KR101523227B1 - System and method for checking refrigerant leakage of temperature control system for semiconductor manufacturing process facilities using an intermediation of gas - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a refrigerant leak check system and a checking method for a refrigerant leakage temperature control system using a gas medium, and more particularly, A compressor for increasing the pressure of the gas refrigerant flowing out of the process facility through a first transfer line having a first transfer line and a second transfer line having a second electronic control valve and a second pressure sensor, A main body having a condenser for condensing the refrigerant and a liquid receiver for temporarily storing the gas refrigerant flowing from the condenser through the third transfer line, a third electronic control valve and a third pressure sensor The amount of gas refrigerant flowing from the receiver through the fourth transfer line is controlled so that the gas is supplied to the process facility through the fifth transfer line including the fourth electronic control valve and the fourth pressure sensor And a gas refrigerant conveyed through the second conveyance line is branched to flow through the sixth conveyance line having the fifth electronic control valve and the fifth pressure sensor to the gas refrigerant flowing from the compressor through the sixth conveyance line And a second electronic expansion valve for supplying the gas refrigerant to the fifth transfer line through a seventh transfer line having a sixth electronic control valve, the second electronic expansion valve being connected to the first electronic control valve, And a supply line having an eighth electronic control valve for supplying a gas refrigerant to a fifth transfer line from a supply tank equipped with a level sensor, A setting unit for setting a first pressure value or a second pressure value of a pressure sensed through each of the pressure sensors; An alarm part for generating an alarm when the measured pressure is lower than a predetermined pressure value, and a control part for controlling the respective electronic control valves in an integrated manner. The gas-mediated semiconductor manufacturing system according to claim 1, Checking system.
According to the present invention, it is possible to check the leakage of the refrigerant filled in the flow path without interrupting the operation of the temperature control system using gas as the refrigerant in the semiconductor manufacturing process facility, so that the efficiency of the manufacturing process is increased, There is an effect of controlling the temperature of a semiconductor manufacturing process facility.
Further, it is easy to maintain the temperature control system using the gas as the refrigerant in the semiconductor manufacturing process facility, and the leakage of the refrigerant is minimized.
In addition, since the temperature control system can be forcibly stopped when the refrigerant filled in the flow path of the temperature control system leaks more than a preset value, there is an effect of preventing the risk that the semiconductor manufacturing process equipment is applied.

Description

TECHNICAL FIELD [0001] The present invention relates to a refrigerant leakage check system for a semiconductor manufacturing system using a gas as a medium, and a refrigerant leakage checking method using the refrigerant leakage checking system.

The present invention relates to a refrigerant leakage check system for a semiconductor manufacturing process control system, and more particularly, to a refrigerant leak check system for a semiconductor manufacturing process, which does not use a liquid cooling fluid and is filled in a flow path of a temperature control system for controlling the temperature of a semiconductor manufacturing process facility The present invention relates to a refrigerant leakage check system and a checking method in a semiconductor manufacturing facility construction cost temperature control system using a gas as a medium to check whether a refrigerant is leaked.

Generally, in the process of manufacturing semiconductors and LCDs, the internal temperature of the electrostatic chuck, the heater, and the chamber must be kept constant at all times, The equipment that plays the role of maintenance is called a chiller.

Such semiconductor and LCD process equipments are subjected to thermal load during the manufacturing process of semiconductors and the temperature rises. Semiconductor and LCD chillers are used to circulate the cooling fluid inside electrostatic chuck, heater and chamber by using a pump The heat load is removed by chiller to remove heat.

In this case, the semiconductor and LCD chiller can be classified into a low-temperature chiller and a high-temperature chiller according to the target cooling temperature of the cooling fluid recovered to the main body, and the low-temperature chiller generally uses a cooling cycle using a freon gas, And a high temperature chiller (or a heat exchanger type chiller) is a system for cooling a cooling fluid by using a predetermined refrigerant.

In a conventional method for checking refrigerant leakage in a semiconductor manufacturing cost control system, the refrigerant is checked for leakage by pressurizing or depressurizing the refrigerant in a flow path through which the refrigerant moves while the entire system is stopped.

