference period becomes a constant state. Therefore, by determining whether one or more first absolute difference values are individually greater than the first threshold, whether one or more second absolute differences are individually greater than the second threshold, and whether the average value is greater than the third threshold, it is possible to determine whether the first absolute value of the execution period is greater than the first threshold. 1 Whether the output flow rate of the constant state of the flow controller changes from the output flow rate of the constant state of the first flow controller in the reference period. Therefore, according to this method, the inspection of the gas supply system becomes possible. In addition, when more than one absolute value of the first difference is individually greater than the first threshold, when more than one absolute value of the second difference is individually greater than the second threshold, or When the average value is greater than the third threshold, the control unit of the substrate processing device can issue an alarm signal, or the control unit of the substrate processing device can stop the program executed by the substrate processing device.

In one embodiment, the one or more second flow controllers may be a plurality of second flow controllers that do not control the gas flow during the above-mentioned execution period among the plurality of flow controllers. In this embodiment, one or more first difference absolute values and one or more second difference absolute values are obtained by calculating the first pressure gauge measured by a plurality of second flow controllers in the constant period. The absolute value of the difference between the constant pressure value and the first reference constant pressure value, and the second constant pressure value and the second reference measured by the second pressure gauge of the multiple second flow controller during the constant period The complex first difference absolute value and the complex second difference absolute value are obtained from the absolute value of the difference between the constant pressure values. The above average value is the average value of the complex first difference absolute value and the aforementioned complex second difference absolute value. In the aforementioned process for making the determination, it can be determined whether the plural first absolute difference values are individually greater than the first threshold value, whether the plural second difference absolute values are individually greater than the second threshold value, and whether the average value is greater than the third threshold value. According to this embodiment, since the measured pressure values of the first pressure gauge and the second pressure gauge of the plurality of second flow controllers are used, the output of the first flow controller in the constant state during the execution period can be detected with higher sensitivity. Whether the flow rate changes relative to the output flow rate of the first flow controller in a constant state during the reference period.

In one embodiment, the method may further include the following process: obtaining the measured pressure of the second pressure gauge of the first flow controller at a plurality of time points in the transition period before the above-mentioned constant period during the above-mentioned execution period The cumulative value of the value; and, the comparison of the cumulative value with the established reference value. The predetermined reference value may be the cumulative value of the measured pressure value of the second pressure gauge of the first flow controller during the transition period of the reference period. The measured pressure value of the second pressure gauge of the first flow controller used in this embodiment reflects the output flow rate of the first flow controller. Therefore, the above-mentioned integrated value reflects the transient characteristics of the output flow rate of the first flow controller during the execution period. By comparing the correlation integrated value with the predetermined reference value, it can be determined whether the transition characteristic of the output flow rate of the first flow controller has changed to an unacceptable degree during the execution period. In addition, when the absolute value of the difference between the integrated value and the predetermined reference value is greater than the predetermined value, it can be determined that the transient characteristic change of the output flow rate of the first flow controller during the execution period is not tolerable. In addition, when it is determined that the transition characteristic of the output flow rate of the first flow controller changes to an unacceptable level during the execution period, it can be sent by the control unit of the substrate processing apparatus. When an alarm signal is issued, the control unit of the substrate processing device can also stop the program executed by the substrate processing device.

In one embodiment, the method may further include the following process: calculating the first pressure gauge of the second flow controller during the execution period and at least one of the plural time points in the transition period before the constant period The process of measuring the accumulated value of the pressure value; and the process of comparing the accumulated value with the established reference value. This predetermined reference value may be the cumulative value of the measured values of the first pressure gauge of the second flow controller at multiple points in the transition period in the reference period. The measured pressure value of the first pressure gauge of the second flow controller used in this embodiment also reflects the output flow rate of the first flow controller. By comparing the relevant integrated value with the established reference value, it can be determined whether the transient characteristics of the output flow of the first flow controller during the execution period have changed to an unacceptable degree. In addition, when the absolute value of the difference between the integrated value and the predetermined reference value is greater than the predetermined value, it can be determined that the transient characteristic change of the output flow rate of the first flow controller during the execution period is not tolerable. In addition, when the transition characteristic of the output flow rate of the first flow controller changes to an unacceptable level during the execution period of the judgment, an alarm signal can be issued by the control section of the substrate processing apparatus, or the control section of the substrate processing apparatus To stop the program executed by the substrate processing device.

Another aspect is to provide a method of inspecting a gas supply system that supplies gas into the processing container of the substrate processing apparatus. The gas supply system includes plural first pipes, plural first valves, plural flow controllers, plural second pipes, plural second valves, third pipes, and third valves. The plural first pipes are respectively connected to plural gas sources. The plural first valves are respectively provided in the plural first pipes. The plurality of flow controllers are respectively provided downstream of the plurality of first pipes, and are respectively connected to the plurality of first pipes. The plurality of second pipes are respectively arranged downstream of the plurality of flow controllers, and are respectively connected to the plurality of flow controllers. The plural second valves are respectively provided in the plural second pipes. The third pipe is provided downstream of the plurality of second pipes, and is connected to the plurality of second pipes. The third valve is provided in the third pipe. The third pipe is connected to the processing container downstream of the third valve. The plural flow controllers respectively have: an orifice; a fourth pipe, which extends upstream of the orifice and is connected to the first pipe; a fifth pipe, which extends downstream of the orifice and is connected to the second pipe; a control valve, which is connected to the second pipe Set in the fourth pipe; the first pressure gauge is used between the control valve and the orifice to measure the internal pressure of the fourth pipe; and the second pressure gauge is used to measure the internal pressure of the fifth pipe. The gas supply system is provided with a third pressure gauge for measuring the internal pressure of the third pipe.

The above-mentioned other aspects of the method include the following processes: (i) A process of controlling the flow of gas supplied into the processing vessel via a first flow controller among a plurality of flow controllers, wherein the gas flow rate is the first flow rate The controller is controlled corresponding to the set flow rate; (ii) The process of obtaining the absolute value of the difference, the absolute value of which is measured by the third pressure gauge during the constant period when the output flow of the first flow controller becomes a constant state The absolute value of the difference between the output constant pressure value and the reference constant pressure value. The reference constant pressure value is determined earlier than the execution period of the process that controls the gas flow. It controls the supply corresponding to the set flow. The measured pressure value measured by the third pressure gauge when the output flow rate of the first flow controller of the gas flow rate in the processing vessel becomes a constant state; (iii) The process of determining whether the absolute value of the difference is greater than the threshold value.

In the method of the other aspect described above, the gas system output from the first flow controller flows to the third pipe at a flow rate corresponding to the set flow rate during the execution period. Therefore, the constant pressure value reflects the output flow rate of the first flow controller in the constant state. In addition, when the reference constant pressure value is earlier than the execution period (ie the reference period), when the output flow rate of the first flow controller outputting gas corresponding to the same set flow rate becomes a constant state, the third The constant pressure value obtained by the pressure gauge. Therefore, by determining whether the absolute value of the difference between the constant pressure value and the reference constant pressure value is greater than the threshold value, it can be determined whether the output flow rate of the constant state of the first flow controller during the execution period is controlled from the first flow rate in the reference period The output flow rate of the constant state of the device has changed. Therefore, according to this method, the inspection of the gas supply system becomes possible. In addition, when the absolute value of the difference is greater than the threshold, the control unit of the substrate processing apparatus can issue an alarm signal, and the control unit of the substrate processing apparatus can also stop the program executed by the substrate processing apparatus.

In one embodiment, the method may further include: the process of obtaining the cumulative value of the measured pressure value of the third pressure gauge during the execution period and the plural time points in the transition period before the more constant period; and, comparing the cumulative value The manufacturing process with the established benchmark value. The predetermined reference value used in this embodiment may be the cumulative value of the measured pressure value of the third pressure gauge in the transition period of the reference period. The measured pressure value of the third pressure gauge used in this embodiment reflects the output flow rate of the first flow controller. Therefore, the above-mentioned integrated value reflects the transient characteristics of the output flow rate of the first flow controller during the execution period. By comparing the relevant integrated value with the established reference value, it can be determined whether the transient characteristics of the output flow of the first flow controller during the execution period have changed to an unacceptable degree. In addition, when the absolute value of the difference between the integrated value and the predetermined reference value is greater than the predetermined value, it can be determined that the first flow controller during the execution period The transition characteristics of the output flow rate change to an unacceptable degree. In addition, when the transition characteristic of the output flow rate of the first flow controller during the judgment execution period has changed to an unacceptable level, an alarm signal can be issued by the control unit of the substrate processing apparatus, or by the control of the substrate processing apparatus Part to stop the program executed by the substrate processing apparatus.

In one embodiment, the individual control valves of the plurality of flow controllers further have a drive unit including: a piezoelectric element, which is configured to move a valve body used for the opening and closing actions of the control valve; and, a control circuit , Is constructed by applying voltage to the piezoelectric element. In this embodiment, the method may further include the following process: determining whether the voltage applied to the piezoelectric element of the first flow controller during the above-mentioned execution period is the same as the piezoelectric element when the control valve of the first flow controller is fully opened The applied voltage is the same as the preset reference voltage, and it is determined whether the output flow rate of the first flow controller during the above-mentioned execution period is less than the set flow rate. Even if a voltage that makes the control valve fully open is applied to the piezoelectric element, when the output flow rate of the first flow controller is less than the set flow rate, the pressure of the gas supplied to the first flow controller will still be insufficient. For example, in this case, it is considered that the first valve located upstream of the first flow controller malfunctions. According to this embodiment, it is determined whether the voltage applied to the piezoelectric element of the first flow controller during the above-mentioned execution period is the same as the reference voltage, and it is determined whether the output flow rate of the first flow controller during the above-mentioned execution period is less than the set flow rate, It will be possible to detect insufficient supply pressure on the upstream side (primary side) of the first flow controller. In addition, when the voltage applied to the piezoelectric element during the execution period is the same as the reference voltage, and the output flow rate of the first flow controller in the execution period is less than the set flow rate, the control unit of the substrate processing apparatus can be used To issue an alarm signal, it is also possible to stop the program executed by the substrate processing device by the control part of the substrate processing device.

In one embodiment, the method may further include the following process: determining the difference between the measured pressure value of the first pressure gauge of the first flow controller during the execution period and the second pressure gauge of the first flow controller during the execution period Whether the difference between the measured pressure values is below the predetermined value. When the second valve downstream of the first flow controller is closed due to a failure, the measured pressure value of the first pressure gauge of the first flow controller and the measured pressure value of the second pressure gauge of the first flow controller Will become roughly the same. Therefore, according to this embodiment, the failure of the second valve downstream of the first flow controller can be detected. In addition, when the above difference is less than a predetermined value, the control unit of the substrate processing apparatus can issue an alarm signal, or the control unit of the substrate processing apparatus can stop the execution of the substrate processing apparatus. program.

