JP2007219513A5 - - Google Patents
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- Publication number
- JP2007219513A5 JP2007219513A5 JP2007012437A JP2007012437A JP2007219513A5 JP 2007219513 A5 JP2007219513 A5 JP 2007219513A5 JP 2007012437 A JP2007012437 A JP 2007012437A JP 2007012437 A JP2007012437 A JP 2007012437A JP 2007219513 A5 JP2007219513 A5 JP 2007219513A5
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive composition
- terpene hydrocarbon
- mass
- solvent
- composition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- -1 terpene hydrocarbon Chemical class 0.000 claims 18
- 229930195733 hydrocarbon Natural products 0.000 claims 13
- 235000007586 terpenes Nutrition 0.000 claims 13
- 239000004215 Carbon black (E152) Substances 0.000 claims 12
- 239000007788 liquid Substances 0.000 claims 8
- 239000002904 solvent Substances 0.000 claims 7
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 claims 6
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 claims 4
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims 4
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 claims 4
- BGTOWKSIORTVQH-UHFFFAOYSA-N cyclopentanone Chemical compound O=C1CCCC1 BGTOWKSIORTVQH-UHFFFAOYSA-N 0.000 claims 4
- 239000000049 pigment Substances 0.000 claims 3
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 claims 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 claims 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 2
- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 claims 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-M hexanoate Chemical compound CCCCCC([O-])=O FUZZWVXGSFPDMH-UHFFFAOYSA-M 0.000 claims 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 claims 2
- LFJQCDVYDGGFCH-JTQLQIEISA-N (+)-β-phellandrene Chemical compound CC(C)[C@@H]1CCC(=C)C=C1 LFJQCDVYDGGFCH-JTQLQIEISA-N 0.000 claims 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 claims 1
- 150000001298 alcohols Chemical class 0.000 claims 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical class OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims 1
- 150000001733 carboxylic acid esters Chemical class 0.000 claims 1
- 150000004292 cyclic ethers Chemical class 0.000 claims 1
- 125000004122 cyclic group Chemical group 0.000 claims 1
- 150000002148 esters Chemical class 0.000 claims 1
- LYCAIKOWRPUZTN-UHFFFAOYSA-N ethylene glycol Natural products OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 claims 1
- 150000002576 ketones Chemical class 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 150000003464 sulfur compounds Chemical class 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007012437A JP4762162B2 (ja) | 2006-01-23 | 2007-01-23 | 感光性組成物除去液 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006013920 | 2006-01-23 | ||
| JP2006013920 | 2006-01-23 | ||
| JP2007012437A JP4762162B2 (ja) | 2006-01-23 | 2007-01-23 | 感光性組成物除去液 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007219513A JP2007219513A (ja) | 2007-08-30 |
| JP2007219513A5 true JP2007219513A5 (enExample) | 2009-11-19 |
| JP4762162B2 JP4762162B2 (ja) | 2011-08-31 |
Family
ID=38496804
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007012437A Active JP4762162B2 (ja) | 2006-01-23 | 2007-01-23 | 感光性組成物除去液 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4762162B2 (enExample) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3693143B2 (ja) * | 1997-12-26 | 2005-09-07 | 株式会社ジャパンエナジー | ウエハ洗浄用組成物及びそれを用いた洗浄方法 |
| JP5552214B2 (ja) * | 2008-03-11 | 2014-07-16 | キヤノン株式会社 | 焦点検出装置 |
-
2007
- 2007-01-23 JP JP2007012437A patent/JP4762162B2/ja active Active
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