In other words, there has been a problem that the efficiency of the manufacturing process is lowered due to the inevitable interruption of the entire process facility because the refrigerant leakage can not be checked during the operation of the temperature control system.

Further, even if the refrigerant leaks out during the operation of the temperature control system, it is impossible to detect the leakage of the refrigerant in advance, so that the temperature control of the semiconductor manufacturing process facility is disabled and serious risk of the semiconductor manufacturing process occurs.

Korean Utility Model Publication No. 20-2008-0004784 (published on October 22, 2008) Korean Registered Patent No. 10-1109728 (issued on January 18, 2012) Korean Registered Patent No. 10-1109730 (issued on February 24, 2012) Korean Registered Patent No. 10-0927391 (published on Nov. 19, 2009)

Disclosure of Invention Technical Problem [8] Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a semiconductor manufacturing process facility, which is capable of detecting gas leaks when the refrigerant is filled in a channel of a temperature control system using gas as a refrigerant, And to provide a refrigerant leakage check system and a checking method of the temperature control system.

It is a further object of the present invention to provide a semiconductor manufacturing process facility in which a temperature control system using a gas as a refrigerant in a semiconductor manufacturing process facility can be easily maintained and the leakage of the refrigerant can be minimized, System and a method for checking refrigerant leakage of the system.

It is a further object of the present invention to provide a method and system for controlling the temperature of a refrigerant in a semiconductor manufacturing system, which is capable of forcibly stopping a temperature control system when a refrigerant filled in a flow path of a temperature control system leaks more than a predetermined value, Leakage inspection system and inspection method.

According to an aspect of the present invention, there is provided a method for controlling a gas refrigerant flow rate of a gas refrigerant discharged from a process facility through a first transfer line including a first electronic control valve and a first pressure sensor, A condenser for condensing the gas refrigerant introduced from the compressor through a second transfer line having a second electronic control valve and a second pressure sensor, A main body having a liquid receiver in which the gas refrigerant introduced from the condenser is temporarily stored, a second portion including a third flow path through which the refrigerant flows from the liquid receiver through the fourth transfer line including the third electronic control valve and the third pressure sensor, A first electronic expansion valve for controlling the amount of gas refrigerant to supply the gas refrigerant to the process facility through a fifth transfer line including a fourth electronic control valve and a fourth pressure sensor, Is controlled to control the amount of the gas refrigerant flowing in from the compressor through the sixth transfer line including the fifth and the fifth pressure sensors so that the gas refrigerant having the sixth electronic control valve And a second electronic expansion valve for supplying the gas refrigerant to the fifth transfer line via a seventh transfer line, wherein the temperature control portion is branched between the process facility and the first electronic control valve, And a supply line having an eighth electronic control valve for supplying a gas refrigerant to the fifth transfer line from a supply tank equipped with a level sensor, A setting unit configured to set a first pressure value or a second pressure value of a pressure sensed through each of the pressure sensors; It characterized in that it comprises, when the pressure is below a predetermined value by the alarm unit to the alarm generating section, and a main controller unit having a control unit which integrates control of each of the electromagnetic control valve.

The main body includes a reservoir tank in which the gas refrigerant introduced from the compressor is stored through an eighth conveyance line having a ninth electromagnetic control valve and a reservoir tank branched from the first conveyance line and having a tenth electronically controlled valve, And a vacuum pump installed in the transfer line.

And the temperature control unit is disposed closer to the process facility than the main body unit.

According to another aspect of the present invention, there is provided a method of controlling a microcomputer comprising a first step of setting a sensing value of a first pressure sensor and a sensing value of a second pressure sensor to a first pressure value and a second pressure value, respectively, A second step of receiving, when a sensed value of the first pressure sensor and the second pressure sensor reaches a first pressure value, a first alarm being received by the receiving unit and generating an alarm through the alarm unit; A third step of receiving a second alarm through the alarm unit when the sensed value of the pressure sensor reaches a second pressure value, and receiving a second alarm through the alarm unit when the sensed value of the pressure sensor reaches a second pressure value; And the seventh electronic control valve is blocked.