In one embodiment, the method may further include the following process: in a state where the internal gas of the plurality of flow controllers is exhausted, determining whether the measured pressure value of the first pressure gauge of the plurality of flow controllers is greater than the first predetermined value, And to determine whether the measured pressure value of the individual second pressure gauge of the plural flow controller is greater than the second predetermined value. The first pressure gauge and the second pressure gauge are initially set to output a measured value of "0" when the internal gas of the flow controller is exhausted. That is, the zero point adjustment was performed at the initial stage of the first pressure gauge and the second pressure gauge. According to this embodiment, in the state where the internal gas of the plurality of flow controllers is exhausted, when the measured pressure value of the individual first pressure gauge of the plurality of flow controllers is greater than the first predetermined value, the flow controller can be detected The zero point offset of the first pressure gauge. In addition, when the internal gas of the plural flow controllers is exhausted, when the measured pressure value of the second pressure gauge of the plural flow controllers is greater than the second predetermined value, the second pressure of the flow controller can be detected Calculate the zero offset. In addition, when the zero point shift is detected, the control unit of the substrate processing apparatus can issue an alarm signal, and the control unit of the substrate processing apparatus can also stop the program executed by the substrate processing apparatus.

In one embodiment, the method may further include the following process: in a state where the internal gas of the plurality of flow controllers is exhausted, determining the plurality of measured pressure values measured by the individual first pressure gauge of the plurality of flow controllers within a predetermined time Is the absolute value of the difference between the moving average value and the moving average value of the plural measured pressure values measured by the second pressure gauge more than a predetermined value. When the flow controller has no zero offset and the interior of the flow controller is exhausted, the moving average of the measured pressure value of the first pressure gauge and the moving average of the measured pressure value of the second pressure gauge There is almost no difference between. Therefore, when the absolute value of the difference between these two moving averages is greater than the predetermined value, a zero point shift will occur. Therefore, according to this embodiment, zero point detection can be performed. In addition, when the zero point shift is detected, the control unit of the substrate processing apparatus can issue an alarm signal, and the control unit of the substrate processing apparatus can also stop the program executed by the substrate processing apparatus.

In one embodiment, the method may further include the following process: obtaining the first measurement pressure value measured by the individual first pressure gauge of the plurality of flow controllers in a state where the plurality of first valves and the plurality of second valves are closed, and The manufacturing process of the second measured pressure value measured by the second pressure gauge of the multiple flow controller; by inputting the first measured pressure value into a predetermined function, the first measurement is obtained The manufacturing process of the initial pressure value of the second pressure gauge corresponding to the pressure value; and the manufacturing process of comparing the second measured pressure value with the initial pressure value. The method of obtaining this function is to set the internal pressure of each flow controller to various pressures when the plural first valves and plural second valves are closed before each process of the method of this embodiment is implemented. Measure the first measured pressure value measured by the individual first pressure gauge of the plural flow controller and the second measured pressure value measured by the second pressure gauge of the individual plural flow controller, and compare the first measured pressure value with The relationship corresponding to the second measured pressure value is functionalized. If the state of the first pressure gauge and the state of the second pressure gauge of each flow controller are normal, the first valve upstream of the flow controller and the second valve downstream of the flow controller will be closed The measured pressure value of the first pressure gauge of the flow controller (the first measured pressure value) obtained under the input of the above function should be the same as the measured pressure value of the second pressure gauge of the flow controller ( The second measured pressure value) is approximately the same value. Therefore, by comparing the initial pressure value with the second measured pressure value, it can be determined whether one of the first pressure gauge and the second pressure gauge of the flow controller has an error with respect to the initial measured pressure value. In addition, for example, when the second measured pressure value is different from the initial pressure value by more than a predetermined value, it can be determined that one of the first pressure gauge and the second pressure gauge of the flow controller is relative to the initial measured pressure. There is an error in the value. In addition, when it is determined that the measured pressure value of the first pressure gauge and the second pressure gauge of the flow controller has an error with respect to the initial measured pressure value, an alarm signal can be issued by the control unit of the substrate processing device. It is also possible to stop the program executed by the substrate processing apparatus by the control part of the substrate processing apparatus.

In one embodiment, the method may further include the following process: in a state where the plural first valves and plural second valves are closed, the determination is made within a predetermined time by the plural measurement measured by the individual first pressure gauges of the plural flow controllers Is the absolute value of the difference between the moving average value of the pressure value and the moving average value of the plural measured pressure values measured by the second pressure gauge more than a predetermined value. When both the first pressure gauge and the second pressure gauge of the flow controller are normal, and the first valve upstream and the second valve downstream of the flow controller are closed, the measured pressure of the first pressure gauge There is almost no difference between the moving average value of the value and the moving average value of the measured pressure value of the second pressure gauge. Therefore, when the absolute value of the difference between these two moving averages is greater than the predetermined value, it will be a state where the first pressure gauge or the second pressure gauge of the flow controller outputs a measured pressure value with an error. Therefore, according to this embodiment, the first pressure gauge or the second pressure gauge of the flow controller can be measured It is in the state of outputting the measured pressure value with error. In addition, when it is detected that the first pressure gauge or the second pressure gauge of the flow controller is in the state of outputting the measured pressure value with error, an alarm signal can be issued by the control part of the substrate processing apparatus, or by The control part of the substrate processing apparatus stops the program executed by the substrate processing apparatus.

In one embodiment, the method may further include the following process: in a state where the individual control valves of the plurality of flow controllers are in a closed state, it is determined whether a predetermined time has passed. Sometimes the control valve cannot completely block the gas. If the closed state of the control valve continues for a long period of time, it will affect the transient characteristics of the case where the second downstream valve is opened to supply program gas. According to this embodiment, it is possible to detect the state of the control valve that affects the transient characteristics in this way. In addition, when a predetermined time has elapsed when the control valve is closed, the control unit of the substrate processing device can issue an alarm signal, or the control unit of the substrate processing device can stop the execution of the substrate processing device. The procedure.

In one embodiment, the method may further include the following process: when the voltage applied to the individual piezoelectric elements of the plurality of flow controllers and the control valve of the flow controller are closed, the voltage applied to the piezoelectric elements is predetermined When the set reference voltage is the same, it is judged whether the measured pressure value of the individual first pressure gauge of the plural flow controllers has increased above the predetermined value. Even if the applied voltage to the piezoelectric element is set to close the control valve, it is considered that if the measured pressure value of the first pressure gauge increases above the predetermined value, an unacceptable leak will occur in the control valve. According to this embodiment, when the voltage applied to the piezoelectric element is set to close the control valve, it can be determined whether the measured pressure value of the first pressure gauge of the plurality of flow controllers has increased above the predetermined value. An unacceptable leakage of the control valve was detected. In addition, when the control valve leaks, an alarm signal can be issued by the control part of the substrate processing apparatus, and the control part of the substrate processing apparatus can also be used to stop the program executed by the substrate processing apparatus.

In one embodiment, the method may further include the following process: when the plurality of second valves are individually closed, and the voltage applied to the piezoelectric elements of the plurality of flow controllers is the same as the reference voltage, it is determined that the plurality of flow controllers are individually closed. Whether the measured pressure value of the first pressure gauge has decreased. Even if the second valve is closed and the voltage applied to the piezoelectric element is set to close the control valve, it is considered that the measured pressure value of the first pressure gauge has decreased, and it is the second valve downstream of the control valve. A leak has occurred. According to this embodiment, the voltage applied to the piezoelectric element is used to turn off the control In the case of setting the control valve, it is determined whether the measured pressure value of the first pressure gauge has decreased, and the leakage of the second valve can be detected. In addition, when the second valve leaks, an alarm signal can be issued by the control part of the substrate processing apparatus, and the control part of the substrate processing apparatus can also be used to stop the program executed by the substrate processing apparatus.

As explained above, it is possible to check the gas supply system. In particular, while the gas is supplied to the processing container of the substrate processing apparatus via the first flow controller, it can be determined whether the output flow rate of the first flow controller in the constant state is from the constant state of the first flow controller in the reference period The output flow rate has changed.

10‧‧‧Substrate processing equipment

PC‧‧‧Disposal container

12‧‧‧Control Department

GP‧‧‧Gas Supply System

GS‧‧‧Gas source

L1‧‧‧The first piping

L2‧‧‧Second piping

L3‧‧‧3rd piping

V1‧‧‧The first valve

V2‧‧‧Second valve

V3‧‧‧3rd valve

FC‧‧‧Flow Controller

OF‧‧‧Sharp hole

L4‧‧‧4th piping

L5‧‧‧Fifth piping

P1‧‧‧The first pressure gauge

P2‧‧‧The second pressure gauge

20‧‧‧Control circuit

CV‧‧‧Control valve

22‧‧‧Drive

24‧‧‧Control circuit

26‧‧‧Piezoelectric element

30‧‧‧Valve body

Fig. 1 is a diagram illustrating a substrate processing apparatus.

Fig. 2 is a diagram showing the control part of the substrate processing apparatus together with the flow controller.

Fig. 3 is a diagram illustrating the control valve.

Fig. 4 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 5 is a flowchart showing an embodiment of the process ST3.

Fig. 6 is a flowchart showing another embodiment of the process ST3.

Fig. 7 is a flowchart showing an embodiment of the process ST6.

Fig. 8 is a flowchart showing an embodiment of the process ST4.

Fig. 9 is a flowchart showing an embodiment of the process ST5.

Fig. 10 is a flowchart showing another embodiment of the process ST5.

Fig. 11 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 12 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 13 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 14 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 15 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 16 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 17 is a flowchart showing a part of the inspection process of the method of the embodiment.

Fig. 18 is a diagram showing another example of the substrate processing apparatus.

Fig. 19 is a flowchart showing a part of the inspection process of another embodiment of the method.

Fig. 20 shows a flow chart of the process ST300.

Figure 21 is a flow chart showing the process ST600.

Hereinafter, various embodiments will be described in detail with reference to the drawings. In addition, in each drawing, the same or corresponding parts are given the same symbols.

First, a description will be given of a substrate processing apparatus having a gas supply system to which the method related to the embodiment can be applied. Fig. 1 is a diagram illustrating a substrate processing apparatus. The substrate processing apparatus 10 shown in FIG. 1 includes a processing container PC and a gas supply system GP. The processing container PC provides an internal space. The substrate is accommodated in the internal space of the processing container PC. The processing container PC is connected to an exhaust device EA via a pressure regulating valve APC. The gas supply system GP is configured to supply the gas for substrate processing in the processing container PC. The substrate processing apparatus 10 may be, for example, an apparatus for applying plasma processing such as plasma etching to a substrate. When the substrate processing apparatus 10 is a plasma processing apparatus, it further includes a plasma source.

The gas supply system GP includes a plurality of first pipes L1, a plurality of first valves V1, a plurality of flow controllers FC, a plurality of second pipes L2, a plurality of second valves V2, a third pipe L3, and a third valve V3.

