JP2007220700A5 - - Google Patents
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- Publication number
- JP2007220700A5 JP2007220700A5 JP2006036026A JP2006036026A JP2007220700A5 JP 2007220700 A5 JP2007220700 A5 JP 2007220700A5 JP 2006036026 A JP2006036026 A JP 2006036026A JP 2006036026 A JP2006036026 A JP 2006036026A JP 2007220700 A5 JP2007220700 A5 JP 2007220700A5
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- plasma processing
- processed
- generator according
- apparatus characterized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006036026A JP4883556B2 (ja) | 2006-02-14 | 2006-02-14 | マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006036026A JP4883556B2 (ja) | 2006-02-14 | 2006-02-14 | マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007220700A JP2007220700A (ja) | 2007-08-30 |
| JP2007220700A5 true JP2007220700A5 (https=) | 2009-04-02 |
| JP4883556B2 JP4883556B2 (ja) | 2012-02-22 |
Family
ID=38497693
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006036026A Expired - Fee Related JP4883556B2 (ja) | 2006-02-14 | 2006-02-14 | マイクロ波透過窓、マイクロ波プラズマ発生装置及びマイクロ波プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4883556B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4793662B2 (ja) * | 2008-03-28 | 2011-10-12 | 独立行政法人産業技術総合研究所 | マイクロ波プラズマ処理装置 |
| KR20110010643A (ko) * | 2008-08-08 | 2011-02-01 | 도쿄엘렉트론가부시키가이샤 | 마이크로파 플라즈마 발생 장치 및 마이크로파 플라즈마 처리 장치 |
| WO2011122422A1 (ja) * | 2010-03-30 | 2011-10-06 | 東京エレクトロン株式会社 | プラズマ処理装置、および誘電体窓 |
| JP6850636B2 (ja) * | 2017-03-03 | 2021-03-31 | 東京エレクトロン株式会社 | プラズマ処理装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04173969A (ja) * | 1990-11-08 | 1992-06-22 | Nippon Telegr & Teleph Corp <Ntt> | 薄膜形成装置 |
| JP3155199B2 (ja) * | 1996-04-12 | 2001-04-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| JP2000012291A (ja) * | 1998-06-22 | 2000-01-14 | Sumitomo Metal Ind Ltd | プラズマ処理装置 |
| JP4680400B2 (ja) * | 2001-02-16 | 2011-05-11 | 東京エレクトロン株式会社 | プラズマ装置及びその製造方法 |
-
2006
- 2006-02-14 JP JP2006036026A patent/JP4883556B2/ja not_active Expired - Fee Related
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