The present invention can check the leakage of the refrigerant filled in the flow path without interrupting the operation of the temperature control system using the gas as the refrigerant in the semiconductor manufacturing process facility, so that the manufacturing process efficiency is improved, There is an effect of controlling the temperature of the process facility.

In addition, the present invention facilitates maintenance of a temperature control system using gas as a refrigerant in a semiconductor manufacturing process facility, and has an effect of minimizing leakage of refrigerant.

In addition, since the temperature control system can be forcibly stopped when the refrigerant filled in the flow path of the temperature control system leaks more than a predetermined value, the present invention has an effect of preventing the risk of equipment installation in the semiconductor manufacturing process.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate preferred embodiments of the invention and, together with the description, serve to further the understanding of the technical idea of the invention, And shall not be construed as interpretation.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view showing an example of a refrigerant leakage checking system of a semiconductor manufacturing facility construction cost control system using gas as an embodiment of the present invention;
FIG. 2 is a flowchart showing a method of checking refrigerant leakage in a semiconductor manufacturing facility construction cost control system using gas as an embodiment of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of a system and method for inspecting refrigerant leakage in a semiconductor manufacturing facility construction temperature control system according to the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a view illustrating a refrigerant leakage check system of a semiconductor manufacturing facility construction temperature control system using a gas as a medium according to an embodiment of the present invention. FIG. 2 is a cross- FIG. 2 is a flowchart showing a refrigerant leak check method of a dead-cost temperature control system. FIG.

Referring to FIGS. 1 and 2, a refrigerant leakage inspection system of a gas-mediated semiconductor manufacturing plant construction temperature control system according to a preferred embodiment of the present invention includes a process facility 100, a main body unit 200, a temperature control unit 300 and a main controller 400, which will be described in detail as follows.

First, the process facility 100 refers to a process facility used in a manufacturing process of a semiconductor, such as an electrostatic chuck, a heater, and a chamber.

In addition, the process facility 100 controls the temperature of the process facility 100 while the gaseous refrigerant is circulated.

The main body 200 includes a compressor 210 for compressing the gas refrigerant to high temperature and high pressure, a condenser 220 for condensing the gas refrigerant, and a receiver 230 for temporarily storing the gas refrigerant.

The temperature control unit 300 includes a first electronic expansion valve 310 and a second electronic expansion valve 320.

It is preferable that the temperature control unit 300 is located closer to the process facility 100 than the main body 200. That is, the first electronic expansion valve 310 and the second electronic expansion valve 320 is located near the process facility 100, there is an advantage in that the accuracy of temperature control of the gas coolant flowing into the process facility 100 and controlling the temperature is improved.

That is, by separating the main body 200, which occupies a lot of space, and the temperature controller 300, which is relatively small in volume and occupying less space, the space can be efficiently utilized and the temperature can be controlled more precisely .

Here, the first electronic expansion valve 310 and the second electronic expansion valve 320 are connected to each other at a temperature sensed by a main temperature sensor (not shown) that can be installed on the process facility 100 or the transfer line Respectively, the opening degree is adjusted.

That is, in the case of the first electronic expansion valve 310, the temperature of the process facility 100 is controlled through relatively low-temperature gas refrigerant, and the second electronic expansion valve 320 is controlled by the gas refrigerant The temperature of the process facility 100 is controlled.

That is, for example, the refrigerant controlling the low temperature passes through the first electronic expansion valve 310 at a high pressure and a low temperature and is transformed to a temperature of about minus 20 degrees or less to control the low temperature and the refrigerant for controlling the high temperature, ) To the second electronic expansion valve (320) and is thermally turned to a temperature of about 70 to 80 degrees to control the high temperature.

Here, the receiver 230 condenses the high-temperature and high-pressure gas refrigerant supplied from the compressor 210 to the PCW (Process Cooling Water) in the condenser 220, and then supplies the gas refrigerant to the first electronic expansion valve And is stored temporarily before being sent to the compressor 310. When at least one process facility is operated using one compressor 210, a disturbance such as a set temperature conversion of a different process facility or a change in a cooling load is applied It is possible to stabilize the overall refrigeration cycle system.