The upstream ends of the plurality of first pipes L1 are respectively connected to the plurality of gas sources GS. The plural gas sources GS are gas sources of different gas types. The plural first valves V1 are respectively provided in the plural first pipes L1. The downstream ends of the plural first pipes L1 are respectively connected to the plural flow controllers FC. The individual configuration of the plural flow controller FC will be described later.

The upstream ends of the plurality of second pipes L2 are respectively connected to the plurality of flow controllers FC. The plural flow controllers FC are pressure-controlled flow controllers. The plural second valves V2 are respectively provided in the plural second pipes L2. The plural second pipes L2 merge with the third pipe L3. This third pipe L3 is provided with a third valve V3. At the downstream of the third valve V3, the third pipe L3 is connected to the processing container PC.

The gas supply system GP may further include: a pipe LP1, a valve VP1, a valve VP2, a plurality of pipes LP3, and a plurality of valves VP3. The upstream end of the pipe LP1 is connected to the flushing gas source GPS. The flushing gas is, for example, nitrogen gas. The valve VP1 is provided in the pipe LP1. In addition, the valve VP2 is provided in the pipe LP1 downstream of the valve VP1. The pipe LP2 is branched from the pipe LP1 between the valve VP1 and the valve VP2. The upstream end of the plural pipes LP3 is connected to the pipe LP2. The downstream ends of the plural pipes LP3 are respectively connected to the plural first pipes L1. The plural valves VP3 are respectively provided in the plural pipes LP3.

Hereinafter, refer to FIG. 2 together with FIG. 1. Fig. 2 is a diagram showing the control part of the substrate processing apparatus together with the flow controller. As shown in FIGS. 1 and 2, the substrate processing apparatus 10 further includes a control unit 12. The control unit 12 may be a computer device equipped with a processor 12p and a memory device 12m such as a memory.

The memory device 12m stores programs used to execute various inspection processes in the method of the embodiment described later, and program recipes for substrate processing executed in the substrate processing apparatus 10. In addition, the memory device 12m is used to memorize various values sent from the gas supply system GP in the method of the embodiment described later.

The processor 12p operates according to the program memorized by the memory device 12m, and controls each part of the substrate processing apparatus 10 by referring to the program recipe. In addition, the processor 12p executes various inspection processes in the method of the embodiment described later in accordance with the program memorized in the memory device 12m.

Hereinafter, referring to FIG. 2, the individual configuration of the plural flow controller FC will be described. The flow controller FC includes an orifice OF, a control valve CV, a first pressure gauge P1, a second pressure gauge P2, a fourth pipe L4, a fifth pipe L5, and a control circuit 20. The orifice OF provides an orifice between the fourth pipe L4 and the fifth pipe L5. The fourth pipe L4 extends on the upstream side of the orifice OF, and the fifth pipe L5 extends on the downstream side of the orifice OF. The fourth pipe L4 is connected to the corresponding first pipe L1. The control valve CV is provided in the middle of the fourth pipe L4. That is, the fourth pipe L4 includes an upstream portion L4a extending on the upstream side with respect to the control valve CV, and a downstream portion L4b extending on the downstream side with respect to the control valve CV. The control valve CV is provided in the upstream portion Between L4a and the downstream portion L4b. A first pressure gauge P1 is provided on the upstream side of the orifice OF and on the downstream side of the control valve CV. The first pressure gauge P1 is configured to measure the internal pressure of the fourth pipe L4. A second pressure gauge P2 is provided on the downstream side of the orifice OF. The second pressure gauge P2 is configured to measure the internal pressure of the fifth pipe L5. The flow controller FC may further include a temperature measuring device TS. The temperature measuring device TS is configured to measure the temperature of the gas passing through the orifice OF.

The control circuit 20 can input the set flow rate Fset specified by the program recipe from the control unit 12. In addition, the control circuit 20 is inputted with the measured pressure value Pm1 of the first pressure gauge P1 and the measured pressure value Pm2 of the second pressure gauge P2. Furthermore, the control circuit 20 receives the temperature Tm measured by the temperature measuring device TS.

When the control circuit 20 satisfies the critical condition, the output flow rate Fout of the flow controller FC is obtained by the following equation (1). The critical condition is satisfied, for example, when the measured pressure value Pm1 of the first pressure gauge P1 is more than twice the measured pressure value Pm2 of the second pressure gauge P2.

Fout=K×Pm1...(1)

In addition, in formula (1), K is a value determined by K=SC/Tm1/2. Here, S is the orifice cross-sectional area of the orifice OF through which the gas passes, and C is the proportionality factor.

In addition, when the control circuit 20 does not satisfy the critical condition, that is, when the non-critical condition is satisfied, the output flow rate Fout of the flow controller FC is obtained by the following formula (2). The non-critical condition is met when the measured pressure value Pm1 of the first pressure gauge P1 is less than twice the measured pressure value Pm2 of the second pressure gauge P2.

Fout=K×Pm2i×(Pm1-Pm2)j...(2)

In addition, in formula (2), i is a constant of 0.40<i<0.50, and j is a constant of 0.50<j<0.65, both of which are determined by experiments.

The control circuit 20 outputs the difference between the calculated output flow rate Fout and the set flow rate Fset, that is, ΔF to the control valve CV. In addition, the control circuit 20 inputs the measured pressure value Pm1, the output flow rate Fout, and the measured pressure value Pm2 to the control unit 12 based on the utilization in various inspection processes of the method related to the embodiment described later.

Fig. 3 is a diagram illustrating the control valve. As shown in FIG. 3, the control valve CV has a drive unit 22. The driving unit 22 has a control circuit 24. The control circuit 24 receives ΔF from the control circuit 20.

In addition, the driving unit 22 includes a piezoelectric element 26. The piezoelectric element 26 is configured to move the valve body 30 described later during the opening and closing operation of the control valve CV. The control circuit 24 controls the voltage Vp applied to the piezoelectric element 26 so that ΔF becomes zero. In addition, the control circuit 24 inputs a signal specifying the applied voltage Vp to the piezoelectric element to the control unit 12.

The control valve CV further has a body 28, a valve body 30 (diaphragm), a circular spring 32, a pressing member 34, a base member 36, a ball 38, and a supporting member 40. The body 28 provides a flow path 28a, a flow path 28b, and a valve chamber 28c. The flow path 28a extends between the upstream portion L4a of the fourth pipe L4 and the valve chamber 28c. The flow path 28b extends between the valve chamber 28c and the downstream portion L4b of the fourth pipe L4. In addition, the body 28 in turn provides a valve seat 28d.

The valve body 30 uses the circular spring 32 to accumulate the valve seat 28 d via the pressing member 34. When the voltage applied to the piezoelectric element 26 is zero, the valve body 30 is in contact with the valve seat 28d, and the control valve CV is in the closed state.

One end (the lower end in the figure) of the piezoelectric element 26 is supported by the base member 36. Piezo Elements 26 It is connected to the support member 40. The supporting member 40 is connected to the pressing member 34 at one end (the lower end in the figure). If a voltage is applied to the piezoelectric element 26, the piezoelectric element 26 will expand. When the piezoelectric element 26 expands, the support member 40 moves in a direction away from the valve seat 28d, and with this, the pressing member 34 also moves in a direction away from the valve seat 28d. Thereby, the valve body 30 is separated from the valve seat 28d, and the control valve CV becomes an open state. The opening degree of the control valve CV, that is, the distance between the valve body 30 and the valve seat 28d, is controlled by the voltage applied to the piezoelectric element 26.

Hereinafter, the method of inspecting the gas supply system of the embodiment will be described. The method of the embodiment includes several inspection processes for inspecting the gas supply system GP during the execution period of supplying gas to the processing container PC of the substrate processing apparatus 10, that is, the period during which the program is executed; and during periods other than the execution period, That is, several inspection processes for inspecting the gas supply system GP during the period when the program is not performed. Hereinafter, these plural inspection processes will be described in order.

Fig. 4 is a flowchart of a part of the inspection process of the method of the embodiment. In FIG. 4, the process shown between the two double lines is a process performed in parallel. The inspection process shown in FIG. 4 is a program executed in the substrate processing apparatus. The inspection process is performed during the period when the gas from one or more first flow controllers among the plurality of flow controllers is supplied into the processing container (hereinafter referred to as "real-time inspection"). Processing RP"). That is, the processing shown in FIG. 4 is an inspection processing performed during the execution period when more than one first flow controller controls the gas flow. In the following, the substrate processing apparatus executes the program according to a program recipe. The first flow controller is the flow controller FC(1), and the flow control is not performed, that is, the second flow controller that does not supply gas to the processing container PC. Take the case of the flow controller FC(2) and the flow controller FC(3) as an example, and describe the instant inspection process RP. In addition, if the programs executed by the substrate processing apparatus are different programs, one or more flow controllers used as the first flow controller among the plurality of flow controllers FC and one or more flow controllers used as the second flow controller The controller is different from the above example. In addition, the number of first flow controllers and the number of second flow controllers are not limited.

As shown in FIG. 4, the immediate inspection process RP first executes the process ST1, in which process ST1 starts to perform gas flow control based on the flow controller FC(1). The flow rate is supplied to the processing vessel PC by the gas system adjusted by the flow controller FC(1). In process ST1, the first valve V1(1) of the plurality of first valves V1 located upstream of the flow controller FC(1) is opened, and the second valve of the plurality of second valves V2 located downstream of the flow controller FC(1) V2(2) is opened, and the third valve V3 is opened. In addition, valve VP1, valve VP2, and valve The counting valve VP3 is closed. In addition, the opening and closing of the valve in the process ST1 can be controlled by a signal from the control unit 12. Furthermore, in the process ST1, the set flow rate Fset specified by the program recipe is input from the control unit 12 to the flow controller FC(1), and the flow controller FC(1) reduces the output flow rate Fout and the set flow rate Fset as described above. Adjust the opening of the control valve CV by using the difference.

The process ST2 and the process ST1 start roughly at the same time. In process ST2, the second valve V2(2) downstream of the flow controller FC(2) and the second valve V2(3) downstream of the flow controller FC(3) are opened. The opening and closing of the valve in the process ST2 can be controlled by a signal from the control unit 12. In addition, the individual control valves CV of the flow controller FC(2) and the flow controller FC(3) can be open or closed.