The main body 200 includes a reservoir tank 240 in which the gas refrigerant introduced from the compressor 210 is stored, and a reservoir tank 240 for removing impurities such as air or other foreign matter remaining in the respective transfer lines. And a vacuum pump 290 for removing impurities by making vacuum.

A supply line 360 may be further provided to supply the discharge line 350 and the gas refrigerant from the supply tank 370 equipped with the level sensor 371.

The main controller 400 includes a receiving unit 410, a setting unit 420, an alarm unit 430, and a control unit 440.

The receiving unit 410 receives a pressure value sensed by each of the pressure sensors and a sensed value of the level sensor 371.

The setting unit 420 sets a first pressure value or a second pressure value of the pressure sensed through each of the pressure sensors.

The alarm unit 430 generates an alarm when the preset pressure value is exceeded by the setting unit 420.

The controller 440 integrally controls the respective electronic control valves.

Hereinafter, a refrigerant leakage checking system and a checking method of a semiconductor manufacturing facility air conditioning system according to the present invention will be described with reference to FIGS. 1 and 2. FIG.

First, as described above, the refrigerant leakage check system and the checking method of the gas phase medium temperature semiconductor manufacturing system according to the preferred embodiment of the present invention include a first circulation path for controlling the temperature at a low temperature, And a second circulation path for controlling the temperature of the exhaust gas.

The gas refrigerant discharged from the process facility 100 flows into the compressor 210 through the first transfer line 110. In the first circulation path,

At this time, a first electromagnetic control valve 111 and a first pressure sensor 112 are installed in the first transfer line 110 and are discharged from the process facility 100 through the first transfer line 110 The gas refrigerant can be shut off by the first electromagnetic control valve 111 and the gas refrigerant pressure inside the first transfer line 110 is sensed by the first pressure sensor 112.

Then, the gas refrigerant introduced into the compressor 210 and pressurized at a high temperature and a high pressure is discharged and flows into the condenser 220 through the second transfer line 250.

A second electromagnetic control valve 251 and a second pressure sensor 252 are installed in the second transfer line 250 and the gas discharged from the compressor 210 through the second transfer line 250 The refrigerant can be shut off by the second electromagnetic control valve 251 and the gas refrigerant pressure inside the second transfer line 250 is sensed by the second pressure sensor 252.

Here, a reservoir tank 240 in which gas refrigerant flowing from the compressor 210 is stored through an eighth conveyance line 242 having a tenth electronic control valve 241 is provided.

That is, when the gas refrigerant flowing through the second conveyance line 250 is blocked by the second electromagnetic control valve 251, the ninth electromagnetic control valve 241 is opened and the eighth conveyance line 242 is opened, The gas refrigerant is introduced into the reservoir tank 240 through the gas cooler.

The condensed gas refrigerant flowing into the condenser 220 is then discharged through the third transfer line 260 into the receiver 230 and temporarily stored.

Then, the gas refrigerant flowing into the receiver (230) and temporarily stored therein flows into the first electronic expansion valve (310) through the fourth transfer line (270).

At this time, a third electromagnetic control valve 271 and a third pressure sensor 272 are installed on the fourth conveyance line 270 and are discharged from the receiver 230 through the fourth conveyance line 270 The gas refrigerant can be shut off by the third electromagnetic control valve 271 and the gas refrigerant pressure inside the fourth transfer line 270 is sensed by the third pressure sensor 272. [

Then, the gas refrigerant that flows into the first electronic expansion valve 310 and is thermally expanded is introduced into the process facility 100 through the fifth transfer line 330.

A fourth electromagnetic control valve 331 and a fourth pressure sensor 332 are installed in the fifth conveyance line 330 and are connected to the first electronic expansion valve 310 through the fifth conveyance line 330. [ The gas refrigerant discharged from the second transfer line 330 can be blocked by the fourth electromagnetic control valve 331 and the pressure of the gas refrigerant inside the fifth transfer line 330 is sensed by the fourth pressure sensor 332.

In the second circulation path, the gas refrigerant pressurized at the high temperature and high pressure fed through the second transfer line 250 branches and flows through the sixth conveying line 280 to the second electronic expansion valve (320).