In the real-time inspection process RP, the output flow rate Fout of the flow controller FC(1) during the execution period after the execution of the process ST2 is approximately the same time and the execution of the following processes ST3~ST6 is controlled from the flow rate The control circuit 20 of the FC(1) is sent to the control unit 12. In addition, the measured pressure value Pm1 measured by the first pressure gauge P1 of the flow controller FC(1) and the second pressure gauge P2 of the flow controller FC(1) at multiple points in the execution period The measured pressure value Pm2 is sent from the control circuit 20 of the flow controller FC(1) to the control unit 12, and the measured pressure value measured by the first pressure gauge P1 of the flow controller FC(2) at this plural time Pm1 and the measured pressure value Pm2 measured by the second pressure gauge P2 of the flow controller FC(2) are sent from the control circuit 20 of the flow controller FC(2) to the control unit 12, and the flow is controlled by the flow at the plural time. The measured pressure value Pm1 measured by the first pressure gauge P1 of the FC(3) and the measured pressure value Pm2 measured by the second pressure gauge P2 of the flow controller FC(3) are obtained from the flow controller FC(3) ) The control circuit 20 is sent to the control unit 12. These measured pressure values are memorized by the memory device 12m of the control unit 12. In addition, the signal specifying the applied voltage Vp to the piezoelectric element 26 of the control valve CV of the flow controller FC(1) during the execution period is sent from the control circuit 24 of the control valve CV of the flow controller FC(1) to the control Department 12.

After the execution of the process ST2, the immediate inspection process RP executes the process ST3, the process ST4, and the process ST5 in parallel. In addition, the process ST6 is the process performed after the process ST3 is executed, and the process ST6 is also executed in parallel with the process ST4 and the process ST5.

The process ST3 is to check the transition characteristics of the output flow of the gas output from the flow controller FC(1). Fig. 5 is a flowchart of an embodiment of the process ST3. The process ST3 of an embodiment shown in FIG. 5 includes a process ST31 and a process ST32. The calculations of the process ST31 and the process ST32 are performed by the control unit 12.

In the process ST31, the cumulative value AC1 of the plural measured pressure values Pm2 measured by the second pressure gauge P2 of the flow controller FC(1) is calculated at the plural points in the transition period during the execution period. The transition period is the period in the implementation period before the constant period. The constant period is the period during which the output flow of the flow controller FC(1) becomes a constant state, for example, when the difference between the maximum value and the minimum value of the output flow of the flow controller FC(1) within a predetermined time is less than the predetermined value In this case, it can be judged that the output flow of the flow controller FC(1) has become a constant state.

In the subsequent process ST32, the integrated value AC1 is compared with the established reference value Ref1. The predetermined reference value Ref1 is the cumulative value of the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) at a plurality of points in the transition period in the reference period. The reference period is the period before the execution period. It is the period during which the program that is the same as the program recipe used in the execution period has been executed in the substrate processing device, and is designated by the flow controller FC(1) corresponding to the program recipe. The setting flow rate controls the period of output flow rate. For example, the reference period may be the period during which the program according to the above-mentioned program recipe was first executed in the substrate processing apparatus.

The measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) reflects the output flow of the flow controller FC(1). Therefore, the integrated value AC1 reflects the transient characteristics of the output flow rate of the flow controller FC(1) during the transition period in the execution period. Comparing the relevant integrated value AC1 with the established reference value Ref1, it can be determined whether the transition characteristic of the output flow of the flow controller FC(1) in the execution period is a transition from the output flow of the flow controller FC(1) in the reference period The characteristics change to an unacceptable degree.

In the comparison of process ST32, for example, when the absolute value of the difference between the integrated value AC1 and the predetermined reference value Ref1 is greater than the predetermined value Tha, it can be determined that the transition characteristic of the output flow of the flow controller FC(1) during the execution period is changed from The transition characteristic of the output flow of the flow controller FC(1) in the reference period changes to an unacceptable degree. When the transition characteristic of the output flow of the flow controller FC(1) in the judgment execution period changes from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to an unacceptable degree, in the process ST7 system The control unit 12 outputs an alarm signal. In addition, in the subsequent process ST8, the executed program is stopped by the control unit 12. On the other hand, in process ST32, when it is determined that the transition characteristic of the output flow of the flow controller FC(1) in the execution period only changes from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to allowable Or the transition characteristics and reference period of the output flow of the flow controller FC(1) during the execution period If the transition characteristics of the output flow of the flow controller FC(1) are the same, the follow-up process ST6 is implemented.

In addition, during the process ST3 shown in FIG. 5, the second valve V2 downstream of the flow controller FC(2) and the second valve V2 downstream of the flow controller FC(3) can be closed or open. . In the latter case, that is, when the second valve V2 downstream of the flow controller FC(2) and the second valve V2 downstream of the flow controller FC(3) are open, a longer transition period can be ensured. It can be judged with higher accuracy whether the transition characteristic of the output flow of the flow controller FC(1) in the execution period has changed relative to the transition characteristic of the output flow of the flow controller FC(1) in the reference period.

Fig. 6 is a flowchart of another embodiment of the process ST3. During the process ST3 of the embodiment shown in FIG. 6, the second valve V2 downstream of the flow controller FC(2) and the second valve V2 downstream of the flow controller FC(3) are in an open state. The process ST3 of the embodiment shown in FIG. 6 includes a process ST35 and a process ST36. The calculations in the process ST35 and the process ST36 are executed by the control unit 12. In process ST35, the plural measured pressure values Pm1 measured by the first pressure gauge P1 of the flow controller FC(2) at the plural time points in the transition period during the execution period are calculated, and the plural time points are calculated by the flow controller FC (3) The accumulated value AC2 of the plural measured pressure values Pm1 measured by the first pressure gauge P1.

In the subsequent process ST36, the accumulated value AC2 is compared with the established reference value Ref2. The predetermined reference value Ref2 is the measured pressure value Pm1 measured by the first pressure gauge P1 of the flow controller FC(2) at the plural time points in the transition period of the reference period, and at the plural time points by the flow controller FC( 3) The cumulative value of the measured pressure value Pm1 measured by the first pressure gauge P1.

During the execution period, the gas output from the flow controller FC(1) is also supplied to the fourth pipe L4 and the fifth pipe L5 of the flow controller FC(2), and the fourth pipe L4 of the flow controller FC(3) And the fifth pipe L5. Therefore, the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(2) and the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(3) reflect the output of the flow controller FC(1) flow. Therefore, the integrated value AC2 reflects the transient characteristics of the output flow of the flow controller FC(1). By comparing the relevant integrated value AC2 with the established reference value Ref2, it can be determined whether the transition characteristic of the output flow of the flow controller FC(1) in the execution period is from the output flow of the flow controller FC(1) in the reference period The transitional characteristics change to an unacceptable degree.

The comparison in process ST36, for example, when the absolute difference between the accumulated value AC2 and the established reference value Ref2 When the value is above the predetermined value Thb, it can be determined that the transition characteristic of the output flow of the flow controller FC(1) in the execution period is changed from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to impossible The degree of tolerance. When the transition characteristic of the output flow of the flow controller FC(1) in the judgment execution period changes from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to an unacceptable degree, in process ST7 The control unit 12 outputs an alarm signal. In addition, in the subsequent process ST8, the executed program is stopped by the control unit 12. On the other hand, in the process ST36, when the transition characteristic of the output flow of the flow controller FC(1) in the judgment execution period only changes from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to allowable If the transition characteristic of the output flow of the flow controller FC(1) during the execution period and the transition characteristic of the output flow of the flow controller FC(1) in the reference period are the same, the subsequent process ST6 .

In addition, the calculation of the integrated value AC2 may also use the plural measured pressure value Pm1 of the first pressure gauge P1 of one of the flow controller FC(2) and the flow controller FC(3). In this case, the predetermined reference value Ref2 in the transition period of the reference period uses the plural measured pressure value Pm1 measured by the first pressure gauge P1 of one of the flow controller FC(2) and the flow controller FC(3) Come get it. In addition, the integrated value obtained from the plural measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(2) and the plural measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(3) The calculated integrated value can also be compared with the corresponding established reference value individually.

Fig. 7 is a flowchart of an embodiment of the process ST6. During the process ST6 shown in FIG. 7, the second valve V2 downstream of the flow controller FC(2) and the second valve V2 downstream of the flow controller FC(3) are in an open state. Process ST6 includes process ST61~process ST63. The calculations of these processes ST61 to ST63 can be implemented by the control unit 12.

In the process ST61, the plural first absolute difference values ΔP1 and the plural second absolute difference values ΔP2 are calculated. Specifically, it is calculated from the measured pressure value Pm1 (that is, the first constant pressure value) measured by the first pressure gauge P1 of the flow controller FC(2) during the constant period of the execution period and the first reference The absolute difference of the constant pressure value (the first absolute difference △P1). This first reference constant pressure value is determined earlier than the execution period, and is the measured pressure value measured by the first pressure gauge P1 of the flow controller FC(2) during the constant period of the reference period. In addition, the measured pressure value Pm2 measured by the second pressure gauge P2 of the flow controller FC(2) during the constant period during the execution period (that is, the second constant The absolute value of the difference between the normal pressure value) and the second reference constant pressure value (the second absolute difference value △P2). This second reference constant pressure value is determined earlier than the execution period, and is the measured pressure value measured by the second pressure gauge P2 of the flow controller FC(2) during the constant period of the reference period.

In addition, the measured pressure value Pm1 (that is, the first constant pressure value) measured by the first pressure gauge P1 of the flow controller FC(3) during the constant period of the execution period and the first reference constant The absolute difference of the pressure value (the first absolute difference ΔP1). This first reference constant pressure value is determined earlier than the execution period, and is the measured pressure value measured by the first pressure gauge P1 of the flow controller FC(3) during the constant period of the reference period. In addition, calculate the measured pressure value Pm2 (that is, the second constant pressure value) and the second reference constant pressure measured by the second pressure gauge P2 of the flow controller FC(3) during the constant period during the execution period The absolute value of the difference (the second absolute difference ΔP2). This second reference constant pressure value is determined earlier than the execution period, and is the measured pressure value measured by the second pressure gauge P2 of the flow controller FC(3) during the constant period in the reference period . Through such calculations, the complex first absolute difference ΔP1 and the complex second absolute difference ΔP2 are calculated in the process ST61.

In the subsequent process ST62, the average value Ave of the plural first absolute difference ΔP1 and the plural second absolute difference ΔP2 is calculated. In the subsequent process ST63, it is determined whether the plural first absolute difference values △P1 are respectively greater than the predetermined first threshold Th1, or whether the plural second absolute difference values △P2 are respectively greater than the predetermined second threshold Th2, or whether the average value Ave is greater than the predetermined value. The third threshold Th3.

When the first complex absolute difference ΔP1 is individually greater than the predetermined first threshold Th1, or the complex second absolute difference ΔP2 is individually greater than the predetermined second threshold Th2, or the average Ave is greater than the predetermined third threshold Th3, it is Then the process ST7 is carried out. On the other hand, when the complex first difference absolute value ΔP1 is individually below the predetermined first threshold Th1, the complex second difference absolute value ΔP2 is individually below the predetermined second threshold Th2, and the average Ave is below the predetermined third threshold Th3 In this case, the immediate inspection process RP is ended. In addition, the process ST6 can also be repeatedly executed during the constant period of the execution period.

During the execution period, the gas output from the flow controller FC (1) at a flow rate corresponding to the set flow rate is supplied to the processing vessel PC and also supplied to the flow controllers FC (2) and FC (3) in the fourth piping L4 and the respective fourth pipes L4 and FC (3). The fifth pipe L5. Therefore, the first constant pressure value and the second constant pressure value reflect the output flow of the flow controller FC(1) in a constant state. In addition, the first reference constant pressure value is the first constant pressure value measured during the constant period in the reference period. In addition, the second reference constant pressure value is the second constant pressure value measured during the constant period of the reference period. Thus, through the process The ST63 determination can determine whether the output flow rate of the constant state of the flow controller FC(1) during the execution period has changed from the output flow rate of the constant state of the flow controller FC(1) during the reference period. In addition, even if one or more second flow controllers (for example, flow controllers FC(2) and FC(3)) do not control the flow rate, the pressure changes in the fourth pipe L4 and the fifth pipe L5 are more surely reflected in this one. When the pressure change of the measured pressure value of the first pressure gauge P1 and the second pressure gauge P2 of the above second flow controller is small, such a small pressure change will be reflected in the above average value. This is because even if the relevant small pressure changes are not reflected in one or more of the measured pressure values of the first pressure gauge P1 of the second flow controller and part of the measured values of the second pressure gauge P2, they will also be reflected in other parts. Therefore, the result will be reflected in the average value. Therefore, by using the average value, it can be judged with high accuracy whether the output flow of the constant state of the flow controller FC(1) during the execution period is from the constant state of the flow controller FC(1) during the reference period. The flow rate has changed. In addition, the measured pressure values of the first pressure gauge P1 and the second pressure gauge P2 of the multiple second flow controllers, namely the flow controller FC(2) and the flow controller FC(3), can be higher Sensitivity detects whether the output flow rate of the flow controller FC(1) in the constant state during the execution period changes relative to the output flow rate of the flow controller FC(1) in the constant state during the reference period. In addition, one of the flow controller FC(2) and the flow controller FC(3) can also be used as the second flow controller in the process ST6.

Fig. 8 is a flowchart of an embodiment of the process ST4. The process ST4 can be implemented in parallel with the process ST3, the process ST5, and the process ST6 as described above. Process ST4 includes process ST41. The calculation of the process ST41 is carried out by the control unit 12. The process ST41 determines whether the applied voltage Vp to the piezoelectric element 26 of the control valve CV of the flow controller FC(1) is the same as the reference voltage Vpref1 during the execution period, and whether the output flow rate Fout of the flow controller FC(1) is less than Set the flow rate Fset. The reference voltage Vpref1 is a reference voltage preset as the applied voltage to the piezoelectric element 26 when the control valve CV of the flow controller FC(1) is fully opened.

Even if a voltage that makes the control valve CV fully open is applied to the piezoelectric element 26, when the output flow rate Fout of the flow controller FC(1) is less than the set flow rate Fset, the pressure of the gas supplied to the flow controller FC(1) is still possible insufficient. For example, such a situation is considered to be malfunctioning of the first valve V1 (1) upstream of the flow controller FC (1). According to the process ST41, it is determined whether the applied voltage Vp to the piezoelectric element 26 of the control valve CV of the flow controller FC(1) is the same as the reference voltage Vpref1, and whether the output flow rate Fout of the flow controller FC(1) is less than the set flow rate Fset, while detectable The supply pressure on the upstream side (primary side) of the flow controller FC(1) is insufficient.

In process ST41, when the applied voltage Vp is the same as the reference voltage Vpref1 and the output flow rate Fout of the flow controller FC(1) is less than the set flow rate Fset, it is determined that the gas pressure supplied to the flow controller FC(1) is insufficient. When it is determined that the gas pressure supplied to the flow controller FC(1) is insufficient, then the process ST7 is executed. On the other hand, when it is determined that the gas pressure supplied to the flow controller FC(1) is insufficient, the execution of the process ST4 is ended. In addition, the process ST4 can also be repeatedly executed during the execution period.

Fig. 9 is a flowchart of an embodiment of the process ST5. The process ST5 shown in FIG. 9 can be implemented in parallel with the process ST3, the process ST5, and the process ST6 as described above. The process ST5 shown in FIG. 9 includes the process ST51. The calculation of the process ST51 is carried out by the control unit 12. During the execution of process ST51, it is determined whether the difference between the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(1) and the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) is a predetermined The value is less than Pth. When the difference between the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(1) and the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) is less than the predetermined value Pth, then execute Process ST7. On the other hand, when the difference between the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(1) and the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) is greater than the predetermined value Pth , End the implementation of process ST5. In addition, the process ST5 can also be repeatedly executed during the execution period.

When the second valve V2(1) downstream of the flow controller FC(1) is closed due to a failure, the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC(1) and the flow controller FC (1) The measured pressure value Pm2 of the second pressure gauge P2 becomes substantially the same. Therefore, according to the judgment of the process ST51, the failure of the second valve V2(1) downstream of the flow controller FC(1) can be detected.

Fig. 10 is a flowchart of another embodiment of the process ST5. The process ST5 shown in FIG. 10 can be implemented in parallel with the process ST3, the process ST4, and the process ST6 as described above. The process ST5 shown in FIG. 10 includes the process ST55. The calculation of the process ST55 is carried out by the control unit 12. In the process ST55, it is determined whether the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC(1) during the execution period is greater than the predetermined upper limit pressure value Plim. When the measured pressure value of the second pressure gauge P2 of the flow controller FC(1) during the execution period is greater than the predetermined upper limit pressure value Plim, then the process ST7 is executed. On the other hand, when the measured pressure value of the second pressure gauge P2 of the flow controller FC(1) during the execution period is less than the predetermined upper limit pressure value Plim, the execution of the process ST5 is ended. In addition, process ST5 can also be used during the implementation period Repeatedly from time to time.

The internal pressure of the fifth pipe L5 of the flow controller FC of the gas supply system GP is usually set with an upper limit. Therefore, if the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC exceeds the predetermined upper pressure value Plim, it is considered that a failure of the second valve V2(1) downstream of the flow controller FC(1) will occur. Therefore, according to the judgment of the process ST55, the failure of the second valve V2(1) downstream of the flow controller FC(1) can be detected.

Hereinafter, among the inspection processing of the method of the embodiment, several inspection processing performed outside the execution period will be described with reference to Figs. 11-15. Figures 11 to 15 are flowcharts of inspection processing as part of the method of the embodiment.

The inspection process shown in FIG. 11 includes process ST101 to process ST104. The process ST101 and the process ST104 are executed under the control of the control unit 12. In addition, the processes ST102 and ST103 are executed by the control unit 12.

In the process ST101, the internal gas of the plurality of flow controllers FC is exhausted. Specifically, the plurality of first valves V1 and VP1 are closed, and the plurality of second valves V2, the control valve CV of the plurality of flow controllers FC, and the third valve V3 are opened, so that the exhaust device EA is activated. In this way, the internal gas of the plurality of flow controllers FC is exhausted. In addition, in the process ST101, the valve VP2 and the plural valves VP3 can also be opened.

In the subsequent process ST102, in the state where the internal gas of the multiple flow controller FC is exhausted, it is determined whether the measured pressure value Pm1 of the first pressure gauge P1 of the multiple flow controller FC is greater than the first predetermined value P01, and the multiple flow control Whether the measured pressure value Pm2 of the second pressure gauge P2 of the device FC is greater than the second predetermined value P02.

The first pressure gauge P1 and the second pressure gauge P2 of the plurality of flow controllers FC are initially set to output the measured value of "0" when the internal gas of the plurality of flow controllers FC is exhausted. That is, the first pressure gauge P1 and the second pressure gauge P2 of the plurality of flow controllers FC are initially zero-point adjusted. Therefore, when the measured pressure value Pm1 is greater than the first predetermined value P01 in the state where the internal gas of the plural flow controller FC is exhausted, the zero point offset of the first pressure gauge P1 of the corresponding flow controller FC can be detected . In addition, when the internal gas of the plural flow controller FC is exhausted, when the measured pressure value Pm2 is greater than the second predetermined value P02, the zero point offset of the second pressure gauge P2 of the corresponding flow controller FC can be detected .

In process ST102, when it is determined that the measured pressure value Pm1 of the first pressure gauge P1 of a certain flow controller FC is greater than the first predetermined value P01, or the measured pressure value Pm2 of the second pressure gauge P2 of a certain flow controller FC is greater than In the case of the second predetermined value P02, an alarm signal is output in the subsequent process ST103. This process ST103 and process ST7 are the same process. In the subsequent process ST104, the next scheduled process is stopped. On the other hand, when the measured pressure value Pm1 of the first pressure gauge P1 of all the flow controllers FC is less than the first predetermined value P01, and the measured pressure value Pm2 of the second pressure gauge P2 of all the flow controllers FC is the first 2 When the predetermined value P02 is less than or equal to P02, it is determined that there is no zero offset, and the inspection process shown in Fig. 11 is ended.

The inspection process shown in FIG. 12 is a process for inspecting whether a measurement pressure value of the first pressure gauge P1 and the second pressure gauge P2 of the plurality of flow controllers FC has an error with respect to the corresponding initial measurement pressure value. For example, the processing performed when the gas supplied by the plural flow controllers FC is switched individually. The inspection process shown in FIG. 12 includes process ST111 to process ST116. Among them, the process ST111 and the process ST116 are executed under the control of the control unit 12. In addition, the processes ST112 to ST115 are implemented by the control unit 12.

In the process ST111, the plurality of first valves V1 and the plurality of second valves V2 are closed. Process ST112~process ST116 are implemented individually for multiple flow controllers FC. The following describes the processing content of the process ST112 to the process ST116 of a flow controller FC.

The process ST112 is to obtain the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC and the measured pressure value Pm2 of the second pressure gauge P2 of the flow controller FC. The subsequent process ST113 obtains the initial pressure value P2i. The initial pressure value P2i is a pressure value obtained by inputting the measured pressure value Pm1 obtained in the process ST112 into a predetermined function. This function is a function of the plural measured pressure values Pm1 obtained during the period before the inspection process of FIG. 12 is executed and the measured pressure values Pm2 respectively corresponding to the plural measured pressure values Pm1. The period before the execution of the inspection process is the period immediately after the new introduction of the flow controller FC, or the period immediately after the adjustment of the first pressure gauge and the second pressure gauge of the flow controller FC. More specifically, this function forms the first valve V1 upstream of the flow controller FC and the second downstream valve V1 of the flow controller FC under the condition that the internal pressure of the flow controller FC is set to different plural pressures. The valve V2 is in a closed state. Whenever the plural pressure is set, the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC and the measured pressure value of the second pressure gauge P2 of the flow controller FC are obtained. Pm2 obtained complex number measurement The relationship between the constant pressure value Pm1 and the plural second measured pressure values Pm2 respectively corresponding to the plural measured pressure values Pm1 is functionalized. For example, this function may be a function that approximates the relationship between the plural measured pressure values Pm1 and the measured pressure values Pm2 respectively corresponding to the plural measured pressure values Pm1.