In this case, a fifth electromagnetic control valve 281 and a fifth pressure sensor 282 are installed in the sixth conveyance line 280 so that gas refrigerant branched through the sixth conveyance line 280 flows into the fifth electron The pressure of the gas refrigerant in the sixth transfer line 280 is sensed by the fifth pressure sensor 282.

Then, the gas refrigerant introduced into the second electronic expansion valve 320 is transferred through the seventh transfer line 340 to the fifth transfer line 330.

At this time, a sixth electronic control valve 341 is installed on the seventh transfer line 340 so that the gas refrigerant discharged from the second electronic expansion valve 320 through the seventh transfer line 340 flows through the seventh transfer line 340, 6 electromagnetic control valve 341. [0156]

In the case of the first circulation path, the refrigerant for the relatively high temperature control is circulated for the relatively low temperature control, and the refrigerant for the relatively high temperature control is circulated in the second circulation path.

A discharge line 350 branched from the process facility 100 and the first electronic control valve 111 and having a seventh electronic control valve 351; And a supply line 360 that supplies the refrigerant from the supply tank 370 equipped with the level sensor 371 and includes the eighth electronic control valve 361. [

A receiving unit 410 receives a pressure value sensed by each of the pressure sensors and a sensed value of the level sensor 371, and a first pressure value or a second pressure of the pressure sensed through the respective pressure sensors, An alarm unit 430 for generating an alarm when a preset pressure value is exceeded by the setting unit 420 and a control unit for integrally controlling the electronic control valves And a main controller 400 having a controller 440.

That is, after setting the first pressure sensor 112 and the second pressure sensor 252 to a first pressure value or a second pressure value through the setting unit 420, if gas refrigerant leakage occurs If the value of the first pressure sensor 112 and the second pressure sensor 252 reaches the first pressure value according to the degree of leakage, the signal is received by the receiving unit 410 and is transmitted to the alarm unit 430 through the primary alarm And when the first pressure sensor 112 and the second pressure sensor 252 reach a second pressure value, the signal is received by the receiving unit 410 and is transmitted to the alarm unit 430 through the secondary alarm The control unit 440 interrupts the first to sixth electronic control valves to stop the operation of the temperature control system.

Accordingly, the interval of the leakage is determined according to the change of the values of the first to sixth pressure sensors 282, and the measured value of the level sensor 371 of the supply tank 370 is received by the receiving unit 410 The amount of leakage can be judged.

Hereinafter, referring to FIG. 2, a method of checking refrigerant leakage in a gas-mediated semiconductor manufacturing plant construction cost temperature control system according to an embodiment of the present invention will be described.

First, the setting values of the first pressure sensor 112 and the second pressure sensor 252 are set to a first pressure value and a second pressure value, respectively, by the setting unit 420 of the main controller unit 400 (Step S100).

Then, when the sensed values of the first pressure sensor 112 and the second pressure sensor 252 reach the first pressure value, the receiving unit 410 receives the sensed value and the alarm unit 430 A primary alarm (danger) occurs (step 200).

When the sensed values of the first pressure sensor 112 and the second pressure sensor 252 reach the second pressure value, the receiving unit 410 receives the sensed value and the alarm unit 430 A secondary alarm (warning) is generated (step 300).

Finally, when the sensed values of the first pressure sensor 112 and the second pressure sensor 252 reach the second pressure value, the first to sixth electronic control valves are shut off by the control unit 440, The operation of the control system is interrupted (step 400).

As described above, when the temperature control system detects the change of the pressure of the refrigerant gas in the passage during the operation of the temperature control system and the alarm value is out of the range of the danger value and warning value, the first to sixth electronic control valves are shut off The leakage of the refrigerant gas is minimized by restricting the progress of the temperature control system, and even when the temperature control system is restored, only the leaked portion is accurately determined and processed, It is.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, And such variations and modifications are intended to fall within the scope of the appended claims.