In the subsequent process ST114, the measured pressure value Pm2 is compared with the initial pressure value P2i. If the state of the first pressure gauge P1 and the state of the second pressure gauge P2 of the flow controller FC are normal, the first valve V1 upstream of the flow controller FC and the second valve downstream of the flow controller FC When V2 is in the closed state, input the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC into the initial pressure value P2i obtained by the above function and the second pressure gauge of the flow controller FC obtained in the process ST112 The measured pressure value Pm2 of P2 should be approximately the same value. Therefore, by comparing the process ST114, it can be determined whether one of the measured pressure values of the first pressure gauge P1 and the second pressure gauge P2 of the flow controller FC has an error with respect to the initial measured pressure value.

The process ST114 determines whether the absolute value of the difference between the measured pressure value Pm2 obtained in the process ST112 and the initial pressure value P2i is greater than a predetermined value Pdref, for example. When the absolute value of the difference between the measured pressure value Pm2 and the initial pressure value P2i obtained in the process ST112 is greater than the predetermined value Pdref, the subsequent process ST115 is performed and then the process ST116 is performed. The process ST115 and the process ST103 are the same process, and the process ST116 and the process ST104 are the same process. On the other hand, when the absolute value of the difference between the measured pressure value Pm2 and the initial pressure value P2i obtained in the process ST112 is less than the predetermined value Pdref, it is determined whether the first pressure gauge P1 and the second pressure gauge P2 of the flow controller FC are A certain measured pressure value has an error with respect to the initial measured pressure value, and the inspection process shown in FIG. 12 is ended.

The inspection process shown in Figure 13 is a process used to detect whether the individual control valves CV of the plural flow controllers FC have leaked, including the processes ST121~ST123. The process ST123 is executed under the control of the control unit 12. In addition, the processes ST121 to ST122 are implemented by the control unit 12. In the following, only the processing content of the process ST121~ST123 of a flow controller FC will be described.

In the process ST121, with the control valve CV of the flow controller FC in a closed state, it is determined whether or not a predetermined time or more has passed. In addition, when the voltage Vp applied to the piezoelectric element 26 of the control valve CV of the flow controller FC is the same as the predetermined reference voltage Vpref2, it is determined that the control valve CV of the flow controller FC is in a closed state. The reference voltage Vpref2 is zero in the control valve CV shown in FIG. 4.

Generally speaking, the control valve CV cannot completely block the gas. If the control valve CV is closed for a long period of time Continuing will affect the transient characteristics of the case where the second downstream valve V2 is opened and the gas is supplied for the purpose of the program. According to the judgment of the process ST121, the state of the control valve CV that affects such transient characteristics can be detected.

Specifically, in the process ST121, when the control valve CV of the flow controller FC is in a closed state, if it is determined that the predetermined time or more has passed, the subsequent process ST122 is executed, and then the process ST123 is executed. The process ST122 and the process ST103 are the same process, and the process ST123 and the process ST104 are the same process. On the other hand, in the process ST121, when the control valve CV of the flow controller FC is in the closed state, when it is determined that the predetermined time or more has not passed, the inspection process shown in FIG. 13 is ended.

The inspection process shown in Fig. 14 is used to detect whether the individual control valves CV of the plurality of flow controllers FC are leaking or not, including the processes ST131~ST133. The process ST133 is implemented based on the control of the control unit 12. In addition, the processes ST131 to ST132 are implemented by the control unit 12. In the following, only the processing content of the process ST131~ST133 of a flow controller FC will be described.

In the process ST131, with the control valve CV of the flow controller FC in a closed state, it is determined whether the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC has increased above a predetermined value. In addition, when the voltage Vp applied to the piezoelectric element 26 of the control valve CV of the flow controller FC is the same as the predetermined reference voltage Vpref2, it is determined that the control valve CV of the flow controller FC is in a closed state.

Even if the voltage Vp applied to the piezoelectric element 26 is set to close the control valve CV, it is considered that when the measured pressure value Pm1 of the first pressure gauge P1 increases above the predetermined value, it will happen to the control valve CV. Unallowable leakage. According to the judgment of process ST131, when the applied voltage Vp to the piezoelectric element 26 is at the setting for closing the control valve CV, it is determined whether the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC has increased as a predetermined Value above, and can detect the leakage of the control valve that cannot be tolerated.

Specifically, in the process ST131, when the control valve CV of the flow controller FC is in the closed state, when it is determined that the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC has increased above the predetermined value, it is Carry out the follow-up process ST132, and then carry out the process ST133. The process ST132 and the process ST103 are the same process, and the process ST133 and the process ST104 are the same process. On the other hand, in the process ST131, when the control valve CV of the flow controller FC is in a closed state, when it is determined that the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC has increased above the predetermined value, then The inspection process shown in Fig. 14 ends.

The inspection process shown in FIG. 15 is a process of inspecting whether a leak occurs in a plurality of second valves V2, and includes the process ST141 to the process ST143. The process ST143 is executed under the control of the control unit 12. In addition, the processes ST141 to ST142 are implemented by the control unit 12. In the following, only the second valve V2 downstream of a flow controller FC will be described for the leakage inspection process.

In process ST141, when the second valve downstream of the flow controller FC is closed and the control valve CV of the flow controller FC is closed, the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC is determined Whether to reduce. In addition, when the voltage Vp applied to the piezoelectric element 26 of the control valve CV of the flow controller FC is the same as the predetermined reference voltage Vpref2, it is determined that the control valve CV of the flow controller FC is in a closed state.

Even if the second valve V2 downstream of the flow controller FC is closed, the control valve CV of the flow controller FC is closed. When the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC decreases, it is considered Leakage will occur in the second valve V2 downstream of the control valve CV. According to the process ST141, when the control valve CV of the flow controller FC is closed, since it is determined whether the measured pressure value Pm1 of the first pressure gauge P1 of the flow controller FC has decreased, it will be possible to detect the first downstream of the flow controller FC. 2 Whether valve V2 is leaking.

Specifically, in process ST141, when the second valve V2 downstream of the flow controller FC is closed and the control valve CV of the flow controller FC is closed, it is determined that the first pressure gauge of the flow controller FC When the measured pressure value Pm1 of P1 decreases by more than a predetermined value, the subsequent process ST142 is implemented, and then the process ST143 is implemented. The process ST142 and the process ST103 are the same process, and the process ST143 and the process ST104 are the same process. On the other hand, in process ST141, when the second valve V2 downstream of the flow controller FC is closed and the control valve CV of the flow controller FC is closed, if it is determined that the first pressure gauge of the flow controller FC If the measured pressure value Pm1 of P1 does not decrease by more than the predetermined value, the inspection process shown in FIG. 15 is ended.

Hereinafter, referring to FIG. 16, the inspection process that can be executed instead of the inspection process of FIG. 11 will be described. The inspection process shown in FIG. 16 includes the process ST101, the process ST103, and the process ST104 similarly to the inspection process shown in FIG. In addition, the inspection process shown in FIG. 16 includes a process ST102A that is different from the process ST102 of the inspection process shown in FIG. 11. The process ST101 and the process ST104 are executed under the control of the control unit 12. In addition, the processes ST102A and ST103 are implemented by the control unit 12. Below, only the process ST102A is described.

In process ST102A, in the state where the internal gas of the multiple flow controller FC is exhausted, it is determined that the moving average of the multiple measured pressure values Pm1 measured by the first pressure gauge P1 of the multiple flow controller FC within a predetermined time Whether the absolute value of the difference between MVA1 and the moving average MVA2 of the plural measured pressure values Pm2 measured by the second pressure gauge P2 is greater than or equal to the predetermined value PD1 (for example, several kPa). When any of the plurality of flow controllers FC meets the determination conditions of the process ST102A, the subsequent process ST103 is executed. On the other hand, when any flow controller does not meet the conditions of the process ST102A, the inspection process shown in FIG. 16 is ended. In addition, the predetermined time depends on the acquisition rate of the measured pressure value Pm1 and the measured pressure value Pm2. For example, when the acquisition rate is 100 μsec, it can be a time of 0.1 second or more and 5 seconds or less.

When the flow controller FC has no zero offset individually, there is almost no difference between the moving average MVA1 and the moving average MVA2 when the interior of the flow controller is exhausted. Therefore, when the absolute value of the difference between these two moving averages is greater than or equal to the predetermined value PD1, it will become a zero offset of the flow controller. Therefore, according to the inspection process shown in Fig. 16, the zero point detection of the flow controller becomes possible.

Hereinafter, referring to FIG. 17, the inspection process that can be executed instead of the inspection process of FIG. 12 will be described. The inspection process shown in FIG. 17 includes the process ST111, the process ST115, and the process ST116 similarly to the inspection process shown in FIG. In addition, the inspection process shown in FIG. 17 further includes the process ST112A. The process ST111 and the process ST116 are executed under the control of the control unit 12. In addition, the processes ST112A and ST115 are implemented by the control unit 12. Below, only the process ST112A is described.

The process ST112A is implemented after the process ST111. In the process ST112A, when the plural first valves V1 and the plural second valves V2 are closed, it is judged that the plural measured pressure values Pm1 measured by the individual first pressure gauge P1 of the plural flow controller FC within a predetermined time Whether the absolute value of the difference between the moving average MVA11 and the moving average MVA12 of the plural measured pressure values Pm2 measured by the second pressure gauge P2 is greater than or equal to the predetermined value PD2 (for example, several kPa). When any one of the plurality of flow controllers FC meets the determination condition of the process ST112A, the process ST115 is executed next. On the other hand, when any flow controller does not meet the conditions of the process ST112A, the inspection process shown in FIG. 17 is ended. In addition, the predetermined time depends on the acquisition rate of the measured pressure value Pm1 and the measured pressure value Pm2. For example, when the acquisition rate is 100 μsec, it can be 0.1 seconds or more. Up, 5 seconds or less time.

When both the first pressure gauge P1 and the second pressure gauge P2 of the plural flow controllers are normal, the first valve V1 upstream of the flow controller and the second valve V2 downstream of the flow controller are closed. There is almost no difference between the moving average MVA11 and the moving average MVA12 calculated by the controller. Therefore, when the absolute value of the difference between these two moving averages is greater than the predetermined value PD2, the first pressure gauge P1 or the second pressure gauge P2 of the flow controller will be in a measurement with an error in the output The state of the pressure value. Therefore, according to the inspection process shown in FIG. 17, the first pressure gauge P1 or the second pressure gauge P2 that can detect the plurality of flow controllers FC is in a state of outputting a measured pressure value with an error.

Hereinafter, the instant inspection process RP2 that can be used instead of the instant inspection process RP shown in FIG. 4 will be described. This instant inspection process RP2 can be applied to the substrate processing apparatus shown in FIG. 18. The substrate processing apparatus 10A shown in FIG. 18 is different from the substrate processing apparatus 10 shown in FIG. 1 in that it is equipped with a gas supply system GPA (and further has a third pressure gauge P30). The third pressure gauge P30 measures the internal pressure of the third pipe L3. The measured pressure value Pm3 of the third pressure gauge P30 is output to the control unit 12.

The instant inspection process RP2 as shown in FIG. 19 is different from the instant inspection process RP shown in FIG. 4 in that it does not include the process ST2. In addition, the real-time inspection process RP2 includes a process ST300 that replaces the process ST3, and includes a process ST600 that replaces the process ST6. Regarding other points, the immediate inspection process RP2 system is the same as the immediate inspection process RP. Hereinafter, the process ST300 and the process ST600 will be described. In the following description, the substrate processing device executes a program in accordance with a recipe. The first flow controller is the flow controller FC(1), and the flow control is not performed (that is, the processing container PC is not supplied with gas ) The second flow controller is the case of the flow controller FC(2) and the flow controller FC(3).

Fig. 20 shows a flow chart of the process ST300. As shown in FIG. 20, in the process ST300, the transition characteristic of the output flow rate of the gas output from the flow controller FC(1) is checked. Process ST300 includes process ST301 and process ST302. The calculations in the process ST301 and the process ST302 are executed by the control unit 12.

The process ST301 is calculated from the plural time points in the transition period during the execution period of the gas supply to the processing container PC of the substrate processing apparatus 10A via the flow controller FC(1), and the plural times are measured by the third pressure gauge P30 The cumulative value AC3 of the pressure value Pm3. The transition period is before the constant period The period of the implementation period. The constant period is the period during which the output flow of the flow controller FC(1) becomes a constant state, for example, when the difference between the maximum value and the minimum value of the output flow of the flow controller FC(1) within a predetermined time is less than the predetermined value In this case, it can be judged that the output flow of the flow controller FC(1) has become a constant state.

In the subsequent process ST302, the accumulated value AC3 is compared with the established reference value Ref3. The predetermined reference value Ref3 is the cumulative value of the measured pressure value Pm3 of the third pressure gauge P30 at a plurality of points in the transition period in the reference period. The reference period is the period earlier than the execution period. It is the period executed in the substrate processing apparatus in accordance with the same program recipe as the program recipe used during the execution period. It is the flow controller FC(1). The period during which the output flow rate is controlled at the set flow rate specified by the program recipe. For example, the reference period may be a period during which a program in accordance with the program recipe is initially executed in the substrate processing apparatus.

The measured pressure value Pm3 of the third pressure gauge P30 reflects the output flow rate of the flow controller FC(1). Therefore, the integrated value AC3 reflects the transient characteristics of the output flow rate of the flow controller FC(1) during the execution period. By comparing the correlation integrated value AC3 with the predetermined reference value Ref3, it can be determined whether the transient characteristic of the output flow of the flow controller FC(1) has changed to an unacceptable degree during the execution period.

In the comparison of process ST302, for example, when the absolute value of the difference between the integrated value AC3 and the predetermined reference value Ref3 is greater than the predetermined value Thc, it can be determined that the transition characteristic of the output flow of the flow controller FC(1) during the execution period is changed from The transition characteristic of the output flow of the flow controller FC(1) in the reference period changes to an unacceptable degree. When the transition characteristic of the output flow of the flow controller FC(1) in the judgment execution period changes from the transition characteristic of the output flow of the flow controller FC(1) in the reference period to an unacceptable degree, in the process ST7 system The control unit 12 outputs an alarm signal. In addition, in the subsequent process ST8, the executed program is stopped by the control unit 12. On the other hand, in process ST302, when the transition characteristic of the output flow of the flow controller FC(1) in the judgment execution period is changed from the transition characteristic of the output flow of the flow controller FC(1) in the reference period, it is only allowable If the transition characteristic of the output flow of the flow controller FC(1) during the execution period and the transition characteristic of the output flow of the flow controller FC(1) during the reference period are the same, the follow-up process ST600 is implemented. .

Figure 21 is a flow chart showing the process ST600. Process ST600 includes process ST601 and process ST602. The operations of these processes ST601 and ST602 can be implemented by the control unit 12.

In the process ST601, the absolute value of the difference △P3 is calculated. Specifically, the absolute value ΔP3 of the difference between the measured pressure value Pm3 (constant pressure value) measured by the third pressure gauge P30 and the reference constant pressure value in the constant period of the execution period is calculated. This reference constant pressure value is determined before the execution period, and is the measured pressure value measured by the third pressure gauge P30 during the constant period of the reference period.

In the subsequent process ST602, it is determined whether the absolute difference ΔP3 is greater than the threshold Th31. When the absolute difference ΔP3 is greater than the threshold Th31, then the process ST7 is executed. On the other hand, when the absolute difference value ΔP3 is less than or equal to the threshold Th31, the immediate inspection process RP2 is ended. In addition, the process ST600 can also be repeatedly executed during the constant period of the execution period.

During the execution period, the gas system output from the flow controller FC(1) at a flow rate corresponding to the set flow rate flows to the third pipe L3. Therefore, the constant pressure value measured by the third pressure gauge P30 reflects the output flow rate of the flow controller FC(1) in the constant state. In addition, the reference constant pressure value is in a period earlier than the execution period (that is, the reference period), when the output flow rate of the flow controller FC (1) that outputs gas corresponding to the same set flow rate becomes a constant state The constant pressure value obtained by the third pressure gauge P30. Therefore, by determining whether the absolute value of the difference between the constant pressure value and the reference constant pressure value ΔP3 is greater than the threshold Th31, it can be determined whether the output flow rate of the constant state of the flow controller FC(1) during the execution period is from the reference period The output flow rate of the flow controller FC(1) in the constant state has changed.

Although the method of the embodiment has been described above, it is not necessary to perform all of the above-mentioned plural inspection processes, and only a few of the plural inspection processes may be executed.

ST61‧‧‧Calculate the first difference absolute value △P1 and the second difference absolute value △P2

ST62‧‧‧Calculate the average Ave

ST63‧‧‧△P1>Th1 or △P2>Th2 or Ave>Th3?

Claims (15)