100: Process equipment
110: 1st transfer line
111: first electronic control valve
112: first pressure sensor
200:
210: compressor
220: condenser
230: Receiver
240: reservoir tank
241: the ninth electronic control valve
242: Eighth conveyance line
250: 2nd transfer line
251: second electronic control valve
252: second pressure sensor
260: Third transfer line
270: Fourth transfer line
271: third electronic control valve
272: Third pressure sensor
280: Sixth transfer line
281: fifth electronically controlled valve
282: fifth pressure sensor
290: Vacuum pump
291: 10th electronically controlled valve
292: Ninth conveying line
300: Temperature controller
310: first electronic expansion valve
320: second electronic expansion valve
330: fifth transfer line
331: fourth electronically controlled valve
332: Fourth pressure sensor
340: seventh transfer line
341: Sixth electronically controlled valve
350: exhaust line
351: seventh electronically controlled valve
360: Supply line
361: Eighth electronic control valve
370: Supply tank
371: Level sensor
400: main controller unit
410:
420: Setting section
430:
440:

Claims (4)

A process facility 100 in which the gas refrigerant is circulated;
A compressor 210 for increasing the pressure of the gas refrigerant flowing out of the processing facility 100 through a first transfer line 110 having a first electronic control valve 111 and a first pressure sensor 112; )Wow,
A condenser 220 for condensing the gas refrigerant introduced from the compressor 210 through a second transfer line 250 having a second electronic control valve 251 and a second pressure sensor 252, ,
A main body 200 having a liquid receiver 230 for temporarily storing the gas refrigerant introduced from the condenser 220 through a third transfer line 260;
The amount of the gas refrigerant introduced from the receiver 230 through the fourth transfer line 270 having the third and the third pressure sensors 271 and 272 is controlled to control the amount of the gas refrigerant flowing from the fourth electronically- (310) for supplying the gas refrigerant to the process facility (100) through a fifth transfer line (330) having a first pressure sensor (331) and a fourth pressure sensor (332) The gas refrigerant delivered through line 250 is diverted and flows from compressor 210 through a sixth feed line 280 having a fifth electronic control valve 281 and a fifth pressure sensor 282 A second electronic expansion valve 320 for controlling the amount of the gas refrigerant to supply the gas refrigerant to the fifth transfer line 330 through a seventh transfer line 340 having a sixth electronic control valve 341 And a temperature control unit 300,
A discharge line 350 branched from the process facility 100 and the first electronic control valve 111 to provide a seventh electronic control valve 351; And a supply line (360) supplied from a supply tank (370) equipped with a level sensor (371) and equipped with an eighth electronic control valve (361)
A receiving unit 410 receiving a pressure value sensed by each of the pressure sensors and a sensed value of the level sensor 371, a first pressure value or a second pressure value of a pressure sensed through the respective pressure sensors, An alarm unit 430 for generating an alarm when the pressure value is lower than a predetermined pressure value by the setting unit 420 and a control unit 440 for integrally controlling each of the electronic control valves And a main controller 400,
The main body 200 includes a reservoir tank 240 in which the gas refrigerant introduced from the compressor 210 is stored through an eighth conveyance line 242 having a ninth electronic control valve 241, And a vacuum pump (290) installed in a ninth transfer line (292) branched from the first transfer line (110) and having a tenth electronic control valve (291). Refrigerant leakage monitoring system in temperature control system. delete The method according to claim 1,
Wherein the temperature control unit (300) is disposed closer to the process facility (100) than the main body unit (200). A refrigerant leakage check method using a refrigerant leakage check system of a semiconductor manufacturing construction equipment cost gas temperature control system having gas as a mediator according to claim 1,
a) in which the sensed values of the first pressure sensor 112 and the second pressure sensor 252 are set to the first pressure value and the second pressure value, respectively, by the setting unit 420 of the main controller unit 400, step;
When the sensed values of the first pressure sensor 112 and the second pressure sensor 252 reach the first pressure value, the first pressure sensor 112 and the second pressure sensor 252 are received by the receiving unit 410, Step 2;
b) If the sensed values of the first pressure sensor 112 and the second pressure sensor 252 reach a second pressure value, the signal is received by the receiving unit 410, and a secondary alarm A third step in which the first electrode is formed; And
and c) when the second alarm is generated through the alarm unit (430), the control unit (440) interrupts the first to sixth electronic control valves. Of refrigerant leakage.

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