A method for inspecting a gas supply system, the gas supply system is to supply gas into the processing container of a substrate processing apparatus; the gas supply system is provided with: a plurality of first pipes which are respectively connected to a plurality of gas sources; a plurality of first valves, Are respectively installed in the plural first piping; plural flow controllers are respectively installed downstream of the plural first piping, and respectively connected to the plural first piping; plural second piping are respectively installed in the plural flow control The downstream of the device is connected to the plural flow controllers; the plural second valves are respectively arranged in the plural second pipes; the third pipe is arranged downstream of the plural second pipes, and is connected to the plural second pipes. 2 piping; and a third valve, which is provided in the third piping; the third piping is connected to the processing vessel downstream of the third valve; the plurality of flow controllers respectively have: an orifice; a fourth piping, Extending upstream of the orifice and connected to the first piping; fifth piping, extending downstream of the orifice and connected to the second piping; control valve, connected to the fourth piping; first pressure gauge , Is used between the control valve and the orifice to measure the internal pressure of the fourth pipe; and, the second pressure gauge is used to measure the internal pressure of the fifth pipe; the method includes the following process: A process in which the gas flow rate supplied into the processing vessel is controlled by the first flow controller among the plurality of flow controllers, wherein the gas flow rate is controlled by the first flow controller corresponding to the set flow rate; in controlling the gas During the execution of the flow of the process, the process of opening one or more of the second valves among the plurality of second valves, and the one or more second valves are the second valves in the plurality of flow controllers that do not control more than one of the gas flow rates It is set downstream of the flow controller; the process of finding more than one absolute value of the first difference and more than one absolute value of the second difference, wherein the one or more first absolute values of the difference are individually in the first flow controller The output flow becomes constant The absolute value of the difference between the first constant pressure value and the first reference constant pressure value measured by the first pressure gauge of the one or more second flow controllers during the constant period of the normal state, The one or more second difference absolute values are the second constant pressure value and the second reference constant measured by the second pressure gauge of the one or more second flow controllers during the constant period. The absolute value of the difference between the normal pressure values. The first reference constant pressure value and the second reference constant pressure value are respectively determined earlier than the execution period, and the supply to the set flow rate is controlled in accordance with the set flow rate. When the output flow rate of the first flow controller for the gas flow rate in the processing vessel becomes the constant state, the first pressure gauge and the second pressure gauge are respectively controlled by the one or more second flow controllers. The measured measured pressure value, the first reference constant pressure value and the second reference constant pressure value are measured by the second flow controller in the constant state during the reference period before the execution period The process of obtaining the average value of the one or more first difference absolute values and the one or more second difference absolute values; and by determining whether the one or more first difference absolute values are individually greater than the first threshold , The process of determining whether the absolute value of the one or more second difference is greater than the second threshold value and whether the average value is greater than the third threshold value to determine the first flow controller during the execution period and in the constant state Whether the output flow rate of the first flow controller changes from the period of the reference period in the constant state. For example, the method for inspecting a gas supply system in the first item of the scope of patent application, wherein the one or more second flow controllers are the plurality of second flow controllers that do not control the gas flow during the implementation period; the one The above first absolute value of the difference and the one or more second absolute values of the difference are obtained by obtaining the first constant measured by the first pressure gauge of the plurality of second flow controllers during the constant period The absolute value of the difference between the pressure value and the first reference constant pressure value, and the second constant pressure value measured by the second pressure gauge of the plurality of second flow controllers during the constant period and the second constant pressure value. The complex first difference absolute value and the complex second difference absolute value obtained from the difference absolute value between the second reference constant pressure value; the average value is the difference between the complex first difference absolute value and the complex second difference absolute value average value; In the process of determining, it is determined whether the plurality of first absolute difference values are individually greater than the first threshold, whether the plurality of second absolute differences are individually greater than the second threshold, and whether the average value is greater than the third threshold. For example, the method of inspecting the gas supply system in item 1 or 2 of the scope of the patent application further includes the following process: finding the first time point in the transition period before the constant period in the implementation period The manufacturing process of the integrated value of the measured pressure value of the second pressure gauge of the flow controller; and the manufacturing process of comparing the integrated value with a predetermined reference value. For example, the method for inspecting the gas supply system in item 1 or 2 of the scope of the patent application further includes the following process: finding the one or more of the multiple points in the transition period before the constant period during the execution period The manufacturing process of the cumulative value of the measured pressure value of the first pressure gauge of the second flow controller; and the manufacturing process of comparing the cumulative value with a predetermined reference value. A method for inspecting a gas supply system, the gas supply system is to supply gas into the processing container of a substrate processing apparatus; the gas supply system is provided with: a plurality of first pipes which are respectively connected to a plurality of gas sources; a plurality of first valves, Are respectively installed in the plural first piping; plural flow controllers are respectively installed downstream of the plural first piping, and respectively connected to the plural first piping; plural second piping are respectively installed in the plural flow control The downstream of the device is connected to the plural flow controllers; the plural second valves are respectively arranged in the plural second pipes; the third pipe is arranged downstream of the plural second pipes, and is connected to the plural second pipes. 2 piping; and a third valve, which is provided in the third piping; the third piping is connected to the processing vessel downstream of the third valve; the plurality of flow controllers respectively have: an orifice; a fourth piping, Extending upstream of the orifice And connected to the first pipe; the fifth pipe, which extends downstream of the orifice and is connected to the second pipe; the control valve, which is connected to the fourth pipe; the first pressure gauge, which is connected to the control valve and The orifice is used to measure the internal pressure of the fourth pipe; and, the second pressure gauge is used to measure the internal pressure of the fifth pipe; the gas supply system is equipped to measure the internal pressure of the third pipe The third pressure gauge; the method includes the following process: a process for controlling the flow of gas supplied to the processing vessel through the first flow controller of the plurality of flow controllers, wherein the gas flow is in the first The flow controller is controlled corresponding to the set flow; the process of obtaining the absolute value of the difference, the absolute value of which is measured by the third pressure gauge during the constant period when the output flow of the first flow controller becomes a constant state The absolute value of the difference between the output constant pressure value and the reference constant pressure value. The reference constant pressure value is determined earlier than the execution period of the process that controls the gas flow, and is controlled corresponding to the set flow. The output flow rate of the first flow controller for the gas flow rate supplied to the processing vessel becomes the measured pressure value measured by the third pressure gauge when the constant state is reached, wherein the reference constant pressure value is determined by The period of the reference period before the execution period is the measured value measured by the third pressure gauge in a constant state; and by determining whether the absolute value of the difference is greater than the threshold value, it is determined during the period of the execution period. Whether the output flow rate of the first flow controller in the constant state changes from the period of the reference period to the output flow rate of the first flow controller in the constant state. For example, the method for inspecting the gas supply system in item 5 of the scope of the patent application further includes the following process: find the third pressure gauge in the execution period and the plural time points in the transition period before the constant period The process of measuring the accumulated value of the pressure value; and the process of comparing the accumulated value with the established reference value. A method for inspecting a gas supply system, the gas supply system is a device that supplies gas into a processing container of a substrate processing apparatus; the gas supply system is provided with: a plurality of first pipes which are respectively connected to a plurality of gas sources; The plural first valves are respectively installed in the plural first piping; plural flow controllers are respectively installed downstream of the plural first piping and connected to the plural first piping respectively; the plural second piping are respectively installed Downstream of the plurality of flow controllers and respectively connected to the plurality of flow controllers; a plurality of second valves are respectively provided in the plurality of second piping; the third piping is provided downstream of the plurality of second piping, and Connected to the plurality of second pipes; and a third valve, which is provided in the third pipe; the third pipe is connected to the processing vessel downstream of the third valve; the plurality of flow controllers respectively have: orifices; The fourth pipe extends upstream of the orifice and is connected to the first pipe; the fifth pipe extends downstream of the orifice and is connected to the second pipe; the control valve is connected to the fourth pipe ; The first pressure gauge is used to measure the internal pressure of the fourth pipe between the control valve and the orifice; and, the second pressure gauge is used to measure the internal pressure of the fifth pipe; the method includes The following process: a process for controlling the flow of gas supplied into the processing vessel via the first flow controller among the plurality of flow controllers, wherein the gas flow is controlled by the first flow controller corresponding to the set flow Control; during the execution of the process that controls the gas flow, the process of opening one or more of the second valves among the plurality of second valves, and the one or more second valves are in the plurality of flow controllers that do not control the gas flow It is installed downstream of more than one second flow controller; the process of obtaining the average value of the first difference absolute value of more than one and the average value of the second difference absolute value of more than one is to obtain the first difference absolute value of the one or more Value and the process of the one or more second difference absolute values, wherein the one or more first difference absolute values are individually achieved by the one or more during the constant period when the output flow of the first flow controller becomes a constant state The absolute value of the difference between the first constant pressure value measured by the first pressure gauge and the first reference constant pressure value of the second flow controller individually, and the second absolute value of the difference between the one or more absolute values During the constant period, the second constant pressure value measured by the second pressure gauge of the one or more second flow controllers and the second reference constant The absolute value of the difference between the pressure values, the first reference constant pressure value and the second reference constant pressure value are respectively determined earlier than the execution period, and the supply to the process is controlled according to the set flow rate When the output flow rate of the first flow controller of the gas flow rate in the container becomes the constant state, it is measured by the first pressure gauge and the second pressure gauge of the one or more second flow controllers respectively By determining whether the one or more first difference absolute values are individually greater than the first threshold, whether the one or more second absolute differences are individually greater than the second threshold, and whether the average value is greater than the third threshold , The control valve of the plurality of flow controllers further has a driving part, and the driving part includes a piezoelectric element, which is configured to move a valve body used in the opening and closing actions of the control valve; and, a control circuit, It is constituted by applying voltage to the piezoelectric element; further includes the following process: determining whether the applied voltage to the piezoelectric element of the first flow controller during the execution period is the same as the first flow control When the control valve of the device is fully opened, the reference voltage preset for the applied voltage of the piezoelectric element is the same, and it is determined whether the output flow rate of the first flow controller during the execution period is less than the set flow rate. For example, the method for inspecting the gas supply system of item 1, 2, 5, 6 or 7 in the scope of the patent application further includes the following process: determining the measurement of the first pressure gauge of the first flow controller during the execution period Whether the difference between the pressure value and the measured pressure value of the second pressure gauge of the first flow controller during the execution period is less than a predetermined value. For example, the method for inspecting the gas supply system of item 1, 2, 5, 6 or 7 of the scope of patent application further includes the following process: in the state where the internal gas of the plurality of flow controllers has been exhausted, determine the plurality of flow rates Whether the measured pressure value of the first pressure gauge of the individual controller is greater than the first predetermined value, and determine whether the measured pressure value of the second pressure gauge of the plurality of flow controllers is greater than the second predetermined value. For example, the method for inspecting the gas supply system of item 1, 2, 5, 6 or 7 in the scope of the patent application further includes the following process: in the state where the internal gas of the plurality of flow controllers has been exhausted, it is determined within a predetermined time Whether the absolute value of the difference between the moving average value of the plural measured pressure values measured by the first pressure gauge of the plural flow controller and the moving average value of the plural measured pressure values measured by the second pressure gauge is a predetermined value the above. For example, the method of inspecting the gas supply system in items 1, 2, 5, 6 or 7 of the scope of patent application is It further includes the following process: obtaining the first measured pressure value measured by the first pressure gauge of the plurality of flow controllers and the plurality of flow rates in a state where the plurality of first valves and the plurality of second valves are closed The manufacturing process of the second measured pressure value measured by the second pressure gauge of the individual controller; by inputting the first measured pressure value into a predetermined function, the second measured pressure value corresponding to the first measured pressure value is obtained The manufacturing process of the initial pressure value of the pressure gauge; and the manufacturing process of comparing the second measured pressure value with the initial pressure value. For example, the method for inspecting the gas supply system of item 1, 2, 5, 6 or 7 of the scope of patent application further includes the following process: when the plural first valves and the plural second valves are closed, it is determined that the predetermined The absolute value of the difference between the moving average value of the plural measured pressure values measured by the first pressure gauge of the plural flow controller and the moving average value of the plural measured pressure values measured by the second pressure gauge during the time Is it above the predetermined value? For example, the method for inspecting the gas supply system of item 1, 2, 5, 6 or 7 of the scope of patent application further includes the following process: when the control valve of the plural flow controller is closed, it is judged whether it passes The set time. A method for inspecting a gas supply system, the gas supply system is to supply gas into the processing container of a substrate processing apparatus; the gas supply system is provided with: a plurality of first pipes which are respectively connected to a plurality of gas sources; a plurality of first valves, Are respectively installed in the plural first piping; plural flow controllers are respectively installed downstream of the plural first piping, and respectively connected to the plural first piping; plural second piping are respectively installed in the plural flow control The downstream of the device is connected to the plural flow controllers; the plural second valves are respectively arranged in the plural second pipes; the third pipe is arranged downstream of the plural second pipes, and is connected to the plural second pipes. 2 piping; and a third valve, which is provided in the third piping; the third piping is connected to the processing vessel downstream of the third valve; The plurality of flow controllers respectively have: an orifice; a fourth pipe extending upstream of the orifice and connected to the first pipe; a fifth pipe extending downstream of the orifice and connected to the second pipe ; The control valve is located in the fourth pipe; the first pressure gauge is used between the control valve and the orifice to measure the internal pressure of the fourth pipe; and the second pressure gauge is used to measure The internal pressure of the fifth piping; the method includes the following process: a process of controlling the flow of gas supplied into the processing vessel through the first flow controller among the plurality of flow controllers, wherein the gas flow is at The first flow controller is controlled corresponding to the set flow; during the execution of the process that controls the gas flow, one or more of the second valves are opened in the process of the second valve, and the one or more second valves are connected to Among the plurality of flow controllers, the one installed downstream of the second flow controller that does not control more than one of the gas flow; the process of finding the average value of more than one first difference absolute value and more than one second difference absolute value, The process of obtaining the absolute value of the one or more first difference and the absolute value of the second difference of the one or more, wherein the absolute value of the first difference of the one or more is that the output flow rate of the first flow controller becomes constant During the constant period of the state, the absolute value of the difference between the first constant pressure value measured by the first pressure gauge of the one or more second flow controllers and the first reference constant pressure value, the The one or more second difference absolute values are the second constant pressure value and the second reference constant measured by the second pressure gauge of the one or more second flow controllers during the constant period. The absolute value of the difference between the pressure values, the first reference constant pressure value and the second reference constant pressure value are respectively determined earlier than the execution period, and the supply to the process is controlled according to the set flow rate When the output flow rate of the first flow controller of the gas flow rate in the container becomes the constant state, it is measured by the first pressure gauge and the second pressure gauge of the one or more second flow controllers respectively By determining whether the one or more first difference absolute values are individually greater than the first threshold, whether the one or more second absolute differences are individually greater than the second threshold, and whether the average value is greater than the third threshold , The control valve of the plurality of flow controllers further has a driving part, and the driving part includes a piezoelectric element, which is configured to move a valve body used in the opening and closing actions of the control valve; and, a control circuit, It is constructed by applying voltage to the piezoelectric element; It further includes the following process: when the applied voltage to the piezoelectric element of the plurality of flow controllers and the control valve of the flow controller are closed, the reference voltage is set in advance as the applied voltage to the piezoelectric element If it is the same, it is determined whether the measured pressure value of the first pressure gauge of the plural flow controller has increased above the predetermined value. For example, the method for inspecting the gas supply system of item 14 of the scope of patent application further includes the following process: when the plurality of second valves are individually closed, the applied voltage of the piezoelectric element of the plurality of flow controllers and the reference If the voltage is the same, it is determined whether the measured pressure value of the first pressure gauge of the plurality of flow controllers has decreased.

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